JP2011141127A - Visual inspection method and visual inspection device for defect part of glass plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a visual inspection method and a device for a defect part of a glass plate for simply creating conditions allowing visual observation from front without imposing impossible posture on an inspector, and reasonably, certainly, and safely detecting a defect part of a large-sized glass plate for FPD. <P>SOLUTION: The device includes: a fixing frame 10, a stage 50, and a lighting device 70. The glass plate to be examined can be disposed at the front face of the stage 50 so that the glass plate is in a position backward tilted at an angle of 5° to 15° with respect to the vertical of the stage. The stage 50 is supported on the fixed frame so as to be movable in a vertical direction and rotatable in a vertical direction, while maintaining the glass plate in the position backward tilted. The lighting device 70 emits inspection light toward inside of the glass plate from both a left edge and a right edge of the glass plate disposed on the stage. The stage is provided with a plurality of supporting pins 52 that support the back face of the glass plate spaced apart from the stage. The each supporting pin is provided with a ball rotatably at a tip thereof for allowing easy move of the glass plate in the right-and-left direction. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a visual inspection method and a visual inspection apparatus for a defective portion of a glass plate.

  In general, a large and thin rectangular glass plate is used for a glass substrate for a flat panel display (FPD) such as a liquid crystal display or a plasma display. Such a glass plate is characterized by a very thin thickness of, for example, 0.5 to 0.7 mm and a large size. In particular, in recent years, the size of glass plates used as glass substrates for FPDs has increased, and what is called G7 size is 1870 mm × 2200 mm.

  By the way, in the glass plate, in addition to surface defects such as scratches, internal defects due to mixing of bubbles and foreign matters may exist. Since the glass plate for FPD is used as a display device, if there is such an optical defect, the product quality as the display device is impaired. Therefore, the process of inspecting the FPD glass plate for defects is extremely important in the glass plate manufacturing process.

  Conventionally, as a method for inspecting defects in such a glass plate, a method for detecting scattered light due to irregular reflection at the defect portion K by irradiating the glass plate G with inspection light 71 as shown in FIG. It has been known. Such a defect inspection method using scattered light utilizes the property that light rays irradiated onto a glass plate hit a defect such as scratches, bubbles, and foreign matters present on the glass plate and diffusely reflect. As shown in FIG. 14B, the scattered light irregularly reflected by the defective portion K can be visually confirmed from the outside of the glass plate G, and can also be visually confirmed by a monitor image via an imaging device or the like.

  As a known example of this type of defect inspection method, Patent Document 1 discloses that a plurality of plate glasses are aligned in a thickness direction on a rack carriage in the vertical direction, and one of them is placed on the outside of the effective surface by an elevator. The part is supported and moved to an upper inspection table where external light is blocked, and the first projector irradiates the inspection light from the oblique direction on one side of the plate glass, and detects the scattered light due to the defect on the other side. The projector emits inspection light toward the inside of the plate glass, and after detecting scattered light due to defects on the surface side of the plate glass, the plate glass is separated from the inspection table by an elevator and returned to the original position of the rack carriage. Are listed.

  Also, in Patent Document 2, inspection light is irradiated into the glass from the side end face of the plate glass, the surface of the plate glass is imaged from the surface side of the plate glass, and the brightness of the image per fixed area is detected to determine the defect. A method for determining defects based on the ratio of the brightness of an image obtained by illuminating the inside of the glass from the side edge surface of the plate glass and imaging the surface of the plate glass from the surface side of the plate glass, and the brightness of the image when the surface is directly illuminated Further, illuminate the inside of the glass from the side edge surface of the plate glass, pick up the surface of the plate glass from the surface side of the plate glass with an imaging optical system, detect the position of the defective portion from the brightness of the image per fixed area, and the detection position And a method for determining defects by examining them with a magnifying optical system.

  Further, in Patent Document 3, illumination light having directivity in one direction from an oblique direction is irradiated so as to totally reflect on the inner surface of the plate glass with respect to the side surface of the plate glass traveling on the conveyance path, and due to defects in the plate glass. A method for detecting scattered scattered light with a line sensor is described.

Patent Document 4 discloses a holder for holding a glass plate, an illumination device for irradiating inspection light onto the surface of the glass plate held by the holder, and the attitude and orientation of the glass plate by moving the holder. And a mechanism for changing to a board inspection apparatus.

JP-A-2005-156200 JP-A-6-294749 JP 10-339705 A Japanese Patent No. 4365603

  By the way, in the method of patent document 1, in order to set a glass plate substantially perpendicular | vertical, when the glass plate enlarged, it might be difficult to look at the glass plate surface which an inspector inspects. Further, when a large glass plate (for example, G7 or more) is set at a substantially vertical angle, there is a risk that the glass plate falls down on the front or back side. In addition, the methods described in Patent Document 2 and Patent Document 3 and the apparatus described in Patent Document 4 may not detect a minute defect of a very large glass plate.

  In consideration of the above circumstances, the present invention can easily create conditions that are easy to view from the front without forcing the inspector into an unreasonable posture, and can reliably and reliably detect defective portions of a large FPD glass plate. It is an object of the present invention to provide a visual inspection method for a defective portion of a glass plate that can be detected safely, and a visual inspection device that is used to implement the method.

In order to solve the above problems, the present invention comprises the following arrangement.
(1) The glass plate to be inspected is placed in front of the inspector, the plate surface faces the inspector, and the upper end is viewed from the inspector by an angle of 5 ° to 15 ° from the vertical posture. In this state, the inspection plate is irradiated with inspection light from the left and right end surfaces of the glass plate toward the inside of the glass plate, and the inspection light is scattered outside the glass plate. The visual inspection method of the defective part of the glass plate characterized by inspecting the defective part which exists in the said glass plate by a person visually checking.
(2) In the configuration of (1) above,
The inspection range of the glass plate is changed by moving the glass plate relative to the inspector at least in the vertical direction while maintaining the oblique angle. Visual inspection method for defective parts.
(3) In the configuration of (1) or (2) above,
The inspection target range of the glass plate is changed by moving the glass plate relative to the inspector at least in the left-right direction while maintaining the oblique angle. Visual inspection method for defective parts.
(4) On the front surface, a stage capable of placing the glass plate to be inspected in an inclined standing posture that is tilted backward at an angle of 5 ° to 15 ° with respect to the vertical;
An illumination device that irradiates inspection light from the left and right end surfaces of the glass plate placed on the stage toward the inside of the glass plate, and
The stage is provided with a large number of support pins for supporting the back surface of the glass plate at each tip at an interval, and a glass plate receiving part for placing the lower end edge of the glass plate,
A visual inspection device for a defective portion of a glass plate, wherein a tip of each support pin is provided with a rotatable ball that enables the glass plate to move while supporting the glass plate.
(5) In the configuration of (4) above,
The glass plate receiving portion moving mechanism for moving the glass plate receiving portion in the left-right direction with the lower end edge of the glass plate placed thereon is provided. Visual inspection of defective portions of the glass plate according to (4) Inspection device.
(6) In the configuration of (5) above,
Aside from the support pins, the stage advances from a retracted position separated from the back surface of the glass plate to an operating position that contacts the back surface of the glass plate, and sucks the glass plate at the operating position. The visual inspection apparatus for defective portions of a glass plate according to (4) or (5), wherein an adsorption fixing pin for fixing the glass plate is disposed.
(7) In any one of the configurations (4) to (6),
The stage is supported by a fixed frame so as to be movable in the vertical direction and rotatable in the vertical direction, and a stage elevating device for moving the stage in the vertical direction and a stage rotating device for rotating the stage in the vertical direction are provided. The visual inspection device for a defective portion of the glass plate according to any one of (4) to (6), wherein

According to the configuration of (1) above, when there is a defect in any part of the glass plate, the scattered light is emitted out of the glass plate by diffusing the inspection light against the defective portion, By finding the scattered light, the inspector can visually detect the defective portion of the glass plate. At that time, the glass plate is tilted by a predetermined angle (in the range of 5 ° to 15 °), so that the surface of the glass plate is easy for the inspector to see and the detection efficiency of fine defects is not forced. Can be improved. In addition, even when a large glass plate, for example, a glass plate called G7 having a size of 1870 mm × 2200 mm or more is inspected, there is no fear of the glass plate falling to the inspector side, and unnecessary deflection due to its own weight is prevented. Therefore, it is possible to carry out inspection that is safe and does not burden the glass plate. In addition, since the inspection light is irradiated to the inside of the glass plate from both end surfaces in the left-right direction of the glass plate, even when inspecting a large glass plate, the inspection light is sufficient for the entire horizontal region of the glass plate It is possible to spread the brightness and reduce the burden on the eye of the inspector while performing the inspection properly, and it is not necessary to increase the illuminance of the inspection light. Moreover, since it is only necessary to arrange the lighting device on both sides in the left-right direction, the lighting device does not hinder the movement of the glass plate when the glass plate is moved in the vertical direction.
According to the configuration of the above (2), when shifting the inspection target range in the vertical direction, the glass plate is moved in the vertical direction relatively to the inspector while maintaining the oblique angle. It is possible to always keep a certain relationship between the line of sight and the inspection target range of the glass plate. Therefore, even when a large glass plate is inspected, the entire vertical surface of the glass plate can be inspected without taking an excessive posture of the inspector, and the burden on the inspector can be reduced. .
According to the configuration of the above (3), in shifting the inspection target range of the glass plate in the left-right direction, the glass plate is moved in the left-right direction relative to the inspector while maintaining the oblique angle, It is possible to always maintain a certain relationship between the horizontal direction of the inspector's line of sight and the inspection target range of the glass plate. Therefore, even when a large glass plate is inspected, the entire left and right direction of the glass plate can be inspected without taking an excessive posture of the inspector, and the burden on the inspector can be reduced. . In addition, if the defective part of the glass plate overlaps with the support point that supports the glass plate from behind, it may be difficult for the inspector to confirm the scattered light emitted from the defective part. By moving the plate slightly in the left-right direction and shifting the position of the defective portion and the support point behind the glass plate, the scattered light from the defective portion can be easily seen. Accordingly, it is possible to eliminate the oversight of finding the defective portion.
According to the configuration of (4) above, the inspector can stand in front of the stage, visually observe the glass plate in front, and detect the generation of scattered light, thereby detecting a defective portion of the glass plate. At this time, since the glass plate can be placed on the stage by being inclined at a predetermined angle (5 ° to 15 °), the surface of the glass plate can be easily seen by the inspector, and the defect detection efficiency can be improved. Even when inspecting a large glass plate, there is no worry of the glass plate falling to the inspector side, and unnecessary bending due to its own weight can be prevented, so inspection that is safe and free of burden on the glass plate is possible. Can be implemented. Furthermore, since the illumination device irradiates the inspection light into the inside of the glass plate from both end surfaces in the left-right direction of the glass plate, the inspection light can be transmitted to the glass plate even when inspecting a large glass plate. It is possible to spread the entire area in the left and right directions with sufficient brightness. Therefore, while reducing the burden on the eye of the inspector, it is possible to perform the inspection properly and to increase the illuminance of the inspection light specially. Disappear. In addition, it is possible to place the lower edge of the glass plate on the glass plate receiving part in a slanting posture while supporting the back surface of the glass plate with the tips of a large number of support pins. And can be supported so as not to bend. In addition, since a rotatable ball is attached to the tip of each support pin, the glass plate is placed in the left-right direction with the glass plate standing upright with the lower edge of the glass plate placed on the glass plate receiving part. It can be moved easily. Therefore, if the defective part of the glass plate overlaps with the support point that supports the glass plate from behind, it may be difficult for the inspector to confirm the scattered light emitted from the defective part. By moving the plate slightly in the horizontal direction and shifting the position of the defective part and the support point behind the glass plate, the scattered light from the defective part can be easily seen, thereby detecting the defective part. Can be overlooked.
According to the configuration of (5) above, the glass plate receiving part can be moved in the left-right direction by the moving mechanism, so that the lower end edge of the glass plate is placed on the glass plate receiving part and the glass plate is inclined. The glass plate can be easily moved in the left-right direction without sliding the lower end edge of the glass plate on the glass plate receiving portion in the standing posture.
According to the configuration of (6) above, since the suction fixing pin is provided on the stage separately from the support pin, a rotatable ball is attached to the tip of the support pin by sucking the glass plate with the tip of the suction fixing pin. Even if it is, the glass plate can be stably fixed. In addition, by releasing the suction of the suction fixing pin and retracting the suction fixing pin to the retracted position, the glass plate can be easily moved in the left-right direction by the rotating action of the ball of the support pin without being obstructed by the suction fixing pin. Can move. Therefore, even in the case where the defective part overlaps with the part supported by the support pin or the suction fixing pin, the defective part is shifted by moving the glass plate slightly in the left-right direction to shift the defective part. Can be overlooked.
According to the configuration of (7) above, the stage is supported by the fixed frame so as to be movable in the vertical direction and pivotable in the vertical direction. Therefore, when receiving the glass plate from the transfer device, the stage is held horizontally at an appropriate height. At the time of inspection, the glass plate can be safely held on the stage in a tilted posture by rotating it to an angle close to vertical. Moreover, the holding | maintenance height of a glass plate can be freely adjusted according to the height of an examiner's eyes | visual_axis as needed.

It is a perspective view which shows the structure of the visual inspection apparatus of the defective part of the glass plate of embodiment of this invention. It is a side view of the same apparatus. It is a top view of the apparatus. (A) is a perspective view which shows the state which mounted the glass plate on the stage of the apparatus, (b) is an expanded sectional side view of the IVb part of (a). It is a front view which shows arrangement | positioning of the support pin and suction pin in the said stage. It is the whole perspective view of the said support pin, and the expansion perspective view of a front-end | tip. It is a perspective view which shows the structure of the said suction pin. It is procedure explanatory drawing in the case of setting a glass plate to the visual inspection apparatus of this embodiment. It is a perspective view which shows the mode at the time of transferring a glass plate to the visual inspection apparatus. It is procedure explanatory drawing at the time of once lifting the glass plate received to the stage of the visual inspection apparatus, (a) is a state before lifting, (b) is a figure which shows the state after lifting. It is procedure explanatory drawing at the time of rotating a stage to a diagonal attitude | position, (a) is a state before rotating, (b) is a figure which shows the state after rotating. It is explanatory drawing at the time of moving a stage up and down and changing an inspection object area up and down, (a) is a side view at the time of moving a stage to the lowest position and a front which shows an inspection object area of a glass plate at that time FIG. 4B is a side view when the stage is moved to the intermediate position and a front view showing the inspection target area of the glass plate at that time. FIG. 5C is a side view when the stage is moved to the uppermost position and the time. It is a front view which shows the inspection object area | region of a glass plate. It is explanatory drawing of how to shift the glass plate to the left-right direction when the support pin on a stage and the defect position of a glass plate have overlapped, (a) is a figure which shows the state with which the support pin and the defect position have overlapped, (b ) Is a view showing a state in which scattered light is easily seen by moving the glass plate slightly in the left-right direction by retracting the suction fixing pin and shifting the defect position from the position of the support pin. It is explanatory drawing of the general method of irradiating the inside of a glass plate with inspection light, and detecting a defective part, (a) is sectional drawing of a glass plate, (b) is the state which looked at the plate | board surface of the glass plate from diagonally upward FIG.

Hereinafter, a visual inspection method and a visual inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.
1 is a perspective view showing a configuration of a visual inspection apparatus according to an embodiment, FIG. 2 is a side view, FIG. 3 is a plan view, and FIG. 4A is a perspective view showing a state in which a glass plate is placed on the stage of the apparatus. (B) is an expanded sectional side view of the IVb part of (a).

  As shown in FIGS. 1 to 4, the visual inspection device 1 includes a fixed frame 10 installed on a floor surface, a stage 50 that is supported by the fixed frame 10 and places a glass plate G to be inspected, By being supported on the floor surface or the fixed frame 10 or the like, it is arranged on both the left and right sides of the stage 50 and inspected from both left and right end surfaces of the glass plate G placed on the stage 50 toward the inside of the glass plate G. The illumination apparatus 70 which irradiates the light 71, the coordinate detection apparatus (illustration omitted) which detects the position coordinate on the glass plate G of the discovered defect part, and the control apparatus 80 (refer FIG. 1) are provided.

  The stage 50 is capable of placing the glass plate G to be inspected on the front face in an obliquely standing posture inclined backward by an angle of 5 ° to 15 ° (preferably 10 °) with respect to the vertical, The glass plate G is supported with respect to the fixed frame 10 so that the glass plate G can be moved in the vertical direction while being held in an obliquely standing posture. The stage 50 is also supported so as to be able to turn up and down around the horizontal rotation axis with respect to the fixed frame 10. Hereinafter, those configurations will be described in detail.

  As shown in FIGS. 1 and 2, the fixed frame 10 has a pair of left and right frames 10 </ b> L and 10 </ b> R that are erected on the floor surface with a space larger than the left and right width of the stage 50. The left and right frames 10 </ b> L and 10 </ b> R are each composed of a vertical column 11 standing on the rear side when viewed from the inspector 200 standing on the inspection table 210, and two inclined columns 12 and 13 standing obliquely on the front side. , And a beam member 14 that integrally connects the vertical column 11 and the inclined columns 12 and 13. The two inclined struts 12 and 13 are erected in parallel with each other and in a posture inclined backward by 5 ° to 15 ° from the vertical as viewed from the inspector 200.

  A movable frame 40 is supported between the left and right frames 10L and 10R so as to be movable up and down, and a stage 50 is supported on the movable frame 40 so as to be rotatable in the vertical direction.

That is, as shown in FIG. 3, between the inclined struts 12 and 13 of the left and right frames 10L and 10R and the left and right ends of the movable frame 40, two each provided on the inclined struts 12 and 13 side are parallel to each other. Guide rail 16 and each guide rail 1 provided on the movable frame 40 side.
A linear guide mechanism 47 including a slider 46 that is slidably fitted to the slider 6 is provided, and the movable frame 40 is moved in the vertical direction along the inclination of the inclined columns 12 and 13 by the guide action of the linear guide mechanism 47. Is supported so that it can be moved.

  Further, the left and right frames 10L and 10R are provided with ball screw shafts 15 parallel to the guide rails 16, and ball screw nuts 45 fixed to the movable frame 40 are fitted to the ball screw shafts 15 of the left and right frames 10L and 10R. waiting. Accordingly, the movable frame 40 is configured to move up and down by synchronously rotating the left and right ball screw shafts 15. The lower ends of the left and right ball screw shafts 15 are connected to an elevating motor 31 for rotating the ball screw shaft 15, and the elevating motor 31 rotates between the elevating motor 31 and the left and right ball screw shafts 15. A rotation distribution mechanism 32 that distributes the rotation to the right and left, a rotation transmission rod 33 that transmits the rotation distributed to the left and right to the ball screw shaft 15 side, and an orthogonal gear box 34 that converts the rotation of the rotation transmission rod 33 into the rotation of the ball screw shaft 15. ing.

  A rotating rod 48 as a horizontal rotating shaft is disposed on the frame main body 41 of the movable frame 40 such that both ends in the left-right direction are rotatably supported by bearings 48. The rotating rod A stage 50 is connected to 48 via an arm 44. A rotation motor 42 is connected to the rotation rod 48, and the stage 50 is rotated in the vertical direction via the rotation rod 48 and the arm 44 by rotating the rotation motor 42. Can be done.

  In this case, the stage elevating device 30 that elevates the movable frame 40 by the linear guide mechanism 47, the ball screw shaft 15, the ball screw nut 45, the elevating motor 31, the rotation distribution mechanism 32, the rotation transmission rod 33, the orthogonal gear box 34, and the like. In addition, a stage rotation device 60 that rotates the stage 50 in the vertical direction is configured by the rotation motor 42, the rotation rod 48, the arm 44, and the like.

  4 to 7, the stage 50 is a rectangular plate-like stage main body 51 connected to the arm 44, and is erected vertically on the front surface of the stage main body 51. A plurality of support pins 52 that support G, a plurality of suction fixing pins 55 that are erected at positions that do not interfere with the support pins 52, and a glass plate receiving portion 53 on which the lower edge of the glass plate G is placed. is doing.

  The support pins 52 are arranged vertically and horizontally at a constant pitch (for example, 250 mm), and the base ends 52e of the pin main bodies 52a are fixed to the stage main body 51 so that the tips are aligned at the same height. Then, as shown in FIG. 6, a rotatable ball 52 b that allows the glass plate G to move while supporting the glass plate G is provided at the tip of the pin body 52 a of each support pin 52 so as not to fall off. ing. The support pins 52 have, for example, a diameter of 15 mm and a height of 250 mm. When the glass plate G of 2200 mm × 1870 mm is stably supported, for example, about 72 pins are provided. It is preferable to use PEEK (polyetheretherketone) as the material of the ball 52b at the tip.

  Further, a plurality of glass plate receiving portions 53 are provided at appropriate intervals on the lower end edge of the stage main body 51, and these glass plate receiving portions 53 are moved together in the left-right direction by a glass plate receiving portion moving mechanism (not shown). It is provided so that it can be moved by a small distance. In addition, these glass plate receiving parts 53 have the groove | channel 53a for receiving so that the lower end edge of the glass plate G may not drop | omit. The glass plate receiving portion 53 is preferably made of PEEK (polyether ether ketone).

Further, as shown in FIG. 13, the suction fixing pin 55 is provided so as to be able to move forward and backward from a retracted position where the tip is separated from the back surface of the glass plate G to an operating position where the tip contacts the back surface of the glass plate G. In the operating position, it can be fixed by adsorbing the glass plate G. As shown in FIG. 7, the suction pin 55 is provided with a suction cup 55b at the distal end of a pin body 55a having a gas-type expansion / contraction mechanism in which the base end 55a is fixed to the stage body 51 and the distal end side expands and contracts. In addition, a suction hole 55c is provided in the center of the inner bottom of the suction cup 55b to make the suction cup 55b have a negative pressure. For example, PEEK (polyetheretherketone) is preferably used as the material of the suction cup 55b. Four suction pins 55 are provided in order to stably hold the glass plate G. By sucking the suction plate 55b with the suction cup 55b in close contact with the back surface of the glass plate G, negative suction inside the suction cup 55b is achieved. The glass plate G can be adsorbed and held by pressure.

  Moreover, as shown in FIG. 4, the illuminating device 70 irradiates the inspection light 71 from the left and right end faces of the glass plate G toward the inside of the glass plate G, and has an illuminance in the range of 1500 to 200,000 lux, for example. Commercially available light guides can be used. Those having an illuminance of 1500 lux or less are not preferred to be used too much because scattered light that is irregularly reflected by the defects becomes weak and it may be difficult to detect the defects. Also, if the illuminance exceeds 200,000 lux, the light in the vicinity of the illumination device 70 is too strong, and it may be difficult to detect defects, so it is not preferable to use too much.

Next, the visual inspection method of the defective part of the glass plate G is demonstrated.
When the glass plate G is carried onto the stage 50, first, as shown in FIGS. 8 and 9, the glass plate G on the stage 50 of the visual inspection apparatus 1 and the transfer arm 310 of the transfer robot 300 is horizontally placed. Hold. The height of the stage 50 is preferably set to a height that facilitates the transfer operation, for example, an intermediate level of the height of the fixed frame 10. Then, the transfer arm 310 of the transfer robot 300 is moved to place the glass plate G on the support pins 52 of the stage 50, and the suction fixing pin 55 is operated to fix the glass plate G. Next, as shown in FIG. 10, the stage 50 is once raised to the top, and as shown in FIG. 11, the stage 50 is rotated at the raised position to bring the glass plate G to a predetermined oblique standing angle. Hold. Then, the glass plate G is set to an appropriate height by raising and lowering the stage 50 while maintaining the obliquely standing angle, and the inspector 200 stands in front of the stage 50 and performs the inspection.

  At this time, the glass plate G faces in front of the inspector 200 in a posture in which the plate surface faces the inspector 200. What is important here is that the glass plates G face each other in an attitude in which the upper end of the glass plate G falls to the back side of the glass plate G when viewed from the inspector 200 by an angle θ (see FIG. 2) of 5 ° to 15 ° from the vertical. It is. Further, when the glass plate G is placed on the stage 50, the lower end edge of the glass plate G is placed on the glass plate receiving portion 53 in an obliquely standing posture while supporting the back surface of the glass plate G with the tips of a large number of support pins 52. Therefore, even a very thin glass plate G can be supported so as not to bend without difficulty.

  In this state, the inspection light 71 (see FIG. 4) from the illumination device 70 is irradiated toward the inside of the glass plate G from the left and right end surfaces of the glass plate G, and the inspection light 71 is inspected for scattered light outside the glass plate G. The defect part which exists in the glass plate G is inspected by the person 200 visually.

When there is a defect in any part of the glass plate G, as shown in FIG. 14, the inspection light 71 hits the defective portion K and diffusely reflects, so that scattered light is emitted outside the glass plate G. By finding the scattered light, the inspector 200 can visually detect the defective portion K of the glass plate G. At that time, since the glass plate G is tilted by a predetermined angle (in the range of 5 ° to 15 °), the surface of the glass plate G is easy to see for the inspector 200 and is not forced to take an unreasonable posture. Improvement of the detection efficiency of a simple defect can be achieved. Further, even when a large glass plate, for example, a glass plate G having a size of 1870 mm × 2200 mm or more called G7 is inspected, there is no concern that the glass plate G will fall to the inspector 200 side, and it is unnecessary due to its own weight. Since bending can also be prevented, the inspection which is safe and does not have a burden on the glass plate G can be implemented.

  Incidentally, when the glass plate G falls at an angle of 5 ° to 15 ° or more, external light is reflected on the surface of the glass plate G, so that it becomes difficult to detect defects. Moreover, if it raises at the angle below it, the glass plate G will fall easily to the inspector 200 side.

  Further, in the case of this visual inspection method, since the inspection light 71 is irradiated into the inside of the glass plate G from the left and right end surfaces of the glass plate G, the inspection light 71 is used even when the large glass plate G is inspected. It is possible to spread the entire area in the right and left direction of G with sufficient brightness, to reduce the burden on the eye of the inspector 200, and to appropriately perform the inspection, and to increase the illuminance of the inspection light specially. Also disappear.

  Further, when the inspection target range is shifted in the vertical direction, the stage elevating device 30 (see FIG. 2) is operated to maintain the angle of the glass plate G while maintaining the oblique angle as shown in FIG. 50 is moved up and down. For example, as shown in FIG. 12A, when the inspection target range S is set in the upper stage, the stage 50 is moved to the lowest position. Further, as shown in (b), when the inspection target range S is set in the middle stage, the stage 50 is moved to the intermediate position. Further, as shown in (c), when the inspection target range S is set in the lower stage, the stage 50 is moved to the uppermost position. By doing so, the inspection object range S of the glass plate G can be positioned at the height of the line of sight of the inspector 200. Therefore, even when inspecting a large glass plate G, the entire surface of the glass plate G in the vertical direction can be inspected without the inspector 200 taking an unreasonable posture, and the burden on the inspector 200 can be reduced. Can be planned.

  Further, as shown in FIG. 13A, when the defective portion K of the glass plate G overlaps with the support pin 52 (or the suction fixing pin 55) that supports the glass plate G from the back, scattering emitted from the defective portion K. Although it may be difficult for the inspector to check the light, in such a case, as shown in FIG. 5B, the suction fixing pin 55 is temporarily retracted to the retracted position, and the glass plate receiving portion 53 is moved to the left and right. By moving the glass plate G slightly in the left-right direction by moving in the direction, and shifting the positions of the support pins 52 and the defective portion K behind the glass plate G, the scattered light from the defective portion K can be easily seen. be able to. Therefore, by doing so, it is possible to eliminate the oversight of the discovery of the defective portion K.

  When a defective portion K is found, a coordinate detection device (not shown) is moved to that position and an input operation is performed. If it does so, the position coordinate of the defective part K in the glass plate G will be preserve | saved. Therefore, the production process can be reviewed based on the stored data.

  A mechanism that greatly moves the stage 50 in the left-right direction can be further incorporated. In such a case, the glass plate G can be moved in the left-right direction with respect to the inspector 200 while maintaining an obliquely inclined angle, so that the inspection target range of the glass plate can be changed in the left-right direction. Therefore, even when a large glass plate is inspected, the entire left and right direction of the glass plate can be inspected without taking an excessive posture of the inspector, and the burden on the inspector can be reduced. .

G glass plate 1 visual inspection device 10 fixed frame 30 stage elevating device 50 stage 52 support pin 52a ball 53 glass plate receiving portion 55 suction pin 60 stage rotating device 70 illumination device 71 inspection light 200 inspector S inspection area K defect portion

Claims (7)

  The glass plate to be inspected is in front of the inspector, the plate surface faces the inspector, and the upper end is viewed from the inspector by an angle of 5 ° to 15 ° from the vertical posture. In that state, the inspection plate is irradiated with inspection light from both left and right end surfaces of the glass plate toward the inside of the glass plate, and the inspector visually observes the scattered light of the inspection light outside the glass plate. A visual inspection method for a defective portion of the glass plate, wherein a defective portion existing in the glass plate is inspected.   2. The inspection target range of the glass plate is changed by moving the glass plate relative to the inspector at least in a vertical direction while maintaining the obliquely standing angle. The visual inspection method of the defective part of the glass plate of description.   The inspection object range of the glass plate is changed by moving the glass plate relative to the inspector at least in the left-right direction while maintaining the obliquely standing angle. Or the visual inspection method of the defective part of the glass plate of 2. A stage capable of placing a glass plate to be inspected on the front surface in an inclined standing posture inclined backward at an angle of 5 ° to 15 ° with respect to the vertical,
An illumination device that irradiates inspection light from the left and right end surfaces of the glass plate placed on the stage toward the inside of the glass plate, and
The stage is provided with a large number of support pins for supporting the back surface of the glass plate at each tip at an interval, and a glass plate receiving part for placing the lower end edge of the glass plate,
A visual inspection device for a defective portion of a glass plate, wherein a tip of each support pin is provided with a rotatable ball that enables the glass plate to move while supporting the glass plate.   The visual observation of the defective part of the glass plate of Claim 4 provided with the glass plate receiving part moving mechanism which moves the said glass plate receiving part to the left-right direction, mounting the lower end edge of the said glass plate. Inspection device.   Aside from the support pins, the stage advances from a retracted position separated from the back surface of the glass plate to an operating position that contacts the back surface of the glass plate, and sucks the glass plate at the operating position. 6. The visual inspection apparatus for defective portions of a glass plate according to claim 4, wherein a suction fixing pin for fixing the glass plate is disposed.   The stage is supported by a fixed frame so as to be movable in the vertical direction and rotatable in the vertical direction, and a stage elevating device for moving the stage in the vertical direction and a stage rotating device for rotating the stage in the vertical direction are provided. The visual inspection apparatus for defective portions of the glass plate according to any one of claims 4 to 6, wherein the glass plate has a defective portion.

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