KR20060083890A - Coordinates detection apparatus and subject inspection apparatus - Google Patents

Abstract

The present invention provides a subject inspection apparatus for stably detecting a coordinate position having good precision by irradiating spot light directly onto a subject.

The glass substrate 8 is mounted on the rotation holder 9 of the object inspection apparatus of the present invention, and a guide bar 40 movable on the surface of the glass substrate 8 in the X-axis direction is provided. In the guide bar 40, a laser head 44 for irradiating spot light to a defective portion of the glass substrate 8 is provided so as to be movable in the Y-axis direction by the second belt 42, so that the light beam of the spot light can be moved. Is irradiated at an angle α. At the time of macro observation, at the operation portion, the guide bar 40 and the laser head 44 are moved in the X and Y axis directions to move the spot light on the glass substrate 8 onto the defective portion. Coordinate data is obtained by the coordinate detecting unit using the drive amount of each motor at that time as position information. The observation part with a microscope function is moved to a coordinate position, and micro observation of a defect is performed.

A subject, a holder, a guide member, a spot light, an indicating means, an operation part, a coordinate detection part, a micro observation part.

Description

Coordinate Detection Device and Subject Inspection Device {COORDINATES DETECTION APPARATUS AND SUBJECT INSPECTION APPARATUS}

1 is a schematic configuration diagram of a subject inspection apparatus according to a first embodiment of the present invention.

FIG. 2 is a side view of the test subject apparatus shown in FIG. 1. FIG.

It is a perspective view of the part of the coordinate detection apparatus of the subject inspection apparatus shown in FIG.

4 is a perspective view of the laser head attached to the second belt.

It is a side view of the laser head which showed the state which irradiated the spot part on the glass substrate with the spot light.

6 is a block diagram showing a drive control system of a coordinate inspection apparatus.

7 is a partial perspective view of the coordinate detection device of the object inspection apparatus according to the second embodiment.

* Description of the symbols for the main parts of the drawings *

1: object inspection device 3, 70: coordinate detection device

5: micro observation means 8: glass substrate (object)

9: rotating holder 18: micro observation part

21: objective lens 33, 34: guide rail

35, 36: First belt 40: Guide bar (guide member)

40a: Light blocking member 42: Second belt

44, 72: laser head (spot light source)

M1, M2, M3: Motor

k: defect part (specific part) spot light

Japanese Patent Publication No. 2002-82067

International Publication No. WO03 / 002934

The present invention is, for example, a coordinate detection device that detects coordinates of a specific site such as a defective part present in various test targets such as a glass substrate used for a flat panel display, and a test object for observing a specific site according to such coordinate data. It relates to an inspection apparatus.

Conventionally, the board | substrate inspection apparatus which inspects the defect of the glass substrate surface used for flat panel displays, such as a liquid crystal display, is known. Such a substrate inspection apparatus includes a macro observation that irradiates illumination light onto the surface of a glass substrate and visually observes optical changes in the reflected light to detect defects such as damage on the surface of the glass substrate, film stains, and adhesion of dust, and the macro observation. Micro observation to magnify and observe the detected defect is performed. In such a board | substrate inspection apparatus, the coordinate detection apparatus is used in order to detect the coordinate of a specific site | part, such as a defect part detected by macro observation.

For example, in Japanese Patent Laid-Open No. 2002-82067, a rod-shaped projection member movable on a glass substrate is provided along both opposing edges of a holder on which a glass substrate as a test object is mounted, and parallel to the projection member. The guide moving part which can move along one edge of one holder is provided. The guide moving part is provided with a mirror which reflects the laser light emitted from the laser light source fixed to the holder corner part and irradiates the projection member. By moving the projection member and the guide moving part in the X-Y axial direction so that the irradiation position of the laser beam to the projection member coincides with the defect position of the glass substrate, the coordinate position of the defect is detected from their respective amounts of movement.

In International Publication No. WO03 / 002934, a rod-shaped light-emitting body which is movable on a holder on which a glass substrate as a test object is mounted is provided, and the light-emitting body is a plurality of light-emitting elements arranged in the longitudinal direction thereof. While the light emitter is moved along the surface of the glass substrate so as to face the defect, while the light emitter is positioned at a defect position on the glass substrate, a plurality of light emitting elements are sequentially turned on and the light emitting element at the position facing the defect is turned on. The coordinate position of the defect is detected from the movement amount of the light emitting body and the position of the light emitting element that is turned on.

However, the coordinate detection apparatuses described in Japanese Patent Application Laid-Open No. 2002-82067 and WO03 / 002934 have an upper surface of a glass substrate so that a projection member or a light emitting member specifying a position coordinate of a defect does not come into contact with the glass substrate. It needs to be separated from. When the distance between the glass substrate, the projection member, and the light emitter is considered in the vertical direction between the glass substrate, the projection member, and the light emitter, a distance of about several mm is required, so that the instruction of a defect is indirect. Therefore, when an operator visually observes a defect position, an irradiation member, or a light emitting body to be lit, there is a problem that a reading error of the coordinate position occurs depending on the angle of observation of the operator to the substrate. In particular, it has emerged that one side of the glass substrate for a liquid crystal display (mother glass substrate) to be inspected exceeds 2000 mm. When holding the large glass substrate in the holder and tilting it at a predetermined angle (for example, 60 °) to observe the macro, the observation angle changes greatly from above and below the large glass substrate. In the defect of, a large error occurs in the coordinate position.

An object of the present invention is to provide a coordinate detecting apparatus and a subject inspecting apparatus capable of stably detecting a coordinate position having good precision by directly irradiating a spot light to a subject under consideration of such a problem.

The coordinate detecting apparatus according to the present invention includes a holder for supporting a subject, a guide member movable on a surface of the subject, and spot light provided on the guide member and irradiated to the subject with respect to the movement direction of the guide member. And an instruction unit capable of moving in an intersecting direction, an operation unit for moving the irradiation position of the spot light on the subject, and a coordinate detector for obtaining coordinate data from the positional information about the irradiation position of the spot light on the subject. It is characterized by.

According to the present invention, a test object is moved by moving the guide member in a non-contact direction with respect to a specific part of the test object, in a non-contact manner, and by moving the spot light in a direction crossing the moving direction of the guide member. The spot light can be directly irradiated to the subject from a guide member opposite to. Coordinate data about a spot light irradiation position on a subject is obtained by a coordinate detector. In this case, the coordinate data with good precision is stably obtained by irradiating a spot light directly to the specific site | part of a subject from the indicating means of the guide member which moves on the surface of a subject.

The coordinate detecting apparatus according to the present invention is a subject inspection apparatus that irradiates macro illumination light from above in a state in which a subject is held at a predetermined inclination angle, and visually observes a defect on the subject. A rotating holder for holding and standing at the predetermined inclination angle, a guide member provided on the rotating holder and moving on the surface of the test object, and a spot light provided on the guide member to irradiate the test object with the guide member. Indicating means for moving in a direction intersecting with the movement direction, an operation portion for moving the guide member and the indicating means, respectively, to designate a defect position on the subject according to the irradiation position of the spot light, and the guide member and the spot light The coordinates of the defect position designated by the indicating means from the coordinate data of each position Characterized by comprising a coordinate detection unit to obtain a foundation.

According to the present invention, even when the rotating holder stands up at an angle at which the inspector can easily observe the macro, the guide member and the instructing means are integrally provided on the rotating holder. The spot light of the indicating means can be precisely matched to the detected defect.

A subject inspection apparatus according to the present invention is a subject inspection apparatus capable of micro-observing a specific portion of a subject, the holder supporting the subject, a guide member movable on the surface of the subject, Instructing means provided in the guide member and capable of moving the spot light irradiated to the subject under a direction intersecting with the moving direction of the guide member, an operation unit for moving the irradiation position of the spot light on the subject, the subject A coordinate detecting unit for obtaining coordinate data from the positional information relating to the irradiation position of the spot light on a specimen, and a micro observation unit, and irradiating the spot light to the specific portion of the subject to be examined by the coordinate detecting unit. Obtaining coordinate data, the micro observation unit at the coordinate data position Transfer the adversary is characterized in that to effect a microscopic observation.

According to the present invention, the guide member is moved on the surface of the subject in a non-contact manner by operating the operation unit with respect to a specific portion such as a defective portion of the subject, and the indicating means intersects the spot light with respect to the movement direction of the guide member. By moving in the direction, the spot light can be directly irradiated to a specific part of the subject from the guide member facing the subject. Coordinate data regarding the spot light irradiation position of a specific site can be obtained from the coordinate detection unit, and microscopic observation of a specific site such as a defective portion can be performed by relatively moving the micro observation unit to the position of this coordinate data.

According to the coordinate detecting apparatus and the subject inspection apparatus according to the present invention, the spot light can be directly projected from a guide member facing the subject against any portion on the subject, and the distance between the indicating means and the subject and The projection angle of the light beam of the spot light can be made constant, the detection accuracy of the coordinates on the subject projecting the spot light is good, and stable detection accuracy can be obtained regardless of the irradiation position of the spot light.

EMBODIMENT OF THE INVENTION Hereinafter, the subject inspection apparatus provided with the coordinate detection apparatus which concerns on embodiment of this invention is demonstrated by attached drawing.

1 to 6 show a first embodiment, FIG. 1 is a schematic perspective view of a subject inspection apparatus, FIG. 2 is a side view of a subject inspection apparatus, FIG. 3 is a perspective view of an essential part of a coordinate detection apparatus, and FIG. 4 is a laser head. 5 is a side view of the laser head, and FIG. 6 is a block diagram of the control drive system.

The object inspection apparatus 1 shown to FIG. 1 and FIG. 2 is equipped with the micro-observation apparatus 5 provided on the coordinate detection apparatus 3 and the pedestal 4 as the apparatus main body 2, and an apparatus main body. The control part 6 connected by the wiring to (2) is provided.

In the apparatus main body 2, the rotation holder 9 which holds the glass substrate 8 as a test object on the pedestal 4 is provided. The rotation holder 9 is formed in a rectangular frame shape, for example, and the glass substrate 8 is mounted in the frame part of its four sides. The glass substrate 8 is used as a flat panel display such as a liquid crystal display, and is used for a plurality of reference pins 9a provided on two sides of the rotary holder 9 and a pressing member 9b respectively provided on two other sides. The glass substrate 8 is thereby positioned at the reference position. A plurality of holes (adsorption pads) not shown along the entire circumference are formed in the peripheral portion of the rotary holder 9, and the glass substrate 8 is rotated by adsorbing the glass substrate 8 through these holes. Maintain adsorption on the phase.

The rotary holder 9 is rotatable by the support shaft 10 (rotation shaft) provided on one edge of the pedestal 4, as shown in Fig. 2, and the angle θ (e.g. For example, 45˚ ~ 60˚). The support shaft 10 is connected to the rotation shaft 13 of the motor M1 via the pulley 11 and the belt 12, and is driven to rotate by the motor M1. These constitute the rotating means.

In the present embodiment, an example of the one-axis rotation holder rotating in the front-rear direction with respect to the inspector is shown. Can be applied.

In the apparatus main body 2, on the pedestal 4, the first guide rails 15 and 16 for the micro-observing apparatus 5 are disposed to face each other in the Y-axis direction along both sides of the rotation holder 9, The micro observation device 5 is movable along the first guide rails 15 and 16. The micro observation device 5 includes a door-shaped support 17 and a micro observation 18. The micro observation part 18 is movable along the 2nd guide rail (not shown) for the micro observation part provided in the beam 17a extended in the X-axis direction of the support part 17. As shown in FIG.

The micro observation part 18 is a microscope head comprised from the objective lens 21 of the high magnification (for example, 20-100 times), the eyepiece 22, and the unilluminated downward illumination light source. As a micro observation part, an electron microscope, a scanning probe microscope, etc. are mentioned besides an optical microscope. In addition, an auxiliary objective lens 23 for observing the defect position on the glass substrate 8 at a very small magnification (for example, about 0.5 to 2 times) is attached to the micro observation part 18. On the main body side surface of the micro observation part 18, the partial macro illumination light source 24 for macro-observing the surface of the glass substrate 8 directly with an eye is attached.

By moving the support 17 in the Y direction and the micro observation 18 in the X direction, the inspector can observe the surface of the glass substrate 8 by the eyepiece 22 through the objective lens 21. A high magnification image of can be observed over the entire surface of the glass substrate 8. By switching the optical paths of the objective lens 21 and the auxiliary objective lens 23, a low magnification image of the surface of the glass substrate 8 taken into the wide field of view by the auxiliary objective lens 23 can be observed with the eyepiece 22. .

The TV camera 25 is connected to the upper part of the eyepiece barrel of the micro observation part 18. As shown in FIG. The TV camera 25 captures the observed image (low magnification image) of the surface of the glass substrate 8 obtained by the objective lens 21 and the auxiliary objective lens 23, and sends it to the control unit 26 provided in the control unit 6. .

In the micro-observing apparatus 5, the transmission line illumination light source 28 is formed in the lower part of the support part 17 facing the moving line of the objective lens 21. As shown in FIG. This transmission line illumination light source 28 is provided along the X-axis on the lower plate 29 of the support part 17 which can move below the rotation holder 9 maintained in the horizontal state (refer FIG. 2). The transmissive line illumination light source 28 performs linear transmissive illumination from below the glass substrate 8, and is movable in the Y-axis direction integrally with the supporting portion 17.

On the other hand, the control unit 6 displays the observed image obtained by the TV camera 25 on the TV monitor 30 via the control unit 26. The control unit 26 is connected with a keyboard 31 as an input unit for the inspector to perform an operation instruction or data input.

In the upper part of the apparatus main body 2, the macro illumination part which is not shown which irradiates extensively the glass substrate 8 on the rotating holder 9 is provided. This macro illumination unit is composed of, for example, a metal halogen lamp, a reflecting mirror, and a Fresnel lens described in Japanese Patent Application Laid-open No. Hei 5-232040. This macro illumination part irradiates macro illumination light from the upper side of the glass substrate 8 hold | maintained by this rotation holder 9 in the state which inclined the rotation holder 9 by predetermined angle (45 degree-60 degree), and inspects it. It is used for macro observation of defects on the surface of the glass substrate 8 by directly seeing the surface of the glass substrate 8 under self macro illumination.

Next, the coordinate detection apparatus 3 of the subject inspection apparatus 1 is demonstrated with reference to FIGS. On the rotation holder 9, 3rd guide rails 33 and 34 for coordinate detection are provided in opposition along the both ends of the front-back direction of the glass substrate 8. As shown in FIG. A pair of seamless first belts 35 and 36 are arranged outside the guide rails 33 and 34. Each belt 35, 36 is engaged with a pair of pulleys 37a, 37b and 37c, 37d, respectively, and two opposing pulleys 37a, 37c are connected by a shaft 38. The shaft 38 is connected to the output shaft of the motor M2, such as a stepping motor, via the transmission belt 39, and receives a driving force. As the motor M2, a biaxial motor may be used, and the biaxial motor may be arranged in the middle of the shaft 38 via a coupling.

On these third guide rails 33 and 34, both ends of the guide bar 40 (guide member) are slidably mounted, and both ends of the guide bar 40 are connected to the respective first belts 35 and 36. . The guide bar 40 is a direction (Y axis) orthogonal to the rotation support shaft 10 of the rotation holder 9 such that its long side direction is the same as the illumination direction of the macro illumination irradiated from above. Direction) is installed. That is, the guide bar 40 is designed so that the shadow of the macro illumination light illuminated from above is not reflected on the defect detected by the inspector while the rotary holder 9 stands up at a predetermined angle for macro observation. It is preferable to arrange so that the long side direction may follow the same direction as the irradiation direction of macro illumination. As the first belts 35 and 36 are driven through the shaft 38 in association with the drive of the motor M2, the guide bar 40 moves in the direction X of the supporting shaft 10 for rotation of the rotary holder 9. Along the axial direction) to reciprocate in a non-contact manner on the surface of the glass substrate 8.

3, the guide bar 40 is provided with the seamless 2nd belt 42 along the longitudinal direction (Y-axis direction), and the 2nd belt 42 has the pulley 43a, 43b provided in the both ends. Takes on The output shaft of the motor M3, such as a step motor, is connected to one pulley 43a. The second belt 42 is connected to the holding portion 45 having the laser head 44 as a laser light source integrally installed thereon, and the laser head 44 is connected to the glass substrate 8 by the forward and reverse rotation of the motor M3. The reciprocating movement is possible over the entire length of the Y-axis direction.

In the laser head 44 (spot light source) shown in FIGS. 4 and 5, at least the irradiation part 44a (the entire laser head in the drawing) is fixed to the holding part 45 toward the downward slope. Therefore, the light beam of the spot light s irradiated from the laser head 44 is projected with respect to the glass substrate 8 at predetermined angle (alpha) (for example, 30-70 degree). As for the projection angle (alpha), the range of 40-60 degrees is preferable. In this embodiment, the projection angle α is set to 45 degrees. By setting the projection angle of the laser head 44 to a predetermined angle (for example, 45 °), the glass substrate 8 in the standing state at an angle (for example, 45 °) where the inspector is easy to macro observe the rotation holder 9. When the spot light s of) is visually observed, the guide bar 40 becomes a shadow depending on the observation position, and the spot light s is prevented from being visually observed. In addition, the spot light s projected from the laser head 44 is set to a circular diameter of a diameter, for example, 2 mm, that the inspector can recognize by visual observation, and the glass substrate detected by the inspector under macro illumination ( Examine the defect k of 8) and the like. Therefore, the inspector can confirm the defect k on the glass substrate 8 by the macro illumination light irradiated from the upper direction through the clearance 47, and can accurately match the spot light s to this defect k.

The guide bar 40 is formed in a substantially plate shape, and for example, a plate-shaped light blocking member 40a is formed on one side of the longitudinal direction via a gap 47 having a predetermined width. As shown in FIG. 5, the laser light irradiated onto the glass substrate 8 from the laser head 44 is reflected as a spot light s to the defect k of the glass substrate 8 and then reflected to the light shielding member 40a. Shaded by. In addition, since the laser beam is irradiated from the direction intersecting with the eyeline direction of the inspector, the laser beam is not directly reflected toward the inspector, and the laser beam reflected on the glass substrate 8 is also shielded member 40a on the reflected optical path. Can be reliably shielded.

The light shielding member 40a may be a material which does not transmit laser light, and may be colored or transparent. It is preferable that the light shielding member 40a has a light shielding surface substantially orthogonal to the laser beam which reflects, and light-shields a laser beam. The light shielding member does not need to be integrally provided with the guide bar 40, and is, for example, a light shielding plate having a size capable of sufficiently shielding the laser light reflected from the glass substrate 8 (for example, several times the laser spot diameter). May be provided in the laser head 44, and the light shielding plate may be driven to this laser head 44. FIG.

Next, the control drive system 50 of the laser head 44 in the coordinate detection apparatus 3 is demonstrated by FIG. In the control drive system 50, the drive pulse generator 52 is connected to the upper personal computer 51. An operation unit 54 such as a joystick is connected to the drive pulse generator 52 via an operation unit controller 53. The operation part 54 is not limited to a joy stick, What is necessary is just to give the instruction | position of the coordinate (X, Y) of the designated position so that the spot light s may be overlaid and irradiated to the defect k on the glass substrate 8 For example, a two-dimensional coordinate designation switch such as a track ball or a cross may be used.

On the operation part 54, the X coordinate of the stop position of the guide bar 40 along the longitudinal direction (X-axis direction) of the 1st belts 35 and 36 in the surface of the glass substrate 8, and a guide bar ( The defect position coordinate registration switch 55 for registering the Y coordinate of the stop position of the laser head 44 along the longitudinal direction (Y-axis direction) of 40 is formed. As a registration switch, although a push switch was provided in the vicinity of the operation lever of a joy stick in this embodiment, you may install a switch in the floor of the position which the inspector of the subject inspection apparatus 1 visually observes.

The operation unit controller 53 inputs two-dimensional coordinate information generated when the operation unit 54 is operated by the inspector, and separates the operation directions in the X-axis direction and the Y-axis direction for the operation unit 54 from the two-dimensional coordinate information. And a drive pulse output instruction in the X-axis direction and a drive pulse output instruction in the Y-axis direction.

The drive pulse generator 52 receives the drive pulse output instruction in the X-axis direction and the drive pulse output instruction in the Y-axis direction output from the operation unit controller 53, and drives the X-axis direction by the drive pulse output instruction in the X-axis direction. A pulse is sent to the motor driver 57, and a Y-axis direction drive pulse is sent to the motor driver 58 by the drive pulse output instruction in the Y-axis direction.

The motor driver 57 receives the X-axis direction drive pulse from the drive pulse generator 52 and drives the motor M2 to rotate to move the guide bar 40 in the X-axis direction by a distance corresponding to the number of pulses. Has the function of The motor driver 58 receives the Y-axis direction drive pulse from the drive pulse generator 52 and rotates the motor M3 to move the laser head 44 in the Y-axis direction by a distance corresponding to the number of pulses. Has the function of

The upper personal computer 51 has the functions of the coordinate detecting means 60 and the origin variable means 61. The coordinate detecting means 60 is a drive pulse generator in the X-axis direction and a drive in the Y-axis direction from the drive pulse generator 52 when the defect position coordinate registration switch 55 provided in the operation unit 54 is operated. The XY coordinate data (two-dimensional coordinate data) of the defect k irradiated by the spot light s is calculated from the number of pulses.

The origin variable means 61 has a function of matching the coordinate origin of the spot light irradiation position by the laser head 44 with the X, Y coordinate reference position of the glass substrate 8. For example, when the X and Y coordinate reference positions of the glass substrate 8 are at the corners of the left end or the right end of the glass substrate 8, the coordinate origin of the spot light s is determined by the glass substrate 8. It is set at the position of the laser head 44 irradiated with the spot light s at the corner of the left end or the right end. When the defect k on the glass substrate 8 is found and spot light s is irradiated to this position, the coordinate origin is set as 0 point of X coordinate and 0 point of Y coordinate, and this coordinate origin (0, The number of pulses of the motors M2 and M3 is counted from 0) to obtain the coordinates (X, Y).

This coordinate origin is not limited to the corner | angular part of the left end or the right end of the glass substrate 8, and can set arbitrary positions.

As shown in FIG. 3, on the rotation holder 9, interference with the objective lens 21 of the micro viewing section 18 on one side edge portion of the glass substrate 8 parallel to the guide bar 40 is prevented. In order to evacuate the guide bar 40 is formed. The evacuation area may be at least removed from the glass substrate 8, and the guide bar 40 is rotated out of the scanning area in which the objective lens 21 of the micro observation unit 18 is scanned outside the glass substrate 8. You can also evacuate below the top of).

The subject inspection apparatus 1 according to the present embodiment has the above-described configuration, and next, as a function thereof, the coordinate detection method and the observation method of the defect k will be described.

First, macroscopic observation by visual observation is performed for defect inspection of the glass substrate 8 which is a subject.

In a state where the glass substrate 8 is mounted on the rotation holder 9 and fixed at a reference position, the motor M1 is rotationally driven for macro observation. By the drive of the motor M1, the support shaft 10 of the pulley 11 is rotated through the rotation shaft 13 and the belt 12. In this way, the rotation holder 9 is rotated from the horizontal state around the support shaft 10 at an angle? Suitable for visual observation of the inspector. When inspecting the macro, the inspector stops the rotation holder 9 at an angle θ (for example, 45 °) where the defect k is easy to be seen, or at a predetermined angle range (for example, where the defect k appears). 45˚ ± 5 ~ 10˚). At this time, macro illumination light is projected on the whole surface or a part of the glass substrate 8 from above the rotation holder 9, and macro observation of the glass substrate 8 is carried out by the eye of an examiner.

In this macro observation, when rotating the rotation holder 9 in a predetermined angle range, the rotation direction of the motor M1 is periodically reversed.

When a defect k is detected on the surface of the glass substrate 8 by the inspector by macro observation, the operation part 54 is operated in the state which stopped the rotation holder 9 at the angle which a defect is seen, and guide bar. The 40 and the laser head 44 are moved in the XY axis direction so that the irradiation position of the spot light s coincides with the defect position. This operation is performed as follows.

That is, the inspector operates the operation part 54, such as a joy stick, so that the spot light irradiation position by the laser head 44 may match with a defect position. Then, the two-dimensional coordinate information from the operation unit 54 is input to the operation unit controller 53, and the driving pulse output instruction in the X-axis direction and the drive pulse output instruction in the Y-axis direction are output from the two-dimensional coordinate information, respectively.

The drive pulse generator 52 receives the drive pulse output instruction in the X-axis direction and the drive pulse output instruction in the Y-axis direction output from the operation unit controller 53, and transmits the X-axis direction pulse to the motor driver 57. , The Y-axis direction driving pulse is sent to the motor driver 58. In the motor driver 57, the motor M2 is rotationally driven to move the guide bar 40 in the X-axis direction by a distance corresponding to the number of pulses output from the drive pulse generator 52. In the motor driver 58, the motor M3 is rotationally driven to move the laser head 44 in the Y-axis direction by the distance corresponding to the number of pulses.

Rotational drive of the motor M2 is transmitted from the shaft 38 to the first belts 35 and 36 through the pulleys 37a and 37c and moves the first belts 35 and 36 in synchronism with the guide bar 40. ) Moves along the third guide rails 33, 34 by the required amount in the X-axis direction. At the same time, the rotational drive of the motor M3 is transmitted from the pulley 43a to the second belt 42 so that the laser head 44 is integral with the second belt 42 by moving the second belt 42. Move by the required amount in the axial direction.

In this way, the spot light projected from the laser head 44 by moving the guide bar 40 and the laser head 44 in the X-axis and Y-axis directions by the operation adjustment of the operation unit 54 by the inspector. When s) overlaps with the defect k on the glass substrate 8, the operation of the operation part 54 is stopped.

At this time, the laser light projected from the irradiating portion 44a of the laser head 44 is projected in a state inclined at a predetermined angle α with respect to the glass substrate 8 to superimpose the spot light s on the defect k. Since the spot light s and the defect k do not become shadows of the main body of the guide bar 40 with respect to the inspector, the spot light s and the defect k can be confirmed by visually observing the spot light s through the gap 47. have.

After operating the operation part 54 and designating the defect k by the spot light s, and registering the defect k by the defect position coordinate registration switch 55, the host personal computer 51 drives the drive pulse generator. The coordinates Q (X, Y) of the defect k in which the spot light s overlaps with each other are calculated from the number of drive pulses in the X-axis direction and the number of drive pulses in the Y-axis direction from (52). Calculation of coordinate Q (X, Y) is performed for each defect k on the surface of the glass substrate 8, and is memorize | stored in the memory of the upper personal computer 51, respectively.

When the macro observation is completed in this manner, the motor M1 is reversely rotated, the rotation holder 9 is returned to its original horizontal state, and the guide bar 40 is moved to the evacuation area.

By designating the micro observation mode in the operation unit 54, the rotary holder 9 automatically returns to the horizontal state, thereby automatically evacuating the guide bar 40 to the evacuation area.

At the time of micro observation, the coordinates Q (X, Y) of each defect part detected by macro observation by the host personal computer 51 are read. Based on this coordinate Q (X, Y), the support part 17 of the micro observation device 5 moves each guide rail 15 and 16 to a Y-axis direction, and simultaneously the micro observation part 18 is a beam ( Along the guide rail not shown in 17a). In this way, the observation axis of the objective lens 21 in the micro observation part 18 is arrange | positioned on the coordinate Q (X, Y).

At this time, since the guide bar 40 is evacuated in the evacuation area, the objective lens 21 of the micro observation unit 18 does not collide with the guide bar 40. The objective lens 21 sandwiches the glass substrate 8 and the rotation holder 9 so as to face the transmission line illumination light source 28 so that the defect k transmitted through the light source 28 can be observed.

By examining the eyepiece 22, the inspector can microscopically observe (high magnification) the defect k on the glass substrate 8 through the objective lens 21. The TV camera 25 picks up the defect k of the glass substrate 8 obtained through the objective lens 21. The inspector performs micro observation by looking at the image of the defect k displayed on the TV monitor 30.

As described above, the coordinate detecting apparatus 3 and the object inspecting apparatus 1 according to the present embodiment have the surface of the glass substrate 8 by the laser spot light s of the laser head 44 in macro observation. Since the defect k is directly irradiated, the coordinate Q of the defect k is satisfactorily accurate without causing a gap between the coordinate position indicated by the luminous material or the like and the position of the defect k as in the conventional coordinate detection apparatus. X, Y) can be detected. By providing the coordinate detecting device 3 integrally with the rotation holder 9, even if the inclination angle of the rotation holder 9 changes, the irradiation angle α of the spot light s by the laser head 44 is glass. Since it is always constant with respect to the board | substrate 8, and further irradiates with a short predetermined distance from the upper side of the glass substrate 8, the visual observation of the spot light irradiation position by an inspector irrespective of the position of the defect k on the glass substrate 8 Observation and confirmation can be performed easily and surely, and the detection accuracy of the defect k position can be improved.

Moreover, the determination of the coordinate Q (X, Y) of the defect k on the surface of the glass substrate 8 operates the operation part 54, such as a joystick, and moves the guide bar 40 to an X-axis direction, and a laser head ( 44 is moved by the Y-axis direction, and it is obtained by the simple operation which only presses the defect position coordinate registration switch 55. FIG. Since the guide bar 40 is evacuated to the evacuation area at the time of micro observation and at the time of carrying in and out of the glass substrate, the guide bar 40 carries in and out of the objective lens 21 and the glass substrate 8 of the micro observation part 18. There is no collision with the carrier robot.

Next, the coordinate detecting apparatus 70 of the object inspection apparatus 1 according to the second embodiment of the present invention will be described with reference to FIG. 7, and the same reference numerals are used for the same or similar parts and members as the above-described embodiment. The description is omitted by using.

In the coordinate detecting device 70 shown in FIG. 7, the second belt 42 has a reflection mirror 71 (instructing means) in place of the laser head 44 and the gripping portion 45 used in the first embodiment. Is mounted. The laser head 72 (spot light source) is fixed to one end on the guide bar 40. The reflection mirror 71 is inclined so that the laser light projected from the laser head 72 is reflected and directed to the glass substrate 8, and the reflected laser light is inclined with respect to the glass substrate 8 as in the above-described embodiment. Inclined at (α) to reach the defect k of the glass substrate 8 at a predetermined distance.

According to the second embodiment, since the reflective mirror 71 needs only to be moved to detect the defect k, compared with the first embodiment in which the laser head 44 and the holding part 45 are moved. The driving force of the 2nd belt 42 can be reduced, and the small thing of low output is employable as the motor M3.

In this second embodiment, at the end of the guide bar 40, the second reflecting mirror is disposed opposite the first reflecting mirror 71 and the laser head 72 is rotated along the third guide rail 33. It is provided integrally on the holder 9 and the laser light from the laser head 72 is reflected by the second reflecting mirror and the first reflecting mirror 71 so as to reach the defect k of the glass substrate 8. do.

The spot light s is not limited to the circle shape but may be a cross or a wheel shape. The motors M1, M2, M3 are not limited to the step motor, and an appropriate drive source such as a servo motor may be adopted.

The present invention is, for example, an apparatus for inspecting a subject and used for inspecting a surface defect of a semiconductor glass substrate such as a glass substrate used for a flat panel display (FPD) such as a liquid crystal display or an organic electronic illumination (EL) display. Although the coordinate detection apparatus contained in the above was demonstrated, it can use for the coordinate detection apparatus for detecting any site | part of another suitable subject, or a subject inspection apparatus.

For example, although the said Example demonstrated the example which provided the micro observation means for micro observation, this micro observation means was abbreviate | omitted, and the coordinate detection apparatus of this invention is provided to the macro inspection apparatus provided with a rotation holder and a macro illumination part. It is available.

As mentioned above, although the Example of this invention was described with reference to drawings, it is clear that these Examples are only illustrations of this invention, and this invention is not limited to these Examples. Accordingly, additions, omissions, substitutions, and other modifications can be made without departing from the spirit and scope of the present invention. That is, the present invention is not limited to the above description, but only by the claims.

According to the coordinate detecting apparatus and the subject inspection apparatus according to the present invention, the spot light can be directly projected from a guide member facing the subject against any portion on the subject, and the distance between the indicating means and the subject and The projection angle of the light beam of the spot light can be made constant, the detection accuracy of the coordinates on the subject projecting the spot light is good, and stable detection accuracy can be obtained regardless of the irradiation position of the spot light.

Claims (14)

A holder for supporting the subject, A guide member movable on the surface of the subject, Instructing means provided in the guide member and capable of moving the spot light irradiated to the subject under test in a direction intersecting with a moving direction of the guide member; An operation unit which moves the irradiation position of the spot light on the subject, and Coordinate detection unit for obtaining coordinate data from the positional information on the irradiation position of the spot light on the subject. Coordinate detection apparatus comprising a. The method of claim 1, And the indicating means is a spot light source movable along the guide member. The method of claim 1, And said indicating means is a reflecting member movable along said guide member, said reflecting member including a spot light source for emitting said spot light. The method of claim 1, The light beam of the said spot light irradiated to the said to-be-tested object inclines with respect to the said to-be-tested object at the predetermined angle, The coordinate detection apparatus characterized by the above-mentioned. The method of claim 1, The light-shielding member is provided in the reflective optical path of the spot light reflected by the said subject, The coordinate detection apparatus characterized by the above-mentioned. The method of claim 5, And the light blocking member is arranged so as to form a gap between the guide member and the guide member so that the inspector can visually observe a defect on the subject. The method of claim 5, The light shielding member is provided so as to follow the spot light of the indicating means. The method of claim 1, Rotation means for changing the posture of the holder, and a macro illumination unit for irradiating macro illumination light from above the holder, wherein the guide member is a long side of the guide member in a state in which the holder is standing at a predetermined angle ( The coordinate detection apparatus characterized by the above-mentioned being mounted so that a direction may follow the same direction as the irradiation direction of macro illumination light. The method of claim 1, And said spot light is a laser light. The method of claim 1, And the guide member has a gap that allows an inspector to visually observe the spot light irradiated to the subject. The method of claim 1, And said operating portion moves said guide member and said spot light, respectively, to position them at a defect position on said object under test. In a subject inspection apparatus for irradiating macro illumination light from above while maintaining a subject at a predetermined inclination angle, and visually observing a defect on the subject, A rotation holder for holding the subject and standing at the predetermined inclination angle, A guide member installed on the rotation holder and moving on the surface of the subject, Instructing means which is provided in the guide member and moves the spot light irradiated to the object under test in a direction intersecting with a moving direction of the guide member; An operation unit which moves the guide member and the indicating means, respectively, and designates a defect position on the subject under the spot light irradiation position; and And a coordinate detecting unit for obtaining coordinate data of a defect position designated by the indicating means from coordinate data of each position of the guide member and the spot light. In a subject inspection apparatus capable of micro-observing a specific portion of a subject, A holder for supporting the subject, A guide member movable on the surface of the subject, Instructing means provided in the guide member and capable of moving the spot light irradiated to the subject under test in a direction intersecting with a moving direction of the guide member; An operation unit which moves the irradiation position of the spot light on the subject, A coordinate detector which obtains coordinate data from positional information relating to the irradiation position of the spot light on the subject; Equipped with a micro observation unit, By irradiating the spot light to the specific part of the subject, coordinate data of the specific part is obtained by the coordinate detecting part, and the micro observation part is relatively moved to the coordinate data position to perform microscope observation. Subject inspection device. The method of claim 13, The holder is provided with an evacuation area for evacuating the guide member to prevent interference with the micro-observing unit.

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