CN108613990A - A kind of microcosmic and compound check machine of macroscopic view - Google Patents
A kind of microcosmic and compound check machine of macroscopic view Download PDFInfo
- Publication number
- CN108613990A CN108613990A CN201810772506.2A CN201810772506A CN108613990A CN 108613990 A CN108613990 A CN 108613990A CN 201810772506 A CN201810772506 A CN 201810772506A CN 108613990 A CN108613990 A CN 108613990A
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- equipment base
- check machine
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- 150000001875 compounds Chemical class 0.000 title claims abstract description 13
- 230000007246 mechanism Effects 0.000 claims abstract description 57
- 238000007689 inspection Methods 0.000 claims abstract description 54
- 239000000463 material Substances 0.000 claims abstract description 22
- 230000033001 locomotion Effects 0.000 claims abstract description 7
- 238000003860 storage Methods 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 230000008450 motivation Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 7
- 230000008569 process Effects 0.000 abstract description 3
- 239000002131 composite material Substances 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8411—Application to online plant, process monitoring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention relates to a kind of microcosmic and compound check machines of macroscopic view, including equipment base station, micro examination device and macro inspection apparatus, wherein the air supporting hole for making detected material be suspended in above the equipment base station is provided on the equipment base station；The micro examination device includes checking equipment and driving the mobile mechanism for checking equipment movement, the inspection equipment that can be moved above the equipment base station, and micro examination is carried out to detected material；The macro inspection apparatus includes the inspection holder of rotating mechanism and the fixed detected material, the side or end for checking holder and being removably secured to the equipment base station by rotating mechanism.The present invention is by being integral type composite construction by micro examination equipment and macro -graph integration of equipments, micro examination and macro -graph can carry out on the same device, the detected materials such as moving display screen are not needed in checking process, check it is easy to operate it is simple, equipment volume is small, be greatly improved inspection efficiency.
Description
Technical field
The present invention relates to display screen manufacturing technology fields, and are more particularly related to a kind of microcosmic and compound inspection of macroscopic view
Look into machine.
Background technology
Currently, with the upgrading of the electronic products such as TV, mobile phone, tablet, the usage amount of display screen (LCD panel) by
Year increases, and domestic manufacturers are largely founding the factory, and new production line is constantly built up.Under this market environment, aiming at display screen makes
Special inspection equipment is also increasing significantly, in the prior art, in the inspection of display screen, macro -graph and micro examination point
Not Shi Yong two independent boards, two independent feed inlets, need carry out twice launch material operation, that is, need to carry out microcosmic inspection
Look into macro -graph two procedures, need display screen being first placed in micro examination equipment and carry out micro examination, in micro examination
After, then display screen is moved to macro -graph equipment and carries out macro -graph, it results in production process, checks moving step
The movement of cumbersome, checking process display screen needs to expend more human cost and time cost, and macro -graph equipment and microcosmic
It checks that equipment separates, it is larger to occupy production space.
Based on this, microcosmic display screen and macro -graph complex steps, of high cost, occupancy life can effectively be solved by seeking one kind
The big equipment in space is produced, those skilled in the art's technical problem urgently to be resolved hurrily is become.
Invention content
The present invention is in view of the above-mentioned problems, be designed to provide a kind of microcosmic and compound check machine of macroscopic view, to realize display
The microcosmic and macro -graph step of equal detected materials simplifies, reduces cost, reduces the technique effect that production space occupies.
In order to achieve the above objectives, the present invention adopts the following technical scheme that：
Embodiment of the invention discloses that a kind of microcosmic and macroscopical compound check machine of technique, including equipment base station, microcosmic inspection
Look into device and macro inspection apparatus, wherein
The air supporting hole for making the detected material be suspended in above the equipment base station is provided on the equipment base station；
The micro examination device includes the mobile mechanism for checking equipment and driving the inspection equipment movement, the inspection
Equipment can move above the equipment base station, and micro examination is carried out to detected material；
The macro inspection apparatus includes the inspection holder of rotating mechanism and the fixed detected material, the inspection holder
The side or end of the equipment base station are removably secured to by rotating mechanism.
Further, the inspection holder includes connecting rod and two clamping jaw arms, and two clamping jaw arms are in respectively
The both ends of the connecting rod are connected to angle, the connecting rod connects the rotating mechanism, is provided in the clamping jaw arms
Clamping jaw for clamping the detected material end.
Further, the equipment base station further includes sucker arms, and the sucker arms is connected in the connecting rod
Portion is provided with the sucker for adsorbing the detected material bottom surface in the sucker arms.
Further, slot corresponding with the sucker arms, the sucker arms are provided on the equipment base station
It can be inserted into the slot.
Further, the sucker arms and the clamping jaw arms are each perpendicular to the connecting rod.
Further, the rotating mechanism includes and connecting rod rotary shaft disposed in parallel, the drive rotary shaft
The rotary drive mechanism and fixed mechanism of rotation, the rotary shaft are rotatably disposed on the fixed mechanism, also, described
Rotary shaft is fixedly connected with the connecting rod.
Further, the equipment base station further includes vertically arranged jacking hole, jacking post and jacking driving mechanism, described
Hole is jacked to be arranged on the base station, the jacking driving mechanism drives jacking post upper and lower displacement in the jacking hole,
Make the top of the jacking post that can be higher or lower than the upper surface of the equipment base station.
Further, the jacking post is multiple, and synchronizes move up and down in the same plane.
Further, the mobile mechanism includes X-axis mobile mechanism and Y-axis moving mechanism, and the inspection equipment is slidably
Ground is placed in the Y-axis moving mechanism, and the Y-axis moving mechanism is slidably placed in the X-axis mobile mechanism.
Further, the inspection equipment is high accuracy number microscope.
Further, further include being separately connected the information storing device and display terminal for checking equipment, described information
Storage device is used to store the inspection result for checking equipment, and the display terminal is used to show the inspection for checking equipment
As a result.
The beneficial effects of the invention are as follows：
The present invention by being integral type composite construction by micro examination equipment and macro -graph integration of equipments, micro examination and
Macro -graph can carry out on the same device, not need the detected materials such as moving display screen, check easy to operate simple, equipment
It is small, it is greatly improved inspection efficiency.
Description of the drawings
Fig. 1 is microcosmic disclosed in one embodiment of the invention and the compound check machine vertical view of macroscopic view；
Fig. 2 is shown in FIG. 1 microcosmic and the compound check machine front view of macroscopic view；
Fig. 3 is microcosmic disclosed in one embodiment of the invention and the equipment base station structural scheme of mechanism of the compound check machine of macroscopic view；
Fig. 4 is microcosmic disclosed in one embodiment of the invention and the macro inspection apparatus vertical view of the compound check machine of macroscopic view；
Fig. 5 is macro inspection apparatus front view shown in Fig. 4；
Fig. 6 is microcosmic disclosed in one embodiment of the invention and macro -graph compounding machine micro examination device vertical view；
Fig. 7 is the front view of micro examination device shown in fig. 6；
Fig. 8 is microcosmic disclosed in one embodiment of the invention and macro -graph compounding machine macro -graph state diagram.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
One embodiment of the invention discloses that a kind of display screen technique is microcosmic and the compound check machine of macroscopic view, such as Fig. 1, shown in Fig. 2,
It includes equipment base station 1, micro examination device 2 and macro inspection apparatus 3, wherein
The air supporting hole 11 for making the display screen be suspended in 1 top of the equipment base station is provided on the equipment base station 1；
The micro examination device 2 includes the mobile mechanism for checking equipment and driving the inspection equipment movement, the inspection
Looking into equipment can move above the equipment base station, and micro examination is carried out to display screen；
The macro inspection apparatus 3 includes the inspection holder of the detected materials such as rotating mechanism and the fixed display screen 4, institute
State the side or end for checking that holder is removably secured to the equipment base station by rotating mechanism.
The microcosmic and compound check machine of macroscopic view, may be applicable to six generation lines and LCD liquid crystal surfaces below disclosed in the present embodiment
The switching of micro examination state and macro -graph state is realized in plate inspection by rotating mechanism, when carrying out micro examination, display
The detected materials such as screen are horizontal positioned, check that holder is fixed, and equipment checked under the drive of mobile mechanism, on equipment base station
Fang Jinhang two dimensional motions can carry out microcosmic detection, after the completion of microcosmic detection, only to any position of the detected materials such as display screen
It needs to be rotated by rotating mechanism, will check that holder is rotated to proper angle, you can carry out macro -graph, macro -graph shape
Body figure can make object to be detected restore horizontal positioned as shown in figure 8, after macro -graph by rotating mechanism spinning reduction, into
Enter state to be output, checks that work finishes at this time.
In another embodiment of the present invention, such as Fig. 4, shown in Fig. 5, the inspection holder of macro inspection apparatus includes connecting
Extension bar 31 and two clamping jaw arms 32, two clamping jaw arms 32 are angularly connected to the two of the connecting rod 31 respectively
End, the connecting rod 31 connect the rotating mechanism 34, are provided in the clamping jaw arms 32 for clamping the display screen end
The clamping jaw 33 in portion.Preferably, the connecting rod may be configured as retractable structure, and by the flexible of connecting rod, two clamping jaw of time is inserted
The change of arm spacing, to realize the inspection to different sizes object to be checked.
Preferably, the equipment base station further includes sucker arms 35, and the sucker arms 35 is connected to the connecting rod 31
Middle part, the sucker 36 for adsorbing the display screen bottom surface is provided in the sucker arms 35, the sucker arms 35 can
Think multiple, be distributed in connecting rod, the length of length and detected material is adapted.
In another embodiment of the present invention, on the basis of the above embodiments, as shown in Figure 1, being set on the equipment base station 1
It is equipped with slot 12 corresponding with the sucker arms 35, the sucker arms 35 can be inserted into the slot 12.It can be effective
Reduce the height of whole equipment.
Preferably, the sucker arms 35 and the clamping jaw arms 32 are each perpendicular to the connecting rod 31.Suitable for application
Most commonly used rectangular display screen.
In another embodiment of the present invention, the rotating mechanism includes and connecting rod rotary shaft disposed in parallel, band
The rotary drive mechanism and fixed mechanism of the dynamic rotary shaft rotation, the rotary shaft are rotatably disposed in the fixed mechanism
On, also, the rotary shaft is fixedly connected with the connecting rod.
When being checked using the above embodiments, check that the clamping jaw arms 32 of holder and sucker arms 35 are inserted into, sucker
Arms is located at below LCD glass, and sucker face LCD lower glass surfaces thereon are adsorbed LCD glass, the clamping jaw of clamping jaw arms
The both sides of LCD glass are fixed, at this point, LCD glass enters state to be checked.
In another embodiment of the present invention, as shown in Fig. 1, Fig. 2 and Fig. 3, the equipment base station 1 further includes vertically arranged
Hole 13, jacking post 14 and jacking driving mechanism (not shown), the jacking hole 13 is jacked to be arranged on the equipment base station,
The jacking driving mechanism drives the upper and lower displacement in the jacking hole 13 of jacking post 14, makes the top of the jacking post 14
The upper surface of the equipment base station can be higher or lower than, the jacking post is multiple, and in the same plane above and below synchronous progress
It is mobile.Jacking post can consist of two parts, and a part is the strut of lower part, and another part is the PEEK for being connected to strut upper end
Antistatic contact avoids generating damage to LCD glass for contacting LCD glass.
Preferably, it as shown in Figure 1, being provided with positioning column 15 on shown equipment base station 1, is detected in LCD panel etc.
When object is moved on equipment base station, LCD panel is caught in the rise of jacking post 14, while air supporting hole starts to spray gas, generates
Air pressure, jacking post 14 are slowly declined, so that LCD glass is suspended on equipment base station, determined at this time LCD glass using positioning column
Position is to just operating, and since LCD is suspended in above platform, the positioning to LCD glass itself to that just will not generate damage.Positioning
Column 15 could be provided as four, be separately positioned on two ends of equipment base station, each end set two, two ends when positioning
Four positioning columns in portion are moved to middle part at the same speed, and LCD glass is positioned to center, complete positioning to just.
In another embodiment of the present invention, such as Fig. 6, shown in Fig. 7, the micro examination device includes checking equipment 21 and band
The dynamic mobile mechanism for checking equipment and moving in the horizontal plane.The mobile mechanism includes X-axis mobile mechanism 22 and Y-axis movement
Mechanism 23, the inspection equipment 21 are slidably mounted in the Y-axis moving mechanism 23, and the Y-axis moving mechanism 23 can be slided
Dynamic is placed in the X-axis mobile mechanism 22.
Further include being separately connected institute to realize storage and the display analysis of inspection result in another embodiment of the present invention
The information storing device and display terminal for checking equipment are stated, described information storage device is used to store the inspection for checking equipment
As a result, the display terminal is used to show the inspection result for checking equipment.
In above-described embodiment, after LCD glass enters state to be checked, the inspection equipment of micro examination (Micro inspections) is just
LCD glass is carried out to be accurately positioned inspection.Usual optical checking equipment is high accuracy number microscope.X, Y-axis moving mechanism by
Servo motor is driven, and can be accurately positioned to any point on LCD glass and arrive the information Real-time Feedback of acquisition
On display terminal, and information can be stored.
The embodiment of the present invention may be applicable to six generation lines and LCD panel inspection below, and LCD process inspections is made to set
It is standby to have on a pallet while having the function of that macro -graph (Macro inspections) and Micro check, it is only necessary to primary to launch
Whole inspections can be completed in material, therefore equipment is complete, small, compact-sized with function, inspection time is short, operation side
Just, efficient advantage.
The foregoing is merely presently preferred embodiments of the present invention, practical range not for the purpose of limiting the invention；If do not taken off
It from the spirit and scope of the present invention, modifies or equivalently replaces the present invention, should all cover in the claims in the present invention
In protection domain.
Claims (10)
1. a kind of microcosmic and compound check machine of macroscopic view, which is characterized in that including equipment base station, micro examination device and macro -graph
Device, wherein
The air supporting hole for making detected material be suspended in above the equipment base station is provided on the equipment base station；
The micro examination device includes the mobile mechanism for checking equipment and driving the inspection equipment movement, the inspection equipment
It can be moved above the equipment base station, micro examination is carried out to detected material；
The macro inspection apparatus includes the inspection holder of rotating mechanism and the fixed detected material, and the inspection holder passes through
Rotating mechanism is removably secured to the side or end of the equipment base station.
2. check machine according to claim 1, which is characterized in that the inspection holder includes that connecting rod and two clamping jaws are inserted
Arm, two clamping jaw arms are angularly connected to the both ends of the connecting rod respectively, and the connecting rod connects the rotation
Mechanism is provided with the clamping jaw for clamping the detected material end in the clamping jaw arms.
3. check machine according to claim 2, which is characterized in that the equipment base station further includes sucker arms, the suction
Disk arms is connected to the middle part of the connecting rod, and the suction for adsorbing the detected material bottom surface is provided in the sucker arms
Disk.
4. check machine according to claim 3, which is characterized in that be provided on the equipment base station and the sucker arms
Corresponding slot, the sucker arms can be inserted into the slot.
5. check machine according to claim 3, which is characterized in that the sucker arms and the clamping jaw arms are each perpendicular to
The connecting rod.
6. check machine according to claim 2, which is characterized in that the rotating mechanism includes sets parallel with the connecting rod
The rotary shaft set, the rotary drive mechanism and fixed mechanism that drive the rotary shaft to rotate, the rotary shaft rotatably dispose
On the fixed mechanism, also, the rotary shaft is fixedly connected with the connecting rod.
7. check machine according to claim 1, which is characterized in that the equipment base station further includes vertically arranged jacking
Hole, jacking post and jacking driving mechanism, the jacking hole are arranged on the equipment base station, and the jacking driving mechanism drives institute
Jacking post upper and lower displacement in the jacking hole is stated, makes the top of the jacking post that can be higher or lower than the upper of the equipment base station
Surface.
8. check machine according to claim 7, which is characterized in that the jacking post is multiple, and same in the same plane
Step moves up and down.
9. check machine according to claim 1, which is characterized in that the mobile mechanism includes that X-axis mobile mechanism and Y-axis are moved
Motivation structure, the inspection equipment are slidably mounted in the Y-axis moving mechanism, and the Y-axis moving mechanism is slidably pacified
It sets in the X-axis mobile mechanism.
10. check machine according to claim 1, which is characterized in that further include being separately connected the information for checking equipment
Storage device and display terminal, described information storage device are used to store the inspection result for checking equipment, and the display is eventually
It holds for showing the inspection result for checking equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810772506.2A CN108613990A (en) | 2018-07-13 | 2018-07-13 | A kind of microcosmic and compound check machine of macroscopic view |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810772506.2A CN108613990A (en) | 2018-07-13 | 2018-07-13 | A kind of microcosmic and compound check machine of macroscopic view |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108613990A true CN108613990A (en) | 2018-10-02 |
Family
ID=63666454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810772506.2A Pending CN108613990A (en) | 2018-07-13 | 2018-07-13 | A kind of microcosmic and compound check machine of macroscopic view |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108613990A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109061919A (en) * | 2018-10-15 | 2018-12-21 | 苏州精濑光电有限公司 | A kind of macro -graph machine |
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| CN1906476A (en) * | 2004-09-27 | 2007-01-31 | 奥林巴斯株式会社 | Macro inspection apparatus and macro inspection method |
| CN102608121A (en) * | 2011-01-06 | 2012-07-25 | 奥林巴斯株式会社 | Substrate inspection system |
| CN105353537A (en) * | 2015-11-09 | 2016-02-24 | 张笑多 | Macroscopic inspection machine capable of automatically positioning and measuring luminance |
| CN106814550A (en) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | Work stage substrate delivery/reception device and pre-alignment method |
| CN206671219U (en) * | 2017-01-26 | 2017-11-24 | 江苏东旭亿泰智能装备有限公司 | Substrate positioning mechanism, macro inspection apparatus |
| CN208537447U (en) * | 2018-07-13 | 2019-02-22 | 江苏东旭亿泰智能装备有限公司 | A kind of micro and macro compound check machine |
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2018
- 2018-07-13 CN CN201810772506.2A patent/CN108613990A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1548946A (en) * | 2003-05-06 | 2004-11-24 | De & T株式会社 | Substrate checking apparatus |
| CN1906476A (en) * | 2004-09-27 | 2007-01-31 | 奥林巴斯株式会社 | Macro inspection apparatus and macro inspection method |
| CN1808055A (en) * | 2005-01-18 | 2006-07-26 | 奥林巴斯株式会社 | Coordinate inspecting gear and checking fixture for object for inspecting |
| CN102608121A (en) * | 2011-01-06 | 2012-07-25 | 奥林巴斯株式会社 | Substrate inspection system |
| CN105353537A (en) * | 2015-11-09 | 2016-02-24 | 张笑多 | Macroscopic inspection machine capable of automatically positioning and measuring luminance |
| CN106814550A (en) * | 2015-11-30 | 2017-06-09 | 上海微电子装备有限公司 | Work stage substrate delivery/reception device and pre-alignment method |
| CN206671219U (en) * | 2017-01-26 | 2017-11-24 | 江苏东旭亿泰智能装备有限公司 | Substrate positioning mechanism, macro inspection apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109061919A (en) * | 2018-10-15 | 2018-12-21 | 苏州精濑光电有限公司 | A kind of macro -graph machine |
| CN109061919B (en) * | 2018-10-15 | 2024-04-16 | 苏州精濑光电有限公司 | Macroscopic inspection machine |
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Effective date of registration: 20201215 Address after: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant after: Jiangsu Hongxin Yitai Intelligent Equipment Co.,Ltd. Address before: No. 223800, Suhu Economic Development Zone, Jiangsu Province Applicant before: JIANGSU TUNGHSU YITAI INTELLIGENT EQUIPMENT Co.,Ltd. Applicant before: DONGXU OPTOELECTRONIC TECHNOLOGY Co.,Ltd. |