CN207779931U - A kind of half board checking device of substrate - Google Patents

A kind of half board checking device of substrate Download PDF

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Publication number
CN207779931U
CN207779931U CN201721843840.XU CN201721843840U CN207779931U CN 207779931 U CN207779931 U CN 207779931U CN 201721843840 U CN201721843840 U CN 201721843840U CN 207779931 U CN207779931 U CN 207779931U
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China
Prior art keywords
plummer
track
checking device
microscope carrier
board checking
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Active
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CN201721843840.XU
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Chinese (zh)
Inventor
朱志飞
杨慎东
郭连俊
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Suzhou Hirose Opto Co Ltd
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Suzhou Hirose Opto Co Ltd
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Priority to CN201721843840.XU priority Critical patent/CN207779931U/en
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Abstract

The utility model is related to a kind of half board checking devices of substrate, including:Pedestal, plummer, detection components, probe assembly and temporary station;The pedestal is equipped with track, and the plummer is slideably positioned on track, and includes the first microscope carrier A and the second microscope carrier B;The detection components are set to above track, including gantry head and detector, and gantry head is set on pedestal, and the detector is slideably positioned on the head of gantry;The probe assembly is set to above track;The temporary station is set to the second end of the rail.Half board checking device of glass substrate provided by the utility model, can realize the full-automatic detection of half plate of glass substrate, substantially increase the efficiency of glass substrate gray scale and defects detection.

Description

A kind of half board checking device of substrate
Technical field
The utility model is related to half board checking devices of display panel detection field more particularly to a kind of substrate.
Background technology
The making of usual screen has many section processing procedures, and the making of wherein glass substrate is one of important step. And in the production process of screen glass substrate, it can always be generated inside glass baseplate surface or glass substrate various types of Defect, defect may include that the optics of surface discontinuity, line defect, striped, calculus, bubble and glass substrate body is uneven Property etc..And in order not to allow defective glass substrate to be flowed on subsequent processing procedure, it usually needs whether there is to glass substrate Drawbacks described above is detected.With being continuously increased for size of display panels, the difficulty of carrying, production and the detection of whole panel by It is cumulative big, it will usually the whole substrate magnified to be cut into two and half plates even smaller, in order to carry and produce, and in the prior art The detection device of display panel only can be suitably used for the detection of whole panel, cannot be detected simultaneously to two and half plates, use is existing Equipment can only detect half substrate every time, seriously affect detection efficiency.
Utility model content
The technical problems to be solved in the utility model is:It is low to solve half plate detection efficiency of glass substrate in the prior art The problem of.
Technical solution adopted by the utility model to solve its technical problems is:A kind of half board checking device of substrate, including: Pedestal, plummer, detection components, probe assembly and temporary station;
The pedestal is equipped with track, and the plummer is slideably positioned on track, and includes that the first microscope carrier A and second is carried Platform B, the first microscope carrier A and the second microscope carrier B are respectively used to half substrate of carrying;The track has opposite first end and the Two ends;
The detection components are set to above track, including gantry head and detector, and gantry head is set on pedestal, The detector is slideably positioned on the head of gantry, and optical detection is carried out for double of plate;The probe assembly is set on track Side carries out electrical detection for double of plate;
The temporary station is set to the second end of the rail;Wherein,
The first microscope carrier A and the second microscope carrier B are sequentially moved between the first end and the second end, are completed The detection of two and half plates;And half plate on the first microscope carrier A, when being detected, the second microscope carrier B is located at the temporary work Position.
It is further improved to be evenly arranged with multiple liftable stabilizer blades for accepting glass substrate on the plummer.
It is further improved to be evenly distributed with multiple adsorption holes, the adsorption hole and vaccum-pumping equipment on the plummer It is connected.
It is further improved as the plummer is arranged with the driver of driving plummer rotation.
It is further improved as the plummer surrounding is provided with telescopic pinch, for clamping glass substrate.
It is further improved as the plummer bottom is equipped with the mobile mechanism perpendicular to orbital direction, and the track two Side is respectively provided with a camera, and the camera is used to obtain the location information of glass substrate.
It is further improved as the pedestal is arranged with except shake platform.
It is further improved as the temporary station further includes cassette, and the cassette is for storing multigroup probe groups.
Be further improved for, further include that probe replaces component, the probe is replaced component and is set on pedestal by holder, The probe replaces component with the manipulator for gripping probe groups, and the manipulator is by the second track in cassette and probe It is moved between component.
It is further improved as the cassette both sides are equipped with lift assemblies, are taken probe groups to be taken are lifted or are displaced downwardly to Material height.
The utility model has the beneficial effects that:
Half board checking device of glass substrate provided by the utility model realizes glass substrate optical property and electric property Full-automatic detection, substantially increase detection efficiency, save manpower.Meanwhile being detected while realizing two and half plates, and not It a device can be used to be detected with product, improve detection efficiency.
Description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the half board checking device structural schematic diagram of substrate of the utility model;
Fig. 2 is the plummer structural schematic diagram of the utility model;
Fig. 3 is the detection components and probe assembly structural schematic diagram of the utility model;
Fig. 4 is the portions C enlarged drawing in Fig. 1;
Fig. 5 is for the driver of the utility model and except shake platform structural schematic diagram;
Reference numeral in figure is:
1- pedestals, 2- plummers, 3- detection components, 4- probe assemblies, 5- holders, for 6- except shake platform, 7- keeps in station, and 8- is visited Needle replacement component, 11- tracks, 12- cameras, 21- stabilizer blades, 22- drivers, 23- pinches, 24- mobile mechanisms, 25- adsorption holes, The gantry 31- head, 311-Y is to track, 32- detectors, 41- fixed seats, 42- probe groups, and 51-X is to moving track, 71- lifting groups Part, 72- cassettes, 81- manipulators, the second tracks of 82-.
Specific implementation mode
The utility model is described in further detail presently in connection with attached drawing.These attached drawings are simplified schematic diagram, Only illustrate the basic structure of the utility model in a schematic way, therefore it only shows composition related with the utility model.
In the description of utility model, it is to be understood that term "center", " longitudinal direction ", " transverse direction ", " length ", " width Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " suitable The orientation or positional relationship of the instructions such as hour hands ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, merely to just Described in description utility model and simplifying, do not indicate or imply the indicated device or element must have a particular orientation, With specific azimuth configuration and operation, therefore it should not be understood as the limitation to utility model.
In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply relative importance Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or Implicitly include one or more this feature.In the description of utility model, the meaning of " plurality " is two or two with On, unless otherwise specifically defined.
In utility model unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " Equal terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;Can be Mechanical connection can also be electrical connection;It can be directly connected, can also can be indirectly connected through an intermediary two Connection inside element.For the ordinary skill in the art, above-mentioned term can be understood in reality as the case may be With the concrete meaning in novel.
Embodiment
As shown in Figure 1, the present embodiment provides a kind of half board checking devices of substrate, which is characterized in that including:Pedestal 1, carrying Platform 2, detection components 3, probe assembly 4 and temporary station 7;
The pedestal 1 is equipped with track 11, and the plummer 2 is slideably positioned on track 11, and include the first microscope carrier A and Second microscope carrier B, the first microscope carrier A and the second microscope carrier B is respectively used to half substrate of carrying;The track 11 has opposite the One end (left end of device in Fig. 1) and second end (right end of device in Fig. 1);
The temporary station 7 is set to the second end of the track 11;Wherein, the first microscope carrier A and described second is carried Platform B is sequentially moved between the first end and the second end, completes the detection of two and half plates;And on the first microscope carrier A Half plate when being detected, the second microscope carrier B is located at the temporary station 7;Probe assembly 4 carries out gray scale and defect to substrate Detection;
As shown in figure 3, the detection components 3 are set to 11 top of track, including gantry head 31 and detector 32, the dragon Door head 31 is set to by holder 5 on pedestal 1, and X is equipped on the holder 5 to moving track 51 and driving equipment, is being driven Under the driving of equipment, gantry head 31 can be mobile to (the second extreme direction of track 11) along X, and the detector 32 passes through dragon Door head on Y-direction track 311 be slideably positioned in gantry head 31 on, the detector 32 by under the driving of driving equipment along Y To movement, realizes comprehensive scanning of double of plate, complete the inspection of detection of optical property, such as double plate gray scale, microdefect etc. It looks into.
The probe assembly 4 is set to the top of track 11, including fixed seat 41 and the probe groups that are set in fixed seat 41 42, the fixed seat 41 is set up and 11 top of track, when the plummer 2 for carrying glass substrate is moved to 4 lower section of probe assembly When, the probe groups 42 are crimped on the contact point on glass substrate, for providing power supply, display content signal for glass substrate Make its work, detector shoots the display effect of the glass substrate and is sent to detection device at this time, while also to glass substrate Carry out electrical detection.
The detection device is connect with detector 32, obtains the display effect information of the glass substrate of detector shooting, and It analyzes the gray scale of the detected glass substrate and whether there is defect.Wherein, detection device be computer, server or other Equipment with analytic function is calculated.
As shown in Fig. 2, being further improved to be evenly arranged on the plummer 2 multiple for accepting glass substrate Liftable stabilizer blade 21.The workshop of usual glass substrate all has robot arm, and the comb for passing through the robot arm Glass substrate is placed on plummer 2 by type manipulator, and glass substrate can be scratched, be placed if direct place and without corresponding accept It is not in place or even fall.And in the technical program, when glass substrate is placed on plummer 2 by comb type manipulator, stabilizer blade 21 After glass substrate is accepted in rising, comb type manipulator detaches again, and stabilizer blade 21 declines, and just avoids the above problem.
As shown in Fig. 2, being further improved to be evenly distributed with multiple adsorption holes 25, the adsorption hole on the plummer 2 25 are connected with vaccum-pumping equipment.When stabilizer blade 21 declines, after glass substrate is placed on plummer 2, vaccum-pumping equipment take out true Air between glass substrate and plummer 2 is siphoned away and is kept by sky, so that glass substrate is securely fastened to plummer 2 On, so as to avoid probe assembly 4 again probe groups 42 carry out crimping be occur tilt or displacement and crimp and be not allowed to cause glass Substrate cannot be lit the generation of problem.
It is further improved as the plummer 2 is arranged with the driver 22 of driving plummer rotation.Due to different product Glass substrate on contacting points position it is different, some is located in the long side of glass substrate, and some is then positioned at the short of glass substrate Bian Shang, therefore can be rotated by dividing into set driver in plummer 2, just the glass substrate of different product can be carried out Detection, without more exchange device.
As shown in figure 4, being further improved as 2 surrounding of the plummer is provided with telescopic pinch 23, for clamping glass Glass substrate, the pinch 23 is L-type pinch in the present embodiment.Due to transfer glass substrate robot arm displacement error and The factors such as the displacement of its top glass substrate influence, and when glass substrate is positioned on plummer 2, position is not very accurate, and holds The telescopic pinch 23 of 2 surrounding of microscope carrier setting is stretching state when not placing glass substrate, is held when glass substrate is positioned over After on microscope carrier 2, pinch 23 is shunk, so that glass substrate is aligned and clamped;Or while stabilizer blade 21 stretches out, pinch 23 is stretched Go out, after glass substrate is positioned on plummer 2, pinch 23 is shunk.
It is further improved as 2 bottom of the plummer is equipped with the mobile mechanism 24 perpendicular to orbital direction, and the track 11 both sides are respectively provided with a camera 12, and the camera 12 is used to obtain the location information of glass substrate.It is carried out by pinch Contraposition be mechanical contraposition, still have the error of 0.3mm or so, clapped by camera 12 and take the position of 2 top glass substrate of plummer Set figure, obtain the position of glass substrate, so control equipment control plummer 2 that plummer 2 moves along 11 direction of track and/or It is moved perpendicular to 11 direction of track so that plummer 2 is moved to corresponding position, it is ensured that probe groups 42 are crimped onto glass base below Position is accurate on the contact point of plate.
As shown in figure 5, being further improved as the pedestal 1 is arranged with except shake platform 6.The present apparatus is precise detection device, And usually work in-plant equipment is very more, people is also very much, therefore has the accuracy of detection of many focus influence devices, and is removed by this Shake platform 6 can effectively exclude interference of the extraneous vibration to the present apparatus.
It is further improved to further include cassette 72 at the temporary station 7 of the present apparatus, the cassette 72 is for storing multigroup spy Needle group.Facilitate the replacement of the glass substrate probe groups of different product.
As shown in figures 1 and 3, it is further improved as the present apparatus further includes that probe replaces component 8, the probe replacement group Part 8 is set to by holder 5 on pedestal 1, and the probe replacement component 8 has the manipulator 81 for gripping probe groups, described Manipulator 81 is travelled to and fro between by the second track 82 between cassette 72 and probe assembly 4, and 72 bottom of the cassette is equipped with lifting group Part 71, to lift or be displaced downwardly to feeding height by probe groups to be taken.When needing replacing the probe groups on probe assembly 4, machine Tool hand 81 is moved to along the second track 82 at probe assembly 4 by linear motor to be removed probe groups thereon and returns to cassette 72, 72 lift assemblies 71 of cassette work, and cassette 72 is made to rise or fall, and then are not stored in cassette 72 at the empty positions of probe groups pair Manipulator 81 is answered, then manipulator 81 places probe groups in the position, completes probe groups and fetches;72 lift assemblies of cassette, 71 work Make, cassette 72 made to rise or fall, and then 72 memory of the cassette probe groups position in requisition for replacement of being rivals in a contest is corresponding with manipulator 81, Manipulator 81 is removed the probe groups and is moved at probe assembly 4 along the second track 82, and is placed on the fixed seat 41 of probe groups On, it completes probe groups and replaces.
Two and half plate detection process on first microscope carrier A and the second microscope carrier B:When two and half plates detect simultaneously, pass through first After two and half plates are respectively placed on the first microscope carrier A and the second microscope carrier B by robot arm, carry out first on the second microscope carrier B Half plate of glass substrate detects, if the contact point on the glass substrate is located at short side, first rotates after the second microscope carrier B along track 11 It is moved at probe assembly 4, probe groups 42 are crimped on contact point and power to it, and detector 32 carries out acquisition display effect of taking pictures Fruit, after detection, the second microscope carrier B continues to move along the temporary station 7 of 11 second end of track, and then the first microscope carrier A is moved It moves and is detected at detection components 4, first end is returned to after half plate of the glass substrate detection on the first microscope carrier A, meanwhile, Second microscope carrier B also returns to first end.
Half board checking device of glass substrate provided by the utility model realizes the full-automatic of glass substrate gray scale and defect Detection, substantially increases detection efficiency, saves manpower.Meanwhile it being detected while realizing two and half plates and different product can It is detected using a device, improves detection efficiency.
It is enlightenment, through the above description, related work people with the above-mentioned desirable embodiment according to the utility model Member can carry out various changes and amendments in the range of without departing from this item utility model technological thought completely.This item is real It is not limited to the contents of the specification with novel technical scope, it is necessary to which its technology is determined according to right Property range.

Claims (10)

1. a kind of half board checking device of substrate, which is characterized in that including:Pedestal (1), plummer (2), detection components (3), probe Component (4) and temporary station (7);
The pedestal (1) is equipped with track (11), and the plummer (2) is slideably positioned on track (11), and includes the first load Platform A and the second microscope carrier B, the first microscope carrier A and the second microscope carrier B is respectively used to half substrate of carrying;The track (11) has Opposite first end and second end;
The detection components (3) are set to above track (11), including gantry head (31) and detector (32), gantry head (31) it is set on pedestal (1), the detector (32) is slideably positioned on gantry head (31), and optics inspection is carried out for double of plate It surveys;The probe assembly (4) is set to above track (11), and electrical detection is carried out for double of plate;
The temporary station (7) is set to the second end of the track (11);Wherein,
The first microscope carrier A and the second microscope carrier B are sequentially moved between the first end and the second end, complete two The detection of half plate;And half plate on the first microscope carrier A, when being detected, the second microscope carrier B is located at the temporary station (7)。
2. half board checking device of substrate according to claim 1, which is characterized in that be uniformly arranged on the plummer (2) There are multiple liftable stabilizer blades (21) for accepting glass substrate.
3. half board checking device of substrate according to claim 1, which is characterized in that be uniformly distributed on the plummer (2) There are multiple adsorption holes (25), the adsorption hole (25) to be connected with vaccum-pumping equipment.
4. half board checking device of substrate according to claim 1, which is characterized in that the plummer (2) is arranged with drive The driver (22) of dynamic plummer rotation.
5. half board checking device of substrate according to claim 1, which is characterized in that plummer (2) surrounding is provided with Telescopic pinch (23), for clamping glass substrate.
6. half board checking device of substrate according to claim 5, which is characterized in that plummer (2) bottom, which is equipped with, hangs down Directly in the mobile mechanism of orbital direction (24), and the track (11) both sides are respectively provided with a camera (12), the camera (12) it is used to obtain the location information of glass substrate.
7. half board checking device of substrate according to claim 1, which is characterized in that the pedestal (1) is arranged with except shake Platform (6).
8. half board checking device of substrate according to claim 1, which is characterized in that the temporary station (7) further includes card Casket (72), the cassette (72) is for storing multigroup probe groups.
9. half board checking device of substrate according to claim 8, which is characterized in that
Further include that probe replaces component (8), the probe is replaced component (8) and is set on pedestal (1) by holder (5), described Probe replaces component (8) with the manipulator (81) for gripping probe groups, and the manipulator (81) passes through the second track (82) It is moved between cassette (72) and probe assembly (4).
10. half board checking device of substrate according to claim 8, which is characterized in that cassette (72) both sides, which are equipped with, lifts Component (71) is risen, to lift or be displaced downwardly to feeding height by probe groups to be taken.
CN201721843840.XU 2017-12-26 2017-12-26 A kind of half board checking device of substrate Active CN207779931U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721843840.XU CN207779931U (en) 2017-12-26 2017-12-26 A kind of half board checking device of substrate

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Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
CN207779931U true CN207779931U (en) 2018-08-28

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107966458A (en) * 2017-12-26 2018-04-27 苏州精濑光电有限公司 A kind of half board checking device of substrate
CN109540921A (en) * 2019-01-16 2019-03-29 苏州精濑光电有限公司 A kind of monitor station
CN110567986A (en) * 2019-10-22 2019-12-13 苏州精濑光电有限公司 Silicon-based OLED panel lighting inspection equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107966458A (en) * 2017-12-26 2018-04-27 苏州精濑光电有限公司 A kind of half board checking device of substrate
CN107966458B (en) * 2017-12-26 2024-02-09 苏州精濑光电有限公司 Substrate half-plate detection device
CN109540921A (en) * 2019-01-16 2019-03-29 苏州精濑光电有限公司 A kind of monitor station
CN110567986A (en) * 2019-10-22 2019-12-13 苏州精濑光电有限公司 Silicon-based OLED panel lighting inspection equipment
CN110567986B (en) * 2019-10-22 2020-11-17 苏州精濑光电有限公司 Silicon-based OLED panel lighting inspection equipment

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