CN110567986A

CN110567986A - Silicon-based OLED panel lighting inspection equipment

Info

Publication number: CN110567986A
Application number: CN201911008142.1A
Authority: CN
Inventors: 朱志飞
Original assignee: Suzhou Hirose Opto Co Ltd
Current assignee: Suzhou Hirose Opto Co Ltd
Priority date: 2019-10-22
Filing date: 2019-10-22
Publication date: 2019-12-13
Anticipated expiration: 2039-10-22
Also published as: WO2021077551A1; CN110567986B

Abstract

the application relates to a silicon-based OLED panel lighting inspection device, including: the adsorption platform is used for placing and fixing the silicon-based OLED panel; a probe cartridge for storing the probe; the compression joint workbench is used for compression joint of the silicon-based OLED panel; the probe taking and placing mechanism is used for taking and placing probes between the probe cassette and the compression joint workbench; the outer cover, the adsorption platform, the probe card box, the compression joint workbench and the probe taking and placing mechanism are arranged in the outer cover; the outer cover is provided with a feed and discharge port which can be closed, and when the feed and discharge port is closed, the outer cover forms a closed cavity filled with inert gas. The invention can realize the automatic inspection of the silicon-based OLED in the whole process; the probe set can be replaced, and the detection is carried out on different types of silicon-based OLEDs, so that the method has wide universality.

Description

silicon-based OLED panel lighting inspection equipment

Technical Field

The application belongs to the technical field of semiconductor detection, and particularly relates to a silicon-based OLED lighting inspection device.

Background

with the application of vrvisual Reality, virtual Reality and aractuated Reality, augmented Reality technologies, the market demand for high pixel density microdisplays is also increasing, wherein silicon-based micro OLED displays are one of the commonly used high pixel density microdisplays. Because the VR and AR technologies are emerging technologies, the used WeChat displays such as silicon-based micro OLED are also in the initial stage of the technology, the detection of the display quality of the silicon-based micro OLED display screen is relatively less, and no detection equipment for the silicon-based micro OLED display exists at present; based on the quality requirement of the silicon-based micro OLED display, the detection equipment aiming at the silicon-based micro OLED display needs to be researched and developed urgently.

Disclosure of Invention

the technical problem to be solved by the invention is as follows: in order to solve the difficulty of the inspection of the silicon-based OLED in the prior art, the lighting inspection equipment for the silicon-based OLED panel is provided.

The technical scheme adopted by the invention for solving the technical problems is as follows: a silicon-based OLED panel lighting inspection apparatus, comprising:

The adsorption platform is used for placing and fixing the silicon-based OLED panel;

a probe cartridge for storing the probe;

The compression joint workbench is used for compression joint of the silicon-based OLED panel;

The probe taking and placing mechanism is used for taking and placing probes between the probe cassette and the compression joint workbench;

The absorption table, the probe cartridge, the compression joint workbench and the probe taking and placing mechanism are arranged in the outer cover;

The outer cover is provided with a closable feed and discharge port, and when the feed and discharge port is closed, the outer cover forms a closed cavity filled with inert gas.

Preferably, the adsorption table of the lighting inspection equipment for the silicon-based OLED panel of the present invention includes an adsorption mechanism suspended downward, and is used for adsorbing and fixing the process surface of the OLED panel downward.

preferably, according to the lighting inspection equipment for the silicon-based OLED panel, the adsorption table can move between a feeding station, a discharging station and a crimping station; the feeding and discharging station is located at the feeding and discharging port, and the crimping station is located above the crimping workbench.

Preferably, according to the lighting inspection equipment for the silicon-based OLED panel, the probe picking and placing mechanism is fixedly connected with the adsorption table and can move under the driving of the same driving piece.

Preferably, the silicon-based OLED panel lighting inspection equipment comprises a lifting frame and a driving piece for driving the lifting frame to lift along the vertical direction.

preferably, according to the lighting inspection equipment for the silicon-based OLED panel, a plurality of inverted trapezoidal grooves are arranged on the top plate of the lifting frame, and a plurality of clamping rods are arranged on the edge of the opening corresponding to the plurality of inverted trapezoidal grooves; the clamping rod can be clamped into or separated from the inverted trapezoidal groove under the action of horizontal pushing force.

preferably, the silicon-based OLED panel lighting inspection equipment of the present invention, the crimping worktable includes a table top, a jacking driving member and a crimping base; one end of the table top is rotatably connected with the crimping base, and the other end of the table top is connected with the jacking driving piece.

Preferably, the lighting inspection equipment for the silicon-based OLED panel further comprises a pushing device, the pushing device is connected with a power supply module, a probe terminal socket is arranged on the table top, and the pushing device can drive a contact of the power supply module to be inserted into the probe terminal socket.

Preferably, the lighting inspection equipment for the silicon-based OLED panel further comprises an air purifier, wherein the air purifier is communicated with the inside of the outer cover through a pipeline and is used for purifying inert gas, so that the outer cover forms a closed cavity filled with the inert gas.

Preferably, the lighting inspection equipment for the silicon-based OLED panel further comprises an optical inspection camera, and the optical inspection camera is arranged below the material inlet and outlet.

the invention has the beneficial effects that: the silicon-based OLED can be automatically inspected in the whole process; the probe set can replace a probe for detection, can be used for detecting silicon-based OLEDs of different models, and has wide universality; the cassette shell has a tight sealing structure, the flexibility is strong, and the movement of the lifting frame is not influenced.

Drawings

the technical solution of the present application is further explained below with reference to the drawings and the embodiments.

FIG. 1 is a schematic diagram of an external structure of a silicon-based OLED lighting inspection apparatus according to an embodiment of the present application;

FIG. 2 is a schematic diagram of an internal structure of a silicon-based OLED lighting inspection apparatus according to an embodiment of the present application;

FIG. 3 is a schematic structural diagram of an adsorption stage and a probe pick-and-place mechanism according to an embodiment of the present disclosure;

FIG. 4 is a schematic diagram of a probe cassette according to an embodiment of the present disclosure;

FIG. 5 is a schematic top view of a probe cassette according to an embodiment of the present disclosure;

FIG. 6 is an enlarged partial view of the inverted trapezoidal slot position of FIG. 5;

FIG. 7 is a schematic structural diagram of a probe crimping station according to an embodiment of the application;

FIG. 8 is a schematic diagram of the feeding state of the silicon-based OLED inspection process according to the embodiment of the present application;

FIG. 9 is a schematic view illustrating a lighting inspection process of a silicon-based OLED according to an embodiment of the present application;

Fig. 10 is a schematic diagram of a probe replacement process according to an embodiment of the present application.

The reference numbers in the figures are:

1 outer cover

2 adsorption table

3 Probe card case

4 crimping worktable

5 Probe taking and placing mechanism

6 air purifier

7 optical inspection camera

11 charging and discharging port

12 return air pipeline

21 adsorption mechanism

30 cassette case

31 lifting frame

32 opening

41 mesa

42 jacking driving piece

43 pushing device

44 crimping base

51 fixed plate

52 lifting driving piece

53 lifting plate

54 jaw

55 claw driving piece

301 clamping rod

311 storage table

312 Top plate

321 clamping rod

411 Probe terminal socket

412 contact

3121 inverted trapezoidal groove

a Probe

And B, an OLED panel.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.

The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Examples

The present embodiment provides a lighting inspection apparatus for silicon-based OLED panels, as shown in fig. 1 to 3, including:

The adsorption platform 2 is used for placing and fixing the silicon-based OLED panel;

A probe cartridge 3 for storing the probe;

The compression joint workbench 4 is used for compression joint of the silicon-based OLED panel;

A probe pick and place mechanism 5 for picking and placing probes between the probe cassette 3 and the compression table 4;

The probe card comprises a housing 1, wherein the adsorption platform 2, a probe card box 3, a compression joint workbench 4 and a probe picking and placing mechanism 5 are arranged in the housing 1;

The outer cover 1 is provided with a closable feed and discharge port 11, and when the feed and discharge port 11 is closed, the outer cover 1 forms a closed cavity filled with inert gas. In this embodiment, an air purifier 6 is used to communicate with the inside of the housing through a pipe to purify the inert gas, so that the housing 1 forms a closed cavity filled with the inert gas.

The silicon-based OLED panel lighting inspection device of the embodiment adopts a method that the probe A is utilized to be in compression joint with the OLED panel B when detecting the OLED panel B, and the qualification condition of the OLED panel B is judged according to whether a display picture of the OLED panel B after being lighted has a flaw or not. When the device is used for detection, the device needs to be kept in a space with rare oxygen and moisture, and the air purifier 6 is used for continuously purifying the interior of the outer cover to filter out the oxygen and the moisture in the air; as shown in fig. 8, a silicon-based OLED panel B to be detected is sent into the material inlet/outlet 11, the adsorption table 2 is driven by the movable assembly to be close to one side of the material inlet 11, and then the height is adjusted to enable the adsorption table 2 to contact the OLED panel B and suck the OLED panel B; as shown in fig. 9, the adsorption table 2 is driven by the driving device to move continuously to a position right above the crimping table 4, and the adsorption table 2 and the OLED panel B are aligned with the probe a on the crimping table 4, and then the adsorption table 2 descends to crimp the OLED panel B and the probe a, and then the qualification condition of the OLED panel B is determined according to whether a defect exists in a display picture of the OLED panel B after being lighted.

according to the silicon-based OLED panel lighting inspection equipment, probes of different models are stored in the probe card box 3, and the probe taking and placing mechanism 5 can replace the probes in the probe card box 3 to the crimping workbench 4, so that lighting tests of different OLED panels can be conducted conveniently. The enclosure 1 needs to ensure airtightness of the interior thereof, as standard to enable the formation of a working environment filled with an inert gas.

preferably, in the lighting inspection apparatus for silicon-based OLED panel of the present embodiment, as shown in fig. 3, the suction table 2 includes a downwardly suspended suction mechanism 21 for sucking and fixing the process surface of the OLED panel B downward. The purpose is to face the process surface of the OLED panel B to the pressing workbench 4.

Preferably, in the lighting inspection equipment for the silicon-based OLED panel of the embodiment, the adsorption table 2 can move between a feeding and discharging station and a crimping station; the feeding and discharging station is located at the feeding and discharging port 11, and the crimping station is located above the crimping workbench 4. Adsorption stage 2 is close to the material inlet and outlet station and is convenient for fixed and the ejection of compact of the material loading of OLED panel B, need stretch into the inside center of dustcoat 1 with OLED panel B when avoiding the material loading.

Preferably, in the lighting inspection apparatus for a silicon-based OLED panel according to the present embodiment, as shown in fig. 4, the probe cassette 3 includes a driving member and a lifting frame 31; the driving member is used for driving the lifting frame 31 to lift along the vertical direction. The lifting frame 31 is used for placing probes A of various types, when the probes are replaced by the probe taking and placing mechanism 5, the lifting frame 31 can be driven to extend out, and the probe taking and placing mechanism 5 can take the probes A to be replaced from a certain layer of the lifting frame 31 conveniently. As shown in fig. 10, the top surface of the probe cassette 3 is provided with an opening 32 corresponding to the lifting frame 31 for the lifting frame 31 to lift.

preferably, in the lighting inspection apparatus for a silicon-based OLED panel of this embodiment, as shown in fig. 3, the probe picking and placing mechanism 5 is fixedly connected to the adsorption table 2, and can be driven by the same driving member to move. Because the probe picking and placing mechanism 5 and the adsorption platform 2 both need to pass through a crimping station and need to move horizontally and vertically, the probe picking and placing mechanism and the adsorption platform share one driving piece, resources can be saved, and meanwhile, the influence on the working efficiency is small. In a specific embodiment, in the lighting inspection apparatus for silicon-based OLED panel of the present embodiment, as shown in fig. 3, the probe pick and place mechanism 5 includes:

A fixing plate 51 fixed to one side of the adsorption stage 2;

A lifting driving member 52 mounted on the fixed plate 51;

A lifting plate 53 which is driven by the lifting drive member 52 to be lifted and lowered;

a pair of claws 54 provided on the lifting plate 53;

And a jaw driver 55 for driving the jaws 54 toward and away from each other.

The lifting driving piece 52 drives the lifting plate 53 to lift, so that the claw 54 is lifted; the jaw drives 55 extend and retract in opposite directions to enable the jaws 54 to perform a gripping or releasing action for gripping the probe a.

In one embodiment, as shown in fig. 3, the shape of the latch 54 is L-shaped, and the latches 54 on both sides are symmetrically arranged to form a latch shape. The L-shaped latch 54 facilitates engagement with a probe a rack shaped like a rectangular parallelepiped.

Preferably, as shown in fig. 5 and 10, in the lighting inspection apparatus for a silicon-based OLED panel of the present embodiment, a plurality of inverted trapezoidal grooves 3121 are arranged on the top plate 312 of the lifting frame 31, and a plurality of clamping rods 321 are arranged at the edge of the opening 32 corresponding to the plurality of inverted trapezoidal grooves 3121; the clamping rod 321 can be clamped into or separated from the inverted trapezoidal groove 3121 under the action of horizontal pushing force. In a specific embodiment, as shown in fig. 5 and 10, the edge of the opening 32 is provided with a frame having two long sides and a short side, and a plurality of fastening rods 301 are arranged inside the two long sides;

Two sides of the top plate 312 are provided with an inverted trapezoidal groove 3121 corresponding to each clamping rod 301, and the clamping rods 301 extend into the inverted trapezoidal grooves 3121;

The horizontal push driving member is used for pushing the top plate 312 to move so as to enable the clamping rod 301 to move in the inverted trapezoidal groove 3121.

When the top plate 312 moves transversely, the contact condition between the inclined surface of the inverted trapezoidal groove 3121 and the chucking rod 301 changes gradually, and when the inclined surface of the inverted trapezoidal groove 3121 presses the chucking rod 301, the top plate 312 is tightly attached to the top of the cartridge housing 30, so as to seal the top opening 32 of the cartridge housing 30; when the inclined surface of the inverted trapezoidal groove 3121 is completely staggered from the chucking rod 301 and does not contact with the chucking rod 301, the chucking rod 301 does not form a barrier to the top plate 312, i.e., the lifting frame 31 can be lifted and lowered normally.

Preferably, in the lighting inspection apparatus for a silicon-based OLED panel according to the present embodiment, as shown in fig. 7, the pressing table 4 includes a table 41, a lifting driving member 42, and a pressing base 44; one end of the table surface 41 is rotatably connected with the crimping base 44, and the other end is connected with the jacking driving piece 42. The jacking driving member 42 can adjust the height difference between one end and the other end of the table 41 by jacking or descending, i.e. adjust the inclination angle of the table 41, and when the probe a is placed on the table 41, the contact point of the probe a is ensured to be horizontal by the inclination of the table 41.

preferably, as shown in fig. 7, the pressing workbench 4 further includes a pushing device 43, the pushing device 43 is connected to a power supply module, the table 41 is provided with a probe terminal socket 411, and the pushing device 43 can drive the contact 412 of the power supply module to be inserted into the probe terminal socket 411. When the pushing device 43 extends and contracts, the contact 412 is driven to move, and the probe A is electrically connected or disconnected.

preferably, the lighting inspection equipment for the silicon-based OLED panel of the present embodiment further includes an optical inspection camera 7, and the optical inspection camera 7 is disposed below the material inlet/outlet 11. The optical inspection camera 7 shoots the lighting condition, identifies whether the OLED panel B is lighted and shoots a display picture, and judges whether the OLED panel B has a defect through a system algorithm. The detected OLED panel B is brought to the side of the material inlet/outlet 11 by the adsorption stage 2 and then can be taken away.

in one embodiment, as shown in FIG. 4, the probe cassette 3 has at least one storage table 311 for holding probes. In the method for replacing the probe of the lighting inspection equipment for the silicon-based OLED panel of the embodiment, as shown in fig. 10, the storage table 311 is lifted by the driving member, and enters the grabbing range of the probe picking and placing mechanism 5, the probe picking and placing mechanism 5 first grabs the probe a to be replaced on the table 41 and places the probe a on the empty storage table 311, and then grabs the probe a matched with the model of the OLED panel to be detected, and places the probe a on the table 41; subsequently, the storage table 311 is lowered and reset by the driving of the driving member, and the probe replacement is completed.

In a specific embodiment, in the silicon-based OLED lighting inspection apparatus of this embodiment, as shown in fig. 1, a shock absorber is disposed on a bottom surface of the frame. The shock absorber can reduce the tremble of equipment, avoids the damage to the interior component of dustcoat 1 and reduces vibrations to crimping and detection effect's influence etc..

In a specific implementation manner, as shown in fig. 1, in the silicon-based OLED lighting inspection apparatus of this embodiment, an air filtering and purifying unit for filtering dust is disposed in the housing, the sealed cavity has an air outlet and an air inlet, and the air outlet and the air inlet are connected to the air purifier 6 through a pipeline, so as to form an air flow circulation from the sealed cavity to the air purifier 6 and then to the sealed cavity; and the side wall of the outer cover is also provided with an air return pipeline 12 communicated with the upper end and the lower end of the closed cavity. The return duct 12 enables the purified gas to be recirculated within the enclosure, increasing the utilization of the purified gas stream.

In a specific embodiment, in the silicon-based OLED lighting inspection apparatus of this embodiment, as shown in fig. 2, the probe gripping robot is disposed on a movable member capable of moving in the x-axis, y-axis and z-axis directions and a movement mechanism capable of rotating around the z-axis by 4 degrees of freedom; the optical inspection camera 7 is arranged on a 3-degree-of-freedom motion mechanism capable of moving in the directions of an x axis, a y axis and a z axis. The activity requirements of the adsorption table 2 and the optical inspection camera 7 are met.

In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.

Claims

1. a silicon-based OLED panel lighting inspection apparatus, comprising:

the adsorption table (2) is used for placing and fixing the silicon-based OLED panel;

A probe cartridge (3) for storing the probe;

The compression joint workbench (4) is used for compression joint of the silicon-based OLED panel;

The probe taking and placing mechanism (5) is used for taking and placing probes between the probe cassette (3) and the compression joint workbench (4);

The probe clamping device comprises a housing (1), wherein the adsorption platform (2), a probe cassette (3), a compression joint workbench (4) and a probe picking and placing mechanism (5) are arranged in the housing (1);

Be provided with business turn over material mouth (11) that can close on dustcoat (1), when business turn over material mouth (11) are closed, dustcoat (1) forms the airtight cavity that is full of inert gas.

2. The lighting inspection equipment for silicon-based OLED panel as claimed in claim 1, wherein the suction table (2) comprises a downward-hanging suction mechanism (21) for sucking and fixing the process surface of the OLED panel downward.

3. The silicon-based OLED panel lighting inspection equipment according to claim 2, wherein the adsorption table (2) can move between a feeding and discharging station and a crimping station; the feeding and discharging station is located at the feeding and discharging port (11), and the crimping station is located above the crimping workbench (4).

4. The lighting inspection equipment for silicon-based OLED panels as claimed in claim 3, wherein the probe pick-and-place mechanism (5) is fixedly connected with the adsorption table (2) and can be driven by the same driving member to move.

5. the silicon-based OLED panel lighting inspection apparatus of claim 1, wherein the probe cassette (3) comprises a lifting frame (31) and a driving member for driving the lifting frame (31) to lift and lower along a vertical direction.

6. The silicon-based OLED panel lighting inspection apparatus as claimed in claim 5, wherein a plurality of inverse trapezoidal grooves (3121) are arranged on the top plate (312) of the lifting frame (31), and a plurality of clamping bars (321) are provided at the edge of the opening (32) corresponding to the plurality of inverse trapezoidal grooves (3121); the clamping rod (321) can be clamped into or separated from the inverted trapezoidal groove (3121) under the action of horizontal pushing force.

7. The lighting inspection equipment for silicon-based OLED panels as claimed in claim 1, wherein the crimping table (4) comprises a table top (41), a jacking driving member (42) and a crimping base (44); one end of the table top (41) is rotatably connected with the crimping base (44), and the other end of the table top is connected with the jacking driving piece (42).

8. The lighting inspection equipment for the silicon-based OLED panel as recited in claim 7, wherein the pressing workbench (4) further comprises a pushing device (43), the pushing device (43) is connected with a power supply module, a probe terminal socket (411) is disposed on the table top (41), and the pushing device (43) can drive the contact (412) of the power supply module to be inserted into the probe terminal socket (411).

9. the silicon-based OLED panel lighting inspection apparatus of any one of claims 1-8, further comprising an air purifier (6), wherein the air purifier (6) is in communication with the interior of the housing through a pipe for purifying the inert gas, such that the housing (1) forms a closed cavity filled with the inert gas.

10. The lighting inspection equipment for the silicon-based OLED panel according to any one of claims 1 to 9, further comprising an optical inspection camera (7), wherein the optical inspection camera (7) is disposed below the material inlet/outlet (11).