CN110501539A - Equipment and its application method for probe card manufacture, detection and maintenance - Google Patents
Equipment and its application method for probe card manufacture, detection and maintenance Download PDFInfo
- Publication number
- CN110501539A CN110501539A CN201910781444.6A CN201910781444A CN110501539A CN 110501539 A CN110501539 A CN 110501539A CN 201910781444 A CN201910781444 A CN 201910781444A CN 110501539 A CN110501539 A CN 110501539A
- Authority
- CN
- China
- Prior art keywords
- probe
- card
- probe card
- regulating mechanism
- workbench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The equipment that the present invention relates to a kind of to manufacture and detect for probe card, comprising: workbench offers overhauls window thereon；Branch is set to regulating mechanism below the workbench, and the regulating mechanism can carry out moving adjusting relative to the workbench along X, Y and Z-direction；It is placed on the regulating mechanism, for the mounting base of fixed probe card；It is fixedly arranged on the polishing pad of the workbench bottom surface, the polishing pad is arranged in a staggered manner with the overhauls window；And it is drivingly connected the driving mechanism of the regulating mechanism, it drives the regulating mechanism to carry out moving adjusting along X, Y and Z-direction relative to the workbench by the driving mechanism, and then drives the probe card in the mounting base mobile and card grinding operation and the detection of probe location and adjustment can be carried out.Bonding probes card card grinding, measurement, adjustment and measurement of the present invention on one device, reduce each cost of equipment with each function of analysis, effectively simplify entire probe card manufacture and maintenance.
Description
Technical field
The present invention relates to mechanical equipment technical field, refer in particular to a kind of equipment for probe card manufacture, detection and maintenance and
Its application method.
Background technique
As the market IC, probe card manufacturing industry has huge market, for decades, each after the invention of IC
Chips require to be tested using probe card before cutting down from wafer.
Probe card is made of probe, fixed ring, PCB etc., and probe therein is the core of entire probe card.Probe usually by
The good alloy of electric conductivity is constituted, and all probes are fixedly arranged on a specially designed pcb board, the tip of probe
Area is very small, and general diameter only has 0.0075 to 0.025mm.
The manufacture and maintenance of probe card at present is required to special factory and the personnel of profession do, smaller for scale
Company can only send problematic probe card back to supplier and go to repair.And for domestic some large-scale factories, due to ground
Locate more remote area, is substantially difficult to support by the product of supplier and inefficient maintenance, it will usually buy a whole set of spy
Needle blocking manufacturing apparatus, and engage probe card manufacture and the maintenance personal of profession.It is main in probe card manufacture and maintenance process
Step is that card grinding, measurement, coplanar adjustment and last measurement and analysis, card grinding are the diameter and length to the tip of probe,
This process needs to adjust probe under the microscope and is excessively polished to avoid probe, that is to say, that card grinding, measurement and
Coplanar these three techniques of adjustment need constantly to repeat, and the card grinding of existing probe card apparatus, measurement, adjustment with
And last measurement and analysis use different instruments, operator's needs by probe card successively be fixed on corresponding instrument
On to carry out corresponding operation, and since probe is in polishing, needs constantly to be adjusted and measure, thus need constantly
The peace that ground carries out probe card is torn open, very time-consuming.
Summary of the invention
It is an object of the invention to overcome the deficiencies of existing technologies, provide a kind of for probe card manufacture, detection and maintenance
Equipment and its application method, solve existing probe card apparatus needed in manufacture and maintenance on different instruments pacify tear spy open
Needle card and time taking problem.
Realizing the technical solution of above-mentioned purpose is:
The present invention provides a kind of equipment for probe card manufacture, detection and maintenance, comprising:
Workbench offers overhauls window thereon；
Branch is set to regulating mechanism below the workbench, and the regulating mechanism can be relative to the workbench along X, Y and the side Z
To carrying out mobile adjusting；
It is placed on the regulating mechanism, for the mounting base of fixed probe card；
It is fixedly arranged on the polishing pad of the workbench bottom surface, the polishing pad is arranged in a staggered manner with the overhauls window；And
Be drivingly connected the driving mechanism of the regulating mechanism, by the driving mechanism drive the regulating mechanism relative to
The workbench carries out moving adjusting along X, Y and Z-direction, and then the probe card in the mounting base is driven to be moved to polishing pad
Position carries out card grinding operation, then drives the probe card to be moved to the access panel by the mobile adjusting of the regulating mechanism
Mouth carries out the detection and adjustment of probe location.
The equipment of probe card manufacture, detection and maintenance of the invention, is driven at probe card to polishing pad using regulating mechanism
Card grinding operation is carried out, drives probe card to overhauls window to carry out position adjustment and detection, avoids constantly to pacify probe card and tear open
Operation, can greatly save the operating time of operator.Equipment bonding probes card card grinding of the invention, measurement, adjustment and
Measurement on one device, reduces each cost of equipment with each function of analysis, effectively simplifies entire probe card manufacture and maintenance.
The present invention for probe card manufacture, detection and maintenance equipment further improvement lies in that, further include and the drive
The control system of dynamic mechanism controls connection, the control system according to the moving parameter of input control the driving mechanism operation with
Drive the regulating mechanism with the probe card to corresponding position.
The present invention for probe card manufacture, detection and maintenance equipment further improvement lies in that, further include being erected on institute
State workbench and close to overhauls window setting for installing microscopical support frame.
The present invention for probe card manufacture, detection and maintenance equipment further improvement lies in that, further include being fixedly arranged on institute
The contact chip for measuring probe resistance of workbench bottom surface is stated, the contact chip is padded close to the polishing to be arranged.
The present invention for probe card manufacture, detection and maintenance equipment further improvement lies in that, further include being fixedly arranged on institute
The video camera of workbench is stated, the camera of the video camera is located at the bottom surface of the workbench and shoots downward, takes the photograph by described
Camera shoots the probe to form image information, and then is measured point using described image information to the probe
Analysis.
The present invention for probe card manufacture, detection and maintenance equipment further improvement lies in that, the regulating mechanism packet
The first sliding rail along Y-direction setting, the first cushion cap for being slidedly arranged on first sliding rail are included, is arranged and consolidates along the X-direction
Set on first cushion cap the second sliding rail, be slidedly arranged on the second cushion cap of second sliding rail and be placed on second cushion cap
And the third cushion cap that can be gone up and down along the Z-direction；
The mounting base is fixedly connected at the top of the third cushion cap.
It is including as follows the present invention also provides a kind of application method of equipment for probe card manufacture, detection and maintenance
Step:
One probe card is provided, the probe card is fixed in the mounting base；
The probe card is moved to overhauls window by the regulating mechanism；
Using microscope by the overhauls window check the probe in the probe card and adjust probe position and really
Determine the card grinding parameter of probe；
The probe is moved to the position of the polishing pad, and the card grinding according to the probe by the regulating mechanism
The move mode of regulating mechanism described in state modulator is so that the probe mutually rubs with polishing pad and makes to the spy
The end of needle carries out card grinding operation；
During card grinding operation, being moved to the probe at the overhauls window for interval is detected and is adjusted
It is whole, the probe separation is measured, card grinding operation is completed when measuring the probe and reaching card grinding requirement.
Application method of the invention further improvement lies in that, to the probe separation the step of measuring, comprising:
Being moved to the probe at the position of one video camera for interval, claps the probe using the video camera
It takes the photograph to form image information；
Automatic measurement analysis is carried out to the size of the probe, position and interval using described image information.
Application method of the invention further improvement lies in that, after completing card grinding operation further include:
The probe is moved at the position of a contact chip, is connect using the mobile probe of the regulating mechanism with described
Contact is in contact to measure the resistance of the probe.
Application method of the invention further improvement lies in that, after completing card grinding operation further include:
The probe is moved at the overhauls window and is detected and is adjusted.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the equipment that the present invention is manufactured and detected for probe card.
Fig. 2 is the structure that the equipment that the present invention is manufactured and detected for probe card saves part workbench to expose mounting base
Schematic diagram.
Fig. 3 is the structural schematic diagram of the probe card of present invention manufacture and detection.
Fig. 4 is the present invention for the structural schematic diagram under the rear portion visual angle for the equipment that probe card manufactures and detects.
Fig. 5 is the structural schematic diagram that the protection housing of video camera is saved in Fig. 4.
Fig. 6 is the partial enlargement diagram under probe card stationary state of the present invention.
Fig. 7 is the structural schematic diagram that the present invention measures probe error under camera view.
Fig. 8 is structural schematic diagram of the probe of the present invention under microscope view.
Fig. 9 is the schematic diagram that the present invention adjusts probe tip center under microscope view.
Figure 10 is the structural schematic diagram that probe tip is arranged downward in the prior art.
Figure 11 is structural schematic diagram when probe tip is arranged downward in the prior art under microscope view.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings and specific examples.
Refering to fig. 1, equipment and its application method that the present invention provides a kind of to manufacture and detect for probe card, for solving
Certainly probe card is placed on three kinds of different the equipment or instruments by hand by operator, repeatedly card grinding, measurement, adjusts needle and existing non-
Normal time taking problem, and manual operations also usually increases artificial judgement and mistake.Integration of equipments of the invention probe card
Card grinding, adjustment, horizontal plane correction, measurement and analysis can lower each cost of equipment, and save the peace in each equipment room in one
Tear the time of probe card open, effectively simplify the manufacture of entire probe card and maintenance process process, can be improved probe card manufacture and
The efficiency of maintenance.The equipment and its application method that the present invention is manufactured and detected for probe card with reference to the accompanying drawing are said
It is bright.
Refering to fig. 1, it is shown that the structural schematic diagram for the equipment that the present invention is manufactured and detected for probe card.Referring to Fig.2, aobvious
The equipment for having shown that the present invention is manufactured and detected for probe card saves part workbench to expose the structural schematic diagram of mounting base.Under
The equipment that face manufactures and detects for probe card to the present invention combined with Figure 1 and Figure 2, is illustrated.
As depicted in figs. 1 and 2, the equipment of of the invention probe card manufacture and detection include workbench 21, regulating mechanism 22,
Mounting base 23, polishing pad and driving mechanism；Overhauls window 211 is offered on workbench 21；Regulating mechanism 22 are set to work
The lower section of platform 21, the regulating mechanism 22 can carry out moving adjusting relative to workbench 21 along X, Y and Z-direction, and wherein X-direction is work
Make the width direction of platform, Y-direction is the length direction of workbench, and Z-direction is the direction perpendicular to workbench；Mounting base 23 is placed in
On regulating mechanism 22, mounting base 23 is for fixing probe card；Polishing pad (not shown) is installed in 21 bottom surface of workbench, polishes
Pad is arranged in a staggered manner with overhauls window 211；Driving mechanism (not shown) is drivingly connected regulating mechanism 22, is driven by driving mechanism
Dynamic regulating mechanism 22 carries out moving adjusting along X, Y and Z-direction relative to workbench 21, and then drives the probe being mounted on 23
The position that card is moved to polishing pad carries out card grinding operation, then drives probe card to be moved to inspection by mobile adjust of regulating mechanism 22
Repair detection and adjustment that window 211 carries out probe location.
The present invention realizes that the position of probe card is adjusted using the mobile adjusting for the regulating mechanism being arranged in below workbench,
So that the position that probe card can easily be moved to polishing pad carries out card grinding operation, it is easily moved to overhauls window progress
The detection and adjustment of position, probe card only need to fix once, to eliminate probe card in each distinct device or instrument
Turnover between device is fixed, and the time of probe card manufacture and maintenance is shortened.And probe is fixed in such a way that needle point is upward, so that
Adjustment probe card is very convenient, but also the manufacture and detection of probe card are also very convenient.
In a specific embodiment, the equipment of probe card of the invention manufacture and detection further includes and driving mechanism control
The control system of connection is made, which controls driving mechanism operation according to the moving parameter of input to drive regulating mechanism 22
With probe card to corresponding position.The operation for accurately controlling driving mechanism is realized using control system, to realize to spy
The accurate adjustment of needle card position, and providing convenience for operator, operator only need to be by input equipments by moving parameter
It is input to the control that can be realized in control system to regulating mechanism.
Preferably, driving mechanism is motor, moved by motor driven regulating mechanism 22 to adjust the position of probe card
It sets.Control system drive connection corresponding with motor controls to adjust mechanism 22 forward or reverse by control motor to realize
Mobile adjusting.
Again goodly, control system includes input unit, the processing unit connecting with input unit and connects with processing unit
The communication unit connect, input unit input moving parameter for operator, and processing unit receives the mobile ginseng of input unit input
Number, and corresponding control instruction is formed according to moving parameter, corresponding motor is sent to by communication unit, to control corresponding electricity
Machine is run.Preferably, input unit includes that a keyboard has correspondingly installed keyboard frame 262 on workbench 21, has been used for
Holding keyboard, so that operator inputs moving parameter to the processing unit of control system using keyboard.
Further, display 27 is also placed on workbench 21, which is used to show and operation interface, with
Operation control is carried out convenient for operator.Processing unit and the control of display 27 connect, and operation interface is sent to by processing unit
Display 27 is shown, moving parameter input window is shown in operation interface, and operator can click corresponding window
And corresponding moving parameter is inputted using keyboard.
In a specific embodiment, the equipment of probe card of the invention manufacture and detection further includes erecting in workbench
21 simultaneously close to the setting of overhauls window 211 for installing microscopical support frame 212.Microscope is installed using support frame 212, can be made
It obtains operator to be convenient for using the probe in micro- sem observation probe card, and then accurate position adjustment can be carried out to probe.
Preferably, support frame 212 is connected to the cross bar between two upright bars including two upright bars being oppositely arranged and support,
There are two sliding slots 2122 for setting on cross bar, are slidably equipped with microscope mounting rack 2121 in two sliding slots 2122, microscope peace
Position adjusting can be carried out along sliding slot 2122 by shelving 2121, to aloow the microscope installed thereon according in probe card
The position of probe carries out position adjusting.Microscope mounting rack 2121 is equipped with the snap ring for the microscopical camera lens of support, microscope
Main body is fixed on microscope mounting rack 2121, and microscopical camera lens stretches out from snap ring, is needing to detect probe card
And when adjustment, microscope is adjusted in place by microscope mounting rack 2121, then utilizes micro- sem observation probe, and micro-
Probe is adjusted under mirror.
In a specific embodiment, as shown in figure 4, the equipment of probe card manufacture and detection of the invention further includes solid
21 bottom surface of workbench is located at for the contact chip 24 of measurement probe resistance, which is arranged close to polishing pad 28.
Specifically, the installing port that perforation top and bottom are offered on workbench 21, is formed with chuck in installing port,
Contact chip 24 is embedded in installing port, and the bottom surface of contact chip 24 is concordant with the bottom surface of workbench 21, corresponds to chuck on contact chip 24
Equipped with fixed plate, fixed plate and chuck are fastenedly connected using bolt.
The resistance that probe is measured by the contact chip 24 of setting, utilizes 22 traveling probe card of regulating mechanism to contact chip 24
At position, rise regulating mechanism slowly then to drive probe slowly to rise, it is known that the contact chip 24 of all probe contacts is gone forward side by side
Row detection, and the data record that will test is got off.
Preferably, the processing unit of control system and the control of contact chip 24 connect, it is provided with detection circuit in processing unit,
All probes being in contact with contact chip 24 are detected using detection circuit, and form detection data, and processing unit will test data
It is sent to display 27 to be shown, so that operator checks.
Further, the position of corresponding polishing pad 28 also offers the opening for penetrating through top and bottom on workbench 21, beats
Mill pad 28 is mounted in opening, and the bottom surface flush for pad 28 bottoms and workbench 21 of polishing, fixed in the bottom of polishing pad 28
There is sand paper, utilizes the tip of sand paper polishing probe.
In a specific embodiment, as shown in Figure 4 and Figure 5, the equipment that probe card of the invention is manufactured and detected is also
Video camera 25 including being fixedly arranged on workbench 21, the camera of video camera 25 are located at the bottom surface of workbench 21 and shoot downward, lead to
It crosses video camera 25 to shoot probe to form image information, and then analysis is measured to probe using image information.For
Video camera 25 is protected, is equipped with a protection housing in the outside mask of the video camera 25.
Specifically, the shooting mouth of perforation top and bottom is offered on workbench 21, video camera 25 is placed in workbench 21
Top surface, and the camera of video camera 25 is placed at shooting mouth, and by shooting mouth to the probe card for being located at 21 ground of workbench
It is shot.
Preferably, video camera 25 uses high definition camera lens, the image analytic degree of 0.8um need to be reached.
Preferably, the communication unit of control system and video camera 25 communicate to connect, the image letter that the shooting of video camera 25 is formed
Breath is sent to communication unit, and then communication unit is sent to processing unit, processing unit by image information by display 27 into
Row display, so that operator checks.
Again goodly, control system further includes image analyzing unit, which connect with processing unit, image point
Analysis unit carries out graphical analysis processing to the image information that video camera 25 is shot, and measures the tip diameter of probe, length, position
It sets, be spaced and the height of each needle point, namely is whether coplanar, to form measurement.Probe is prestored in processing unit to set
Parameter is counted, processing unit receives the measurement of image analyzing unit and is compared with probe design parameters, formed and compare knot
Fruit, processing unit show the formed comparison result of the measurement of image analyzing unit together with image information,
So that operator can intuitively see probe measurement result.The straight of automatic measurement probe is realized using image analyzing unit
Diameter, length, position and interval, and whether the needle point for automatically analyzing probe is coplanar, is automatically performed measurement using system, excludes artificial
Inconsistent judgement and mistake, during entire measurement, system real-time display measurement effectively helps operator to adjust
Needle and card grinding.
Further, when processing unit shows comparison result, comparison result is identified using different colours, for example compare knot
Fruit be by when show using green font, comparison result be it is obstructed it is out-of-date shown using red font so that showing more
Intuitively.
In a specific embodiment, regulating mechanism 22 includes the first sliding rail being arranged along Y-direction, is slidedly arranged on the first cunning
First cushion cap 221 of rail, the second sliding rail for being arranged in X direction and being installed on the first cushion cap 221, be slidedly arranged on the second sliding rail
Two cushion caps 222 and the third cushion cap 223 that is placed on the second cushion cap 222 and can be gone up and down along Z-direction；The top of third cushion cap 223
It is fixedly connected with mounting base 23.
It is moved using the first cushion cap 221 along the first sliding rail, realizes the first cushion cap 221 along Y-direction and carry out position
It adjusts, is moved using the second support 222 along the second sliding rail, realize the second cushion cap 222 and carry out position adjusting in X direction.
To may make the probe card in mounting base 23 to be movable to any of corresponding workbench 21 using the adjusting of X-direction and Y-direction
At position.The lifting of third cushion cap 223 along the position of Z-direction, it can be achieved that adjust, so that probe card in mounting base 23 can be towards
Direction movement close to workbench 21 can also be mobile away from the direction of workbench 21.
Specifically, the first cushion cap 221 and the second cushion cap 222 are supporting plate, and corresponding first sliding rail and the second sliding rail open up
There is sliding slot, the motor for being drivingly connected supporting plate is respectively set, pushes corresponding supporting plate to be moved by the operation of motor.Compared with
Goodly, motor is push-rod electric machine, and the push rod on motor is connected with corresponding supporting plate, thus forward or reverse by motor
To stretch out push rod or withdraw push rod, to realize the moving direction for adjusting supporting plate.The bottom of third cushion cap 223 is provided with bottom
Seat, the pedestal are fixed on the second cushion cap 222, motor are arranged on pedestal, and motor is connect with third cushion cap 223, are utilized
Motor drives 223 lifting moving of third cushion cap.Preferably, third cushion cap is supporting plate, motor is push-rod electric machine.
Preferably, the top of mounting base 23 is equipped with sunk structure, for being embedded in probe card, it is embedded into recess knot in probe card
After structure, it is set to the pressing plate that mounting base 23 is fixedly connected in the two sides of probe card, pushes down probe card using pressing plate.Further,
It is equipped with adsorption machine in the inside of mounting base 23, negative pressure is generated using adsorption machine and probe card is sucked.
In a specific embodiment, the equipment of probe card of the invention manufacture and detection further includes rack 26, work
Platform 21 is fixed on the top of rack 26, and regulating mechanism 22 is fixedly connected on the lower section in rack 26 and being located at workbench 21.In machine
Storage box 261 is additionally provided on frame 26, dress is equipped with control system and various electronic measuring instruments in storage box 261.
Equipment of the invention uses the fixed form of the needle point of probe card upward, as shown in Figure 6, it is shown that the needle of probe 32
The schematic diagram that point is arranged upward.It is detecting needle position not clock synchronization, is directly carrying out the adjustment of probe, so that adjustment multiple field probe
Card is very easy to, and can be repaired without overturning probe card.The position of a certain probe is taken there are when error in video camera,
The error is directly displayed at the probe location parameter, as shown in connection with fig. 7, it is shown that temperature measuring probe head portion under camera view
XY location error and tip diameter.The position can directly be moved at microscope there are the probe of error and rectify by operator
Just, as shown in connection with fig. 8, it is shown that the probe state under microscope view, as shown in connection with fig. 9, it is shown that under microscope view
Needle point adjusts the schematic diagram of central tip position upward, is again answered the position that the probe is moved to video camera after correction is good
It surveys, repeats correction until the probe location is correct.A kind of existing probe card analyzer, is fixed on one for probe card
It is a can be on platform that 180 degree is overturn, the needle point of the probe of probe card be arranged downward when measurement, as shown in Figure 10 and Figure 11, shows
The schematic diagram that the needle point of probe is arranged downward is shown.When measuring the probe for finding correction in need to the probe, by flat
Probe is overturn 180 degree by platform, and microscope is then arranged and corrects to the probe, and since number of probes is more, lookup needs to correct
Probe it is more laborious, and probe correction process need constantly to measure and correct adjustment, thus need constantly
Platform is overturn, it is very time-consuming.For the probe card for only having more than 10,30 points are needed using probe card analyzer
Clock could be completed to adjust, and the equipment of the application only needs 5 minutes, has greatly saved the time.
The application method for the equipment for manufacturing, detecting and repairing provided by the present invention for probe card is illustrated below.
The application method of the equipment for manufacturing and detecting for probe card of the invention, includes the following steps:
As depicted in figs. 1 and 2, a probe card is provided, probe card is fixed in mounting base 23；
Probe card is moved to overhauls window 211 by regulating mechanism 22；
The probe in probe card is checked by overhauls window 211 using microscope and adjusts the position of probe and determines probe
Card grinding parameter；
Probe is moved to the position of polishing pad by regulating mechanism 22, and adjusts machine according to the card grinding state modulator of probe
The move mode of structure 22 is so that probe mutually rubs with polishing pad and to carry out card grinding operation to the end of probe；
During card grinding operation, being moved to probe at overhauls window 211 for interval is detected and is adjusted, to spy
Needle interval measures, and stops card grinding operation, when measuring probe and reaching card grinding requirement so as to complete card grinding operation.
The purpose of card grinding operation is that the tip of probe is all polished to accurate length and diameter, so before polishing, first
Probe is observed and measured using microscope, with determine its amount that need to be polished number, probe is then moved to polishing again
At the position of pad, it is total to moved further with Y-direction in X direction by controlling to adjust mechanism, so that probe is connect with the motion profile of arc
Nearly polishing pad, while regulating mechanism rises gradually along Z-direction, to achieve the effect that needle point of polishing.In order to avoid probe was polished
Degree needs constantly to carry out position adjusting to probe, and probe is easy to happen offset in the grinding process, if adjusting not in time,
Just it is difficult to ensure the coplanarity of probe tip.
Position of the probe at overhauls window is adjusted, and operator uses a tweezers, under the microscope to all probes
Position arrangement, needle point coplanarity carry out intense adjustment, control errors are in ± 3um.
In a specific embodiment, to probe separation the step of measuring, comprising:
During card grinding operation, probe is moved at the position of a video camera by interval, using video camera to spy
Needle is shot to form image information；
Automatic measurement analysis is carried out to the size of probe, position and interval using image information.
The measurement of the diameter of probe on probe clamp needs to carry out precise measurement using high-resolution video camera, in measurement point
When the diameter and length of needlepoint of the probe of analysis are unsatisfactory for requiring, need to repeat card grinding and position adjustment.
In a specific embodiment, after stopping card grinding operation further include:
Probe is moved at the position of a contact chip 24, is in contact using 22 traveling probe of regulating mechanism with contact chip 24
To measure the resistance of probe.
In a specific embodiment, after stopping card grinding operation further include:
Probe is moved at overhauls window 211 and is detected and is adjusted.
As shown in figure 3, probe card includes pcb board 31, probe 32, fixed ring 33 and epoxy resin 34, first by probe 32
It is arranged, then probe 32 is fixed in fixed ring 33 using epoxy resin 34, then by fixed ring according to design position
33 are placed on pcb board 31, and the end of probe 32 and pcb board 31 are welded, be then exactly need to carry out the tip of probe card grinding,
Measurement, position adjustment and last inspection.
Probe card state as shown in Figure 3 is fixed in mounting base, then using regulating mechanism be moved to polishing pad at into
Row card grinding, although probe has epoxy resin to fix, bruting process is easy to cause probe mobile, so that the position of probe generates
Deviation needs in the grinding process, to be under the microscope adjusted probe, probe is avoided excessively to be polished.In polishing
In the process, it is measured using length and diameter of the video camera to the tip of probe, after reaching requirement, can stop polishing.Again
Probe is moved at overhauls window and is adjusted, to ensure position and the coplanarity of probe.Finally probe is carried out last
It checks, after the position of all probes, needle point coplanarity are all correct certainly under the microscope, if the exploration card of production is tens of
Within needle, substantially one complete qualified probe card completes, can deliver to customer using.But if one possess it is hundreds of
The exploration card of root needle needs the probe card that precision is high, needs to check leak resistance, it is necessary to probe card is carried out resistance test,
The data record tested and measured is got off again.
The present invention has been described in detail with reference to the accompanying drawings, those skilled in the art can be according to upper
It states and bright many variations example is made to the present invention.Thus, certain details in embodiment should not constitute limitation of the invention, this
Invention will be using the range that the appended claims define as protection scope of the present invention.
Claims (10)
1. a kind of equipment for probe card manufacture, detection and maintenance characterized by comprising
Workbench offers overhauls window thereon；
Branch is set to regulating mechanism below the workbench, the regulating mechanism can relative to the workbench along X, Y and Z-direction into
Row is mobile to be adjusted；
It is placed on the regulating mechanism, for the mounting base of fixed probe card；
It is fixedly arranged on the polishing pad of the workbench bottom surface, the polishing pad is arranged in a staggered manner with the overhauls window；And
It is drivingly connected the driving mechanism of the regulating mechanism, drives the regulating mechanism relative to described by the driving mechanism
Workbench carries out moving adjusting along X, Y and Z-direction, and then the probe card in the mounting base is driven to be moved to the position that polishing is padded
Carry out card grinding operation, then by the mobile adjusting of the regulating mechanism drive probe card be moved to the overhauls window into
The detection and adjustment of row probe location.
2. the equipment for probe card manufacture, detection and maintenance as described in claim 1, which is characterized in that further include and institute
The control system of driving mechanisms control connection is stated, the control system controls the driving mechanism according to the moving parameter of input and transports
Row is to drive the regulating mechanism with the probe card to corresponding position.
3. the equipment for probe card manufacture, detection and maintenance as described in claim 1, which is characterized in that further include erecting
In the workbench simultaneously close to overhauls window setting for installing microscopical support frame.
4. the equipment for probe card manufacture, detection and maintenance as described in claim 1, which is characterized in that further include fixed
The contact chip for measuring probe resistance in the workbench bottom surface, the contact chip is padded close to the polishing to be arranged.
5. the equipment for probe card manufacture, detection and maintenance as described in claim 1, which is characterized in that further include fixed
In the video camera of the workbench, the camera of the video camera is located at the bottom surface of the workbench and shoots downward, passes through institute
It states video camera to shoot the probe to form image information, and then the probe is surveyed using described image information
Amount analysis.
6. the equipment for probe card manufacture, detection and maintenance as described in claim 1, which is characterized in that the adjusting machine
Structure includes the first sliding rail being arranged along the Y-direction, the first cushion cap for being slidedly arranged on first sliding rail, along X-direction setting
And it is fixedly arranged on the second sliding rail of first cushion cap, be slidedly arranged on the second cushion cap of second sliding rail and is placed in described second and is held
And it can be along the third cushion cap of Z-direction lifting on platform；
The mounting base is fixedly connected at the top of the third cushion cap.
7. a kind of application method for the equipment for being used for probe card manufacture, detection and maintenance as described in claim 1, feature exist
In including the following steps:
One probe card is provided, the probe card is fixed in the mounting base；
The probe card is moved to overhauls window by the regulating mechanism；
The probe in the probe card is checked by the overhauls window using microscope and adjusts the position of probe and determines and is visited
The card grinding parameter of needle；
The probe is moved to the position of the polishing pad, and the card grinding parameter according to the probe by the regulating mechanism
The move mode of the regulating mechanism is controlled so that the probe mutually rubs with polishing pad and makes to the probe
End carries out card grinding operation；
During card grinding operation, being moved to the probe at the overhauls window for interval is detected and is adjusted, right
The probe separation measures, and card grinding operation is completed when measuring the probe and reaching card grinding requirement.
8. application method as claimed in claim 7, which is characterized in that the probe separation the step of measuring, packet
It includes:
Interval the probe is moved at the position of a video camera, using the video camera to the probe shot with
Form image information；
Automatic measurement analysis is carried out to the size of the probe, position and interval using described image information.
9. application method as claimed in claim 7, which is characterized in that after completing card grinding operation further include:
The probe is moved at the position of a contact chip, utilizes the mobile probe of the regulating mechanism and the contact chip
It is in contact to measure the resistance of the probe.
10. application method as claimed in claim 7, which is characterized in that after completing card grinding operation further include:
The probe is moved at the overhauls window and is detected and is adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910781444.6A CN110501539A (en) | 2019-08-23 | 2019-08-23 | Equipment and its application method for probe card manufacture, detection and maintenance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910781444.6A CN110501539A (en) | 2019-08-23 | 2019-08-23 | Equipment and its application method for probe card manufacture, detection and maintenance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110501539A true CN110501539A (en) | 2019-11-26 |
Family
ID=68589045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910781444.6A Withdrawn CN110501539A (en) | 2019-08-23 | 2019-08-23 | Equipment and its application method for probe card manufacture, detection and maintenance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110501539A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110887839A (en) * | 2019-12-25 | 2020-03-17 | 嘉兆电子科技(珠海)有限公司 | Multi-dimensional QA detection system for probe production |
| CN114034895A (en) * | 2021-11-22 | 2022-02-11 | 普铄电子(上海)有限公司 | High-frequency probe card for wafer test |
| CN117075022A (en) * | 2023-10-16 | 2023-11-17 | 深圳市道格特科技有限公司 | Multi-performance test universal equipment for probe card |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101275994A (en) * | 2007-03-27 | 2008-10-01 | 和舰科技(苏州)有限公司 | Method for monitoring probe card state |
| CN201728570U (en) * | 2010-05-19 | 2011-02-02 | 上海依然半导体测试有限公司 | Probe grinding device |
| CN202182939U (en) * | 2011-08-09 | 2012-04-04 | 源台精密科技股份有限公司 | Probe card detector |
| JP2013045819A (en) * | 2011-08-23 | 2013-03-04 | Ebara Corp | Quantitative measuring method of polishing pressure distribution of chemical mechanical polishing using atomic force microscope |
| CN103293503A (en) * | 2013-05-24 | 2013-09-11 | 上海宏力半导体制造有限公司 | Probe card detecting method |
| CN205910329U (en) * | 2016-06-30 | 2017-01-25 | 全智科技股份有限公司 | Testing arrangement of wafer probe |
| CN207051403U (en) * | 2017-08-01 | 2018-02-27 | 深圳市矽电半导体设备有限公司 | A kind of detection means of luminescent device |
| CN207616315U (en) * | 2017-12-28 | 2018-07-17 | 无锡旺矽科技有限公司 | The special needle grinding machine of probe card |
| CN108663380A (en) * | 2017-03-29 | 2018-10-16 | 吉而特科技有限公司 | Probe card detection method and system |
| CN208672753U (en) * | 2018-08-07 | 2019-03-29 | 德淮半导体有限公司 | Probe adjusts device, wafer reliability test equipment and probe card configuration |
-
2019
- 2019-08-23 CN CN201910781444.6A patent/CN110501539A/en not_active Withdrawn
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101275994A (en) * | 2007-03-27 | 2008-10-01 | 和舰科技(苏州)有限公司 | Method for monitoring probe card state |
| CN201728570U (en) * | 2010-05-19 | 2011-02-02 | 上海依然半导体测试有限公司 | Probe grinding device |
| CN202182939U (en) * | 2011-08-09 | 2012-04-04 | 源台精密科技股份有限公司 | Probe card detector |
| JP2013045819A (en) * | 2011-08-23 | 2013-03-04 | Ebara Corp | Quantitative measuring method of polishing pressure distribution of chemical mechanical polishing using atomic force microscope |
| CN103293503A (en) * | 2013-05-24 | 2013-09-11 | 上海宏力半导体制造有限公司 | Probe card detecting method |
| CN205910329U (en) * | 2016-06-30 | 2017-01-25 | 全智科技股份有限公司 | Testing arrangement of wafer probe |
| CN108663380A (en) * | 2017-03-29 | 2018-10-16 | 吉而特科技有限公司 | Probe card detection method and system |
| CN207051403U (en) * | 2017-08-01 | 2018-02-27 | 深圳市矽电半导体设备有限公司 | A kind of detection means of luminescent device |
| CN207616315U (en) * | 2017-12-28 | 2018-07-17 | 无锡旺矽科技有限公司 | The special needle grinding machine of probe card |
| CN208672753U (en) * | 2018-08-07 | 2019-03-29 | 德淮半导体有限公司 | Probe adjusts device, wafer reliability test equipment and probe card configuration |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110887839A (en) * | 2019-12-25 | 2020-03-17 | 嘉兆电子科技(珠海)有限公司 | Multi-dimensional QA detection system for probe production |
| CN114034895A (en) * | 2021-11-22 | 2022-02-11 | 普铄电子(上海)有限公司 | High-frequency probe card for wafer test |
| CN114034895B (en) * | 2021-11-22 | 2023-02-28 | 普铄电子(上海)有限公司 | High-frequency probe card for wafer test |
| CN117075022A (en) * | 2023-10-16 | 2023-11-17 | 深圳市道格特科技有限公司 | Multi-performance test universal equipment for probe card |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100248569B1 (en) | Probe system | |
| CN105486995B (en) | Full-automatic probe station image positioning device and visual aligning method | |
| CN110501539A (en) | Equipment and its application method for probe card manufacture, detection and maintenance | |
| US7501843B2 (en) | Movement amount operation correction method for prober, movement amount operation correction processing program, and prober | |
| CN105445972A (en) | Probe movement device | |
| CN109830198A (en) | A kind of impedance detection device | |
| CN114441942A (en) | Flying probe testing method, system, equipment and storage medium for PCB | |
| TWI627414B (en) | Probe card detection method and system | |
| CN115274484A (en) | Wafer detection device and detection method thereof | |
| CN214622935U (en) | Probe card adjusting device | |
| JP3173676B2 (en) | Probe device | |
| WO2005106510A2 (en) | Apparatus for high speed probing of flat panel displays | |
| CN107677948A (en) | Measuring system | |
| JPH05157790A (en) | Device for inspecting probe card | |
| CN109887454A (en) | A kind of impedance detection equipment | |
| CN109782103A (en) | The alignment methods and system of probe and pin of electronic device | |
| CN104620121B (en) | Probe device | |
| JP2502231B2 (en) | Probe card inspection device | |
| CN209560974U (en) | A kind of impedance detection device | |
| KR20070116514A (en) | Probe test apparatus of flat pannel display and probe test method using it | |
| JPH0685409B2 (en) | Wafer transfer device | |
| CN211826169U (en) | Electrode probe connecting device and system | |
| CN117054951B (en) | Probe performance test system and test method thereof | |
| JPH0465851A (en) | Inspection equipment | |
| CN117906491A (en) | Needle position detection equipment for micro-electromechanical probe head of image sensing chip |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20191126 |