KR20080023142A - Substrate holding device for visual inspection - Google Patents

Abstract

A substrate holding device for visual inspection is provided to observe a substrate without difficulties during macro-inspection as well as to prevent vibration of the substrate during micro-inspection by withdrawing a support member supporting the substrate in case of macro-inspection. A substrate holding device for visual inspection comprises a stage(3), a support member, and a withdrawing member. A substrate(2) is loaded on the stage. The support member supports the rear surface of the substrate in an opening of the stage. The withdrawing member, which reciprocates the support member, includes a sustaining member(24) and an actuating member. The actuating member moves back and forth with respect to the sustaining member. The support member is an actuator moving a pin member which supports the substrate.

Description

Substrate holding device for appearance inspection {SUBSTRATE HOLDING DEVICE FOR VISUAL INSPECTION}

TECHNICAL FIELD This invention relates to the board | substrate holding mechanism of the external appearance inspection apparatus which inspects various board | substrates, such as a glass substrate for liquid crystal displays (LCD), a semiconductor substrate, for example, preferably a large size board | substrate.

This specification claims priority with respect to Japanese Patent Application No. 2006-244154 for which it applied on September 8, 2006, and uses the content here.

Conventionally, in the field of flat panel displays, such as a liquid crystal display (LCD) and a plasma display (PDP), in the flat panel display manufacturing process, the glass substrate was manufactured and defect inspection was performed. As a defect inspection method, there exist a macro inspection which examines defects, such as a foreign material, a flaw, etc. on a board | substrate by visual observation, and the micro inspection which image | photographs the image magnified with a microscope, and observes it with a monitor etc.

In these inspections, fall light or illumination of illumination from the back surface of the substrate is selectively used to detect the presence or absence of a defect or to observe the defect.

By the way, glass substrates etc. are enlarged in recent years, and large board | substrates exceeding 2m by one side are released, and since such a large board | substrate is thin, it is small. In the case of inspecting such a substrate, rod-shaped flesh is spread at predetermined intervals in an opening of a quadrilateral substrate holder on which the substrate is mounted to support the substrate horizontally, and each member has a pin member for supporting the substrate from the back side. It is installed.

In this case, when the number of flesh is large, the flesh is obstructed when the substrate is transmitted and observed, so only the minimum necessary number is attached. In addition, although the vibrating eliminator is attached to the visual inspection apparatus, even if such a configuration is adopted, it is not possible to suppress the micro-vibration or the bending of the large-sized substrate under the influence of the motor and other peripheral devices and the like provided in the visual inspection apparatus.

In the case of macro observation of the substrate, since the observation is performed with the naked eye, the substrate rarely affects the observation even when the substrate vibrates minutely. However, in the case of micro observation, since the substrate is enlarged and observed on the monitor screen, even a small vibration can be recognized, which causes a problem in observation.

In order to improve such a problem, the board | substrate holding apparatus of Unexamined-Japanese-Patent No. 2000-7146 and Unexamined-Japanese-Patent No. 2004-281907 is proposed, for example. In the board | substrate holding apparatus of the external appearance inspection apparatus of Unexamined-Japanese-Patent No. 2000-7146, a rigid plate-shaped transparent plate which closes the lower part of the opening part of a board | substrate holder for mounting a board | substrate is fixed, and it is a plurality of upper surfaces of a transparent plate. The pins are placed upright to support the substrate.

Moreover, in the board | substrate holding apparatus of Unexamined-Japanese-Patent No. 2004-281907, the bar-shaped vibration absorbing member is formed in the several meat | wire which hangs in parallel with the opening part of a board | substrate holder, between the adjacent meat | membrane or between the meat | mouth and the frame part of a board | substrate holder. The board | substrate is supported by arrange | positioning in linear form.

However, in the substrate holding apparatus described in Japanese Patent Laid-Open No. 2000-7146, illumination light is reflected not only on the substrate but also on the transparent flat plate when the surface of the substrate is subjected to fall illumination or observation from the back of the substrate during macro inspection. Since it is a diffuse reflection, there existed a problem which interrupted the inspection of a board | substrate. In addition, in the substrate holding apparatus described in Japanese Patent Laid-Open No. 2004-281907, a vibration absorbing member is provided in addition to the support for the pin to suppress the vibration, so that the range of blocking the transmitted light during macro inspection increases. This occurs.

In addition, in the macro inspection, it is required by the specification to inspect the substrate back by inverting the substrate by 180 °, and therefore, there is a drawback that the flesh and the vibration absorbing member interfere with the visual observation inspection during the back inspection of the substrate.

SUMMARY OF THE INVENTION In view of the above circumstances, an object of the present invention is to provide a substrate holding mechanism that suppresses vibration of a substrate during micro inspection and does not interfere with transmission illumination inspection or back inspection.

The board | substrate holding mechanism of the external appearance inspection apparatus which concerns on this invention is the board | substrate holding apparatus of the external appearance inspection apparatus which mounted the board | substrate in the frame | board type stage and test | inspects a board | substrate, And a support member for supporting the back surface of the substrate in the opening of the stage, and retraction means for selectively determining a support position for supporting the substrate on the support member and a retracted position withdrawn from the substrate.

According to the present invention, since the support member is retracted from the substrate when the substrate is macro inspected, the observation is not hindered, and when the micro inspection is performed, the substrate is supported by the support member. Or can be magnified and observed while suppressing warping.

In addition, the retraction means includes a holding member for holding the supporting member and an operating member for moving the holding member relative to the substrate, so that the holding member can be moved forward and backward with respect to the substrate.

In macro observation, the supporting member and the holding member are detached from the substrate and superimposed on the frame of the stage so that the entire substrate can be observed. In the micro observation, the holding member is brought to the supporting member by the operating member. The substrate can be supported.

In addition, the magnification inspection part which moves with respect to a board | substrate in order to enlarge and observe a some area | region of a board | substrate at the time of a micro inspection, and the support member provided on the side opposite to the magnification inspection part by clamping a board | substrate are interlocked with the movement of an expansion inspection part. It is preferable to further have a control means for moving to the position corresponding to the.

At the time of micro inspection, when the magnification inspection portion is brought to a part area on the substrate, the coordinates are read by the control means, and in conjunction with this, the support member is moved to a position opposite the part area on the substrate to support the substrate from the back side. Can be.

In addition, the support member may be an actuator for oscillating and operating the pin member for supporting the substrate. In the state where the pin member is hidden by the actuator, the support member can be moved without being interfered with by the stage or the like, and the substrate can be supported in the state where the pin member protrudes from the actuator.

Moreover, in the board | substrate holding apparatus of the external appearance inspection apparatus which concerns on this invention, the advancing means is provided in the flesh provided over the opening part, and the rotation mechanism which rotates a support member with respect to the flesh between the support position and the retracted position evacuated to the back of the flesh with respect to the flesh. It may be.

In this case, although the support area of the board | substrate by a support member is restrict | limited, it is comprised comparatively simple and it can suppress the vibration and the curvature in the support area of a board | substrate by a support member, and its peripheral area.

Then, the support member supports the substrate from the rear side at the position of the defect formed in the substrate or the position close to the defect.

By supporting the substrate at the position of the defect by the supporting member, micro inspection can be performed in a state where vibration and warpage are reliably suppressed, and supporting at a position proximate to the defect can suppress vibration of the substrate in the vicinity of the defect and at the same time transmitted light of the defect. Since it does not disturb, the inspection with good precision can be performed more clearly.

In addition, the advancing means may be provided on a holding member which can move within the opening, and may be a retreat mechanism for causing the supporting member to be settled between the supporting position and the retracted position withdrawn below.

According to the substrate holding apparatus of the visual inspection apparatus of the present invention, since the support member retracts from the substrate during macro inspection, the substrate inspection is not hindered, and during micro inspection, the substrate is supported by the supporting member to prevent vibration or warpage of the substrate. The detailed inspection can be performed by suppressing it.

According to the present invention, it is possible to provide a substrate holding mechanism that suppresses vibration of a substrate during micro inspection and does not interfere with macro inspection.

EXAMPLE

EMBODIMENT OF THE INVENTION Hereinafter, the Example of this invention is described in detail, referring drawings.

An appearance inspection apparatus according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 6.

1 is an explanatory view of a main part of an appearance inspection apparatus according to a first embodiment of the present invention, FIG. 2 is a plan view of the stage, FIG. 3 is a rear view, and FIG. 4 is a longitudinal sectional view cut along the AA line of the stage shown in FIG. 5 is a view similar to FIG. 4 with the support pin protruding, and FIG. 6 is a partially enlarged view of FIG. 5.

The external appearance inspection apparatus 1 shown in FIG. 1 is provided with the apparatus main body 1a provided in the bottom surface, For example, the mother glass used when manufacturing a liquid crystal display (LCD) or a plasma display (PDP) ( A thin substrate 2 such as a mother glass substrate is mounted on the stage 3 to inspect the appearance. The board | substrate 2 is assumed to be a large square plate shape of 2m * 2m or more, for example. As shown in FIG. 2, the stage 3 is formed in a rectangular frame having an opening 16 that is slightly smaller than the substrate 2, and the peripheral periphery of the opening 16 has a peripheral periphery of the back surface of the substrate 2. Vacuum suction holes 3a for adsorbing and holding portions are formed at predetermined intervals.

In FIG. 1, the stage 3 is attached to the rotation drive mechanism 4, and is rotatably supported so that a standing state and a horizontal state may be taken centering on the rotating shaft of the motor 5. The stage 3 is supported so that it can be rotated by the inversion shaft 6 provided in the rotation drive mechanism 4, and the surface and back surface of the board | substrate 2 can be observed. The enlargement inspection means 8 is provided in the position which opposes the stage 3 maintained in a standing state. The enlargement inspection means 8 is the linear inspection part 9 with which a digital camera is attached to a microscope, and the enlargement inspection part 9 can move the X and Y axis direction, and is a linear member which consists of a rail member orthogonal to each other. It consists of the two-dimensional moving mechanism 10 which consists of a motor.

Moreover, the 1st lighting means 12 which can illuminate illumination on the board | substrate 2 mounted in the stage 3 hold | maintained in the standing state is attached to the upper part of the apparatus main body 1a. On the back side of the apparatus main body 1a, the second illumination means 13 for transmitting illumination of the board | substrate 2 mounted in the stage 3 hold | maintained in the standing state is attached.

In FIG. 2, the stage 3 is provided with a plurality of sets of alignment members 15 for positioning and aligning each corner portion of the substrate 2 to be mounted. In addition, in the opening 16 formed in the frame of the stage 3, a rod-shaped flesh 17 is attached to an inner wall of the opening 16 that faces the opening 16 (see FIG. 4). The flesh 17 is mounted in order to suppress the bending of the substrate 2 mounted on the stage 3 by its weight, and the interference is prevented as much as possible when the transmission of the substrate 2 is observed or the reverse side is observed. Only the minimum necessary number (two in the figure) is attached at predetermined intervals so as not to be prevented.

In addition, each of the flesh 17 is provided with a plurality of fixing pins 17a, ... that support the substrate 2 horizontally (four in the drawing), whereby the warpage of the substrate 2 can be suppressed. .

Next, the substrate holding mechanism 11 will be described.

On the back surface of the stage 3 shown in FIG. 3, a pair which is substantially orthogonal to the flesh 17 of the stage 3 among the frame portions 3b, ... forming the four sides of the sage 3, for example. The belt conveyors 20 and 20 are openings 16 as moving means for moving the holding member (hereinafter referred to as a "support bar") 24 to a predetermined position of the opening 16 in the frame portions 3b and 3b of the opening. They are installed approximately parallel to each other. Plate-shaped protection members 18 and 18 are provided outside the belt conveyors 20 and 20. In each belt conveyor 20, an endless track belt 22 is wound between a pair of sprockets 21a, 21b and sprockets provided at both ends. The sprockets 21a and 21a of the two conveyors 20 and 20 facing each other are connected to the shaft 23, and one end of the shaft 23 is connected to the motor M1 as a drive source.

The support bars 24 are connected to the two belts 22 and 22, and the support bars 24 are guided along the guide rails 3c and 3c by rotating the belts 22 and 22 by the motor M1. Make a linear movement. One or more (three in the drawings) support members 25 (hereinafter referred to as "support pins") 25 are attached to the support bar 24 in a direction substantially perpendicular to the stage 3. By driving the motor M1 in the forward and reverse rotation, the support bar 24 moves in the opening 16 by the pair of belts 22 and 22 which are circumferentially moved and retreat to the mold 3b.

Moreover, the support pin 25 is provided with an air cylinder etc. as an actuator, for example, and the cylinder rod 25b as a pin member can be projected to the outer side cylinder 25a as shown to FIG. 5 and FIG. have. In the state where the cylinder rod 25b protrudes by the predetermined distance from the outer side cylinder 25a, the board | substrate 2 mounted in the stage 3 can be supported from the back surface, and vibration and curvature of the board | substrate 2 can be suppressed.

The support pin 25 can move with the support bar 24 without interference with the flesh 17 or the stage 3 with the cylinder rod 25b accommodated in the outer cylinder 25a.

In addition, the support bar 24 and the support pin 25 can be moved and moved in and out by the control means 26. The control means 26 is electrically connected to the motor M1 and the two-dimensional moving mechanism 10, moves the enlargement inspection section 9 to a defect position, and supports the bar in association with the movement of the enlarged inspection section 9. It is made to be able to move 24 to the position slightly off from the inspection line of the enlargement inspection part 9. As shown in FIG.

In the macro inspection of the board | substrate 2 by the visual inspection apparatus 1, the support bar 24 retracts to the back surface of the frame part 3b of the stage 3. At the time of micro inspection, the support bar 24 advances into the opening 16 to support the substrate 2 in the vicinity of the defect K to be inspected by the support pin 25.

And in the board | substrate holding mechanism 11 which concerns on this embodiment, the belt conveyors 20 and 20, the support bar 24, the motor M1, etc. comprise an advancing means.

The board | substrate holding mechanism 11 of the external appearance inspection apparatus 1 which concerns on this embodiment is equipped with the component mentioned above, and the operation | movement is demonstrated below.

First, in the appearance inspection apparatus 1, the board | substrate 2 to test | inspect is mounted in the stage 3 of a horizontal state, the board | substrate 2 is positioned with the alignment member 15, and the said board | substrate 2 is vacuumed. The suction is held by the suction hole 3a. When performing macro inspection of the board | substrate 2, the support bar 24 is retracted from the opening part 16 as shown in FIG. 3, and it moves to the back surface of the frame part 3b of the stage 3. As shown in FIG. The stage 3 is rotated by a rotational drive mechanism 4 at a predetermined angle so as to be suitable for visual observation, and is kept in an upright state, and the surface of the substrate 2 is held by falling illumination from the first lighting means 12. Observe visually. In the case where the substrate 2 is transmitted and observed, the stage 3 is held in an upright state, and the illumination light is irradiated from the back side of the substrate 2 by the second illumination means 13 and visually observed. In the case of performing such transmission observation, the stage 3 is rotated at an angle perpendicular to the vertical direction, for example, 85 ° to 90 °, by the rotation drive mechanism 4, and held in the standing state, and the second illumination means 13 ), The illumination light may be irradiated from the back side of the substrate 2 to be visually observed. At the time of macro observation by the operator's visual observation, the enlarged inspection section 9 and the two-dimensional moving mechanism 10 of the enlarged inspection means 8 may be evacuated from the substrate 2.

In addition, when observing the back surface of the board | substrate 2, the stage 3 may be inverted 180 degrees around the inversion axis 6 of the rotation drive mechanism 4, and may be observed in a standing state similarly to the case mentioned above.

Next, when microscopic observation is made of the defect K detected by the macro inspection, the enlarged inspection unit 9 is moved in the X-axis direction and the Y-axis by the two-dimensional guide mechanism 10 with respect to the stage 3 held in the standing state. Direction to move to the position opposite to the defect K of the substrate 2. At the same time, the coordinate position of the enlarged inspection section 9 is read by the control means 26, and in conjunction with the movement of the enlarged inspection section 9, the motor M1 of the substrate holding mechanism 11 is driven, and the support bar 24 is opened. (16) move into.

For example, assuming that the defect K such as a flaw or foreign matter is in the position shown in FIG. 2, and the enlargement inspection unit 9 is set on the defect K, the coordinate means of the enlarged inspection unit 9 is controlled by the control means 26. The support bar 24 is moved and stopped on a test line overlapping with or slightly off the test line. Next, when the cylinder rod 25b protrudes from each of the support pins 25, ... mounted on the support bar 24, the cylinder rod 25b supports the substrate 2 from the back side.

Here, since the support pin 25 is fixed to the predetermined position of the support bar 24, the cylinder rod 25b is not necessarily located in the vicinity of the defect K, but the peripheral radius is based on the contact point of the support pin 25. Assuming that micro-vibration and warpage of the substrate 2 can be suppressed within the range of a mm, the support pins 25 provided on the support bar 24 may be provided at intervals of 2a mm. The dimension of the radius a is determined according to the size of the substrate 2, the thickness of the plate and the like.

Thereby, the image enlarged by the magnification test | inspection part 9 can be picked up in the state which suppressed vibration and curvature with respect to defect K, and defect K can be observed on a monitor screen. In particular, in the case of transmission observation, it is preferable to support the substrate 2 with the support pins 25 at the position deviated from the defect K in terms of irradiating transmitted light. In addition, when performing fall-off observation, although the support pin 25 may be located just under the defect K, the support pin 25 may support the board | substrate 2 with the support pin 25 in the position deviated from the defect K. FIG. Since the reflected light from can be prevented, it is preferable.

And when the defect K observed with a micro | microscope is located in the position which overlaps with the flesh 17, or it is located in the vicinity, irrespective of the movement of the magnification test | inspection part 9, the support bar 24 is not moved to the coordinate position. You may keep in a retracted state without. In addition, instead of the support bar 24, the plurality of flesh 17 mounted in the opening 16 of the stage 3 is installed so that each support bar 24 can be moved to the guide rails 3c and 3c, respectively. The support bar 24 may be individually controlled to be moved by a linear motor.

As described above, according to the appearance inspection apparatus 1 according to the present embodiment, in the macro inspection, the support bar 24 and the support pin 25 are evacuated to the back surface of the frame 3b of the stage 3. Since it is in a state, it does not interfere with observation under fall illumination and transmission illumination. In addition, since the vicinity of the defect K of the board | substrate 2 to be observed is supported at the time of a micro test | inspection, micro-vibration and curvature of the board | substrate 2 can be suppressed and observation with high precision can be performed.

As a modification of the board | substrate holding mechanism 11 of the external appearance inspection apparatus 1 which concerns on 1st Example, one support member (support pin 25) is provided in a holding member (support bar 24), and a linear motor You may provide so that the support pin 25 may slide along the support bar 24 by a drive source, such as a back.

By adopting such a configuration, the support pin 25 can move in the longitudinal direction of the belt conveyors 20 and 20 and the longitudinal direction of the support bar 24 orthogonal to this, that is, in the X-Y direction. And the control means 26 can move the support pin 25 in the vicinity of the coordinate position corresponding to the defect K. As shown in FIG. Accordingly, the support pin 25 is used to support the periphery of the visual field including the defect K on the substrate 2 captured by the enlarged inspection unit 9 by the support pin 25. It can support from the back side of the board | substrate 2 by this.

Further, if the stop position of the support pin 25 is set at a position slightly off from the coordinates of the defect K of the substrate 2, better transmission magnification observation can be performed since the transmitted light is not blocked in the case of micro inspection under the transmitted light. Can be. In addition, by installing the plurality of support bars 24 in the openings 16 of the stage 3 so as to be movable, the substrates are moved out of the respective support bars 24, particularly when the back surface of the substrate 2 is visually observed. The whole back of (2) can be visually observed.

Next, another embodiment of the present invention will be described, but the same reference numerals are used for the same or similar members and components as the above-described embodiment, and description thereof will be omitted.

7 and 8 show a substrate holding mechanism of the appearance inspection apparatus according to the second embodiment of the present invention, FIG. 7 is a plan view of the stage, and FIG. 8 is a longitudinal sectional view taken along the line B-B of FIG.

In the present embodiment, the support bar 24 and the support pin 25 according to the first embodiment are not provided as the substrate holding mechanism 11. In the substrate holding mechanism 11 of the appearance inspection apparatus 1 according to the present embodiment, the base portion 27 and the guide member 28 are approximately " L " "It is installed in a shape. In particular, the guide member 28 is formed in a plate shape that is continuous in the longitudinal direction of the flesh 17 to secure rigidity, and prevents the flesh 17 from bending under the weight of the magnetic weight or the load of the substrate 2.

The base portion 27 is provided with a holding subsidiary material 30 that can move back and forth with respect to the substrate 2. One or more holding members 30 are provided in one flesh 17 (eight in the figure), and around the support shafts 31 and 한 attached to the base portion 27 and the support shafts 3l, for example. For example, a support member (hereinafter referred to as a "support pin") 32 that can rotate to approximately 90 ° is provided. The support pin 32 is comprised from the arm 33 connected so that the support shaft 32 could be rotated, and the pin member 34 provided substantially perpendicular to the front-end | tip of the arm 33. As shown in FIG.

Therefore, each of the support pins 32 has a retracted position and a dashed-dotted line, which are lowered at right angles and substantially parallel to the guide member 28 withdrawn from the substrate 2, as indicated by the solid line in FIG. 8. The support position which abuts and supports the back surface of the board | substrate 2 substantially parallel with the board | substrate 2 can be selectively taken. The support pin 32 is in the retracted position at the time of macro inspection, and at the support position at the time of micro inspection. In addition, the plurality of support pins 32 provided on each of the spokes 17 are configured to move forward and backward by integrally rotating each of the support shafts 31 on one side of the flesh 17 by a retraction means such as a motor (not shown). have. And each holding member 30 may be rotated individually by an advancing means.

In addition, although the holding member 30 is arrange | positioned at both sides with respect to the flesh 17 (refer FIG. 7), you may be provided only in one side. In addition, as shown in FIG. 7, the holding member 30 is also provided in the pair of frame parts 3b and 3b which form the opposite side of the stage 3 at appropriate intervals.

In the present embodiment, the micro pins and the warpage of the substrate 2 can be suppressed within the range of the peripheral radius a mm by the fixing pins 17a provided on the respective support pins 32 and the respective fleshes 17. Therefore, by setting each of the support pins 32 and the fixing pins 17a at approximately a distance of 2a mm, it is possible to cope with micro observation of the defect K formed at an arbitrary position of the substrate 2.

The board | substrate holding mechanism 11 of the external appearance inspection apparatus 1 which concerns on this embodiment is equipped with the component mentioned above, and in the macro inspection, the holding member provided in each flesh 17 and the frame part 3b ( 30) A visual observation of the base 2 on the stage 3 is performed in a state where each support pin 32 is evacuated to the back surface of the flesh 17 or the mold 3b as shown by the solid line in FIG. Therefore, each holding member 30 does not prevent the observation in the fall illumination or the transmissive illumination state.

In addition, at the time of micro inspection, as shown in FIG. 7, each holding member 30 attached to the flesh 17 located in the vicinity of the defect K to observe on the board | substrate 2 is rotated through the support shaft 31, The defect pin K vicinity of the board | substrate 2 is supported by holding the support pin 32 in a support position. Thereby, since micro vibration and curvature do not generate | occur | produce in the vicinity of defect K of the board | substrate 2 observed with a micro | micro | microscope, observation and inspection with favorable precision can be performed.

In the first embodiment, instead of the conveyors 20 and 20 for moving the support bar 24 forward and backward, the support bar 24 is moved forward and backward with another actuator, for example, a linear actuator such as a linear motor or a ball screw. You may make it move.

In addition, in the second embodiment, the support pin 32 is equipped with one pin member 34 on the arm 33 to support the substrate, but the length of the arm 33 is increased so that the plurality of pin members 34 may be provided at appropriate intervals (see Fig. 9A). In addition, although the cylinder rod 25b and the pin member 34 were formed in rod shape, you may form in the substantially T shape which provided the plate-shaped or rod-shaped head part in the front-end | tip (refer FIG. 9B), and in this case, to the board | substrate 2 The vibration suppression range can be widened.

In addition, since the peripheral part of the board | substrate 2 is supported by the stage 3, and rigidity is high, it is not necessary to form the holding member 30 in the frame part 3b.

In addition, in the present invention, the number of the support pins 25 and 32 supporting the substrate 2 may be set to an appropriate number depending on the external dimension of the substrate 2 or the strength of the substrate 2 according to the thickness of the substrate. There is no need.

As mentioned above, although the preferred embodiment of this invention was described, this invention is not limited to these Examples. Changes may be made to additions, omissions, substitutions, and other examples without departing from the spirit of the present invention. The invention is not limited by the foregoing description, but only by the scope of the appended claims.

1 is an explanatory view of a main part of an appearance inspection apparatus according to a first embodiment of the present invention.

2 is a plan view of a stage in an appearance inspection apparatus.

3 is a rear view of the stage in the appearance inspection apparatus.

4 is a longitudinal cross-sectional view taken along line A-A of the stage shown in FIG.

FIG. 5 is a view similar to FIG. 4 with the support pin protruding. FIG.

FIG. 6 is a partially enlarged view of the support pin shown in FIG. 5. FIG.

7 is a plan view of a main portion showing a stage of an appearance inspection apparatus according to a second embodiment.

FIG. 8 is a cross-sectional view taken along line B-B in FIG. 7.

9A and 9B show a modification of the support pin according to the second embodiment.

Claims (7)

In the board | substrate holding apparatus of the external appearance inspection apparatus which mounted a board | substrate in the frame-shaped stage and test | inspected, A frame-shaped stage for holding a periphery around the back of the substrate, And a support member for supporting the back surface of the substrate in the opening of the stage, and retreating means for selectively selecting a support position for supporting the substrate and a retracted position withdrawn from the substrate in the support member. Substrate holding device of inspection device. The method of claim 1, The said retraction means is provided with the holding member which hold | maintains the said support member, and the operation member which moves the said holding member with respect to a board | substrate, The said holding member advances and backs the said holding member with respect to the said board | substrate Substrate holding device of appearance inspection device. The method according to claim 1 or 2, The magnification inspection part which moves with respect to a board | substrate to magnify and observe the partial area | region of the said board | substrate at the time of the micro inspection, and the said support member which is provided on the opposite side to the magnification inspection part by clamping the said board | substrate are linked with the movement of the said expansion inspection part. And a control means for moving to a position corresponding to the enlarged inspection part. The method of claim 1, The support member is a substrate holding device for an appearance inspection apparatus, wherein the support member is an actuator for projecting and operating the pin member for supporting the substrate. The method of claim 1, The said retraction means is a rotation mechanism which is provided in the flesh provided over the opening part, and rotates the said support member with respect to the said meat between a support position and the retracted position evacuated to the back side of the said flesh. Substrate holding device. The method of claim 1, The said retreat means is provided in the holding member which can be moved in an opening part, and is an appearance inspection apparatus which makes a support member ooze with respect to the said holding member between a support position and the retracted position retracted below. Substrate holding device. The method of claim 1, And the support member supports the substrate from the rear surface at the position of a defect provided on the substrate or at a position proximate to the defect.

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