JP4243837B2 - Transparent substrate surface inspection method and inspection apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transparent substrate surface inspection method and inspection apparatus for inspecting the surface state of a transparent substrate such as a liquid crystal substrate or a substrate used for a plasma display.
[0002]
[Prior art]
For example, an optical detection means is used to inspect a surface defect whether foreign matter is attached to the surface of a transparent substrate such as a glass substrate constituting a liquid crystal display, or whether a scratch, unevenness, etc. are generated. Used. That is, the transparent substrate is arranged in a horizontal state, the surface of the transparent substrate is irradiated with light, the reflected light or the reflected scattered light is received, and foreign matter is detected on the surface of the transparent substrate based on the received light signal. Detect the presence or absence of scratches.
[0003]
The transparent substrate constituting the liquid crystal display has a large area and is thin, and in particular, a large transparent substrate is cut out from the viewpoint of production efficiency. Therefore, when performing surface inspection of a thin and large transparent substrate, it is extremely difficult to hold the transparent substrate in a horizontal state, and if the peripheral part is held only, a large amount of deflection occurs due to its own weight. Because of the non-uniformity, the inspection cannot be performed as it is. In view of this, there is conventionally known a technique in which the peripheral portion of the transparent substrate is held and the transparent substrate is held in a horizontal state by a push-up pin (see, for example, Patent Document 1).
[0004]
[Patent Document 1]
Japanese Patent Laid-Open No. 11-59894 (page 3, FIGS. 1 and 2)
[0005]
[Problems to be solved by the invention]
In the above-described prior art, since the push-up pin is in contact with the back side of the transparent substrate, the transparent substrate can be held in a substantially horizontal state. However, since the surface condition is inspected by the inspection optical system, there is a large difference in the reflected light from the surface of the transparent substrate between the part that is in contact with the push-up pin and the part that is not so, and noise is generated. For example, there is a problem in that it is impossible to accurately inspect whether there is a defect such as a foreign object or a scratch on the entire surface of the transparent substrate.
[0006]
The present invention has been made in view of the above points, and an object of the present invention is to enable a highly accurate surface inspection to be performed reliably over the entire surface of a transparent substrate.
[0007]
[Means for Solving the Problems]
In order to achieve the above-described object, in the present invention, as a method for inspecting a surface defect of a transparent substrate by scanning the surface of the transparent substrate with an inspection optical system, the inspection substrate includes the inspection optical system. A plurality of inspection zones having a predetermined width to be scanned are set in parallel in one direction, and surface defect inspection is performed by the inspection optical system for each of the inspection zones or for a plurality of simultaneous inspection zones not adjacent to each other. The surface of the inspection execution zone is deformed by bringing a support member into contact with the back side of the inspection zone adjacent to the inspection execution zone in which the surface defect inspection is executed by the inspection optical system. To prevent flatness, to shift the inspection execution zone by the inspection optical system sequentially, and to support the supporting position of the support member on both sides adjacent to the inspection execution zone It is an its features that it has to move to the back surface position of the over down.
[0008]
In the present invention, the configuration of the apparatus for inspecting the surface defect of the transparent substrate by making the inspection optical system face the surface of the transparent substrate is a plurality of having a predetermined width in one direction of the transparent substrate. In order to perform inspection of surface defects in each of these inspection zones, a plurality of inspection optical systems are moved in the width direction of the inspection zone so as to face one or non-adjacent inspection zones. In addition, on the back side of the transparent substrate, in order to prevent the deformation of the surface of the inspection execution zone where the inspection is being performed and to obtain flatness, an inspection zone adjacent to the inspection execution zone is provided. It is characterized in that the support member that is in contact with and away from the back surface is configured to be movable in the width direction of the inspection zone.
[0009]
For the transparent substrate to be inspected, the entire surface is not inspected at once, but the surface defect inspection is performed in a plurality of times. For example, a transparent substrate for a liquid crystal panel is usually rectangular, and in this case, a plurality of inspection zones are formed in a direction parallel to the long side. Therefore, the inspection performed while relatively moving the transparent substrate and the inspection optical system is performed a plurality of times for each transparent substrate. In this way, the plurality of inspection zones are divided into flatness on the surface of the inspection execution zone on the transparent substrate by supporting from the back side of the transparent substrate at a position adjacent to the inspection zone performing the inspection. This is to prevent the deformation, distortion, bending, and further deformation such as bending. Therefore, the width dimension of the inspection zone is determined by whether or not the surface flatness can be secured by the support member. For this reason, the narrower the inspection zone, the higher the flatness can be obtained. However, this increases the number of inspection optical systems and increases the inspection time. For this reason, it is better to make the width of the inspection zone as wide as possible on condition that the flatness that does not interfere with the inspection is secured. Here, at the time of inspection, the transparent substrate is disposed horizontally or inclined by a predetermined angle. However, in the vertical state, since it is not determined which direction to bend, the angle of the surface to be inspected must be 90 ° or less.
[0010]
If the inspection optical system is reciprocated over the entire length in the direction orthogonal to the inspection zone, it is only necessary to use one inspection optical system. However, two sets of support members need to be provided because they support the inspection zones on both sides of the inspection execution zone. From the viewpoint of inspection efficiency and the like, a plurality of inspection zones to be inspected simultaneously can be set, and the same number of inspection optical systems as the number of these inspection execution zones can be provided. The inspection is a non-contact inspection on the transparent substrate using optical means such as sampling of scattered light (foreign matter inspection) or inspection using interference fringes (surface unevenness inspection). There is no limit. Further, the present invention is not limited to detecting reflected light from the transparent substrate, and may be one that detects transmitted light. Either the transparent substrate or the inspection optical system can be moved. However, if the transparent substrate is moved, a large space is required. Therefore, it is desirable to move the inspection optical system.
[0011]
When simultaneously inspecting a plurality of inspection zones, the simultaneous inspection zone group can be set as appropriate, such as a second group or a third group. When two sets of simultaneous inspection zones are formed, there are two sets of an odd inspection zone and an even inspection zone. When inspecting one simultaneous inspection zone group, a support member is brought into contact with the back side of the inspection zone adjacent to the inspection zone under inspection so that the inspection zone under inspection is kept flat. To do. For this purpose, the support member is brought into contact with the adjacent inspection zone at a position close to the inspection execution zone. In that sense, it is optimal that the support member is positioned substantially at the boundary. However, as long as the flatness of the transparent substrate can be secured, the position is not limited. The contact portion of the support member with respect to the transparent substrate is preferably a bar-shaped member that is substantially in line contact with the back surface of the transparent substrate, but the contact area with the transparent substrate is increased. On the other hand, the pin-shaped one has an advantage that the contact area with the transparent substrate can be made extremely small. The support bar and the support pin can be provided at a right angle with respect to the transparent substrate, but can also be inclined at a predetermined angle toward the inspection execution zone. Further, the support member can be constituted by a roller or the like.
[0012]
During the inspection, the support position of the support member on the transparent substrate must be shifted. Support members can be placed at the bottom of all support positions to move them up and down, or the support members can be moved up and down and can be moved in a direction perpendicular to the length direction of the inspection zone. It can also be set as the structure. The support member may be moved by a single driving means, or each support member may be driven individually. When configured so as to be individually driven, it is possible to easily cope with cases such as changing the width of the inspection zone or inspecting transparent substrates having different sizes. Further, when performing the inspection, the transparent substrate must be positioned. For this purpose, for example, both end portions in the length direction of the inspection zone in the transparent substrate or both end portions in the width direction of the inspection zone may be clamped.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, FIG. 1 shows the appearance of the transparent substrate 1 to be inspected. The illustrated transparent substrate 1 has a thin rectangular shape and is made of glass, synthetic resin, or the like. Divided into a plurality of inspection zones having the same width in a direction parallel to the long side of the transparent substrate 1 (in the drawing, the boundary portion of the inspection zone is indicated by a virtual line). In the figure, ZO is an odd inspection zone, ZE is an even inspection zone, and these odd and even inspection zones are collectively referred to as an inspection zone Z. The odd inspection zone ZO and the even inspection zone ZE constitute a simultaneous inspection zone group in which inspections are simultaneously performed. In the illustrated example, the odd number inspection zone ZO and the even number inspection zone ZE have three groups respectively. Note that functional blank portions BL having a slight width are formed at both ends of the transparent substrate 1.
[0014]
2 and 3 show a schematic configuration of the transparent substrate 1 surface inspection apparatus. As is apparent from these drawings, the transparent substrate 1 is detachably mounted so as to be in a horizontal state by the substrate holding means. The substrate holding means includes a clamp member 3 mounted on the side surfaces of the support blocks 2R and 2L provided on the left and right sides facing each other. The clamp member 3 includes a fixed clamp part piece 3a and a movable clamp part piece 3b, and the movable clamp part piece 3b can be displaced in a direction approaching and separating from the fixed clamp part piece 3a. A cylinder 4 is connected to the fixed clamp piece 3a, and the movable clamp piece 3b can be displaced in the direction of approaching and separating from the fixed clamp piece 3a. Accordingly, when the movable clamp piece 3b is lifted, the clamp is released, and when the movable clamp piece 3b is lowered, the clamp operating position is reached. The support blocks 2R and 2L are provided with driving means (not shown) including a solenoid or the like for separating the movable clamp part 3b from the fixed clamp part 3a against the spring 5. The clamp member 3 clamps the blank portions BL on both sides of the transparent substrate 1 and is held in a non-contact state with respect to the inspection zone Z. The clamp member can be configured to be opened and closed by means such as a spring and a solenoid.
[0015]
An inspection optical unit 10 is disposed at an upper position of the substrate holding means in order to perform defect inspection on the surface of the transparent substrate 1 in a non-contact manner. Here, the inspection performed on the transparent substrate 1 is to inspect the surface for the presence of foreign matter or scratches, or to inspect whether the surface is smooth or uneven. This is a so-called surface state defect inspection. Therefore, an inspection optical system 11 suitable for performing the intended defect inspection is used. The inspection optical system 11 is provided in the same number as the number of inspection zones ZO and ZE that are simultaneously inspected. Therefore, from the example of FIG. 1, the inspection optical system 11 is provided at three positions on the X-axis frame 14 to be described later with a predetermined interval, and these arrangement pitch intervals are the same as the interval of the inspection zone Z to be inspected at the same time. Match. However, it is not always necessary to coincide with the inspection zone Z. In short, it is only necessary that the entire inspection zone Z can be inspected.
[0016]
As a schematic configuration of the inspection optical system 11, in the case of inspecting a surface foreign object, a flaw or the like, for example, as shown in FIG. Is irradiated with illumination light obliquely from above toward the surface of the transparent substrate 1. And when the foreign material has adhered to the surface of the transparent substrate 1 as shown with the code | symbol P, the reflected light from the surface of this transparent substrate 1 will be scattered. Therefore, the detection means 13 is arranged at a position other than the regular reflection direction in order to detect the scattered reflected light. Therefore, the inspection optical system 11 is configured by the illumination unit 12 and the detection unit 13. The inspection optical system 11 including the illumination unit 12 and the detection unit 13 performs reciprocal scanning over the entire length in the width direction of the inspection zone Z, that is, the X-axis direction in FIG. 3 (hereinafter, this scanning direction is referred to as the sub-scanning direction). Called).
[0017]
The three inspection optical systems 11 provided can be reciprocated in the left-right direction (that is, the X-axis direction in FIG. 3) in the width direction of the inspection zone Z of the transparent substrate 1 by an interval corresponding to the sub-scanning width. ing. For this purpose, the three inspection optical systems 11 are mounted on the X-axis frame 14, and the inspection optical unit 10 is configured by these. The X-axis frame 14 in the inspection optical unit 10 is provided on the upper surface of the support blocks 2R and 2L constituting the substrate holding means, and is along the guide rail 6 provided in parallel with the length direction of the inspection zone Z (front-rear direction ( That is, it is mounted on a Y-axis frame 15 that can reciprocate in the Y-axis direction in FIG. The Y-axis frame 15 is provided with an X-axis actuator 16 that reciprocates the X-axis frame 14 by the width dimension of the inspection zone Z in the X-axis direction. The X-axis frame 14 is provided with an interlocking member 17 connected to the X-axis actuator 16. Here, since the X-axis actuator 16 is reciprocated by the width of the inspection zone Z in the X-axis direction, the X-axis actuator 16 can be configured by a cylinder, a solenoid, or the like. In order to cope with the case where the width direction of the inspection zone Z is changed, a ball screw feeding means is used.
[0018]
The inspection optical system 11 scans in the width direction of the inspection zone Z on the transparent substrate 1, but the inspection optical system 11 must be moved further in the length direction of the inspection zone Z. The Y-axis frame 15 provided with the X-axis frame 14 to which the inspection optical system 11 is mounted is moved in the length direction of the inspection zone Z in the transparent substrate 1 and the inspection optical system 11 is scanned in this direction (in the following, Is provided with a Y-axis actuator 18 (this direction is referred to as a main scanning direction). The Y-axis actuator 18 includes a motor 18a attached to the outer side surface of the support block 2L, a screw shaft 18b that is rotationally driven by the motor 18a, and a bearing 18c that rotatably supports the tip of the screw shaft 18b. The A ball nut 19 is screwed onto the screw shaft 18b, and the ball nut 19 is connected to the Y-axis frame 15.
[0019]
On the other hand, a substrate planarization holding unit 20 as a support member for supporting the back surface of the transparent substrate 1 is provided at a lower position of the substrate holding means. The substrate planarization holding unit 20 is disposed between the support blocks 2R and 2L, and when inspecting the odd inspection zone ZO of the transparent substrate 1, the substrate flattening holding unit 20 is located near the boundary portion to the odd inspection zone ZO in the even inspection zone ZE. The even-numbered inspection zone holding member 21 and the odd-numbered inspection zone holding member 22 that abuts in the vicinity of the boundary to the even-numbered inspection zone ZE in the odd-numbered inspection zone ZO when inspecting the even-numbered inspection zone ZE.
[0020]
When the inspection optical system 11 of the inspection optical unit 10 inspects the odd inspection zone ZO of the transparent substrate 1, the even inspection zone holding member 21 is outside the odd inspection zone ZO, that is, the back surface side of the even inspection zone ZE. In order to hold each of the plurality of odd inspection zones ZO accurately in a horizontal state. At this time, the odd inspection zone holding member 22 is held in a state sufficiently separated from the transparent substrate 1, that is, at a position where noise is not taken into the inspection optical system 11 by the reflected light from the odd inspection zone holding member 22. Further, when inspecting the even inspection zone ZE of the transparent substrate 1, the odd inspection zone holding member 22 supports the back side of the odd inspection zone ZO and accurately holds each even inspection zone ZE in a horizontal state. At this time, the even-numbered inspection zone holding member 21 is sufficiently separated from the transparent substrate 1 and is held at a position where reflected light from the even-numbered inspection zone holding member 21 is not taken into the inspection optical system 11.
[0021]
Therefore, as is clear from FIG. 5, each of the support members 21 and 22 includes the lift plates 21a and 22a and the five support bars 21b and 22b attached to the lift plates 21a and 22a, respectively. , 22a can be moved up and down by a guide rod 23 suspended from the support blocks 2R, 2L. Further, the elevating plates 21a and 22a are respectively provided with elevating drive means 24 composed of cylinders or the like. By operating these elevating drive means 24, the support bars 21b and 22b are respectively attached to the transparent substrate 1. The actuator can be displaced between an operating position that contacts the back surface and a retracted position that is separated from the transparent substrate 1. Although the illustrated lift drive means 24 is configured to drive all the support bars up and down simultaneously, it can also be configured to drive the support bars individually with respect to each support bar. When the zone width or the like changes, the respective positions can be adjusted. And the cross-sectional shape of the front-end | tip part of support bar 21b, 22b is circular arc shape so that this transparent substrate 1 may not be damaged when contacting with the transparent substrate 1. FIG.
[0022]
The even-numbered inspection zone holding member 21 and the odd-numbered inspection zone holding member 22 described above are the front and rear ends of the transparent substrate 1 in which the lifting plates 21a and 22a are clamped by the clamp member 3, that is, the front and rear ends in the main scanning direction. In the part, it arrange | positions in the position spaced apart from the transparent substrate 1 only by predetermined spacing. And support bar 21b, 22b attached to each of these raising / lowering plates 21a, 22a is extended toward the direction of the other raising / lowering plate.
[0023]
A method for performing a defect inspection on the surface of the transparent substrate 1 using the surface inspection apparatus configured as described above will be described.
[0024]
First, the inspection optical unit 10 is arranged at the end in the main scanning direction, and the movable clamp part 3b of the clamp member 3 attached to the substrate holding means is separated from the fixed clamp part 3a. Further, the support members 21 and 22 constituting the substrate planarization holding unit 20 are arranged at the retracted position. Therefore, the transparent substrate 1 is horizontally transported by appropriate handling means with the inspection target surface facing upward, and is inserted between the fixed clamp part 3a and the movable clamp part 3b. In this state, after adjusting the position of the transparent substrate 1 by image recognition or the like, the movable clamp piece 3b is lowered to clamp both the left and right sides of the transparent substrate 1 with the clamp member 3, thereby handling means. Evacuate. Thereby, the transparent substrate 1 is mounted on the surface inspection apparatus.
[0025]
A plurality of odd-numbered inspection zones ZO and even-numbered inspection zones ZE are set on the transparent substrate 1, and the group of odd-numbered inspection zones ZO and the group of even-numbered inspection zones ZE are separately inspected. Yes. Therefore, first, the group of odd inspection zones ZO is inspected, and then the group of even inspection zones ZE is inspected. Any of the inspections may be performed first.
[0026]
First, in order to perform the inspection of the set of the odd inspection zones ZO, that is, the three odd inspection zones ZO shown in FIG. 1, the even inspection zone holding member 21 is raised to constitute the even inspection zone holding member 21. The operating positions are such that the five support bars 21b are brought into contact with the back surface of the transparent substrate 1. At this time, the odd inspection zone holding member 22 is held at the retracted position. That is, in FIG. 6 (a), the support bar and the clamp member are in contact with the portion indicated by oblique lines on the back surface side of the transparent substrate 1, so that the transparent substrate 1 is accurately held horizontally over the entire surface. No bending or distortion occurs. In addition, the zone to be inspected at the time of the inspection is an area indicated by dots, and since there is no object that reflects light on the back surface of this area, erroneous detection due to generation of noise or the like during inspection by the inspection optical system 11 Can be prevented.
[0027]
By driving the Y-axis actuator 18 provided in the inspection unit 10 in the above state, the inspection optical system 11 is moved in the main scanning direction along the surface of the transparent substrate 1, and the inspection optical system 11 is moved in the sub-scanning direction. To operate. When the inspection optical system 11 reaches the end position in the main scanning direction, the surface defect inspection of the odd inspection zone ZO is executed.
[0028]
Next, the inspection optical system 11 in the inspection optical unit 10 is shifted to a position facing the even inspection zone ZE of the transparent substrate 1. For this purpose, the X-axis actuator 16 is operated to move the X-axis frame 14. Further, the even inspection zone holding member 21 constituting the substrate planarization holding unit 20 is displaced to the retracted position, and the odd inspection zone holding member 22 is displaced to the operating position. As a result, the support bar and the clamp member are in contact with the back side of the part indicated by hatching in FIG. 6B, and the area to be inspected is in the state indicated by dots. As a result, the transparent substrate 1 is also accurately held in a horizontal state, and no member is positioned on the back side of the even inspection zone ZE to be inspected. Accordingly, by operating the Y-axis actuator 18 and moving it in the main scanning direction in the direction opposite to that during the inspection of the odd-numbered inspection zone ZO, that is, in the returning direction, the accurate surface defect inspection of the even-numbered inspection zone ZE is executed. As a result, the surface of the transparent substrate 1 can be thoroughly inspected, and the inspection accuracy is extremely high.
[0029]
Thus, the width dimension of the inspection zone Z in the transparent substrate 1 is set according to the degree to which the blank portion BL at both ends of the transparent substrate 1 is bent. If the transparent substrate 1 has a high rigidity, the width of the inspection zone Z can be widened, that is, the number of inspection zones Z can be reduced. If the transparent substrate 1 is flexible, the inspection zone Z can be reduced. The width dimension of the transparent substrate 1 is narrowed to increase the number of zones, and the pitch interval of the support portions on the back side of the transparent substrate 1 is shortened.
[0030]
Next, FIGS. 7 and 8 show a second embodiment of the present invention. In this embodiment, the light emitted from the inspection optical system is reflected from the support unit to prevent erroneous detection more reliably. The transparent substrate 1 is sequentially subjected to surface defect inspection for each inspection zone.
[0031]
Thus, in FIG. 7, reference numeral 30 denotes an X-axis table that moves the transparent substrate 1 in the X-axis direction that is the sub-scanning direction. The X-axis table 30 is moved along the guide 32 by the ball screw feeding means 31. It is made to move in the X-axis direction. On the X-axis table 30, a pair of holding members 33 and 33 that hold both ends of the transparent substrate 1 move along a guide 34 in a direction orthogonal to the X-axis table 30, that is, the Y-axis direction that is the main scanning direction. It is attached as possible. Although not shown, the holding member 33 can hold both ends of the transparent substrate 1 fixedly by means such as a clamp. Further, the movement in the Y-axis direction can be constituted by a ball screw feeding means or the like, but illustration thereof is omitted.
[0032]
When the surface defect inspection of the transparent substrate 1 is performed, the support unit 35 for supporting the back side of the inspection zone adjacent to both sides of the inspection zone and preventing deformation such as bending and bending at the inspection zone portion, A plurality of support pins 37 are erected on the base plate 36. Among these support pins 37, the support pins located at the edge of the base plate 36 are inclined pins 37T. That is, among the support pins 37 on the base plate 36, the inclined pins 37 </ b> T that support the nearest position of the inspection zone are inclined in a direction away from the end of the base plate 36.
[0033]
A plurality of support units 35 (two pairs in FIG. 7) are provided in the length direction of the inspection zone, with the support unit 35 sandwiching the inspection zone of the transparent substrate 1 as a pair. And the base plate 36 which comprises the support unit 35 is mounted on the conveyance stand 38 so that raising / lowering is possible by the cylinder 39. Therefore, by operating the cylinder 39, the support pins 37 and 37T can be displaced between a state in which the support pins 37 and 37T are in contact with the back surface of the transparent substrate 1 and a state in which the support pins 37 and 37T are spaced downward from the transparent substrate 1. Further, the position of the transport table 38 can be adjusted in the Y-axis direction by sliding the guide 41 by the ball screw feeding means 40. This makes it possible to change the support position of the transparent substrate 1 by the support pins 37 and 37T when inspecting different inspection zones.
[0034]
Therefore, as shown in FIG. 8, the transparent substrate 1 is divided into a plurality of inspection zones, and the inspection optical system 10 disposed at the upper position of the transparent substrate 1 is changed from the inspection zone Z1 on one side to the inspection zones Z2, Surface defect inspection is performed for each inspection zone in the order of inspection zone Z3. In this case, as a result of the inclined support pins 37T coming into contact with the inspection zone adjacent to the inspection execution zone at a position close to the boundary of the inspection execution zone, the flatness of the inspection execution zone on the transparent substrate 1 is reliably ensured. Is done. In addition, since the base plate 36 on which the inclined support pins 37T are mounted is disposed at a position far from the inspection execution zone, an inspection error occurs due to the influence of reflected light from the lower side of the transparent substrate 1. Can be prevented, and extremely high-precision inspection becomes possible.
[0035]
As is clear from FIG. 8, the transparent substrate 1 is inspected in the order of inspection zones Z1, Z2, and Z3, so that the transport table 38 is moved each time. When the inspection zones Z1 and Z3 located at the ends are being inspected, the support unit 35 located on the right side in the drawing is disposed at the lower position of the inspection zone Z2, but the left side support unit 35 is located. However, if the transparent substrate 1 does not necessarily have to be supported, but there is a margin with a slight width at the end of the transparent substrate 1 that does not require inspection, the inclined support pins 37T are applied to the margin. You may make it contact.
[0036]
In each of the above-described embodiments, the inspection is performed with the transparent substrate in a horizontal state. However, the transparent substrate has a predetermined angle, for example, the surface on which the inspection of the transparent substrate is performed is vertical. It is also possible to inspect in a state slightly tilted from the top, for example, in a state having an angle of about 85 ° to 80 °. In this case, the support member that supports the back surface of the transparent substrate is also arranged to be inclined at the same angle.
[0037]
【The invention's effect】
As described above, according to the present invention, there are various effects such as that a transparent substrate can be reliably and highly accurately surface-inspected over the entire surface by the optical means.
[Brief description of the drawings]
FIG. 1 is a plan view of a transparent substrate in which an inspection zone is set.
FIG. 2 is a front view showing the configuration of the transparent substrate surface inspection apparatus according to the first embodiment of the present invention.
FIG. 3 is a plan view of FIG. 2;
FIG. 4 is an explanatory view showing a state where a surface inspection of a transparent substrate is performed by an inspection optical system.
FIG. 5 is a configuration explanatory view of one support member in the substrate planarization holding unit.
FIG. 6 is an operation explanatory diagram illustrating a state in which a surface inspection of a transparent substrate is being performed.
FIG. 7 is a configuration explanatory view of a transparent substrate surface inspection apparatus showing a second embodiment of the present invention.
FIG. 8 is an operation explanatory diagram of the embodiment of FIG.
[Explanation of symbols]
1 Transparent substrate
2R, 2L support block
3 Clamp member
10 Inspection optical unit
11 Inspection optical system
14 X-axis frame
15 Y-axis frame
16 X-axis actuator
18 Y-axis actuator
20 Substrate flattening holding unit
21 Even inspection zone holding member
22 Odd inspection zone holding member
21a, 22a Lift plate
21b, 22b Support bar
23, 24 Lifting drive means
30 X-axis table
33 Holding member
35 Support unit
36 base plate
37 Support pin
37T inclined support pin
Z, Z1-Z3 inspection zone
ZO Odd inspection zone
ZE even inspection zone

Claims (10)

By scanning the surface of the transparent substrate with an inspection optical system, a method for inspecting the surface defect of the transparent substrate,
In the transparent substrate, a plurality of inspection zones having a predetermined width scanned by the inspection optical system are set in parallel in one direction,
A surface defect inspection is performed by the inspection optical system for each inspection zone or for each of a plurality of simultaneous inspection zone groups that are not adjacent to each other,
A support member is brought into contact with the back side of the inspection zone adjacent to the inspection execution zone in which surface inspection is performed by the inspection optical system to prevent the surface of the inspection execution zone from being deformed, and the flatness is increased. None
A method of inspecting a transparent substrate, wherein the inspection execution zone by the inspection optical system is sequentially shifted, and the support position of the support member is moved to the back surface position of both inspection zones adjacent to the inspection execution zone. The inspection zone is formed in a plurality of rows from one end side to the other end side of the transparent substrate, so that the surface defect inspection is sequentially performed one inspection zone at a time from the inspection zone located at one end. 2. The transparent substrate inspection method according to claim 1, wherein the inspection optical system and the support member are moved. The inspection zones are not adjacent to each other, and are set as a simultaneous inspection zone group that is simultaneously inspected so as to have a constant pitch interval, and the inspection optical system performs an inspection for each of the simultaneous inspection zone groups. 2. The method for inspecting a transparent substrate according to claim 1, wherein the plurality of inspection optical systems and the support member are moved for each simultaneous inspection zone group. Among the inspection zones, the odd-numbered inspection zone and the even-numbered inspection zone are formed as separate simultaneous inspection zone groups, and the inspection optical system performs simultaneous inspection on the odd-numbered inspection zone. During this time, the support member supports the back side of each even-numbered inspection zone, and while the inspection optical system is performing simultaneous inspection on the even-numbered inspection zone, the support member is odd-numbered. 4. The method for inspecting a transparent substrate according to claim 3, wherein the inspection substrate is moved so as to support the back side of the inspection zone. 2. The method for inspecting a transparent substrate according to claim 1, wherein the inspection by the inspection optical system is performed by tilting the transparent substrate at a predetermined angle with respect to a horizontal state or a vertical state. An apparatus for inspecting the surface defect of the transparent substrate by making the inspection optical system face the surface of the transparent substrate,
In order to set a plurality of inspection zones having a predetermined width in one direction of the transparent substrate and perform surface defect inspection of each of the inspection zones, a plurality of inspection zones are provided so as to face one or non-adjacent inspection zones. An inspection optical system is provided to be movable in the width direction of the inspection zone,
Further, on the back surface side of the transparent substrate, in order to prevent the surface of the inspection execution zone where the inspection is being performed from being deformed and to obtain flatness, the back surface of the inspection zone adjacent to the inspection execution zone is contacted / separated. An apparatus for inspecting a surface defect of a transparent substrate, characterized in that the supporting member is configured to be movable in the width direction of the inspection zone. The transparent substrate is configured such that the left and right or front and rear edges thereof are clamped and held by the substrate holding means, and the substrate holding means is provided at an angle close to horizontal or vertical. 6. A surface defect inspection apparatus for a transparent substrate according to 6. The same number of odd-numbered and even-numbered inspection zones are formed on the transparent substrate, and the plurality of odd-numbered inspection zones and the plurality of even-numbered inspection zones are simultaneously inspected simultaneously. No inspection zone group, the same number of inspection optical systems as the number of inspection zones of the simultaneous inspection zone group is provided, and each of these inspection optical systems has a width dimension of the inspection zone in a direction orthogonal to the arrangement direction of the inspection zones. The transparent substrate surface inspection apparatus according to claim 6, wherein the apparatus is configured to be reciprocally movable. The support means is composed of any one of a plurality of support pins, support bars, and support rollers provided in the length direction of the inspection zone, and the support means is in contact with the vicinity of the boundary to the inspection execution zone. 7. The transparent substrate surface inspection apparatus according to claim 6, wherein the surface inspection apparatus is a transparent substrate. The transparent substrate surface inspection apparatus according to claim 9, wherein the support pin or the support bar is inclined toward the inspection execution zone.

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