KR100942066B1

KR100942066B1 - Holder Stage

Info

Publication number: KR100942066B1
Application number: KR20080040921A
Authority: KR
Inventors: 허관선
Original assignee: 주식회사 테라세미콘
Priority date: 2008-04-30
Filing date: 2008-04-30
Publication date: 2010-02-11
Also published as: KR20090115002A; WO2009134088A3; JP5364156B2; CN102016697A; JP2011519482A; WO2009134088A2; CN102016697B

Abstract

A holder stage has been disclosed for aligning a position of a glass substrate and a holder so that glass can be smoothly loaded into a boat inside a chamber in a heat treatment apparatus to perform a heat treatment process. In the holder stage according to the present invention, the holder 330 is mounted to be loaded into the chamber 500 while the glass substrate 10 is seated on the holder 330, and the glass substrate 10 corresponds to each holder 330. As a holder stage, the alignment unit 360 is installed to align the holder 330 and the glass substrate 10 corresponding to the holder 330; And an alignment rotating unit 340 for rotating the alignment unit 360, and the holder 330 mounted on the holder stage 300 before loading the glass substrate 10 into the chamber 500. When the glass substrate 10 is mounted, the glass substrate 10 is aligned with the holder 330 to smoothly move the glass substrate to perform the heat treatment process.

Heat Treatment Equipment, Glass Substrates, Holders, Alignment

Description

Holder stage {Holder Stage}

The present invention relates to a holder stage. More specifically, the glass substrate is holder so that the glass substrate and the holder on which the glass substrate is mounted can be smoothly loaded in the boat inside the chamber in order to perform the heat treatment process on the glass substrate to crystallize the amorphous silicon into polysilicon. It relates to a holder stage for precisely aligning the position of the glass substrate and the holder when mounted on.

Large-area substrate processing systems used in the manufacture of flat panel displays can be broadly classified into deposition apparatuses and annealing apparatuses.

The deposition apparatus is a device that is responsible for forming a transparent conductive layer, an insulating layer, a metal layer, or a silicon layer, which constitute a core component of a flat panel display, such as low pressure chemical vapor deposition (LPCVD) or plasma enhanced chemical vapor deposition (PECVD). There are physical vapor deposition devices such as chemical vapor deposition devices and sputtering. In addition, the annealing device is a device that is responsible for the subsequent heat treatment step for crystallization, phase change, and the like after the deposition process.

For example, in the case of LCD, a typical deposition apparatus includes a silicon deposition apparatus for depositing amorphous silicon corresponding to an active material of a thin film transistor (TFT) on a glass substrate, and a representative annealing apparatus. Furnace includes a silicon crystallization apparatus for crystallizing amorphous silicon deposited on a glass substrate into polysilicon.

In general, both the deposition process and the annealing process require the substrate to be heat treated to a predetermined temperature. In order to perform such a heat treatment process, a process of loading and unloading the substrate into a chamber in which the substrate can be heated should be performed.

1 is a view showing the configuration of the heat treatment apparatus 100 according to the prior art, which schematically shows the overall configuration of the heat treatment apparatus applied to the actual process.

A cassette 200 having a plurality of glass substrates 10 requiring heat treatment, a holder stage 300 and a cassette 200 mounted with a holder (not shown) for preventing deformation of the glass substrate 10. Glass transfer robot 210 for mounting the glass substrate 10 mounted on the holder mounted on the holder stage 300, the chamber made of quartz material to provide a heat treatment space for the glass substrate 10 ( 500, a holder transfer robot 400 for loading a holder on which the glass substrate 10 is mounted to the boat 510 in the chamber 500 is illustrated.

In the chamber 500, a boat 510 for stacking the glass substrate 10 in multiple layers, and the chamber 500 generates heat to create a heating environment, and the glass is loaded in the boat 510 inside the chamber 500. A heater 520 is applied to the substrate 10.

Here, the inside of the chamber 500 is divided into upper and lower portions, the upper portion is set as a heat treatment space for performing heat treatment by applying heat generated from the heater 520 to the glass substrate 10, and the lower portion is a heat treatment process. It can be set to a cooling space in which the glass substrate 10 is cooled. The boat 510 raises and lowers the heat treatment space and the cooling space by a boat lifting device (not shown), and the heat treatment and cooling of the glass substrate 10 are performed.

At this time, the glass substrate 10 mounted on the holder is loaded on the boat 510 inside the chamber 500 using the holder transfer robot 400, and then a heat treatment process is performed. Loading of the boat 510 while the glass substrate 10 is mounted in the holder is to prevent the glass substrate 10 from being deformed during the heat treatment process. That is, when only the glass substrate 10 is loaded on the boat 510, only the edge of the loaded glass substrate 10 is supported. As such, when the heat treatment process is performed while only the edge of the glass substrate 10 is supported, the middle portion of the glass substrate 10 may be deformed due to the weight of the glass substrate 10. In order to prevent the glass substrate 10 from being deformed, the glass substrate 10 is entirely supported by the holder to prevent deformation of the glass substrate 10 during the heat treatment process.

As described above, when the glass substrate 10 corresponding to the holder and the glass substrate corresponding to the holder are positioned on the holder stage 300 in order to load the glass substrate 10 on the holder, the boat 510 in the chamber 500 in which the heat treatment process is performed is performed. In order to smoothly load the holder and the glass substrate, the glass substrate 10 and the holder must be exactly aligned at a predetermined position. If the holder and the glass substrate 10 are not aligned at a predetermined position, the holder and the glass substrate 10 are loaded from the holder stage 300 to the boat 510 in the chamber. Alternatively, there is a problem that the glass substrate 10 does not smoothly proceed due to a problem in the moving process for performing the process, such as hitting the holder stage 300 or the boat.

Accordingly, the present invention has been made to solve the above problems, in order to perform the heat treatment process by accurately aligning the glass substrate and the holder when mounting the glass substrate in the holder mounted on the holder stage before loading the glass substrate into the chamber An object of the present invention is to provide a holder stage for smoothly moving a glass substrate.

In order to achieve the above object, the holder stage according to the present invention, in order to prevent the glass substrate is deformed during the heat treatment process, the holder is mounted so that the glass substrate is loaded in the chamber seated on the holder and the glass substrate corresponding to each holder A holder stage for aligning, An alignment unit installed to align the holder and the glass substrate corresponding to the holder at the same time; And an alignment rotating unit rotating the alignment unit. Characterized in that it comprises a.

In addition, in order to achieve the above object, the holder stage according to the present invention is a holder stage that is mounted and accommodated in the holder and the glass substrate corresponding to the holder so that the glass substrate can be loaded into the chamber while seated in the holder, An alignment part installed to align the holder and the glass substrate; And an alignment rotating unit for rotating the alignment unit.

According to the present invention configured as described above, when mounting the substrate in the holder loaded on the holder stage, the holder and the substrate are aligned in a predetermined position so as not to interfere with other components when transferring the substrate and the holder for subsequent processing. It is effective to make the progress of the process smoothly by accurately conveying without.

Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

Fig. 2 is a side view showing the structure of one embodiment of a holder stage provided with an alignment device used in the present invention. 3 is a top view which shows the structure of one Example of the holder stage used by this invention.

As shown in the figure, a plurality of base plates 310 are provided in several layers inside the holder stage 300, and the outer circumference of the holder 330 is supported on the upper circumferential side of each base plate 310. The rod 320 is installed to face horizontally.

When the support pin 325 is vertically installed at the end of the rod 320 so that the holder 330 on which the glass substrate 10 is seated is positioned on the rod 320, the support pin 325 is the glass substrate 10. ) So that the holder 330 and the glass substrate 10 are spaced apart from each other.

In general, the material of the holder 330 on which the glass substrate 10 is mounted is made of quartz. However, since quartz has a low thermal conductivity (1.66 W / m.K), the temperature rise or cooling rate of the substrate may be uneven depending on the position of the substrate during the heat treatment of the substrate. In particular, since the cooling rate of the center portion of the substrate is lower than the cooling rate of the periphery of the substrate in the cooling process of the substrate after the heat treatment is completed, the deformation of the center portion of the substrate is inflated. Therefore, if the material of the holder is graphite (thermal conductivity 26 W / mK) having a higher thermal conductivity than quartz, the substrate is deformed due to the difference in cooling rate as described above to achieve uniform cooling of the entire substrate during substrate cooling. It can be suppressed. However, since graphite is low in hardness, it is preferable to manufacture a holder by coating silicon carbide (SiC), which is a high hardness material, on the surface of graphite.

The process of loading the glass substrate 10 into the boat 510 in the chamber 500 will be described in more detail as follows.

The holder 330 on which the glass substrate 10 is mounted has a hole formed at a predetermined position, and a rod 320 installed to support the holder 330 inside the holder stage 300 on which the holder 330 is mounted. ) Is formed with a support pin 325 inserted into the hole formed in the holder 330. Therefore, when the holder 330 on which the glass substrate 10 is mounted is moved into the holder stage 300 and positioned on the rod 320, the support pin 325 formed on the rod 320 is formed in the holder 330. Is inserted into

At this time, since the length of the support pin 325 is formed longer than the thickness of the holder 330, the upper end of the support pin 325 inserted into the holder 330 is in contact with the lower surface of the glass substrate 10 The glass substrate 10 is pushed up and the glass substrate 10 is spaced apart from the holder 330. The spaced space is used to separate the glass substrate 10 from the holder 330 using the glass transfer robot 210.

In addition, at each inner edge of the holder stage 300 on which the holder 330 is mounted, a pair of alignment parts 360 contacting the long sides and short sides of the vertices of the holder 330 with a predetermined pressure are aligned in the rotation axis. It can be seen that it is installed via the (340).

As shown in FIGS. 3 and 4, since the aligning shaft 340 is provided and the aligning portion is installed on each rotating shaft, each aligning portion is a vertex of the holder 330 and the glass substrate 10. The long side and short side of both sides are contacted.

In this case, each alignment portion may be installed at four vertices of the holder 330 and the glass substrate 10, respectively, and may be in contact with the long sides and the short sides of both sides of the four vertices, but the vertices of the holder 330 and the glass substrate 10 may be separated. One of the two diagonal lines to be connected to each other in the diagonal direction, it may be in contact with the long side and short side of both sides of the two vertices located in the diagonal direction.

In this way, when only two alignment portions are provided in the diagonal direction, the overall configuration of the substrate transfer apparatus can be reduced, and the load of the rotary actuator can be reduced during the rotation operation of the alignment rotating shaft. In addition, when the alignment portions are provided only in the diagonal direction, the alignment portions corresponding to the holders installed in the multiple layers are arranged to cross each other for each layer.

The alignment unit 360 includes a holder alignment unit 360a and a glass alignment unit 360b and aligns the holder 330 and the glass substrate 10 to be positioned at predetermined positions, respectively.

Looking at the configuration of the alignment unit 360 in more detail as follows.

The alignment unit 360 includes a holder alignment unit 360a for aligning the position of the holder 330 and a glass alignment unit 360b for aligning the glass substrate 10 mounted on the holder 330. Prepare the bracket for fixing the alignment part.

First, the first alignment bracket 362 and the second alignment bracket 372 that are bolted to the first alignment bracket 362 are prepared. Here, the first alignment bracket 362 is used for fixing the holder alignment unit 360a, and the second alignment bracket 372 is used for fixing the glass alignment unit 360b.

As shown in FIGS. 5A and 5B, one end of the first alignment bracket 362 is bent in a 'b' shape and joined to one side of the alignment rotation shaft 340, and the first alignment bracket 362 is The bent portion of the bolt hole is formed so that the first alignment bracket 362 can be easily fixed to the alignment axis of rotation (340).

On one side of the other end of the first alignment bracket 362, the fixing piece 364 in the form of a plate is formed in the upper and lower portions in parallel. Between the fixing pieces 364, the holder alignment cap 366 is formed to have a trapezoidal cross-sectional structure of which the length of the upper portion is longer than the length of the lower portion and the side is inclined by the rotating shaft. The snap ring 368a, the bearing 368b, and the cola 368c may be installed at the upper and lower ends of the rotating shaft installed in the holder alignment cap 366 so that the holder alignment cap 366 may be easily fixed and rotated. have.

Of the fixing pieces 364 formed on the first alignment bracket 362, one end of the second alignment bracket 372 in the form of a flat plate is fixed to the fixing piece 364 formed on the upper side by a bolt. In order to prevent the bolted second alignment bracket 372 from being moved by external force, both sides may be in close contact with the second alignment bracket 372 after the second alignment bracket 372 is positioned. Fixing grooves can be formed.

In addition, the other end of the second alignment bracket 372 is formed so as to have a trapezoidal cross-sectional structure of the upper length is longer than the lower length of the second alignment bracket 372 is provided with a glass alignment cap 374 is formed by the inclined side of the rotating shaft. The bearing 376a, the snap ring 376b, and the cola 376c may be installed on the rotation shaft to easily rotate the glass alignment cap 374. At this time, the upper end of the rotating shaft connected to the glass alignment cap 374 is preferably embedded in the glass alignment cap 374 so as not to be hit by an external object during the operation.

When the first alignment bracket 362 and the second alignment bracket 372 are installed, it may be advantageous to change the length of the bracket according to the installation position of the bracket. That is, when the glass substrate 10 or the holder 330 is loaded from the outside of the holder stage 300 to the inside or unloaded from the inside to the outside, the glass substrate 10 or the holder 330 to avoid the movement path Since the alignment axis of rotation 340 is installed, the distance between the long side and the short side of the alignment unit 360 and the glass substrate 10 or the holder 330 installed by placing the alignment axis of rotation 340 may be different. Therefore, in order for the alignment unit 360 to smoothly contact the long and short sides of the glass substrate 10 and the holder 330, the lengths of the first and second alignment brackets may be different.

6A and 6B show the configuration of another embodiment of the holder alignment portion 360a 'and the glass alignment portion 360b'. As shown in the figure, the first alignment bracket 362 'and the second alignment bracket 372' used in the holder alignment portion 360a 'and the glass alignment portion 360b' according to another embodiment. It can be seen that the length is formed short.

As such, the alignment unit 360, which is in contact with each of the long and short sides of the glass substrate 10 and the holder 330, may have a first alignment bracket 362 ′ for smooth contact and convenient movement of the holder and the glass substrate. The length of the second alignment bracket 372 'may be different. As such, the lengths of the first and second alignment brackets are determined by a user's need, and thus, the lengths of the first and second alignment brackets are not limited to those shown in the drawings.

Since the length of the alignment bracket is different from that of the previous embodiment, the detailed description is omitted.

On the other hand, when the glass substrate 10 mounted on the holder 330 is loaded and unloaded on the holder stage 300 provided with the holder alignment unit 360a and the glass alignment unit 360b, the holder 330 is a holder. Even when mounted on the stage 300 or vice versa, it is necessary to prevent the holder alignment unit 360a and the glass alignment unit 360b from interfering with the glass substrate 10 and the holder 330.

Therefore, a rotary actuator 342 operated by a user's operation is installed at the lower end or the upper end of the alignment rotation shaft 340 on which the first alignment bracket 362 is installed. If necessary, the rotary actuator 342 may be operated to rotate or reverse rotate the aligning shaft 340 so that the holder aligning portion 360a and the glass aligning portion when the glass substrate 10 and the holder 330 are loaded and unloaded. 360b) does not interfere with loading.

Referring to the operation of the present invention configured as described above are as follows.

As in the prior art, a plurality of holders 330 are loaded and positioned in the holder stage 300. In this case, the glass substrate 10 loaded on the cassette 200 by using the glass transfer robot 210 is moved and mounted on the holder 330 of the holder stage 300, so the detailed description thereof is omitted. do.

When the glass substrate 10 is loaded, the glass substrate 10 may not be hit by the holder alignment unit 360a and the glass alignment unit 360b to prevent loading of the glass substrate 10. The rotary actuator 342 is operated such that the holder alignment unit 360a and the glass alignment unit 360b on one side do not interfere with the loading of the glass substrate 10.

When the rotary actuator 342 is operated, the alignment axis of rotation 340 is rotated so that the alignment unit 360 does not interfere with the loading of the glass substrate 10. Then, the glass substrate may be formed using the glass transfer robot 210. 10) is mounted on the holder 330. When the loading of the glass substrate 10 into the holder 330 is completed, the rotary actuator 342 is operated in reverse to rotate the alignment rotation shaft 340.

When the alignment rotation shaft 340 is rotated in reverse, the alignment portion 360 including the holder alignment portion 360a and the glass alignment portion 360b installed on the alignment rotation shaft 340 is returned to its original position, and the holder alignment is performed. The holder align cap 366 and the glass align cap 374 of the inlet portion 360a and the glass aligning portion 360b are simultaneously on one side of the glass substrate 10 corresponding to the holder 330 and the holder 330, respectively. Contact and prepare for future work.

However, when the holder 330 is seated at a predetermined position in the holder stage 300, the holder 330 may be seated at a predetermined position, but the holder 330 may be seated in a displaced state at a predetermined position. Also, when the glass substrate 10 is placed on the upper surface of the holder 330, the glass substrate 10 may be mounted in a state where the glass substrate 10 is shifted from a predetermined position on the holder 330. When the glass substrate 10 and the holder 330 are offset from each other at a predetermined position, when the glass substrate 10 and the holder 330 are loaded into the chamber 500 without being aligned, the glass substrate 10 and the holder 330 are appropriately provided in the chamber 500. Since it may not be loaded, it is necessary to accurately align the holder 330 inside the holder stage 300.

In this case, when the glass substrate 10 and the holder 330 are not in a predetermined position, the holder alignment cap 366 and the glass alignment cap 374 are in contact with the glass substrate 10 and the holder 330. Align at the same time.

The alignment operation of the holder 330 and the glass substrate 10 will be described in detail as follows.

When the holder 330 is loaded at a predetermined position of the holder stage 300, the glass substrate 10 is positioned above the holder 330. After the glass substrate 10 is positioned, the rotary actuator 342 operates to freeze. The alignment axis of rotation 340 is rotated so that the portion 360 can be returned to its original position.

At this time, the holder alignment portion 360a and the glass alignment portion 360b are used as corner portions of the holder 330 loaded on the holder stage 300 and the glass substrate 10 seated corresponding to the holder 330. The holder alignment cap 366 and the glass alignment cap 374 are in contact with each other.

That is, one side of the holder alignment cap 366 of the holder alignment unit 360a constituting the alignment unit 360 comes into contact with one side of the holder 330, and the glass alignment included in the glass alignment unit 360b. One side of the cap 374 is in contact with one side of the glass substrate 10.

In this case, when the glass substrate 10 and the holder 330 are in a normal position, the glass substrate 10 and the holder 330 are aligned with the alignment parts 360 provided at corner portions inside the holder stage 300. When the holder aligning cap 366 and the glass aligning cap 374 are in contact with each other at the same contact pressure, the positions of the holder 330 and the glass substrate 10 are not changed.

However, if the glass substrate 10 and the holder 330 are out of the normal position, each of the alignment units 360 provided at the corner portions inside the holder stage 300 may be attached to the glass substrate 10 and the holder 330. Contact with different contact pressures.

As described above, when the holder 330 and the glass substrate 10 are displaced at a predetermined position, the holder alignment cap 366 and the glass alignment cap 374 are in contact with each other and the contact pressure is smaller from the larger contact pressure. The 330 and the glass substrate 10 are pushed out, so that the holder 330 and the glass substrate 10 are aligned at the same time while moving to a position where the contact pressures of all the contact portions become uniform, that is, the original predetermined positions. .

In addition, although the glass substrate 10 and the holder 330 may each be out of the normal position, only one of the glass substrate 10 or the holder 330 may be out of the normal position. Even when only one of the holder 330 and the glass substrate 10 is displaced at a predetermined position, the holder alignment cap 366 and the glass alignment cap 374 are provided on one side of the holder 330 and the glass substrate 10. Alignment is made by pushing the holder 330 or the glass substrate 10 toward the smaller contact pressure while the contact pressure is larger while touching each other. Since the glass substrate 10 is spaced apart from the holder 330 by a support pin, the glass substrate 10 may be easily aligned.

Meanwhile, after alignment of the holder 330 and the glass substrate 10 is completed, the holder alignment cap 366 and the glass are loaded when the holder 330 is loaded into the boat 510 of the chamber 500 using the holder transfer robot 400. If the side of the alignment cap 374 is formed vertically, the holder 330 and the glass substrate 10 are lifted, and the outer circumference of the holder 330 and the glass substrate 10 is the holder alignment cap 366 and the glass. Each of the alignment caps 374 may be in contact with each other, thereby causing scratches.

In order to prevent such scratching, the holder alignment cap 366 and the glass alignment cap 374 contacting the holder 330 and the glass substrate 10 have a trapezoidal cross section having a lower length than the upper length. If formed as a side is formed to be inclined. Therefore, when the holder 330 and the glass substrate 10 are lifted up when the holder 330 and the glass substrate 10 are lifted up, the outer circumference of the holder 330 and the glass substrate 10 is a holder alignment cap ( 366 and the glass alignment cap 374 to prevent scratching. In order to simplify the overall configuration, an alignment portion consisting of only a holder alignment portion or a glass alignment portion may be installed.

7 is a plan view showing the configuration of another embodiment of a holder stage used in the present invention.

As shown, the alignment portion includes a holder alignment portion 380 and a glass alignment portion 390, respectively. At this time, the holder aligning portion 380 is provided to face two places in the diagonal direction of the holder 330, the glass aligning portion 390 is provided to face two places in the diagonal direction of the glass substrate 10, the holder The aligning unit 380 and the glass aligning unit 390 are installed at vertices adjacent to each other so as to avoid interference with each other.

As shown in the drawing, when the glass aligning part and the holder aligning part are installed only in two places in the diagonal direction of the glass substrate and the holder, alignment of the glass substrate and the holder is possible, thereby reducing the overall configuration of the substrate transfer device and aligning the axis of rotation. It is possible to reduce the load of the rotary actuator during the rotation operation of.

Since the glass substrate is loaded on the boat using the holder stage configured as described above, the detailed description is omitted.

After the glass substrate 10 is loaded, the alignment unit is used to align the holder 330 on which the glass substrate 10 is mounted at a predetermined position.

8A is a perspective view illustrating a state in which an alignment unit is installed in a holder stage according to another exemplary embodiment of the present disclosure. 8B is a detailed view of portion A of FIG. 8A, and FIG. 8C is a detailed view of portion B of FIG. 8A.

Here, the same reference numerals are used for the same configuration as the previous embodiment.

The alignment portion includes a holder alignment portion 380 for aligning the positions of the holder 330 and a glass alignment portion 390 for aligning the glass substrate 10, and each of the holder alignment portion 380 and the glass alignment portion ( 8B and 8C may be installed at different heights on the alignment axis of rotation 340, respectively. That is, it can be seen that the holder aligning portion 380 is installed below the middle portion of the alignment axis of rotation, and the glass aligning portion 390 is installed above the middle portion of the alignment axis of rotation.

On the other hand, if the alignment portion is installed at one edge of the glass substrate 10 and the holder 330 as shown in the above figure, holder alignment in the same way to the alignment axis of rotation of the glass substrate 10 and the holder 330 in the diagonal direction. The phosphor 380 and the glass aligning portion 390 are installed.

On the contrary, the glass aligning part is provided below the middle part of the alignment rotating shaft, and the holder aligning part is provided in the neighboring edge more than the middle part of the alignment rotating shaft.

According to the drawings, the holder aligning portion and the glass aligning portion are installed by varying the height on the aligning rotary shaft installed at one corner, but the holder aligning portion and the glass aligning portion are respectively installed over the entire aligning axis and arranged diagonally. You may.

Looking at the configuration of the alignment unit according to the embodiment in more detail as follows.

9A and 9B show a configuration of an alignment unit capable of holder alignment according to the present embodiment.

One end of the first alignment bracket 381 is bent in a 'b' shape to be bonded to one side of the alignment rotation shaft 340, and a bolt hole is formed at a bent portion of the first alignment bracket 381 so as to form a first alignment. The in bracket 381 may be easily fixed to the alignment shaft 340.

On one side of the first alignment bracket 381, the fixing piece 384 in the form of a plate is formed parallel to the upper and lower portions. Between the fixing pieces 384, a holder alignment cap 388 is formed to have a trapezoidal cross-sectional structure whose upper length is longer than the lower length, and the side is inclined by a rotating shaft. The snap ring 386a, the bearing 386b and the cola 386c may be installed at the upper and lower ends of the rotating shaft installed in the holder alignment cap 388 so that the holder alignment cap 388 may be easily fixed and rotated. have.

In contrast, an embodiment of an alignment portion consisting of only the glass alignment portion 390 is shown in FIGS. 10A and 10B.

Prepare the bracket for fixing the alignment portion configured as shown.

Of the fixing pieces 384 formed on the first alignment bracket 381 in order to install the glass alignment unit 390 on the alignment rotating shaft 340, the fixing pieces 384 formed on the upper portion of the fixing pieces 384 have a flat plate-like second alignment. One end of the bracket 392 is fixed by the bolt. In order to prevent the bolted second alignment bracket 392 from moving by an external force, both sides may be in close contact with the second alignment bracket 392 after the second alignment bracket 392 is positioned. Fixing grooves can be formed.

In addition, the other end of the second alignment bracket 392 is formed to have a trapezoidal cross-sectional structure of the upper length is longer than the length of the lower portion is provided with a glass align cap (398) formed inclined side by a rotating shaft. The bearing 396a, the snap ring 396b, and the cola 396c may be installed on the rotating shaft so that the glass alignment cap 398 may be easily rotated.

Although the length and shape of the alignment bracket in the above embodiment are the same as the alignment bracket shown in the existing embodiment, this is for ease of explanation, and in practice, the brackets installed on the long side and the short side of the glass substrate are used. The shape and length are determined by the needs of the user and are not limited to the shapes shown in the drawings.

In addition, according to the drawings, the second alignment bracket 392 is configured to be installed on the upper portion of the first alignment bracket 381, one end of which is installed on the alignment rotation shaft 340, which is a component with the holder alignment portion. As for publicization, one end of the second alignment bracket 392 may be extended and directly connected to the alignment rotation shaft 340.

The alignment operation of the holder 330 and the glass substrate 10 in the case of using the alignment unit according to the embodiments shown in FIGS. 9A, 9B, 10A, and 10B is performed by the glass substrate 10 and the holder 330. ) Are the same as the align operation described in the previous embodiment except that they are individually aligned, and thus detailed description thereof will be omitted.

Although the present invention has been shown and described with reference to preferred embodiments as described above, it is not limited to the above embodiments and various modifications made by those skilled in the art without departing from the spirit of the present invention. Modifications and variations are possible. Such modifications and variations are intended to fall within the scope of the invention and the appended claims.

1 is a view showing the configuration of a heat treatment apparatus according to the prior art.

Figure 2 is a perspective view showing the configuration of one embodiment of a boat used in the present invention.

3 is a plan view showing a configuration of an embodiment of a holder stage used in the present invention.

Figure 4 is a perspective view showing a state in which the alignment portion is installed on the holder stage used in the present invention.

Figure 5a and Figure 5b is an exploded perspective view and an assembled state diagram showing the configuration of one embodiment of the alignment unit used in the present invention.

6A and 6B are an exploded perspective view and an assembled state diagram showing the configuration of another embodiment of the alignment unit used in the present invention.

The top view which shows the structure of another Example at the holder stage used by this invention.

8A is a perspective view illustrating a state in which an alignment unit is installed in a holder stage according to another exemplary embodiment of the present invention.

FIG. 8B is a detail view of portion A of FIG. 8A; FIG.

FIG. 8C is a detailed view of part B of FIG. 8A;

9A and 9B are an exploded perspective view and an assembled state diagram showing the configuration of an embodiment of an alignment portion composed of a holder alignment portion used in the present invention.

10A and 10B are an exploded perspective view and an assembled state diagram showing the configuration of an embodiment of an aligning portion composed of a glass aligning portion used in the present invention.

10: glass substrate

100: heat treatment apparatus

200: cassette

300: holder stage

310: base plate

320: load

325: support pin

330: holder

340: alignment axis of rotation

342: rotary actuator

360: alignment part

360a, 380: holder alignment portion

360b, 390: glass alignment unit

362, 381: 1st alignment bracket

366, 388: Holder alignment cap

374, 398: glass align cap

372, 392: second alignment bracket

500: chamber

510: boat

520: heater

Claims

A holder stage in which a holder and a glass substrate corresponding to the holder are mounted and accommodated so that the glass substrate can be loaded into a chamber while being mounted on the holder.

An alignment part installed to align the holder and the glass substrate at the same time; And

Alignment rotating unit for rotating the alignment unit

Including

The alignment rotating unit includes an alignment rotating shaft in which the alignment unit is installed; And an align actuator for rotating the align axis of rotation,

The alignment portion holder alignment portion for aligning the holder; And a glass alignment portion for aligning the glass substrate corresponding to the holder.

delete

The method of claim 1,

And the alignment portion is provided at four corners of the holder and the glass substrate.

The method of claim 1,

And the aligning portion is disposed to face the holder and two corners of the glass substrate in a diagonal direction.

The method of claim 1,

The holder alignment unit may include a first alignment bracket having one end fixed to the alignment rotation shaft; And a holder alignment cap installed on the first alignment bracket.

The method of claim 6,

The glass alignment unit may include a second alignment bracket fixed to the first alignment bracket of the holder alignment unit; And a glass alignment cap installed on the second alignment bracket.

An alignment part installed to align the holder and the glass substrate; And

Alignment rotating unit for rotating the alignment unit

Including

And the alignment portion is a holder alignment portion for aligning the holder or a glass alignment portion for aligning a glass substrate corresponding to the holder.

delete

The method of claim 8,

The holder aligning portion is provided in the diagonal direction opposite to the two corners of the holder and the glass substrate, the glass aligning portion is installed in the diagonal direction opposite to the remaining two corners of the glass substrate A holder stage characterized by the above.

The method of claim 8,

A second alignment bracket having one end fixed to the alignment axis of rotation; And a glass alignment cap installed on the second alignment bracket.

The method according to claim 1 or 8,

The holder stage, characterized in that made of graphite.

The method of claim 14,

Holder stage, characterized in that the surface of the holder is coated with silicon carbide (SiC).