JP3636235B2 - Board holder - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate holder for holding without damaging the substrate rear surface such as a liquid crystal glass substrate.
[0002]
[Prior art]
Conventionally, as this type of substrate holder, as shown in FIG. 9A, a holder 4 capable of holding a glass substrate 2 used for a large liquid crystal capable of transmitting illumination is known.
In such a holder 4, a transmitted illumination light opening 4 a formed at the center thereof, an adsorption mechanism 6 for adsorbing the glass substrate 2 onto the holder 4, and the glass substrate 2 are pressed in the direction of the abutting pin 8. And a pressing pin 10 that is positioned and held at a predetermined position.
[0003]
For example, as shown in FIG. 9B, a holder 4 configured to support the glass substrate 2 by a support piece 4 b protruding in the direction of the transmitted illumination light opening 4 a is also known.
[0004]
[Problems to be solved by the invention]
However, in the conventional substrate holder, the glass substrate 2 is only held by suction on the holder 4 at the side peripheral edge, so that the glass substrate 2 may be largely bent due to its own weight. In addition, there is a case where vibration is likely to occur in the central portion.
[0005]
Then, if the amount of bending of the glass substrate 2 exceeds the observable adjustment range of an observation optical system composed of, for example, an objective lens, high-precision microscope observation cannot be performed. Bad effects occur. In addition, particularly when performing microscope observation with a high-magnification objective lens having a shallow depth of focus, if the glass substrate 2 vibrates, the microscope observation image may be shaken and the inspection accuracy may be reduced.
[0006]
In order to remove such harmful effects, for example, a configuration in which the entire surface of the glass substrate 2 is supported from the back side by a glass table (not shown) is also conceivable.
However, according to such a configuration, the glass substrate 2 may be contaminated or damaged by foreign matter or dust attached on the surface of the glass table.
[0007]
Therefore, for example, as shown in FIG. 9C, a holder 4 having a support pin 14 for supporting the central portion of the glass substrate 2 in the vicinity of the center of the arm 12 can be considered. By the way, normally, after placing the glass substrate 2 on the holder 4, it is necessary to move it in parallel along the holder 4 for alignment.
[0008]
Therefore, when the support pins 14 as shown in FIG. 9C are present, the back surface of the glass substrate 2 is always in sliding contact with the support pins 14 during the movement of the glass substrate 2, and the back surface of the glass substrate 2 is Problems such as damage may occur. Furthermore, when such a support pin 14 is present, there may be a problem that the transmitted illumination light becomes an obstacle.
[0009]
The present invention has been made to solve such problems, and an object thereof is to provide a compact substrate holder capable of efficiently supporting a substrate at a predetermined position without degrading inspection accuracy and without causing damage. There is to do.
[0010]
[Means for Solving the Problems]
In order to solve such an object, the substrate holder of the present invention :
A substrate support member formed with an opening for placing transmitted illuminate the periphery of the transparency, rectangular glass substrate;
An abutting pin and a pressing pin which are provided on the substrate support member so as to surround the opening and position the glass substrate ;
A plurality of arranged so as to traverse the opening, and an elongate support plate supporting pin projecting from supporting the back surface of the glass substrate placed on the substrate support member;
Wherein provided on the substrate support member, the support plate the said support pin is lowered to Rutotomoni the support plate to support the front Symbol glass substrate is brought into contact with the support pins on the rear surface of the glass substrate by increasing the a lifting device is separated from the back surface of the glass substrate you cancel the support to the glass substrate;
With
Before SL lifting device, it supports the glass substrate by the supporting pin is raised the support plate after the glass substrate is positioned on the substrate support member,
It is characterized by that.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a substrate holder according to a first embodiment of the present invention will be described with reference to FIGS.
As shown in FIG. 1, the substrate holder 16 of the present embodiment includes a suction holding mechanism that sucks and holds a substrate, for example, a transparent glass substrate 18 in a predetermined position, and a bending that occurs in the glass substrate 18 without damaging the glass substrate 18. And a support mechanism made of a transparent member capable of supporting a part of the glass substrate 18 so as to eliminate vibrations.
[0012]
The substrate holder 16 has a transmission illumination light opening 16a formed in the center thereof, and the suction holding mechanism is provided so as to surround the transmission illumination light opening 16a.
The suction holding mechanism is provided with a suction mechanism 20 that sucks the glass substrate 18 onto the substrate holder 16 and a pressing pin 24 that presses the glass substrate 18 toward the contact pin 22 to position and hold the glass substrate 18 at a predetermined position. . The operation of the pressing pin 24 is controlled by a cylinder (not shown) built in the substrate holder 16.
[0013]
The support mechanism includes a pair of transparent plates (for example, transparent resin plates) 26 arranged so as to cross the transmitted illumination light opening 16a, and a pair of transparent members protruding on the transparent plates 26, respectively. The support pins 28 and the pair of transparent plates 26 are moved up and down to bring the pair of support pins 28 into contact with the back surface of the glass substrate 18 to support the glass substrate 18 and the pair of support pins 28 to the glass substrate 18. An elevating device that releases the support state with respect to the glass substrate 18 by separating from the back surface is provided.
[0014]
As shown in FIGS. 2 and 3, the lifting device is built in the substrate holder 16, and is disposed so as to be able to contact both ends of the pair of transparent plates 26 so as to move the pair of transparent plates 26 up and down. Elevating pins 30 (see FIG. 3B) and an elevating mechanism for elevating these elevating pins 30 are provided.
[0015]
The elevating mechanism includes a shaft 32 that extends in the substrate holder 16 on both sides of the transmitted illumination light opening 16a and is slidable in the directions of arrows L and R in the drawing by an operation unit (not shown). A taper component 34 is provided which is fixed to the shafts 32 and lifts the lifting pins 30 by sliding the shafts 32. Each shaft 32 is slidably held by a shaft bearing 36 built in the substrate holder 16.
[0016]
The raising / lowering pin 30 is accommodated in the pin receiving component 38 (refer FIG.3 (c)) incorporated in the board | substrate holder 16. FIG. A shaft opening 30a (see FIG. 3B) is formed on both sides of the lower portion of the lift pin 30. On the other hand, a long hole 38a (FIG. 3C) is formed on both sides of the lower portion of the pin receiving component 38. )) Is formed. The elevating pin 30 is opened to the upper portion of the pin receiving component 38 by a support shaft 40 penetrating from the elongated hole 38a of the pin receiving component 38 to the shaft opening 30a of the elevating pin 30 (see FIG. 3 (c)).
[0017]
Further, the pin receiving part 38 has a built-in biasing spring 42, and by this biasing spring 42, the elevating pin 30 is always downward (that is, in a direction not protruding from the round hole 38 b of the pin receiving part 38). It is energized.
[0018]
Further, the support shaft 40 penetrating from the elongated hole 38a of the pin receiving component 38 to the shaft opening 30a of the lifting pin 30 is a retaining ring 44 (FIG. 2) disposed facing the shaft opening 30a of the lifting pin 30. (Refer to (b) and (d)).
[0019]
Further, a bearing 46 is attached to the support shaft 40 at the center (that is, between the shaft openings 30 a of the lifting pins 30), and the bearing 46 is a pair of spacers 48 fixed to the support shaft 40. Thus, the positioning is fixed to the central portion of the support shaft 40.
[0020]
In such a configuration, the bearing 46 is configured to be continuously slidable from the tapered portion 34a to the parallel portion 34b of the tapered component 34 (see FIG. 2), and the shaft 32 is operated by an operation unit (not shown). Is slid in the direction of arrow R in the figure, the bearing 46 receives a pressing force by the tapered portion 34a of the tapered component 34. Subsequently, the support shaft 40 moves along the elongated hole 38a of the pin receiving component 38 by the pressing force applied to the bearing 46 while the bearing 46 slides from the tapered portion 34a to the parallel portion 34b. At this time, the elevating pin 30 supported by the support shaft 40 rises against the urging force of the urging spring 42 and protrudes from the round hole 38 b of the pin receiving component 38. As a result, since the pair of transparent plates 26 are lifted by the lift pins 30, the pair of support pins 28 protruding from the transparent plates 26 are raised. At this time, when the glass substrate 18 is sucked and held on the substrate holder 16, the back surface of the glass substrate 18 is supported by the pair of raised support pins 28, so that the glass substrate 18 is not damaged. It is possible to remove bending and vibration generated in the substrate 18.
[0021]
On the other hand, when the shaft 32 is slid in the direction of the arrow L in the figure by an operation unit (not shown), the pressing force against the bearing 46 is released, and therefore the elevating pin 30 is lowered by the urging force of the urging spring 42. . As a result, the pair of transparent plates 26 are lowered, so that the support state of the pair of support pins 28 on the back surface of the glass substrate 18 is released.
[0022]
Next, the operation of the present embodiment will be described.
First, after a predetermined glass substrate 18 is placed on the suction mechanism 20 of the substrate holder 16, the pressing pin 24 is operated by a cylinder (not shown) to press the glass substrate 18 toward the pressing pin 22. Then, the glass substrate 18 is sandwiched between the pressing pin 24 and the pressing pin 22 and positioned at a predetermined position.
[0023]
Subsequently, the shaft 32 is slid in the direction of arrow R in FIG. 2A by an operation unit (not shown), and the pressing force of the taper part 34 is applied to the bearing 46. Due to the pressing force applied to the bearing 46, the support shaft 40 moves along the long hole 38 a of the pin receiving part 38. At this time, as shown in FIGS. 2C and 2D , the elevating pin 30 supported by the support shaft 40 rises against the urging force of the urging spring 42, and the pin receiving component It protrudes from 38 round holes 38b. As a result, since the pair of transparent plates 26 are lifted by the lift pins 30, the pair of support pins 28 protruding from the transparent plates 26 rise and come into contact with the back surface of the glass substrate 18. At this time, the glass substrate 18 is supported by the support pins 28 so that bending and vibration generated in the glass substrate 18 do not occur.
[0024]
Finally, by operating the suction mechanism 20 to suck the glass substrate 18, the glass substrate 18 is sucked and held at a predetermined position of the substrate holder 16 and a predetermined inspection can be performed.
[0025]
On the other hand, by sliding the shaft 32 in the arrow L direction in FIG. 2 (c) by the operation unit (not shown), the pressing force against the bearing 46 is released, the lift pin 30, FIG. 2 (a) and As shown in (b ) , it is lowered by the urging force of the urging spring 42. As a result, the pair of transparent plates 26 are lowered, so that the support state of the pair of support pins 28 on the back surface of the glass substrate 18 is released.
[0026]
Thereafter, the glass substrate 18 can be detached from the substrate holder 16 by stopping the operation of the suction mechanism 29.
As described above, according to the present embodiment, the glass substrate 18 can be supported only at the time of inspection, so that the problem that the back surface of the glass substrate 18 is damaged at the time of alignment performed before the inspection is solved. be able to. Furthermore, since the support pin 28 applied to this Embodiment is comprised from the transparent member, it does not become an obstacle of transmitted illumination light. As a result, according to the present embodiment, it is possible to provide a compact substrate holder that can efficiently support a substrate at a predetermined position without degrading inspection accuracy and without causing damage.
[0027]
Next, a substrate holder according to a second embodiment of the present invention will be described with reference to FIGS. In the description of the present embodiment, the same reference numerals are given to the same components as those in the first embodiment, and the description thereof is omitted.
[0028]
As shown in FIG. 4, the substrate holder 16 of the present embodiment is made of glass held by suction on the substrate holder 16 through the transmitted illumination light opening of the substrate holder 16 (see the portion indicated by reference numeral 16 a in FIG. 1). A transmission illumination device 50 that irradiates the substrate 18 with transmitted illumination light, and a measurement head (not shown) that inspects and measures the glass substrate 18 by detecting transmitted light from the glass substrate 18 irradiated with the transmitted illumination light. Incorporated into a substrate inspection apparatus having a measuring device 52.
[0029]
In this case, in general, the distance between the transmission illumination device 50 and the measurement device 52 is desirably as small as possible in order to maintain a certain optical performance. Therefore, it is necessary to reduce the thickness of the substrate holder 16 disposed between the transmission illumination device 50 and the measurement device 52 as much as possible.
[0030]
The present embodiment is configured for the purpose of satisfying such a demand. As applied to the first embodiment, the support pin (see reference numeral 30 in FIG. 2) is used as a support pin (see FIG. 2). In the configuration in which the glass substrate 18 is supported by raising and lowering (see reference numeral 28 in FIG. 1), the “backlash” generated between the raising and lowering pins and the support pins is removed, thereby avoiding unexpected damage that occurs when the glass substrate 18 is supported. It is comprised so that it can be made to.
[0031]
Specifically, a Scott-Russell parallel motion mechanism as shown in FIGS. 5 and 6 is applied to the present embodiment.
FIG. 5 shows a principle diagram of the Scott Russell parallel motion mechanism, and FIG. 6 shows a specific configuration of the Scott Russell parallel motion mechanism.
[0032]
As shown in FIGS. 5 and 6, the first to third connecting portions 54, 56, and 58 are connected and arranged in a straight line by the first connecting member 60, and the first connecting portion 54 is A guide 64 formed in the main body 62 is slid in a fixed direction.
[0033]
The second connecting portion 56 is defined at the midpoint between the first and third connecting portions 54 and 58, and one end of the second connecting member 66 is connected to the second connecting portion 56. Yes. The other end of the second connecting member 66 is connected to a fulcrum 68 provided on the main body 62. The fulcrum portion 68 is defined on the axis 70 (see FIG. 5) of the guide 64. The length of the second connecting member 66 between the fulcrum portion 68 and the second connecting portion 56 is the same as that of the first connecting member 60 between the first connecting portion 54 and the second connecting portion 56. And the length of the first connecting member 60 between the second connecting portion 56 and the third connecting portion 58 are configured.
[0034]
In such a configuration, when the second connecting member 66 is rotated about the fulcrum portion 68 in the direction of the arrow S in the figure, the first connecting portion 54 slides along the guide 64, thereby The 3rd connection part 58 of the connection member 60 moves to the arrow P direction in the figure. In this case, the moving direction P of the third connecting portion 58 coincides with a straight line 72 connecting the third connecting portion 58 and the fulcrum portion 68 and is always orthogonal to the axis 70 of the guide 64.
[0035]
That is, the third connecting portion 58 always performs a linear motion orthogonal to the axis 70.
FIG. 7 shows a state in which the above-described Scott-Russell parallel motion mechanism is incorporated in the substrate holder of the present embodiment. For simplification of explanation, FIG. 7 shows only a pair of transparent plates 26 provided on the substrate holder and a pair of support pins 28 respectively protruding from the transparent plates 26.
[0036]
In the present embodiment, the pair of transparent plates 26 are connected to each other by a pair of connecting plates 74 made of a transparent member, and the third side of the Scott-Russell parallel motion mechanism is provided on each side surface of the transparent plate 26. A connecting hole 76 to which the connecting portion 58 can be connected is formed. FIG. 7 shows only the connection hole 76 formed on one side among the connection holes 76 formed on both side surfaces of the transparent plate 26. Further, the Scott Russell parallel motion mechanism is connected to each of the connection holes 76 formed in the pair of transparent plates 26. In the figure, the Scott Russell parallel motion mechanism is connected to one connection hole 76 selected as an example. Indicates the connected state.
[0037]
In such a state, as in the first embodiment, the pair of transparent plates 26 connected to each other by the connecting plate 74 is operated by Scott by operating the lifting mechanism by an operation unit (not shown). While being guided by the Russell parallel motion mechanism, it rises and descends stably in a vertical direction with respect to the glass substrate 18 without generating “ra”. In this case, since the pair of transparent plates 26 are guided by the Scott-Russell parallel motion mechanism, the accuracy of the lifting mechanism need not be so high.
[0038]
As described above, according to the present embodiment, in addition to the effects of the first embodiment, the “backlash” generated in the lifting pins and the support pins is further removed, thereby preventing the unexpected occurrence that occurs when the glass substrate 18 is supported. Damage can be avoided. As a result, according to the present embodiment, it is possible to provide a compact substrate holder that can efficiently support a substrate at a predetermined position without degrading inspection accuracy and without causing damage.
[0039]
In addition, this invention is not limited to the structure of said each embodiment, A various change is possible in the range which does not add a new matter.
For example, as shown in FIG. 8, an arm 78 is extended from the second connecting member 66 so as to be symmetrical about the fulcrum 68, and this arm 78 is driven by a drive mechanism (not shown) such as a cylinder. , The pair of transparent plates 26 (see FIG. 7) connected to each other by the connecting plate 74 can be stabilized vertically with respect to the glass substrate 18 without generating “ra”. Will rise and fall. According to this modified example, since an elevating mechanism for elevating and lowering the pair of transparent plates 26 connected to each other by the connecting plate 74 is not required, the device configuration can be simplified.
[0040]
In each of the above-described embodiments and modifications, the transparent plate 26 and the support pin 28 have been described as being configured by transparent members. However, even when an opaque member such as a metal is used, transmitted illumination is possible as much as possible. By reducing the projected area with respect to light, a certain degree of transmitted illumination performance can be obtained. It should be noted that the transparent illumination performance can be further improved by using a member having good transmittance for the transparent plate 26 and the support pin 28, specifically, a colorless and transparent resin material.
[0041]
The following technical idea is derived from the above specific configuration.
1. A suction holding mechanism for sucking and holding the substrate at a predetermined position;
A substrate holder, comprising: a support mechanism capable of supporting a part of the substrate so as to remove bending and vibration generated in the substrate without damaging the substrate.
[0042]
2. The support mechanism includes a support pin projecting on a plate, and the plate is moved up and down to bring the support pin into contact with the substrate to support the substrate and to separate the support pin from the substrate. The substrate holder according to 1 above, further comprising an elevating device that releases the supporting state with respect to the substrate.
[0043]
3. 3. The substrate holder according to 1 or 2 above, wherein the support mechanism is made of a light transmissive member.
4). A Scott-Russell parallel motion mechanism is used as a guide or driving means for supporting the substrate by bringing the support pins into contact with the substrate and releasing the support state of the substrate by separating the support pins from the substrate. 4. The substrate holder according to any one of 1 to 3 above, which is used.
[0044]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, the compact board | substrate holder which can support a board | substrate in a predetermined position efficiently can be provided, without reducing a test | inspection precision and damaging.
[Brief description of the drawings]
FIG. 1 is a perspective view schematically showing a configuration of a substrate holder according to a first embodiment of the present invention.
FIGS. 2A and 2B are partial cross-sectional views schematically showing a configuration of a lifting device provided in the substrate holder shown in FIG. 1, and FIGS. 2A and 2B show a state in which the lifting pins are lowered. The figure to show, The figure (c), (d) is a figure which shows the state which the raising / lowering pin is raising.
3A is a diagram schematically illustrating a configuration of an elevating device provided on the substrate holder illustrated in FIG. 1, FIG. 3B is a perspective view illustrating a configuration of elevating pins, and FIG. 3C is an elevating device. The perspective view which shows the structure of the pin receiving component in which a pin is accommodated.
FIG. 4 is a view showing a state in which a substrate holder according to a second embodiment of the present invention is incorporated in a substrate inspection apparatus.
5 is a principle diagram of a Scott-Russell parallel motion mechanism applied to the substrate holder of FIG. 4;
6A and 6B are diagrams showing a specific configuration of a Scott-Russell parallel motion mechanism applied to the substrate holder of FIG. 4, wherein FIG. 6A is a plan view thereof, and FIG. 6B is a partial cross-sectional view thereof.
7 is a perspective view showing a state in which a Scott Russell parallel motion mechanism applied to the substrate holder of FIG. 4 is incorporated. FIG.
FIG. 8 is a diagram showing only a main configuration of a substrate holder according to a modification of the present invention.
9A is a perspective view schematically showing the configuration of a conventional substrate holder, FIG. 9B is a plan view schematically showing the configuration of another substrate holder, and FIG. 9C is a plan view of a glass substrate. The figure which shows the structure of the board | substrate holder provided with the support pin for supporting a center part.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 16 ... Substrate holder, 16a ... Opening for transmitted illumination light, 18 ... Glass substrate, 20 ... Adsorption mechanism, 22 ... Pushing pin, 24 ... Pushing pin, 26 ... Transparent plate, 28 ... Support pin

Claims (4)

A substrate support member formed with an opening for placing transmitted illuminate the periphery of the transparency, rectangular glass substrate;
An abutting pin and a pressing pin which are provided on the substrate support member so as to surround the opening and position the glass substrate ;
A plurality of arranged so as to traverse the opening, and an elongate support plate supporting pin projecting from supporting the back surface of the glass substrate placed on the substrate support member;
Wherein provided on the substrate support member, the support plate the said support pin is lowered to Rutotomoni the support plate to support the front Symbol glass substrate is brought into contact with the support pins on the rear surface of the glass substrate by increasing the a lifting device is separated from the back surface of the glass substrate you cancel the support to the glass substrate;
With
Before SL lifting device, it supports the glass substrate by the supporting pin is raised the support plate after the glass substrate is positioned on the substrate support member,
A substrate holder characterized by that. Further comprising a transmission illumination device that irradiates the glass substrate placed on the substrate support member and positioned at the predetermined position with transmission illumination light through the opening of the substrate support member;
The support plate is a transparent plate arranged to cross the opening, and the support pin is a transparent member.
The substrate holder according to claim 1. The lifting device is
Lift pins arranged so as to be able to contact both ends of the support plate so as to raise and lower the support plate on the substrate support member;
A taper component that is arranged on the substrate support member and moves in a direction intersecting with the elevation direction of the elevation pins to raise and lower the elevation pins;
The substrate holder according to claim 1, further comprising: Connecting holes formed on both sides of the support plate;
Coupled to said connecting hole, and parallel motion mechanism for the support plate is raised and lowered perpendicular to the glass base plate,
Further equipped with,
The substrate holder according to claim 1.

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