JP2003282684A - Glass board supporting jig - Google Patents
Glass board supporting jigInfo
- Publication number
- JP2003282684A JP2003282684A JP2002080832A JP2002080832A JP2003282684A JP 2003282684 A JP2003282684 A JP 2003282684A JP 2002080832 A JP2002080832 A JP 2002080832A JP 2002080832 A JP2002080832 A JP 2002080832A JP 2003282684 A JP2003282684 A JP 2003282684A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- holding frame
- suction
- glass board
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液晶ガラス基板等
を検査する際に保持するガラス基板保持具に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate holder for holding a liquid crystal glass substrate or the like when inspecting it.
【０００２】[0002]
【従来の技術】従来技術として、特開２０００−７１４
６号公報等にガラス基板保持具が開示されている。2. Description of the Related Art As a conventional technique, Japanese Patent Laid-Open No. 2000-714
No. 6, for example, discloses a glass substrate holder.
【０００３】図８は、従来例に係るガラス基板保持具の
概念図であり、図９はガラス基板の撓みの概念図、図１
０は吸着部材周辺の構成図である。図８、図９、図１０
において同一な部分には同符合を付してある。このガラ
ス基板保持具は、基板検査装置に配設される。FIG. 8 is a conceptual diagram of a glass substrate holder according to a conventional example, and FIG. 9 is a conceptual diagram of bending of a glass substrate, FIG.
Reference numeral 0 is a configuration diagram around the adsorption member. 8, 9, and 10
The same parts are designated by the same reference numerals. This glass substrate holder is arranged in a substrate inspection device.
【０００４】このガラス基板保持具は、図８に示すよう
に、ガラス基板８の裏面から照明光をあてるためのガラ
ス基板８より小さな矩形の透過照明用開口１ａを有する
保持枠１と、ガラス基板８の位置決めの基準となる複数
の基準ピン２と、ガラス基板８を各基準ピン２に押し付
ける複数の押付ピン３と、位置決めしたガラス基板８を
吸着保持する複数の吸着部材６ａと、透過照明開口１ａ
の下方からガラス基板８を支持する複数の支持ピン４
と、支持ピン４を複数立設し保持枠１の内側に設けられ
た複数の桟５とを有する。This glass substrate holder is, as shown in FIG. 8, a holding frame 1 having a rectangular transmission illumination opening 1a smaller than the glass substrate 8 for illuminating illumination light from the back surface of the glass substrate 8, and the glass substrate. 8, a plurality of reference pins 2 that serve as a reference for positioning, a plurality of pressing pins 3 that press the glass substrate 8 against each reference pin 2, a plurality of suction members 6a that suction-hold the positioned glass substrate 8, and a transillumination opening. 1a
Support pins 4 supporting the glass substrate 8 from below
And a plurality of crosspieces 5 provided inside the holding frame 1 with a plurality of support pins 4 standing upright.
【０００５】基板検査装置では、搬送されてきたガラス
基板８は、保持枠１の上に置かれ、エアシリンダ等のア
クチュエータにより駆動される各押付ピン３により各基
準ピン２に押し付けられて、位置決めが行なわれる。そ
の後、図１０に示すように、保持枠１の各吸着部材６ａ
に接続された真空ポンプ６ｅ等により負圧を供給するこ
とで、ガラス基板８の周縁部が各吸着部材６ａに吸着保
持される。In the substrate inspection apparatus, the conveyed glass substrate 8 is placed on the holding frame 1 and pressed against the reference pins 2 by the pressing pins 3 driven by an actuator such as an air cylinder to position the glass substrate 8. Is performed. Then, as shown in FIG. 10, each suction member 6a of the holding frame 1 is
By supplying a negative pressure by the vacuum pump 6e or the like connected to, the peripheral portion of the glass substrate 8 is suction-held by each suction member 6a.
【０００６】[0006]
【発明が解決しようとする課題】上述した従来例のガラ
ス基板保持具では、ガラス基板８を平面度良く保持する
ために、透過照明用開口１ａの下側からガラス基板８を
支える必要があるため、支持ピン４や桟５を設けてい
る。In the above-mentioned conventional glass substrate holder, it is necessary to support the glass substrate 8 from below the transillumination opening 1a in order to hold the glass substrate 8 with good flatness. The support pins 4 and the crosspieces 5 are provided.
【０００７】しかし、押付ピン３によりガラス基板８を
基準ピン２に押し当てた際に、図９に示すようにわずか
ながら撓みが発生し、ガラス基板８が撓んだ状態で吸着
保持される場合がある。このようにガラス基板８が撓ん
だ状態で吸着保持されると、高倍率の顕微鏡を用いた検
査観察では、ガラス基板８上の観察位置を変えたとき
に、ガラス基板８の表面が合焦位置から外れるため、合
焦操作をし直さなければならないことがある。However, when the glass substrate 8 is pressed against the reference pin 2 by the pressing pin 3, a slight bending occurs as shown in FIG. 9, and the glass substrate 8 is sucked and held in the bent state. There is. When the glass substrate 8 is sucked and held in such a bent state, the surface of the glass substrate 8 is in focus when the observation position on the glass substrate 8 is changed in inspection observation using a high-magnification microscope. Since it is out of position, it may be necessary to perform the focusing operation again.
【０００８】本発明の目的は、押付けピンによるガラス
基板の撓みを抑えてガラス基板を平面度良く保持するガ
ラス基板保持具を提供することにある。An object of the present invention is to provide a glass substrate holder that holds the glass substrate with good flatness by suppressing the bending of the glass substrate by the pressing pin.
【０００９】[0009]
【課題を解決するための手段】上記課題を解決し目的を
達成するために、本発明のガラス基板保持具は以下の如
く構成されている。In order to solve the above problems and achieve the object, the glass substrate holder of the present invention is constructed as follows.
【００１０】（１）本発明のガラス基板保持具は、ガラ
ス基板より若干小さな透過照明用の開口が形成され前記
ガラス基板を保持する保持枠と、前記保持枠の隣接する
２辺に設けられ前記ガラス基板の基準位置を決める基準
位置決め部材と、前記保持枠の開口周縁部に配置され前
記ガラス基板の４辺を吸着保持する吸着部材と、前記ガ
ラス基板を前記位置決め部材に押し当てて位置決めする
押し付け手段と、前記位置決め部材に前記ガラス基板を
押し当てて位置決めした状態で、前記吸着部材により該
ガラス基板を少なくとも前記押し付け手段の押し付け方
向と反対方向に張力を与える力発生機構と、から構成さ
れている。(1) The glass substrate holder of the present invention is provided with a holding frame for holding the glass substrate, which has a slightly smaller opening for transmitting illumination than the glass substrate, and is provided on two adjacent sides of the holding frame. A reference positioning member that determines the reference position of the glass substrate, a suction member that is disposed at the peripheral edge of the opening of the holding frame and that suction-holds the four sides of the glass substrate, and a pressing that presses the glass substrate against the positioning member to position it. And a force generating mechanism that applies tension to the glass substrate at least in the direction opposite to the pressing direction of the pressing unit by the suction member in a state where the glass substrate is pressed against the positioning member and positioned. There is.
【００１１】（２）本発明のガラス基板保持具は、上記
（１）に記載の保持具であり、かつ前記押し付け手段
は、前記基準位置決め部材が配置された側の前記吸着部
材を前記基準位置決め部材側に押し付け力を与える前記
力発生機構を兼用する。(2) The glass substrate holder according to the present invention is the holder described in (1) above, and the pressing means positions the suction member on the side on which the reference positioning member is disposed as the reference positioning. It also serves as the force generating mechanism that applies a pressing force to the member side.
【００１２】（３）本発明のガラス基板保持具は、上記
（１）に記載の保持具であり、かつ前記力発生機構は、
前記保持枠の開口４辺に沿って配置された前記吸着部材
を弾性変位させ前記ガラス基板をそれぞれ対向する外側
に張力を与え、前記ガラス基板の撓みを抑制する。(3) The glass substrate holder of the present invention is the holder described in (1) above, and the force generating mechanism is
The suction members arranged along the four sides of the opening of the holding frame are elastically displaced to apply tension to the opposing outer sides of the glass substrates, thereby suppressing the bending of the glass substrates.
【００１３】（４）本発明のガラス基板保持具は、上記
（１）に記載の保持具であり、かつ前記力発生機構は、
前記保持枠の角部に配置された前記吸着部材を弾性変位
させ前記ガラス基板を対角線方向に張力を与え、前記ガ
ラス基板の撓みを抑制する。(4) The glass substrate holder of the present invention is the holder described in (1) above, and the force generating mechanism is
The suction member arranged at a corner of the holding frame is elastically displaced to apply tension to the glass substrate in a diagonal direction, thereby suppressing bending of the glass substrate.
【００１４】（５）本発明のガラス基板保持具は、上記
（１）に記載の保持具であり、かつ前記力発生機構は、
前記保持枠の開口４辺に沿って配置された前記吸着部毎
に２個１組のガイドピンを配置し、これら１組のガイド
ピンと前記各吸着部にワイヤを張り、このワイヤに張力
を与えるテンションレバーを備えている。(5) The glass substrate holder of the present invention is the holder described in (1) above, and the force generating mechanism is
A set of two guide pins is arranged for each of the suction portions arranged along the four sides of the opening of the holding frame, and a wire is attached to the set of guide pins and the suction portions to apply tension to the wires. Equipped with a tension lever.
【００１５】（６）本発明のガラス基板保持具は、上記
（５）に記載の保持具であり、かつ前記テンションレバ
ーは、エアアクチュエータや電動アクチュエータにより
遠隔又は自動制御可能である。(6) The glass substrate holder of the present invention is the holder described in (5) above, and the tension lever can be remotely or automatically controlled by an air actuator or an electric actuator.
【００１６】上記手段を講じた結果、以下のような作用
を奏する。As a result of taking the above-mentioned means, the following effects are achieved.
【００１７】本発明のガラス基板保持具によれば、吸着
部材に吸着されたガラス基板の端部を外側へ引っ張るこ
とで、撓みを抑制した状態でガラス基板を位置決め保持
することができる。According to the glass substrate holder of the present invention, by pulling the end of the glass substrate sucked by the suction member to the outside, the glass substrate can be positioned and held while suppressing the bending.
【００１８】本発明のガラス基板保持具によれば、簡単
で安価な構成により前記ガラス基板に張力を与えること
ができる。According to the glass substrate holder of the present invention, tension can be applied to the glass substrate with a simple and inexpensive structure.
【００１９】本発明のガラス基板保持具によれば、ワイ
ヤの張力を調整することで、前記吸着部材に加わる力を
容易に調整、解除することができる。According to the glass substrate holder of the present invention, the force applied to the suction member can be easily adjusted and released by adjusting the tension of the wire.
【００２０】[0020]
【発明の実施の形態】以下、本発明の実施の形態を図面
を参照して説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.
【００２１】（第１の実施の形態）図１は、本発明の第
１の実施の形態に係るガラス基板保持具の構成を示す斜
視図である。図２は、ガラス基板保持具における二組の
力発生機構による吸着部材の付勢方向を示す図である。
図１、図２において図８と同一な部分には同符号を付し
てある。(First Embodiment) FIG. 1 is a perspective view showing the structure of a glass substrate holder according to a first embodiment of the present invention. FIG. 2 is a diagram showing a biasing direction of the suction member by the two sets of force generating mechanisms in the glass substrate holder.
1 and 2, the same parts as those in FIG. 8 are designated by the same reference numerals.
【００２２】図１に示すガラス基板保持具は、例えば基
板検査装置に配設され、ステージ（図示省略）により水
平方向に移動し、透過照明装置（図示省略）の上方に位
置するように備えられている。The glass substrate holder shown in FIG. 1 is arranged, for example, in a substrate inspection device, is horizontally moved by a stage (not shown), and is provided above the transillumination device (not shown). ing.
【００２３】このガラス基板保持具の保持枠１には、ガ
ラス基板８より小さな矩形状の透過照明用開口１ａが形
成されており、下方の透過照明装置から照射される照明
光によって、検査対象物であるガラス基板８（図１では
不図示）を照明できる。保持枠１には、隣接する二辺に
ガラス基板８の位置決めの基準となる複数の基準ピン２
と、この二辺と対向する二辺にガラス基板８を各基準ピ
ン２に押し付ける複数の押付ピン３と、これら各辺に位
置決めしたガラス基板８の周縁部を吸着保持する複数の
吸着部材６ａ，６ｂと、透過照明開口部１ａの下方から
ガラス基板８を支持する複数の支持ピン４と、支持ピン
４を複数立設し保持枠１の内側に設けられた複数の桟５
とを有する。なお、各吸着部材６ａは基準ピン２が設け
られた保持枠１に対して不動であり、各吸着部材６ｂは
押付ピン３が設けられた保持枠１に対して可動である。
さらに保持枠１内には、各吸着部材６ｂを保持枠１の外
側方向に微動させる力を加える力発生機構７が備えられ
ている。The holding frame 1 of this glass substrate holder is formed with a rectangular transillumination opening 1a smaller than the glass substrate 8, and the object to be inspected is illuminated by the illumination light emitted from the lower transillumination device. The glass substrate 8 (not shown in FIG. 1) can be illuminated. The holding frame 1 has a plurality of reference pins 2 which serve as a reference for positioning the glass substrate 8 on two adjacent sides.
A plurality of pressing pins 3 that press the glass substrate 8 against the reference pins 2 on two sides opposite to the two sides, and a plurality of suction members 6a that suction-hold the peripheral portions of the glass substrate 8 positioned on these sides. 6b, a plurality of support pins 4 that support the glass substrate 8 from below the transillumination opening 1a, and a plurality of bars 5 that are provided inside the holding frame 1 and that are provided upright.
Have and. Each suction member 6a is immovable with respect to the holding frame 1 provided with the reference pin 2, and each suction member 6b is movable with respect to the holding frame 1 provided with the pressing pin 3.
Further, inside the holding frame 1, there is provided a force generating mechanism 7 that applies a force for finely moving each suction member 6 b in the outward direction of the holding frame 1.
【００２４】次に、力発生機構７の構成を説明する。こ
の力発生機構７は、ワイヤ７ａによって各吸着部材６ｂ
に力を加える構成をとっている。力発生機構７は、押付
ピン３が設けられた保持枠１の二辺に沿うよう二組設け
られており、対向する基準ピン２から離間する方向に向
け吸着部材６ｂに力を加える。すなわち、二組の力発生
機構７，７による各吸着部材６ｂの付勢力は、図２中の
矢印に示す方向に作用する。Next, the structure of the force generating mechanism 7 will be described. The force generating mechanism 7 uses the wire 7a to attach the suction members 6b to each other.
It has a structure that applies power to. Two sets of force generating mechanisms 7 are provided along two sides of the holding frame 1 provided with the pressing pins 3, and apply a force to the suction member 6b in a direction away from the facing reference pin 2. That is, the biasing force of each suction member 6b by the two sets of force generating mechanisms 7 and 7 acts in the direction shown by the arrow in FIG.
【００２５】各力発生機構７，７では、保持枠１の角部
付近にワイヤ固定ピン７ｂが設けられ、各吸着部材６ｂ
に対して二本づつワイヤガイドピン７ｃが設けられてい
る。また、保持枠１の他の角部付近にワイヤ張力調整つ
まみ７ｄが設けられている。ワイヤ７ａの一端は、ワイ
ヤ固定ピン７ｂに固定されている。さらにワイヤ７ａ
は、各ガイドピン７ｃと各吸着部材６ｂに掛けられ、各
吸着部材６ｂを保持枠１の外側に引っ張る方向に力が作
用するように配されている。また、ワイヤ７ａの他端
は、ワイヤ張力調整つまみ７ｄの軸７ｄ１に巻き付けら
れている。このワイヤ張力調整つまみ７ｄを回すこと
で、ワイヤ７ａの軸７ｄ１への巻き付き量を変え、ワイ
ヤ７ａの張力を調整できる。In each of the force generating mechanisms 7 and 7, a wire fixing pin 7b is provided near the corner of the holding frame 1 and each suction member 6b.
On the other hand, two wire guide pins 7c are provided. A wire tension adjusting knob 7d is provided near the other corner of the holding frame 1. One end of the wire 7a is fixed to the wire fixing pin 7b. Further wire 7a
Is laid on each guide pin 7c and each suction member 6b, and is arranged so that a force acts in a direction to pull each suction member 6b to the outside of the holding frame 1. The other end of the wire 7a is wound around the shaft 7d1 of the wire tension adjusting knob 7d. By rotating the wire tension adjusting knob 7d, the winding amount of the wire 7a around the shaft 7d1 can be changed to adjust the tension of the wire 7a.
【００２６】また、力発生機構７，７は、ワイヤ７ａに
張力を与えるテンションレバー７ｅを有する。このＬ字
形に形成されたテンションレバー７ｅを右方向に回転操
作することにより、レバー７ｅの曲部がワイヤ７ａに押
し付けられワイヤ７ａに張力を加える状態と、テンショ
ンレバー７ｅを左方向に回動操作することにより前記曲
部がワイヤ７ａから離間しワイヤ７ａに加わる張力を開
放させる状態とに切替えることができる。なお、ガラス
基板８の吸着時には、テンションレバー７ｅを右方向に
回動させることにより、ワイヤ７ａに張力をかけた状態
で固定される。また、ガラス基板８の交換時には、テン
ションレバー７ｅを左方向に回動させることによりワイ
ヤ７ａの張力を開放し、各吸着部材６ｂを元の状態に戻
すことができる。Further, the force generating mechanisms 7, 7 have a tension lever 7e for applying a tension to the wire 7a. By rotating the tension lever 7e formed in the L shape to the right, the bent portion of the lever 7e is pressed against the wire 7a to apply tension to the wire 7a, and the tension lever 7e is rotated to the left. By doing so, the bent portion can be separated from the wire 7a and the tension applied to the wire 7a can be released. When the glass substrate 8 is sucked, the tension lever 7e is rotated rightward so that the wire 7a is fixed in a tensioned state. Further, when the glass substrate 8 is replaced, the tension of the wire 7a can be released by rotating the tension lever 7e to the left, and each suction member 6b can be returned to the original state.
【００２７】図３は、吸着部材６ｂ周辺の構成を示す一
部断面図である。図３に示すように、吸着部材６ｂには
吸着部材押圧ばね６ｃがワイヤ７ａに対向する向きに配
されている。吸着部材６ｂは円筒状の部材からなり、そ
の底面は保持枠１に固着されている。吸着部材６ｂの中
心部には、円柱状の通空路６ｂ１が貫通されている。こ
の通空路６ｂ１の径は、吸着部材６ｂの上面部で大きく
なっている。通空路６ｂ１は、吸着部材６ｂの底面部で
配管６ｆに繋がっている。配管６ｆには、電磁弁６ｄを
介してポンプ６ｅが接続されている。FIG. 3 is a partial cross-sectional view showing the structure around the suction member 6b. As shown in FIG. 3, a suction member pressing spring 6c is arranged on the suction member 6b in a direction facing the wire 7a. The suction member 6b is a cylindrical member, and the bottom surface thereof is fixed to the holding frame 1. A cylindrical air passage 6b1 penetrates through the central portion of the suction member 6b. The diameter of the air passage 6b1 is large on the upper surface portion of the suction member 6b. The air passage 6b1 is connected to the pipe 6f at the bottom surface of the suction member 6b. A pump 6e is connected to the pipe 6f via a solenoid valve 6d.
【００２８】テンションレバー７ｅによりワイヤ７ａに
張力が加えられると、吸着部材６ｂは、吸着部材押圧ば
ね６ｃの付勢力に反してガラス基板８を引っ張る方向の
力が与えられ、傾く。テンションレバー７ｅによりワイ
ヤ７ａの張力が開放されると、吸着部材押圧ばね６ｃの
付勢力により吸着部材６ｂは所定の位置に押し戻され
る。When tension is applied to the wire 7a by the tension lever 7e, the attraction member 6b is tilted by the force of pulling the glass substrate 8 against the biasing force of the attraction member pressing spring 6c. When the tension of the wire 7a is released by the tension lever 7e, the suction member 6b is pushed back to a predetermined position by the urging force of the suction member pressing spring 6c.
【００２９】次に、上述した構成をなすガラス基板保持
具の作用を説明する。Next, the operation of the glass substrate holder having the above structure will be described.
【００３０】ガラス基板８の供給前には、各押付ピン３
は、エアシリンダ等の駆動機構（図示省略）により対応
する各基準ピン２から離れる方向に退避して、ガラス基
板８との接触を避けている。このとき、テンションレバ
ー７ｅによりワイヤ７ａの張力は開放されている。Before the glass substrate 8 is supplied, each pressing pin 3
Is retracted in a direction away from each corresponding reference pin 2 by a drive mechanism (not shown) such as an air cylinder to avoid contact with the glass substrate 8. At this time, the tension of the wire 7a is released by the tension lever 7e.
【００３１】ガラス基板８は、搬送ロボットにより、各
吸着部材６ａ，６ｂと各支持ピン４の上に置かれる。次
に各押付ピン３は、対応する各基準ピン２の方向へ駆動
機構により移動し、ガラス基板８の側面を押し、ガラス
基板８を各基準ピン２に押し当てる。これにより、保持
枠１に対するガラス基板８の位置決めが行なわれる。The glass substrate 8 is placed on the suction members 6a and 6b and the support pins 4 by the transfer robot. Next, each pressing pin 3 is moved in the direction of the corresponding reference pin 2 by the drive mechanism to press the side surface of the glass substrate 8 and press the glass substrate 8 against each reference pin 2. As a result, the glass substrate 8 is positioned with respect to the holding frame 1.
【００３２】次に、各ポンプ６ｅから配管６ｆ及び電磁
弁６ｄを介して各吸着部材６ｂに負圧を供給し、ガラス
基板８の端部を各吸着部材６ｂに吸着する。（従来技術
のガラス基板保持具では、ここでガラス基板の保持を完
了する。）この状態では、ガラス基板８は各押付ピン３
による力を受けた状態で吸着されているので、撓みが生
じることがある。Next, a negative pressure is supplied from each pump 6e to each suction member 6b through the pipe 6f and the electromagnetic valve 6d, and the end portion of the glass substrate 8 is suctioned to each suction member 6b. (In the conventional glass substrate holder, the holding of the glass substrate is completed here.) In this state, the glass substrate 8 holds the pressing pins 3
Since it is adsorbed under the condition that the force is applied, the bending may occur.
【００３３】次に、ガラス基板８に撓みが生じている場
合には、操作者がテンションレバー７ｅによりワイヤ７
ａに張力を加えると、ワイヤ７ａが各吸着部材６ｂに力
を与えるため、各吸着部材６ｂがガラス基板８の周縁部
を外側へ引っ張る方向に動き、ガラス基板８の撓みを抑
える。なお、このときガラス基板８の引っ張られる各辺
は、各押付ピン３を若干押し戻すことになる。また、張
力開放レバー７ｅによりワイヤ７ａに張力を加える前
に、各押付ピン３の駆動を開放してもよい。Next, when the glass substrate 8 is bent, the operator operates the tension lever 7e to move the wire 7
When a tension is applied to a, the wire 7a applies a force to each of the suction members 6b, so that each suction member 6b moves in the direction of pulling the peripheral portion of the glass substrate 8 to the outside and suppresses the bending of the glass substrate 8. At this time, the pulled sides of the glass substrate 8 slightly push back the push pins 3. Further, the drive of each pressing pin 3 may be released before the tension is applied to the wire 7a by the tension release lever 7e.
【００３４】以上のように、ワイヤ７ａの張力は、ワイ
ヤ張力調整つまみ７ｄで予め調整しておき、ガラス基板
８の供給後に、テンションレバー７ｅを右方向に回動す
ることによりワイヤ７ａに張力を加え、各吸着部材６ｂ
に力を与えることができる。テンションレバー７ｅは押
付ピン３の駆動と同様にエアアクチュエータや電動アク
チュエータ等を用いて遠隔制御、自動制御で動かすこと
もできる。ワイヤ張力調整つまみ７ｄは、顕微鏡観察時
にガラス基板８が振動したときに微調整することで、振
動系の状態を変え、振動を抑えることにも利用できる。
なお、ワイヤ張力調整つまみ７ｄは手動で操作するが、
モータ等を用いて自動で動かすことも可能である。As described above, the tension of the wire 7a is adjusted in advance by the wire tension adjusting knob 7d, and after the glass substrate 8 is supplied, the tension lever 7e is rotated to the right to apply the tension to the wire 7a. In addition, each suction member 6b
Can be empowered. The tension lever 7e can be moved by remote control or automatic control using an air actuator, an electric actuator, or the like, similarly to the driving of the pressing pin 3. The wire tension adjusting knob 7d can also be used for changing the state of the vibration system and suppressing the vibration by finely adjusting when the glass substrate 8 vibrates during microscopic observation.
Although the wire tension adjusting knob 7d is manually operated,
It is also possible to move automatically by using a motor or the like.
【００３５】図４，図５は、吸着部材６ｂ周辺の構成の
変形例を示す図である。図４、図５において図３と同一
な部分には同符合を付してある。図４に示すように、各
吸着部材６ｂの吸着部材押圧ばね６ｃにネジ部を有する
ばね力調整つまみ７ｆを設けれ、ばね定数を調整するこ
とで、吸着部材６ｂごとの張力を調整することができ
る。また図５に示すように、吸着部材６ｂを弾性部材で
構成し、吸着部材押圧ばね６ｃを省き、吸着部材６ｂが
弾性力により所定の位置に戻るようにすることもでき
る。FIGS. 4 and 5 are views showing modified examples of the structure around the suction member 6b. 4 and 5, the same parts as those in FIG. 3 are designated by the same reference numerals. As shown in FIG. 4, the attraction member pressing spring 6c of each attraction member 6b is provided with a spring force adjusting knob 7f having a screw portion, and the tension of each attraction member 6b can be adjusted by adjusting the spring constant. it can. Further, as shown in FIG. 5, the suction member 6b may be formed of an elastic member, the suction member pressing spring 6c may be omitted, and the suction member 6b may be returned to a predetermined position by an elastic force.
【００３６】本第１の実施の形態によれば、ワイヤを利
用した簡単な構成でガラス基板８の直交する二辺を引っ
張るという手動でも調整可能な機構により、ガラス基板
を撓みなく位置決め保持することができるガラス基板保
持具を実現できる。According to the first embodiment, it is possible to position and hold the glass substrate without bending by a manually adjustable mechanism of pulling two orthogonal sides of the glass substrate 8 with a simple structure using a wire. It is possible to realize a glass substrate holder capable of performing the above.
【００３７】なお、ワイヤによる力発生機構を吸着部材
６ｂごとに設けて、個別に動かすようにしてもよい。ま
た力発生機構としては、上記のワイヤを利用するものに
限らず、空気圧（正圧、負圧）を利用したアクチュエー
タや圧電体のようなアクチュエータも利用可能である。A force generating mechanism using a wire may be provided for each suction member 6b so that they can be moved individually. Further, the force generating mechanism is not limited to the one using the above wire, but an actuator using air pressure (positive pressure, negative pressure) or an actuator such as a piezoelectric body can be used.
【００３８】（第２の実施の形態）上記第１の実施の形
態では、ガラス基板８の２辺を吸着する吸着部材６ｂに
対して力発生機構７が力を加える構成について説明した
が、第２の実施の形態では、ガラス基板８の４辺を吸着
する吸着部材６ａ，６ｂに対して力発生機構により力を
加える。(Second Embodiment) In the first embodiment, the force generating mechanism 7 applies a force to the suction member 6b that sucks the two sides of the glass substrate 8, but the first embodiment has been described. In the second embodiment, force is applied by the force generating mechanism to the suction members 6a and 6b that suction the four sides of the glass substrate 8.
【００３９】図６は、本第２の実施の形態に係るガラス
基板保持具の吸着部材の付勢方向を示す図である。図６
において図１〜図５と同一な部分には同符号を付してあ
る。本第２の実施の形態における第１の実施の形態との
相違点は、ガラス基板８の４辺に対してそれぞれ力発生
機構７が設けられ、ガラス基板８を吸着する全ての吸着
部材６ａ，６ｂに力を加えることにある。FIG. 6 is a diagram showing the urging direction of the suction member of the glass substrate holder according to the second embodiment. Figure 6
In FIG. 5, the same parts as those in FIGS. The difference between the second embodiment and the first embodiment is that all the suction members 6a that attract the glass substrate 8 are provided with force generation mechanisms 7 on the four sides of the glass substrate 8, respectively. It is to apply force to 6b.
【００４０】次に、以上の構成をなすガラス基板保持具
の作用を説明する。Next, the operation of the glass substrate holder having the above structure will be described.
【００４１】ガラス基板８は、搬送ロボットにより、各
吸着部材６ａ，６ｂと各支持ピン４の上に置かれる。次
に、基準ピン２側の各吸着部材６ａによるガラス基板８
の吸着を行ない、二組の力発生機構７，７によりそれぞ
れ各吸着部材６ａに対して基準ピン２の方向（−Ｘ方
向，Ｙ方向）へ力を加え、ガラス基板８の二辺の側部を
各基準ピン２に押し当て、位置決めをおこなう。The glass substrate 8 is placed on the suction members 6a and 6b and the support pins 4 by the transfer robot. Next, the glass substrate 8 by each suction member 6a on the reference pin 2 side
And the force is applied to each of the suction members 6a in the direction of the reference pin 2 (-X direction, Y direction) by the two sets of force generation mechanisms 7 and 7, and the side portions of the glass substrate 8 on the two sides. Is pressed against each reference pin 2 for positioning.
【００４２】次に、各基準ピン２に対向する側の各吸着
部材６ｂに負圧を供給し、ガラス基板８の端部を吸着す
る。そして、各基準ピン２に対向する側の二組の力発生
機構７，７により、それぞれ各吸着部材６ｂに対して押
付ピン３の方向（Ｘ方向，−Ｙ方向）へ力を加え、ガラ
ス基板８の撓みを抑える。このとき、基準ピン２側の力
発生機構７，７の発生力が対向する側の力発生機構７，
７の発生力より大きければ、基準ピン２からガラス基板
８が離れることはない。Next, a negative pressure is supplied to each suction member 6b on the side facing each reference pin 2 to suck the end portion of the glass substrate 8. Then, a force is applied to each of the suction members 6b in the direction of the pressing pin 3 (X direction, -Y direction) by the two sets of force generating mechanisms 7 and 7 on the side facing the reference pins 2 to form a glass substrate. Suppress the bending of 8. At this time, the force generation mechanisms 7, 7 on the reference pin 2 side oppose the force generation mechanisms 7, 7 on the opposite side.
If the generated force is greater than 7, the glass substrate 8 will not separate from the reference pin 2.
【００４３】本第２の実施の形態によれば、基準ピン２
側の各吸着部材６ａによりガラス基板８を基準ピン２に
押し付けた状態で対向する各吸着部材６ｂを反対側に引
くことにより、ガラス基板８を４方向に引っ張り撓みを
抑制することができる。また、吸着部材６ａは、ガラス
基板８を基準ピン２に押し当てることができるので、位
置決めのための押付ピン３を省くことができる。According to the second embodiment, the reference pin 2
By pulling the opposing suction members 6b to the opposite side while the glass substrate 8 is pressed against the reference pin 2 by the suction members 6a on the side, the glass substrate 8 can be pulled in four directions to suppress bending. Further, since the suction member 6a can press the glass substrate 8 against the reference pin 2, the pressing pin 3 for positioning can be omitted.
【００４４】（第３の実施の形態）図７は、本第３の実
施の形態に係るガラス基板保持具の吸着部材の付勢方向
を示す図である。図７において図６と同一な部分には同
符号を付してある。図７に示すように、ガラス基板８の
角部を吸着する各吸着部材６ａ’，６ｂ’に対して個別
に力発生機構７を設け、ガラス基板８の対角線方向へ引
っ張る力を加えるよう構成することで、ガラス基板８の
撓みを精度良く抑制することも可能である。(Third Embodiment) FIG. 7 is a view showing the urging direction of the suction member of the glass substrate holder according to the third embodiment. 7, the same parts as those in FIG. 6 are designated by the same reference numerals. As shown in FIG. 7, a force generating mechanism 7 is individually provided for each of the suction members 6a ′ and 6b ′ that suctions the corners of the glass substrate 8 and is configured to apply a pulling force to the glass substrate 8 in the diagonal direction. Therefore, it is possible to accurately suppress the bending of the glass substrate 8.
【００４５】以上の構成をなすガラス基板保持具の作用
は、第２の実施の形態と同様であるが、各力発生機構７
から力を受ける角部の吸着部材６ａ’，６ｂ’によりガ
ラス基板８を対角線方向に引っ張りガラス基板８の撓み
を取り除いた状態で、角部以外の吸着部材６ａ，６ｂ
（固定）の吸着を行なう。The operation of the glass substrate holder having the above structure is similar to that of the second embodiment, but each force generating mechanism 7 is used.
While the glass substrate 8 is pulled in a diagonal direction by the suction members 6a ′ and 6b ′ at the corners that receive force from the glass substrate 8 to remove the bending of the glass substrate 8, the suction members 6a and 6b other than the corners are pulled.
Adsorb (fixed).
【００４６】本第３の実施の形態によれば、力発生機構
によりガラス基板８の角部を吸着する吸着部材にのみ力
を加えるため、力を加える吸着部材が少なく構成が簡単
になる。According to the third embodiment, the force generating mechanism applies a force only to the adsorbing member that adsorbs the corner portion of the glass substrate 8. Therefore, the adsorbing member to which the force is applied is small and the structure is simplified.
【００４７】なお、本発明は上記各実施の形態のみに限
定されず、要旨を変更しない範囲で適宜変形して実施で
きる。The present invention is not limited to the above-mentioned respective embodiments, and can be carried out by appropriately modifying it within the scope not changing the gist.
【００４８】[0048]
【発明の効果】本発明によれば、押付けピンによるガラ
ス基板の撓みを抑えてガラス基板を平面度良く保持する
ガラス基板保持具を提供できる。According to the present invention, it is possible to provide a glass substrate holder that holds the glass substrate with good flatness by suppressing the bending of the glass substrate due to the pressing pin.
【図１】本発明の第１の実施の形態に係るガラス基板保
持具の構成を示す斜視図。FIG. 1 is a perspective view showing a configuration of a glass substrate holder according to a first embodiment of the present invention.
【図２】本発明の第１の実施の形態に係るガラス基板保
持具における二組の力発生機構による吸着部材の付勢方
向を示す図。FIG. 2 is a diagram showing a biasing direction of a suction member by two sets of force generating mechanisms in the glass substrate holder according to the first embodiment of the present invention.
【図３】本発明の第１の実施の形態に係る吸着部材周辺
の構成を示す一部断面図。FIG. 3 is a partial cross-sectional view showing a configuration around a suction member according to the first embodiment of the present invention.
【図４】本発明の第１の実施の形態に係る吸着部材周辺
の構成の変形例を示す図。FIG. 4 is a diagram showing a modification of the configuration around the suction member according to the first embodiment of the present invention.
【図５】本発明の第１の実施の形態に係る吸着部材周辺
の構成の変形例を示す図。FIG. 5 is a diagram showing a modification of the configuration around the suction member according to the first embodiment of the invention.
【図６】本発明の第２の実施の形態に係るガラス基板保
持具の吸着部材の付勢方向を示す図。FIG. 6 is a view showing a biasing direction of a suction member of a glass substrate holder according to a second embodiment of the present invention.
【図７】本発明の第３の実施の形態に係るガラス基板保
持具の吸着部材の付勢方向を示す図。FIG. 7 is a diagram showing a biasing direction of a suction member of a glass substrate holder according to a third embodiment of the present invention.
【図８】従来例に係るガラス基板保持具の概念図。FIG. 8 is a conceptual diagram of a glass substrate holder according to a conventional example.
【図９】従来例に係るガラス基板の撓みの概念図。FIG. 9 is a conceptual diagram of bending of a glass substrate according to a conventional example.
【図１０】従来例に係る吸着部材周辺の構成図。FIG. 10 is a configuration diagram around a suction member according to a conventional example.
１…保持枠 １ａ…透過照明用開口 ２…基準ピン ３…押付ピン ４…支持ピン ５…桟 ６ａ，６ａ’…吸着部材 ６ｂ，６ｂ’…吸着部材 ６ｂ１…通空路 ６ｃ…吸着部材押圧ばね ６ｄ…電磁弁 ６ｅ…ポンプ ６ｆ…配管 ７…力発生機構 ７ａ…ワイヤ ７ｂ…ワイヤ固定ピン ７ｃ…ワイヤガイドピン ７ｄ…ワイヤ張力調整つまみ ７ｄ１…軸 ７ｅ…テンションレバー ７ｆ…ばね力調整つまみ ８…ガラス基板 1 ... holding frame 1a ... Aperture for transmitted illumination 2 ... Reference pin 3 ... Push pin 4 ... Support pin 5 ... 6a, 6a '... Adsorption member 6b, 6b '... Adsorption member 6b1 ... Airways 6c ... Adsorption member pressing spring 6d ... Solenoid valve 6e ... Pump 6f ... Piping 7 ... Force generation mechanism 7a ... wire 7b ... Wire fixing pin 7c ... Wire guide pin 7d ... Wire tension adjustment knob 7d1 ... Axis 7e ... Tension lever 7f ... Spring force adjustment knob 8 ... Glass substrate
Claims (6)
口が形成され前記ガラス基板を保持する保持枠と、 前記保持枠の隣接する２辺に設けられ前記ガラス基板の
基準位置を決める基準位置決め部材と、 前記保持枠の開口周縁部に配置され前記ガラス基板の４
辺を吸着保持する吸着部材と、 前記ガラス基板を前記位置決め部材に押し当てて位置決
めする押し付け手段と、 前記位置決め部材に前記ガラス基板を押し当てて位置決
めした状態で、前記吸着部材により該ガラス基板を少な
くとも前記押し付け手段の押し付け方向と反対方向に張
力を与える力発生機構と、を具備したことを特徴とする
ガラス基板保持具。1. A holding frame for holding the glass substrate, the holding frame having an opening for transmitted illumination slightly smaller than the glass substrate, and a reference positioning member provided on two adjacent sides of the holding frame for determining a reference position of the glass substrate. And 4 of the glass substrate arranged on the peripheral edge of the opening of the holding frame.
An adsorbing member that adsorbs and holds a side, a pressing unit that presses and positions the glass substrate against the positioning member, and a state in which the glass substrate is pressed against the positioning member to position the glass substrate by the adsorbing member. A glass substrate holder comprising at least a force generating mechanism for applying tension in a direction opposite to the pressing direction of the pressing means.
材が配置された側の前記吸着部材を前記基準位置決め部
材側に押し付け力を与える前記力発生機構を兼用するこ
とを特徴とする請求項１に記載のガラス基板保持具。2. The pressing means also serves as the force generating mechanism for applying a pressing force to the reference positioning member side of the suction member on the side where the reference positioning member is arranged. The glass substrate holder described.
に沿って配置された前記吸着部材を弾性変位させ前記ガ
ラス基板をそれぞれ対向する外側に張力を与え、前記ガ
ラス基板の撓みを抑制することを特徴とする請求項１記
載のガラス基板保持具。3. The force generating mechanism elastically displaces the suction member arranged along the four sides of the opening of the holding frame to apply tension to the opposing outer sides of the glass substrates to bend the glass substrates. It suppresses, The glass substrate holder of Claim 1 characterized by the above-mentioned.
置された前記吸着部材を弾性変位させ前記ガラス基板を
対角線方向に張力を与え、前記ガラス基板の撓みを抑制
することを特徴とする請求項１記載のガラス基板保持
具。4. The force generation mechanism elastically displaces the suction member arranged at a corner portion of the holding frame to apply tension to the glass substrate in a diagonal direction, thereby suppressing the bending of the glass substrate. The glass substrate holder according to claim 1.
に沿って配置された前記吸着部毎に２個１組のガイドピ
ンを配置し、これら１組のガイドピンと前記各吸着部に
ワイヤを張り、このワイヤに張力を与えるテンションレ
バーを備えたことを特徴とする請求項１記載のガラス基
板保持具。5. The force generating mechanism arranges a set of two guide pins for each of the suction portions arranged along the four sides of the opening of the holding frame, and the pair of guide pins and each suction portion are arranged. 2. The glass substrate holder according to claim 1, further comprising a tension lever for tensioning the wire on the wire.
ータや電動アクチュエータにより遠隔又は自動制御可能
なことを特徴とする請求項５記載のガラス基板保持具。6. The glass substrate holder according to claim 5, wherein the tension lever can be remotely or automatically controlled by an air actuator or an electric actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002080832A JP2003282684A (en) | 2002-03-22 | 2002-03-22 | Glass board supporting jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002080832A JP2003282684A (en) | 2002-03-22 | 2002-03-22 | Glass board supporting jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003282684A true JP2003282684A (en) | 2003-10-03 |
Family
ID=29229707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002080832A Withdrawn JP2003282684A (en) | 2002-03-22 | 2002-03-22 | Glass board supporting jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003282684A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100446215C (en) * | 2005-09-05 | 2008-12-24 | 东京毅力科创株式会社 | Substrate positioning device and storing unit |
| JP2012104208A (en) * | 2010-11-12 | 2012-05-31 | Nec Computertechno Ltd | Fixing mechanism of tray |
| KR101244266B1 (en) * | 2004-09-27 | 2013-03-18 | 올림푸스 가부시키가이샤 | Substrate holder for substrate inspecting apparatus, and substrate inspecting apparatus |
| JP2014052315A (en) * | 2012-09-07 | 2014-03-20 | Dainippon Printing Co Ltd | Dimension measuring apparatus for metal thin plate and dimension measuring method for metal thin plate |
| JP2014211415A (en) * | 2013-04-22 | 2014-11-13 | 日本電気硝子株式会社 | Plate glass conveyance apparatus, plate glass conveyance method, and plate glass inspection apparatus |
| CN105300111A (en) * | 2014-07-24 | 2016-02-03 | 中外炉工业株式会社 | Platform unit |
| CN112858326A (en) * | 2019-11-28 | 2021-05-28 | 英泰克普拉斯有限公司 | Flexible display inspection apparatus and flexible display inspection method using the same |
| KR20220021950A (en) * | 2020-08-13 | 2022-02-23 | 주식회사 이엔씨 테크놀로지 | Inspection equipment for inspecting foldable display device and stage apparatus used therein |
| CN115874156A (en) * | 2022-08-04 | 2023-03-31 | 乐金显示光电科技(中国)有限公司 | Glass substrate supporting device |
-
2002
- 2002-03-22 JP JP2002080832A patent/JP2003282684A/en not_active Withdrawn
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101244266B1 (en) * | 2004-09-27 | 2013-03-18 | 올림푸스 가부시키가이샤 | Substrate holder for substrate inspecting apparatus, and substrate inspecting apparatus |
| CN100446215C (en) * | 2005-09-05 | 2008-12-24 | 东京毅力科创株式会社 | Substrate positioning device and storing unit |
| JP2012104208A (en) * | 2010-11-12 | 2012-05-31 | Nec Computertechno Ltd | Fixing mechanism of tray |
| JP2014052315A (en) * | 2012-09-07 | 2014-03-20 | Dainippon Printing Co Ltd | Dimension measuring apparatus for metal thin plate and dimension measuring method for metal thin plate |
| JP2014211415A (en) * | 2013-04-22 | 2014-11-13 | 日本電気硝子株式会社 | Plate glass conveyance apparatus, plate glass conveyance method, and plate glass inspection apparatus |
| CN105300111A (en) * | 2014-07-24 | 2016-02-03 | 中外炉工业株式会社 | Platform unit |
| CN105300111B (en) * | 2014-07-24 | 2018-09-25 | 中外炉工业株式会社 | Platform unit |
| CN112858326A (en) * | 2019-11-28 | 2021-05-28 | 英泰克普拉斯有限公司 | Flexible display inspection apparatus and flexible display inspection method using the same |
| KR20220021950A (en) * | 2020-08-13 | 2022-02-23 | 주식회사 이엔씨 테크놀로지 | Inspection equipment for inspecting foldable display device and stage apparatus used therein |
| KR102396316B1 (en) * | 2020-08-13 | 2022-05-11 | 주식회사 이엔씨 테크놀로지 | Inspection equipment for inspecting foldable display device and stage apparatus used therein |
| CN115874156A (en) * | 2022-08-04 | 2023-03-31 | 乐金显示光电科技(中国)有限公司 | Glass substrate supporting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20050607 |