CN105300111B - Platform unit - Google Patents
Platform unit Download PDFInfo
- Publication number
- CN105300111B CN105300111B CN201510427398.1A CN201510427398A CN105300111B CN 105300111 B CN105300111 B CN 105300111B CN 201510427398 A CN201510427398 A CN 201510427398A CN 105300111 B CN105300111 B CN 105300111B
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- CN
- China
- Prior art keywords
- platform
- locating plate
- block portion
- bearing block
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011521 glass Substances 0.000 claims abstract description 79
- 239000000758 substrate Substances 0.000 claims abstract description 73
- 238000003780 insertion Methods 0.000 claims abstract description 27
- 230000037431 insertion Effects 0.000 claims abstract description 27
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 17
- 230000002093 peripheral effect Effects 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000011435 rock Substances 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 241000644035 Clava Species 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
The present invention provides a kind of platform unit, it is when positioning the glass substrate loaded on platform made of ceramics (including pallet) using metal locating plate, locating plate can suitably be supported, so that the locating plate does not rock on platform or run-off the straight, and can breakage, which does not occur, in it more safely be positioned such that glass substrate.On platform made of ceramics, the hole portion that glass substrate positions is arranged in metal locating plate (5) insertion, locating plate has：Block portion (7) is supported, length direction is along the orientation in hole portion, and its bottom surface (7b) abuts with platform upper surface and is integrally supported on locating plate on platform；It integrally hangs down and is formed from bearing block portion, and be loosely inserted in the portion of hole in pin portion (8)；And it is formed in the insertion section (10) on the inside of bearing block portion, the connecting rod (6) that restricted locating plate rotates on platform around hole portion is set between adjacent a pair of of locating plate.
Description
Technical field
The present invention relates to a kind of platform unit, when using metal locating plate to the glass that is loaded on platform made of ceramics
When glass substrate is positioned, even if can be suitably if the locating plate platform unit is arranged with the relationship to relax relative to platform
The locating plate is supported, so that locating plate not run-off the straight on platform, and more safely glass substrate can be determined
Position.
Background technology
The display panels such as liquid crystal or touch panel become slim year by year, and the glass substrate as its base material is also thinning, to
Intractability when manufacture is set to increase.Due to the precision more demanding when being processed to the glass substrate, in particular for
The higher precision of planarity requirements, so when heating to glass substrate, it is expected that higher being positioned at flatness
It is conveyed in the state of panel-like platform (pallet).
At this point, as platform unit, if platform and positioning pin use the ceramics of excellent heat resistance, cost to increase.Separately
Outside, if it is the metal positioning pin of low cost is chimeric with platform made of ceramics and screwed togather using screw, due to ceramics
It is different from the coefficient of thermal expansion of metal, it is damaged it is therefore possible to make platform made of ceramics occur.Therefore, seek to be heated
The inexpensive platform unit that glass substrate is positioned and kept.
Known patent document 1 discloses platform unit as described below, that is, the platform unit to make simply and at low cost
The structure made can be carried out using the glass substrate that metal positioning pin will heat relative to platform made of ceramics
Positioning.
" platform unit " of patent document 1 has：Platform made of ceramics is placed with the glass to be heated on the platform
Glass substrate；Multiple porosities are arranged in the position positioned to glass substrate on platform, and run through shape along the vertical direction
At；Multiple metal positioning pins, are loosely inserted in above-mentioned porosity；And coupling member, by positioning pin on platform
It is connected to each other, be held in position pin from porosity the projected state outstanding on platform.Specifically, coupling member is with remote
The metal wire rod of the small diameter formation of diameter in the lateral direction penetrating hole than being set to positioning pin, and loosely run through and laterally pass through
In through-hole.
Citation
Patent document 1：No. 5069382 bulletins of Japanese Patent Publication No.
The subject that the invention solves
In the background technology, the company for keeping the positioning pin for being loosely inserted porosity projected state outstanding on platform
Structural member is the wire rod in the lateral direction penetrating hole for loosely running through positioning pin.Platform is caused not in order to avoid the thermal expansion of positioning pin
Good influence, it is critically important that positioning pin, which is loosely inserted porosity and is arranged, but thus positioning pin can be made to be swaggered in porosity
It shakes or vibrates with shaking from side to side.
For shake for preventing positioning pin etc., it is necessary to supporting and fixing is carried out to positioning pin using certain methods, so that
Positioning pin does not move.In the background technology, run through to the line loose for positioning pin to be maintained at projected state on platform
The lateral direction penetrating hole of positioning pin, therefore positioning pin can not be supported securely by the wire rod so that it is not moved.
Therefore, it is shaken due to positioning pin in conveying etc. or collides glass substrate because positioning pin vibrates, so as to
It can make positioning pin run-off the straight on platform.Moreover, being loosely inserted the positioning pin of porosity when loading glass substrate or removing
It goes to hook when glass substrate, accordingly, there exist be difficult to ensure safe positioning function so that this damaged skill does not occur for glass substrate
Art problem.
Invention content
The present invention is completed in view of above-mentioned existing technical problem, it is intended that a kind of platform unit is provided, it should
Platform unit when being positioned to the glass substrate loaded on platform made of ceramics using metal locating plate, even if with
Locating plate is arranged in relationship relative to platform relaxation, the locating plate also can be suitably supported, so that it is not rocked on platform
Or run-off the straight, and more safely glass substrate can be positioned so that breakage does not occur for glass substrate.
Solution
Made of ceramics platform of the platform unit according to the present invention in the glass substrate mounting for be heated
Multiple metal locating plates are equipped with, multiple metal locating plate is inserted in the position row positioned to glass substrate
Row and the multiple hole portions being formed there through along the vertical direction, which is characterized in that the locating plate has：Support block portion, length side
To the orientation along the hole portion, and the suitable position on the length direction of the bearing block portion is formed as and other parts
Compared to the greatest width dimension closest to glass substrate, the bottom surface of the bearing block portion abuts with the platform upper surface and determines this
Bit slice integrally supports on the platform；Pin portion integrally hangs down to be formed from the greatest width dimension position of the bearing block portion, and
And it is loosely inserted in the hole portion；And insertion section, it is formed in the branch along the length direction of the bearing block portion
The inside in supporting block portion is provided with connecting rod between adjacent a pair locating plate, and described insert is inserted at the both ends of the connecting rod
Enter in portion, and limit the locating plate and rotated on the platform around the hole portion, the outer diameter of the connecting rod is formed as inserting than this
The internal diameter for entering portion is small, so that the connecting rod vacates a little gap relative to the insertion section, and will not be led because of thermal expansion
Cause damages each other, the length of the connecting rod is determined based on the size of space in the hole portion, so that the connecting rod
Relative to having ampleness on the inside of the bearing block portion, avoid the connecting rod when being extended because of thermal expansion and the bearing block portion
Inside interferes, also, so that the connecting rod will not be fallen off across when being biased to a side of the bearing block portion
Gap and be inserted into the insertion section.
Platform unit according to the present invention is characterized in that, through-hole is formed in the locating plate, the through-hole from
Run through along the vertical direction in the bearing block portion to the entire scope in the pin portion and is connected to the insertion section.
Platform unit according to the present invention is characterized in that, in the bearing block portion, towards being loaded on the platform
Glass substrate outer peripheral edge portion and be formed with slope.
Invention effect
In platform unit according to the present invention, using metal locating plate to loading on platform made of ceramics
It is fixed that this can be suitably supported when glass substrate is positioned, if even if locating plate is arranged with the relationship to relax relative to platform
Bit slice so that it is not rocked on platform or run-off the straight, and can more safely position glass substrate so that glass
Breakage does not occur for glass substrate.
Description of the drawings
Fig. 1 indicates a preferred embodiment of platform unit according to the present invention, indicates locating plate and company
Knot bar is set to the stereogram of the situation before platform.
Fig. 2 is to the definition graph that locating plate illustrates used by platform unit shown in FIG. 1, and Fig. 2 (a) is to overlook
Figure, Fig. 2 (b) is front view, and Fig. 2 (c) is side view.
Fig. 3 is the side view of connecting rod used by indicating platform unit shown in FIG. 1.
Fig. 4 is platform unit shown in FIG. 1, and is to indicate that locating plate and connecting rod, which are set to platform, to be come to glass base
The stereogram for the case where plate is positioned.
Fig. 5 is by the definition graph of the major part amplification explanation of Fig. 4, and Fig. 5 (a) is vertical view, and Fig. 5 (b) is front cross-sectional
Figure.
Fig. 6 shows the variation of locating plate shown in FIG. 1, is the stereogram in the state of being linked by connecting rod.
Drawing reference numeral explanation：
1 platform unit
2 glass substrates
The side of 2a glass substrates
3 platforms (pallet etc.)
4 holes portion
5 locating plates
6 connecting rods
The end of 6a connecting rods
7 bearing block portions
The top surfaces 7a
The bottom surfaces 7b
7c launched portions
The slopes 7d
7e releases tip
The end faces 7f
8 pin portions
8a frustums of a cone portion
9 through-holes
The inner surface of 9a through-holes
10 insertion sections
11 holes
The size of space in the holes P portion
Specific implementation mode
Referring to the drawings, a preferred embodiment of platform unit according to the present invention is described in detail.
Fig. 1 indicates a preferred embodiment of platform unit according to the present invention, indicates locating plate and connecting rod being arranged
The stereogram of situation before platform.Fig. 2 is to locating plate illustrates used by platform unit shown in FIG. 1 explanation
Figure, Fig. 2 (a) is vertical view, and Fig. 2 (b) is front view, and Fig. 2 (c) is side view.Fig. 3 indicates that platform unit shown in FIG. 1 is adopted
The side view of connecting rod.Fig. 4 is platform unit shown in FIG. 1, and be indicate locating plate and connecting rod being set to it is flat
Platform is come stereogram the case where positioning to glass substrate.Fig. 5 is by the definition graph of the major part amplification explanation of Fig. 4, Fig. 5
(a) it is vertical view, Fig. 5 (b) is front section view.
Platform unit 1 involved by present embodiment is to for example for the portable display panel with communication equipment or touch
Panel, thickness be about to be located in when 1mm laminal glass substrates 2 below are heated, by glass substrate 2
It is used on platform 3 and when being conveyed into heating furnace.It also include the pallet etc. of the plate used as described above in platform unit 1.
In the present embodiment, it is illustrated for the platform unit 1 for loading rectangular glass substrate 2.
As shown in Figure 1 and Figure 4, platform unit 1 substantially has：Platform 3 made of ceramics, on the platform 3 made of ceramics
Load the glass substrate 2 to be heated；Multiple hole portions 4；It, which is arranged on the platform 3, determines glass substrate 2
The position of position, and be formed there through along the vertical direction；Multiple metal locating plates 5 are arranged respectively at above-mentioned multiple hole portions 4
In；And metal connecting rod 6, it is arranged on platen 3 and between locating plate 5.
As shown in Figure 1, platform 3 made of ceramics has the area than placed 2 bigger of glass substrate.On platen 3
To the position that glass substrate 2 is positioned, arranged in a manner of surrounding the mounting region R loaded for positioning glass substrate 2
Show eight holes portion 4.The number in hole portion 4 is set as needed.The inner surface in hole portion 4 is formed as barrel surface, the barrel surface
Axis is along upper and lower directions.Have along glass substrate 2 four of eight holes portion 4 while 2a it is each while and configure and be arranged two on each side
Place, so that can at least be positioned to four side 2a.
Fig. 2 shows an examples for the locating plate 5 for constituting platform unit 1.In locating plate 5, block portion 7 and pin portion 8 are supported integrally
It is formed.As shown in Fig. 2 (a), bearing block portion 7 planar profile profile be formed as the central portion on the length direction of left and right it is most wide and with
The spindle shape become narrow gradually towards the both ends width on the length direction of left and right, or is formed with gradient.
As shown in Fig. 2 (b), for supporting the height of block portion 7, is formed as identical height on the length direction of left and right, pushes up
Face 7a and bottom surface 7b are formed as flat surface.As shown in Fig. 2 (a) and (c), the top surface 7a of block portion 7 is supported along the left and right of bearing block portion 7
Length direction is shaped generally as fixed width and rectangle in the entire scope between its both ends.Support the bottom surface of block portion 7
7b is formed as above-mentioned spindle shape etc..
For two sides in the width direction of the positive and negative of bearing block portion 7, lower section side surface part is formed as respectively
Top side surface part is formed as slope 7d by launched portion 7c.Specifically, in the width direction of bearing block portion 7, the one of positive and negative
Launched portion 7c is respectively formed as to lower section side surface part, launched portion 7c is generally vertically erected since the bottom surface 7b of spindle shape
And formed, and gradually released outward towards central portion from the both ends on the left and right length direction of bearing block portion 7.Launched portion
The position that the release of 7c is most becomes release tip 7e.Top side surface part is formed as from rectangular top surface 7a towards launched portion 7c
The slope 7d that tilts down of upper end.
The left and right lengthwise dimension of the appearance and size, at least bearing block portion 7 that support block portion 7 is formed as than being formed in platform
The internal diameter in 3 hole portion 4 is big.Support width direction full-size (width dimensions for releasing the tip positions 7e) and the insertion of block portion 7
The outer diameter in the pin portion 8 in hole portion 4 is identical.That is, pin portion 8 and release tip 7e it is by no step difference and smoothly continuous in a manner of
It is formed.Moreover, the upper table plane-plane contact of the bottom surface 7b and platform 3 of bearing block portion 7 than pin portion 8 in the outer part.Support a left side for block portion 7
The end face 7f at the both ends on right length direction is from bottom surface 7b to generally vertically being formed in the entire scope of top surface 7a.
In the example in the figures, bearing block portion 7 is identical relative to central portion with left-right parts on the length direction of left and right
Mode is formed.However, it is also possible to relative to the central portion including the release tip 7e of greatest width dimension, right side size
Equal different modes shorter than left side size are formed.In addition, bearing block portion 7 is in the width direction, it is also identical with positive and negative
Mode is formed, but can also be formed in such a way that positive and negative is different.If however, as illustrated in the example, in left and right length side
To with formed in an identical manner in positive and negative width direction, then when not limiting the direction used, therefore can improve processing
Convenience.
Pin portion 8 hangs down from the bottom surface 7b of bearing block portion 7 and is formed.The release tip 7e in pin portion 8 and bearing block portion 7
Configure to the position consistency of position, i.e. greatest width dimension.In illustrative example, it is bearing block portion 7 to release the tip positions 7e
Central portion on the length direction of left and right, therefore pin portion 8 is set to the central portion.Pin portion 8 is formed as cylinder, the axis of the cylinder
Along upper and lower directions.
The outer diameter in pin portion 8 is set as (releasing the broad-ruler of the tip positions 7e with the greatest width dimension of bearing block portion 7
It is very little) it is identical, it is not hooked when so that being removed when glass substrate 2 is placed in platform 3 or from platform 3, also, pin portion 8
Outer diameter is formed as smaller than the internal diameter size in the hole portion 4, enables to be inserted into the hole portion 4 formed on platen 3.In order to incite somebody to action
Platform unit 1 involved by present embodiment is for heating, it is contemplated that is formed with the platform made of ceramics 3 in hole portion 4 and inserts
Enter the difference of the coefficient of thermal expansion between the metal pin portion 8 in hole portion 4, and after taking into account and avoiding thermally expanding because of heat treatment
Pin portion 8 causes to damage to platform 3, to determine the internal diameter in hole portion 4.
In locating plate 5, through-hole 9 is vertically square out of bearing block portion 7 top surface 7a to the entire scope of the lower end in pin portion 8
It is formed to running through.It is preferred that through-hole 9 is formed as the crow flies along the vertical direction, but as long as being to be formed through manner, then can not also
It is straight along the vertical direction to be formed.
In addition, in the inside of bearing block portion 7, from the end face 7f of the one end on its left and right length direction, along left and right
Length direction is formed with the insertion section 10 being connected to through-hole 9.In illustrative example, one end of insertion section 10 is to outside bearing block portion 7
Side opens, and the other end is formed by the hole 11 straight in the horizontal direction being connected to through-hole 9.Hole 11 is located at the positive and negative of bearing block portion 7
Center in the width direction of face and formed.In illustrative example, through-hole 9 is formed in the positive and negative width direction of bearing block portion 7
Central portion through-hole 9 can also be then formed from the central portion staggered positions but as long as through-hole 9 is connected to hole 11.
In the present embodiment, the case where showing to form through-hole 9, and as the one end in the hole of insertion section 10 11 and another
Both sides are held to open.Through-hole 9 can not also be formed, in the case where not forming through-hole 9, the one end open of insertion section 10, the other end
Be formed as closed shrinkage pool.However, in the case where forming shrinkage pool, it is possible to be carried out to insertion section 10 in the internal residual of shrinkage pool
Chip after processing or subtle dust, vibration when due to delivery platform unit 1 etc. and chip can be made etc. and be gone to from shrinkage pool
Outside, when the chip is attached on the surface of glass substrate 2, it is possible in the heat treatment of glass substrate 2, later stage process
Harmful effect is caused in processing, it is bad so as to cause product, therefore it is preferably formed as through-hole 9.
As shown in figure 3, connecting rod 6 is formed by straight clava.The outer diameter of connecting rod 6 is formed as the internal diameter than hole 11
It is small, so that the connecting rod 6 vacates a little gap relative to hole 11, and do not damaged each other in thermal expansion.Such as Fig. 4 institutes
Show, along the length direction in the hole 11 of the insertion section 10 of locating plate 5, plug is inserted into locating plate 5 freely by the end 6a of connecting rod 6
Insertion section 10 hole 11.
As shown in figure 5, determining the size of space P (referring to Fig.1 with Fig. 5 (b)) in hole portion 4 as follows：Make 6 phase of connecting rod
For its end 6a through-holes 9 faced inner surface 9a have ampleness so that connecting rod 6 when being extended because of thermal expansion not with
Inner surface 9a is interfered, and so that connecting rod 6 is spaced in connecting rod 6 and be biased between not fallen off when a side of bearing block portion 7
Gap and be inserted into hole 11.In other words, the length of connecting rod 6 is determined based on the size of space P in hole portion 4.Through-hole 9 is not being formed
And in the case that insertion section 10 is shrinkage pool, determine the size of space P in hole portion 4 as follows：Make the end 6a phases of connecting rod 6
There is ampleness for the closed other end, and so that connecting rod 6 is spaced in connecting rod 6 and be biased to not take off when a side of bearing block portion 7
The gap that falls and be inserted into shrinkage pool.
By the way that the both ends 6a of connecting rod 6 to be inserted into adjacent a pair of of locating plate 5, to which as be described hereinafter, pin portion 8 is inserted into hole portion
4 and prevent setting a pair of of locating plate 5 on platen 3 from being rotated on platen 3 around hole portion 4 respectively.
Fig. 4 and Fig. 5 shows the state positioned on platen 3 to glass substrate 2 using locating plate 5 and connecting rod 6.
When loading glass substrate 2 on platform unit 1, eight locating plates 5 and four connecting rods 6 are used.
Before the pin portion 8 of locating plate 5 is inserted into the hole portion 4 of platform 3, connecting rod 6 is inserted into a pair of of locating plate 5 in advance and
Setting.That is, the both ends 6a of connecting rod 6 is inserted into the hole 11 of a pair of of locating plate 5 of adjacent configuration, to be determined by above-mentioned a pair
One group of installation that bit slice 5 and a connecting rod 6 are constituted is on platen 3.
By being linked by connecting rod 6 side by side point-blank, above-mentioned pin portion 8 loosely inserts a pair of of locating plate 5
Enter to be arranged in it is in eight holes portion 4 of the position positioned to rectangular glass substrate 2, towards glass substrate 2 around outer
Each side 2a of peripheral part and in two holes portion 4 of adjoining.Four sides of the mounting region R of glass substrate 2 are by by connecting rod as a result,
The 6 four groups of encirclements constituted with a pair of of locating plate 5.
The length of connecting rod 6 is set as follows：After pin portion 8 is inserted into hole portion 4, even if keeping connecting rod 6 swollen because of heat
It is swollen and extend and vacate the gap with ampleness also relative to each through-hole 9 of a pair of of locating plate 5, and make connecting rod 6 in its deviation
It is not fallen off in the case of the side for supporting block portion 7 yet.In the state of being linked using connecting rod 6, to hole portion 4 inserted with pin portion 8
Each locating plate 5 bearing block portion 7 left and right length direction along hole portion 4 orientation.In addition, the left and right of bearing block portion 7
Central portion on length direction and its neighbouring position for being located nearest to glass substrate 2, specifically release tip 7e and are located at
Closest to the position of glass substrate 2.
By the way that pin portion 8 to be inserted into hole portion 4, the planar bottom surface 7b of spindle shape of bearing block portion 7 etc. is made to be contacted with face
Mode and abutted with 3 upper surface of platform, to be supported on locating plate 5 is whole on platform 3, thus can limit bearing block portion 7,
And the shake etc. of locating plate 5.It is inserted into the two of connecting rod 6 simultaneously as being supported in a pair of of locating plate 5 on platform 3
6a is held, therefore a pair of of locating plate 5 can be limited and rotated on platen 3 around hole portion 4.
Therefore, the position of locating plate 5 is fixed to, and it is more than glass to prevent the both ends on the left and right length direction of locating plate 5
The case where mounting region R etc. of glass substrate 2 changes the direction of locating plate 5 on platen 3, and make locating plate 5 not with mounting area
Domain R is interfered.The tip 7e and slope 7d that releases of locating plate 5 is located at the position towards mounting region R as a result,.
From move in glass substrate 2 above platform 3 and the glass substrate 2 is placed in mounting region R in.At this point, even if glass
Glass substrate 2 is staggered a little position, and each side 2a of the outer peripheral edge portion of glass substrate 2 is also guided using the slope 7d of each locating plate 5,
So that glass substrate 2 is imported suitably and swimmingly mounting region R without damaging, and by using release tip 7e
Accurately glass substrate 2 is positioned, glass substrate 2 is set to mounting region R.
Involved platform unit 1 according to the present embodiment, using metal locating plate 5 to platform 3 made of ceramics
When the glass substrate 2 of upper mounting is positioned, the locating plate 5 including the pin portion 8 including being relaxed being inserted into hole portion 4 has branch
Supporting block portion 7, the length direction of the bearing block portion 7 along hole portion 4 orientation, and with being abutted with 3 upper surface of platform
Bottom surface 7b and locating plate 5 is supported on platform 3, therefore, it is possible to contact and will determine with the face of bottom surface 7b by 3 upper surface of platform
Bit slice 5 is set on platform 3, even if can if locating plate 5 is set to platform 3 with the relationship of pin portion 8 and the relaxation in hole portion 4
It is enough suitably to support locating plate 5, so that it does not shake on platen 3 or run-off the straight, and glass substrate 2 can be determined
Position, so as not to because in conveying vibration or mounting, remove when occur to hook due to it is damaged.
Be formed as since block portion 7 will be supported, the suitable position on length direction has closest compared with other parts
The greatest width dimension position (releasing the tip positions 7e) of glass substrate 2, specifically, bearing block portion 7 is with left and right length direction
On central portion and its nearby formed closest to the shape mode of glass substrate 2, and by pin portion 8 from bearing block portion 7 this most
Big width dimensions position is hung down and is formed, so even the glass substrate 2 loaded in loading region R is made to move, it also being capable of profit
The position of the glass substrate 2 is suitably kept around the outer peripheral edge portion of the glass substrate 2 with pin portion 8 and bearing block portion 7.
It limits setting since the both ends 6a of connecting rod 6 to be inserted into the insertion section 10 of adjacent a pair of of locating plate 5 and exists
Locating plate 5 on platform 3 is rotated around hole portion 4 on platen 3, therefore it is more than mounting region R to be reliably prevented from bearing block portion 7
And make this case Chong Die with about 2 glass substrate of locating plate 5.
About present embodiment and background technology (patent document 1：No. 5069382 bulletins of Japanese Patent Publication No.) comparison, should
Background technology has following structure：Link by using the coupling member loosely in the lateral direction penetrating hole of positioning pin
The positioning pin is held in position pin projected state outstanding on platform, wherein and the positioning pin is inserted into porosity with being relaxed, but
It is that suitably can not support positioning pin so that it does not shake or vibrates, accordingly, it is difficult to safely in the structure of background technology
It is positioned such that breakage does not occur for glass substrate, but in the present embodiment for having above structure, not with background technology
Together, even if locating plate 5 can be reliably supported if pin portion 8 and hole portion 4 are set as loose relationship, in addition it is possible to reliably
The interference for preventing locating plate 5 and the position of glass substrate 2 keeps the glass substrate 2 on platen 3 to significantly improve
The positioning function of position.
Since the planar profile mode for supporting block portion 7 is formed as the widest spindle of central portion on its length direction
Shape, or formed with tapered, therefore even if locating plate 5 is slightly revolved because of connecting rod 6 and the gap in insertion section 10 (hole 11)
Turn, it is more than mounting region R to be also reliably prevented from bearing block portion 7.
Due to constituting insertion section 10 using shrinkage pool or the hole 11 being connected to through-hole 9, and make insertion section 10 not through bearing
The opposite side of block portion 7, therefore can prevent from being inserted into via insertion section 10 and support the connecting rod 6 in block portion 7 from bearing block portion 7
One end on the length direction of left and right is dropped out towards the other end and is fallen off.
Since the outer diameter in pin portion 8 being set as (to release the tip positions 7e with the greatest width dimension for supporting block portion 7
Width dimensions) it is identical, therefore when being reliably prevented from when glass substrate 2 is placed in platform 3 or being removed from platform 3
It hooks.
Due to being formed with through-hole 9 on locating plate 5, the through-hole 9 edge in the entire scope from bearing block portion 7 to pin portion 8
Upper and lower directions runs through and is connected to hole 11, therefore even if dust can be discharged without being trapped in if entering dust in hole 11
It is internal.Due to being configured to locating plate 5 to configure bearing block portion 7 and pin portion 8 up and down, can prevent from mixing above and below in processing
Confuse.
As long as the shape form of locating plate 5 has the function of illustrating in the above embodiment, then shape can be arbitrary
Form.Fig. 6 shows variation for the shape mode of locating plate 5.Illustrate for identical incomplete structure, only for different parts
It illustrates.In locating plate 5 involved by variation, bearing block portion 7 is formed as rectangular shape, and with pair of right and left branch
The mode in supporting block portion 7 is provided integrally at the left and right sides in the pin portion 8 of cylindrical shape and constitutes.In other words, when from rest pad
When portion 7 is observed, identical as the above embodiment, the shape mode of the locating plate 5 is that pin portion 8 integrally hangs down from the bearing block portion 7
Lower and formation mode.In the position higher than bearing block portion 7, configuration is formed in the surface in pin portion 8 and is narrowed upward
Mode frustum of a cone portion 8a.Frustum of a cone portion 8a is smoothly continuous in pin portion 8, plays a role as above-mentioned slope 7d.Pin
The outer diameter in portion 8 be set to than support block portion 7 width direction size it is big, thus pin portion 8 is sent out as above-mentioned launched portion 7c
The effect of waving, and accurately glass substrate 2 can be determined in the same manner as the peripheral surface in pin portion 8 and above-mentioned release tip 7e
Position.
Claims (3)
1. a kind of platform unit is equipped with multiple gold on the platform made of ceramics of the glass substrate mounting for be heated
Belong to the locating plate of system, multiple metal locating plate is inserted in the position arrangement positioned to glass substrate and vertically side
To the multiple hole portions being formed there through,
It is characterized in that,
The locating plate has：
Support block portion, length direction along the hole portion orientation, and it is suitable on the length direction of the bearing block portion
When position is formed as the greatest width dimension compared with other parts closest to glass substrate, the bottom surface of the bearing block portion with it is described
Platform upper surface abuts and integrally supports the locating plate on the platform；
It integrally hangs down to be formed from the greatest width dimension position of the bearing block portion, and is loosely inserted the hole in pin portion
In portion；And
Insertion section is formed in the inside of the bearing block portion along the length direction of the bearing block portion,
It is provided with connecting rod between adjacent a pair locating plate, the both ends of the connecting rod are inserted into the insertion section, and
And limit the locating plate and rotated on the platform around the hole portion,
The outer diameter of the connecting rod is formed as smaller than the internal diameter of the insertion section, so that the connecting rod is vacated relative to the insertion section
A little gap, and will not cause to damage each other because of thermal expansion,
The length of the connecting rod is determined based on the size of space in the hole portion, so that the connecting rod is relative to the branch
There is ampleness on the inside of supporting block portion, avoid the connecting rod dry with generation on the inside of the bearing block portion when being extended because of thermal expansion
It relates to, also, so that the connecting rod is inserted across the gap that will not be fallen off when being biased to a side of the bearing block portion
Enter in the insertion section.
2. platform unit according to claim 1, which is characterized in that
It is formed with through-hole in the locating plate, the through-hole is in the entire scope from the bearing block portion to the pin portion along upper
Lower direction is run through and is connected to the insertion section.
3. platform unit according to claim 1 or 2, which is characterized in that
In the bearing block portion, the outer peripheral edge portion towards the glass substrate loaded on the platform and be formed with slope.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014151250A JP5701436B1 (en) | 2014-07-24 | 2014-07-24 | Surface plate unit |
| JP2014-151250 | 2014-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105300111A CN105300111A (en) | 2016-02-03 |
| CN105300111B true CN105300111B (en) | 2018-09-25 |
Family
ID=52875888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510427398.1A Expired - Fee Related CN105300111B (en) | 2014-07-24 | 2015-07-20 | Platform unit |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5701436B1 (en) |
| CN (1) | CN105300111B (en) |
| TW (1) | TWI648510B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU1135695A (en) * | 1994-01-24 | 1995-08-03 | S. J. Moorman | Glass kiln |
| JP2003282684A (en) * | 2002-03-22 | 2003-10-03 | Olympus Optical Co Ltd | Glass board supporting jig |
| JP2004179513A (en) * | 2002-11-28 | 2004-06-24 | Tokyo Electron Ltd | Substrate holding apparatus and substrate treatment apparatus |
| CN2725934Y (en) * | 2004-07-07 | 2005-09-14 | 和鑫光电股份有限公司 | Glass base plate carrier |
| JP2006066747A (en) * | 2004-08-30 | 2006-03-09 | Hitachi High-Tech Electronics Engineering Co Ltd | Positioning apparatus and method of substrate |
| JP2009210166A (en) * | 2008-03-03 | 2009-09-17 | Panasonic Corp | Baking device of plasma display panel |
| CN201974058U (en) * | 2010-12-22 | 2011-09-14 | 厦门精显赛特勒液晶显示有限公司 | Sintering device for liquid crystal box |
| KR101301326B1 (en) * | 2012-04-26 | 2013-08-29 | 쥬가이로 고교 가부시키가이샤 | Surface plate unit |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01169798U (en) * | 1988-05-19 | 1989-11-30 | ||
| JPH0685739U (en) * | 1993-05-21 | 1994-12-13 | 株式会社ニコン | Positioning device |
| JPH0970953A (en) * | 1995-09-04 | 1997-03-18 | Toshiba Electron Eng Corp | Printer |
| JP3636235B2 (en) * | 1996-01-08 | 2005-04-06 | オリンパス株式会社 | Board holder |
| JP2005174669A (en) * | 2003-12-09 | 2005-06-30 | Pioneer Electronic Corp | Setter glass, positioning pin, and manufacturing method of plasma display panel |
-
2014
- 2014-07-24 JP JP2014151250A patent/JP5701436B1/en active Active
-
2015
- 2015-06-23 TW TW104120136A patent/TWI648510B/en active
- 2015-07-20 CN CN201510427398.1A patent/CN105300111B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU1135695A (en) * | 1994-01-24 | 1995-08-03 | S. J. Moorman | Glass kiln |
| JP2003282684A (en) * | 2002-03-22 | 2003-10-03 | Olympus Optical Co Ltd | Glass board supporting jig |
| JP2004179513A (en) * | 2002-11-28 | 2004-06-24 | Tokyo Electron Ltd | Substrate holding apparatus and substrate treatment apparatus |
| CN2725934Y (en) * | 2004-07-07 | 2005-09-14 | 和鑫光电股份有限公司 | Glass base plate carrier |
| JP2006066747A (en) * | 2004-08-30 | 2006-03-09 | Hitachi High-Tech Electronics Engineering Co Ltd | Positioning apparatus and method of substrate |
| JP2009210166A (en) * | 2008-03-03 | 2009-09-17 | Panasonic Corp | Baking device of plasma display panel |
| CN201974058U (en) * | 2010-12-22 | 2011-09-14 | 厦门精显赛特勒液晶显示有限公司 | Sintering device for liquid crystal box |
| KR101301326B1 (en) * | 2012-04-26 | 2013-08-29 | 쥬가이로 고교 가부시키가이샤 | Surface plate unit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105300111A (en) | 2016-02-03 |
| JP2016023922A (en) | 2016-02-08 |
| TWI648510B (en) | 2019-01-21 |
| TW201608193A (en) | 2016-03-01 |
| JP5701436B1 (en) | 2015-04-15 |
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