TW201608193A - A surface plate unit - Google Patents
A surface plate unit Download PDFInfo
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- TW201608193A TW201608193A TW104120136A TW104120136A TW201608193A TW 201608193 A TW201608193 A TW 201608193A TW 104120136 A TW104120136 A TW 104120136A TW 104120136 A TW104120136 A TW 104120136A TW 201608193 A TW201608193 A TW 201608193A
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Abstract
Description
本發明係關於一種固定盤單元,其可於以金屬製之定位塊對被載置於陶瓷製之固定盤上之玻璃基板定位時,即便相對於固定盤以鬆弛之狀態設置,亦可以在固定盤上不產生傾斜之方式適當地支撐定位塊,且可更安全地對玻璃基板進行定位。 The present invention relates to a fixed disk unit which can be fixed when a glass substrate placed on a ceramic fixed disk is positioned by a metal positioning block even if it is disposed in a relaxed state with respect to the fixed disk. The positioning block is appropriately supported in a manner that does not cause tilting on the disc, and the glass substrate can be positioned more safely.
液晶等之顯示面板或觸控面板係每年逐漸薄型化,作為其之基材之玻璃基板亦隨之變薄,而使得其在製造時之處理變得困難。在對該玻璃基板進行加工時,由於要求高精度,特別是相對於平面度之高精度,會於對玻璃基板進行加熱處理時,希望以將其定位於平面度高之平板狀之固定盤(盤)之狀態進行搬送。 A display panel or a touch panel such as a liquid crystal is gradually thinned each year, and the glass substrate as a base material thereof is also thinned, which makes handling at the time of manufacture difficult. When processing the glass substrate, high precision is required, and in particular, high precision with respect to flatness is desired. When the glass substrate is subjected to heat treatment, it is desirable to position it on a flat plate having a high flatness ( The state of the disk is transferred.
此時,作為固定盤單元,若於固定盤及定位銷使用耐熱性優異之陶瓷則會耗費成本。此外,若將便宜之金屬製的定位銷嵌合於陶瓷製之固定盤並以螺釘螺旋接合,則會因陶瓷與金屬之熱膨脹率不同,而有損壞陶瓷製之固定盤之虞。因此,要求有對進行加熱處理之玻璃基板進行定位並加以保持之便宜的固定盤單元。 At this time, as the fixed disk unit, it is costly to use a ceramic having excellent heat resistance for the fixed disk and the positioning pin. Further, if a cheap metal positioning pin is fitted to a ceramic fixing plate and screw-joined by a screw, the coefficient of thermal expansion of the ceramic and the metal may be different, and the ceramic fixed disk may be damaged. Therefore, there is a need for an inexpensive fixed disk unit for positioning and holding a heat-treated glass substrate.
作為可簡單且廉價地製作之構成,且相對於陶瓷製之固定盤,能以金屬製之定位銷對進行加熱處理之玻璃基板進行定位之固定盤單元,已知有專利文獻1所揭示者。 A fixed disk unit capable of positioning a glass substrate subjected to heat treatment with a metal locating pin is known as a structure which can be produced in a simple and inexpensive manner, and is disclosed in Patent Document 1.
專利文獻1之「固定盤單元」係具備有:陶瓷製之固 定盤,係於其上載置有進行加熱處理之玻璃基板;複數個鬆弛洞,其等在固定盤上排列於對玻璃基板進行定位之位置,而朝上下方向貫通形成;複數個金屬製之定位銷,其被鬆弛地插入於該等鬆弛洞內;及連結構件,其在固定盤上連結定位銷彼此,而保持定位銷自鬆弛洞朝固定盤上之突出狀態。具體而言,連結構件係以較設置於定位銷之橫向的貫通孔之直徑更加充分小之直徑形成的金屬製之線材,且鬆弛地貫通於橫向之貫通孔內。 The "fixed disk unit" of Patent Document 1 is provided with a ceramic solid. The fixing plate is provided with a glass substrate on which heat treatment is applied; a plurality of relaxation holes are arranged on the fixing plate at positions where the glass substrate is positioned, and are formed in a vertical direction; a plurality of metal positions are formed a pin that is loosely inserted into the slack holes; and a coupling member that connects the positioning pins to each other on the fixed disk while maintaining the protruding state of the positioning pin from the slack hole toward the fixed disk. Specifically, the connecting member is made of a metal wire made of a diameter smaller than the diameter of the through hole provided in the lateral direction of the positioning pin, and is loosely inserted into the through hole in the lateral direction.
專利文獻1:日本專利第5069382號公報 Patent Document 1: Japanese Patent No. 50693382
在先前技術中,保持鬆弛地插入於鬆弛洞之定位銷之朝固定盤上的突出狀態之連結構件,係鬆弛地貫通於定位銷之橫向之貫通孔的線材。雖然定位銷以鬆弛地插入於鬆弛洞之方式設置而使其之熱膨脹對固定盤不產生不良影響係屬重要,但因此定位銷會在鬆弛洞內搖搖晃晃地搖動或振動。 In the prior art, the connecting member that is loosely inserted into the protruding pin of the slack hole toward the fixed disk is loosely passed through the wire of the through hole in the lateral direction of the positioning pin. Although it is important that the positioning pin is loosely inserted into the slack hole so that its thermal expansion does not adversely affect the fixed disk, the positioning pin may be shaken or vibrated in the slack hole.
為了防止該搖動等,必須以一些方法支撐固定定位銷,以使定位銷不移動。在先前技術中,由於係將於固定盤上以突出狀態保持定位銷之線材鬆弛地貫通於定位銷之橫向的貫通孔,因此該線材並無法確實地支撐定位銷使其不移動。 In order to prevent the shaking or the like, the fixing positioning pin must be supported in some ways so that the positioning pin does not move. In the prior art, since the wire of the positioning pin is loosely passed through the through hole of the positioning pin in the protruding state on the fixed disk, the wire does not reliably support the positioning pin so as not to move.
因此,在搬送時等,會有由於定位銷搖動,或是因其之振動而導致碰撞於玻璃基板,而在固定盤上於定位銷產生傾斜之 虞。然後,鬆弛地插入於鬆弛洞之定位銷會在載置玻璃基板時或搬離時卡住,因此,有以不損壞玻璃基板之方式而確保安全的定位功能係屬困難之問題。 Therefore, at the time of transportation, etc., the positioning pin may be shaken or may be caused to collide with the glass substrate due to the vibration thereof, and the positioning pin may be inclined on the fixed disk. Hey. Then, the positioning pin that is loosely inserted into the slack hole is caught when the glass substrate is placed or when it is removed. Therefore, it is difficult to secure the positioning function so as not to damage the glass substrate.
本發明係鑑於上述習知之問題而發明者,其目的在於提供一種固定盤單元,其可於以金屬製之定位塊對被載置於陶瓷製之固定盤上之玻璃基板定位時,即便相對於固定盤以鬆弛之狀態設置,亦可以在固定盤上不產生搖晃傾斜之方式適當地支撐定位塊,且可以不損壞玻璃基板之方式,更安全地進行定位。 The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a fixed disk unit which can be positioned with respect to a glass substrate placed on a ceramic fixed disk by a positioning block made of metal, even when The fixed disk is disposed in a relaxed state, and the positioning block can be appropriately supported without causing a tilting inclination on the fixed disk, and the positioning can be performed more safely without damaging the glass substrate.
本發明之固定盤單元係在載置進行加熱處理之玻璃基板之陶瓷製之固定盤上,設置複數個金屬製之定位塊者,該複數個金屬製之定位塊係插入於排列在對玻璃基板進行定位之位置並於上下方向貫通形成之複數個洞部,其特徵在於,上述定位塊係具備:支撐塊體部,其之長度方向係沿著上述洞部之排列方向,且長度方向上之適當處係以相較於其他部分而最接近於玻璃基板之最大寬度尺寸所形成,其底面係抵接於上述固定盤上面,而將該定位塊整體支撐於該固定盤上;銷部,其自該支撐塊體部之最大寬度尺寸位置一體地垂下形成,而鬆弛地插入於上述洞部;及插入部,其係沿著其長度方向而形成在上述支撐塊體部內側;於相鄰接之一對上述定位塊之間係設有連結桿,該連結桿之兩端係插入於該等之插入部,並限制該定位塊在上述固定盤上繞著上述洞部旋轉,該連結桿之外徑係以相對於上述插入部隔出些微間隙之方式,且以在熱膨脹時致相互損傷之程度,形成為較該插入部之內徑更小,上述連結桿之長度係依於熱膨脹而伸展時,使其相對於上述支撐塊體部內側 具有裕度而不干涉,且於朝一方靠置時隔開不脫落之間隙插入於上述插入部之方式,根據上述洞部之間隔尺寸所決定。 The fixed disk unit of the present invention is provided on a ceramic fixed plate on which a heat-treated glass substrate is placed, and a plurality of metal positioning blocks are provided, and the plurality of metal positioning blocks are inserted in the pair of glass substrates. a plurality of holes formed at a position to be positioned and penetrated in the vertical direction, wherein the positioning block includes a support block body portion having a longitudinal direction along an arrangement direction of the hole portions and a length direction Appropriately formed with a maximum width dimension closest to the glass substrate compared to other portions, the bottom surface of which is abutted against the fixed disk, and the positioning block is integrally supported on the fixed disk; the pin portion thereof Formed from the maximum width dimension of the support block body, and inserted loosely in the hole portion; and an insertion portion formed on the inner side of the support block body along the longitudinal direction thereof; One of the pair of positioning blocks is provided with a connecting rod, and the two ends of the connecting rod are inserted into the insertion portion, and the positioning block is restrained on the fixing plate around the hole portion The outer diameter of the connecting rod is formed by a slight gap with respect to the insertion portion, and is formed to be smaller than the inner diameter of the insertion portion to the extent of mutual damage during thermal expansion, and the length of the connecting rod When extending according to thermal expansion, it is made relative to the inner side of the support block body The manner in which the margin is not interfered, and the gap that does not fall off when the one side is placed is inserted into the insertion portion is determined according to the interval size of the hole portion.
其中,在上述定位塊,形成自上述支撐塊體部直至上述銷部在上下方向上貫通、而與上述插入部連通之通孔。 In the positioning block, a through hole that penetrates from the support block body portion until the pin portion penetrates in the vertical direction and communicates with the insertion portion is formed.
其中,於上述支撐塊體部,係面朝載置於上述固定盤上之玻璃基板之外周緣部而形成斜坡。 The support block body portion is formed to have a slope on a peripheral portion of the glass substrate placed on the fixed disk.
本發明之固定盤單元,其可於以金屬製之定位塊對被載置於陶瓷製之固定盤上之玻璃基板定位時,即便相對於固定盤以鬆弛之狀態設置,亦可以在固定盤上不產生搖晃傾斜之方式適當地支撐定位塊,且可以不損壞玻璃基板之方式,更安全地進行定位。 The fixed disk unit of the present invention can be disposed on a fixed plate by positioning a glass substrate placed on a ceramic fixed disk with a positioning block made of metal, even if it is disposed in a relaxed state with respect to the fixed disk. The positioning block is appropriately supported in such a manner that no shaking is generated, and positioning can be performed more safely without damaging the glass substrate.
1‧‧‧固定盤單元 1‧‧‧ Fixed disk unit
2‧‧‧玻璃基板 2‧‧‧ glass substrate
2a‧‧‧玻璃基板之邊 2a‧‧‧side of the glass substrate
3‧‧‧固定盤(盤等) 3‧‧‧ Fixed disk (disk, etc.)
4‧‧‧洞部 4‧‧‧ Cave Department
5‧‧‧定位塊 5‧‧‧ Positioning block
6‧‧‧連結桿 6‧‧‧ Connecting rod
6a‧‧‧連結桿之端部 6a‧‧‧End of the connecting rod
7‧‧‧支撐塊體部 7‧‧‧Support block body
7a‧‧‧頂面 7a‧‧‧ top surface
7b‧‧‧底面 7b‧‧‧ bottom
7c‧‧‧突出部 7c‧‧‧ highlights
7d‧‧‧斜坡 7d‧‧‧ slope
7e‧‧‧突出尖端 7e‧‧ ‧ prominent tip
7f‧‧‧端面 7f‧‧‧ end face
8‧‧‧銷部 8‧‧‧ Department of Sales
8a‧‧‧圓錐台部 8a‧‧‧French table
9‧‧‧通孔 9‧‧‧through hole
9a‧‧‧通孔之內面 9a‧‧‧ Inside the through hole
10‧‧‧插入部 10‧‧‧Insert Department
11‧‧‧孔 11‧‧‧ hole
P‧‧‧洞部之間隔尺寸 P‧‧‧ hole spacing
R‧‧‧載置區域 R‧‧‧Loading area
圖1係顯示本發明之固定盤單元之較佳之一實施形態,為顯示將定位塊及連結桿設置於固定盤前之情形之立體圖。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a preferred embodiment of a fixed disk unit of the present invention, showing a state in which a positioning block and a connecting rod are disposed in front of a fixed disk.
圖2係說明於圖1所示之固定盤單元所採用之定位塊之說明圖,圖2(a)為俯視圖,圖2(b)為前視圖,圖2(c)為側視圖。 Fig. 2 is an explanatory view showing a positioning block used in the fixed disk unit shown in Fig. 1. Fig. 2(a) is a plan view, Fig. 2(b) is a front view, and Fig. 2(c) is a side view.
圖3係顯示於圖1所示之固定盤單元所採用之連結桿之側視圖。 Figure 3 is a side elevational view of the tie rod used in the fixed disk unit shown in Figure 1.
圖4係圖1所示之固定盤單元,且顯示將定位塊及連結桿設置於固定盤,而對玻璃基板進行定位之情形之立體圖。 4 is a perspective view of the fixed disk unit shown in FIG. 1 and showing the positioning of the positioning block and the connecting rod on the fixed disk to position the glass substrate.
圖5係將圖4之主要部分放大而進行說明之說明圖,圖5(a)為俯視圖,圖5(b)為前視剖視圖。 Fig. 5 is an explanatory view showing an enlarged main portion of Fig. 4, Fig. 5(a) is a plan view, and Fig. 5(b) is a front cross-sectional view.
圖6係顯示圖1所示之定位塊之變形例,其為以連結桿連結之 狀態之立體圖。 Figure 6 is a view showing a modification of the positioning block shown in Figure 1, which is connected by a connecting rod. A perspective view of the state.
以下係參照所附圖式而對本發明之固定盤單元之較佳之一實施形態進行詳細說明。圖1係顯示本發明之固定盤單元之較佳之一實施形態,為顯示將定位塊及連結桿設置於固定盤前之情形之立體圖。圖2係說明於圖1所示之固定盤單元所採用之定位塊之說明圖,圖2(a)為俯視圖,圖2(b)為前視圖,圖2(c)為側視圖。圖3係顯示於圖1所示之固定盤單元所採用之連結桿之側視圖。圖4係圖1所示之固定盤單元,且顯示將定位塊及連結桿設置於固定盤,而對玻璃基板進行定位之情形之立體圖。圖5係將圖4之主要部分放大而進行說明之說明圖,圖5(a)為俯視圖,圖5(b)為前視剖視圖。 Hereinafter, a preferred embodiment of the fixed disk unit of the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a preferred embodiment of a fixed disk unit of the present invention, showing a state in which a positioning block and a connecting rod are disposed in front of a fixed disk. Fig. 2 is an explanatory view showing a positioning block used in the fixed disk unit shown in Fig. 1. Fig. 2(a) is a plan view, Fig. 2(b) is a front view, and Fig. 2(c) is a side view. Figure 3 is a side elevational view of the tie rod used in the fixed disk unit shown in Figure 1. 4 is a perspective view of the fixed disk unit shown in FIG. 1 and showing the positioning of the positioning block and the connecting rod on the fixed disk to position the glass substrate. Fig. 5 is an explanatory view showing an enlarged main portion of Fig. 4, Fig. 5(a) is a plan view, and Fig. 5(b) is a front cross-sectional view.
本實施形態之固定盤單元1係於對例如攜帶用通信機器之顯示面板或觸控面板所使用之、厚度為約1mm以下之薄板狀之玻璃基板2進行加熱處理時,在將玻璃基板2定位於固定盤3上而搬送至加熱爐內時所使用者。固定盤單元1亦包含如上述之所使用之平板狀之盤等。在本實施形態中,列舉了載置有長方形狀之玻璃基板2之固定盤單元1為例而進行說明。 The fixed disk unit 1 of the present embodiment is configured to position the glass substrate 2 when heat-treating a thin glass substrate 2 having a thickness of about 1 mm or less for use in a display panel of a portable communication device or a touch panel. The user is transported to the inside of the heating furnace on the fixed tray 3. The fixed disk unit 1 also includes a flat plate or the like as used above. In the present embodiment, a fixed disk unit 1 on which a rectangular glass substrate 2 is placed will be described as an example.
基本上,固定盤單元1係如圖1及圖4所示,具備有:陶瓷製之固定盤3,係將進行加熱處理之玻璃基板2載置於其上;複數個洞部4,其係於該固定盤3上,排列在對玻璃基板2進行定位之位置,而朝上下方向貫通形成;複數個金屬製之定位塊5,其配置於該等複數個洞部4之各者;及金屬製之連結桿6,其在固定盤3上設置於定位塊5彼此之間。 Basically, as shown in FIGS. 1 and 4, the fixed disk unit 1 includes a ceramic fixed disk 3 on which a glass substrate 2 subjected to heat treatment is placed, and a plurality of holes 4, which are The fixing plate 3 is arranged at a position for positioning the glass substrate 2, and is formed to penetrate in the vertical direction; a plurality of positioning blocks 5 made of metal are disposed in each of the plurality of holes 4; and metal The connecting rods 6 are formed on the fixed disk 3 between the positioning blocks 5.
如圖1所示,陶瓷製之固定盤3係具有較被載置之玻璃基板2大之面積。於固定盤3上,以包圍使玻璃基板2被定位並載置之載置區域R之方式,於對玻璃基板2進行定位之位置排列8個洞部4。洞部4之數量係依照需要而設定。洞部4之內面係以其之軸沿著上下方向之圓筒面而形成。8個洞部4係以可至少對玻璃基板2所具有之4個邊2a進行定位之方式,以沿著該4個邊2a之配置各設置於2處。 As shown in Fig. 1, the ceramic fixed disk 3 has a larger area than the glass substrate 2 placed thereon. On the fixed disk 3, eight hole portions 4 are arranged at positions where the glass substrate 2 is positioned so as to surround the mounting region R on which the glass substrate 2 is positioned and placed. The number of holes 4 is set as needed. The inner surface of the hole portion 4 is formed by a cylindrical surface whose axis is along the vertical direction. The eight hole portions 4 are provided at two locations along the four sides 2a so as to be positionable at least on the four sides 2a of the glass substrate 2.
於圖2中,顯示有構成固定盤單元1之定位塊5之一例。定位塊5係一體地形成有支撐塊體部7與銷部8。支撐塊體部7之俯視外形輪廓係如圖2(a)所示,其係左右長度方向之中央部為最寬,隨著朝向左右長度方向兩端部而逐漸變狹窄之紡錘形狀,或是形成為附有斜面。 In Fig. 2, an example of the positioning block 5 constituting the fixed disk unit 1 is shown. The positioning block 5 is integrally formed with a support block body portion 7 and a pin portion 8. The top profile of the support block body 7 is as shown in Fig. 2(a), which is the widest part in the center in the left and right longitudinal direction, and is gradually narrowed toward the both ends in the left and right longitudinal directions, or Formed with a bevel.
支撐塊體部7之高度係如圖2(b)所示,係在左右長度方向上設為同一高度,其頂面7a及底面7b係形成為平坦面。支撐塊體部7之頂面7a係如圖2(a)及(c)所示,係於支撐塊體部7之左右長度方向上跨及其之兩端部間而以大致一定寬度形成為長方形狀。支撐塊體部7之底面7b係形成為上述之紡錘形狀等。 As shown in Fig. 2(b), the height of the support block portion 7 is the same height in the left and right longitudinal directions, and the top surface 7a and the bottom surface 7b are formed into a flat surface. As shown in Figs. 2(a) and 2(c), the top surface 7a of the support block portion 7 is formed at a substantially constant width between the both ends of the support block portion 7 in the longitudinal direction. Rectangular. The bottom surface 7b of the support block body 7 is formed into the above-described spindle shape or the like.
支撐塊體部7之正反之寬度方向兩側面係分別於下方側面部形成有突出部7c,於上方側面部形成有斜坡7d。詳細而言,在支撐塊體部7之寬度方向正反一對之下方側面部係分別形成為自紡錘形狀之底面7b大致垂直地立起,並形成為隨著自支撐塊體部7之左右長度方向兩端部朝向中央部而朝外側突出之突出部7c。突出部7c之最突出之部位係作為突出尖端7e。上方側面部係形成為自長方形狀之頂面7a朝向突出部7c之上端而往下傾斜之斜 坡7d。 The support block body portion 7 has a projecting portion 7c formed on the lower side surface portion and a slope 7d formed on the upper side surface portion, respectively. Specifically, the lower side surface portions of the pair of the front and back sides of the support block body portion 7 are formed so as to rise substantially perpendicularly from the bottom surface 7b of the spindle shape, and are formed to be along with the left and right sides of the self-supporting block portion 7. A protruding portion 7c that protrudes outward toward the center portion at both end portions in the longitudinal direction. The most prominent portion of the projection 7c serves as the protruding tip 7e. The upper side portion is formed to be inclined from the top surface 7a of the rectangular shape toward the upper end of the protruding portion 7c Slope 7d.
支撐塊體部7之外形尺寸係至少以支撐塊體部7之左右長度方向尺寸為較形成於固定盤3之洞部4之內徑更大而形成。支撐塊體部7之寬度方向最大尺寸(突出尖端7e位置之寬度尺寸)係設為與插入於洞部4之銷部8之外徑尺寸相同。亦即,銷部8與突出尖端7e係以不具有段差而呈平滑且連續的方式形成。而且,較銷部8更外側之支撐塊體部7之底面7b係面接觸於固定盤3之上面。支撐塊體部7之左右長度方向兩端部之端面7f係自底面7b直至頂面7a而大致垂直地形成。 The outer dimensions of the support block portion 7 are formed at least in such a manner that the left and right longitudinal direction dimensions of the support block portion 7 are larger than the inner diameter of the hole portion 4 formed in the fixed disk 3. The maximum dimension in the width direction of the support block portion 7 (the width dimension of the position of the protruding tip end 7e) is set to be the same as the outer diameter of the pin portion 8 inserted into the hole portion 4. That is, the pin portion 8 and the protruding tip end 7e are formed in a smooth and continuous manner without a step. Further, the bottom surface 7b of the support block body 7 on the outer side of the pin portion 8 is in surface contact with the upper surface of the fixed disk 3. The end faces 7f of the both ends in the longitudinal direction of the support block body 7 are formed substantially perpendicularly from the bottom face 7b to the top face 7a.
在圖式例中,支撐塊體部7係在左右長度方向上,相對於中央部之左右部分係以相同形態形成。然而,亦可為相對於包含最大寬度尺寸之突出尖端7e之中央部,右側尺寸較左側尺寸更短等之不為相同形態。此外,支撐塊體部7係即便對於其之寬度方向而在正反以相同形態形成,但亦可為在正反為相異形態。然而,若為如圖式例般,在左右長度方向及正反寬度方向為相同形態,則由於不用注意使用之朝向,所以可提高處理時之便利性。 In the illustrated example, the support block body portion 7 is formed in the same manner in the left and right longitudinal direction with respect to the left and right portions of the center portion. However, it may be the same as the center portion of the protruding tip end 7e including the largest width dimension, and the right side dimension is shorter than the left side dimension. Further, the support block body portion 7 is formed in the same form in the forward and reverse directions even in the width direction thereof, but may be in a different form in the front and the back. However, as in the case of the example, the left and right longitudinal directions and the front and back width directions are the same, and since the orientation of use is not taken care of, the convenience in handling can be improved.
銷部8係於支撐塊體部7之底面7b自此朝下方垂下而形成。銷部8係配合支撐塊體部7之突出尖端7e位置,亦即最大寬度尺寸之位置而配置。在圖式例中,由於突出尖端7e位置為支撐塊體部7之左右長度方向中央部,所以銷部8設於該中央部。銷部8係形成為其之軸沿著上下方向之圓柱體。 The pin portion 8 is formed by the bottom surface 7b of the support block body portion 7 hanging downward therefrom. The pin portion 8 is disposed to match the position of the protruding tip end 7e of the support block portion 7, that is, the position of the maximum width dimension. In the illustrated example, since the protruding tip end 7e is located at the center portion in the longitudinal direction of the support block body portion 7, the pin portion 8 is provided at the center portion. The pin portion 8 is formed into a cylindrical body whose axis is along the up and down direction.
銷部8之外徑尺寸係以於將玻璃基板2載置於固定盤3時或自固定盤3搬離時而不會卡住之方式,設定為與支撐塊體部7之最大寬度尺寸(突出尖端7e位置之寬度尺寸)相同,並且以可插 入於形成在固定盤3之洞部4之方式,形成為較該洞部4之內徑尺寸更小。本實施形態之固定盤單元1係因為使用於加熱處理,所以考慮到形成有洞部4之陶瓷製之固定盤3與插入於洞部4之金屬製之銷部8之熱膨脹率之不同,而以因加熱處理而熱膨脹之銷部8不會對固定盤3造成損傷之方式考量,而決定洞部4之內徑。 The outer diameter of the pin portion 8 is set to be the maximum width dimension of the support block portion 7 when the glass substrate 2 is placed on the fixed disk 3 or when it is removed from the fixed disk 3 without being caught. The width of the protruding tip 7e is the same size and can be inserted The hole portion 4 formed in the fixed disk 3 is formed to be smaller than the inner diameter of the hole portion 4. Since the fixed disk unit 1 of the present embodiment is used for heat treatment, it is considered that the coefficient of thermal expansion of the ceramic fixed disk 3 in which the hole portion 4 is formed and the metal pin portion 8 inserted into the hole portion 4 are different. The inner diameter of the cavity portion 4 is determined in such a manner that the pin portion 8 which is thermally expanded by the heat treatment does not cause damage to the fixed disk 3.
於定位塊5,係自支撐塊體部7之頂面7a直至銷部8之下端而將該等於上下方向上貫通,形成有通孔9。通孔9較佳為朝上下方向筆直地形成,但只要以貫通形態形成即可,而可不為朝上下方向而呈筆直。 The positioning block 5 is formed with a through hole 9 from the top surface 7a of the support block portion 7 to the lower end of the pin portion 8 so as to penetrate in the vertical direction. The through hole 9 is preferably formed straight in the vertical direction, but may be formed in a penetrating manner, and may not be straight in the vertical direction.
此外,於支撐塊體部7之內側係自其之左右長度方向一端部之端面7f沿著左右長度方向,而形成有連通於通孔9之插入部10。插入部10在圖式例中,係一端朝支撐塊體部7外側開放,而另一端形成為連通於通孔9之於水平方向呈筆直之孔11。孔11係位於支撐塊體部7之正反寬度方向中央而形成。通孔9在圖式例中,雖形成於支撐塊體部7之正反寬度方向中央部,但只要與孔11連通,則亦可為自該中央部偏移位置而形成。 Further, an insertion portion 10 that communicates with the through hole 9 is formed on the inner side of the support block body portion 7 from the end surface 7f of the one end portion in the left and right longitudinal direction thereof along the left and right longitudinal direction. In the illustrated example, the insertion portion 10 is open at one end toward the outside of the support block portion 7, and the other end is formed to be a straight hole 11 that communicates with the through hole 9 in the horizontal direction. The hole 11 is formed in the center of the front and back width directions of the support block body 7. In the illustrated example, the through hole 9 is formed in the center portion of the support block body portion 7 in the front-rear width direction, but may be formed to be displaced from the center portion as long as it communicates with the hole 11.
本實施形態中,顯示形成通孔9之情形,插入部10即孔11係將一端及另一端兩者開放。不形成通孔9亦可,在不形成通孔9之情形時,插入部10係形成為將一端開放,而將另一端封閉之凹孔。然而,在凹孔之情形時,會具有對插入部10進行加工時之切削碎屑或微細之粉塵殘留於凹孔之內側之虞,而藉由搬送固定盤單元1時之振動等,切削碎屑等會自凹孔移出至外部,若該等附著於玻璃基板2之表面,則會對玻璃基板2之加熱處理或後段步驟之加工造成不良影響,而有會成為製品不良之可能性,因此, 較佳為形成通孔9。 In the present embodiment, the case where the through hole 9 is formed is shown, and the insertion portion 10, that is, the hole 11 is opened by both the one end and the other end. The through hole 9 may not be formed. When the through hole 9 is not formed, the insertion portion 10 is formed as a recess that opens one end and closes the other end. However, in the case of the recessed hole, there is a flaw in which the cutting debris or fine dust remaining on the inner side of the recessed hole when the inserting portion 10 is processed, and the cutting is performed by the vibration or the like when the fixed disk unit 1 is conveyed. The chips and the like are removed from the concave holes to the outside, and if they adhere to the surface of the glass substrate 2, the heat treatment of the glass substrate 2 or the processing of the subsequent step may be adversely affected, and the product may be defective. , It is preferable to form the through hole 9.
連結桿6係如圖3所示,形成為筆直之棒狀體。連結桿6之外徑係以相對於孔11隔出些微間隙之方式,且以在熱膨脹時不會相互地產生損傷之程度,形成為較孔11之內徑更小。如圖4所示,連結桿6之端部6a係沿著其之長度方向而插拔自如地插入於定位塊5之插入部10之孔11。 The connecting rod 6 is formed as a straight rod-like body as shown in FIG. The outer diameter of the connecting rod 6 is formed so as to be spaced apart from the hole 11 by a slight gap, and is formed to be smaller than the inner diameter of the hole 11 to such an extent that it does not cause damage to each other during thermal expansion. As shown in Fig. 4, the end portion 6a of the connecting rod 6 is inserted and inserted into the hole 11 of the insertion portion 10 of the positioning block 5 along the longitudinal direction thereof.
連結桿6係如圖5所示,以於熱膨脹而延伸時,以其之端部6a不與相對向之通孔9之內面9a干涉之方式,相對於該內面9a而具有裕度,且以於連結桿6朝一方靠置時隔開不會脫落之間隙而插入之方式,決定洞部4之間隔尺寸P(參照圖1及圖5(b))。換言之,連結桿6之長度係基於洞部4之間隔尺寸P而決定。於不形成通孔9,而插入部10為凹孔之情形下,連結桿6之端部6a係相對於封閉之另一端具有裕度,且以於連結桿6朝一方靠置時隔開不會脫落之間隙而插入之方式,決定洞部4之間隔尺寸P。 As shown in FIG. 5, the connecting rod 6 has a margin with respect to the inner surface 9a so that the end portion 6a does not interfere with the inner surface 9a of the through hole 9 when it is extended by thermal expansion. In addition, the spacing P of the hole portion 4 is determined so as to insert the gap between the connecting rods 6 when they are placed against each other (see FIGS. 1 and 5(b)). In other words, the length of the connecting rod 6 is determined based on the spacing P of the hole portion 4. In the case where the through hole 9 is not formed and the insertion portion 10 is a concave hole, the end portion 6a of the connecting rod 6 has a margin with respect to the other end of the closing, and is spaced apart when the connecting rod 6 is placed toward one side. The spacing P of the hole portion 4 is determined by the manner in which the gap is removed and inserted.
相對於鄰接之一對定位塊5,藉由插入有連結桿6之兩端6a,則會如同下述,銷部8插入於洞部4而被設置於固定盤3上之一對定位塊5係分別在固定盤3上被阻止該等繞洞部4旋轉的情形。 With respect to the adjacent one of the pair of positioning blocks 5, by inserting the both ends 6a of the connecting rod 6, as will be described later, the pin portion 8 is inserted into the hole portion 4 and is disposed on the fixed disk 3 by a pair of positioning blocks 5. The rotation of the winding portions 4 is prevented on the fixed disk 3, respectively.
於圖4及圖5,係顯示藉由定位塊5及連結桿6,而將玻璃基板2在固定盤3上進行定位之狀態。於將玻璃基板2載置於固定盤單元1時,係使用8個定位塊5與4根連結桿6。 4 and 5, the state in which the glass substrate 2 is positioned on the fixed disk 3 by the positioning block 5 and the connecting rod 6 is shown. When the glass substrate 2 is placed on the fixed disk unit 1, eight positioning blocks 5 and four connecting rods 6 are used.
於將定位塊5之銷部8插入於固定盤3之洞部4之前,預先將連結桿6插入於一對定位塊5而使其成為一組。亦即,連結桿6之兩端6a係插入於相鄰接而配置之一對定位塊5之孔11, 而將包含該等一對定位塊5及一根連結桿6之一組相對於固定盤3而安裝。 Before the pin portion 8 of the positioning block 5 is inserted into the hole portion 4 of the fixed disk 3, the connecting rod 6 is inserted into the pair of positioning blocks 5 in advance to form a group. That is, the two ends 6a of the connecting rod 6 are inserted into the holes 11 of the positioning block 5 adjacent to each other. A set of the pair of positioning blocks 5 and one of the connecting rods 6 is mounted with respect to the fixed disk 3.
一對定位塊5係藉由以一根連結桿6連結而在一直線上排列,該等銷部8係鬆弛地插入於在對長方形狀之玻璃基板2進行定位之位置排列之8個洞部4之中、面對玻璃基板2之外周緣周圍之各邊2a而相鄰接之2個洞部4。藉此,玻璃基板2之載置區域R之四邊係由4組連結桿6及一對定位塊5所包圍。 The pair of positioning blocks 5 are arranged in a straight line by being connected by one connecting rod 6, and the pin portions 8 are loosely inserted into the eight holes 4 arranged at positions where the rectangular glass substrate 2 is positioned. In the middle, the two holes 4 are adjacent to each other on the side 2a around the periphery of the glass substrate 2. Thereby, the four sides of the mounting region R of the glass substrate 2 are surrounded by the four sets of connecting rods 6 and the pair of positioning blocks 5.
連結桿6係於將銷部8插入於洞部4時,相對於一對定位塊5之各通孔9,以隔開即便因熱膨脹而伸長亦具有裕度之間隙之方式,且以即便朝一方靠置之情形下亦不會脫落之方式,而設定其長度。在以連結桿6連結之狀態下,銷部8插入於洞部4之各定位塊5之支撐塊體部7係使其之左右長度方向沿著洞部4之排列方向。此外,支撐塊體部7係使在其之左右長度方向中央部及其之附近、具體而言為突出尖端7e位於最接近玻璃基板2之位置。 When the pin portion 8 is inserted into the hole portion 4, the connecting rod 6 is spaced apart from each of the through holes 9 of the pair of positioning blocks 5 so as to have a margin even if it is elongated by thermal expansion, and even if When one side is placed, it will not fall off and set its length. In a state in which the connecting rods 6 are coupled to each other, the pin portions 8 are inserted into the supporting block body portions 7 of the positioning blocks 5 of the hole portion 4 such that the left and right longitudinal directions thereof are along the direction in which the hole portions 4 are arranged. Further, the support block body portion 7 is located at a position in the vicinity of the center portion in the longitudinal direction and its vicinity, specifically, the projecting tip end 7e is located closest to the glass substrate 2.
支撐塊體部7係藉由將銷部8插入於洞部4,而將紡錘形狀等之平坦之底面7b面接觸且抵接於固定盤3上面,並將定位塊5整體支撐於固定盤3上,因此限制支撐塊體部7、進而限制定位塊5之搖動等。同時,被支撐於固定盤3上之一對定位塊5係插入有連結桿6之兩端6a,因此,限制其在固定盤3上繞洞部4旋轉。 The support block body 7 is formed by inserting the pin portion 8 into the hole portion 4, bringing the flat bottom surface 7b of the spindle shape or the like into contact with the upper surface of the fixed disk 3, and supporting the positioning block 5 as a whole on the fixed disk 3. Therefore, the support block body portion 7, and thus the rocking of the positioning block 5, are restricted. At the same time, one of the pair of positioning blocks 5 supported on the fixed disk 3 is inserted with the both ends 6a of the connecting rod 6, and therefore, it is restricted from rotating around the hole portion 4 on the fixed disk 3.
因此,可防止定位塊5將其之左右長度方向兩端部超出於玻璃基板2之載置區域R等之在固定盤3上改變其之朝向之狀況,而以不與載置區域R干涉之方式固定位置。另外,定位塊5係位於使其之突出尖端7e及斜坡7d面朝載置區域R之位置。 Therefore, it is possible to prevent the positioning block 5 from changing the orientation of the both ends in the left and right longitudinal direction beyond the mounting region R of the glass substrate 2 on the fixed disk 3, so as not to interfere with the mounting region R. Way to fix the position. Further, the positioning block 5 is located at a position where the protruding tip end 7e and the slope 7d face the mounting region R.
玻璃基板2係自固定盤3上方搬入,而載置於載置區域R。此時,即便玻璃基板2有些許位置偏移,玻璃基板2之外周緣部之各邊2a利用各定位塊5之斜坡7d而被導引,不產生損傷地適當且圓滑地導向於載置區域R,且以突出尖端7e確實地進行定位,而設置於載置區域R。 The glass substrate 2 is carried in from above the fixed disk 3 and placed on the mounting region R. At this time, even if the glass substrate 2 is slightly displaced, each side 2a of the peripheral edge portion of the glass substrate 2 is guided by the slope 7d of each positioning block 5, and is appropriately and smoothly guided to the mounting area without causing damage. R is provided in the placement region R with the protruding tip 7e being reliably positioned.
根據本實施形態之固定盤單元1,由於在以金屬製之定位塊5對被載置於陶瓷製之固定盤3上之玻璃基板2定位時,於包含鬆弛地插入於洞部4之銷部8之定位塊5具備有支撐塊體部7,該支撐塊體部7係將其之長度方向沿著洞部4之排列方向,而具有抵接於固定盤3上面之底面7b並將定位塊5支撐於固定盤3上,因此可藉由固定盤3上面與底面7b之面接觸將定位塊5設置於固定盤3上,即便係以銷部8與洞部4為鬆弛之狀態而將定位塊5設置於固定盤3,亦可以該等在固定盤3上不搖動傾斜之方式適當地支撐定位塊5,且可以不會有玻璃基板2因搬送時之振動或載置、搬離時卡住而導致損壞之情形之方式進行定位。 According to the fixed disk unit 1 of the present embodiment, when the glass substrate 2 placed on the ceramic fixed disk 3 is positioned by the positioning block 5 made of metal, the pin portion that is loosely inserted into the hole portion 4 is included. The positioning block 5 of 8 is provided with a supporting block body portion 7 having a longitudinal direction along the direction in which the hole portion 4 is arranged, and having a bottom surface 7b abutting on the upper surface of the fixed disk 3 and positioning block 5 is supported on the fixed disk 3, so that the positioning block 5 can be placed on the fixed disk 3 by the surface of the fixed disk 3 contacting the bottom surface 7b, even if the pin portion 8 and the hole portion 4 are loose. The block 5 is disposed on the fixed disk 3, and the positioning block 5 can be appropriately supported without being tilted on the fixed disk 3, and the glass substrate 2 can be prevented from being vibrated during loading or placed or removed. Positioning in a way that causes damage.
由於以其之長度方向之適當處係具有相較於其他部分最接近於玻璃基板2之最大寬度尺寸位置(突出尖端7e位置)之方式形成支撐塊體部7,具體而言,以左右長度方向中央部及其之附近最接近於玻璃基板2之外形形態形成,而自支撐塊體部7之該最大寬度尺寸位置垂下形成銷部8,因此即便移動被載置於載置區域R之玻璃基板2,亦可藉由銷部8與支撐塊體部7適當地保持與其之外周緣部周圍之位置。 The support block body portion 7 is formed in a manner suitable for the length direction thereof to be closest to the maximum width dimension position (the position of the protruding tip end 7e) of the glass substrate 2, specifically, the left and right length directions. The central portion and its vicinity are formed in a shape close to the outermost portion of the glass substrate 2, and the maximum width dimension of the self-supporting block portion 7 is suspended to form the pin portion 8, so that even if the glass substrate placed on the mounting region R is moved 2. It is also possible to appropriately maintain the position around the outer peripheral edge portion of the outer peripheral portion by the pin portion 8 and the support block body portion 7.
由於將連結桿6之兩端6a插入於相鄰接之一對定位塊5之插入部10,而限制設置於固定盤3上之定位塊5在固定盤3 上繞洞部4旋轉的情形,因此可確實防止支撐塊體部7超出於載置區域R、而使定位塊5與玻璃基板2成為上下重疊之情況。 Since the two ends 6a of the connecting rod 6 are inserted into the insertion portion 10 of the adjacent one of the positioning blocks 5, the positioning block 5 disposed on the fixed tray 3 is restrained on the fixed tray 3. Since the hole portion 4 is rotated upward, it is possible to surely prevent the support block body 7 from exceeding the placement region R and to overlap the positioning block 5 and the glass substrate 2 vertically.
關於本實施形態與先前技術(專利文獻1:日本專利第5069382號公報)之對比,該先前技術係具備藉由以鬆弛地貫通於該定位銷之橫向貫通孔內之連結構件,連結鬆弛地插入於鬆弛洞內之定位銷,而保持朝固定盤上之定位銷之突出狀態之構成,但在先前技術之該構成中,無法以定位銷不搖動振動之方式適當地支撐,因此,難以安全地進行定位以使玻璃基板不破損;但具備上述構成之本實施形態係與先前技術相異,即便將銷部8與洞部4設為鬆弛狀態,亦可確實地支撐定位塊5,此外,亦可確實地防止與玻璃基板2之在位置上之干涉,而大幅地改善將該玻璃基板2保持於固定盤3上之位置之定位功能。 In contrast to the prior art (Patent Document 1: Japanese Patent No. 50693382), the prior art includes a coupling member that is loosely inserted into a lateral through hole of the positioning pin, and is loosely inserted. The positioning pin in the relaxation hole is configured to be in a protruding state toward the positioning pin on the fixed disk. However, in the configuration of the prior art, the positioning pin cannot be properly supported without shaking the vibration, and therefore, it is difficult to safely The positioning is performed so that the glass substrate is not damaged. However, the present embodiment having the above configuration is different from the prior art, and even if the pin portion 8 and the hole portion 4 are in a relaxed state, the positioning block 5 can be surely supported, and The positional interference with the glass substrate 2 can be reliably prevented, and the positioning function of holding the glass substrate 2 at the position on the fixed disk 3 can be greatly improved.
由於將支撐塊體部7之俯視外形形態形成為其之長度方向中央部為最寬之紡錘形狀,或是附加錐體而形成,因此即便由於連結桿6與插入部10(孔11)之間隙而使定位塊5些微旋轉,亦可確實地防止支撐塊體部7超出於載置區域R。 Since the top surface shape of the support block portion 7 is formed into a spindle shape in which the center portion in the longitudinal direction is the widest, or is formed by adding a cone, even if there is a gap between the connecting rod 6 and the insertion portion 10 (hole 11) By slightly rotating the positioning block 5, it is possible to surely prevent the support block body 7 from exceeding the placement area R.
由於將插入部10構成為凹孔或連通於通孔9之孔11,並使插入部10不朝支撐塊體部7之相反側貫通,所以可防止經由插入部10而插入於支撐塊體部7之連結桿6自支撐塊體部7之左右長度方向一端部朝向另一端部離開而脫落之情形。 Since the insertion portion 10 is configured as a recessed hole or a hole 11 that communicates with the through hole 9, and the insertion portion 10 does not penetrate toward the opposite side of the support block portion 7, it is possible to prevent insertion into the support block body portion via the insertion portion 10. The connecting rod 6 of 7 is separated from the one end portion in the left-right direction of the support block portion 7 toward the other end portion and is detached.
由於將銷部8之外徑尺寸設定為與支撐塊體部7之最大寬度尺寸(突出尖端7e位置之寬度尺寸)相同,因此可確實地防止於將玻璃基板2載置在固定盤3時或自固定盤3搬離時產生卡住之情形。 Since the outer diameter of the pin portion 8 is set to be the same as the maximum width dimension of the support block portion 7 (the width dimension of the position of the protruding tip 7e), it is possible to surely prevent the glass substrate 2 from being placed on the fixed disk 3 or A situation occurs when the fixed disk 3 is removed when it is removed.
由於在定位塊5,自支撐塊體部7直至銷部8而於上下方向上貫通形成與孔11連通之通孔9,因此即便塵埃進入於孔11中,亦可進行排出以使其不存積於內部。由於將支撐塊體部7與銷部8上下地配置而構成定位塊5,因此於處理時可防止上下顛倒。 Since the through hole 9 that communicates with the hole 11 is formed in the vertical direction from the support block body 7 to the pin portion 8 in the positioning block 5, even if dust enters the hole 11, it can be discharged so as not to exist. Accumulated inside. Since the support block body portion 7 and the pin portion 8 are arranged up and down to form the positioning block 5, it is possible to prevent the upside down from being reversed during the process.
定位塊5之外形形態只要具備在上述實施形態中說明之功能,其為任意形態皆可。於圖6中,對於定位塊5之外形形態,顯示有變形例。在此對於相同構成省略其之說明,僅對於相異之部分進行說明。在變形例之定位塊5中,支撐塊體部7係形成為長方體形狀,且於圓柱體狀之銷部8之左右兩側以左右一對之形式一體地設置而構成。換言之,若自支撐塊體部7觀察,則與上述實施形態相同地,銷部8為自該支撐塊體部7一體地垂下形成之形態。於較支撐塊體部7更高之位置,形成有朝向上方而變狹窄之形態之圓錐台部8a,其配置於銷部8之正上方。圓錐台部8a係平滑地連接於銷部8,作為上述之斜坡7d而發揮功能。銷部8之外徑尺寸係設定為較支撐塊體部7之寬度方向尺寸更大,藉此銷部8係作為上述之突出部7c而發揮功能,而且銷部8之外周面係與上述之突出尖端7e相同地將玻璃基板2確實地進行定位。 The external shape of the positioning block 5 may be any form as long as it has the functions described in the above embodiment. In Fig. 6, a modification is shown for the outer shape of the positioning block 5. Here, the description of the same configuration will be omitted, and only the differences will be described. In the positioning block 5 of the modification, the support block body portion 7 is formed in a rectangular parallelepiped shape, and is integrally formed in a pair of right and left sides on the left and right sides of the cylindrical pin portion 8. In other words, when viewed from the support block portion 7, the pin portion 8 is formed integrally from the support block body portion 7 as in the above-described embodiment. At a position higher than the support block portion 7, a truncated cone portion 8a which is formed to be narrower toward the upper side is formed, and is disposed directly above the pin portion 8. The truncated cone portion 8a is smoothly connected to the pin portion 8 and functions as the above-described slope 7d. The outer diameter of the pin portion 8 is set to be larger than the width direction of the support block portion 7, whereby the pin portion 8 functions as the above-described projecting portion 7c, and the outer peripheral surface of the pin portion 8 is the same as described above. The protruding tip 7e similarly positions the glass substrate 2 in a sure manner.
5‧‧‧定位塊 5‧‧‧ Positioning block
6‧‧‧連結桿 6‧‧‧ Connecting rod
6a‧‧‧連結桿之端部 6a‧‧‧End of the connecting rod
7‧‧‧支撐塊體部 7‧‧‧Support block body
7a‧‧‧頂面 7a‧‧‧ top surface
7b‧‧‧底面 7b‧‧‧ bottom
8‧‧‧銷部 8‧‧‧ Department of Sales
8a‧‧‧圓錐台部 8a‧‧‧French table
9‧‧‧通孔 9‧‧‧through hole
9a‧‧‧通孔之內面 9a‧‧‧ Inside the through hole
10‧‧‧插入部 10‧‧‧Insert Department
11‧‧‧孔 11‧‧‧ hole
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JP2014151250A JP5701436B1 (en) | 2014-07-24 | 2014-07-24 | Surface plate unit |
JP2014-151250 | 2014-07-24 |
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TW201608193A true TW201608193A (en) | 2016-03-01 |
TWI648510B TWI648510B (en) | 2019-01-21 |
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TW104120136A TWI648510B (en) | 2014-07-24 | 2015-06-23 | A surface plate unit |
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CN (1) | CN105300111B (en) |
TW (1) | TWI648510B (en) |
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JPH01169798U (en) * | 1988-05-19 | 1989-11-30 | ||
JPH0685739U (en) * | 1993-05-21 | 1994-12-13 | 株式会社ニコン | Positioning device |
AU1135695A (en) * | 1994-01-24 | 1995-08-03 | S. J. Moorman | Glass kiln |
JPH0970953A (en) * | 1995-09-04 | 1997-03-18 | Toshiba Electron Eng Corp | Printer |
JP3636235B2 (en) * | 1996-01-08 | 2005-04-06 | オリンパス株式会社 | Board holder |
JP2003282684A (en) * | 2002-03-22 | 2003-10-03 | Olympus Optical Co Ltd | Glass board supporting jig |
JP2004179513A (en) * | 2002-11-28 | 2004-06-24 | Tokyo Electron Ltd | Substrate holding apparatus and substrate treatment apparatus |
JP2005174669A (en) * | 2003-12-09 | 2005-06-30 | Pioneer Electronic Corp | Setter glass, positioning pin, and manufacturing method of plasma display panel |
CN2725934Y (en) * | 2004-07-07 | 2005-09-14 | 和鑫光电股份有限公司 | Glass base plate carrier |
JP2006066747A (en) * | 2004-08-30 | 2006-03-09 | Hitachi High-Tech Electronics Engineering Co Ltd | Positioning apparatus and method of substrate |
JP2009210166A (en) * | 2008-03-03 | 2009-09-17 | Panasonic Corp | Baking device of plasma display panel |
CN201974058U (en) * | 2010-12-22 | 2011-09-14 | 厦门精显赛特勒液晶显示有限公司 | Sintering device for liquid crystal box |
JP5069382B1 (en) * | 2012-04-26 | 2012-11-07 | 中外炉工業株式会社 | Surface plate unit |
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JP5701436B1 (en) | 2015-04-15 |
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