WO2019052282A1

WO2019052282A1 - Mask cassette and mask

Info

Publication number: WO2019052282A1
Application number: PCT/CN2018/097984
Authority: WO
Inventors: 林治明; 黄俊杰; 杨成发; 王�琦; 白音必力; 郝志元; 李冬伟; 张健
Original assignee: 京东方科技集团股份有限公司; 鄂尔多斯市源盛光电有限责任公司
Priority date: 2017-09-18
Filing date: 2018-08-01
Publication date: 2019-03-21
Also published as: CN107447192A

Abstract

A mask cassette (100), comprising: a cassette body (10); at least one slot (20) formed in the cassette body (10) and used for placement of a mask (200); and stop blocks (2) provided at the periphery of the slot (20) and used for limiting two ends of the mask (200) placed in the slot (20), wherein on at least one end of the slot, the included angle between the side surface of the stop block (2) opposite the mask and the upper surface of the slot (20) is an obtuse angle. A mask (200) comprises a mask frame; a concave part (201) is provided at the periphery of the mask frame; the concave part (201) is at least provided at a position opposite to the stop block (2) of the mask cassette (100) for placement of a mask; the concave part (201) extends to the top surface of the stop block (2) and the depth of the concave part (201) gradually increases along with the height of the frame. In the process of using a mechanical arm to pick and place a mask (200), the mask cassette (100) and the mask (200) can avoid shaking of the mask (200) caused by sagging of the mechanical arm.

Description

Mask card holder and mask

Cross-reference to related applications

The present application claims the priority of the Chinese Patent Application No. 201710840399.8 filed on Sep. 18, 2017, the entire disclosure of which is hereby incorporated by reference.

Technical field

The present disclosure relates to the field of display panel fabrication, and in particular to a mask card holder and a mask.

Background technique

In the manufacturing process of an Organic Light-Emitting Diode (OLED) display panel, the OLED material is vapor-deposited to a low temperature according to a preset procedure by using a Fine Metal Mask (FMM). Poly Low Temperature Poly-Silicon (LTPS) backplane. In the vapor deposition process, an OLED material such as a red, green, and blue organic material is vapor-deposited to a predetermined position on the back sheet by using a pattern on the FMM to form a display device.

Currently, in the manufacturing process of the display panel, a mask card holder (Cassette, CST) is used to load and transport the mask, and the mask is carried by a robot.

Summary of the invention

In order to overcome all or part of the above disadvantages, the present disclosure proposes an improved mask card holder and an improved mask frame.

In one aspect, the present disclosure relates to a mask card holder, comprising: a clip body; at least one card slot disposed in the clip body for placing a mask; and disposed at a periphery of the card slot And a stop block for limiting the two ends of the mask plate disposed in the card slot, wherein a side surface of the stop block at least one end opposite to the mask plate and the upper surface of the card slot are formed The angle is an obtuse angle. A mask card holder according to the present disclosure may have the following advantageous aspects:

Advantageously, said side of the stop block forms an oblique shape with respect to the upper surface of the card slot, wherein the bevel angle extends from the upper surface of the card slot; further advantageously, said bevel shape extends to the top of the stop block The middle position of the face or stop;

Advantageously, the side of the stop block forms a circular arc shape with respect to the upper surface of the card slot, wherein the arc extends from the upper surface of the card slot; further advantageously, the arc shape extends to the top of the stop block The middle position of the face or stop;

Advantageously, the angle formed by the side of the opposite block opposite the mask and the upper surface of the card slot is an obtuse angle;

In another aspect, the present disclosure is also directed to a mask panel including a mask panel frame, wherein a recess is provided at a periphery of the mask panel frame, the recessed portion being disposed at least at a position for placing the mask panel At the opposite position of the stop block of the mask card holder, the recess extends to the top surface of the stop block and gradually increases in depth in the direction of the height of the frame.

A mask according to the present disclosure may have the following advantageous aspects:

Providing the recessed portion on all periphery of the mask frame;

The recessed portion is disposed in an oblique shape and gradually increases along the height of the frame.

DRAWINGS

Figure 1 is a schematic view showing the overall structure of a mask card holder;

Figure 2 shows a schematic view of a robot in a sag state;

Figure 3 is a view showing the structure of the stopper of the associated mask card holder and the friction of the mask frame with the stopper;

4 is a schematic structural view of a mask card holder according to an embodiment of the present disclosure carrying a mask;

Figure 5 is a schematic view showing the friction of the mask plate with the stopper of the mask of Figure 4 when the mask is used for picking and dropping the mask;

6 is a schematic structural view of a mask card holder according to still another embodiment of the present disclosure carrying a mask;

FIG. 7 is a schematic structural view of a mask card holder according to still another embodiment of the present disclosure carrying a mask;

FIG. 8 is a schematic structural view of a mask card holder according to still another embodiment of the present disclosure carrying a mask;

9 shows a schematic structural view of a modified mask according to an embodiment of the present disclosure;

Fig. 10 is an enlarged schematic view showing the mask of Fig. 9 at a circled position of the frame.

Detailed ways

The structure of the mask clip and the mask according to an embodiment of the present disclosure, as well as other aspects, are described below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in the However, it will be apparent to those skilled in the art that the implementation of the present disclosure may not have some of these specific details. In addition, it should be understood that the disclosure is not limited to the particular embodiments disclosed. Instead, it is contemplated that the present disclosure may be practiced with any combination of the following features and elements, whether or not they relate to different embodiments. Therefore, the following aspects, features, embodiments and advantages are to be considered as illustrative and not restrictive.

It will be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", The terms "horizontal", "top", "bottom", "inside", "outside" and the like are based on the orientation or positional relationship of the figures, which are merely for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying The components of the device must have a particular orientation, be constructed or operated in a particular orientation, and thus should not be construed as limiting the disclosure.

1 is a schematic structural view of a mask card clip of the related art, the mask card clip includes a clip body and a plurality of card slots disposed in the clip body, and are disposed at four corners of the card slot The stop block is used to limit the mask placed in the card slot. During the long-term use of the robot to pick up and release the mask, the flatness of the manipulator changes, and the drooping shape near the end is more serious (similar to the oblique downward shape), as shown in FIG. The broken line indicates a state in which the flatness of the manipulator has not changed, and the solid line in the figure indicates a state in which the flatness of the manipulator is changed.

When using the drooping robot shown in Figure 2 to access the mask, the mask at the end of the sagging will rub against the stop adjacent the card slot of the clip, as shown in Figure 3, This friction is specifically shown in the dashed box. The friction causes an abnormal state in which the mask plate for picking and dropping is greatly shaken. In the abnormal state, the mask and the robot simultaneously generate jitter, which affects the stability of the mask, and thus affects the passage. The yield of the display panel produced by vapor deposition of the mask.

The mask card holder according to the present disclosure is substantially identical in composition to a conventional mask card holder, that is, as shown in FIG. 1, the mask card holder 100 includes a clip body 10 and is housed in the clip body 10 for housing. The card slot 20 of the mask 200 is defined by two support seats 1 spaced apart from one another, the clip body 10 defining the overall frame of the mask card holder 100. The mask card holder 100 shown in FIG. 1 includes three card slots 20, and three mask sheets 200 can be placed at the same time. It is readily contemplated that the mask card holder 100 can include a different number of card slots 20 than the three card slots. In the embodiment shown in Fig. 1, the support base 1 is elongated in shape, and the mask 200 is supported by the both sides on the support base 1. A stopper 2 is provided around the card slot 20. In an alternative embodiment shown, a stop 2 is provided at the end of the support 1 and the stop 2 is placed opposite the end of the mask 200 so as to end the end of the mask 200 The location is limited. The stop block 2 can be arranged on the support base 1 as shown in FIG. 1 or adjacent to the support base 1 as shown in FIGS. 3 to 8, or the stop block 2 can be designed integrally with the support base 1. Pieces. It is of course conceivable that the stop block 2 can also be arranged at other ends of the card slot 20, for example in an adjacent arrangement. The robot extends in the direction indicated by the arrow in the figure, and the sagging end of the robot is located at one end of the far side of the arrow (i.e., the inner side end shown in the drawing). In the diagram of FIG. 1, the mask 200 is not placed on the mask card holder 100 for the sake of clarity.

In order to prevent the stopper 2 at one end of the support base 1 distal to the arrow from rubbing against the side of the mask 200 in the process of picking and placing the mask 200 using the robot as shown in FIG. 2, The mask 200 is shaken, and an obtuse angle 21 is formed on the side of the stopper 2 facing the mask 200 and the upper surface of the card slot 20 (ie, the upper surface of the support base 1), and the obtuse angle 21 is from the support base 1 The bottom surface of the defined card slot 20 begins to extend and gradually increases in depth along the height of the stop block 2. Thus, as shown in FIG. 5, since the obtuse angle forms a recess which gradually increases along the height of the stopper 2, even if the end of the manipulator sag causes the mask 200 to tilt during the pick-and-place process, it does not Friction occurs on the side of the stopper 2 adjacent thereto, thereby preventing the shake of the robot and the mask 200.

In order to form the obtuse angle, the side surface of the stopper 2 facing the mask 200 may be designed to form an oblique shape with respect to the upper surface of the card slot 20 as shown in FIG. 4, or may be designed as shown in FIG. The upper surface of the card slot 20 is formed in a circular arc shape, and may be designed in any other suitable shape as long as the side surface of the stopper 2 forms an obtuse angle with respect to the upper surface of the card slot 20, and the height along the stopper 2 is gradually increased. Large recess. The beveled shape and the arcuate shape are arranged to extend from the bottom surface of the card slot, and the upper end of the bevel or arc or other shape may be arranged to extend to the top surface of the stopper 2 as shown in FIG. It is also possible to arrange it in the middle position of the stopper 2 as shown in FIG. As shown, the top surface of the stopper 2 may be disposed in a pointed shape as shown in FIG. 4, or the top surface of the stopper 2 may be disposed to have a certain thickness as shown in FIGS. This provides more design possibilities. A mask card holder in accordance with some possible embodiments of the present disclosure is illustrated from FIGS. 4 through 8.

As shown in FIGS. 4 to 8, only the side of the stopper 2 near the end side of the robot can be disposed to form an obtuse angle with the upper surface of the card slot 20 (because the robot sags at the position of the stopper 2) The friction between the mask 200 and the mask clip 100 occurs, and the stop 2 on the other side away from the end of the robot is not so limited, that is, as indicated by the arrow in FIG. The side of the stop block 2 at the end is arranged to form an obtuse angle with the upper surface of the card slot, and is not limited as such on the stop block 2 at the proximal end shown by the arrow in FIG. It is conceivable that in order to simplify the design and at the same time to enhance the versatility, that is, the robot can be taken from all directions, the sides of all the stoppers 2 can be formed to form the upper surface of the card slot. Obtuse angle.

In order to avoid the friction between the mask 200 of the hanging end and the side of the stopper 2 of the mask clip 100 during the process of picking and placing the mask 200, according to an aspect of the present disclosure, a The improved mask 200 shown in Figures 9 and 10. When the opposite orientation of the mask 200 and the card slot 20 is the direction of the arrow in FIG. 9 coincides with the direction of the arrow in FIG. 1, that is, the left end of the mask 200 of FIG. 9 is close to the end of the sagging robot, and When the mask 200 is picked up and lowered using a robot, the left end portion of FIG. 9 is easily rubbed and scraped with the side end surface of the stopper 2. The frame of the masking plate 200 is thus designed, for example, to provide a recess 201 at a corner opposite the stop 2, which extends to the top surface of the frame of the masking plate 200. In an alternative embodiment, the recess is designed, for example, in an oblique shape as shown in FIG. 10, and the recess gradually becomes larger as the height of the frame of the mask 200. Even if the side surface of the stopper 2 of the mask card holder 100 does not form an obtuse angle with the upper surface of the card slot 20, the modified mask 200 can be used to avoid the mask plate 200 side and the mask card holder 100. The side of the stopper 2 is rubbed and scratched. It is conceivable that the concave portion 201 may adopt other shapes such as a circular arc shape, a square shape or the like in addition to the oblique shape as shown in FIG.

It is readily contemplated that the recesses are provided at the four corners of the frame of the mask 200 in an alternative embodiment. The arrangement of the mask 200 having the recesses at the four corners is such that the direction in which the mask 200 is placed on the mask clip 100 is not limited, that is, when picking and dropping, it is not necessary to try to discern the mask 200. Put the direction. It is readily conceivable that, in order to facilitate processing, in another alternative embodiment only the distal end of the mask 200 in the pick and place direction shown in the arrow in Fig. 1 (i.e., at the back side in Fig. 1) A recess 201 facing the stopper 2 of the mask card holder 100 is provided. . In yet another alternative embodiment, the recessed portion 201 is provided on all sides of the frame of the mask 200, and the recessed portion 201 forms a through-concave shape.

The mask card holder 100 according to the present disclosure may be used in combination with the mask sheet 200 not provided with the recessed portion, or may be used in combination with the mask sheet 200 provided with the recess according to the present disclosure; and similarly, according to the present invention The disclosed mask 200 provided with a recess may be used in conjunction with the mask clip 100 configured in accordance with the present disclosure, or may be used in conjunction with the mask clip 100 configured in accordance with the present disclosure. The use of the mask card holder 100 according to the present disclosure and the mask board 200 according to the present disclosure is to prevent the mask board 200 from being jammed with the mask board during the pick-and-place process of the mask board 100 in the mask board holder 100. Friction is particularly advantageous.

The mask card holder 100 and the mask plate 200 according to the present disclosure may provide a gap that increases with height between the frame of the mask plate and the stopper 2 of the mask card holder 100, then the robot is used During the pick and place of the mask, the inclined mask frame due to the sagging of the robot does not rub against the surface of the stopper 2, so that the mask 200 does not shake due to friction. The stability of the mask is ensured, thereby improving the quality of the display panel obtained by vapor deposition using the mask 200.

Although the present disclosure has been disclosed above in the preferred embodiments, the present disclosure is not limited thereto. Any changes and modifications made by those skilled in the art without departing from the spirit and scope of the disclosure should be included in the scope of the disclosure, and therefore the scope of the disclosure should be defined by the scope of the claims. quasi.

Claims

A mask card holder, comprising: a clip body; at least one card slot disposed in the clip body for placing a mask; disposed at a periphery of the card slot for placing in the card slot The two ends of the mask are subjected to the limiting stopper, wherein an angle formed by the side of the stopper opposite to the mask and the upper surface of the slot is an obtuse angle.
The mask card holder according to claim 1, wherein the side surface of the stopper forms an oblique shape with respect to an upper surface of the card slot, wherein the oblique angle extends from an upper surface of the card slot.
The mask clip of claim 2, wherein the beveled shape extends to a top surface of the stop or an intermediate position of the stop.
The mask card holder according to claim 1, wherein the side surface of the stopper forms an arc shape with respect to an upper surface of the card slot, wherein the arc extends from the upper surface of the card slot.
The mask card holder according to claim 4, wherein the circular arc shape extends to a top surface of the stopper or an intermediate position of the stopper.
The mask card holder according to claim 1, wherein an angle formed by a side of each of the stoppers opposite to the mask and an upper surface of the card slot is an obtuse angle.
A mask comprising a mask frame, wherein a recess is provided at a periphery of the mask frame, the recess being disposed at least in a stop block with a mask for placing the mask At the opposite positions, the recess extends to the top surface of the stop block and gradually increases in depth along the height of the frame.
The mask according to claim 7, wherein said concave portion is provided on all periphery of the mask frame.
The mask according to claim 7 or 8, wherein the concave portion is provided in an oblique shape.