1323343 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於一種檢查被形成帶狀工件的圖案的裝置 ，例如關於一種在卷帶承載器方式所致的TAB ( Tape Automated Bonding)卷帶照射照明光，藉由攝影手段攝 影形成於TAB卷帶上的配線等的圖案，而藉由與基準圖案 比較而自動地進行外觀檢查的圖案檢查裝置者。 , 或 求化 要腳 的弓 裝多 安該 度在 密於 高由 與 。 化步 體進 積所 高有 於化 應小 對微 是與 件化 1 元腳 術體引 技導多 前半的 先 線 [ 導 微小化上有利，採用著將半導體晶片與設於薄膜狀的TAB 卷帶的多數導線相連接的方法。 第8圖是表示形成有圖案的TAB卷帶的例子的圖式。 在同圖中，TAB卷帶101是在厚約20〜15〇em (較多 爲25〜75 # m )的樹脂薄膜102上，除了形成有貫通孔103 的寬度方向兩側的邊緣之外，黏貼有銅箔等的金屬箔，藉 由曝光及蝕刻來加工該金屬箔（銅箔），以形成配線等的 圖案。 如同圖地，在TAB卷帶101，將相同電路作爲一零件 連續製作複數。同圖的內部白色長方形是安裝半導體晶片 的開口部（元件孔）110，符號111是電路的配線圖案。 在此種TAB卷帶1 0 1的製程中，必須檢查配線圖案1 1 1 是否正確地形成，而藉由圖案檢查裝置進行檢查。 -4 - (3) 1323343 裝置的槪略構成。 5 2是透射照射裝置，從TAB卷帶1 〇 1的圖式下方照射 照明光。53是如CCD攝影機的攝影裝置，從與照明光照射 在TAB卷帶1 0 1的一側相反側（圖示上方）攝影透射TAB ' 卷帶1〇1的光所致的圖案像。 - 藉由攝影裝置5 3所攝影的圖案的透射照明畫像是被傳 送至控制部54，而在控制部54中，與事先被記憶的圖案的 | 基準圖案55比較，來判定良否。 藉由攝影裝置5 3攝影透射照明畫像時，因所攝影的畫 像會模糊而無法檢查。所以，必須將須檢查的TAB卷帶 101維持在攝影裝置53的焦點深度內，惟TAB卷帶101是厚 度薄者會因自重而彎曲，或在形成配線圖案的曝光、顯像 、蝕刻的工程會發生翹曲或凹凸的情形。 因此，成爲需要矯正產生在卷帶的彎曲或翹曲凹凸而 保持平面所用的手段，惟欲藉由透射照明進行檢查，則無 φ 法將不透明的工作台配置在透射照明的光路內。 因此，在表示於專利文獻1的裝置中，對於卷帶的搬 運方向，藉由搬運卷帶的機構施以拉力，而對於卷帶的寬 度方向（對於搬運方向的直角方向），藉由夾持卷帶的雨 緣並朝寬度方向引起的卷帶抗拉機構施加拉力，俾將欲檢 査TAB卷帶101的部位維持在攝影裝置53的焦點深度內。 專利文獻1:日本特開2004-28597 【發明內容】 -6- (5) (5)1323343 一種圖案檢查裝置，屬於藉由透射照明來進行圖案檢查的 裝置，即使是寬廣的工件，或發生翹曲或凹凸的工件，也 可將欲檢查的部位維持在攝影裝置的焦點深度內，又在搬 運中，工件的邊緣不會從夾持該邊緣而給予拉力的工件抗 拉機構脫落的情形。 在本發明中如下所述地解決上述課題。 一種圖案檢查裝置，屬於將形成於薄膜狀的帶狀工件 的圖案，藉由透射照明光進行攝影，並將該圖案的外觀加 以檢查的圖案檢查裝置，其特徵爲：具備：朝上述帶狀工 件的寬度方向給予拉力的工件抗拉機構，及將上述帶狀工 件加以吸附保持的工作台。 該工作台是長邊對應於帶狀工件的寬度而短邊對應於 長度方向的長方形狀，而設置複數。 在工作台表面，形成有吸附保持工件所用的真空吸附 孔或槽。在攝影圖案之際，藉由工件抗拉機構給予拉力的 帶狀工件的檢查部位的搬運方向上游側與下游側部分，被 吸附保持在該工作台。因此，即使在帶狀工件產生翹曲或 凹凸，也可將檢查部位維持在攝影裝置的焦點深度內。 又，工作台是隨著因應於必須檢查的圖案的帶狀工件 長度方向的長度的間隔設置複數在位於帶狀工件兩側的工 件抗拉機構之間，因此在進行檢查的部位，從工作台與工 作台之間，可照射透射照明光》 又，工作台是作成可更換，若準備長邊的長度不相同 者，藉由因應於進行檢查的帶狀工件的寬度加以更換，成 -8 - (6) (6)1323343 爲也可檢查寬度不相同的帶狀工件。 又，在工作台連接有用以吸附保持帶狀工件的真空源 與供給空氣的空氣源，藉由轉換閥，轉換供給於工作台的 真空與空氣。 搬運帶狀工件之際，藉由轉換閥將供給於工作台的真 空轉換成空氣，從工作台的真空吸附孔或槽吹出空氣。藉 此，工件的搬運中，即使寬廣的工件，也可防止自重所致 的彎曲，可防止工件的邊緣從工件抗拉機構脫落的情形。 又，帶狀工件的背面與工作台表面摩擦，可防止在工 件背面受傷。 在本發明中，可得到以下效果。 設置吸附保持帶狀工件的工作台之故，因此將藉由工 件抗拉機構給予拉力的帶狀工件吸附保持在工件，即使在 帶狀工件產生翹曲或凹凸，也可將檢查圖案的部位的攝影 裝置的焦點深度內。 工作台是長邊對應於帶狀工件的寬度方向，而短邊對 應於長度方向’因此，藉由隔著因應於須檢查的圖案的帶 狀工件長度方向的長度間隔設置複數，而可將透射照明光 從工作台與工作台之間照射在帶狀工件。 又’工作台是可更換’因此若準備長邊的長度不相同 的工作台’藉由因應於進行檢查的帶狀工件的寬度加以更 換，以一裝置就可進行檢查寬度不相同的帶狀工件。 又’在工作台連接有用以吸附保持帶狀工件的真空源 與供給空氣的空氣源’藉由轉換閥，轉換供給於工作台的 (7) (7)1323343 真空與空氣，因此，在搬運帶狀工件時’藉由從工作台吹 出空氣，可防止工件自重所致的彎曲，可防止工件的邊緣 從工件抗拉機構脫落的情形。 又，帶狀工件的背面與工作台表面摩擦，可防止在工 件背面受傷。 【實施方式】 以下，依據圖式具體性說明本發明的實施例的形態。 第1圖是表示成爲檢査裝置的工件保持手段的工件抗 拉機構10與工作台20的立體圖；第2圖是表示從第1圖的箭 號A (工件的搬運）方向觀看的斷面圖；第3圖是表示從 第1圖的箭號B (工件的寬度）方向觀看的斷面圖；第4圖 是表示從第1圖的箭號C (上）方向觀看的俯視圖。 又，形成有進行檢查的電路圖案的帶狀工件的TAB卷 帶1，是在第1圖及第2圖中以虛線表示，在第1圖中朝以箭 號G所示的方向，藉由未圖示的主動滾子與刹車滾子的組 合進行搬運。 在此些圖中，11，12是夾持TAB卷帶1的第一及第二 的夾具部；設於帶狀工件的TAB卷帶1的兩側。1 3，1 4是 夾具用上構件及夾具用下構件，藉由夾具用上構件13的夾 持面41與夾具用下構件14的夾持面42來夾持TAB卷帶1的 邊緣。 15是夾具驅動部，上下地移動夾具用上構件13。由此 ，TAB卷帶1的邊緣是被夾持或開放。 *10- (9) 1323343 又，工作台20表面的高度方向的位置，是藉由支柱21 被支持成爲攝影TAB卷帶1的透射透明畫像的攝影裝置（ 未圖示）的焦點位置。 第5圖是表示工作台20支柱21的詳細構成的圖式，從 ' TAB卷帶的搬運方向所觀看的斷面圖。 - 如第5 ( a )圖所示地，工作台20是藉由定位銷23被定 位，而藉由固定螺絲2 4被固定在支柱2 1。 | 如上述地，在工作台20的表面形成有真空吸附孔或槽 22，經由支柱21 ’供給有用以吸附保持TAB卷帶1的真空 〇 如第5 ( b )圖所示，工作台20是可拆卸，如第5 ( c ) 圖所示地’可更換對應於寬廣的TAB卷帶的長邊較長的工 作台25。 第6圖及第7圖是表示更換成長邊較長的工作台25時的 工件的保持手段的狀態的圖式。第6圖是表示從與第3圖相 φ 同方向觀看的斷面圖；第7圖是表示從與第4圖相同方向觀 看的俯視圖。 朝圖中箭號方向移動第二夾具部12，擴長與第一夾具 部11的間隔’而將對應於寬廣的TAB卷帶的工作台25 安裝於支柱21。 回到第5 ( c )圖’在將真空經由支柱2丨供給於工作台 20或25的配管，不僅連接供給真空的真空源的真空泵3〇， 還連接有空氣源的壓縮空氣31，而裝置的控制部藉由將轉 換閥32進行轉換’可將空氣供給於工作台2〇或25，當供給 -12- (10) (10)1323343 空氣時，則由工作台20或25的真空吸附孔或槽22吹出空氣 〇 以下’說明工件抗拉機構1 0與工作台20的動作。 配合進行檢查的TAB卷帶1的寬度，將工件抗拉機構 10的第二夾具部12移動在線性導件16上，設定與第一夾具 部1 1的間隔。亦即，如第2圖所示地，TAB卷帶1的邊緣部 分，位於夾具用上構件13的夾持面41與夾具用下構件14的 夾持面42之間’惟作成不會觸及夾具用下構件14的階段差 的側面4 3的間隔。如第6圖所示地，若卷帶寬度變廣，則 間隔擴展地移動第二夾具部1 2。 TAB卷帶1是藉由圖示的主動滾子與刹車滾子的組合 ，朝第1圖的箭號G方向搬運。這時候，在工作台2〇， 20 —從空氣源供給壓縮空氣31，而空氣從真空吸附孔或槽 22被吹出。藉此，TAB卷帶1是對於工作台20，2〇 /浮起 〇 第2圖是表示TAB卷帶1藉由空氣的吹出而對於工作台 2 0浮起的狀態。如同圖所示地，T A B卷帶1是對於工作台 20浮起’同時地TAB卷帶的邊緣部分也對於夾具用下構件 14的夾持面42浮起》 如此地’藉由從工作台20，2〇 /吹出空氣，而在TAB 卷帶1作用者被抬局的力量，不會發生自重所致的彎曲， 因此，TAB卷帶的邊緣是被保持在第一及第二夾具部η， 12的夾具用上構件13的夾持面41與夾具用下構件μ的夾持 面42之間’而不會從該間脫落地被搬運。 -13- (11) (11)1323343 當進行檢查的電路的配線圖案的部位’被搬運至工作 台20，20 >之間，則停止搬運TAB卷帶1，藉由主動滾子 與刹車滾子，對於TAB卷帶的長度方向施加拉力。 一方面，有關於卷帶的寬度方向，藉由夾具驅動部15 使得夾具用上構件13下降，而卷帶的邊緣藉由夾具用上構 件13的夾持面41與夾具用下構件14的夾持面42被夾持，使 得第二夾具部12藉由朝卷帶寬度方向（第2圖的箭號P方向 )移動線性導件1 6上而被施加拉力。’ 在工作台20，2〇 / ，藉由轉換閥32被轉換，替代壓縮 空氣而使得真空從真空泵30供給，吸附保持著在長度方向 以及寬度方向的施以拉力進行TAB卷帶1的檢查的電路的 周邊部，亦即吸附保持著檢查部位的搬運方向上游側與下 游側的部分。 藉此，TAB卷帶1是被保持成平面。如上述地，TAB 卷帶是藉由曝光、顯像、蝕刻等的各工程大都發生翹曲或 凹凸，惟如此地藉由將進行檢查的電路圖案的周邊保持在 工作台20，20 /來矯正翹曲或凹凸，而可將進行檢查的電 路的配線圖案部分維持在攝影裝置的焦點深度內。 在該狀態下，透射照明光從工作台20與20 >之間照射 至TAB卷帶1。攝影手段是藉由顯像透過TAB卷帶的光， 而攝影到配線圖案的透射照明畫像。 裝置的控制部是比較攝影的配線圖案的透射照明畫像 ，及事先記憶的基準圖案來判定良否。 結果配線圖案的攝影，藉由夾具驅動部15使得夾具用 -14- (12) (12)1323343 上構件13上昇’而開放TAB卷帶I的邊緣。又，使得轉換 閥32被轉換’而在工作台20，20<替代真空供給著空氣。 空氣從工作台20’ 20 —被吹出’而再開始主動滾子所致的 TAB卷帶的搬運。 又’將組合如上述的工件抗拉機構與工作台的工件保 持手段，設置複數在一台檢查裝置，就可同時地檢查TAB 卷帶的複數部位的電路圖案。 以上，本實施例是作爲進行檢查的帶狀工件以TAB卷 帶作爲例子加以說明，惟其以外的帶狀工件，例如欲進行 檢查可撓性印刷電路（F P C )基板時，也可同樣地加以適 用。 【圖式簡單說明】 第1圖是表示工件抗拉機構與工作台的立體圖。 第2圖是表示從第1圖的工件的搬運方向所觀看的斷面 圖。 第3圖是表示從第1圖的工件的寬度方向所觀看的斷面 圖。 第4圖是表示從第】圖的上方向所觀看的俯視圖。 第5 (a)圖至第5(c)圖是表示工作台與支柱的詳細 構成的圖式。 第6圖是表示更換成長邊較長的工作台時的工件的保 持手段的狀態的斷面圖。 第7圖是表示更換成長邊較長的工作台時的工件的保 -15- (13) (13)1323343 持手段的狀態的俯視圖。 第8圖是表示形成有圖案的TAB卷帶的例子的圖式。 第9圖是表示藉由習知的透射照明進行圖案檢查的裝 置的槪略構成的圖式。 【主要元件符號說明】 1 > 1 " : TAB 卷帶 1 1 :第一夾具部 1 2 :第二夾具部 1 3 :夾具用上構件 1 4 :夾具用下構件 1 5 :夾具驅動部 1 6 :線性導件 2 0，21 一 ：工作台 2 1 :支柱 22:真空吸附孔或槽 2 3 :定位銷 24 :固定螺絲 25:長邊較長的工作台 30 :真空泵 3 1 :壓縮空氣 3 2 :轉換閥 41，4 2 :夾持面 5 0 :卷帶抗拉機構 -16- (14) (14)1323343 51 :夾具 5 2 :透射照明裝置 5 3 :攝影裝置 5 4 :控制部 5 5 :主資料 10 1： TAB 卷帶 102 :樹脂薄膜 103 :貫通孔 1 1 〇 :元件孔 1 1 1 :配線圖案1323343 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a device for inspecting a pattern of a strip-shaped workpiece, for example, a TAB (Tape Automated Bonding) volume caused by a tape carrier method A pattern inspection device that automatically inspects a pattern by comparing with a reference pattern by photographing a pattern of wiring or the like formed on a TAB tape by photographing illumination. , or to make the bow of the foot to be more comfortable than the high. The step-by-step product is highly conducive to the small and the first is the first line of the first half of the technique. It is advantageous to use miniaturization. It uses a semiconductor wafer and a TAB set in a film. The method of connecting most of the wires of the tape. Fig. 8 is a view showing an example of a patterned TAB tape. In the same figure, the TAB tape 101 is on the resin film 102 having a thickness of about 20 to 15 〇em (more preferably 25 to 75 #m), except for the edges on both sides in the width direction of the through hole 103. A metal foil such as copper foil is adhered, and the metal foil (copper foil) is processed by exposure and etching to form a pattern of wiring or the like. As in the figure, in the TAB tape 101, the same circuit is continuously produced as a part. The inner white rectangle of the same figure is an opening (component hole) 110 on which a semiconductor wafer is mounted, and reference numeral 111 is a wiring pattern of the circuit. In the process of such a TAB tape 1 011, it is necessary to check whether the wiring pattern 1 1 1 is correctly formed and inspect it by the pattern inspection device. -4 - (3) 1323343 The schematic structure of the device. 5 2 is a transmissive illumination device that illuminates the illumination light from below the pattern of the TAB tape 1 〇 1 . 53 is a photographing device of a CCD camera, and photographs a pattern of light transmitted through the TAB' tape 1〇1 from the side opposite to the side on the side where the illumination light is irradiated on the TAB tape 101 (above the figure). - The transmitted illumination image of the pattern photographed by the photographing device 53 is transmitted to the control unit 54, and the control unit 54 compares the reference pattern 55 of the pattern that has been memorized in advance to determine whether or not the image is good or bad. When the transmission illumination image is photographed by the photographing device 53, the photographed image is blurred and cannot be inspected. Therefore, it is necessary to maintain the TAB tape 101 to be inspected within the depth of focus of the photographing device 53, but the TAB tape 101 is a thinner one that is bent by its own weight, or an exposure, development, and etching process for forming a wiring pattern. Warpage or bumps can occur. Therefore, it is necessary to correct the occurrence of bending or warping of the web to maintain the plane, and if it is to be inspected by transmission illumination, the opaque table is placed in the optical path of the transmissive illumination without the φ method. Therefore, in the apparatus shown in Patent Document 1, the pulling direction of the winding belt is applied by the mechanism for conveying the winding tape, and the width direction of the winding tape (the direction perpendicular to the conveying direction) is clamped. The tape edge of the tape and the tape tension mechanism caused by the width direction apply a pulling force to maintain the portion of the TAB tape 101 to be in the depth of focus of the photographing device 53. Patent Document 1: Japanese Patent Laid-Open No. 2004-28597 [Draft] -6- (5) (5) 13233343 A pattern inspection device belonging to a device for performing pattern inspection by transmission illumination, even a wide workpiece or warped The curved or concave-convex workpiece can also maintain the portion to be inspected within the depth of focus of the photographing device, and during transport, the edge of the workpiece does not fall off from the workpiece tensile mechanism that is pulled by the edge. The above problems are solved as described below in the present invention. A pattern inspection device which belongs to a pattern of a strip-shaped workpiece formed in a film shape, which is imaged by transmitting illumination light, and inspects the appearance of the pattern, and is characterized in that it includes: facing the strip-shaped workpiece A workpiece tensile mechanism that imparts a tensile force in a width direction, and a table that adsorbs and holds the above-described belt-shaped workpiece. The table has a rectangular shape in which the long side corresponds to the width of the strip-shaped workpiece and the short side corresponds to the longitudinal direction, and a plural number is set. On the surface of the table, a vacuum suction hole or groove for adsorbing and holding the workpiece is formed. At the time of the photographing pattern, the upstream side and the downstream side of the conveyance direction of the inspection portion of the strip-shaped workpiece to which the tensile force is applied by the workpiece tensile mechanism are adsorbed and held on the table. Therefore, even if the belt-like workpiece is warped or uneven, the inspection portion can be maintained within the depth of focus of the photographing device. Further, the table is provided between the workpiece tensile mechanisms located on both sides of the strip-shaped workpiece in accordance with the length of the length of the strip-shaped workpiece in accordance with the pattern to be inspected, so that the inspection is performed from the table. Between the worktable and the worktable, the illuminating light can be irradiated. Further, the workbench is made replaceable. If the length of the long side is not the same, the width of the strip-shaped workpiece according to the inspection is replaced. (6) (6) 13233343 It is also possible to inspect strip-shaped workpieces of different widths. Further, a vacuum source for sucking and holding the strip-shaped workpiece and an air source for supplying air are connected to the table, and the vacuum and air supplied to the table are switched by the switching valve. When the strip-shaped workpiece is conveyed, the vacuum supplied to the table is converted into air by a switching valve, and air is blown from the vacuum suction hole or the groove of the table. Therefore, even in a wide workpiece, the bending of the workpiece can be prevented by the self-weight during the conveyance of the workpiece, and the edge of the workpiece can be prevented from falling off from the workpiece tensile mechanism. In addition, the back surface of the strip-shaped workpiece rubs against the surface of the table to prevent injury to the back of the workpiece. In the present invention, the following effects can be obtained. Providing a table for sucking and holding the strip-shaped workpiece, so that the strip-shaped workpiece given the tensile force by the workpiece tensile mechanism is adsorbed and held on the workpiece, and even if the strip-shaped workpiece is warped or uneven, the portion of the pattern can be inspected. The depth of focus of the photographic device. The table has a long side corresponding to the width direction of the strip-shaped workpiece, and the short side corresponds to the length direction. Therefore, the transmission can be transmitted by setting a plurality of intervals along the length direction of the strip-shaped workpiece corresponding to the pattern to be inspected. Illumination light is applied to the strip-shaped workpiece from between the workbench and the workbench. In addition, the 'workbench is replaceable'. Therefore, if the workbench with different lengths of the long sides is prepared, the strip-shaped workpieces having different widths can be inspected by one device by replacing the width of the strip-shaped workpieces for inspection. . In addition, 'the vacuum source that is used to adsorb and hold the strip-shaped workpiece and the air source that supplies the air' is connected to the (7) (7)1323343 vacuum and air supplied to the table by the switching valve, and therefore, in the carrying belt In the case of a workpiece, by blowing air from the table, bending due to the weight of the workpiece can be prevented, and the edge of the workpiece can be prevented from falling off from the workpiece tensile mechanism. In addition, the back surface of the strip-shaped workpiece rubs against the surface of the table to prevent injury to the back of the workpiece. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. 1 is a perspective view showing a workpiece tensile mechanism 10 and a table 20 which are workpiece holding means of an inspection device, and FIG. 2 is a cross-sectional view seen from an arrow A (transport of a workpiece) in the first drawing; Fig. 3 is a cross-sectional view as seen from the direction of the arrow B (width of the workpiece) in Fig. 1; and Fig. 4 is a plan view showing the arrow C (upper) in the first drawing. Further, the TAB tape 1 in which the strip-shaped workpiece having the circuit pattern to be inspected is formed is indicated by a broken line in FIGS. 1 and 2, and in the direction indicated by an arrow G in FIG. The combination of the active roller and the brake roller (not shown) is carried. In these figures, 11, 12 are the first and second clamp portions for holding the TAB tape 1; they are provided on both sides of the TAB tape 1 of the strip-shaped workpiece. 1 3, 1 4 is a lower member for a jig and a lower member for a jig, and the edge of the TAB tape 1 is sandwiched by the sandwiching surface 41 of the upper member 13 for the jig and the clamping surface 42 of the lower member 14 for the jig. Reference numeral 15 denotes a jig driving unit that moves the jig upper member 13 up and down. Thereby, the edge of the TAB tape 1 is clamped or opened. *10- (9) 1323343 Further, the position in the height direction of the surface of the table 20 is supported by the support 21 as the focus position of the photographing device (not shown) that photographs the transmissive transparent image of the TAB tape 1. Fig. 5 is a cross-sectional view showing the detailed configuration of the support post 20 of the table 20, as viewed from the direction in which the TAB tape is conveyed. - As shown in Fig. 5(a), the table 20 is positioned by the positioning pin 23, and is fixed to the column 21 by the fixing screw 24. As described above, a vacuum suction hole or groove 22 is formed on the surface of the table 20, and a vacuum for supplying and holding the TAB tape 1 is supplied via the pillar 21'. As shown in the fifth (b) diagram, the table 20 is Removable, as shown in Figure 5(c), 'replaceable long benches 25 corresponding to the wide TAB tapes. Fig. 6 and Fig. 7 are views showing a state of the holding means of the workpiece when the table 25 having a long growth side is replaced. Fig. 6 is a cross-sectional view as seen from the same direction as Fig. 3, and Fig. 7 is a plan view seen from the same direction as Fig. 4. The second jig portion 12 is moved in the direction of the arrow in the figure, and the space between the first jig portion 11 is extended, and the table 25 corresponding to the wide TAB tape is attached to the stay 21. Returning to the fifth (c) diagram, the vacuum is supplied to the piping of the table 20 or 25 via the support 2, and the vacuum pump 3 is connected not only to the vacuum source, but also to the compressed air 31 of the air source. The control unit can supply air to the table 2 or 25 by converting the switching valve 32, and when the air is supplied to -12-(10) (10) 1123343, the vacuum suction hole of the table 20 or 25 Or the air blown by the groove 22 will hereinafter describe the operation of the workpiece tensile mechanism 10 and the table 20. The second clamp portion 12 of the workpiece tensile mechanism 10 is moved on the linear guide 16 in accordance with the width of the TAB tape 1 to be inspected, and the interval from the first clamp portion 11 is set. That is, as shown in Fig. 2, the edge portion of the TAB tape 1 is located between the clamping surface 41 of the upper member 13 for the jig and the clamping surface 42 of the lower member 14 for the jig, but is not made to touch the jig. The spacing of the side faces 43 of the lower stage of the lower member 14 is used. As shown in Fig. 6, when the tape width is widened, the second jig portion 1 2 is moved at intervals. The TAB tape 1 is conveyed in the direction of the arrow G of Fig. 1 by the combination of the active roller and the brake roller as shown. At this time, the compressed air 31 is supplied from the air source at the table 2, 20, and the air is blown out from the vacuum suction hole or the groove 22. Thereby, the TAB tape 1 is for the table 20, 2 〇 / float 〇 Fig. 2 is a view showing the state in which the TAB tape 1 floats on the table 20 by blowing air. As shown in the figure, the TAB tape 1 is floated for the table 20 'at the same time, the edge portion of the TAB tape is also floated on the clamping face 42 of the lower member 14 for the jig" as such by 'from the table 20 , 2 〇 / blow out the air, and the force of the TAB tape 1 is lifted, the bending caused by its own weight does not occur, so the edge of the TAB tape is held in the first and second clamp portions η, The gap between the clamping surface 41 of the upper member 13 for the jig 12 and the clamping surface 42 of the lower member μ for the jig is not removed from the space. -13- (11) (11)1323343 When the portion of the wiring pattern of the circuit to be inspected is transported between the tables 20, 20 >, the TAB tape 1 is stopped, and the roller and the brake are rolled by the active roller and the brake roller. A tensile force is applied to the length direction of the TAB tape. On the one hand, with respect to the width direction of the web, the jig upper member 13 is lowered by the jig driving portion 15, and the edge of the web is sandwiched by the gripping surface 41 of the upper member 13 of the jig and the lower member 14 for the jig. The holding surface 42 is clamped so that the second clamp portion 12 is applied with a pulling force by moving the linear guide 16 toward the tape width direction (the arrow P direction of Fig. 2). At the table 20, 2〇/, the switching valve 32 is switched, and the vacuum is supplied from the vacuum pump 30 instead of the compressed air, and the suction is maintained in the longitudinal direction and the width direction to perform the inspection of the TAB tape 1 . The peripheral portion of the circuit, that is, the portion on the upstream side and the downstream side in the conveyance direction of the inspection portion is adsorbed and held. Thereby, the TAB tape 1 is held in a plane. As described above, the TAB tape is warped or unevenly formed by various processes such as exposure, development, etching, etc., but is corrected by holding the periphery of the circuit pattern to be inspected on the table 20, 20/. The warpage or the unevenness is maintained, and the portion of the wiring pattern of the circuit to be inspected can be maintained within the depth of focus of the photographing device. In this state, the transmitted illumination light is irradiated from the stages 20 and 20 > to the TAB tape 1. The photographing means photographs a transmission illumination image of a wiring pattern by developing light transmitted through the TAB. The control unit of the device determines the quality of the light by comparing the transmitted illumination image of the printed wiring pattern with the reference pattern stored in advance. As a result of the photographing of the wiring pattern, the jig driving portion 15 causes the jig to raise the edge of the TAB web 1 by -14-(12) (12)1323343 upper member 13. Further, the switching valve 32 is caused to be switched "while the air is supplied to the table 20, 20" instead of the vacuum. The air is blown out from the table 20' 20 and the handling of the TAB tape by the active roller is resumed. Further, by combining the workpiece holding means of the above-described workpiece and the workpiece holding means of the table, a plurality of inspection means can be provided, and the circuit pattern of the plurality of portions of the TAB tape can be simultaneously inspected. As described above, in the present embodiment, the TAB tape is taken as an example of the tape-shaped workpiece to be inspected, but the tape-shaped workpiece other than the tape-shaped workpiece can be similarly applied, for example, when the flexible printed circuit (FPC) substrate is to be inspected. . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a workpiece tensile mechanism and a table. Fig. 2 is a cross-sectional view showing the direction in which the workpiece of Fig. 1 is conveyed. Fig. 3 is a cross-sectional view showing the workpiece in the width direction of Fig. 1. Fig. 4 is a plan view showing the upper direction of the first drawing. Fig. 5(a) to Fig. 5(c) are diagrams showing the detailed configuration of the table and the pillar. Fig. 6 is a cross-sectional view showing a state in which a workpiece holding means is replaced when a table having a long growth side is replaced. Fig. 7 is a plan view showing a state in which the holding means of the workpiece -15-(13)(13)1323343 is replaced when the table having a long growth side is replaced. Fig. 8 is a view showing an example of a patterned TAB tape. Fig. 9 is a view showing a schematic configuration of a device for performing pattern inspection by conventional transmission illumination. [Description of main component symbols] 1 > 1 " : TAB Tape 1 1 : First clamp portion 1 2 : Second clamp portion 1 3 : Upper member for clamp 1 4 : Lower member for clamp 1 5 : Fixture drive unit 1 6 : Linear guide 2 0, 21 One: Workbench 2 1 : Pillar 22: Vacuum suction hole or groove 2 3 : Locating pin 24: Fixing screw 25: Long bench with long side 30: Vacuum pump 3 1 : Compression Air 3 2 : switching valve 41, 4 2 : clamping surface 5 0 : winding tension mechanism - 16 - (14) (14) 13233343 51 : clamp 5 2 : transmission illumination device 5 3 : photography device 5 4 : control Part 5 5 : Main data 10 1: TAB Tape 102 : Resin film 103 : Through hole 1 1 〇: Element hole 1 1 1 : Wiring pattern
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