JP5117243B2 - Exposure equipment - Google Patents

Description

  The present invention relates to an exposure apparatus and an exposure method for conveying a roll film-shaped tape from a supply side to an exposure unit and conveying the tape exposed at the exposure unit to a winding side.

  In general, the electric circuit base material of an electronic circuit board (printed circuit board) used for various small electric devices such as a mobile phone and a mobile device is a thin and high precision film tape (hereinafter referred to as “ "Tape").

  Such a tape material tends to be thinned with a thickness of about 0.1 mm to 0.06 mm. Furthermore, recently, a very long tape having a thickness of 0.05 mm or less, a width of 100 to 250 mm, and a length of 700 m is thin and wide. Since it is a long tape, it is usually handled by being wound into a roll.

  When an electronic circuit board is manufactured on such a roll-shaped tape, the roll-shaped tape may be slackened while being sent to the exposure unit one frame at a time, or near the perforation hole of the strip-shaped work W. The tape may be wrinkled. Even if an attempt is made to vacuum-adsorb the tape in this state, the tape cannot be adsorbed to the surface of the stage due to wrinkling of the tape. As an exposure apparatus that solves the problem, there is a technique disclosed in Patent Document 1.

The film exposure apparatus disclosed in Patent Document 1 is provided with a tape pressing mechanism that presses the edge portion of the tape from both sides in the tape width direction in order to ensure vacuum suction.
JP 2005-274670 A

  However, in the film exposure apparatus disclosed in Patent Document 1, there is a problem that the pressing plate is replaced when the tape width changes, and a large tape pressing mechanism is arranged in a narrow work area between the projection optical system and the vacuum stage. There is a problem of having to.

  Therefore, the present invention was devised in view of the above problems, and even when the tape width is changed, the operation of replacing the pressing plate is not required, and the tape is pressed by pressing the tape near the alignment mark. The purpose is to make it possible to observe the alignment mark on the tape.

An exposure apparatus according to a first aspect is formed on an object to be exposed in an exposure apparatus that sends a roll film-shaped object having a predetermined width onto an exposure stage and exposes a circuit pattern of a mask onto the object to be exposed . An image recognition unit for observing the image of the first alignment mark and the image of the second alignment mark formed on the mask, and a pressing plate for pressing the object to be exposed supported by the pressing plate support unit attached to the image recognition unit; The alignment camera includes a first moving unit that moves the image recognition unit and the pressing plate at the same time, and the first alignment mark and the second alignment are based on the image observed by the image recognition unit. When the mark matches, the first moving unit is driven to retract the image recognition unit and the pressing plate from the object to be exposed.
With this configuration, the first moving unit can simultaneously move the presser plate and the image recognition unit, so that the time required for alignment after the entire surface of the object to be exposed is adsorbed can be shortened. Moreover, since it is not necessary to provide a separate moving part, manufacturing cost can be reduced.

In the exposure apparatus according to the second aspect , the first moving unit moves the image recognition unit in the width direction of the object to be exposed, thereby simultaneously moving the pressing plate.

The exposure apparatus of the third aspect further includes a second moving unit that causes the alignment camera to move the pressing plate in a direction perpendicular to the object to be exposed.

In the exposure apparatus according to the fourth aspect , the first moving unit rotates the pressing plate and the image recognition unit about the conveyance direction of the object to be exposed. Here, the first moving unit can move the image recognition unit and the pressing plate by changing the size of the rotation radius.

In the exposure apparatus according to the fifth aspect , the pressing plate has an observation window through which the first alignment mark and the second alignment mark can be observed. Here, it is possible to form the observation window by forming the pressing plate with a transparent material.

  The exposure apparatus according to the present invention can respond flexibly in a short time even when changing the width of the tape, and at the same time, alignment marks can be aligned with high accuracy, so that mask pattern overlay is also improved. Exposure can be performed.

Embodiment 1
<Configuration of exposure apparatus>
A mode for carrying out the invention will be described taking a case of a projection exposure apparatus as an example.
FIG. 1 is a schematic view showing a projection exposure apparatus 100 according to an embodiment of the present invention. The projection exposure apparatus 100 according to the present invention transports a film tape (hereinafter referred to as a tape) T and exposes a circuit pattern drawn on a photomask M on the tape T.

  The tape T is made of a flexible substrate used as an electronic circuit substrate or a film tape material. The tape T is formed of a thin and wide member having a thickness of 0.05 mm or less, a width of 100 to 250 mm, and a length of 700 m, for example, and is wound around the supply reel rotating unit 61. There are a tape T on which perforation holes (not shown) are formed and a tape T having no perforation holes on the left and right edges of the tape T. Note that a photoresist suitable for the mercury lamp 10 is coated on the surface of the tape T in advance.

  The projection exposure apparatus 100 intermittently conveys the tape T to the exposure stage 50 provided in the vertical direction frame by frame. The projection exposure apparatus 100 exposes the light from the mercury lamp 10 to the tape T conveyed frame by frame through the circuit pattern of the photomask M one block at a time.

  The projection exposure apparatus 100 includes a mercury lamp 10, a reflecting mirror 14, a fly-eye lens 16, a condenser lens 18, a photomask M, and a projection optical system 20. The mercury lamp 10 emits light including ultraviolet light having a wavelength of 365 nm. In addition to the mercury lamp 10, an ultraviolet laser or an ultraviolet LED may be used. An elliptical mirror 12 is arranged so as to cover the rear surface of the mercury lamp 10. The reflecting mirror 14 reflects the light emitted from the mercury lamp 10 toward the photomask M.

  The fly-eye lens 16 has a large number of positive lens elements arranged vertically and horizontally and densely so that the central axis extends along the optical axis. The fly-eye lens 16 plays a role of uniformly adjusting the illuminance distribution of light from the reflecting mirror 14.

  The light flux through the condenser lens 18 illuminates the photomask M on which the circuit pattern is formed in a superimposed manner. The light beam illuminated by the exposure light and transmitted through the photomask M is directed to the projection optical system 20. A mask mark MM is formed around the circuit pattern of the photomask M, and is used for alignment between the tape T and the photomask M.

  The photomask M is held on a mask stage (not shown) and can move in a direction perpendicular to the optical axis of the projection optical system 20. As the projection optical system 20, a refraction type constituted by only a lens system, a reflection type constituted by a combination of reflecting mirrors, a catadioptric type obtained by combining a lens and a reflecting mirror, or the like can be applied. The projection optical system 20 can be applied to any of an enlargement optical system, an equal magnification optical system, or a reduction optical system.

  An exposure stage 50 is disposed at the focal position of the projection optical system 20. The exposure stage 50 sucks and holds the tape T by vacuum suction, and can move in the Z-axis direction by an exposure stage drive mechanism (not shown). The exposure stage 50 moves in the X-axis direction by detecting the focal position of the tape T by a focus detection device (not shown). In this way, the light beam emitted from the projection optical system 20 forms an image on the tape T. That is, the circuit pattern of the photomask M is imaged on the tape T, and the circuit pattern is transferred onto the tape T by the photoresist applied on the tape T.

The projection exposure apparatus 100 has a tape transport system 60 arranged on the left side of FIG. 1 so that the tape T is fed onto the exposure stage 50.
The projection exposure apparatus 100 also includes an alignment drawing apparatus 30 that draws alignment marks at predetermined locations on the tape T, and an alignment camera 40 that is disposed between the projection optical system 20 and the exposure stage 50.

<Configuration of tape transport system>
FIG. 2 is a schematic perspective view showing the tape transport system 60 according to the embodiment of the present invention.
The tape transport system 60 includes a supply reel rotating unit 61 that rotates in the supply reel 80 by being mounted in a central reel hole of the supply reel 80 around which the tape T is wound, and a supply-side first guide that guides the tape T to be transported. One guide roller 62 and a supply-side second guide roller 63 are provided.

  Further, the projection exposure apparatus 100 is arranged at the upper and lower positions of the exposure stage 50, and includes a first conveyance roller 64 and a second conveyance roller 66 for conveying the tape T, a winding side first guide roller 67, and a winding side first roller. A two-guide roller 68 and a take-up reel rotating unit 69 that rotates the take-up reel 90 that takes up the tape T are provided. Furthermore, the projection exposure apparatus 100 includes a supply side relaxation absorption part D1 and a winding side relaxation absorption part D2 that absorb the slackness of the tape T being conveyed.

  The supply reel rotating unit 61 is a member for supporting the bobbin-shaped supply reel 80 around which the tape T, which is the material of the electronic circuit board, is wound, and feeding the tape T. The reel hole of the supply reel 80 is mounted. Made of metal shaft. This metal shaft is rotated by a drive motor (not shown).

  The supply reel 80 is made of, for example, a winding portion having a diameter of 750 mm, and has flange portions 81 on the left and right edges. The tape T wound around the supply reel 80 is pulled by the first conveying roller 64, thereby rotating with the supply reel rotating portion 61 and being sent out to the supply-side first guide roller 62.

  The supply-side first guide roller 62 is an auxiliary roller wound around so that the tape T wound around the supply reel 80 is sent out toward the supply-side relaxation absorbing portion D1, and is arranged to be rotatable around the shaft portion. It is installed. In the supply side slack absorbing portion D1, the tape T fed from the supply reel rotating portion 61 is transported between the supply reel rotating portion 61 and the supply side first guide roller 62, and between the supply side second guide roller 63 and the first transport. In order to prevent an excessive load and slack from occurring when transported between the rollers 64, for example, it is a device that provides tension by slacking in a U shape by its own weight.

  The supply-side second guide roller 63 sends a tape position adjusting mechanism capable of feeding the tape T from the supply-side relaxation absorbing portion D1 toward the first transport roller 64 and moving the tape T in the width direction (arrow ar). It is a provided roller. The supply-side second guide roller 63 includes a second guide roller motor 63M and a bearing (not shown).

  The second guide roller motor 63M can adjust the position in the width direction of the tape T by moving the supply-side second guide roller 63 in the axial direction of the arrow ar (the width direction of the tape T) while rotating. The second guide roller motor 63M can rotate forward and reverse to adjust the tension of the tape T between the supply-side second guide roller 63 and a first transport roller 64 described later.

  The supply-side second guide roller 63 configured as described above rotates the second guide roller motor 63M to move the position of the tape T in the Y direction and adjust the alignment to an appropriate position. The alignment mark can be accurately positioned in the apparatus 30.

  The first transport roller 64 is a roller that transports the tape T from the supply-side second guide roller 63 toward the exposure stage 50, and the first transport roller 64 is intermittently driven to rotate by the transport roller motor 64M. Transport T one frame at a time. The first transport roller 64 has a suction hole 64a for sucking the tape T to the surface of the first transport roller 64, and a vacuum device (not shown) for sucking the tape T through the suction hole 64a is connected to the first transport roller 64. Has been.

  The first transport roller 64 is disposed below the supply-side second guide roller 63 in the z direction, and is disposed directly above the exposure stage 50 so that the tape T is parallel to the surface of the exposure stage 50. ing.

  The second transport roller 66 is a roller that is disposed on the downstream side in the transport direction of the exposure stage 50 and transports the tape T exposed on the exposure stage 50 to the winding side, and the first transport roller 64 and the exposure stage 50. It is arranged just below. The second conveyance roller 66 has the same structure as the first conveyance roller 64, and the second conveyance roller 66 has an adsorption hole 66 a that adsorbs the tape T to the roller surface of the second conveyance roller 66.

  The winding-side first guide roller 67 is a roller that is arranged on the downstream side in the transport direction of the second transport roller 66 and sends the tape T to the winding-side relaxation absorbing portion D2. The winding-side first guide roller 67 has the same structure as the supply-side second guide roller 63, and includes a first guide motor 67M for adjusting the tape position.

  The take-up side second guide roller 68 is an auxiliary roller for guiding the tape T wound around the take-up reel 90 so as to be conveyed toward the take-up reel 90, and the supply-side first guide roller 68 62 has the same structure.

  The take-up reel rotating unit 69 supports the take-up reel 90 that takes up the tape T that has been exposed on the exposure stage 50, and is rotatable about a shaft portion on which the shaft tube portion of the take-up reel 90 is mounted. It is arranged and driven by a drive motor (not shown).

<Alignment drawing device and alignment camera>
FIG. 3 is a schematic perspective view showing the alignment drawing device 30 and the alignment camera 40 according to the embodiment of the present invention.

<< Configuration of Alignment Drawing Device 30 >>
The alignment drawing apparatus 30 includes end surface detectors 31a and 31b for observing the end surface of the tape T, alignment mark photomasks 33a and 33b, and ultraviolet light sources 35a, 35b, 35c, and 35d.

  The end face detector 31 is composed of a line CCD, a two-dimensional CCD, or a CMOS camera, and receives reflected light or transmitted light from the tape T to detect the end face of the tape T. The end face detector 31 has a first end face sensor 31a and a second end face sensor 31b at least apart in the sending direction in order to detect the inclination of the tape T in the sending direction. These are positioned and fixed to a frame (not shown) or the like. In addition, if it is a camera etc. which has a visual field which can observe the whole width direction of the tape T and can measure the position and inclination of the end surface of the tape T, it can be used instead of the end surface detector 31.

  The alignment mark photomask 33 is a photomask in which an alignment mark pattern (chrome mark BM) is made of chromium or the like on a quartz glass plate. Quartz glass is excellent as a mask material because it has a low thermal expansion coefficient and high ultraviolet transmittance, and chrome is suitable because it has good adhesion to quartz glass and is excellent in shielding ultraviolet rays and has little secular change. The alignment mark photomask 33 can move in the Y direction, and the first alignment mark photomask 33a having the two chrome marks BM and the second alignment mark photomask having the two chrome marks BM so as to be easily controlled. And a mask 33b.

  As the ultraviolet light source 35, an LED (UVLED) that emits ultraviolet light that is sensitized by the photoresist applied to the tape T can be used. Light guided by the optical fiber from the mercury lamp 10 may be used, or light guided by the optical fiber from a separately prepared UV laser light source may be used. The ultraviolet light source 35 includes four UV LEDs 35a, 35b, 35c, and 35d that match the number of chrome marks BM.

  Alignment marks drawn on the alignment mark photomask 33 on the photoresist applied to the surface of the tape T by being irradiated with ultraviolet rays from the ultraviolet light source 35 based on the position of the tape T grasped by the signal from the end face detector 31. An image is drawn. The alignment mark AM drawn on the tape T is before development and is generally called a latent image. That is, when the alignment mark image is exposed to the photoresist on the tape T, the exposed portion is colored in a color different from the color of the photoresist, and can be recognized as the alignment mark AM.

  The alignment marks AM may be matched with the number of mask marks MM formed on the photomask M, but at least two alignment marks AM are required around one circuit pattern. If six alignment marks AM are to be formed, a new alignment mark photomask 33 is prepared, or the alignment mark AM is drawn each time the tape T feed amount is reduced to about half of one frame. To.

  As shown in FIG. 2, the alignment drawing device 30 is disposed between the supply-side second guide roller 63 and the first transport roller 64. An enlarged view of the alignment drawing device 30 is shown in FIG. The alignment drawing device 30 may be disposed between the first transport roller 64 and the exposure stage 50.

<< Configuration of Alignment Camera 40 >>
The alignment camera 40 shown in FIG. 3 includes an imaging camera unit 41 and a pressing plate 42, and has a structure that can be moved by the alignment camera movable unit 43 and the pressing plate movable unit 44. In this embodiment, the alignment camera 40 is installed in four places, and is arrange | positioned facing the width direction of the tape T. FIG. The alignment camera 40a and the alignment camera 40b are installed on the first conveyance roller 64 side, and the alignment camera 40c and the alignment camera 40d are installed on the second conveyance roller 66 side. The alignment camera movable part 43 and the pressing plate movable part 44 will be described later.

  The alignment camera 40 detects a latent image of the alignment mark AM formed by the alignment drawing apparatus 30 and further detects a projection image of the mask mark MM formed around the photomask M that has passed through the projection optical system 20. Alignment mark AM and mask mark MM are detected by a plurality of alignment cameras 40, and photomask M shown in FIG. 1 is moved on the YZ plane based on the detection signals. When the alignment mark AM matches the mask mark MM, the alignment camera 40 is retracted from the tape T. Thereafter, the shutter (not shown) in the region of the photomask M that has blocked the light source of the mercury lamp 10 is opened, so that the circuit pattern of the photomask M is transferred onto the tape T.

  When the alignment mark AM and the mask mark MM are misaligned, the photomask M is not moved, but is moved in the Y axis direction, the Z axis direction, and the θ direction by an exposure stage driving mechanism (not shown). By adjusting the position of the tape T, the plurality of alignment marks AM and the mask mark MM can be matched.

<Configuration of Alignment Camera Movable Unit 43, Presser Plate Movable Unit 44, and Exposure Stage 50>
FIG. 4 is a top view of the alignment camera 40a and the alignment camera 40b as viewed from the first conveying roller 64 side. 4 also shows the internal structure of the imaging camera unit 41 so that the configuration of the alignment camera 40 can be seen. Since the alignment camera 40a and the alignment camera 40b have the same configuration below, the alignment camera 40a will be described as a representative. An alignment camera 40c and an alignment camera 40d (not shown) have the same structure.

The imaging camera unit 41 includes a camera lens 51, a visible light illumination unit 52 such as an LED, a half mirror 53, and an imaging unit 54. The illumination unit 52 illuminates the tape T from around the camera lens 51. The imaging unit 54 is a charge-coupled device (CCD) or complementary (CMOS).
An image sensor such as Metal Oxide Semiconductor) is used.

The holding plate 42 is formed of an elastic member such as a plate spring, and is joined to the holding plate support portion 45. Details of the pressing plate 42 will be described with reference to FIG. 5A or 5B.
The alignment camera movable unit 43 is joined to the imaging camera unit 41, and includes a stepping motor 43M and a drive motor 45M inside. Instead of the stepping motor 43M, a driving device with easy positioning control may be used. A driving device such as an air cylinder may be used instead of the driving motor 45M.

  A guide rail 43L is installed inside the alignment camera movable portion 43. Therefore, the imaging camera unit 41 is movable in the Y-axis direction (arrow 43ar direction) by the rotation of the stepping motor 43M of the holding plate movable unit 44. By using the stepping motor 43M, positioning can be easily performed according to the width of the tape T.

  The pressing plate support portion 45 is made of, for example, a shaft that is supported by a bearing (not shown), and has a clamp portion 45C that clamps the pressing plate 42 at the tip. The clamp portion 45C of the holding plate support portion 45 has a structure that can be easily replaced depending on the position (Y direction) of the alignment mark AM. As the motor 45M installed inside the pressing plate movable portion 44 rotates, the pressing plate support portion 45 moves in the X-axis direction (arrow 45ar direction). When the pressing plate support 45 moves to a predetermined position, the pressing plate 42 can press the tape T with an appropriate pressure.

  The imaging camera unit 41 and the pressing plate 42 are simultaneously moved in the direction of the arrow 43ar by the rotation of 43M. When detecting the alignment mark AM and the mask mark MM and when pressing the end of the tape T, the imaging camera unit 41 and the pressing plate 42 move onto the tape T of the exposure stage 50 to transfer the circuit pattern of the photomask M. In this case, the exposure stage 50 can be retracted from the tape T.

  Since the alignment camera 40a can freely move in the direction of the arrow 43ar, the tape width can be changed by changing the set value even when the width of the tape T or the position of the alignment mark AM on the tape (Y direction) is changed. The imaging camera unit 41 and the holding plate 42 can be moved to the position of the alignment mark corresponding to.

  On the surface of the exposure stage 50, a suction hole 55 for vacuum-sucking the tape T is formed. The exposure stage 50 is provided with an air discharge port 56, and air is sucked by a vacuum pump (not shown) so that a negative pressure is applied to the suction hole 55 formed in the exposure stage 50, whereby the tape T is sucked. The

  The tape T between the first transport roller 64 and the second transport roller 66 is tensioned by being pulled by the first transport roller 64 and the second transport roller 66. The tensioned tape T is deformed due to the difference in easiness of elongation between the center portion and the end portion in the width direction of the tape T. It is also deformed by a metal film formed on the tape T. That is, the end of the tape T is turned up in the vicinity of the exposure stage 50 like the tape T shown in FIG. 4 and has an arcuate shape when viewed from the long axis direction of the tape T. Even if the arcuate tape T is sucked through the suction hole 55 of the exposure stage 50, the center of the tape T in the width direction is only sucked and it is difficult to suck the end. Therefore, the entire width of the tape T is attracted to the exposure stage 50 by pressing the end of the tape T with the pressing plate 42 and assisting the suction of the end of the tape T. The tape T once adsorbed to the exposure stage 50 does not peel off even if the pressure of the pressing plate 42 is released unless the suction of the vacuum pump is stopped.

  With the tape T completely attracted to the surface of the exposure stage 50, the alignment mask 40 aligns the photomask M and the tape T, and the circuit pattern of the photomask M is exposed on the tape T. Since the surface of the exposure stage 50 is vertical in the Z direction, when the vacuum suction of the tape T is released, the surface of the exposure stage 50 is detached from the surface of the exposure stage 50 due to its own weight.

  The alignment mark AM formed on the tape T illuminates the alignment mark AM with the illumination light from the illumination unit 52 through the observation window 42W of the pressing plate 42 as shown by the left alignment camera 40a in FIG. The latent image of AM appears. The reflected light AM1 from the latent image that has emerged passes through the camera lens 51, is reflected by the half mirror 53, and is detected by the imaging unit 54.

  On the other hand, the incident light MMI of the mask mark MM enters from the X-axis direction, passes through the half mirror 53 and the camera lens 51 of the alignment camera 40b, as shown by the right alignment camera 40b in FIG. The image is formed on the surface of the tape T through the observation window 42W. The formed mask mark MM passes through the observation window 42W and the camera lens 51, is reflected by the half mirror 53, and is detected by the imaging unit 54.

  In FIG. 4, the reflected light AM1 from the latent image and the incident light MMI of the mask mark MM are drawn so as to enter the alignment camera 40a and the alignment camera 40b, respectively. The reflected light AM1 from the latent image and the incident light MMI of the mask mark MM are observed.

  FIG. 5A (a) is a side view in which the holding plate 42 is pressed to the exposure stage 50 to a predetermined position. FIG. 5A (b) is a top view of (a).

  The holding plate 42 is made of a metal material having elasticity such as a leaf spring, and pressurizes the tape T without damaging it, and deforms into a shape that is parallel to the tape T in the pressurized state. Fluorine resin processing may be performed on the tape T side of the pressing plate 42 so as not to damage the tape T, or a thin resin film may be attached. An observation window 42W is formed in the vicinity of the tip of the pressing plate 42, and the mask mark MM and the alignment mark AM can be observed at the position of the tape T that can be seen from the observation window 42W. A bent portion 42R is formed at the tip of the pressing plate 42 and serves to prevent the tape T from being damaged.

  As shown in FIG. 5A (b), the observation window 42W is formed in a circular shape, and is formed in a size that allows the alignment mark AM and the mask mark MM to sufficiently enter the vicinity of the center of the observation window 42W. Furthermore, the observation window 42W is formed so as not to impair the strength and flexibility of the pressing plate 42.

  The center position of the observation window 42 </ b> W and the center axis of the camera lens 51 substantially coincide with each other. For this purpose, the observation window 42W is circular in FIG. 5A, but may be a polygon such as a rectangle as long as the strength and flexibility are not impaired. In this embodiment, the alignment mark AM is shown as a cross and the mask mark MM is shown as four squares. However, a circular shape or a ring shape can also be used.

  FIG. 5B (a) is a top view in which a pressing plate 42-1 having another observation window 42N is pressed to the exposure stage 50 to a predetermined position. FIG. 5B (b) is a top view in which a pressing plate 42-2 in which no hole or notch is formed is pressed to the exposure stage 50 to a predetermined position. FIG. 5B (c) is a top view in which the pressing plate 42-3 having a short length is pressed to the exposure stage 50 to a predetermined position.

  As shown in FIG. 5B (a), the pressing plate 42-1 has an observation window 42N formed by cutting out the tip of the pressing plate 42-1. The alignment camera 40 can also observe the alignment mark AM and the like through such an observation window 42N.

  Moreover, the pressing plate 42-2 shown in FIG. 5B (b) is formed of a highly permeable resin plate such as acrylic or polycarbonate. For this reason, the alignment camera 40 can observe the alignment mark AM or the like through the pressing plate 42-2 without forming a hole or a notch in the pressing plate 42-2. That is, the pressing plate 42-2 itself constitutes an observation window.

  Further, the pressing plate 42-3 shown in FIG. 5B (c) is formed to have a short length so as to press only the end portion of the tape T. For this reason, the pressing plate 42-3 does not cover the alignment mark AM or the like. If the widths of the various tapes T to be used are substantially constant, the pressing plate 42-3 having a length that does not cover the alignment mark AM or the like is effective.

<Operation of alignment camera>
Next, the operation of the alignment camera 40 will be described using the flowchart of FIG. In this embodiment, as described above, the alignment camera 40 is installed in at least two places. Since the same operation is performed at the same timing, the alignment camera 40a will be described as a representative.

  In step S <b> 1, the first transport roller 64 and the second transport roller 66 rotate by a predetermined amount, so that the tape T for one frame of the circuit pattern in which the alignment mark AM is formed on the exposure stage 50 is transported.

  In step S2, the stepping motor 43M inside the pressing plate movable portion 44 rotates. Then, the imaging camera unit 41 and the holding plate 42 move to a predetermined position on the exposure stage 50 side.

  In step S3, the drive motor 45M inside the pressing plate movable portion 44 rotates. As a result, the holding plate support 45 moves closer to the exposure stage 50 side and moves to a predetermined position. The holding plate 42 of the holding plate support 45 presses the end of the tape T. When the end of the tape T is pressed against the exposure stage 50, the entire surface of the tape T on the exposure stage 50 is sucked.

  In step S4, the vacuum pump of the exposure stage 50 is operated to suck the tape T through the suction hole 55. At this point, since the tape T is in a tensioned state, the end portion thereof is turned up like the tape T, and has an arcuate shape when viewed from the major axis direction of the tape T. Therefore, only the central region of the tape T is in a sucked state.

  In step S5, the imaging unit 54 of the imaging camera unit 41 detects the mask mark MM and the alignment mark AM from the observation window 42W of the holding plate 42. Since the center of the observation window 42W and the center axis of the camera lens 51 of the alignment camera 40 are substantially aligned, it is necessary to move the alignment camera 40 again with the stepping motor 43M in order to observe the mask mark MM and the alignment mark AM. Absent.

  In step S6, it is determined whether there is a positional deviation between the mask mark MM and the alignment mark AM. If there is no positional deviation, the process proceeds to step S7, and if there is a positional deviation, the process proceeds to step S10 to correct the deviation.

  In step S7, the alignment camera 40a and the pressing plate 42 are retracted by rotating the stepping motor 43M and the driving motor 45M inside the pressing plate movable portion 44 in the reverse direction. In step S4, since the pressing plate 42 presses the end of the tape T, the entire surface of the tape T is adsorbed on the exposure stage 50 even if the pressing plate 42 is retracted.

  In step S8, the light source of the mercury lamp 10 that has passed through the circuit pattern of the photomask M is imaged and transferred at an accurate position on the tape T by opening the shutter in the region of the photomask M.

  In step S9, an electromagnetic valve (not shown) connected to the air discharge port 56 (see FIG. 4) of the exposure stage 50 is moved to open the suction hole 55 to the atmosphere, so that the tape T is naturally exposed to the tension by the tension. Leave.

  In step S10, the positional deviation between the mask mark MM and the alignment mark AM is corrected by moving the mask M in the Y-axis direction, the Z-axis direction, and the θ direction. After correcting the positional deviation, the process proceeds again to step S6.

  The projection exposure apparatus can expose the circuit pattern of the photomask M for one frame according to the flowchart of FIG. 6, and can perform exposure processing for the next frame by returning to step S1 of FIG. In step S4, if the pressing plate 42 presses the end of the tape T and the entire surface of the tape T is adsorbed on the exposure stage 50, the drive motor 45M is rotated in the reverse direction before proceeding to step S5, thereby pressing the pressing plate 42 to the tape. It may be separated from T.

<< Embodiment 2 >>
FIG. 7 shows a case where the movable method of the alignment camera 40 of the first embodiment is different, and is a top view as seen from the first conveying roller 64 side as in FIG. Since the other configuration of the projection exposure apparatus 100 is the same as that of the first embodiment, only the movable system of the alignment camera 40 will be described. As in the first embodiment, the alignment camera 40a will be described as a representative.

  Since the alignment camera 40a of this embodiment can perform the movement of the imaging camera unit 41 and the movement of the pressing plate 42 at the same time, the number of processing steps can be reduced and the number of parts can be reduced.

  The imaging camera unit 41 is joined to the imaging camera support unit 72, and the pressing plate support unit 45 is also fixedly joined to the imaging camera support unit 72. The holding plate 42 is joined to the holding plate support 45 as in the first embodiment, and is formed of a material having elasticity such as a leaf spring. The imaging camera support unit 72 includes an outer cylinder 72a and an inner cylinder 72b, and incorporates a motor 72M inside the imaging camera support unit 72.

  When the motor 72M rotates, the imaging camera support unit 72 changes the radius of rotation, and even when the width of the tape T is changed, the imaging camera is supported at the position of the alignment mark corresponding to the tape width by changing the set value. The part 41 and the pressing plate 42 can be moved. The imaging camera support unit 72 is joined to the alignment camera rotation unit 70, and is rotated by a motor (not shown) around the center axis 71 (axis parallel to the transport direction of the tape T) of the alignment camera rotation unit 70. To do.

  The pressing plate 42 can be pressed perpendicularly to the tape T by causing the suction surface of the tape T of the exposure stage 50 and the central axis 71 of the alignment camera rotating unit 70 to coincide with each other on the horizontal plane HR.

  The operation of the alignment camera of the second embodiment is substantially the same as that of the alignment camera of the first embodiment described with reference to FIG. In particular, steps S3 and S6 in the flowchart of FIG. 6 will be briefly described.

  In step S3 of the flowchart of FIG. 6, the alignment camera rotation unit 70 is arranged at the position of the alignment camera 40a indicated by the solid line in FIG. 7 by driving the motor. The imaging camera unit 41 can detect the mask mark MM and the alignment mark AM by being arranged up to a predetermined position, and at the same time, the pressing plate 42 can press the tape T by the rotation of the alignment camera rotating unit 70.

  In step S7 of the flowchart of FIG. 6, the alignment camera rotation unit 70 is arranged at the position of the broken alignment camera 40a in FIG. 7 by driving the motor. The position of the alignment camera 40a indicated by the broken line is a position rotated by 90 degrees from the detection position of the mask mark MM and the alignment mark AM, and can be retracted from the exposure range of the circuit pattern of the photomask M. The alignment camera rotating unit 70 is rotated by 90 degrees to perform the retracting operation, but may be rotated by 180 degrees and retracted.

  The present invention is not limited to the embodiment, and various modifications and changes can be made within the scope of the technical idea even if the apparatus is, for example, a contact exposure method or a proximity exposure method. The invention extends to these modified and altered inventions. For example, the exposure apparatus 100 is particularly effective for a tape on which no perforation or alignment mark is formed. However, even if the alignment mark or the alignment hole is already provided, the alignment is separately performed. This is effective when it is necessary to draw a mark.

  In the present embodiment, the four alignment cameras 40 are used, but the alignment marks AM and the mask marks MM can be detected by the two alignment cameras 40. However, as the photomask M increases in size, the alignment marks are detected at a plurality of positions. It is preferable to detect AM and mask mark MM.

1 is a schematic view showing an exposure apparatus 100 according to an embodiment of the present invention. It is a schematic perspective view which shows the tape conveyance system 60 which concerns on embodiment of this invention. 1 is a schematic perspective view showing an alignment drawing device 30 and an alignment camera 40 according to an embodiment of the present invention. It is the top view which looked at the alignment camera 40a and the alignment camera 40b from the 1st conveyance roller 64 side. (A) is a side view of the pressing plate 42. (B) is a top view of the pressing plate 42. (A) is a top view of the pressing plate 42-1 of the first modification. (B) is a top view of the pressing plate 42-2 of the second modified example. (C) is a top view of the pressing plate 42-3 of the third modified example. 4 is a flowchart of the operation of the alignment camera 40. It is a figure which shows the modification of the alignment camera 40 which concerns on Embodiment 2. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Mercury lamp, 12 ... Ellipse mirror, 14 ... Reflection mirror 16 ... Fly eye lens, 18 ... Condenser lens 20 ... Projection optical system 30 ... Alignment drawing apparatus 31 ... End surface detector, 33 ... Photomask for alignment mark 35 ... Ultraviolet light Light source, 40 ... Alignment camera 41 ... Imaging camera unit,
42 ... Holding plate, 42R ... Bending portion, 42W ... Observation window 43 ... Alignment camera movable portion 43L ... Rail, 43M ... Motor 43ar, 45ar ... Arrow 44 ... Holding plate movable portion 45 ... Holding plate support portion 45M ... Motor 50 ... Exposure Stage 51 ... Camera lens 52 ... Illumination 53 ... Half mirror 54 ... Imaging part 55 ... Suction hole 56 ... Ejection port 60 ... Tape transport system 61 ... Supply reel rotating part 62 ... Supply side first guide roller 63 ... Supply side second guide Roller, 63M ... Second guide roller motor 64 ... First transport roller, 64a ... Suction hole, 64M ... Transport roller motor 66 ... Second transport roller, 66a ... Suction hole 67 ... Winding side first guide roller, 68 ... Winding Take-up side second guide roller 69... Take-up reel rotating part 70. Camera rotating section 71 ... Center axis 72 ... Imaging camera support section, 72a ... Outer cylinder, 72b ... Inner cylinder, 72M ... Motor 80 ... Supply reel, 81 ... Flange section 90 ... Take-up reel 100 ... Projection exposure apparatus D1 ... Supply side Relaxation absorption part, D2 ... Winding side relaxation absorption part M ... Photomask AM ... Alignment mark BM ... Chrome mark MM ... Mask mark T ... Roll film tape HR ... Horizontal plane AM1 ... Reflected light of alignment mark AM MMI ... Mask Incident light of mark MM

Claims (7)

In an exposure apparatus that sends a roll film-shaped object having a predetermined width onto an exposure stage and exposes a circuit pattern of a mask to the object to be exposed.
Supported by an image recognition unit for observing an image of the first alignment mark formed on the object to be exposed and an image of the second alignment mark formed on the mask, and a pressing plate support unit attached to the image recognition unit An alignment camera having a pressing plate for pressing the object to be exposed,
The alignment camera includes a first moving unit that moves the image recognition unit and the pressing plate simultaneously,
Based on the image observed by the image recognition unit, when the first alignment mark and the second alignment mark match, the first moving unit is driven, and the image recognition unit and the pressing plate are An exposure apparatus that is retracted from an object to be exposed . The exposure apparatus according to claim 1, wherein the first moving unit moves the pressing plate simultaneously by moving the image recognition unit in a width direction of the object to be exposed . The exposure apparatus according to claim 1, wherein the alignment camera further includes a second moving unit that moves the pressing plate in a direction perpendicular to the object to be exposed. 2. The exposure apparatus according to claim 1, wherein the first moving unit rotates the pressing plate and the image recognition unit about a transport direction of the object to be exposed. 5. The exposure apparatus according to claim 4, wherein the first moving unit moves the image recognition unit and the pressing plate by changing a size of a rotation radius. 6. The exposure apparatus according to any one of claims 1 to 5, wherein the pressing plate has an observation window through which the first alignment mark and the second alignment mark can be observed . The exposure apparatus according to claim 6, wherein the pressing plate is made of a transparent material and forms the observation window.

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