CN101546133A - Exposure device and an exposure method - Google Patents
Exposure device and an exposure method Download PDFInfo
- Publication number
- CN101546133A CN101546133A CN200910118213A CN200910118213A CN101546133A CN 101546133 A CN101546133 A CN 101546133A CN 200910118213 A CN200910118213 A CN 200910118213A CN 200910118213 A CN200910118213 A CN 200910118213A CN 101546133 A CN101546133 A CN 101546133A
- Authority
- CN
- China
- Prior art keywords
- belt
- pressing plate
- identification marking
- exposure
- calibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention relates to an exposure device and an exposure method. The exposure device 100 feeds a body (T) to be exposed with preset width and film shape to an exposure bench 50, and exposes a circuit pattern of a mask (M) on the body. The exposure body has a pressing board 42 pressing the body; an image recognization section 54 for observing a first correction recognization mark (AM) formed on the body and a second correction recognization mark (MM) formed on the circuit pattern; and a first moving section 43 moving the pressing board and the image recognization section in preset width direction of the body.
Description
Technical field
The present invention relates to transmit the belt of film shape to exposure portion, and will be sent to the exposure device and the exposure method of winding side at the belt that this exposure portion exposes from supply side.
Background technology
Usually, because the body of the various small-sized machines of mobile phone, mobile office machine etc. is compact, therefore the circuit base material that is used for the circuit substrate (printed circuit board) of small-sized machine uses thin and high-precision film shape belt (below, be called " belt ").
The material of this belt tends to thickness and is about 0.1mm the slimming to 0.06mm gradually.Have again, recently used thickness below 0.05mm, width is that 100～250mm, length are the banded and very long belt of the Bao Erkuan of 700m.Owing to be long belt therefore usually the coiling tubular use.
When making circuit substrate on the belt of this drum, following situation can occur: the belt of drum is sent in the way of exposure portion piecewise becomes lax, perhaps produces fold near the belt the eyelet of banded workpiece W.Owing to fold occurs on the belt, even therefore vacuum suction belt in this state, belt can not be adsorbed on the pedestal surface.There is disclosed technology in the patent documentation 1 as the exposure device of eliminating this problem points.
Disclosed film exposure device is provided with the belt pressing mechanism in order to carry out vacuum suction reliably in patent documentation 1, and this belt pressing mechanism is pushed the marginal portion of belt from the both sides of belt width direction.
But, in patent documentation 1, in the disclosed film exposure device,, then have the problem that needs to change pressing plate if belt width changes.Also exist in addition need be on the narrow and small operating area between projection optics system and the vaccum bench problem points of arrangement of straps pressing mechanism.
Patent documentation 1: TOHKEMY 2005-274670 communique
Summary of the invention
Therefore, the present invention is the invention of putting in view of the above problems, and its purpose is, even situation about changing in belt width does not need to change the operation of pressing plate yet.Another object of the present invention is, can prevent the warpage of belt or lax by the belt of nearby pushing in the calibration identification marking, and the calibration identification marking that can observe belt.
The exposure device of the 1st viewpoint is that the body that is exposed with film shape of Rack is delivered on the exposure desk, and the circuit pattern of mask is exposed at the exposure device that is exposed on the body.This exposure device has: push the pressing plate that is exposed body; Be used to observe be formed on and be exposed the calibration of the 1st on body identification marking (for example: calibrate identification marking AM) and (for example: image recognition portion mask identification marking MM) be formed on the calibration of the 2nd on circuit pattern mask identification marking; The 1st moving part that pressing plate and image recognition portion are moved to the Rack direction that is exposed body simultaneously.
According to this formation, because the 1st moving part simultaneously moving press plate and image recognition portion, therefore can shorten absorption and calibrate the required time after being exposed whole of body.In addition, owing to need not to be provided with other moving part, therefore can reduce manufacturing cost.
The pressing plate of the exposure device of the 2nd viewpoint is pushed and is exposed body and is pressed into ratio the 1st calibration identification marking position more in the inner part on the Rack direction, and pressing plate has the view window of observing the 1st calibration identification marking and the 2nd calibration identification marking.
Owing to use the pressing plate of the length that can cover the 1st calibration identification marking and the 2nd calibration identification marking, therefore can push the end that is exposed body reliably.Have, the 1st and the 2nd calibration identification marking can be observed from view window by image recognition portion again.
The pressing plate of the exposure device of the 3rd viewpoint is only pushed ratio the 1st calibration identification marking position more in the outer part on the Rack direction.
Especially, if it is roughly constant to be exposed the Rack of body, then shortens pressing plate and also can push the end that is exposed body reliably.
The 1st moving part of the exposure device of the 4th viewpoint has the 2nd moving part, and the 2nd moving part makes pressing plate along moving with being exposed the direction that body intersects, and is exposed body so that pressing plate touches.
It serves as that axle is rotated with the direction of transfer that is exposed body that the 1st moving part of the exposure device of the 5th viewpoint makes pressing plate and image recognition portion.
The exposure device of the 6th viewpoint is provided with 2 above image recognition portions at least.Thus, can calibrate mask and be exposed body.
Even exposure device involved in the present invention also can be rapidly when the width of belt changes and is carried out correspondence neatly, can aim at the calibration identification marking accurately simultaneously in addition, therefore can improve the exposure that mask pattern overlaps.
Description of drawings
Fig. 1 is the skeleton diagram of the related exposure device 100 of expression embodiments of the present invention.
Fig. 2 is that the related belt transmission of expression embodiments of the present invention is 60 approximate three-dimensional map.
Fig. 3 is the related calibration plotting unit 30 of expression embodiments of the present invention and the approximate three-dimensional map of calibrated cameras 40.
Fig. 4 transmits the planimetric map that roller 64 sides have been observed calibrated cameras 40a and calibrated cameras 40b from the 1st.
Fig. 5 A is the side view of pressing plate 42.
Fig. 5 B is the planimetric map of pressing plate 42.
Fig. 6 A is the planimetric map of the pressing plate 42-1 of the 1st variation.
Fig. 6 B is the planimetric map of the pressing plate 42-2 of the 2nd variation.
Fig. 6 C is the planimetric map of the pressing plate 42-3 of the 3rd variation.
Fig. 7 is the action flow chart of calibrated cameras 40.
Fig. 8 is the figure of the variation of the related calibrated cameras 40 of expression embodiment 2.
Symbol description:
10-mercury vapor lamp, 12-elliptical reflector, 14-catoptron, 16-fly's-eye lens, 18-collector lens, 20-projection optics system, 30-calibration plotting unit, 31-end face detecting device, 33-calibration identification marking photomask, 35-ultraviolet light source, 40-calibrated cameras, 41-photograph portion, 42-pressing plate, 42R-bend, 42W-view window, 43-calibrated cameras movable part, 43L-guide rail, 43M-motor, 43ar, 45ar-arrow, 44-pressing plate movable part, 45-pressing plate support portion, 45M-motor, 50-exposure desk, 51-camera lens, 52-Lighting Division, 53-half-mirror, 54-photography portion, 55-adsorption hole, 56-escape hole, 60-band transports and is, 61-supply roll rotating part, 62-supply side the 1st guide rolls, 63-supply side the 2nd guide rolls, 63M-the 2nd guide rolls motor, 64-the 1 transmits roller, 64a-adsorption hole, 64M-transmission roller motor, 66-the 2 transmits roller, 66a-adsorption hole, 67-winding side the 1st guide rolls, 68-winding side the 2nd guide rolls, 69-coiling sleeve rotating part, 70-calibrated cameras rotating part, 71-central shaft, 72-photography camera support portion, 72a-urceolus, 72b-inner core, 72M-motor, 80-supply sleeve, 81-flange part, 90-coiling sleeve, 100-projection aligner, D1-supply side relaxation absorption portion, D2-winding side relaxation absorption portion, M-photomask, AM-calibration identification marking, BM-chromium identification marking, MM-mask identification marking, the belt of T-film shape, HR-surface level, the reflected light of AM1-calibration identification marking AM, the incident light of MM1-mask identification marking MM.
Embodiment
(embodiment 1)
The formation of＜exposure device 〉
Situation with projection aligner is an example, and example of the present invention is described.
Fig. 1 is the skeleton diagram of the related projection aligner 100 of expression embodiments of the present invention.At this, projection aligner 100 involved in the present invention transmits film like belt (hereinafter referred to as belt) T, and the circuit pattern that will be plotted on the photomask M exposes on its belt T.
Belt T is by constituting as the flexible substrate of circuit substrate or the material of film like belt.This belt T be by thickness for example below 0.05mm, width is that 100～250mm, length are that the parts of the Bao Erkuan of 700m constitute, and is wound on the supply roll rotating part 61.The belt T that has following shape: on the left and right sides edge part of this belt T, be formed with the belt T of eyelet (not shown), perhaps do not have the belt T of eyelet.At this, coating in advance is applicable to the photoresist of mercury vapor lamp 10 on the surface of belt T.
Projection aligner 100 intermittently transmits belt T piecewise to the exposure desk 50 along the vertical direction setting.Projection aligner 100 utilizes the light from mercury vapor lamp 10 then, and the circuit pattern by photomask M exposes to the belt T that transmits piecewise one by one.
It is 20 that projection aligner 100 has mercury vapor lamp 10, catoptron 14, fly's-eye lens 16, collector lens 18, photomask M and projection optics.Mercury vapor lamp 10 irradiations comprise the ultraviolet light of 365nm wavelength.Except mercury vapor lamp 10, can also use ultraviolet laser or ultraviolet LED.Elliptical reflector 12 is configured in the position of the back that covers this mercury vapor lamp 10.Catoptron 14 will reflect to photomask M from the light that mercury vapor lamp 10 irradiates.
Fly's-eye lens 16 is that a plurality of positive element are arranged along the mode of optical axis extending in length and breadth and meticulously with its central axis.Fly's-eye lens 16 plays the effect of adjusting equably from the illumination patterns of catoptron 14.
The overlapping irradiation of light beam of having passed through collector lens 18 is formed with the photomask M of circuit pattern.Transmission be 20 by the light beam of the mask M that throws light on of exposure light towards projection optics.Around the circuit pattern of photomask M, be formed with mask identification marking MM, be used to aim at belt T and photomask M.
Photomask M remains on the not shown mask stage, can move along the direction that with respect to projection optics is 20 light shaft positive cross.Projection optics be 20 only can use the refractive that constitutes with lens system, with the reflection-refraction type of the reflection-type that constitutes, compound lens and the catoptron of catoptron etc.Projection optics be 20 can also use amplify optical system, etc. times optical system or dwindle any of optical system.
Be to dispose exposure desk 50 on 20 the focal position at projection optics.Exposure desk 50 adsorbs and keeps belt T, can utilize not shown exposure desk driving mechanism to move along Z-direction in the mode of vacuum suction.Exposure desk 50 utilizes not shown focus detection device to detect the focal position of belt T and moves along X-direction.Like this, be 20 light beam imagings on belt T of penetrating from projection optics.That is, the imaging on belt T of the circuit pattern of photomask M, circuit pattern is replicated on the belt T by being coated on the photoresist on the belt T.
It is 60 that projection aligner 100 has the belt transmission that is configured in Fig. 1 left side, so that belt T is delivered on the exposure desk 50.
In addition, projection aligner 100 has: the calibration plotting unit 30 of drawing the calibration identification marking on the regulation position of belt T; And be configured in projection optics be 20 and exposure desk 50 between calibrated cameras 40.
＜belt transmits the formation of system 〉
Fig. 2 is that the related belt transmission of expression embodiments of the present invention is 60 approximate three-dimensional map.
It is 60 to have that this belt transmits: be installed on the central reel hole of the supply roll 80 that is wound with belt T and make the supply roll rotating part 61 of supply roll 80 rotations; Supply side the 1st guide rolls 62 of the belt T that guiding is transmitted; And supply side the 2nd guide rolls 63.
In addition, projection aligner 100 has: be configured in and be used to transmit the 1st of belt T on the upper-lower position of exposure desk 50 and transmit roller 64 and the 2nd and transmit roller 66; Winding side the 1st guide rolls 67 and winding side the 2nd guide rolls 68; And the reel spool rotating part 69 that makes reel spool 90 rotations of coiling belt T.Projection aligner 100 also has lax supply side relaxation absorption D1 of portion and the winding side relaxation absorption D2 of portion that absorption belt T produces in transmission.
Supply roll rotating part 61 is to be used for axle to support to have reeled and send the parts of belt T as the supply roll 80 of the spool-like of the belt T of circuit base material, and is made of the metal shaft in the reel hole that supply roll 80 is installed.This metal shaft utilizes not shown driving motor to be rotated.
At this, supply roll 80 is that the parts of 750mm constitute by the diameter of winding part for example, and has flange part 81 on left and right edges.The belt T that is wound on this supply roll 80 is transmitted roller 64 tensions by the 1st, together rotates with supply roll rotating part 61 thus and is sent on supply side the 1st guide rolls 62.
Supply side the 1st guide rolls 62 is that volume is linked with the auxiliary roller of sub-T, and the belt T that is wound on the supply roll 80 is sent to the supply side relaxation absorption D1 of portion, and rotates freely as the center with axial region and to set.The supply side relaxation absorption D1 of portion for example relaxes into the device that the U font comes to apply to belt T tension force by belt T because of self weight, make the belt T that sends from supply roll rotating part 61 between supply roll rotating part 61 and supply side the 1st guide rolls 62, and transmit in supply side the 2nd guide rolls 63 and the 1st and not produce excessive load or lax when transmitting between the roller 64.
Supply side the 2nd guide rolls 63 transmits roller 64 from the supply side relaxation absorption D1 of portion to the 1st and transmits belt T, and have can be to the strap position adjusting mechanism of the mobile belt T of Width (arrow ar).This supply side the 2nd guide rolls 63 has the 2nd guide rolls motor 63M and not shown bearing etc.
The 2nd guide rolls motor 63M can make supply side the 2nd guide rolls 63 move while the direction of principal axis (Width of belt T) that rotates to arrow ar, thus the position on the Width of adjustment belt T.In addition, the 2nd guide rolls motor 63M can be by just changeing and reversing and adjust the tension force that supply side the 2nd guide rolls 63 and the described later the 1st transmits the belt T between the roller 64.
Supply side the 2nd guide rolls 63 of Gou Chenging makes the position of belt T move to the Y direction to be adjusted on the suitable position by rotating the 2nd guide rolls motor 63M as described above, can correctly calibrate describing of calibration identification marking on the plotting unit 30 thus.
The 1st transmits roller 64 transmits belt T from supply side the 2nd guide rolls 63 to exposure desk 50, intermittently rotates driving the 1st transmission roller 64 by transmission roller motor 64M belt T is transmitted piecewise.Transmit to have on the roller 64 the 1st and make belt T be adsorbed on the 1st adsorption hole 64a that transmits on the roller surface of roller 64, and be connected the not shown vacuum plant that is used to adsorb belt T by adsorption hole 64a.
In addition, the 1st transmits the below that roller 64 is configured in the z direction of supply side the 2nd guide rolls 63, and with belt T and the surperficial parallel mode of exposure desk 50 be configured in exposure desk 50 directly over.
The 2nd transmits the downstream that roller 66 is configured in the direction of transfer of exposure desk 50, and the belt T that has exposed on exposure desk 50 is sent to winding side, and be configured in the 1st transmit roller 64 and exposure desk 50 under.The 2nd transmission roller 66 has and the 1st transmission roller 64 identical construction, transmits the adsorption hole 66a that has on the roller 66 on the roller surface that belt T is adsorbed on the 2nd transmission roller 66 the 2nd.
Winding side the 1st guide rolls 67 is configured in the 2nd downstream of transmitting the direction of transfer of roller 66 belt T is sent on the winding side relaxation absorption D2 of portion.Winding side the 1st guide rolls 67 has and supply side the 2nd guide rolls 63 identical construction, and has and carry out the 1st guiding motor 67M that strap position adjusts etc.
Winding side the 2nd guide rolls 68 is the auxiliary rollers that are used to guide belt T, so that the belt T that need be wound on the coiling sleeve 90 is sent on the reel spool 90, and has and supply side the 1st guide rolls 62 identical construction.
Reel spool rotating part 69 supports coiling sleeve 90, the belt that this coiling sleeve 90 is reeled and exposed on exposure desk 50.The axial region that this reel spool rotating part 69 will be equipped with the beam barrel portion of coiling sleeve 90 rotates as the center and is configured freely, and drives by driving motor (not shown).
＜calibration plotting unit and calibrated cameras 〉
Fig. 3 is the related calibration plotting unit 30 of expression embodiments of the present invention and the approximate three-dimensional map of calibrated cameras 40.
The formation of＜＜calibration plotting unit 30〉〉
End face detecting device 31 is made of linear CCD or two-dimensional CCD or CMOS camera, the end face that detects belt T by reflected light or the transmitted light of accepting from belt T.End face detecting device 31 has the 1st end face sensor 31a and the 2nd end face sensor 31b that are separated from each other at least for the degree of tilt of the direction of transfer that detects belt T on direction of transfer.These sensors are located in position, and are fixed on not shown framework etc.At this, as long as can determine the position and the degree of tilt of belt T end face by camera, promptly alternative end face detecting device 31 and using.Here, camera has the visual field of the whole Width that can observe belt T.
The calibration identification marking is photomasks of having made calibration identification marking pattern (chromium identification marking BM) of chromium etc. on the crystal glass plate with photomask 33.Because the thermal expansivity of crystal glass is little and transmission of ultraviolet rays is high, therefore very outstanding as the material of mask, in addition because the cohesive of chromium and crystal glass is good, ultraviolet cover very outstanding, and As time goes on change very little, therefore very suitable.The calibration identification marking can move along the Y direction with photomask 33, and has: the 1st calibration identification marking photomask 33a with 2 chromium identification marking BM; And the 2nd calibration identification marking photomask 33b with 2 chromium identification marking BM, so that control easily.
Ultraviolet light source 35 can use the LED (UVLED) of irradiation ultraviolet radiation, and this ultraviolet ray exposes to the photoresist that is coated on the belt T.Also the light of drawing from mercury vapor lamp 10 can be used, the light of drawing from the UV LASER Light Source of other preparation can also be used by optical fiber by optical fiber.Ultraviolet light source 35 is made of 4 UVLED35a, 35b, 35c and 35d, and ultraviolet light source 35 quantity are consistent with the quantity of chromium identification marking BM here.
Be used to grasp the position of belt T from the signal of end face detecting device 31, from ultraviolet light source 35 irradiation ultraviolet radiations, and be plotted in the calibration identification marking with the calibration identification marking picture on the photomask 33 coating to depict on the lip-deep photoresist of belt T according to this position.The calibration identification marking AM that is depicted on the belt T is the preceding identification marking of video picture, is commonly referred to as sub-image.That is, the exposure of calibration identification marking picture makes exposure place send the color different with photoresist on the photoresist of belt T, thereby can discern as calibration identification marking AM.
At this, though as long as the quantity of calibration identification marking AM is consistent with the quantity of mask identification marking MM on being formed on photomask M, in needing at least more than 2 on every side of 1 circuit pattern.Suppose, when forming 6 calibration identification marking AM, perhaps prepare the calibration identification marking again, perhaps make the conveying capacity of belt T be about half of 1 and all describe to calibrate identification marking AM for every time with photomask 33.
At this, as shown in Figure 2, calibration plotting unit 30 is configured in supply side the 2nd guide rolls 63 and the 1st and transmits between the roller 64.The enlarged drawing that has amplified calibration plotting unit 30 is illustrated on Fig. 3.At this, calibration plotting unit 30 can also be configured in the 1st and transmit between roller 64 and the exposure desk 50.
40 of＜＜calibrated cameras constitutes〉〉
Calibrated cameras 40 shown in Figure 3 is made of photograph portion 41 and pressing plate 42, makes the structure that can utilize calibrated cameras movable part 43 and pressing plate movable part 44 to move.In the present embodiment, calibrated cameras 40 is arranged on 4 places, and subtend is configured in the Width of belt T.Calibrated cameras 40a and calibrated cameras 40b are arranged on the 1st and transmit roller 64 sides, and calibrated cameras 40c and calibrated cameras 40d are arranged on the 2nd and transmit roller 66 sides.For calibrated cameras movable part 43 and pressing plate movable part 44, be described in the back.
Calibrated cameras 40 detects the sub-image of the calibration identification marking AM that is formed by calibration plotting unit 30, and also detecting by projection optics is the projection image of the mask identification marking MM on every side of the 20 photomask M that form.Utilize a plurality of calibrated cameras 40 to detect calibration identification marking AM and mask identification marking MM, the photomask M shown in Fig. 1 is moved on the YZ plane based on its detection signal.Secondly, in the situation of calibration identification marking AM and mask identification marking MM coincidence, calibrated cameras 40 is kept out of the way from belt T.Afterwards, the open shutter (not shown) that covers the photomask M zone of mercury vapor lamp 10 light sources, the circuit pattern with photomask M is replicated on the belt T thus.
At this, when calibrating the situation that identification marking AM and mask identification marking MM stagger, not mobile photomask M, and utilize not shown exposure desk driving mechanism to make belt T move the position of adjusting belt T in Y direction, Z-direction and θ direction, a plurality of calibration identification marking AM and mask identification marking MM are overlapped.
The formation of＜calibrated cameras movable part 43, pressing plate movable part 44 and exposure desk 50 〉
Fig. 4 transmits the planimetric map that roller 64 sides have been observed calibrated cameras 40a and calibrated cameras 40b from the 1st.At this, Fig. 4 has also represented the internal structure of photograph portion 41, so that understand the formation of calibrated cameras 40.Because calibrated cameras 40a has identical structure with calibrated cameras 40b, therefore following calibrated cameras 40a is described as representative.In addition, not shown calibrated cameras 40c and calibrated cameras 40d also have identical construction.
Pressing plate 42 is formed by the elastomeric element of laminated spring etc., and is bonded on the pressing plate support portion 45.In Fig. 5 A and Fig. 5 B and Fig. 6 A, Fig. 6 B and Fig. 6 C, pressing plate 42 is elaborated.
Calibrated cameras movable part 43 is bonded in the photograph portion 41, and has stepping motor 43M and driving motor 45M in inside.Can replace stepping motor 43M and use the drive unit that is easy to positioning control.In addition, can replace driving motor 45M and use the drive unit of cylinder etc.
Be provided with guide rail 43L in the inside of calibrated cameras movable part 43.Thereby photograph portion 41 can move to Y direction (arrow 43ar direction) by the stepping motor 43M of rotary pressure plate movable part 44.Use stepping motor 43M to position easily according to the width of belt T.
Pressing plate support portion 45 is made of turning axle, this turning axle support by for example not shown bearing etc., and on the leading section of pressing plate support portion 45, have the clamping part 45C of clamping pressing plate 42.The clamping part 45C of pressing plate support portion 45 makes the structure of changing easily according to the position (Y direction) of calibration identification marking AM.Pressing plate support portion 45 can be by being rotatably provided in pressing plate movable part 44 the motor 45M of inside move to X-direction (arrow 45ar direction).Pressing plate 42 can move on the position of regulation by pressing plate support portion 45 and apply suitable pressure to belt T.
Because calibrated cameras 40a can move freely along arrow 43ar direction, therefore, also can photograph portion 41 and pressing plate 42 be moved on the position corresponding to the calibration identification marking AM of belt T width by changing setting value even variation has taken place for the width of belt T or the position (Y direction) of the calibration identification marking AM on the belt T.
Be formed with the adsorption hole 55 of vacuum suction belt T on the surface of exposure desk 50.On exposure desk 50, have the escape hole 56 of air, and utilize vacuum pump (not shown) to deflate to make the adsorption hole 55 be formed on exposure desk 50 inside be negative pressure, adsorb belt T thus.
The 1st belt T that transmits between roller 64 and the 2nd transmission roller 66 becomes the state that has applied tension force by the 1st transmission roller 64 and the 66 mutual tensions of the 2nd transmission roller.There are differences on the stretching difficulty owing to be applied in the central part and the end of Width of the belt T of tension force, so belt T produces distortion.In addition, belt T also can cause distortion by being formed on metal film on the belt T etc.That is, the end of belt T is started near exposure desk 50 as illustrated in fig. 4, and belt T observes from its long axis direction and is arc.Attract even arc belt T is exposed the adsorption hole 55 of platform 50, also only can adsorb belt T Width central part and the end is not easy to be adsorbed.Therefore, this belt of absorption T end is assisted in the end that utilizes pressing plate 42 to push belt T, and the whole width of belt T is attracted on the exposure desk 50.In a single day belt T is exposed platform 50 absorption, only otherwise stop to bleed of vacuum pump, also can not come off even remove the pressure belt T of pressing plate 42.
Be adsorbed on the lip-deep state of exposure desk 50 fully at belt T, utilize calibrated cameras 40 alignment light mask M and belt T, and with the circuit pattern exposure of photomask M on belt T.At this, because the surface of exposure desk 50 is vertical state on the Z direction, therefore if remove the vacuum suction of belt T, then belt T is broken away from from the surface of exposure desk 50 by the weight of self.
As shown in the left side calibrated cameras 40a of Fig. 4, utilize from the illumination light of Lighting Division 52 view window 42W calibration identification marking AM is thrown light on, thereby appear the sub-image of calibration identification marking AM in one's mind by pressing plate 42.On half-mirror, produces reflection by camera lens 51 and by 54 detections of photography portion from the reflected light AM1 of the sub-image that appears in one's mind.
On the other hand, as shown in the right side calibrated cameras 40b of Fig. 4, the incident light MM1 of mask identification marking MM injects from X-direction, and passes through half-mirror 53 and the camera lens 51 of calibrated cameras 40b, passes through view window 42W imaging on the surface of belt T of pressing plate 42 again.The mask identification marking MM of imaging produces reflection by view window 42W and camera lens 51 and is detected by photography portion 54 on half-mirror 53.
In order to help to understand, in Fig. 4, make from the reflected light AM1 of sub-image and the incident light MM1 of mask identification marking MM to be injected into respectively among calibrated cameras 40a and the calibrated cameras 40b, but each photography portion 54 is observed simultaneously from the reflected light AM1 of sub-image and the incident light MM1 of mask identification marking MM.
Fig. 5 A makes pressing plate 42 be pressed into the side view of the assigned position of exposure desk 50.Fig. 5 B is the planimetric map of Fig. 5 A.
Pressing plate 42 is formed by the rubber-like metal material of laminated spring etc., exerts pressure in the mode of not damaging belt T, and be deformed into the parallel in shape with belt T under the state of exerting pressure.In order not damage belt T, can carry out fluororesin processing or stick resin film in the belt T of pressing plate 42 side.Near pressing plate 42 front ends, be formed with view window 42W, can observe position observation mask identification marking MM and the calibration identification marking AM of belt T from view window 42W.Front end at pressing plate 42 is formed with bend 42R, plays the effect that prevents that belt T is impaired.
The central shaft of the center of view window 42W and camera lens 51 is unanimous on the whole.Though view window 42W is circular in Fig. 5 B, only otherwise infringement intensity and flexibility, also can be the polygon of quadrilateral etc.Though represent to calibrate identification marking AM with cruciform in the present embodiment in addition, represent mask identification marking MM with 4 quadrilaterals, also can use shapes such as circle and annulus.
Fig. 6 A is the planimetric map that the other pressing plate 42-1 with view window 42N is pressed into the assigned position of exposure desk 50.Fig. 6 B is the planimetric map that the pressing plate 42-2 that will not form hole or recess is pressed into the assigned position of exposure desk 50.Fig. 6 C is the planimetric map that the pressing plate 42-3 that length is short is pressed into the assigned position of exposure desk 50.
Shown in Fig. 6 A, pressing plate 42-1 has the view window 42N that begins to form recess from front end.Calibrated cameras 40 also can utilize this view window 42N that calibration identification marking AM etc. is observed.
In addition, the pressing plate 42-2 shown in Fig. 6 B is formed by the high resin plate of transmittance such as propylene or polycarbonate.Therefore, even do not form hole or recess on pressing plate 42-2, calibrated cameras 40 also can be observed calibration identification marking AM etc. by pressing plate 42-2.That is, pressing plate 42-2 itself constitutes view window.
In addition, the length of the pressing plate 42-3 shown in Fig. 6 C is shorter, the feasible end that only can push belt T.Therefore, pressing plate 42-3 does not cover calibration identification marking AM etc.If the width of the various belt T that use is roughly constant, the pressing plate 42-3 of length that does not then cover calibration identification marking AM etc. is just very effective.
The action of＜calibrated cameras 〉
Below, the action to calibrated cameras 40 describes with reference to the process flow diagram of Fig. 7.As mentioned above, calibrated cameras 40 is arranged on 2 places at least in the present embodiment, but owing to all carry out identical action synchronously, therefore will calibrate camera 40a and describe as representative.
In step S1, transmit roller 64 and the 2nd transmission roller 66 rotation ormal weights by making the 1st, a slice belt T that is equivalent to circuit pattern that will be formed with calibration identification marking AM is sent on the exposure desk 50.
In step S2, the stepping motor 43M of pressing plate movable part 44 inside is rotated.Secondly, photograph portion 41 and pressing plate 42 are moved on the assigned position of exposure desk 50 sides.
In step S3, the driving motor 45M of pressing plate movable part 44 inside is rotated.Thus, pressing plate support portion 45 is near exposure desk 50 sides and move on the assigned position.The pressing plate 42 of pressing plate support portion 45 is pushed the end of belt T.The end of belt T is pressed against on the exposure desk 50, and the whole face of belt T is attracted on the exposure desk 50 thus.
In step S4, the vacuum pump of operation exposure desk 50 utilizes adsorption hole 55 absorption belt T.At this, because this moment, belt T was the state that is applied in tension force, so the end of belt T started, and observes from the long axis direction of belt T to be arc.Thereby, become the state of the middle section that has only adsorbed belt T.
In step S5, mask identification marking MM and calibration identification marking AM detect from the view window 42W of pressing plate 42 in the photography portion 54 of photograph portion 41.Because the central shaft of the camera lens 51 of the center of view window 42W and calibration identification marking AM roughly overlaps, therefore there is no need to utilize stepping motor 43M to come mobile calibrated cameras 40 once more in order to observe mask identification marking MM and calibration identification marking AM.
In step S6, judge whether the position of mask identification marking MM and calibration identification marking AM staggers.At the situation continued execution in step S7 that does not stagger, revise the position of staggering at the situation execution in step S10 that staggers.
In step S7, stepping motor 43M and driving motor 45M by retrograde rotation pressing plate movable part 44 inside keep out of the way calibrated cameras 40a and pressing plate 42.Because in the end that step S4 center platen 42 has been pushed belt T, even if therefore pressing plate 42 is kept out of the way, the whole face of belt T also is adsorbed on the exposure desk 50.
In step S8, the imaging and duplicating on the tram of belt T of the shutter in open photomask M zone, the light beam of mercury vapor lamp 10 of circuit pattern that has passed through photomask M thus.
In step S9, move not shown solenoid valve on the air outlet 56 (with reference to Fig. 4) be connected exposure desk 50 to atmosphere opening adsorption hole 55, belt T utilizes tension force to break away from from exposure desk 50 naturally thus.
In step S10, by move the position of staggering that photomask M revises mask identification marking MM and calibrates identification marking AM along Y direction, Z-direction and θ direction.Revised behind the position of staggering execution in step S6 once more.
Projection aligner can be according to the circuit pattern of the photomask M of the process flow diagram of Fig. 7 exposure a slice part, and can come by the step S1 that gets back to Fig. 7 once more a slice is down partly carried out exposure-processed.At this, wholely wear sub-T and be attracted on the exposure desk 50 if make in the end that step S4 center platen 42 is pushed belt T, then also can before execution in step S5, pressing plate 42 be left retrograde rotation driving motor 45M from belt T.
(embodiment 2)
The situation that the movable manner that Fig. 8 represents calibrated cameras 40 and embodiment 1 are different, and be to transmit the planimetric map that roller 64 sides are observed from the 1st in the same manner with Fig. 4.Because other formations of projection aligner 100 is identical with embodiment 1, so only the movable manner of calibrated cameras 40 is described.At this, in the same manner calibrated cameras 40a is described as representative with embodiment 1.
Because the calibrated cameras 40a of present embodiment is travelling shot photo studio 41 and pressing plate 42 simultaneously, therefore can reduce treatment process and number of components.
Make the central shaft 71 of the adsorption plane of the belt T on the exposure desk 50 and calibrated cameras rotating part 70 consistent with horizontal H R, pressing plate 42 can vertically be exerted pressure to belt T thus.
The situation of the calibrated cameras of the action of the calibrated cameras of embodiment 2 and embodiment illustrated in fig. 71 is roughly the same.Especially step S3, the S7 of the process flow diagram of Fig. 7 are illustrated simply at this.
In the step S3 of the process flow diagram of Fig. 7, the driving of calibrated cameras rotating part 70 by motor is configured on the position of the calibrated cameras 40a shown in the solid line of Fig. 8.Photograph portion 41 is configured on the assigned position, can detect mask identification marking MM and calibration identification marking AM thus, and pressing plate 42 can be pushed belt T by rotational alignment camera rotating part 70 simultaneously.
In the step S7 of the process flow diagram of Fig. 7, the rotation of calibrated cameras rotating part 70 by motor is configured on the position of the calibrated cameras 40a shown in the dotted line of Fig. 8.The positions that the position of the calibrated cameras 40a of dotted line has rotated 90 degree for the detection position from mask identification marking MM and calibration identification marking AM can be kept out of the way from the exposure range of the circuit pattern of photomask M.At this, though calibrated cameras rotating part 70 revolve and turn 90 degrees and make and keep out of the way action, also can Rotate 180 and keep out of the way.
On industry is utilized, the present invention is not limited to above-mentioned embodiment, even if for example contact exposure (Contact Exposure) mode or closely connect the device of exposure (Proximity exposure) mode, also can in its technological thought scope, carry out various transformations and change, the present invention also relates to the invention of these transformations and change.For example, though this exposure device 100 is obvious especially to the belt effect that does not form eyelet or calibration identification marking, to having calibration identification marking or the calibration situation with perforation, the situation of calibration identification marking of drawing other purposes at needs is also effective.
Though the calibrated cameras of having used at 4 places in the present embodiment 40, even but use calibrated cameras 40 also can detect calibration identification marking AM and mask identification marking MM at 2 places, but, be preferably in the detection that identification marking AM and mask identification marking MM are calibrated in many places along with the maximization of photomask M.
Claims (6)
1, a kind of exposure device, this exposure device will have the body that is exposed of the film shape of Rack to be delivered on the exposure desk, and the circuit pattern of mask is exposed being exposed on the body, it is characterized in that having:
Push the described pressing plate that is exposed body;
Be used to observe the described image recognition portion that is exposed the calibration identification marking of the 1st on the body and is formed on the calibration of the 2nd on described mask identification marking that is formed on;
The 1st moving part that described pressing plate and described image recognition portion are moved to the described Rack direction that is exposed body simultaneously.
2, exposure device according to claim 1 is characterized in that,
Described pressing plate is pushed the described body that is exposed, and be pressed into described the 1st calibration identification marking position more in the inner part of ratio on the described Rack direction, and described pressing plate has the view window of observing described the 1st calibration identification marking and described the 2nd calibration identification marking.
3, exposure device according to claim 1 is characterized in that,
Described pressing plate is only pushed described the 1st calibration identification marking position more in the outer part of ratio on the described Rack direction.
4, according to the described exposure device of claim 1～3, it is characterized in that,
Described the 1st moving part has the 2nd moving part, and described the 2nd moving part makes described pressing plate along being exposed the direction that body intersects and moving with described, so that described pressing plate touches the described body that is exposed.
5, according to any described exposure device of claim 1 to 3, it is characterized in that,
It serves as that axle is rotated with the described direction of transfer that is exposed body that described the 1st moving part makes described pressing plate and described image recognition portion.
6, exposure device according to claim 1 is characterized in that,
Described image recognition portion more than 2 is set at least.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008084251A JP5117243B2 (en) | 2008-03-27 | 2008-03-27 | Exposure equipment |
| JP2008-084251 | 2008-03-27 | ||
| JP2008084251 | 2008-03-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101546133A true CN101546133A (en) | 2009-09-30 |
| CN101546133B CN101546133B (en) | 2012-07-04 |
Family
ID=41193328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101182133A Active CN101546133B (en) | 2008-03-27 | 2009-02-25 | Exposure device and an exposure method |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5117243B2 (en) |
| CN (1) | CN101546133B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103097957A (en) * | 2010-09-07 | 2013-05-08 | 株式会社尼康 | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
| WO2013177874A1 (en) * | 2012-05-28 | 2013-12-05 | 京东方科技集团股份有限公司 | Alignment identifier and method using alignment identifier to manufacture workpiece in exposure process |
| CN107608177A (en) * | 2017-10-22 | 2018-01-19 | 长春工业大学 | A kind of device and method for manufacturing overlarge area nano impression seamless pattern |
| CN112693947A (en) * | 2020-12-21 | 2021-04-23 | 江苏迪盛智能科技有限公司 | Pulling deviation processing method and device, electronic equipment and storage medium |
| CN112777381A (en) * | 2020-12-21 | 2021-05-11 | 江苏迪盛智能科技有限公司 | Tailing identification method and device, electronic equipment and storage medium |
| CN113341657A (en) * | 2020-03-03 | 2021-09-03 | 株式会社斯库林集团 | Drawing device |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101948467B1 (en) * | 2010-02-12 | 2019-02-14 | 가부시키가이샤 니콘 | Substrate processing device and substrate processing method |
| NL2010103A (en) * | 2012-01-17 | 2013-07-18 | Asml Netherlands Bv | A method of loading a flexible substrate, a device manufacturing method, an apparatus for loading a flexible substrate, and a lithography apparatus. |
| KR101600810B1 (en) * | 2014-05-12 | 2016-03-08 | 주식회사 옵티레이 | Roll to roll exposure device |
| DE202014011053U1 (en) | 2014-08-05 | 2017-07-26 | Nanoscribe Gmbh | Lithography device for producing a structure |
| CN113204176A (en) * | 2021-04-27 | 2021-08-03 | 合肥芯碁微电子装备股份有限公司 | Tool, detection system and method for detecting and debugging imaging light path of equipment |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4571354A (en) * | 1983-12-27 | 1986-02-18 | Rogers Corporation | Tape automated bonding of integrated circuits |
| JP3049785B2 (en) * | 1991-02-13 | 2000-06-05 | 松下電器産業株式会社 | Bump shaping method |
| JP2002368378A (en) * | 2001-06-04 | 2002-12-20 | Dainippon Screen Mfg Co Ltd | Board clamping device |
| JP3741013B2 (en) * | 2001-09-17 | 2006-02-01 | ウシオ電機株式会社 | Belt-shaped workpiece exposure device with meandering correction mechanism |
| JP4082104B2 (en) * | 2002-06-21 | 2008-04-30 | ウシオ電機株式会社 | Pattern inspection device |
| JP4407333B2 (en) * | 2004-03-23 | 2010-02-03 | ウシオ電機株式会社 | Strip workpiece exposure system |
| JP4479383B2 (en) * | 2004-07-05 | 2010-06-09 | ウシオ電機株式会社 | Pattern inspection device |
| CN1932646B (en) * | 2005-09-14 | 2011-11-30 | 东海商事株式会社 | Exposure device |
-
2008
- 2008-03-27 JP JP2008084251A patent/JP5117243B2/en active Active
-
2009
- 2009-02-25 CN CN2009101182133A patent/CN101546133B/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103097957A (en) * | 2010-09-07 | 2013-05-08 | 株式会社尼康 | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
| CN103097957B (en) * | 2010-09-07 | 2015-11-25 | 株式会社尼康 | The manufacture method of mobile body device, object processing apparatus, exposure device, flat-panel monitor and manufacturing method |
| WO2013177874A1 (en) * | 2012-05-28 | 2013-12-05 | 京东方科技集团股份有限公司 | Alignment identifier and method using alignment identifier to manufacture workpiece in exposure process |
| CN107608177A (en) * | 2017-10-22 | 2018-01-19 | 长春工业大学 | A kind of device and method for manufacturing overlarge area nano impression seamless pattern |
| CN107608177B (en) * | 2017-10-22 | 2024-01-02 | 长春工业大学 | Device and method for manufacturing ultra-large area nano-imprinting seamless pattern |
| CN113341657A (en) * | 2020-03-03 | 2021-09-03 | 株式会社斯库林集团 | Drawing device |
| CN112693947A (en) * | 2020-12-21 | 2021-04-23 | 江苏迪盛智能科技有限公司 | Pulling deviation processing method and device, electronic equipment and storage medium |
| CN112777381A (en) * | 2020-12-21 | 2021-05-11 | 江苏迪盛智能科技有限公司 | Tailing identification method and device, electronic equipment and storage medium |
| CN112693947B (en) * | 2020-12-21 | 2022-09-27 | 江苏迪盛智能科技有限公司 | Pulling deviation processing method and device, electronic equipment and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101546133B (en) | 2012-07-04 |
| JP5117243B2 (en) | 2013-01-16 |
| JP2009237334A (en) | 2009-10-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101546133B (en) | Exposure device and an exposure method | |
| TWI381252B (en) | A focal length adjustment method for an exposure apparatus of a belt-like workpiece and an exposure apparatus for a belt-like workpiece | |
| CN101377624B (en) | Exposure device and exposure process | |
| TWI446122B (en) | Exposure apparatus | |
| JP5382899B2 (en) | Exposure equipment | |
| US8451426B2 (en) | Exposure method and exposure apparatus | |
| US20150212426A1 (en) | Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing method | |
| TWI481971B (en) | Exposure method and exposure apparatus | |
| JP5235061B2 (en) | Exposure equipment | |
| KR101660918B1 (en) | Exposure device and photo mask | |
| CN107450276A (en) | Exposure device | |
| EP0443106B1 (en) | Exposure apparatus | |
| JP5499399B2 (en) | Exposure apparatus and exposure method | |
| TW201314384A (en) | Film exposure device | |
| JP5499398B2 (en) | Exposure apparatus and exposure method | |
| JP2801685B2 (en) | Projection position adjustment method in exposure apparatus | |
| TWI548947B (en) | Exposure apparatus and photomask | |
| JPH04156464A (en) | Film exposure device | |
| JP2859433B2 (en) | Moving mechanism and exposure apparatus using this moving mechanism | |
| JP6460699B2 (en) | Direct exposure system | |
| JPH05152384A (en) | Focal point detection method of film exposure device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |