KR101600810B1 - Roll to roll exposure device - Google Patents

Abstract

The present invention relates to an exposure apparatus, which comprises a mask support having a mask including a plurality of first alignment marks facing each other, a plurality of first alignment marks corresponding one-to-one with the plurality of first alignment marks, A plurality of camera portions for picking up a mark and positioning the mask at a reference position, a film including a plurality of mutually opposing second alignment marks, and winding the film including the first alignment mark in the first position among the plurality of second alignment marks A winding portion for aligning the mark in a camera portion at a first position among the plurality of camera portions and a film winding portion for winding the film while winding the film at the winding portion, And aligning the alignment mark in the camera portion at the second position among the plurality of camera portions.

Description

[0001] ROLL TO ROLL EXPOSURE DEVICE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to exposure technology, and more particularly, to an exposure apparatus capable of minimizing an error generated in an exposure process.

Generally, a predetermined pattern is sensitized by an exposure apparatus to an exposure subject (e.g., glass, wafer, substrate, etc.) coated with a photosensitive material such as a photoresist and then subjected to an etching process Photolithographic method for forming a pattern on an object to be exposed has been widely applied in various fields.

In such an exposure apparatus, a vacuum adhesion method in which a photomask and an object to be exposed are brought into close contact with each other by vacuum is widely adopted in order to improve the adhesion between the photomask and the object to be exposed.

However, in such an exposure apparatus using the vacuum adhesion method, it is very difficult and many problems to bring the photomask and the object to be exposed in close contact with each other perfectly uniformly. In other words, since the photomask is made of glass or a resin plate on which a glass or a photomask film on which circuits to be exposed are drawn is vacuum-adsorbed, when the photomask is brought into contact with the exposure target object by the vacuum pressure, Scattering of light occurs due to a gap generated between the masks, resulting in defective contact at the time of exposure.

Korean Patent Laid-Open No. 10-2008-0039202 discloses an exposure apparatus for a printed wiring board. An exposure apparatus for a printed wiring board is provided with an exposure table on which a substrate to be exposed is placed, a film mask on which a pattern to be exposed is drawn on a substrate to be exposed, and a fluid to be introduced between the film mask and the periphery of the film mask A power device for bringing the exposure table and the film mask holder close to each other, and a sealing space for accommodating the substrate and the film mask is formed by sealing the gap between the exposure table and the film mask holder by the proximity of the film mask holder A first contact means for firstly bringing the film mask and the substrate into close contact with each other by reducing the airtightness of the sealed space and a second contact means for applying predetermined pressure between the film mask and the photo mask holder A fluid is introduced by a pressure, and the film mask and the substrate are brought into close contact again, To be characterized by having. According to the disclosed technology, it is possible to make the adhesion between the film mask and the substrate the most favorable, thereby obtaining an exposure with high precision, shortening the exposure time, and increasing the film mask or preventing deformation.

Korean Patent Laid-Open No. 10-2007-0066832 discloses a close-contact type exposure apparatus that improves the adhesion between a photomask and a substrate. The contact type exposure apparatus includes a platen for positioning a printed wiring board thereon, a photomask for drawing a pattern to be exposed, contacting the printed wiring board to expose the pattern, And a suction device for sucking the photomask between the photomask and the printed wiring board, characterized in that the contact type exposure device has a shape surrounding the printed wiring board, And a frame disposed on the platen on the inner side of the sealing device so as to surround the printed wiring board with substantially the same thickness as the substrate. According to the disclosed technique, the frame body is constituted by a single member, which can be securely fixed by suction, is easy to mount or take out, and can be automatically transported and automatically replaced.

Korean Patent Publication No. 10-2008-0039202 Korean Patent Publication No. 10-2007-0066832

An exposure apparatus according to an embodiment of the present invention provides an exposure apparatus capable of minimizing an error generated in an exposure process.

An exposure apparatus according to an embodiment of the present invention is intended to provide an exposure apparatus capable of aligning a film to a mask through a winding operation and a winding operation.

In embodiments, the exposure apparatus may include a mask support having a mask including a plurality of first alignment marks facing each other, a plurality of first alignment marks corresponding one-to-one with the plurality of first alignment marks, A plurality of camera parts for picking up the mask and positioning the mask at a reference position, a film including a plurality of mutually opposing second alignment marks to be wound, and aligning the alignment marks in the first position among the plurality of second alignment marks A winding portion for aligning a mark to a camera portion at a first position among the plurality of camera portions and a film winding portion for winding the film at a second position among the plurality of second alignment marks while winding the film at the winding portion And aligning the alignment mark with the camera portion in the second position among the plurality of camera portions. Each of the first and second positions may correspond to a traveling direction of the film and a traveling direction of the film.

In one embodiment, an alignment mark disposed at the take-up portion or the take-up portion and at a third position among the plurality of second alignment marks is aligned with a camera portion at a third position among the plurality of camera portions And a tension adjusting unit for aligning the alignment mark at the fourth position among the plurality of second alignment marks to the camera unit at the fourth position among the plurality of camera units.

In one embodiment, the winding portion includes a first roller for maintaining the balance of the film, and a second roller for winding the film and rotating the first roller in the first direction and aligning the alignment marks in the first position, . ≪ / RTI >

In one embodiment, the unwind comprises a third roller facing the first roller and maintaining the balance of the film, and a third roller rotated in the first direction through rotation of the second roller, And a fourth roller for winding the third roller in the second direction while winding the first roller in a second direction opposite to the first direction while aligning the marks.

In one embodiment, each of the plurality of first alignment marks may be disposed in alignment with each of the plurality of cameras at an edge of the mask. Each of the second alignment marks is disposed at an edge of the film, and when aligned with the first alignment marks, the first alignment marks may be positioned at an inner center thereof.

In one embodiment, the exposure apparatus may further include a control unit for controlling the winding unit and the unwinding unit until the alignment mark in the first position and the alignment mark in the second position are aligned.

In one embodiment, the exposure apparatus may further include an exposure unit disposed on the mask support and configured to expose the film through the mask when the alignment marks in the first and second positions are aligned.

In embodiments, the exposure apparatus may include a mask (including first alignment marks at first and second positions) disposed on the mask support, a film (a second alignment at the first and second locations Marks including a plurality of marks in the first direction), winding the film in a first direction, aligning marks in a first position of the mask and alignment marks in a first position of the film, A winding portion for aligning with a camera portion in a film traveling direction and a film winding portion for winding the film in a second direction while the alignment is performed to align the alignment mark and the alignment portion in the second position of the film, And a marking portion for aligning the mark with the camera portion in the opposite direction of the film from the center of the exposed portion.

In embodiments, the exposure apparatus includes a mask support, a film (including second alignment marks at first and second locations) with a mask comprising first alignment marks at first and second positions A winding part for winding the film in a second direction while the film is wound by the winding part, and a winding part for winding the film in a second direction, Aligning a first alignment mark at a first position of the film with a first alignment mark at a first position of the film and a second alignment mark at a first position of the film at a second position of the mask, And a control section for aligning the mark and a second alignment mark in a second position of the film on a camera section in a direction opposite to the film advancing direction.

The exposure apparatus according to an embodiment of the present invention minimizes the error generated in the exposure process, thereby lowering the manufacturing cost of the product, the defective product rate, and the efficiency of product production.

1 is a view for explaining an exposure apparatus according to an embodiment of the present invention.
Fig. 2 is a view for explaining a process in which the winding part and the winding part in Fig. 1 wind the film in opposite directions to each other.
Fig. 3 is a view for explaining a process of winding in the same direction of the winding section and the winding section shown in Fig.
4 is a view for explaining a mask used in Fig.
Fig. 5 is a view for explaining a film used in Fig. 1. Fig.
6 is a view for explaining a process of aligning alignment marks of a mask and a film according to an embodiment of the present invention.
Fig. 7 is a view for explaining an aligned state of the alignment marks of the mask and the film in Fig. 6. Fig.
FIG. 8 is a view for explaining that the exposure apparatus shown in FIG. 1 further includes a tension adjusting unit. FIG.
Fig. 9 is a view for explaining that the film of Fig. 6 is abnormally aligned.

The description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas. Also, the purpose or effect of the present invention should not be construed as limiting the scope of the present invention, since it does not mean that a specific embodiment should include all or only such effect.

Meanwhile, the meaning of the terms described in the present application should be understood as follows.

The terms "first "," second ", and the like are intended to distinguish one element from another, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It should be understood that the term " and / or " includes all possible combinations from one or more related items. For example, the meaning of " first item, second item and / or third item " may be presented from two or more of the first, second or third items as well as the first, second or third item It means a combination of all the items that can be.

It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

It should be understood that the singular " include "or" have "are to be construed as including a stated feature, number, step, operation, component, It is to be understood that the combination is intended to specify that it does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

In each step, the identification code (e.g., a, b, c, etc.) is used for convenience of explanation, the identification code does not describe the order of each step, Unless otherwise stated, it may occur differently from the stated order. That is, each step may occur in the same order as described, may be performed substantially concurrently, or may be performed in reverse order.

The present invention can be embodied as computer-readable code on a computer-readable recording medium, and the computer-readable recording medium includes all kinds of recording devices for storing data that can be read by a computer system . Examples of the computer-readable recording medium include a ROM, a RAM, a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, and the like, and also implemented in the form of a carrier wave (for example, transmission over the Internet) . In addition, the computer-readable recording medium may be distributed over network-connected computer systems so that computer readable codes can be stored and executed in a distributed manner.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used predefined terms should be interpreted to be consistent with the meanings in the context of the related art and can not be interpreted as having ideal or overly formal meaning unless explicitly defined in the present application.

FIG. 1 is a view for explaining an exposure apparatus according to an embodiment of the present invention, FIG. 2 is a view for explaining a process in which the winding unit and the winding unit shown in FIG. 1 are rotated in opposite directions, And the winding part and the winding part rotate in the same direction.

1 to 3, the exposure apparatus 100 includes an exposure unit 110, a mask support 120, a plurality of camera units 130, a winding unit 140, a winding unit 150, and a control unit 160 ), And can be implemented by a roll-to-roll method.

The exposure unit 110 may be disposed on top of the mask support 120 and may expose the film 30 through a mask 122 disposed on top of the mask support 120. Here, the exposure unit 110 may be arranged in line with the mask support 120, and may be disposed at the center of the winding unit 140 and the winding unit 150. The exposure unit 110 can perform exposure when the film 30 is disposed at the center of the take-up unit 140 and the take-up unit 150 (i.e., the lower end of the exposure unit 110). Here, the film 30 may be disposed in the center of the exposure unit 110 through alignment of the plurality of camera units 130 and the mask 122.

The mask support 120 may have a mask 122 disposed thereon, and a film 30 disposed thereunder. Here, the mask 122 is a tempered glass or a transparent resin plate obtained by vacuum-adsorbing a photomask film on which circuits to be exposed are drawn.

In one embodiment, the mask support 120 can receive the alignment signal of each of the plurality of camera portions 130 and can be moved to the correct exposure position through this alignment signal. Such movement may include x-axis movement (horizontal movement), y-axis movement (vertical movement), and rotational movement.

The plurality of camera units 130 are disposed toward the mask 122 and the film 30 in the lower part of the exposure unit 110 and are arranged to face the mask 122 and the film 30 through the plurality of images picked up by the respective lenses. Can be aligned. Here, the plurality of camera units 130 may be disposed along the edges of the mask 122 and the film 30, respectively.

The winding unit 150 is disposed on one side of the exposure apparatus 100 and may include first and second rollers 152 and 154.

The first roller 152 is connected to the motor and can rotate in the first direction (a) to the second direction (b) to pull or wind the film 30. More specifically, the first roller 152 rotates in the second direction b to align the alignment mark of the film 30 and the mask 122 captured through the plurality of camera sections 130, 30 can be wound, or the film 30 can be wound by rotating in the first direction (a). Here, the first direction (a) and the second direction (b) indicate directions opposite to each other. That is, when the first direction (a) is the clockwise direction, the second direction corresponds to the counterclockwise direction (b).

In one embodiment, the motor connected to the first roller 152 may be a bi-directional motor rotatable in the forward / reverse direction.

The second roller 154 may be rotatably disposed in the first and second directions a and b so that the film 30 that needs to be exposed is balanced and positioned at the lower end of the exposure unit 110 have. The second roller 154 is rotated in the first direction (a) to the second direction (b) in accordance with the rotation of the first roller 154 to maintain the film 30 without wrinkling or bending, Damage can be prevented.

The winding unit 140 may be disposed on the other side of the exposure apparatus 100 and may include third and fourth rollers 142 and 144.

The third roller 142 rotates in the first and second directions (the first and second directions) so that the film 30, which is exposed at the position opposite to the second roller 154, a, b. The third roller 142 is rotated in the first direction (a) to the second direction (b) in accordance with the rotation of the fourth roller 144 to maintain the film 30 without wrinkling or bending, Damage can be prevented.

The fourth roller 144 is connected to the motor and can rotate in the first direction (a) to wind the film 30. More specifically, the fourth roller 144 is disposed at a position opposite to the first roller 152, and when aligning the alignment marks of the film 30 and the mask 122, or when the film 30, The film 30 can be wound by rotating in the first direction (a).

In one embodiment, the exposure apparatus 100 includes a fixture (not shown) for fixing the aligned film 30 with the alignment marks of the film 30 and the mask 122 at the first position 610 and the second position 620, (Not shown).

4 and 5, the alignment marks in each of the film 30 and the mask 122 will be described.

4 is a view for explaining a mask used in Fig.

In FIG. 4, the mask 122 is disposed at the top of the mask support 120 and may include first alignment marks 10 along the edges. In one embodiment, each of the first alignment marks 10 may be embodied as a dot 12. Here, the first alignment marks 10 are embodied by the dots 12, but as one example, the first alignment marks 10 may be changed to various shapes according to design requirements so as to more accurately grasp the imaging position of the camera unit 130 .

The mask 122 may be aligned with the correct position of the mask support 120 through the plurality of camera portions 130. The first alignment marks 10 may correspond one-to-one with the plurality of camera units 130 and each camera unit 130 may be used to image the alignment mark and align the mask 122 to the correct exposure position have.

Each of the plurality of camera units 130 can detect an error between the current imaging position and the corresponding alignment mark in the mask 122 and the error includes the direction in which the alignment mark is present and the distance with respect to the current imaging position . Each of the plurality of camera units 130 transmits the error to the controller 160 as an alignment signal and the controller 160 controls the mask support 120 so that the mask 122 can be aligned with the correct exposure position .

Fig. 5 is a view for explaining a film used in Fig. 1. Fig.

In Figure 5, the film 30 may include second alignment marks 20 along the edges. In one embodiment, each of the second alignment marks 20 may be embodied as a ring 22 so as not to overlap each of the first alignment marks (e.g., dots 12). Here, the second alignment marks 10 are embodied by the ring 22, but as an example, the alignment of the first alignment marks 10 within the second alignment marks 20 Can be changed into various shapes according to design requirements so that it can be performed more accurately.

The exposure apparatus 100 aligns the first alignment marks 10 in the mask 122 and the second alignment marks 20 in the film 30 through the plurality of camera units 130 .

First, a process of the exposure apparatus 100 aligning the mask 122 to the correct exposure position through the plurality of camera units 130 will be described.

The plurality of camera units 130 pick up the first alignment marks 10 positioned at the edge of the mask 122 and the control unit 160 receives the error measured by the plurality of camera units 130 The mask support 120 is moved and finally the mask 122 is aligned with the exposure position.

Hereinafter, a process of aligning the film 30 to the mask 122 through the plurality of camera units 130 will be described with reference to FIGS. 6 and 7. FIG.

The exposure apparatus 100 drives the winding unit 140 to wind the film 30 in the first direction a and drives the winding unit 150 to wind the film 30 in the second direction b do. The exposure apparatus 100 captures the second alignment marks 20 (i.e., the rings 22) in the film 30 through the plurality of camera sections 130 to form the second alignment marks 20, The tension applied to the film 30 through the winding portion 140 and the winding portion 150 can be adjusted so that the shape of the film 30 is circular. The exposure apparatus 100 aligns and aligns the second alignment marks 20 (i.e., the rings 22) and winds up and winds them in the first direction (a) of the take-up unit 140 and the take- The first alignment marks 10 (i.e., dots 12) in the mask 122 are aligned with the center of the second alignment marks 20 (i.e., the rings 22) . The control unit 160 receives an error between the first and second alignment marks 10 and 20 through the plurality of camera units 130 and outputs the detection result to the winding unit 140 and the winding unit 150 So that the first alignment marks 10 are positioned at the center of the second alignment marks 20.

The winding unit 140 is configured to wind the second alignment marks 20 at the first position 610 of the film 30 through the plurality of camera units 130 to the first position 610 of the mask 122 To the first alignment marks 10 in the first alignment mark 10 in the first embodiment.

The winding unit 140 winds the film 30 in the first direction a through the fourth roller 144 and the control unit 160 rotates the first position 610 in the winding direction in the first direction a, The first and second alignment marks 10 and 20 at the first position 610 are imaged through the plurality of camera units 130 located at the upper portions of the first alignment marks 10 , Dots 12) are located inside the second alignment marks 20 (i.e., the rings 22). That is, the controller 160 operates the winding by the winding unit 140 until the first and second alignment marks 10 and 20 in the first position 610 are aligned, and when the alignment is completed It is possible to stop the winding by the winding unit 140. [

Hereinafter, the winding unit 150 applies the second alignment marks 20 in the second position of the film 30 through the plurality of camera units 130 to the first alignment marks 20 in the second position of the mask 122 A process of aligning the marks 10 with each other will be described.

The winding unit 150 winds the film 30 in the second direction b through the first roller 152 and the control unit 160 rotates the second position 620 in the winding process in the second direction b The first and second alignment marks 10 and 20 in the second position 620 are imaged through the plurality of camera units 130 positioned at the upper portions of the first alignment marks 10 , Dots) are located inside the second alignment marks 20 (i.e., the rings). That is, the controller 160 operates the winding by the winding unit 150 until the first and second alignment marks 10 and 20 in the second position 620 are aligned, and when the alignment is completed It is possible to control to stop winding by the winding unit 150.

The control unit 160 can simultaneously wind up the winding unit 140 and the winding unit 150 to align the first and second alignment marks 10 and 20. [ More specifically, when the first and second alignment marks 10 and 20 are aligned as shown in FIG. 6, the controller 160 controls the first roller 142 in the second direction (b) 154 are simultaneously wound in the first direction a to stretch the film 30 with the tension applied to the film 30 and the error of the first and second alignment marks 10, The first and second positions 610 and 620 located at the first position 610 and the second position 620, respectively, as shown in FIG. 7, are received through the plurality of camera units 130 and the magnitude of the tension applied to the film 30 is adjusted, The marks 10 may be aligned in the center of the second alignment marks 20.

The control unit 160 may control the fixing unit (not shown) formed at the first position 610 and the second position 620 to fix the film 30 at the alignment completion position.

The control unit 160 performs an exposure operation on the film 30 through the exposure unit 110 when alignment of the alignment marks of the first position 610 and the second position 620 is completed, The film 30 can rotate the first roller 142 and the fourth roller 154 in the first direction a and discharge them to the outside of the exposure apparatus 100. [

The control unit 160 operates the winding by the winding unit 140 until the first and second alignment marks 10 and 20 in the first position 610 are aligned, (Not shown) until the first alignment marks 10 and the second alignment marks 20 in the second position 620 are aligned, Can be operated.

8 is a view for explaining an exposure apparatus further including the tension adjusting unit shown in Fig.

Referring to FIG. 8, the exposure apparatus 100 may further include a tension adjusting unit 170.

The tension adjusting portion 170 is disposed in at least one of the winding portion 140 to the winding portion 150 so that the tension applied to the film 30 wound on the winding portion 140 to the winding portion 150 is uniform can do.

In one embodiment, the tension adjuster 170 includes a small motorized valve or actuator capable of applying tension in the direction in which the film 30 is wound or unwound at the third position 910 and the fourth position 920 Can be used.

9, the tension adjuster 170 may be configured such that the tension applied to the third position 910 and the fourth position 920 of the film 30 is different from each other so that alignment is performed at the third position 910 7, the tension applied through the tension adjuster 170 connected to the third position 910 of the film 30 is adjusted so that the third position 910 of the film 30 910 may be aligned with the center of the second alignment mark 20. The first alignment mark 10 may be aligned with the second alignment mark 20, Here, the aligned film 30 can be fixed through a fixing portion (not shown) formed at the first position 610 and the second position 620, respectively.

The control unit 160 determines whether or not alignment of the alignment marks of the first position 610 and the second position 620 is completed when the alignment of the alignment marks of the third position 910 and the fourth position 920 is completed And the exposure of the film 30 may be performed through the exposure unit 110. [

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the present invention as defined by the following claims It can be understood that

100: Exposure device
110:
120: mask support 122: mask
130: a plurality of camera units
140: winding section 142: third roller
144: fourth roller
150: spool 152: first roller
154: second roller
160:
170:
10: first alignment marks 12: dot
20: 2nd alignment marks 22: ring
30: Film
610: First position
620: Second position
910: Third position
920: fourth position

Claims (11)

A mask support having a mask including a plurality of first alignment marks facing each other;
A plurality of camera units corresponding one-to-one to the plurality of first alignment marks, for imaging the plurality of first alignment marks and positioning the mask at a reference position;
A film including a plurality of second alignment marks facing each other is wound up and an alignment mark at a first position among the plurality of second alignment marks is projected onto a camera section at a first position among the plurality of camera sections An aligning winding portion;
And winding the film while winding the film in the winding section to align the alignment mark at the second one of the plurality of second alignment marks to the camera section at the second one of the plurality of camera sections A winding part;
And a second alignment mark in the first position and a second alignment mark in the first and second positions, based on an error of the first and second alignment marks at the first position and an error of the first and second alignment marks at the second position, The marks being aligned in the center of the second alignment marks and the size of the tension applied to the film through the winding or unwinding of each of the winding section and the winding section so that the shape of the second alignment marks is circular, ; And
And third and fourth positions of the film when the tension applied to the third and fourth positions is different from each other to adjust the tension of the third position or the fourth position of the film, And a tension adjusting unit for uniformly controlling the tension of the fourth positions.
delete [2] The apparatus according to claim 1,
A first roller for maintaining the balance of the film; And
And a second roller for winding the film and rotating the first roller in a first direction and aligning the alignment marks in the first position.
The apparatus as claimed in claim 3, wherein:
A third roller facing the first roller and maintaining the balance of the film; And
Wherein the second roller is rotated in the first direction through rotation of the second roller and is wound in a second direction opposite to the first direction while aligning the alignment marks in the first position, And a fourth roller which rotates in the direction of the first roller.
The method of claim 1, wherein each of the first and second positions
Wherein the direction of travel of the film and the direction of travel of the film are opposite.
The method of claim 1, wherein each of the plurality of first alignment marks
And is disposed in alignment with each of the plurality of cameras at an edge of the mask.
7. The method of claim 6, wherein each of the second alignment marks
Wherein the first aligning marks are disposed at the edges of the film and when the first aligning marks are aligned with the first aligning marks, the first aligning marks are positioned at an inner center of the film.
delete The method according to claim 1,
And an exposure unit disposed on the mask support and configured to expose the film through the mask when the alignment marks in the first and second positions are aligned.
(Including second alignment marks at first and second positions) through a mask (including first alignment marks at first and second positions) disposed on the mask support An exposure section;
Winding the film in a first direction to align an alignment mark at a first position of the mask and an alignment mark at a first position of the film to a camera portion in the direction of travel of the film at a center of the exposure portion A winding section;
Winding the film in a second direction while the alignment is being performed to align the alignment mark at the second position of the mask and the alignment mark at the second position of the film in the direction opposite to the advance direction of the film A winding part arranged on the camera part;
And a second alignment mark in the first position and a second alignment mark in the first and second positions, based on an error of the first and second alignment marks at the first position and an error of the first and second alignment marks at the second position, The marks being aligned in the center of the second alignment marks and the size of the tension applied to the film through the winding or unwinding of each of the winding section and the winding section so that the shape of the second alignment marks is circular, ; And
And third and fourth positions of the film when the tension applied to the third and fourth positions is different from each other to adjust the tension of the third position or the fourth position of the film, And a tension adjusting unit for uniformly controlling the tension of the fourth positions.
delete

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