JP4845746B2 - Transport device - Google Patents

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tape-like transport device on which electronic components are mounted, and particularly to a transport device that separates and transports a tape and a protective sheet from a reel wound so that the tape and the protective sheet face each other. It is.

  In recent years, substrates on which electronic components are mounted have been made thinner, and with the expansion of the range of use, the dimensions have also diversified to a thickness of 12.5 to 50 μm and a width of 35 to 250 mm. Such a substrate is formed as a long and film-like tape because of easy handling and high productivity. Since this tape is long, it is handled while being wound on a reel during each processing step such as exposure, cleaning, etching, inspection, and assembly. In the process, a resist or a metal thin film for a circuit is applied, or an electronic component is mounted. Therefore, between the tapes wound around the reel, a protective sheet that is substantially the same shape as the tape in order to prevent foreign matter from adhering to the surface of the tape and to prevent deformation and damage of the leads of the electronic components mounted on the tape. Has been intervened.

  On the other hand, the processing target in each processing step is only a tape, and a protective sheet is unnecessary. Therefore, in a transport device that transports the tape to each processing step, the tape and the protective sheet are separated and sent out from a supply reel around which the tape and the protective sheet are wound, and only the tape is transported to the processing step. And when winding the tape which finished the process on a take-up reel, a protective sheet is again interposed between tapes.

FIG. 5 is a schematic view of a transport apparatus according to the first prior art.
As a first prior art, as shown in FIG. 5, a supply reel 101 on which a tape T1 and a protective sheet S1 are wound in a state in which the protective sheet S1 is interposed between wound tapes T1, and this The take-up reel 102 that takes up the tape T1 sent out from the supply reel 101, the take-up reel 103 that takes up the protective sheet S1 sent out from the supply reel 101 separately from the tape T1, and the take-up reel 102 A supply reel 104 on which a protective sheet S2 for interposing between the tapes T1 to be taken is wound, a processing unit 105 provided between the supply reel 101 and the take-up reel 102, which is a transport system for the tape T1, (For example, patent documents 1 to 3). In the transport device 100, the tape T1 and the protective sheet S1 are separated and transported so that the processing unit 105 can process only the tape T1.

  In the transport device 100, when the protective sheet S1 is wound from the supply reel 101 to the take-up reel 103, the tension is adjusted. Specifically, (1) in Patent Document 1, a nip roller is provided between the supply reel 101 and the take-up reel 103 for the protective sheet. (2) In Patent Document 2, the take-up reel 103 for the protective sheet is provided. A motor is connected to the drive shaft via a clutch. Further, in order to adjust the tension of the protective sheet S2 to be wound on the take-up reel 103 side, in (3) Patent Document 3, tension is applied to the tape T1 using the elastic force of the spring on the protective sheet S2. Yes.

FIG. 6 is a schematic view of a transport apparatus according to the second prior art.
As a second prior art, as shown in FIG. 6, a supply reel 201 around which a tape T1 and a protective sheet S1 are wound, and a take-up reel around which the tape T1 and the protective sheet S1 fed out from the supply reel 201 are wound up. 202, a transport system 203 of the tape T1 from the supply reel 201 to the take-up reel 202, a transport system 204 of the protective sheet S1 from the supply reel 201 to the take-up reel 202, and an inspection device 205 provided in the transport system 203. There is a device 200 provided with (see, for example, Patent Document 4). In this apparatus 200, the tape T1 and the protective sheet S1 delivered from the supply reel are separately conveyed by the respective conveyance systems 203 and 204, and only the tape T1 can be inspected by the inspection apparatus 205.
Japanese Patent No. 3666321 JP 2004-193259 A JP 2005-93958 A Japanese Patent Laying-Open No. 2005-5586

  However, in the first prior art, as shown in FIG. 5, a dedicated take-up reel 103 for taking up the protective sheet S <b> 1 sent out from the supply reel 101 is required, and the take-up reel 103 is taken up. As a tension adjusting device for the protective sheet S1, a nip roller, a clutch, a spring, and the like are required, and there is a problem that ancillary facilities increase. When winding the processed tape T1, it is necessary to separately install a protective sheet supply reel 104 in the vicinity of the take-up reel 102 so as to interpose the protective sheet S2 between the tapes T1. There was a problem of being bad.

  On the other hand, in the second prior art, as shown in FIG. 6, the protective sheet S1 sent out from the supply reel 201 is taken up as it is by the take-up reel 202, so that no additional equipment (the take-up reel 103 in FIG. 5) is required. become. However, since the supply reel 201, the inspection device 205, and the take-up reel 202 are arranged in the horizontal direction, there is a problem that the device becomes large and a large installation space is required.

  Further, in the apparatus 200, since the transport system 204 is disposed above the inspection apparatus 205, there is a problem that dust adhering to the protective sheet S1 is scattered in the work area of the inspection apparatus 205.

  Furthermore, in the transport system 203, the apparatus 200 adjusts the tension by loosening the tape T1 between the supply reel 201 and the inspection apparatus 205, between the inspection apparatus 205 and the take-up reel 202, and the like. In the transport system 204, since the tension of the protective sheet S1 is adjusted only immediately before the take-up reel 202, it is difficult to synchronize the travel of the tape T1 and the travel of the protective sheet S1. Therefore, there is a problem that the balance between the winding of the tape T1 and the protective sheet S1 on the winding reel 202 is deteriorated.

  Therefore, the present invention provides a transport device that solves the problem, does not provide any incidental equipment, and is smaller in size than the prior art and prevents dust from scattering to the work area of the processing stage. Let it be an issue. It is another object of the present invention to provide a transport device that can take up a tape and a protective sheet with good balance.

In order to solve these problems, a transport device according to a first aspect is provided with a workpiece, which is a film-like substrate for mounting electronic components wound around a reel, with a protective sheet interposed along a vertical direction. In the transfer device arranged on one side of the processing stage as a boundary, the workpiece is wound with a protective sheet interposed therebetween, and only the workpiece is sent to the processing stage, and the protective sheet is connected to the processing stage. Supply reel that feeds in different directions, a take-up reel that is provided below the supply reel and winds up the workpiece processed by the processing stage via a protective sheet fed from the supply reel, and processes the workpiece from the supply reel It has a work conveying means for conveying to the take-up reel via the stage, and a protective sheet conveying means for conveying the protective sheet to the take-up reel .

According to such a configuration, the work fed from the supply reel is transported to the take-up reel while the surface is processed by the processing stage by the work transport means. The protective sheet sent out from the supply reel is conveyed to the take-up reel by the protective sheet conveying means. That is, the work and the protective sheet sent out from the supply reel are transported by separate transport means, and then wound around the take-up reel in a combined state. Therefore, a dedicated reel for winding the protective sheet can be eliminated.
In addition, since the take-up reel is provided below the supply reel, the horizontal length of the work transfer system is shorter than that of the prior art, and the apparatus can be miniaturized.
Further, since the protective sheet conveying means is provided by detouring in the direction different from the processing stage up to the supply reel and the take-up reel, even if dust is attached to the protective sheet, the protective sheet conveying means is free of dust in the work area of the processing stage. Can be prevented from scattering.

According to a second aspect of the present invention, there is provided a conveying device comprising: a first roller that guides the protective sheet sent from the supply reel by the protective sheet conveying means; a second roller that guides the protective sheet to the take-up roller; a first roller; A first air dancer for adjusting the tension of the protective sheet between the rollers and a protective sheet tension adjusting means;
According to such a structure, the tension | tensile_strength of a tape can be adjusted with a protection sheet tension | tensile_strength adjustment means, and a protection sheet can be conveyed under the tension | tensile_strength stable.

According to a third aspect of the present invention, there is provided a conveyance device including a workpiece conveyed from a supply reel to a take-up reel via a processing stage, and a protective sheet conveyed from the supply reel to the take-up reel via the supply reel and the take-up reel. According to such a configuration constituting a closed loop, a dedicated reel for winding the protective sheet can be eliminated.

In the fourth aspect, the first detector for detecting the position in the width direction of the workpiece conveyed from the processing stage to the take-up reel and the position in the width direction of the protective sheet conveyed from the supply reel to the take-up reel are detected. And a width direction of the workpiece wound around the take-up reel and the protective sheet is matched based on the results of the first detector and the second detector.
According to such a configuration, both of the tape T and the protective sheet S can be wound on the take-up reel in a state where the width direction of the tape T and the width direction of the protective sheet S are accurately matched.

In a fifth aspect, the work conveying means is provided between the supply reel and the processing stage, and includes a first tension adjusting means for adjusting the tension of the work supplied to the processing stage, and a processing stage and a take-up reel. A second tension adjusting means provided between the second tension adjusting means for adjusting the tension of the work wound on the take-up reel, and the first tension adjusting means includes a third roller for guiding the tape fed from the supply reel; A fourth roller for guiding the tape to the processing stage side, and a second air dancer for adjusting the tension of the tape between the third roller and the fourth roller, and the second tension adjusting means is provided from the processing stage side. A fifth roller for guiding the tape, a sixth roller for guiding the tape to the take-up reel, and a third air dancer for adjusting the tension of the tape between the fifth roller and the sixth roller.
According to such a configuration, the tension can be adjusted by the first tension adjusting means and the second tension adjusting means, and the tape can be conveyed with a stable tension.

The transport device according to the present invention has the following excellent effects.
(1) Since the work and the protective sheet sent out from the supply reel are configured to be wound around the take-up reel in a combined state, additional equipment such as a take-up reel dedicated to the protective sheet is not required. it can.
(2) Since the take-up reel is provided below the supply reel, the apparatus can be made smaller than in the prior art.
(3) By preventing the protective sheet conveying means from detouring in a direction different from the processing stage, it is possible to prevent dust from being scattered in the work area of the processing stage even when dust is attached to the protective sheet. Can do.
(4) The protective sheet and the workpiece can be wound around the take-up reel in the width direction.
(5) Since the protective sheet conveying means has the protective sheet tension adjusting means and the workpiece conveying means has the first and second tension adjusting means, the tension between the workpiece and the protective sheet can be stabilized, and the workpiece and the protection are protected. The sheet can be wound in a well-balanced manner.

The best mode for carrying out the present invention will be described below with reference to the drawings.
FIG. 1 is an overall perspective view showing a transfer apparatus and an exposure apparatus according to this embodiment, and FIG. 2 is a schematic view showing the transfer apparatus and the exposure apparatus according to this embodiment.

  As shown in FIG. 1, the transport apparatus A according to the present embodiment uses only the tape T out of the tape T (work) and the protective sheet S to be sent to the exposure stage 14 (processing stage) of the exposure apparatus E (processing section). It is a device to convey. First, the tape T, the protective sheet S, and the exposure apparatus E will be described in order.

<Configuration of tape T and protective sheet S>
The tape T is a film-like substrate, and becomes a substrate on which electronic components are mounted through respective processing steps such as exposure, cleaning, etching, and inspection. Here, although it demonstrates as a tape applied to the exposure apparatus E in an exposure process, the process process in which the tape T is applied is not limited to this. This tape T has dimensions of, for example, a width of 250 mm, a thickness of 25 μm, and a length of 200 m, and a plurality of perforation holes f formed at predetermined intervals are provided along the length direction on both sides in the width direction. There may be.
The protective sheet S is a sheet formed of thin paper or the like that protects the surface of the tape T, and is interposed between the tapes T wound around the reel. This protective sheet S is formed in substantially the same shape as the tape T.

<Configuration of exposure apparatus E>
The exposure apparatus E is an apparatus that exposes the pattern of the mask M onto the tape T that is transported one block at a time by the transport apparatus A. The exposure apparatus E includes a light source system 11, a mask holding frame 12 that holds a mask M arranged on the optical axis of the light source system, and a projection optical system 13 that is arranged at a predetermined distance from the mask holding frame 12. And an exposure stage 14 arranged on the optical path of the irradiation light sent from the projection optical system 13. Further, the exposure apparatus E includes an imaging device 15 for aligning the alignment mark (not shown) between the tape T and the mask M prior to exposure, an image processing device 16 that performs image processing on the captured alignment mark, A device control device 17.

  The light source system 11 irradiates the mask M with light containing ultraviolet rays having a predetermined wavelength. The light source system 11 includes a lamp 11a, an elliptical mirror 11b provided so as to cover the lower surface side of the lamp 11a, a reflecting mirror 11c for changing the direction of irradiation light reflected by the elliptical mirror 11b, and the reflecting mirror 11c. The lens 11d adjusts the illuminance distribution of the reflected irradiation light.

  The mask holding frame 12 is a support frame that holds the mask M in a vertical state, and is installed so as to face the projection optical system 13. The mask holding frame 12 has a drive mechanism for moving the mask M in a vertical direction perpendicular to the incident optical axis of the projection optical system 13. A circuit pattern for one block to be projected onto the tape T is drawn on the mask M. In addition, an alignment mark for alignment with the tape T, an identification mark for identifying the mask itself, and the like are provided at predetermined positions. .

  The projection optical system 13 includes an incident side convex lens 13a and an output side convex lens 13b provided so that the optical axes of incident light and outgoing light coincide with the lens center. According to the projection optical system 13, the incident irradiation light passes through the incident-side convex lens 13a and the emission-side convex lens 13b, is emitted from the emission-side convex lens 13b, and is irradiated onto the tape T. Although the projection optical system 13 is used in the present embodiment, the optical system to which the present invention is applied is not particularly limited.

The exposure stage 14 is positioned at a predetermined distance from the projection optical system 13, the stage surface 14 a is disposed along the vertical direction, and is orthogonal to the optical axis of the irradiation light from the projection optical system 13. It is supposed to be. By arranging in this way, the horizontal length of the installation position of the transport system and the optical system can be shortened, and the transport device A can be downsized.
The exposure stage 14 is connected to a vacuum pump pipe (not shown), and is configured to adsorb and fix the tape T. In the exposure stage 14, the tape T is transported by one block, and exposure is performed after the alignment of the tape T and the mask M is completed.

  The imaging device 15 is a means for acquiring a positioning mark on the tape T and a positioning mark on the mask M, and includes a half mirror and a CCD camera. The imaging device 15 is retracted during exposure and is arranged at a position off the optical path.

The image processing device 16 outputs the image data of the positioning mark input from the imaging device 15 to the device control device 17.
The apparatus controller 17 also guides the guide roller 31c and stage guide rollers 32 and 32 of the tape transport system 3 so that the positions of the marks on the tape T and the mask M are aligned based on the image data from the image processing apparatus 16. And controls the guide roller 33b. Furthermore, the device control device 17 also controls the drive mechanism for the maximum M of the mask holding frame 12. Further, the device control device 17 controls the guide roller 41c of the protective sheet conveying system 4 so that the protective sheet S and the tape T are not wound in the width direction when the protective sheet S and the tape T are wound around the take-up reel 5.

<Configuration of transport device A>
Next, the configuration of the transport device A will be described. In the following, description will be made with the vertical and horizontal directions defined based on the state of the transfer device A shown in FIG.
As shown in FIG. 1 and FIG. 2, the transport device A includes a supply reel 2, a tape transport system 3 (tape transport unit) that transports the tape T, and a protective sheet transport system 4 that transports the protective sheet S ( Protective sheet conveying means) and a take-up reel 5.

≪Supply reel 2≫
A tape T is wound around the supply reel 2, and a protective sheet S is wound so as to face the tape T. The supply reel 2 is, for example, a reel having a diameter of 600 mm. The supply reel 2 is rotated clockwise by a drive shaft (not shown) being driven by a motor or the like. As a result, the tape T and the protective sheet S sent out from the supply reel 2 reach the take-up reel 5 via separate transport systems (tape transport system 3 and protective sheet transport system 4).

≪Tape transport system 3≫
As shown in FIG. 2, the tape transport system 3 is a system that transports the tape T from the supply reel 2 to the take-up reel 5, and an exposure device E is disposed in the middle thereof. The tape transport system 3 includes a first tension adjusting unit 31 provided between the supply reel 2 and the transport device A, and a pair of stage guide rollers 32 and 32 for guiding the tape T to the exposure stage 14 of the exposure device E. And a second tension adjusting means 33 provided between the exposure apparatus E and the take-up reel 5.

The first tension adjusting means 31 is arranged diagonally to the right of the supply reel 2 and adjusts the tension of the pair of guide rollers 31b and 31c (third roller and fourth roller) and the tape T provided therebetween. And a second air dancer 31a. The second air dancer 31a is formed in a box shape, and adjusts the tension of the tape T sent to the exposure apparatus E by loosening the tape T wound around the guide rollers 31b and 31c into a U shape by its own weight. It is supposed to be. Thereby, excessive load and slack are not generated on the tape T.
The guide roller 31c may be configured to be movable in the axial direction so that the posture of the tape T is accurately fed to the exposure stage 14.

  The stage guide rollers 32 and 32 are arranged above and below the exposure stage 14 so as to guide the tape T to the stage surface 14a of the exposure stage 14 of the exposure apparatus E. That is, the transport direction of the tape T between the stage guide rollers 32 and 32 is a vertical direction along the stage surface 14a. The stage guide roller 32 disposed above is disposed obliquely below and to the right of the guide roller 31c. The stage guide rollers 32, 32 need to feed the tape T accurately to the stage guide rollers 32, 32, so that slippage does not occur between the stage guide rollers 32, 32 and the tape T so that the feed amount does not shift. Must be. Therefore, it is preferable that the stage guide rollers 32 and 32 have a structure for vacuum-sucking the tape T. The stage guide rollers 32 and 32 are preferably made of a resin such as ABS so as to absorb minute vibrations.

As shown in FIG. 2, the second tension adjusting means 33 is disposed below the first tension adjusting means 31, and is provided between a pair of guide rollers 33b and 33c (fifth roller and sixth roller). And a third air dancer 33a for adjusting the tension of the tape T. The third air dancer 33a is formed in a box shape, and the tension of the tape T conveyed to the take-up reel 5 is obtained by loosening the tape T wound around the guide rollers 33b and 33c into a U shape by its own weight. To be adjusted. Thereby, excessive load and slack are not generated on the tape T. The upstream guide roller 33b is disposed obliquely above and to the left of the lower stage guide roller 32.
The guide roller 33b may have a structure capable of moving in the axial direction so that the posture of the tape T is accurately fed to the exposure stage 14. By moving in the axial direction while paired with the above-described guide roller 31c, the shift amount in the width direction of the tape T can be corrected, and the inclination (posture) of the tape T can be corrected.

≪Protective sheet transport system 4≫
The protective sheet conveyance system 4 is provided so as to be fed out from the supply reel 2 in a direction (left direction) different from the direction in which the tape conveyance system 3 is fed and in a downward direction. Even if dust adheres to the protective sheet S, the dust can be prevented from scattering on the exposure stage 14 of the exposure apparatus E provided in the tape transport system 3.
The protective sheet conveying system 4 is a system for conveying the protective sheet S from the supply reel 2 to the take-up reel 5 and has a third tension adjusting means 41.

  The third tension adjusting means 41 (protective sheet tension adjusting means) is disposed diagonally to the left of the supply reel 2, and is provided between the pair of guide rollers 41b and 41c (first roller and second roller). And a first air dancer 41a for adjusting the tension of the protective sheet S. The first air dancer 41a is formed in a box shape, and the tape T wound around the guide rollers 41b and 41c is loosened in a U shape by its own weight, so that the protective sheet S conveyed to the take-up reel 5 is formed. The tension is adjusted. Thereby, excessive load and slack are not generated in the protective sheet S. The first air dancer 41a is configured so that the tape T can be slackened longer than the second air dancer 31a and the third air dancer 33a. Further, the upstream guide roller 41 b is installed diagonally to the left of the supply reel 2, and the downstream guide roller 41 c is installed diagonally to the left of the take-up reel 5. The protective sheet conveyance system 4 may include a plurality of guide rollers in addition to the third tension adjusting unit 41.

<< Configuration of Guide Roller 41c >>
FIG. 3 is an enlarged cross-sectional view showing the guide roller 41 c in the third tension adjusting means 41.
The guide roller 41c shown in FIG. 3 sends the protective sheet S from the first air dancer 41a toward the take-up reel 5 (see FIG. 2), and the protective sheet S in the width direction of the arrow b (the axial direction of the arrow a). It is a roller provided with a work position adjusting means 142 that can be moved. The guide roller 41c includes a rotatable roller body 141 for conveying the protective sheet S, a nut 145 that moves in the axial direction by the rotation of the ball screw 144, a spline shaft 146 that moves integrally with the nut 145, and the spline. A support shaft 147 that moves integrally with the shaft 146 and a bearing 148 interposed between the support shaft 147 and the roller body 141 are provided.

  The work position adjusting unit 142 adjusts the position of the protective sheet S in the processing unit 51 by moving the position of the roller body 141 in the axial direction (the width direction of the protective sheet S). The work position adjusting means 142 includes a motor M1, a ball screw 144, a nut 145, a spline shaft 146, and a support shaft 147.

While rotating the roller main body 141, the motor M1 shown in FIG. 3 moves forward and reverse by the control signal of the apparatus control device 17 to move the roller main body 141 in the axial direction of the arrow a (the width direction of the protective sheet S). . Thereby, the protective sheet S wound around the roller main body 141 moves in the width direction of the arrow b. The forward rotation and the reversal amount are obtained by calculation using position signals from a first sensor 51a that detects a position in the width direction of the tape T and a second sensor 51b that detects a position in the width direction of the protective sheet S, which will be described later.
The device housing 143 is a member that holds the motor M1 and through which the motor shaft M1a is inserted, and is fixed at an appropriate position. The guide roller 41c is held at a predetermined position by the device casing 143.

The ball screw 144 is connected to the motor shaft M1a of the motor M1 and rotates integrally. A reduction gear mechanism may be interposed between the ball screw 144 and the motor shaft M1a.
As for the nut 145, the internal thread part of the center part is screwed together with the ball screw 144. The outer peripheral surface of the nut 145 is mounted in a cylindrical spline shaft 146 in which a spline groove is formed, and moves in the axial direction of the arrow a by the rotation of the ball screw 144.

The spline shaft 146 shown in FIG. 3 is attached to the outer periphery of the nut 145 and rotates together with it, and moves in the axial direction of the arrow a.
The support shaft 147 is fixed to the bottom surface portion of the spline shaft 146 and rotates while moving in the axial direction together with the spline shaft 146, and both ends thereof are supported by bearings 148.
The roller body 141 moves in the axial direction of the arrow a together with the bearing 148, takes up the protective sheet S, and has a bobbin shape having flange portions at both ends. The roller body 141 has at least a roller surface 141a formed of a synthetic resin and absorbs fine vibrations.

  The guide roller 41c configured as described above rotates the motor M1 to rotate and linearly move the interposed member including the ball screw 144, the spline shaft 146, the support shaft 147, and the bearing 148, thereby moving the roller body. The position of the protection sheet S can be adjusted by moving 141 in the axial direction. The guide roller 41c having the roller body 141 movable in the axial direction in this way moves the position of the roller body 141 in the axial direction so that the width direction of the tape T and the width direction of the protective sheet S are accurately aligned. be able to.

Note that the guide roller 41c shown in FIG. 3 is such that only the spindle 147 is directly rotated by the motor M1, and the entire guide roller 41c is moved in the axial direction by another motor or a linear slide mechanism or the like (not shown). You may make it the structure to make.
Further, the guide roller 31c and the guide roller 33b described above may have the same structure as the guide roller 41c.

≪Take-up reel 5≫
The take-up reel 5 and the supply reel 2 are disposed on one side in the horizontal direction with respect to the exposure stage 14 (on the left side of the exposure stage 14), and are disposed below the supply reel 2. Thereby, the length dimension of the horizontal direction of the conveying apparatus A can be shortened, and an apparatus can be reduced in size. The take-up reel 5 rotates clockwise when a drive shaft (not shown) is driven by a motor or the like. As a result, the take-up reel 5 alternately winds the tape T conveyed from the tape conveyance system 3 and the protective sheet S conveyed from the protective sheet conveyance system 4.

Note that the tape T and the protective sheet S wound around the take-up reel 5 are uniformly adjusted in tension by the second tension adjusting means 33 and the third tension adjusting means 41, respectively. The shape of the roll is close to an exact circle.
Incidentally, since the tape T and the protective sheet S form a closed loop via the supply reel 2 and the take-up reel 5 in this way, a take-up reel dedicated to the protective sheet of the prior art becomes unnecessary.

  Around the take-up reel 5, a first sensor 51a for detecting the position of the tape T in the width direction and a second sensor 51b for detecting the position of the protective sheet S in the width direction are provided. If the tape T and the protective sheet S taken up on the take-up reel 5 are shifted in the width direction, the tape T is damaged, and a step is formed on the side surface of the winding form, so that dust tends to accumulate. For this reason, the position of the tape T and the protection sheet S in the width direction is detected by the first sensor 51a and the second sensor 51b. Then, the width direction of the tape T and the width direction of the protective sheet S are accurately matched by moving the guide roller 41c in the axial direction of the roller.

<Operation of exposure apparatus E and transport apparatus A>
Next, the operation of each device will be described along the transport path of the tape T and the protective sheet S. First, in the conveying device A, a supply reel 2 around which a tape T and a protective sheet S are wound is installed, and an empty take-up reel 5 is installed. Then, the tape T is sent out from the supply reel 2 to the tape transport system 3, and the protective sheet S is sent out to the protective sheet transport system 4.

  The tape T delivered from the supply reel 2 is conveyed to the first tension adjusting means 31 obliquely downward to the right. In the first tension adjusting means 31, the tape T is guided to the right by the guide rollers 31b and 31c. Then, after the tension of the tape T is adjusted by the second air dancer 31a, the tape T is conveyed to the exposure apparatus E. Thereby, the tension imbalance of the tape T due to its own weight or the like can be prevented on the upstream side of the exposure apparatus E.

  In the exposure apparatus E, the transport direction of the tape T is converted into the vertical direction by the stage guide rollers 32 and 32. In the exposure apparatus E, since there is an area that can be exposed depending on the performance of the exposure optical system, the tape T is conveyed so as to be aligned with the exposure optical system in blocks corresponding to the area. Specifically, the position where the stage guide rollers 32 and 32 hold the tape T is adjusted by aligning the positions by individually controlling the rotation of the stage guide rollers 32 and 32. Here, since the tape T is thin and wide, the first tension adjusting means 31 may cause a problem that if the transport and stop are performed for each block to be exposed, the progress degree changes little by little and the position cannot be aligned. By adjusting the tension of the tape T, such a problem can be solved. When the tape T is inclined (attitude), the guide roller 31c and the guide roller 33b can be adjusted by moving them in the axial direction.

  Then, after the position of the tape T is aligned by the exposure stage 14 of the exposure apparatus E, the tape T is temporarily fixed and irradiated with exposure light from the projection optical system 13. Thereby, the exposure process of the tape T is completed. Then, the tape T that has been subjected to the exposure process is conveyed to a position that does not affect the exposure process of the next tape.

  Subsequently, the tape T is guided by the lower stage guide roller 32 and the guide roller 33 b, so that the transport direction is changed to the upper left oblique direction and transported to the second tension adjusting means 33. In the second tension adjusting means 33, the tape T is guided leftward by the guide rollers 33b and 33c. Then, after the tension of the tape T is adjusted by the third air dancer 33 a, the tape T is wound around the take-up reel 5. When the tape T is taken up by the take-up reel 5, the first sensor 51a detects the position of the tape T in the width direction.

  On the other hand, the protective sheet S sent out from the supply reel 2 is conveyed to the third tension adjusting means 41 diagonally downward to the left. In the third tension adjusting means 41, the protective sheet S is guided to the right by the guide rollers 41b and 41c. And after the tension | tensile_strength is adjusted by the 1st air dancer 41a, the direction of the protection sheet S is converted into diagonally downward right, and goes to the take-up reel 5. When the protective sheet S is taken up by the take-up reel 5, the second sensor 51b detects the position of the protective sheet S in the width direction. The device control device 17 sends a control signal to the motor M1 of the guide roller 41c so that the width direction of the protective sheet S and the width direction of the tape T coincide with each other. As the guide roller 41c moves in the axial direction, the protective sheet S also moves in the width direction. The protective sheet S whose position in the width direction is adjusted is wound around the take-up reel 5 together with the tape T so as to be interposed between the tapes T.

In this way, the tape T and the protective sheet S are wound on the take-up reel 5 under a uniform tension. Thereby, both winding-up balance can be kept favorable.
Note that the tension of the tape T becomes non-uniform by controlling the position of the tape T by the exposure process or by interposing the protective sheet S between the tapes T. In the present embodiment, the second tension Since the tension of the tape T is adjusted by the adjusting means 33, the winding of the tape T can be performed stably. Thereby, the winding form can be made circular instead of elliptical. In addition, since the tape T and the protective sheet S are wound in the width direction, the side surface of the wound shape becomes uniform.
Further, when tension is applied to the protective sheet S when the protective sheet S is sent out, the amount of the tape T that is essential is affected, and the tape T after the exposure process cannot be stably wound. In the embodiment, since the tension of the tape T is adjusted by the third tension adjusting means 41, the winding operation of the winding reel 5 can be prevented from being affected.

According to the above, the following effects can be obtained in the transport apparatus A according to the present embodiment.
In the transport device A according to the present embodiment, the tape T and the protective sheet S sent out from the supply reel 2 are transported by separate transport systems (tape transport system 3 and protective sheet transport system 4) and then recombined. In this state, the take-up reel 5 is wound up. Thereby, an incidental installation like a prior art can be made unnecessary.

  In the transport apparatus A, the supply reel 2 and the take-up reel 5 are arranged on one side in the horizontal direction with respect to the exposure stage 14, so that the supply reel 2 and the take-up reel 5 are arranged in the horizontal direction. , The dimension (the length in the horizontal direction) can be reduced, and the apparatus can be miniaturized.

  In the transport apparatus A, the protective sheet transport system 4 is fed from the supply reel 2 in a direction different from the direction in which the tape transport system 3 is fed and in a downward direction, so that dust adheres to the protective sheet S. However, it is possible to prevent the dust from scattering into the work area of the exposure stage 14 provided in the tape transport system 3.

  Since the tension of the tape T is adjusted by the first tension adjusting means 31 before being conveyed to the exposure apparatus E, high-quality exposure processing can be performed, and a high-quality product is stably manufactured. be able to. In addition, since the tape T and the protective sheet S adjusted to a uniform tension by the second tension adjusting means 33 and the third tension adjusting means 41 are wound around the take-up reel 5, both of them can be used under stable tension. The winding balance can be improved. In addition, the tape T and the protective sheet S can be wound up with a good match in the width direction.

  In the transport device A, since the tape transport system 3 and the protective sheet transport system 4 are provided separately, even if the protective sheet S is cut in the middle due to an accident, the transport operation of the tape T is not affected. High quality products can be manufactured stably.

  The transport apparatus A according to the present embodiment has been described above, but the present invention is not limited to the embodiment and can be implemented in various forms.

  4A to 4C are schematic views illustrating a part of a transport apparatus and an exposure apparatus according to a modification example of the present embodiment. In the embodiment, the supply reel 2 and the take-up reel 5 are each rotated clockwise in the transport device A (see FIG. 2), but the rotation direction of each reel is not limited, and FIG. As shown in FIG. 5B, the conveying device A1 may be configured to rotate the supply reel 2A clockwise and the take-up reel 5A counterclockwise. Further, as shown in FIG. 4B, in the transport device A2, both the supply reel 2B and the take-up reel 5B may be rotated counterclockwise. Further, as shown in FIG. 4C, in the transport device A3, the supply reel 2C may be rotated counterclockwise and the take-up reel 5C may be rotated clockwise.

  In the embodiment, the guide roller 31c and the guide roller 33b that transport the tape T and the guide roller 41c that transports the protective sheet S can move in the axial direction of the roller. However, all other rollers may be movable in the axial direction.

It is a whole perspective view which shows the conveying apparatus and exposure apparatus which concern on this embodiment. It is the schematic which shows a part of conveyance apparatus and exposure apparatus which concern on this embodiment. It is an expanded sectional view showing guide roller 41c in the conveyance mechanism concerning this embodiment. (A)-(c) is the schematic which shows a part of conveyance apparatus and exposure apparatus which concern on the modification of this embodiment. It is the schematic of the conveying apparatus which concerns on a 1st prior art. It is the schematic of the conveying apparatus which concerns on a 2nd prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 2 Supply reel 3 Tape conveyance system 4 Protection sheet conveyance system 5 Take-up reel 31 1st tension adjustment means 31a 2nd air dancer 31b, 31c Guide roller 32 Stage guide roller 33 2nd tension adjustment means 33a 3rd air dancer 33b, 33c Guide roller 41 Third tension adjusting means 41a First air dancers 41b and 41c Guide rollers 51a and 51b First and second sensors A Conveying device E Exposure device S Protective sheet T Tape

Claims (5)

A workpiece, which is a film-like substrate for mounting electronic components wound around a reel with a protective sheet interposed therebetween, is transported to a processing stage provided along the vertical direction, and on one side of the processing stage as a boundary In the arranged transfer device,
A supply reel in which the workpiece is wound with the protective sheet interposed therebetween, only the workpiece is sent out to the processing stage, and the protective sheet is sent out in a direction different from the processing stage ;
A take-up reel that is provided below the supply reel and winds up the workpiece processed by the processing stage via the protective sheet that is fed from the supply reel ;
A workpiece conveying means for conveying the workpiece from the supply reel to the take-up reel via the processing stage ;
And a protective sheet conveying means for conveying the protective sheet to the take-up reel .   The protective sheet conveying means includes a first roller for guiding the protective sheet fed from the supply reel, a second roller for guiding the protective sheet to the winding roller, the first roller, and the second roller. The conveying apparatus according to claim 1, further comprising: a protective sheet tension adjusting unit configured to adjust a tension of the protective sheet between the first air dancer and the first air dancer.   The workpiece conveyed from the supply reel to the take-up reel via the processing stage, and the protective sheet conveyed from the supply reel to the take-up reel pass through the supply reel and the take-up reel. The conveying apparatus according to claim 1, wherein the conveying apparatus forms a closed loop. A first detector that detects a position in the width direction of the workpiece conveyed from the processing stage to the take-up reel, and a position in the width direction of the protective sheet conveyed from the supply reel to the take-up reel. And a second detector that
The width direction of the said workpiece | work wound by the said take-up reel and a protection sheet is made to correspond based on the result of a said 1st detector and a said 2nd detector. The transfer apparatus according to any one of the above. The work conveying means is provided between the supply reel and the processing stage, and includes a first tension adjusting means for adjusting the tension of the work supplied to the processing section, the processing section, and the take-up reel. And a second tension adjusting means for adjusting the tension of the work wound around the take-up reel,
The first tension adjusting means includes a third roller for guiding the tape fed from the supply reel, a fourth roller for guiding the tape to the processing stage side, the third roller, and the fourth roller. A second air dancer for adjusting the tension of the tape between
The second tension adjusting means includes a fifth roller for guiding the tape from the processing stage side, a sixth roller for guiding the tape to the take-up reel, and the fifth roller and the sixth roller. 5. The transport device according to claim 1, further comprising a third air dancer that adjusts the tension of the tape in between.