JP2010129844A - Automatic pattern checking apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an automatic pattern checking apparatus which gives a prescribed tensile force to a tape portion at an inspection section and reliably prevents transmission of vibrations to such a tape portion to improve imaging performance. <P>SOLUTION: A transmitting-light-type inspection section D is provided with a first tensile force giving device 43 which bends a tape 1 in the direction of thickness and with a second tensile force giving device 44 which gives the tape a tensile force in the direction of length. The first tensile force giving device 43 includes a pair of support rollers 46 and 47 which support the under surface of the tape 1 and a pair of press rollers 48 and 49 which press the tape 1 against the support rollers 46 and 47. The second tensile force giving device 44 includes a pair of clamp units 60 and 61 which supports the side edges of the tape 1 and a cylinder 64 which moves the clamp units 60 and 61 in the longitudinal direction of the tape 1 to give a tensile force to the tape 1. A pair of sucking means 66 sucks and holds the under surface of the tape 1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic pattern inspection apparatus used in an electronic component manufacturing process and the like, and more particularly, a pattern for automatically inspecting circuit pattern defects by sequentially imaging a circuit pattern formed on a film carrier tape with an imaging camera. The present invention relates to an automatic pattern inspection apparatus suitable for use in an automatic appearance inspection apparatus or the like.

  A circuit pattern formed on a film carrier tape for mounting electronic components (hereinafter referred to as “Tape Automated Bonding”) is imaged by an imaging device and compared with a reference pattern, so that a defect in the pattern (for example, thickening, disconnection, For example, an automatic pattern inspection apparatus disclosed in Patent Document 1 is known as an inspection apparatus that automatically inspects short-circuiting, thinning, and the like.

  The automatic pattern inspection apparatus described in Patent Document 1 is filed by the present applicant. A dancer roller is incorporated in an air dancer, and a predetermined tension is applied to the tape by the mass of the roller. Even if the tape is wide, the tape does not loosen and can be run stably and reliably.

JP 2008-174363 A

According to the conventional automatic pattern inspection apparatus described above, since a predetermined tension is applied to the tape by the sander roller, the tape can be prevented from loosening and shaking, and can be said to be an extremely effective technique for transporting the tape. .
However, for example, if vibration due to operation in the unwinding runner part, buffer part, take-up runner part of the device, wind from the air conditioner at the installation location, vibration due to other factors, etc. are transmitted to the tape of the inspection part, it will be fine. There was a problem of adversely affecting the imaging of the inspection object. In other words, if a small vibration is transmitted to the tape portion of the inspection unit, the tape loosens or warps and deviates from the depth of focus of the imaging device, so that the captured image becomes a so-called blurred state and a clear image cannot be obtained. High-definition pattern inspection becomes impossible.

  The present invention has been made in order to solve the above-described conventional problems. The object of the present invention is to apply a predetermined tension to the tape portion of the inspection portion and to prevent vibrations on the tape portion. An object of the present invention is to provide an automatic pattern inspection apparatus that reliably prevents transmission and improves imaging performance.

  In order to achieve the above object, the present invention provides a transmitted light imaging device that images a pattern formed on a tape and disposed at an imaging position of a transmitted light inspection unit, and the tape disposed at the imaging position. A first tension applying device that curves in the thickness direction, and a second tension applying device that is disposed before and after the first tension applying device in the transport direction and that applies a tension in the longitudinal direction to the tape. And a pair of suction and holding surfaces opposite to the pattern side of the tape respectively disposed upstream of the second tension applying device on the upstream side and downstream of the second tension applying device on the downstream side. And an adsorption means.

  Further, the present invention is the above invention, wherein the first tension applying device is disposed in parallel with a predetermined interval in the tape transport direction and is rotatably supported to support a surface opposite to the pattern side of the tape. A pair of support rollers, and a pair of pressing rollers that press the tape and press the tape against the support roller are provided so as to be vertically movable and rotatable in the front-rear direction of the support roller.

  Further, the present invention is the above invention, wherein the second tension applying device holds a clamp device that holds both ends in the width direction of the tape, a first drive source that opens and closes the clamp device, and the clamp device. Is moved in a direction away from the imaging position, and a second drive source for applying a longitudinal tension to the tape is provided.

  Also, in the present invention according to the above invention, the transmitted light imaging device and the first tension applying device are integrally coupled and moved in the longitudinal direction of the tape during pattern imaging. .

  Further, according to the present invention, in the above invention, the adsorbing means includes an adsorbing plate made of an open-cell porous plate covering the opening of the case, the inside of the case is exhausted by an exhaust device, and a tape is removed from the adsorbing plate It is made to adsorb to.

  In the present invention, the tape is applied with the tension in the longitudinal direction and the width direction by the action of the first and second tension applying devices, so that the imaged portion forms a flat surface. Therefore, the imaged portion does not cause wrinkles, warpage, or unevenness, and is located within the depth of focus of the imaging device, so that a clear image can be obtained.

  The adsorbing means adsorbs and holds the tape, thereby preventing vibration due to operation other than the inspection unit, wind from the air conditioner at the installation location, vibration due to other factors, and the like from being transmitted to the imaged portion of the tape. Therefore, there is little influence on imaging and imaging performance can be further improved. In addition, an adsorption plate made of an open-cell porous plate adsorbs the tape uniformly and rarely damages the tape.

Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
1 is a schematic configuration diagram showing an embodiment of an automatic pattern inspection apparatus according to the present invention, FIG. 2 is a detailed configuration diagram of a second inspection unit, and FIG. 3 is a perspective view of the first tension applying apparatus. 4 is a perspective view of the second tension applying device. In the present embodiment, the circuit pattern 2 formed on the tape 1 is automatically inspected before the electronic component is mounted, and NG marking is applied to the defective (NG) circuit pattern. An example applied to the automatic pattern inspection apparatus 10 is shown.

  3 and 4, the tape 1 is made of a translucent film made of polyimide, and the surface is formed with the pattern forming portions 3 arranged in two rows (generally 1 to 4 rows) in the width direction. Yes. A large number of fine circuit patterns 2 having the same shape to be inspected are formed in these pattern forming portions 3 in the length direction of the tape 1 at a predetermined pitch. In general, the circuit pattern 2 is formed by etching the copper foil of the pattern forming portion 3 of the tape 1. The circuit pattern 2 has a thickness of 8 to 30 μm and a width of about 8 to 50 μm at the inner lead wire portion to be bonded. The perforations 5 are formed on both side edges and the center of the tape 1, and a large number of perforations 6 are formed in these perforations 5 at a constant pitch over the entire length of the tape 1. The width of the tape 1 is about 35 to 300 mm, and the thickness is about 20 to 75 μm. The inspection items of the circuit pattern 2 are thickening, disconnection, short circuit, thinning, pitch shift, protrusion, chipping, lead bending, pinhole, inter-conductor ratio, minimum pattern width, minimum gap width, and the like.

  In FIG. 1, the automatic pattern inspection apparatus 10 has a housing 12, and the inside thereof has seven sections along the transport path 11 of the tape 1, that is, the unwinding runner portion A from left to right in FIG. , First inspection section (reflected light inspection section) B, first buffer section C, second inspection section (transmitted light inspection section) D, second buffer section E, marking section F, and winding runner Divided into part G. Although not shown in FIG. 1, the sections A to G of the housing 12 are independent housings. This is to prevent the vibration caused by the operations in the sections A, C, and E to G from being transmitted to the first and second inspection units B and D as much as possible.

  The unwinding runner part A, the first and second buffer parts C and E, and the winding runner part G are provided below the inside of the housing 12, and the first and second inspection parts B and D and the marking part F is provided inside the housing 12. In addition, a control unit (not shown) for computer-controlling the entire apparatus is incorporated in the housing 12.

  The unwinding runner part A is provided with an unwinding device 13 for supplying the tape 1 to the first inspection part B. The unwinding device 13 includes an unwinding reel 14 on which the tape 1 is wound with the surface facing outward, a driving motor 15 for intermittently driving the unwinding reel 14 to unwind the tape 1, and the tape 1. It is composed of a rotatable tension roller 16 or the like that applies tension by pressing.

  The first inspection section B is a section for optically inspecting the circuit pattern 2 formed on the tape 1, and the light source 20 that irradiates the circuit pattern 2 and the light emitted from the light source 20 and hits the circuit pattern 2. The apparatus includes a reflected light pattern imaging device 21 that captures reflected reflected light, and a determination unit (not shown) that determines the quality of the circuit pattern 2 captured by the pattern imaging device 21. Imaging of the circuit pattern 2 by the pattern imaging device 21 is performed in a state where the tape 1 from the unwinding runner part A to the first buffer part C is temporarily stopped. The determination unit compares the image of the circuit pattern 2 picked up by the pattern image pickup device 21 with a good product pattern stored in advance, thereby determining a defective portion and determining its quality. Then, the result is sent to the control unit and temporarily stored in the storage unit.

  Further, the first inspection section B is positioned on the upstream side of the inspection section B, and a rotatable sprocket roller 22 positioned downstream of the inspection section B to prevent the tape 1 from moving in the width direction. A sprocket roller 23 that is driven by a drive motor when the tape 1 is transported, and a suction plate 24 that sucks and holds the imaged portion S1 of the tape 1 from the lower side during imaging.

  The first buffer portion C is provided with a tension applying mechanism 30 that applies a predetermined tension to the tape 1. The tension applying mechanism 30 includes a box 31 that opens upward, a pair of tape guide rollers 32 and 33 that are rotatably disposed near the opening of the box 31, and a dancer that is disposed in the box 31. It is comprised by the roller 34 grade | etc.,.

  The dancer roller 34 applies a certain tension to the tape portion 1A by bending the tape portion 1A between the tape guide rollers 32 and 33 into a U-shape by the mass of the dancer roller 34 and dropping it into the box 31. ing. In other words, the dancer roller 34 is supported by the tape portion 1A when the lower end portion of the tape portion 1A between the tape guide rollers 32 and 33 is abutted on the lower surface side over a substantially half circumference. It descends until it loses its sag and applies a certain tension to the tape portion 1A. Accordingly, the dancer roller 34 is held at a height where the mass balances with the tension of the tape portion 1A. The tension of the tape portion 1A can be easily adjusted by changing the mass of the dancer roller 34.

  The second inspection part D is a section for optically inspecting the circuit pattern 2 formed on the tape 1 together with the first inspection part B, and is below the imaging position H with the conveyance path 11 in between. A light source 41 and a transmitted light type pattern image pickup device 42 disposed facing each other upward, a determination unit (not shown) for determining the quality of the circuit pattern 2 imaged by the pattern image pickup device 42, First and second tension applying devices 43 and 44 shown in FIG. The light source 41 irradiates the circuit pattern 2 of the tape 1 from below during imaging. The pattern imaging device 42 includes a line sensor arranged in parallel in the width direction of the tape 1 and moves in the longitudinal direction of the tape 1 integrally with the light source 41 and the first tension applying device 43 by a drive motor during imaging. Is configured to take an image of the circuit pattern 2 by receiving the transmitted light emitted from the light source 41 and transmitted through the tape 1.

  2 and 3, the first tension applying device 43 applies a longitudinal tension by curving the tape 1 in the thickness direction. The first tension applying device 43 is predetermined at the imaging position H in the transport direction of the tape 1. A pair of support rollers 46 and 47 that support the entire surface in the width direction (lower surface) opposite to the surface (upper surface) on which the circuit pattern 2 of the tape 1 is formed and arranged in parallel with a distance of The supporting rollers 46 and 47 are arranged so as to be shifted in the front and rear directions in the conveying direction, and the vicinity S2 ′ of the imaged portion S2 of the tape 1 is pressed from above by its own weight and pressed against the supporting rollers 46 and 47 and curved downward. It comprises a pair of pressing rollers 48 and 49.

  The support rollers 46 and 47 are formed in a rod-like body having the same outer diameter over the entire length, and are rotatably supported by shaft holes formed in a pair of left and right support plates 50A and 50B opposite to each other with the conveyance path 11 therebetween. ing. The upper peripheral surface of the support rollers 46 and 47 with which the tape 1 contacts is positioned above the feed reference line J (FIG. 2) of the tape 1. The height of the upper peripheral surface matches the depth of focus of the pattern imaging device 42. A matte black paint is applied to the outer peripheral surfaces of the support rollers 46 and 47 in order to reduce the influence of the reflected light.

  Each of the pressing rollers 48 and 49 includes shafts 50 and 51, and three rollers 52a to 52c and 53a to 53c provided near the ends and the center of the shafts 50 and 51, respectively. End portions of 50 and 51 are pivotally supported by U-shaped bearing grooves 54a, 54b, 55a and 55b formed in the support plates 50A and 50B, respectively, so as to be rotatable and vertically movable. The three rollers 52 a to 52 c and 53 a to 53 c are respectively fixed to the shafts 50 and 51 so as to correspond to the perforation portions 5 of the tape 1.

  The portion pressed by the pressing rollers 48 and 49 of the tape 1, that is, the vicinity S2 ′ of the imaged portion S2, is pushed down and curved downward as shown in FIGS. 2 and 3, and the portion of the imaged portion S2. Both ends are pressed against the upper side of the upper peripheral surface of the support rollers 46 and 47 over the entire length in the width direction. In this way, by pressing the vicinity S2 ′ of the imaged portion S2 of the tape 1 by the pressing rollers 48 and 49 and curving downward, tension in the longitudinal direction and the width direction is applied to the imaged portion S2, so that the imaged image is taken. The portion S2 is flattened by removing warpage and unevenness in the tape longitudinal direction and the width direction, and is held at the imaging height position.

  The pair of support plates 50A and 50B are integrally connected to the light source 41 and the pattern imaging device 42 by a connecting member (not shown), and when the circuit pattern 2 is imaged, the drive direction of the tape 1 is integrated with these by the drive motor. The line sensor is configured to scan and image the circuit pattern 2. The imaging of the circuit pattern 2 by the pattern imaging device 42 is performed in a state where the tape portion from the unwinding runner portion A to the second buffer portion E is stopped in the same manner as the reflected light pattern imaging device 21 described above. The image is sent to the determination unit. The determination unit determines the defect location by determining the defect location by comparing the image of the circuit pattern 2 imaged by the pattern imaging device 42 with a good quality pattern stored in advance. Then, the result is sent to the control unit and temporarily stored in the storage unit.

  As shown in FIG. 2, the second tension applying device 44 is symmetrically disposed at equal distances from the upstream side and the downstream side of the first tension applying device 43 as shown in FIG. 1 is applied with a tension in the longitudinal direction, and a pair of clamping devices 60 and 61 (FIG. 4) that respectively hold both ends in the width direction of the tape 1 and a first opening and closing each of the clamping devices 60 and 61. Cylinders (drive sources) 62, 63 and a second cylinder that applies longitudinal tension to the tape 1 by moving the clamp devices 60, 61 away from the imaging position H (FIG. 2) in the tape longitudinal direction. 64, 65. Each of the clamp devices 60 and 61 includes a pair of clamp pieces 60a and 60b and 61a and 61b that are vertically opposed to each other, and the upper clamp pieces 60a and 61a are moved up and down by the first cylinders 62 and 63, respectively. It is configured. Further, the clamp devices 60 and 61 are respectively disposed at both ends of the upper surface of the mounting plate 70 that is movable in the longitudinal direction of the tape 1. The attachment plate 70 is moved in a direction in which tension is applied to the tape 1 by the second cylinders 64 and 65 when the tension is applied to the tape 1.

  The second inspection section D is provided with a pair of suction means 66 for sucking and holding the tape 1. The suction means 66 is disposed on the upstream side of the second tension applying device 44 on the upstream side and on the downstream side of the second tension applying device 44 on the downstream side, and sucks the lower surface of the tape 1. The suction plate 72, a case 73 to which the suction plate 72 is attached, a third cylinder (drive source) 74 that moves the case 73 up and down, an exhaust pump 75 that exhausts the inside of the case 73, and the like. Yes.

  The adsorption plate 72 is formed of an open-celled porous plate and is provided so as to cover the upper surface opening of the case 73. The case 73 normally stands by below the feed reference line J (FIG. 2) of the tape 1, and when the tape 1 stops when the circuit pattern 2 is imaged, the third cylinder 74 is driven to drive the feed reference line J high. The suction plate 72 is configured to be brought into contact with the lower surface of the tape 1. The case 73 is connected to an exhaust pump 75 via an exhaust pipe 76.

  In FIG. 1, further before and after the second inspection unit D in the transport direction, a rotatable sprocket roller 76 that prevents movement of the tape 1 in the width direction in the inspection unit D, and a drive motor when the tape 1 is transported The sprocket roller 77 (FIG. 2) driven by is disposed.

  In FIG. 1, a tension applying mechanism 80 that applies a predetermined tension to the tape 1 is disposed in the second buffer portion E. Since the tension applying mechanism 80 has the same structure as the tension applying mechanism 30 of the first buffer portion C, description thereof is omitted.

  The marking portion F is a section for performing NG marking by punching on the circuit pattern 2 determined to be NG by the NG signal sent from the control portion, and a marking device 90 is installed. The marking on the NG circuit pattern 2 by the marking device 90 is performed in a state where the tape 1 from the second buffer portion E to the winding runner portion G is stopped. Further, the imaging of the circuit pattern 2 in the first and second inspection parts B and D and the marking in the marking part F are not synchronized but are performed independently.

  On the upstream side and downstream side of the marking part F, a rotatable sprocket roller 91 for preventing the marking part F from moving in the width direction of the tape 1 and a sprocket roller driven by a drive motor when the tape 1 is conveyed. 92 is disposed.

  The winding runner portion G is provided with a winding device 95 that winds the tape 1 that has been inspected for the circuit pattern 2. The take-up device 95 has a take-up reel 96 for taking up the tape 1, a drive motor 97 for driving the take-up reel 96 intermittently to take up the tape 1 on the take-up reel 96, and tension on the tape 1. It is composed of a rotatable tension roller 98 or the like that imparts the pressure.

Next, the operation of the automatic pattern inspection apparatus 10 having the above structure will be described.
First, the product type data of the tape 1 to be inspected is registered in the control unit. The kind data to be registered includes the width of the tape 1, the pitch P of the circuit pattern 2, the number of patterns in the tape width direction, and the like. In addition, the imaging operation of the first and second inspection units B and D is set according to the circuit pattern 2 of the tape 1.

  Next, the unwinding reel 14 around which the tape 1 to be inspected is wound is set on the unwinding runner part A, the leading end of the tape 1 is pulled out, and the first inspection part B and the first buffer part C are pulled out. Then, the lead is guided to the second inspection section D, the second buffer section E, the marking section F and the winding runner section G, and the starting end is fixed to the winding reel 96. The unwinding portion from the starting end fixed to the winding reel 96 of the tape 1 to the unwinding reel 14 is an extra length portion where the circuit pattern 2 is not formed.

  When all preparations for inspection by the automatic pattern inspection apparatus 10 are completed, the start button is turned on. When the start button is turned on, the drive motor 15 (FIG. 1) is driven to intermittently feed out the tape portion on which the circuit pattern 2 is formed from the unwinding reel 14 and lead it to the first inspection portion B. When the tape portion on which the circuit pattern 2 is formed is guided to the first inspection section B, the drive of the sprocket roller 23 is stopped, and the tape portion from the roller 23 to the unwinding reel 14 is stopped. 21 picks up an image of the circuit pattern 2 of the imaged portion S1 of the tape 1. At this time, the imaged portion S1 imaged by the pattern imaging device 21 of the tape 1 forms a flat surface because the lower surface is sucked and held by the suction plate 24, and warpage, unevenness, wrinkles and the like are removed. . For this reason, the circuit pattern 2 of the imaging target portion S1 of the tape 1 is located within the depth of focus of the pattern imaging device 21 and is accurately captured by the pattern imaging device 21. When the pattern imaging device 21 images the circuit pattern 2, the image signal is sent to the determination unit. The determination unit determines whether or not the circuit pattern 2 is a non-defective product, and the result is sent to the control unit and temporarily stored in the storage unit. The suction plate 24 is formed of an open-celled porous plate, similar to the suction plate 72 of the second tension applying device 44, and is evacuated by an exhaust pump (not shown) at the time of imaging, whereby the imaged portion of the tape 1 S1 is sucked and held from below, and is retracted downward when imaging is completed. When the imaging of the circuit pattern 2 is completed by the pattern imaging device 21, the sprocket roller 23 is driven again and the tape 1 is conveyed.

  When the imaging of the circuit pattern 2 is completed and the tape 1 that has passed through the first inspection unit B is guided to the second inspection unit D through the first buffer unit C, and the imaging target portion S2 reaches the imaging position H. Stop again. When the tape 1 stops, the first and second tension applying devices 43 and 44 apply tension in the longitudinal direction to the tape 1. That is, by pressing the imaged portion S2 of the tape 1 against the support rollers 46 and 47 by the pressing rollers 48 and 49, longitudinal tension is applied to the imaged portion S2. Further, the entire length in the width direction of the tape is pressed against the support rollers 46 and 47, whereby tension in the width direction is applied. Further, the pair of clamping devices 60 and 61 are driven by the first cylinders 62 and 63, respectively, so that the ends of the tape 1 are held, and then the second cylinders 64 and 65 are driven to suck the mounting plate 70. Move in the direction of the plate 72. Thereby, the tension | tensile_strength of a longitudinal direction is provided to the tape part which has stopped to the 2nd test | inspection part D of the tape 1. FIG. As a result, the imaged portion S2 located at the imaging position H and supported by the pair of support rollers 46 and 47 forms a flat surface, and partial warpage, unevenness and the like in the longitudinal direction and the width direction are removed, and the pattern is removed. It is held within the depth of focus of the imaging device 42.

  Further, the suction means 66 is driven to hold the tape portion S3 of the tape 1 by suction. That is, the suction holding is performed by driving the third cylinder 74 to raise the case 73 to a predetermined height so that the suction plate 72 is brought into contact with the lower surface of the tape 1, and the exhaust pump 75 is driven in this state to drive the case 73. When the inside is evacuated, the suction plate 72 sucks and holds the tape 1. The tape portion S3 is a tape portion between the upstream clamping devices 60 and 61 and the sprocket roller 77 on the upstream side of the imaged portion S2, and a downstream clamp on the downstream side of the imaged portion S2. The tape portion between the devices 60, 61 and the sprocket roller 76.

  When the tape portion S3 is sucked and held in this way, minute vibrations generated in the tape unwinding portion A, the first buffer portion B, the second buffer portion E, the marking portion F, the winding portion G, etc., and other vibrations Or the like can be prevented from being transmitted to the imaged portion S2 at the imaging position H through the tape portion S3. For this reason, there is no possibility that the imaged portion S2 will move or sag, the circuit pattern 2 can be accurately imaged by the pattern imaging device 42, and a high-definition pattern can be inspected.

  When the imaging of the circuit pattern 2 by the pattern imaging device 42 is completed, the clamped state of the tape 1 by the clamp devices 60 and 61 is released, the suctioned state by the suction means 66 is released, the tape 1 is released, and the case 73 is moved downward. Evacuate. Then, the tape 1 travels again and is conveyed to the marking unit F. If the case 73 is retracted downward while the tape 1 is running, the suction plate 72 does not contact the tape 1 and damage to the tape 1 can be reduced.

  The marking unit F uses the marking device 90 to mark the circuit pattern 2 that is determined to be defective by the determination unit. Then, the tape 1 that has passed the marking portion F is guided to the take-up runner portion G and taken up on the take-up reel 96. When the inspection of the circuit pattern 2 by the automatic pattern inspection apparatus 10 is completed, the tape 1 taken up on the take-up reel 96 is removed from the take-up runner portion G together with the take-up reel 96 and conveyed to the next process.

  In the above-described embodiment, the example applied to the automatic pattern inspection apparatus 10 for inspecting the circuit pattern 2 of the film carrier tape 1 is shown. However, the present invention is not limited to this, and the LCD, It can also be used for pattern inspection of inspected objects such as ASIC, μBGA, and CSP.

  Further, in the above-described embodiment, the example in which the reflected light type first inspection unit B and the transmitted light type second inspection unit D are provided has been described. Only the optical inspection part D may be provided.

It is a schematic block diagram which shows one Embodiment of the automatic pattern inspection apparatus which concerns on this invention. It is a detailed block diagram of a 2nd test | inspection part. It is a perspective view of the 1st tension | tensile_strength provision apparatus. It is a perspective view of the 2nd tension | tensile_strength provision apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Tape, 2 ... Circuit pattern, 10 ... Pattern automatic test | inspection apparatus, 11 ... Conveyance path, 41 ... Light source, 42 ... Pattern imaging device, 43 ... 1st tension | tensile_strength imparting device, 44 ... 2nd tension | tensile_strength imparting device, 46 , 47 ... support rollers, 48, 49 ... pressure rollers, 60, 61 ... clamping device, 62, 63 ... first drive source, 64, 65 ... second drive source, 66 ... suction means, 72 ... suction plate, 73: Case, 74: Third drive source, 75: Exhaust pump, D: Transmitted light inspection unit, H: Imaging position, S1, S2: Imaged portion

Claims (5)

  A transmitted light imaging device that images a pattern formed on a tape that is disposed at an imaging position of a transmitted light inspection unit, and a first tension that is disposed at the imaging position and curves the tape in the thickness direction. Device, a pair of second tension applying devices that are respectively arranged before and after the first tension applying device in the transport direction and apply a longitudinal tension to the tape, and a second tension applying device on the upstream side Pattern inspection apparatus provided with a pair of suction means disposed on the downstream side of the second tension applying device on the downstream side and the surface opposite to the pattern side of the tape. . In the pattern automatic inspection apparatus according to claim 1,
The first tension applying device includes a pair of rotatable support rollers disposed in parallel with a predetermined interval in the tape transport direction and supporting a surface opposite to the pattern side of the tape, and the support rollers An automatic pattern inspection apparatus comprising a pair of pressing rollers that are arranged to be movable up and down and rotatable in the front and rear directions in the transport direction and press the tape and press it against the support roller. In the pattern automatic inspection apparatus according to claim 1 or 2,
The second tension applying device moves a clamp device that holds both ends of the tape in the width direction, a first drive source that opens and closes the clamp device, and moves the clamp device away from the imaging position. An automatic pattern inspection apparatus comprising: a second drive source that applies a longitudinal tension to the tape. In the automatic pattern inspection apparatus according to any one of claims 1, 2, and 3,
The transmitted light imaging device and the first tension applying device are integrally coupled, and the pattern automatic inspection device is moved in the longitudinal direction of the tape when a pattern is imaged. In the pattern automatic inspection apparatus according to any one of claims 1, 2, 3, and 4,
The said adsorption | suction means is equipped with the adsorption | suction board which consists of an open-celled porous board which covers the opening part of a case, The inside of the said case is exhausted with an exhaust apparatus, and a pattern automatic inspection apparatus which adsorb | sucks a tape to the said adsorption | suction board.

Images