JP2014145733A - X-ray inspection apparatus - Google Patents

X-ray inspection apparatus Download PDF

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JP2014145733A
JP2014145733A JP2013015777A JP2013015777A JP2014145733A JP 2014145733 A JP2014145733 A JP 2014145733A JP 2013015777 A JP2013015777 A JP 2013015777A JP 2013015777 A JP2013015777 A JP 2013015777A JP 2014145733 A JP2014145733 A JP 2014145733A
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JP5996447B2 (en
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Satoshi Mitani
聡 三谷
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Anritsu Infivis Co Ltd
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PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus that can obtain a stable inspection result by supporting a continuous belt-like inspection object so that the distance between X-ray detection means and the inspection object being conveyed is constant.SOLUTION: An X-ray inspection apparatus 1 includes: conveyance means 2 that conveys a continuous belt-like inspection object W while producing tension on the inspection object W between a pair of conveyance rollers 3, 3; X-ray radiation means 5 that is disposed between the pair of conveyance rollers 3, 3 and radiates X-rays toward the inspection object W between the conveyance rollers 3, 3; and X-ray detection means 6 that is disposed between the pair of conveyance rollers 3, 3, is disposed so as to face the X-ray radiation means 5 across the inspection object W between the conveyance rollers 3, 3, and detects transmission X-rays having transmitted through the inspection object W. The X-ray inspection apparatus 1 further includes support means 10 that supports the inspection object W so that the distance between the X-ray detection means 6 and the inspection object W being conveyed becomes constant at an inspection section 7 formed between the X-ray radiation means 5 and the X-ray detection means 6.

Description

本発明は、張力を付与した状態で搬送される連続帯状の被検査物にＸ線を照射して、被検査物を透過した透過Ｘ線のＸ線透過量に基づいてこの被検査物の品質（外観、割れ欠け、異物混入の有無など）を検査するＸ線検査装置に係り、詳細には、検査部におけるＸ線検出手段と被検査物の距離を常に一定に保持するＸ線検査装置に関する。   The present invention irradiates X-rays to a continuous belt-like inspection object conveyed in a tensioned state, and the quality of the inspection object based on the amount of X-ray transmission of transmitted X-rays transmitted through the inspection object. The present invention relates to an X-ray inspection apparatus that inspects (external appearance, cracks, presence of foreign matter, etc.), and more particularly, to an X-ray inspection apparatus that always keeps the distance between the X-ray detection means and the inspection object in the inspection section constant. .

図７には、連続帯状の被検査物にＸ線を照射して、被検査物を透過した透過Ｘ線のＸ線透過量に基づいてこの被検査物の品質（外観、割れ欠け、異物混入の有無など）を検査するＸ線検査装置を示している。図７に示すように、連続帯状の被検査物Ｗの品質検査に特化したＸ線検査装置１００は、複数の搬送用ローラ１０２を有する搬送手段１０１を備えている。搬送手段１０１では、被検査物Ｗを複数の搬送用ローラ１０２に掛け回すように取り付けて、取り付けた被検査物Ｗを所定の張力を付与しながら複数の搬送用ローラ１０２を回転させて、それぞれの搬送用ローラ１０２，１０２の間の所定の搬送方向Ｙに搬送する。また、Ｘ線検査装置１００は、搬送手段１０１となる所定位置に配置された一対の搬送用ローラ１０２，１０２の間に配置されたＸ線検査手段１０３を備えている。Ｘ線検査手段１０３は、Ｘ線を照射するＸ線照射手段１０４と、Ｘ線を検出するＸ線検出手段１０５とを備えている。Ｘ線照射手段１０４とＸ線検出手段１０５は、一対の搬送用ローラ１０２，１０２の間の被検査物Ｗを挟んで対向して配置されており、Ｘ線照射手段１０４とＸ線検出手段１０５の間が検査部１０６となる。Ｘ線検査手段１０３では、Ｘ線照射手段１０４から照射されて被検査物Ｗを透過した透過Ｘ線をＸ線検出手段１０５で検出して、そのＸ線透過量に基づいて被検査物Ｗを検査する。   FIG. 7 shows the quality of the inspection object (appearance, crack chipping, foreign matter mixing) based on the X-ray transmission amount of the transmitted X-ray transmitted through the inspection object by irradiating the continuous belt-shaped inspection object with X-rays. 2 shows an X-ray inspection apparatus for inspecting the presence or absence of such as. As shown in FIG. 7, an X-ray inspection apparatus 100 specialized for quality inspection of a continuous strip-shaped object W includes a transport unit 101 having a plurality of transport rollers 102. In the conveying means 101, the inspection object W is attached so as to hang around the plurality of conveying rollers 102, and the plurality of conveying rollers 102 are rotated while applying a predetermined tension to the attached inspection object W, respectively. Are transported in a predetermined transport direction Y between the transport rollers 102, 102. In addition, the X-ray inspection apparatus 100 includes an X-ray inspection unit 103 disposed between a pair of transport rollers 102 and 102 disposed at a predetermined position as the transport unit 101. The X-ray inspection unit 103 includes an X-ray irradiation unit 104 that emits X-rays and an X-ray detection unit 105 that detects X-rays. The X-ray irradiation unit 104 and the X-ray detection unit 105 are disposed to face each other with the inspection object W between the pair of transfer rollers 102 and 102 therebetween. The X-ray irradiation unit 104 and the X-ray detection unit 105 are disposed. Between these is the inspection unit 106. In the X-ray inspection means 103, the transmitted X-rays irradiated from the X-ray irradiation means 104 and transmitted through the inspection object W are detected by the X-ray detection means 105, and the inspection object W is detected based on the X-ray transmission amount. inspect.

なお、上述したＸ線検査装置１００は、主にＰＴＰ包装機に組み込まれるものである。したがって、図８（ａ）に示すように、連続帯状の被検査物Ｗとしては、ＰＴＰシート１１０の各ポケット部１１３に錠剤１１４などが充填されたものである。図８（ｂ）に示すように、ＰＴＰシート１１０は、錠剤１１４などが充填されるポケット部１１３を有する樹脂製の包装用フィルム１１１と、包装用フィルム１１１にポケット部１１３の開口側を密閉するように取り付けられたアルミニウム製のカバーフィルム１１２とからなる。   The X-ray inspection apparatus 100 described above is mainly incorporated into a PTP packaging machine. Therefore, as shown in FIG. 8A, the continuous strip-shaped inspection object W is one in which the pockets 113 of the PTP sheet 110 are filled with tablets 114 and the like. As shown in FIG. 8B, the PTP sheet 110 seals the opening side of the pocket portion 113 to the packaging film 111 and the resin packaging film 111 having the pocket portions 113 filled with the tablets 114 and the like. The cover film 112 made of aluminum is attached.

ＰＴＰ包装機では、その製造工程中に、ポケット部１１３に錠剤１１４などが充填された後、錠剤１１４などの外観や割れ欠けなどを検査する工程を備えている。上述したＸ線検査装置１００は、このような検査工程のために組み込まれたものである。   In the PTP packaging machine, the manufacturing process includes a step of inspecting the appearance, cracks, and the like of the tablet 114 after the tablet 114 is filled in the pocket portion 113. The X-ray inspection apparatus 100 described above is incorporated for such an inspection process.

また、ＰＴＰ包装機は、検査工程の後に検査済みの被検査物Ｗ（ＰＴＰシート１１０）を所定長さに切断する工程を備えている。例えば、下記特許文献１に開示される切断装置などは、連続帯状の被検査物Ｗを切断するためにＰＴＰ包装機に組み込まれるものとして好適なものである。   Further, the PTP packaging machine includes a step of cutting the inspected object W (PTP sheet 110) that has been inspected into a predetermined length after the inspection step. For example, the cutting device disclosed in the following Patent Document 1 is suitable as one incorporated into a PTP packaging machine in order to cut a continuous strip-shaped inspection object W.

特開２００６−２８２２６７号公報JP 2006-282267 A

しかしながら、切断装置による被検査物Ｗの切断工程においては、切断時にそれまでの連続搬送を間欠搬送に切り換えるなどしており、そのため、振動が発生するという問題があった。特に連続帯状の被検査物Ｗの場合は全体的に所定の張力を付与しながら搬送するため、その振動が前段の検査工程、すなわち、Ｘ線検査装置１００による検査に影響するようになる。具体的には、Ｘ線検査装置１００では、Ｘ線照射手段１０４とＸ線検出手段１０５の間に形成された検査部１０６において、被検査物Ｗがその厚さ方向（図７の搬送方向Ｙと直交する方向）に振動する。被検査物Ｗがこのように振動すると、検査時にＸ線検出手段１０５と被検査物Ｗの距離が安定しないことから、Ｘ線透過画像に誤差が生じていまい、正しい検査結果が得られない。切断工程の他、複数の搬送用ローラ１０２の配置関係などが正しくない場合などにも振動が発生する。   However, in the cutting process of the object W to be inspected by the cutting device, the continuous conveyance up to that time is switched to intermittent conveyance at the time of cutting, which causes a problem that vibration occurs. In particular, in the case of the continuous strip-shaped inspection object W, since it is conveyed while applying a predetermined tension as a whole, the vibration affects the previous inspection process, that is, the inspection by the X-ray inspection apparatus 100. Specifically, in the X-ray inspection apparatus 100, in the inspection unit 106 formed between the X-ray irradiation unit 104 and the X-ray detection unit 105, the inspection object W is in the thickness direction (conveying direction Y in FIG. 7). Vibrates in the direction orthogonal to When the inspection object W vibrates in this way, the distance between the X-ray detection means 105 and the inspection object W is not stable at the time of inspection, so that an error occurs in the X-ray transmission image and a correct inspection result cannot be obtained. In addition to the cutting process, vibration also occurs when the arrangement relationship of the plurality of conveying rollers 102 is not correct.

本発明は、上記状況に鑑みてなされたものであり、Ｘ線照射手段とＸ線検出手段の間の検査部において、Ｘ線検出手段と連続帯状の被検査物の距離が一定となるようにこの被検査物を支持することで、安定した検査結果が得られるＸ線検査装置を提供することを目的としている。   The present invention has been made in view of the above situation, and in the inspection section between the X-ray irradiation means and the X-ray detection means, the distance between the X-ray detection means and the continuous strip-like object is constant. An object of the present invention is to provide an X-ray inspection apparatus capable of obtaining a stable inspection result by supporting the object to be inspected.

次に、上記の課題を解決するための手段を、実施の形態に対応する図面を参照して説明する。
本発明に係る請求項１記載のＸ線検査装置は、連続帯状の被検査物Ｗを、所定間隔をあけて配置された一対の搬送用ローラ３，３の間で張力を付与しながら搬送する搬送手段２と、
前記一対の搬送用ローラ３，３の間に配置され、該搬送用ローラ３，３の間の前記被検査物Ｗに向けてＸ線を照射するＸ線照射手段５と、
前記一対の搬送用ローラ３，３の間に配置されるとともに該搬送用ローラ３，３の間の前記被検査物Ｗを挟んで前記Ｘ線照射手段５と対向配置され、前記被検査物Ｗを透過した透過Ｘ線を検出するＸ線検出手段６と、
を備え、前記Ｘ線照射手段５と前記Ｘ線検出手段６の間に形成された検査部７にて前記被検査物Ｗの所定の検査領域８を検査するＸ線検査装置１において、
前記検査部７における前記Ｘ線検出手段６と搬送される前記被検査物Ｗの距離が一定となるように、該被検査物Ｗを支持する支持手段１０（２０，３０）を備えたことを特徴としている。 Next, means for solving the above problems will be described with reference to the drawings corresponding to the embodiments.
The X-ray inspection apparatus according to claim 1 of the present invention conveys the continuous strip-like object W while applying tension between a pair of conveyance rollers 3 and 3 arranged at a predetermined interval. Conveying means 2;
An X-ray irradiating means 5 disposed between the pair of conveying rollers 3 and 3 for irradiating X-rays toward the object W between the conveying rollers 3 and 3;
The inspection object W is disposed between the pair of conveyance rollers 3 and 3 and is opposed to the X-ray irradiation means 5 with the inspection object W between the conveyance rollers 3 and 3 interposed therebetween. X-ray detection means 6 for detecting transmitted X-rays transmitted through
In an X-ray inspection apparatus 1 for inspecting a predetermined inspection region 8 of the inspection object W by an inspection section 7 formed between the X-ray irradiation means 5 and the X-ray detection means 6,
Supporting means 10 (20, 30) for supporting the inspection object W is provided so that the distance between the X-ray detection means 6 and the inspection object W conveyed in the inspection section 7 is constant. It is a feature.

このような構成によれば、Ｘ線照射手段５とＸ線検出手段６の間に形成された検査部７において、Ｘ線検出手段６と被検査物Ｗの距離が常に一定に保持されるため、Ｘ線透過画像に誤差などが生じなくなる。   According to such a configuration, the distance between the X-ray detection unit 6 and the inspection object W is always kept constant in the inspection unit 7 formed between the X-ray irradiation unit 5 and the X-ray detection unit 6. Thus, no error occurs in the X-ray transmission image.

請求項２記載のＸ線検査装置は、請求項１記載のＸ線検査装置１において、前記支持手段２０は、
前記被検査物Ｗの一方の面側に設けられ、該被検査物Ｗを前記一方の面側からその厚さ方向に吸引する吸引手段２１と、
前記被検査物Ｗの前記一方の面側に設けられ、前記吸引手段２１の吸引による前記被検査物Ｗの一定以上の厚さ方向への変位を規制する支持部材２３と、
を備えたことを特徴としている。 The X-ray inspection apparatus according to claim 2 is the X-ray inspection apparatus 1 according to claim 1, wherein the support means 20 includes:
A suction means 21 provided on one surface side of the inspection object W, for sucking the inspection object W from the one surface side in the thickness direction;
A support member 23 provided on the one surface side of the inspection object W and restricting displacement of the inspection object W in a thickness direction of a certain level or more due to the suction of the suction means 21;
It is characterized by having.

このような構成によれば、被検査物Ｗは、吸引手段２１によって一方の面側へと変位するが、支持部材２３によって一定以上の厚さ方向への変位が規制されるため、その位置で安定してＸ線検出手段６との距離が一定に保持されるようになる。   According to such a configuration, the object to be inspected W is displaced to the one surface side by the suction means 21, but since the displacement in the thickness direction of a certain level or more is regulated by the support member 23, at that position. The distance from the X-ray detection means 6 is stably kept constant.

請求項３記載のＸ線検査装置は、請求項１記載のＸ線検査装置１において、前記支持手段３０は、
前記被検査物Ｗの一方の面側に設けられ、該被検査物Ｗを前記一方の面側からその厚さ方向にブローするブロー手段３１と、
前記被検査物Ｗの他方の面側に設けられ、前記ブロー手段３１のブローによる前記被検査物Ｗの一定以上の厚さ方向への変位を規制する支持部材３３と、
を備えたことを特徴としている。 The X-ray inspection apparatus according to claim 3 is the X-ray inspection apparatus 1 according to claim 1, wherein the support means 30 includes:
Blow means 31 provided on one surface side of the inspection object W, and blows the inspection object W in the thickness direction from the one surface side;
A support member 33 which is provided on the other surface side of the inspection object W and restricts displacement of the inspection object W in a thickness direction of a certain level or more due to the blow of the blow means 31;
It is characterized by having.

このような構成によれば、被検査物Ｗは、ブロー手段３１によって他方の面側へと変位するが、支持部材３３によって一定以上の厚さ方向への変位が規制されるため、その位置で安定してＸ線検出手段６との距離が一定に保持されるようになる。   According to such a configuration, the inspection object W is displaced to the other surface side by the blow means 31, but since the displacement in the thickness direction of a certain level or more is regulated by the support member 33, the inspection object W is at that position. The distance from the X-ray detection means 6 is stably kept constant.

請求項４記載のＸ線検査装置は、請求項１記載のＸ線検査装置１において、前記支持手段１０は、
前記被検査物Ｗの一方の面側に設けられ、該被検査物Ｗの前記検査領域８外において吸着口１３ａを前記一方の面に当接させて該被検査物Ｗのその厚さ方向の変位を規制するとともに、該被検査物Ｗの搬送速度と略等速で前記搬送方向Ｙへと移動する吸着手段１３を備えたことを特徴としている。 The X-ray inspection apparatus according to claim 4 is the X-ray inspection apparatus 1 according to claim 1, wherein the support means 10 includes:
Provided on one surface side of the inspection object W, the suction port 13a is brought into contact with the one surface outside the inspection region 8 of the inspection object W, and the inspection object W is arranged in the thickness direction. In addition to restricting the displacement, there is provided a suction means 13 that moves in the transport direction Y at substantially the same speed as the transport speed of the inspection object W.

このような構成によれば、被検査物Ｗは、吸着手段１３によって吸着されて一方の面側へと変位しようとするが、吸着手段１３の吸着口１３ａに当接していることで厚さ方向の変位が規制されるため、その位置で安定してＸ線検出手段６との距離が一定に保持されるようになる。このとき、吸着手段１３が被検査物Ｗの搬送速度と略等速で搬送方向Ｙへと移動するため、被検査物Ｗの搬送に支障が生じることはない。   According to such a configuration, the inspected object W is attracted by the suction means 13 and tends to be displaced to one surface side, but is in contact with the suction port 13a of the suction means 13 in the thickness direction. Therefore, the distance from the X-ray detection means 6 is stably maintained at that position. At this time, since the suction means 13 moves in the transport direction Y at a speed substantially equal to the transport speed of the inspection object W, there is no problem in the transport of the inspection object W.

請求項５記載のＸ線検査装置は、請求項２乃至４の何れかに記載のＸ線検査装置１において、前記被検査物Ｗの前記一方の面が前記Ｘ線照射手段５と対向する側の面であることを特徴としている。   The X-ray inspection apparatus according to claim 5 is the X-ray inspection apparatus 1 according to any one of claims 2 to 4, wherein the one surface of the inspection object W faces the X-ray irradiation means 5. It is characterized by that.

このような構成によれば、すなわち、吸着手段１３、吸引手段２１及びブロー手段３１がいずれもＸ線照射手段５の側に設けられることになる。Ｘ線検出手段６と被検査物Ｗの間にこのような手段（装置）が設けられないことから、Ｘ線検出手段６を被検査物Ｗに近接させて配置することができる。   According to such a configuration, that is, the suction means 13, the suction means 21, and the blow means 31 are all provided on the X-ray irradiation means 5 side. Since such means (apparatus) is not provided between the X-ray detection means 6 and the inspection object W, the X-ray detection means 6 can be arranged close to the inspection object W.

本発明に係る請求項１記載のＸ線検査装置によれば、Ｘ線照射手段とＸ線検出手段の間に形成された検査部におけるＸ線検出手段と被検査物の距離が常に一定に保持され、Ｘ線透過画像に誤差などが生じなくなる。これにより、安定した検査結果を得ることができる。   According to the X-ray inspection apparatus of the first aspect of the present invention, the distance between the X-ray detection means and the inspection object in the inspection section formed between the X-ray irradiation means and the X-ray detection means is always kept constant. Thus, no error or the like occurs in the X-ray transmission image. Thereby, a stable inspection result can be obtained.

請求項２乃至４記載のＸ線検査装置によれば、いずれも現実的にＸ線検出手段と被検査物の距離を一定に保持することができる。   According to the X-ray inspection apparatus of any one of claims 2 to 4, any distance between the X-ray detection means and the object to be inspected can be maintained practically.

請求項５記載のＸ線検査装置によれば、Ｘ線検出手段を被検査物に近接させて配置することが可能となり、被検査物がＸ線検出手段のＸ線検出面に近づいていることから、高精度のＸ線透過画像を得ることができる。   According to the X-ray inspection apparatus of the fifth aspect, the X-ray detection means can be arranged close to the inspection object, and the inspection object is approaching the X-ray detection surface of the X-ray detection means. Therefore, a highly accurate X-ray transmission image can be obtained.

第１実施形態を示す正面図である。It is a front view which shows 1st Embodiment. 同実施形態の検査部近傍を示す斜視図である。It is a perspective view which shows the test | inspection part vicinity of the embodiment. 第２実施形態を示す正面図である。It is a front view which shows 2nd Embodiment. 同実施形態の検査部近傍を示す斜視図である。It is a perspective view which shows the test | inspection part vicinity of the embodiment. 第３実施形態（検査部近傍）を示す正面図（断面図）である。It is a front view (sectional view) showing a third embodiment (near an inspection part). 第４実施形態（検査部近傍）を示す正面図（断面図）である。It is a front view (sectional view) which shows 4th Embodiment (inspection part vicinity). 従来のＸ線検査装置を示す正面図である。It is a front view which shows the conventional X-ray inspection apparatus. （ａ）図７のＸ線検査装置にて検査される被検査物を示す斜視図である。 （ｂ）（ａ）におけるＡ−Ａ断面図である。(A) It is a perspective view which shows the to-be-inspected object test | inspected with the X-ray inspection apparatus of FIG. (B) It is AA sectional drawing in (a).

以下、本発明の実施形態を図面を参照して具体的に説明する。
各実施形態（Ｘ線検査装置１）は、連続帯状の被検査物ＷにＸ線を照射して、被検査物Ｗを透過した透過Ｘ線のＸ線透過量に基づいてこの被検査物の品質（外観、割れ欠け、異物混入の有無など）を検査するものである。また、これらは、主にＰＴＰ包装機に組み込まれて、ＰＴＰ包装機における検査工程に使用されるものである。したがって、連続帯状の被検査物Ｗとしては、従来のＸ線検査装置１００（図７参照）と同様に、図８に示すようなＰＴＰシート１１０の各ポケット部１１３に錠剤１１４などが充填されたものである。 Embodiments of the present invention will be specifically described below with reference to the drawings.
Each embodiment (X-ray inspection apparatus 1) irradiates a continuous strip-shaped inspection object W with X-rays, and based on the X-ray transmission amount of the transmitted X-rays transmitted through the inspection object W, It inspects quality (appearance, cracks, presence of foreign matter, etc.). Moreover, these are mainly incorporated in the PTP packaging machine and used for the inspection process in the PTP packaging machine. Therefore, as the continuous strip-shaped inspection object W, like the conventional X-ray inspection apparatus 100 (see FIG. 7), each pocket portion 113 of the PTP sheet 110 as shown in FIG. Is.

まず最初に、図１を参照して各実施形態に共通の全体構成について説明する。
図１に示すように、連続帯状の被検査物Ｗの品質検査に特化したこのＸ線検査装置１は、搬送手段２と、Ｘ線検査手段４とを主な構成要件として備えている。 First, an overall configuration common to the embodiments will be described with reference to FIG.
As shown in FIG. 1, the X-ray inspection apparatus 1 specialized for quality inspection of a continuous strip-shaped inspection object W includes a transport unit 2 and an X-ray inspection unit 4 as main components.

搬送手段２は、詳細には、ＰＴＰ包装機内の随所に配置された複数の搬送用ローラ３により構成されているが、Ｘ線検査装置１における搬送手段２としては、そのうちの所定位置に設けられた一対の搬送用ローラ３，３が該当する。なお、搬送手段２では、被検査物Ｗを複数の搬送用ローラ３に掛け回すように取り付けて、取り付けた被検査物Ｗを所定の張力を付与しながら複数の搬送用ローラ３を回転させて、それぞれの搬送用ローラ３，３の間の所定の搬送方向（Ｘ線検査装置１における搬送方向は矢線Ｙ方向）に搬送する。   In detail, the conveying means 2 is composed of a plurality of conveying rollers 3 arranged at various locations in the PTP packaging machine. The conveying means 2 in the X-ray inspection apparatus 1 is provided at a predetermined position among them. A pair of conveying rollers 3 and 3 correspond to this. In the conveying means 2, the inspection object W is attached so as to hang around the plurality of conveying rollers 3, and the plurality of conveying rollers 3 are rotated while applying a predetermined tension to the attached inspection object W. In the predetermined conveyance direction between the conveyance rollers 3 and 3 (the conveyance direction in the X-ray inspection apparatus 1 is the arrow Y direction).

Ｘ線検査手段４は、搬送手段２となる、所定位置の一対の搬送用ローラ３，３の間に配置されており、Ｘ線を照射するＸ線照射手段５と、Ｘ線を検出するＸ線検出手段６とを備えている。Ｘ線照射手段５とＸ線検出手段６は、一対の搬送用ローラ３，３の間の被検査物Ｗを挟んで対向して配置されており、Ｘ線照射手段５とＸ線検出手段６の間がＸ線検査装置１における検査部７となる。Ｘ線検査手段４では、Ｘ線照射手段５から照射されて被検査物Ｗを透過した透過Ｘ線をＸ線検出手段６で検出して、そのＸ線透過量に基づいて被検査物Ｗを検査する。   The X-ray inspection unit 4 is disposed between a pair of transfer rollers 3 and 3 at a predetermined position, which serves as the transfer unit 2, and an X-ray irradiation unit 5 that emits X-rays and an X that detects X-rays. Line detection means 6. The X-ray irradiation means 5 and the X-ray detection means 6 are arranged to face each other with the inspection object W between the pair of conveying rollers 3 and 3 therebetween. The X-ray irradiation means 5 and the X-ray detection means 6 are disposed. The interval is the inspection unit 7 in the X-ray inspection apparatus 1. In the X-ray inspection means 4, transmitted X-rays irradiated from the X-ray irradiation means 5 and transmitted through the inspection object W are detected by the X-ray detection means 6, and the inspection object W is detected based on the X-ray transmission amount. inspect.

Ｘ線照射手段となるＸ線発生器５は、金属製の箱内にＸ線を発生させるＸ線管が絶縁油に浸漬されてなり、搬送される被検査物Ｗに向けてＸ線を照射する。また、Ｘ線検出手段となるＸ線検出器６は、金属製の箱内に各種機器が収容されており、この箱のＸ線発生器５と対向する面にはフォトダイオードと、フォトダイオード上に設けられたシンチレータとからなる複数のＸ線検出素子が設けられている。これらのＸ線検出素子が搬送方向Ｙと直交する方向であり、且つ被検査物Ｗの面と平行となる方向に並んでラインセンサ６ａが形成されている。   The X-ray generator 5 serving as an X-ray irradiation means is an X-ray tube for generating X-rays in a metal box soaked in insulating oil, and irradiates the object W to be conveyed with X-rays. To do. The X-ray detector 6 serving as the X-ray detection means has various devices housed in a metal box, and a surface of the box facing the X-ray generator 5 has a photodiode and a photodiode on the surface. A plurality of X-ray detection elements including a scintillator provided in the apparatus are provided. The line sensors 6a are formed side by side in the direction in which these X-ray detection elements are orthogonal to the transport direction Y and parallel to the surface of the inspection object W.

なお、Ｘ線検査装置１が組み込まれたＰＴＰ包装機では、Ｘ線検査装置１の後段に切断工程に使用される図示しない切断装置などが配設されている。切断工程では、検査工程の後の検査済みの被検査物Ｗ（ＰＴＰシート１１０）を所定長さに切断する。   In addition, in the PTP packaging machine in which the X-ray inspection apparatus 1 is incorporated, a cutting apparatus (not shown) used for the cutting process is disposed at the subsequent stage of the X-ray inspection apparatus 1. In the cutting process, the inspection object W (PTP sheet 110) that has been inspected after the inspection process is cut into a predetermined length.

ここから、本発明の要旨である上述した検査部７近傍における構成を各実施形態ごとに説明する。
「第１実施形態」
図１に示すように、Ｘ線検査装置１（１Ａ）は、検査部７の近傍における被検査物Ｗの一方の面側に支持手段１０を備えている。すなわち、支持手段１０は、被検査物ＷのＸ線発生器５と対向する面側に、このＸ線発生器５と被検査物Ｗの間に介在するように設けられている。 From here, the structure in the vicinity of the inspection unit 7 described above, which is the gist of the present invention, will be described for each embodiment.
“First Embodiment”
As shown in FIG. 1, the X-ray inspection apparatus 1 (1 </ b> A) includes support means 10 on one surface side of the inspection object W in the vicinity of the inspection unit 7. That is, the support means 10 is provided on the surface of the inspection object W facing the X-ray generator 5 so as to be interposed between the X-ray generator 5 and the inspection object W.

支持手段１０は、検査部７において、Ｘ線検出器６と搬送される被検査物Ｗの距離が一定となるようにこの被検査物Ｗを支持するために設けられたものであり、一対のローラ１１，１１と、ローラ１１，１１に掛け回された循環ベルト１２と、循環ベルト１２のベルト面に突出して設けられた複数の円筒部からなる吸着手段１３とを備えている。吸着手段１３は、その吸着口１３ａから空気を吸い込むことにより被検査物Ｗを吸着口１３ａに吸着させるものである。   The support means 10 is provided to support the inspection object W so that the distance between the X-ray detector 6 and the inspection object W to be conveyed is constant in the inspection unit 7. The rollers 11, 11, the circulation belt 12 wound around the rollers 11, 11, and the suction means 13 including a plurality of cylindrical portions provided to protrude from the belt surface of the circulation belt 12. The suction means 13 sucks air from the suction port 13a to cause the inspection object W to be sucked to the suction port 13a.

図２に示すように、吸着手段１３を構成する複数の円筒部は、循環ベルト１２の循環方向に沿って並んで列をなして設けられるとともに、循環ベルト１２の幅方向に２列となるように設けられている。また、各列の円筒部は、その吸着口１３ａが検査部７における被検査物Ｗの所定の検査領域８外に位置するように設けられている。この実施形態では、被検査物Ｗの搬送方向Ｙと直交する幅方向の中央部を検査領域８としているため、幅方向の両端部が検査領域８外となる。   As shown in FIG. 2, the plurality of cylindrical portions constituting the adsorbing means 13 are provided side by side along the circulation direction of the circulation belt 12 and are arranged in two rows in the width direction of the circulation belt 12. Is provided. Further, the cylindrical portions of each row are provided so that the suction ports 13 a are located outside the predetermined inspection region 8 of the inspection object W in the inspection portion 7. In this embodiment, since the central portion in the width direction orthogonal to the conveyance direction Y of the inspection object W is used as the inspection region 8, both end portions in the width direction are outside the inspection region 8.

また、一対のローラ１１，１１は、循環ベルト１２を被検査物Ｗの搬送速度と略等速となるように循環させている。したがって、吸着手段１３は、被検査物Ｗの搬送速度と略等速で搬送方向Ｙに移動する。そのため、検査部７において、吸着手段１３は、被検査物Ｗに吸着口１３ａを当接させて被検査物Ｗを一方の面側からこの吸着口１３ａに吸着させても、互いの速度差により吸着が解除されるなど不具合が生じたり、被検査物Ｗの搬送に支障が生じるたりするようなことはない。   Further, the pair of rollers 11 and 11 circulate the circulation belt 12 so as to be substantially the same speed as the conveyance speed of the inspection object W. Accordingly, the suction means 13 moves in the transport direction Y at a speed substantially equal to the transport speed of the inspection object W. Therefore, in the inspection unit 7, even if the suction unit 13 causes the suction port 13 a to contact the inspection object W and causes the inspection object W to be suctioned to the suction port 13 a from one surface side, due to the speed difference between them. There will be no troubles such as release of suction, or troubles in transporting the inspection object W.

上述した第１実施形態によれば、被検査物Ｗは、吸着手段１３によって吸着されて一方の面側へと変位しようとするが、吸着手段１３の吸着口１３ａに当接していることで厚さ方向の変位が規制されるため、その位置、すなわち、吸着口１３ａに当接した位置で安定してＸ線検出器６との距離が一定に保持されるようになる。このとき、上述したように、吸着手段１３が被検査物Ｗの搬送速度と略等速で搬送方向Ｙへと移動するため、被検査物Ｗの搬送に支障が生じることはない。   According to the first embodiment described above, the inspection object W is attracted by the suction means 13 and tends to be displaced to one surface side, but is thicker by being in contact with the suction port 13a of the suction means 13. Since the displacement in the vertical direction is regulated, the distance from the X-ray detector 6 is stably maintained at that position, that is, the position in contact with the suction port 13a. At this time, as described above, since the suction means 13 moves in the transport direction Y at a speed substantially equal to the transport speed of the inspection object W, there is no problem in the transport of the inspection object W.

そして、Ｘ線発生器５とＸ線検出器６の間に形成された検査部７において、Ｘ線検出器６と被検査物Ｗの距離が常に一定に保持されるため、Ｘ線透過画像に誤差などが生じなくなり、安定した検査結果を得ることができる。   In the inspection unit 7 formed between the X-ray generator 5 and the X-ray detector 6, the distance between the X-ray detector 6 and the object W to be inspected is always kept constant. An error or the like does not occur, and a stable inspection result can be obtained.

「第２実施形態」
図３に示すように、Ｘ線検査装置１（１Ｂ）は、検査部７の近傍における被検査物Ｗの一方の面側に支持手段２０を備えている。すなわち、上述した第１実施形態と同様、支持手段２０は、被検査物ＷのＸ線発生器５と対向する面側に、このＸ線発生器５と被検査物Ｗの間に介在するように設けられている。なお、第２実施形態において、上述した第１実施形態と同等又は同一の箇所には同一の符号を付し、その説明は省略する。 “Second Embodiment”
As shown in FIG. 3, the X-ray inspection apparatus 1 (1 </ b> B) includes support means 20 on one surface side of the inspection object W in the vicinity of the inspection unit 7. That is, like the first embodiment described above, the support means 20 is interposed between the X-ray generator 5 and the inspection object W on the surface side of the inspection object W facing the X-ray generator 5. Is provided. In the second embodiment, the same or similar parts as those in the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

支持手段２０は、検査部７において、Ｘ線検出器６と搬送される被検査物Ｗの距離が一定となるようにこの被検査物Ｗを支持するために設けられたものであり、被検査物Ｗの一方の面側に設けられ、被検査物Ｗを一方の面側からその厚さ方向に吸引する吸引手段２１と、吸引手段２１と同様に被検査物Ｗの一方の面側に設けられ、吸引手段２１の吸引による被検査物Ｗの厚さ方向への変位を規制する支持部材２３とを備えている。   The support means 20 is provided to support the inspection object W so that the distance between the X-ray detector 6 and the inspection object W transported in the inspection unit 7 is constant. The suction means 21 is provided on one surface side of the object W and sucks the inspection object W from the one surface side in the thickness direction, and is provided on the one surface side of the inspection object W in the same manner as the suction means 21. And a support member 23 that regulates the displacement of the inspection object W in the thickness direction due to the suction of the suction means 21.

吸引手段２１は、箱状の本体部２２から突出して設けられた複数の円筒部からなり、その吸引口２１ａから空気を吸い込むことにより被検査物Ｗを吸引口２１ａ側に吸いよせるものである。なお、吸引手段２１は、吸引口２１ａが被検査物Ｗに当接せずに被検査物Ｗから僅かに離れるように設けられている。   The suction means 21 is composed of a plurality of cylindrical portions provided so as to protrude from the box-shaped main body portion 22 and sucks air to be inspected W toward the suction port 21a by sucking air from the suction port 21a. Note that the suction means 21 is provided so that the suction port 21a does not come into contact with the inspection object W and is slightly separated from the inspection object W.

図４に示すように、吸引手段２１を構成する複数の円筒部においても、上述した第１実施形態と同様に、被検査物Ｗの搬送方向Ｙに沿って列をなして設けられるとともに、被検査物Ｗの幅方向に２列となるように設けられている。また、各列の円筒部は、その吸引口２１ａが検査部７における被検査物Ｗの所定の検査領域８外に位置するように設けられているが、吸引口２１ａは被検査物Ｗに接触しているわけではないため、吸引口２１ａが被検査物Ｗの所定の検査領域８内に位置するように設けられていてもよい。   As shown in FIG. 4, the plurality of cylindrical portions constituting the suction means 21 are also provided in a row along the conveyance direction Y of the inspection object W as in the first embodiment described above. The inspection object W is provided in two rows in the width direction. Further, the cylindrical portion of each row is provided so that the suction port 21a is located outside the predetermined inspection region 8 of the inspection object W in the inspection unit 7, but the suction port 21a contacts the inspection object W. However, the suction port 21a may be provided so as to be located in the predetermined inspection region 8 of the inspection object W.

支持部材２３は、複数のロッド部材からなり、これらのロッド部材が所定間隔をあけてその長手方向を搬送方向Ｙと直交する方向に向けて配置されてなる。   The support member 23 is composed of a plurality of rod members, and these rod members are arranged with a predetermined interval therebetween so that the longitudinal direction thereof is perpendicular to the transport direction Y.

上述した第２実施形態によれば、被検査物Ｗは、吸引手段２１によって一方の面側へと変位するが、支持手段２３によって一定以上の厚さ方向への変位が規制されるため、その位置、すなわち、支持手段２３に当接した位置で安定してＸ線検出手段との距離が一定に保持されるようになる。   According to the second embodiment described above, the inspection object W is displaced to the one surface side by the suction means 21, but the displacement in the thickness direction of a certain level or more is regulated by the support means 23. The distance from the X-ray detection means is stably maintained at the position, that is, the position in contact with the support means 23.

そして、Ｘ線発生器５とＸ線検出器６の間に形成された検査部７において、Ｘ線検出器６と被検査物Ｗの距離が常に一定に保持されるため、Ｘ線透過画像に誤差などが生じなくなり、安定した検査結果を得ることができる。   In the inspection unit 7 formed between the X-ray generator 5 and the X-ray detector 6, the distance between the X-ray detector 6 and the object W to be inspected is always kept constant. An error or the like does not occur, and a stable inspection result can be obtained.

「第３実施形態」
図５に示すように、Ｘ線検査装置１（１Ｃ）は、検査部７の近傍における被検査物Ｗの一方の面側に支持手段３０を構成するブロー手段３１を備え、他方の面側に支持手段３０を構成する支持部材３３を備えている。すなわち、支持手段３０は、被検査物ＷのＸ線発生器５と対向する面側に、このＸ線発生器５と被検査物Ｗの間に介在するようにブロー手段３１が設けられ、また、被検査物ＷのＸ線検出器６と対向する面側に、このＸ線検出器６と被検査物Ｗの間に介在するように支持部材３３が設けられている。なお、図５には検査部７近傍の構成だけを示しているが、Ｘ線検査装置１Ｃにおけるその他の構成は図１又は図３に示した構成と同じである。また、第３実施形態においても、上述した第１及び第２実施形態と同等又は同一の箇所には同一の符号を付し、その説明は省略する。 “Third Embodiment”
As shown in FIG. 5, the X-ray inspection apparatus 1 (1 </ b> C) includes a blow unit 31 constituting a support unit 30 on one surface side of the inspection object W in the vicinity of the inspection unit 7, and on the other surface side. A support member 33 constituting the support means 30 is provided. That is, the support means 30 is provided with a blow means 31 on the surface of the inspection object W facing the X-ray generator 5 so as to be interposed between the X-ray generator 5 and the inspection object W. A support member 33 is provided on the surface of the inspection object W facing the X-ray detector 6 so as to be interposed between the X-ray detector 6 and the inspection object W. FIG. 5 shows only the configuration in the vicinity of the inspection unit 7, but the other configuration in the X-ray inspection apparatus 1C is the same as the configuration shown in FIG. 1 or FIG. Also in the third embodiment, the same or similar parts as those in the first and second embodiments described above are denoted by the same reference numerals, and the description thereof is omitted.

支持手段３０は、検査部７において、Ｘ線検出器６と搬送される被検査物Ｗの距離が一定となるようにこの被検査物Ｗを支持するために設けられたものであり、被検査物Ｗの一方の面側に設けられ、被検査物Ｗを一方の面側からその厚さ方向にブローするブロー手段３１と、被検査物Ｗの他方の面側に設けられ、ブロー手段３１のブローによる被検査物Ｗの厚さ方向への変位を規制する支持部材３３とを備えている。   The support means 30 is provided to support the inspection object W so that the distance between the X-ray detector 6 and the inspection object W conveyed in the inspection unit 7 is constant. Provided on one surface side of the object W, and blow means 31 for blowing the inspection object W from the one surface side in the thickness direction; provided on the other surface side of the inspection object W; And a support member 33 that regulates displacement of the inspection object W in the thickness direction due to blow.

ブロー手段３１は、箱状の本体部３２から突出して設けられた複数の円筒部からなり、その吹出口３１ａから被検査物Ｗに向けて空気を吹き付けることにより被検査物Ｗを後述する支持部材３３へと押し付けるものである。なお、ブロー手段３１は、吹出口３１ａが被検査物Ｗから離れるように設けられている。   The blow means 31 is composed of a plurality of cylindrical portions provided so as to protrude from the box-shaped main body 32, and a support member which will be described later on the inspection object W by blowing air from the outlet 31a toward the inspection object W. 33. The blow means 31 is provided so that the air outlet 31a is separated from the object W to be inspected.

ブロー手段３１を構成する複数の円筒部においても、上述した第１及び第２実施形態と同様に、被検査物Ｗの搬送方向Ｙに沿って列をなして設けられるとともに、被検査物Ｗの幅方向に２列となるように設けられている。各列の円筒部は、その吹出口３１ａが検査部７における被検査物Ｗの所定の検査領域８外に位置するように設けられているが、吹出口３１ａは被検査物Ｗに接触しているわけではないため、吹出口３１ａが被検査物Ｗの所定の検査領域８内に位置するように設けられていてもよい。   Similarly to the first and second embodiments described above, the plurality of cylindrical portions constituting the blowing unit 31 are provided in a row along the conveyance direction Y of the inspection object W, and the inspection object W They are provided in two rows in the width direction. The cylindrical portion of each row is provided such that the air outlet 31a is located outside the predetermined inspection region 8 of the inspection object W in the inspection portion 7, but the air outlet 31a is in contact with the inspection object W. Since it does not necessarily exist, the blower outlet 31a may be provided so that it may be located in the predetermined test | inspection area | region 8 of the to-be-inspected object W. FIG.

支持部材３３は、上述した第２実施形態と同様に、複数のロッド部材からなり、これらのロッド部材が所定間隔をあけてその長手方向を搬送方向Ｙと直交する方向に向けて配置されてなる。   The support member 33 is composed of a plurality of rod members in the same manner as in the second embodiment described above, and these rod members are arranged with a predetermined interval therebetween so that the longitudinal direction thereof is perpendicular to the transport direction Y. .

上述した第３実施形態によれば、被検査物Ｗは、ブロー手段３１によって他方の面側へと変位するが、支持手段３３によって一定以上の厚さ方向への変位が規制されるため、その位置、すなわち、支持手段３３に当接した位置で安定してＸ線検出手段との距離が一定に保持されるようになる。   According to the third embodiment described above, the inspection object W is displaced to the other surface side by the blow unit 31, but since the displacement in the thickness direction above a certain level is regulated by the support unit 33, The distance from the X-ray detection means is stably maintained at the position, that is, the position in contact with the support means 33.

そして、Ｘ線発生器５とＸ線検出器６の間に形成された検査部７において、Ｘ線検出器６と被検査物Ｗの距離が常に一定に保持されるため、Ｘ線透過画像に誤差などが生じなくなり、安定した検査結果を得ることができる。   In the inspection unit 7 formed between the X-ray generator 5 and the X-ray detector 6, the distance between the X-ray detector 6 and the object W to be inspected is always kept constant. An error or the like does not occur, and a stable inspection result can be obtained.

「第４実施形態」
図６に示すように、Ｘ線検査装置１（１Ｄ）は、検査部７の近傍における被検査物Ｗの一方の面側に支持手段４０を備えている。すなわち、支持手段４０は、被検査物ＷのＸ線発生器５と対向する面側に、このＸ線発生器５と被検査物Ｗの間に介在するように設けられている。なお、図６には検査部７近傍の構成だけを示しているが、Ｘ線検査装置１Ｄにおけるその他の構成は図１又は図３に示した構成と同じである。また、第４実施形態においても、上述した第１、第２及び第３実施形態と同等又は同一の箇所には同一の符号を付し、その説明は省略する。 “Fourth Embodiment”
As shown in FIG. 6, the X-ray inspection apparatus 1 (1D) includes support means 40 on one surface side of the inspection object W in the vicinity of the inspection unit 7. That is, the support means 40 is provided on the surface of the inspection object W facing the X-ray generator 5 so as to be interposed between the X-ray generator 5 and the inspection object W. FIG. 6 shows only the configuration in the vicinity of the inspection unit 7, but the other configuration in the X-ray inspection apparatus 1D is the same as the configuration shown in FIG. 1 or FIG. Also in the fourth embodiment, the same or similar parts as those in the first, second, and third embodiments described above are denoted by the same reference numerals, and the description thereof is omitted.

支持手段４０は、検査部７において、Ｘ線検出器６と搬送される被検査物Ｗの距離が一定となるようにこの被検査物Ｗを支持するために設けられたものであり、被検査物Ｗの一方の面側に設けられ、その吸着口４１ａから空気を吸い込むことにより被検査物Ｗの一方の面側を吸着口４１ａに吸着させるものである。吸着手段４１は、箱状の本体部４２から突出して設けられた複数の円筒部からなり、各吸着口４１ａが被検査物Ｗに当接するように設けられている。   The support means 40 is provided in the inspection unit 7 to support the inspection object W so that the distance between the X-ray detector 6 and the inspection object W conveyed is constant. It is provided on one surface side of the object W, and the one surface side of the inspection object W is adsorbed to the adsorption port 41a by sucking air from the adsorption port 41a. The suction means 41 is composed of a plurality of cylindrical portions provided so as to protrude from the box-shaped main body portion 42, and is provided so that each suction port 41 a comes into contact with the inspection object W.

吸着手段４１を構成する複数の円筒部は、上述した第１、第２及び第３実施形態と同様に、被検査物Ｗの搬送方向Ｙに沿って列をなして設けられるとともに、被検査物Ｗの幅方向に２列となるように設けられている。また、各列の円筒部は、その吸着口４１ａが検査部７における被検査物Ｗの所定の検査領域８外に位置するように設けられている。   As in the first, second, and third embodiments described above, the plurality of cylindrical portions constituting the suction means 41 are provided in a row along the conveyance direction Y of the inspection object W, and the inspection object It is provided in two rows in the width direction of W. In addition, the cylindrical portions of each row are provided such that the suction ports 41 a are located outside the predetermined inspection region 8 of the inspection object W in the inspection portion 7.

また、吸着手段４１では、吸着口４１ａに被検査物Ｗを吸着させた状態でもこの被検査物Ｗが搬送方向Ｙに進行可能なようにその吸着力は制御されている。   Further, in the suction means 41, the suction force is controlled so that the test object W can advance in the transport direction Y even when the test object W is sucked to the suction port 41a.

上述した第４実施形態によれば、被検査物Ｗは、吸着手段４１によって吸着されて一方の面側へと変位しようとするが、吸着手段４１の吸着口４１ａに当接していることで厚さ方向の変位が規制されるため、その位置、すなわち、吸着口４１ａに当接した位置で安定してＸ線検出器６との距離が一定に保持されるようになる。このとき、上述したように、吸着手段４１の吸着力が好適に制御されているため、被検査物Ｗの搬送に支障が生じることはない。   According to the fourth embodiment described above, the inspection object W is adsorbed by the adsorbing means 41 and tends to be displaced toward one surface side, but is thicker by being in contact with the adsorbing port 41a of the adsorbing means 41. Since the displacement in the vertical direction is regulated, the distance from the X-ray detector 6 is stably maintained at that position, that is, the position in contact with the suction port 41a. At this time, as described above, since the suction force of the suction means 41 is suitably controlled, there is no problem in the conveyance of the inspection object W.

そして、Ｘ線発生器５とＸ線検出器６の間に形成された検査部７において、Ｘ線検出器６と被検査物Ｗの距離が常に一定に保持されるため、Ｘ線透過画像に誤差などが生じなくなり、安定した検査結果を得ることができる。   In the inspection unit 7 formed between the X-ray generator 5 and the X-ray detector 6, the distance between the X-ray detector 6 and the object W to be inspected is always kept constant. An error or the like does not occur, and a stable inspection result can be obtained.

１…Ｘ線検査装置
２…搬送手段
３…搬送用ローラ
５…Ｘ線照射手段（Ｘ線発生器）
６…Ｘ線検出手段（Ｘ線検出器）
７…検査部
８…検査領域
１０，２０，３０…支持手段
１３…吸着手段
１３ａ…吸着口
２１…吸引手段
２１ａ…吸引口
２３…支持部材
３１…ブロー手段
３１ａ…吹出口
３３…支持部材
Ｗ…連続帯状の被検査物
Ｙ…搬送方向 DESCRIPTION OF SYMBOLS 1 ... X-ray inspection apparatus 2 ... Conveyance means 3 ... Roller for conveyance 5 ... X-ray irradiation means (X-ray generator)
6 ... X-ray detection means (X-ray detector)
DESCRIPTION OF SYMBOLS 7 ... Test | inspection part 8 ... Test | inspection area 10, 20, 30 ... Support means 13 ... Adsorption means 13a ... Adsorption port 21 ... Suction means 21a ... Suction port 23 ... Support member 31 ... Blow means 31a ... Outlet 33 ... Support member W ... Continuous strip-shaped inspection object Y ... Conveying direction

Claims (5)

連続帯状の被検査物（Ｗ）を、所定間隔をあけて配置された一対の搬送用ローラ（３）の間で張力を付与しながら搬送する搬送手段（２）と、
前記一対の搬送用ローラの間に配置され、該搬送用ローラの間の前記被検査物に向けてＸ線を照射するＸ線照射手段（５）と、
前記一対の搬送用ローラの間に配置されるとともに該搬送用ローラの間の前記被検査物を挟んで前記Ｘ線照射手段と対向配置され、前記被検査物を透過した透過Ｘ線を検出するＸ線検出手段（６）と、
を備え、前記Ｘ線照射手段と前記Ｘ線検出手段の間に形成された検査部（７）にて前記被検査物の所定の検査領域（８）を検査するＸ線検査装置（１）において、
前記検査部における前記Ｘ線検出手段と搬送される前記被検査物Ｗの距離が一定となるように、該被検査物を支持する支持手段（１０，２０，３０）を備えたことを特徴とするＸ線検査装置。 Conveying means (2) for conveying a continuous strip-shaped object (W) while applying tension between a pair of conveying rollers (3) arranged at a predetermined interval;
X-ray irradiating means (5) disposed between the pair of conveying rollers and irradiating X-rays toward the inspection object between the conveying rollers;
It is arranged between the pair of conveying rollers and is arranged opposite to the X-ray irradiation means with the object to be inspected between the rollers for conveying, and detects transmitted X-rays transmitted through the object to be inspected. X-ray detection means (6);
An X-ray inspection apparatus (1) for inspecting a predetermined inspection region (8) of the inspection object by an inspection section (7) formed between the X-ray irradiation means and the X-ray detection means ,
A support means (10, 20, 30) for supporting the inspection object is provided so that a distance between the X-ray detection means and the inspection object W conveyed in the inspection unit is constant. X-ray inspection equipment. 前記支持手段（２０）は、
前記被検査物（Ｗ）の一方の面側に設けられ、該被検査物を前記一方の面側からその厚さ方向に吸引する吸引手段（２１）と、
前記被検査物の前記一方の面側に設けられ、前記吸引手段の吸引による前記被検査物の一定以上の厚さ方向への変位を規制する支持部材（２３）と、
を備えたことを特徴とする請求項１記載のＸ線検査装置。 The support means (20)
A suction means (21) provided on one surface side of the inspection object (W), and sucking the inspection object from the one surface side in the thickness direction;
A support member (23) provided on the one surface side of the object to be inspected and restricting displacement of the object to be inspected in a thickness direction above a certain level due to suction of the suction means;
The X-ray inspection apparatus according to claim 1, further comprising: 前記支持手段（３０）は、
前記被検査物（Ｗ）の一方の面側に設けられ、該被検査物を前記一方の面側からその厚さ方向にブローするブロー手段（３１）と、
前記被検査物の他方の面側に設けられ、前記ブロー手段のブローによる前記被検査物の一定以上の厚さ方向への変位を規制する支持部材（３３）と、
を備えたことを特徴とする請求項１記載のＸ線検査装置。 The support means (30)
Blow means (31) provided on one surface side of the object to be inspected (W), and blows the object to be inspected in the thickness direction from the one surface side;
A support member (33) provided on the other surface side of the object to be inspected and restricting displacement of the object to be inspected in a thickness direction above a certain level due to the blow of the blowing means;
The X-ray inspection apparatus according to claim 1, further comprising: 前記支持手段（１０）は、
前記被検査物（Ｗ）の一方の面側に設けられ、該被検査物の前記検査領域（８）外において吸着口（１３ａ）を前記一方の面に当接させて該被検査物のその厚さ方向の変位を規制するとともに、該被検査物の搬送速度と略等速で前記搬送方向（Ｙ）へと移動する吸着手段（１３）を備えたことを特徴とする請求項１記載のＸ線検査装置。 The support means (10)
It is provided on one surface side of the inspection object (W), and the suction port (13a) is brought into contact with the one surface outside the inspection area (8) of the inspection object, and the inspection object (W) The suction means (13) for restricting displacement in the thickness direction and moving in the transport direction (Y) at substantially the same speed as the transport speed of the inspection object is provided. X-ray inspection equipment. 前記被検査物（Ｗ）の前記一方の面が前記Ｘ線照射手段（５）と対向する側の面であることを特徴とする請求項２乃至４の何れかに記載のＸ線検査装置。   The X-ray inspection apparatus according to any one of claims 2 to 4, wherein the one surface of the inspection object (W) is a surface facing the X-ray irradiation means (5).
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