JP2001264999A - Exposure device of belt like work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable exposure to a belt-like work without exerting tension thereto with an exposure device for transporting the belt-like work by a grip feed system. SOLUTION: The belt-like work W is clamped by a feed grip section 12 and the belt-like work Wb is transported to the downstream side in a transporting direction. During the transportation of the belt-like work Wb, the meandering of the belt-like work Wb is detected and the correction of the meandering is carried out. After the movement of the belt-like work Wb is stopped, the belt-like work Wb is fixed by a work fixing mechanism 21 disposed on the upstream side of an exposure section 3. The transporting moves toward the downstream of the transportation by as much as the extended portion of the belt-like work Wb and the tension exerted thus far on the belt-like work Wb is removed. Next, the belt-like work Wb is attracted and fixed to a work stage and is aligned by moving a mask M. The belt-like work Wb is then subjected to exposure processing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for a long continuous work (hereinafter, referred to as a strip work) such as a film of an organic compound and a thin metal, and more particularly, to the exposure of a mask pattern on the strip work. The present invention relates to an exposure apparatus for a strip-shaped work used for, for example, an apparatus.

[0002]

2. Description of the Related Art Exposure of a strip-shaped work such as a film of an organic compound or thin metal is performed by drawing out the work from a rolled state, exposing the work, and winding the work again on a roll. In general, the transfer of a strip-shaped work used in the above-described exposure apparatus is performed between a take-up roll and a take-up roll in order to stabilize work feeding during work transfer, secure positional accuracy, and correct warpage and undulation of the work. The tension is always applied to the work.

FIG. 6 is a view showing a conventional example of the above-mentioned strip-shaped work exposure apparatus. In the drawing, reference numeral 10 denotes an unwinding roll unit, and the unwinding roll unit 10 includes an unwinding roll 1,
A spacer winding roll 1a and a guide roll R1 are provided. The strip-shaped work Wb is usually wound on the unwinding roll 1 so as to overlap with the spacer S, and when the strip-shaped work Wb is pulled out from the unwinding roll 1, the spacer S is wound up by the spacer winding-up roll 1a. The band-shaped work Wb is relatively thick (t = 150 μm or more, and is often used at 250 μm). For example, a work in which a copper foil (normally thicker than a resin film) is stretched on a resin film is used. For this reason, some of the strip-shaped workpieces Wb are warped in the width direction.

[0004] For example, Japanese Unexamined Patent Publication No.
A method such as that shown in US Pat. That is, the peripheral edge of the band-shaped work Wb is nipped by a grip feed mechanism described later, pulled by a predetermined amount, and conveys the band-shaped work Wb by a predetermined amount (hereinafter, this conveyance system is referred to as a grip feed system). The grip feed method is effective when a thick work with a warp in the width direction is conveyed without contacting a portion where the work is exposed. In this method, the work is pulled while holding both ends, so that the work does not come off the transfer means even when the warped work is transferred at a high speed. The strip-shaped work Wb pulled out from the unwinding roll 1 by the grip feed mechanism 11 has the guide roll R1, the edge sensor S1 for detecting the edge position of the strip-shaped work, and the guide roll R.
The light is sent to an exposure unit 3 composed of a work stage WS and the like via a second stage 2.

When a predetermined area of the band-shaped work Wb reaches the exposure unit 3, the conveyance of the band-shaped work Wb is stopped, and the band-shaped work Wb is exposed. The strip-shaped work Wb exposed by the exposure unit 3 is taken up by the take-up roll 2 via guide rolls R3 and R4. When the strip-shaped work Wb is wound, the spacer S is sent out from the spacer unwinding roll 2a, and the exposed strip-shaped work Wb is wound on the winding roll 2 together with the spacer S.

Here, in order to prevent the band-shaped work Wb from waving or wrinkling, it is desirable to always apply tension to the band-shaped work Wb. For this reason, a force that rotates in the opposite direction (clockwise in FIG. 6) to the direction in which the belt-shaped work Wb is transported is constantly applied to the unwind roll 1. Therefore, tension is always applied to the band-shaped work Wb between the unwinding roll 1 and the winding-up roll 2 while the band-shaped work Wb is being conveyed or while the band-shaped work Wb is stopped. Similarly, a force that rotates in the direction in which the belt-shaped work Wb is wound is constantly applied to the winding roll 2. Therefore, between the unwinding roll 1 and the winding roll 2, the belt-shaped work Wb is always under tension.

In the above-described strip-shaped work exposure apparatus, the transport, exposure processing, and meandering correction of the strip-shaped work Wb are performed as follows. (1) Conveyance and Exposure Processing of Strip Work Wb by Grip Feed Mechanism The strip work Wb is conveyed by a predetermined amount while gripping the periphery by the grip feed mechanism. FIG. 7 is an enlarged view of the grip feed mechanism shown in FIG. As shown in FIG. 1, the grip feed mechanism 11 includes a feed grip 12 for gripping an end of the strip-shaped work Wb, and a feed grip 1.
And a feed grip drive unit 13 for moving the feed grip 2 by a predetermined amount. The feed grip drive unit 13 includes, for example, a ball screw 13b rotated by a feed motor 13a and a drive belt 13c, as shown in the drawing. The feed grip engages with the ball screw 13b rotated by the motor 13a. The part 12 moves in the direction of the arrow in FIG.

FIG. 8 is a view showing a specific configuration example of the grip feed mechanism 11. As shown in FIG. This figure shows a cross-sectional view of the work stage WS and the grip feed mechanism 11 as viewed from the transport direction. In the figure, a feed grip section 12 on one side is shown, and a feed section having the same configuration is provided on the other side. The grip portion 12 is provided, and grips both ends of the strip-shaped work Wb to transport the strip-shaped work Wb. As shown in the figure, the feed grip portion 12 engages with the ball screw 13b described above, and is provided on both sides of a moving portion 12a guided by a feed guide 13d that moves in the front-rear direction in FIG. 12b, the peripheral portion of the band-shaped work Wb is held by the grip portion Gr1 of the upper member 12c and the lower member 1
It has a structure sandwiched from above and below by a 2d grip portion Gr2.

A guide shaft 12e is mounted on the lower member 12d, and the guide shaft 12e is slidably mounted on the grip fixing base 12b. Further, a first air cylinder 12f is attached to the grip fixing base 12b, and a drive shaft of the first air cylinder 12f is attached to the lower member 12d. Therefore, when the first air cylinder 12f is driven, the lower member 12d moves upward. The upper member 12c is attached to the lower member 12d via a shaft 12g, and rotates around the shaft 12g. Also, the grip portion G of the upper member 12c and the lower member 12d
r1. A spring 12h is mounted on the opposite side of Gr2, and the upper member 12c and the lower member 12d are gripped by the spring 12h. Gr2 is biased in the opening direction.

[0010] A second air cylinder 12i is attached to the lower member 12d.
The drive shaft 2i protrudes through the lower member 12d, and its tip abuts on the upper member 12c. For this reason, when the second air cylinder 12i is driven, the upper member 12c rotates about the shaft 12g, and the grip Gr
1, Gr2 closes. On the other hand, in the work stage WS,
As shown in the figure, a vacuum suction hole M is provided, and when exposing the band-shaped work Wb, a vacuum is supplied from the vacuum passage VP, and the band-shaped work Wb is suction-fixed by the vacuum suction hole M.

The operation of the feed grip section 12 for holding and transporting the strip-shaped workpiece Wb is as follows. From the state shown in FIG. 9A, the lower member 1 is moved by the first air cylinder 12f.
2d rises, and as shown in FIG.
Grip portion Gr2 contacts the back surface of the band-shaped work Wb. The second air cylinder 12i rises and the upper member 12c
The grip portion Gr1 sandwiching the band-shaped work Wb moves down to clamp the band-shaped work Wb. When the feed grip portion 12 grips the strip-shaped work Wb, the ball screw 13b of the feed grip drive portion 13 rotates, and the feed grip portion 12 moves a predetermined amount to the downstream side in the transport direction. As a result, the strip-shaped workpiece Wb is transported by a predetermined amount, and the next exposure area of the strip-shaped workpiece Wb is transported to the exposure unit 3.

During the transfer of the strip-shaped work Wb, the work stage WS is retracted below the transfer level to prevent the back surface of the strip-shaped work Wb from coming into contact with the work stage WS and being damaged. When the belt-like work Wb is being conveyed, if air is blown out from the vacuum suction holes M (see FIG. 8) provided for fixing the belt-like work W of the work stage WS, the back surface of the belt-like work Wb and the work are There is no need to worry that the back surface of the band-shaped work Wb is damaged due to the contact with the stage WS. When the strip-shaped work Wb moves by a predetermined amount and the exposure area of the strip-shaped work Wb reaches the exposure unit 3, the movement of the strip-shaped work Wb is stopped. Work stage W retracted downward
S is raised to the transport level by the work stage drive unit WSD, and the work stage W
A vacuum is supplied to S, and the band-shaped work Wb is held on the surface of the work stage WS by vacuum suction.

Here, if the feeding grip portion 12 holds the band-shaped work Wb, it is adsorbed to the work stage WS in a state where the tension of the conveyance by the feeding grip portion 12 is applied to the band-shaped work Wb. Further, even when the feed grip portion 12 releases the grip of the band-shaped work Wb, the band-shaped work Wb is attracted to the work stage WS in a state where the tension generated between the unwinding roll 1 and the winding roll 2 is applied. The band work Wb is the work stage W
When the second air cylinder 12i is sucked and fixed to the S, the second air cylinder 12i returns, the upper member 12c of the feed grip portion 12 rotates, and the grips Gr1 and Gr2 release the band-shaped work Wb (the state of FIG. 9B). ). Further, the first air cylinder 12f
Is returned, and the lower member 12d descends (the state of FIG. 9A). Next, the feed grip unit 12 is moved to the upstream side in the transport direction by the feed grip drive unit 13 and returns to the original position.

On the other hand, in the exposure section 3, the mask M is moved by the mask stage drive section MSD, and the exposure process is performed by aligning the mask M with the work. When the exposure processing is completed, the feed grip portion 12 sandwiches both sides of the strip-shaped work Wb. Further, the holding of the strip-shaped workpiece Wb by the vacuum by the work stage WS is released, and the work stage WS is retracted downward. Next, as described above, both sides of the band-shaped work Wb are gripped by the feed grip portion 12 returning to the original position on the upstream side in the conveyance direction, and the feed grip portion 12 is moved downstream in the conveyance direction, and the next of the band-shaped work is moved. Exposure area is exposure section 3
The belt-like work Wb is transported so as to come to a position.

(2) Meandering Correction When the strip-shaped work Wb is continuously conveyed, the strip-shaped work Wb
However, in the exposure unit 3, there is a case where a positional shift occurs in the width direction of the band-shaped work Wb (in the direction perpendicular to the traveling direction of the band-shaped work Wb). Need to secure. Here, the shift in the width direction of the band-shaped work Wb is referred to as meandering of the band-shaped work Wb, and correcting the meandering of the band-shaped work Wb is referred to as meandering correction. In the case of the above-described apparatus that constantly applies tension to the entire band-shaped work Wb, the meandering of the band-shaped work Wb is detected and corrected by the following method.

As shown in FIG. 10, an edge sensor S1 is provided at a predetermined position on the upstream side of the work transport of the exposure unit 3, and the edge sensor S1 detects an edge position of the strip-shaped work Wb. The output of the edge sensor S1 is sent to the unwinding roll drive mechanism 32 and the actuator 33 via the control unit 31. If the meandering of the strip-shaped work Wb is detected by the edge sensor S1 during conveyance, the control unit 31 moves the entire unwinding roll unit 10 by the actuator 33 via the unwinding-roll driving mechanism 32 and moves the entire unrolled roll unit 10 in the width direction of the strip-shaped work Wb. To correct the meandering.

The edge sensor shown in FIG. 11 can be used as the edge sensor S1. That is, as shown in FIG. 11A, two pairs of photosensors S11 and S12 each including a light emitting element L11 and a light receiving element PT1, and a light emitting element L12 and a light receiving element PT2 are arranged outside and inside the band-shaped work Wb. Alternatively, as shown in FIG. 11B, a linear sensor S13 composed of a light emitting element L13 and a line sensor LS1 such as a CCD arranged at right angles to the work conveyance direction can be used. FIG. 11 (a)
When using the sensor shown in FIG.
Band work W by ON / OFF combination of S12
The edge position of b is detected. When FIG. 11B is used, the edge position of the strip-shaped workpiece Wb is detected at a position where light enters the line sensor LS1.

[0018]

As described above, in the conventional apparatus, the belt-like work Wb is held on the work stage WS and exposed while being tensioned. Therefore, when the strip-shaped work Wb is, for example, a thin film of an organic compound, the strip-shaped work Wb is exposed in a stretched state. When the strip-shaped work Wb is removed from the exposure apparatus, tension is not applied to the strip-shaped work Wb,
There is a problem that the strip-shaped work Wb shrinks and the exposure accuracy changes. In other words, after exposure is performed with tension applied as shown in FIG. 12A, when the tension is released, the strip-shaped work Wb shrinks as shown in FIG. It cannot be secured. In recent years, the above problems have come to be particularly problematic with the improvement of exposure accuracy such as miniaturization of exposure patterns.

The present invention has been made in consideration of the above-mentioned problems of the prior art. In an exposure apparatus that applies tension to a strip-shaped work and conveys the work by a grip feed method, the work is applied without tension to the strip-shaped work. An object of the present invention is to improve the exposure accuracy of a strip-shaped work by allowing the work to be held on a stage.

[0020]

According to the present invention, the above-mentioned problems are solved as follows. A transport mechanism that grips a long continuous workpiece and transports the workpiece intermittently, and a controller that controls the transport mechanism and controls transport of an unexposed area of the workpiece to an exposure unit intermittently. In an exposure apparatus that always carries tension, and performs an exposure process on the work in the exposure unit, a first work fixing unit that grips the work is provided on the upstream side of the exposure unit,
A second work fixing unit for gripping the work is provided on the downstream side, and the control unit is provided with a storage unit for storing a feed amount for sending the work to the downstream side by an amount of elongation due to tension applied to the work. When performing the exposure processing on the work, the control unit stops the work on the exposure unit,
After the work is fixed by the second work fixing unit, the first work fixing unit is sent in the direction of the exposure unit based on the feed amount stored in the storage unit, so that tension is not applied to the work.

In the present invention, as described above, the first and second fixing portions for gripping the work are provided on the upstream side and the downstream side of the exposure section, and the control section is provided with a tension applied to the work. A storage unit is provided for storing a feed amount for feeding the work to the downstream side by the amount of elongation. After the work is fixed by the first and second work fixing units, the first work fixing is performed based on the feed amount stored in the storage unit. Since the part is fed in the direction of the exposure part so that the work is not subjected to tension and the exposure processing is performed, the work is not subjected to tension at the time of exposure, and the exposure accuracy can be improved.

[0022]

Embodiments of the present invention will be described below. FIG. 1 is a view showing a configuration of an exposure apparatus for a strip-shaped work according to an embodiment of the present invention. The same components as those shown in FIG. 6 are denoted by the same reference numerals. The first and second work fixing mechanisms 21 and 22 and the control unit 40 are added to those shown in FIG. In the drawing, reference numeral 10 denotes an unwinding roll unit, and an unwinding roll unit 1
0 is provided with the unwinding roll 1, the spacer winding roll 1a, and the guide roll R1 as described above. Further, the strip-shaped work Wb is usually wound in a roll shape on the unwinding roll 1 so as to overlap with the spacer S, and when the strip-shaped work Wb is pulled out from the unwinding roll 1, the spacer S is removed.
Is wound by the spacer winding roll 1a. The grip-feed system shown in FIGS. 6 to 9 is used for transporting the belt-like work. That is, the work stage W
The grip feed mechanism 11 is provided downstream of S. As described above, the feed grip 12 of the grip feed mechanism 11 grips both sides of the strip-shaped work Wb and conveys the strip-shaped work Wb.

In the present embodiment, first and second work fixing mechanisms 21 and 22 are provided on the upstream and downstream sides of the exposing unit 3 of the exposing apparatus in the transport direction of the strip-shaped work Wb. . The first work fixing mechanism 21 is provided with a work mechanism driving unit 14 described later. FIG. 2 is an enlarged view of a part of FIG. 1, and first and second work fixing mechanisms 21 and 22 include a band-shaped work Wb as shown in FIG.
First and second suction fixing stages 23 and 24 for vacuum suction from the back surface, and first and second fixing grip portions 25 and 26 for holding the periphery of the band-shaped work Wb from above and below. You. First and second suction-fixing stages 23,
Reference numeral 24 is provided on the rear surface side of the belt-shaped work Wb at the transport level.

First and second suction fixing stages 23 and 24
Has a configuration similar to that of the work stage WS shown in FIG. 8, and has a vacuum suction hole M for fixing the band-shaped work Wb on its surface.
Is provided. Then, when a vacuum is supplied through the vacuum passage VP, the strip-shaped work Wb is fixed to the suction fixing stages 23 and 24 by suction. Further, at the time of transporting the band-shaped work Wb, air is blown out from the vacuum suction hole M, and the back surface of the band-shaped work Wb and the first and second suction-fixed stages 23,
Prevent contact with 24 surfaces. The structure of the first and second fixed grip portions 25 and 26 is basically the same as the structure of the feed grip portion shown in FIG. First work fixing mechanism 21
Is provided with a work fixing mechanism drive unit 14 similar to the feed grip drive unit shown in FIGS. 7 and 8, and the first fixed grip unit 25 moves in the transport direction of the band-shaped work Wb. That is, as shown in FIG. 2, the work fixing mechanism drive unit 14 includes, for example, a feed motor 14a, a ball screw 14b, and a drive belt 14c, the ball screw 14b is rotated by the feed motor 14a, and the fixed grip 25 is shown in FIG. Move in the direction of the arrow. On the other hand, the second work fixing mechanism 22 does not move.

FIG. 3 shows the first and second work fixing mechanisms 21,
FIG. 4 is a view of the feed grip unit 22 and the feed grip unit 12 as viewed from above. As shown in the figure, the suction fixing stage 24 extends to the grip feed mechanism 11. The structure of the first and second fixed grip portions 25 and 26 is basically the same as the feed grip portion 12 described with reference to FIG. First
The fixed grip 25 of the ball screw 14b, the moving unit 1
Although 2a is provided, the second fixed grip portion 26 is fixed to a grip fixed base directly attached to the base. The gripping / opening operation of the band-shaped work Wb by the first and second fixed grip portions 25 and 26 is the same as that described with reference to FIG.

Returning to FIG. 1, reference numeral 40 denotes a control unit. The control unit 40 includes a meandering control unit 41, a feed control unit 42, and an overall control unit 43.
As described above, the unwinding roll unit 10 is driven by the output of the edge sensor S1 to correct the meandering of the strip-shaped work. Further, the feed control unit 42 drives the unwind roll 1, the take-up roll 2, the fixed grip units 25 and 26, and the feed grip unit 12 to control the conveyance of the strip-shaped work Wb.
The overall control unit 43 controls the light irradiation unit 4, the work stage drive unit WSD, the mask stage drive unit MSD, and the like, and controls the entire sequence of transport, exposure processing, and the like.

FIGS. 4 and 5 are views for explaining the transfer / exposure processing of the strip-shaped work in the present embodiment. The transfer / exposure processing in the present embodiment will be described with reference to FIG. The unwinding and winding control of the strip-shaped work Wb on the unwinding roll 1 and the winding roll 2 is the same as in the conventional example described with reference to FIG. 6, and the strip-shaped work Wb is gripped by the work fixing mechanisms 21 and 22. When there is no belt-shaped work Wb, tension is applied.

(1) At the stage where the exposure of the strip-shaped work Wb is completed, as shown in FIG. 4A, the feed grip portion 12 holds the periphery of the strip-shaped work Wb as indicated by a broken line. Grip part 2 of work fixing mechanisms 21 and 22
5 and 26 are both open. Further, the work stage WS is lowered below the belt-shaped work transfer surface. The mask stage MS is raised above the work transfer surface. (2) The feed grip drive unit 13 is driven to move the feed grip unit 12 downstream in the transport direction. Since the strip-shaped work Wb is held by the feed grip portion 12, it is conveyed with the movement of the feed grip 12. (3) If air is blown out from the vacuum suction holes M for holding the work provided on the work stage WS and the suction fixed stages 23 and 24 while the work Wb is being conveyed, the work Wb is moved to the work stage WS. In addition, since the upper surface is lifted on the suction fixing stages 23 and 24, there is no fear that the back surface of the band-shaped work Wb comes into contact with the surfaces of the work stage WS and the suction fixed stages 23 and 24 and the surface of the band-shaped work Wb is damaged.

(4) The edge sensor S1 detects the edge position of the strip-shaped work Wb during the transfer of the strip-shaped work Wb. When the meandering of the band-shaped work Wb is detected by the sensor S1,
The signal of the edge sensor S1 is fed back, and FIG.
As described above, the entire unwinding roll unit 10 is moved in the width direction of the band-shaped work Wb to perform meandering correction. (6) The feed grip drive unit 13 stops when it moves a predetermined amount downstream in the transport direction. In addition, the control of the moving amount of the workpiece for transporting the belt-shaped workpiece Wb to the next exposure area is performed by adjusting the moving amount of the feed grip driving unit 13. (7) As shown in FIG. 4B, after the movement of the band-shaped work Wb is stopped, the fixing grip 25 of the first work fixing mechanism 21 provided on the upstream side of the exposure unit 3 is moved to the periphery of the band-shaped work Wb. In addition, the suction fixing stage 23 sucks the back surface of the band-shaped work Wb by vacuum suction, thereby more reliably fixing the band-shaped work Wb. (8) Further, the fixing grip 26 of the second work fixing mechanism 22 provided on the downstream side of the exposure unit 3 sandwiches the peripheral part of the band-shaped work Wb, and the suction fixing stage 24 moves the band-shaped work Wb by vacuum suction. By adsorbing the back of
The band work Wb is more reliably fixed.

(9) In this state, as shown in FIG. 4 (c), the first fixed grip portion 25 holds the band-shaped work Wb by the first work fixing mechanism driving section 14, and the belt-shaped work Wb is held by tension conveyance. The amount by which the work Wb is extended (100 to
(200 μm) toward the transport downstream. As a result, the tension generated on the band-shaped work Wb is eliminated.

(10) As shown in FIG. 4D, in the grip feed mechanism 11, the feed grip portion 12 is opened. Also, the vacuum suction mechanism of the work stage WS is turned on.
Then, the work stage drive unit WSD raises the work stage WS to the belt-like work Wb transfer position, and sucks and holds the belt-like work Wb on the work stage WS. That is, the belt-shaped work Wb is held on the work stage WS without tension.
Note that the first and second work fixing mechanisms 21 and 22 are not released even if the band-shaped work Wb is attracted to the work stage WS. This is because the first and second work fixing mechanisms 21 and
2 is released, tension is applied between the unwinding roll 1 and the take-up roll 2, so that tension is applied to the strip-shaped work Wb held without tension.

(11) As shown in FIGS. 5E and 5F, alignment and exposure processing are performed. During this time, the feed grip section 12 returns to the predetermined position (the solid line position in FIG. 5E) in the upstream conveyance example for the next conveyance of the strip-shaped work Wb, and inserts the strip-shaped work Wb again. The alignment and exposure processing are performed as follows. First, at the time of FIG. 5E, the mask stage MS shown in FIG. 1 is lowered to the alignment position by the mask stage driving unit MSD. Since the belt-shaped work Wb is not slackened without tension, the work stage WS holding the band-shaped work Wb cannot be raised above the work transfer surface. Similarly, the alignment between the mask and the band-shaped work Wb cannot be performed by moving the band-shaped work Wb.

Next, the alignment between the mask M and the strip-shaped work Wb is performed. Since the belt-shaped workpiece Wb cannot be moved as described above, the maskage MS is moved in the XYθ direction (X direction is, for example, the left-right direction in FIG. 5, Y direction is the front-rear direction in FIG. 5, and θ is perpendicular to the X, Y plane). (Rotation about an appropriate axis). After the alignment is completed, the mask stage MS is moved to the exposure position, and exposure processing is performed by irradiating exposure light from the light irradiator 4 (see FIG. 1).

(12) When the exposure processing is completed, the mask stage M is raised and moved in the XYθ directions during the alignment, so that the mask stage M returns to the original position before the movement. (13) The workpiece vacuum suction of the work stage WS is released, and the work stage WS is lowered as shown in FIG. Further, the fixing grip portions 25 and 26 of the first and second work fixing mechanisms 21 and 22 are opened, and the first and second suction and fixing stages 23 and 24 are released from the vacuum suction, so that the first fixing is performed. The grip unit 25 returns to the original position before the movement. (14) Since the feed grip portion 12 of the grip feed mechanism 11 sandwiches the belt-like work Wb, the feed grip portion 12 moves as described with reference to FIG. 4A, and moves the belt-like work Wb to the next exposure position. Conveyed to. Hereinafter, the above (1) ~
Repeat (14).

[0035]

As described above, in the present invention,
The following effects can be obtained. (1) A first work fixing section is provided on the upstream side of the exposure processing section, and a second work fixing section is provided on the downstream side.
After the band-shaped work is fixed by the first and second work fixing portions, the band-shaped work is sent downstream by an amount corresponding to the tension, and is held on the work stage. Therefore, the tension is not applied to the band-shaped work during the exposure processing. Therefore, exposure is not performed in a state where the strip-shaped work is extended, and the exposure accuracy does not decrease. (2) Since the belt-like work is in a tensioned state just before the belt-like work is sucked and held on the work stage, the belt-like work can be sucked and held on the work stage without generating wavy and wrinkles. Therefore, it is possible to prevent a reduction in exposure accuracy due to wrinkles and waving of the strip-shaped work.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of the present invention.

FIG. 2 is an enlarged view of first and second work fixing mechanisms, a grip feed mechanism, and a first work fixing mechanism driving unit in FIG. 1;

FIG. 3 is a top view of first and second work fixing mechanisms and a feed grip.

FIG. 4 is a view for explaining a belt-like workpiece conveyance / exposure process in the embodiment of the present invention.

FIG. 5 is a diagram (continued) for explaining the transport / exposure processing of the strip-shaped work in the embodiment of the present invention.

FIG. 6 is a diagram showing a conventional example.

FIG. 7 is an enlarged view of the grip feed mechanism shown in FIG. 6;

FIG. 8 is a diagram showing a specific configuration example of a grip feed mechanism.

FIG. 9 is a diagram illustrating gripping of a workpiece by a feed grip unit.

FIG. 10 is a diagram illustrating meandering correction.

FIG. 11 is a diagram illustrating a configuration example of an edge sensor.

FIG. 12 is a diagram illustrating a reduction in processing accuracy due to shrinkage of a strip-shaped work after exposure.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 unwind roll 1 a spacer take-up roll 2 take-up roll 2 a spacer unwind roll 3 exposure unit 4 light irradiation unit 10 unwind roll unit 11 grip feed mechanism 12 feed grip unit 13 feed grip drive unit 14 work fixing mechanism drive unit 21 First work fixing mechanism 22 Second work fixing mechanism 23, 24 Suction fixing stage 25, 26 Fixed grip section 40 Control section 41 Meandering control section 42 Feed control section 43 Overall control section R1 to R4 Guide roll S1 Edge sensor Wb Strip shape Work WS Work stage WSD Work stage drive MS Mask stage MSD Mask stage drive

Claims (1)

[Claims] 1. A transport mechanism that grips a long continuous workpiece and transports it intermittently, and a control unit that controls the transport mechanism and transports an unexposed area of the workpiece to an exposure unit intermittently. In an exposure apparatus that always carries the work under tension and performs exposure processing on the work in the exposure unit, a first work fixing unit that grips the work is provided upstream of the exposure unit. A second work fixing unit for gripping the work is provided on the downstream side. Further, the control unit is provided with a storage unit for storing a feed amount for sending the work to the downstream side by an amount of elongation due to the tension applied to the work, When performing the exposure process, the control unit stops the work in the exposure unit, fixes the work in the first and second work fixing units, and then controls the first work based on the feed amount stored in the storage unit. Fixed The sent to the exposure unit direction, the exposure apparatus of the strip-shaped workpiece, characterized by the state not applied tension to the workpiece.