JP4779132B2 - Film peeling device - Google Patents

Description

  The present invention relates to an apparatus for peeling a film attached to a substrate.

  As a conventional peeling method, there is a method described in Patent Document 1. In this method, the adhesive tape is pressed against the film surface of the substrate surface to be transported on the feed roller, the tip of the film wound with the adhesive tape from the substrate is sandwiched, and the entire film is peeled off from the substrate. There is a method using a moving film clamper.

  Further, as described in Patent Document 2, there is a method of peeling and transporting a film from a substrate by sandwiching a film leading end portion wound up from the substrate by an adhesive tape between a catch roller and a driving roller provided at the leading end of the film transport belt. .

Japanese Patent No. 2700083 Japanese Patent No. 3773719

  In Patent Document 1, when the film is initially peeled off with an adhesive tape when the film is peeled off, only the film in the vicinity of the adhesive tape portion is rolled up, and when the film is gripped by the film clamper, the film is slackened in the width direction. If the gripped film is moved in the direction of peeling from the substrate, the film may be wrinkled due to the slackness in the width direction of the film. Therefore, film traces are generated on the surface of the substrate resist film, and the number of sheets stored in the film collection container is reduced due to film defects.

  Further, in Patent Document 2, when a film is rolled up with an adhesive tape and sandwiched between a catch roller and a driving roller and the film is transported by a transport conveyor, if there is a slack in the width direction of the film, the film is bitten into the transport conveyor, etc. There was a problem.

  The object of the present invention is to prevent the film stuck on the substrate surface from damaging the substrate from the step of peeling the film of the substrate, while transporting and storing the film while peeling from the substrate, without stopping the conveyance of the substrate. An object of the present invention is to provide a film peeling apparatus that does not impair the quality of a substrate.

  In order to achieve the above object, the film peeling apparatus grips the film leading end portion lifted by the film peeling means with a clamp tool at the peeling stage of the film stuck on the surface of the substrate conveyed by the substrate conveying means. Then, a film gripping and transporting device is provided that applies tension in the width direction of the film and transports the film in the direction of the collection container, and moves the substrate in the substrate transporting direction while gripping the substrate and peeling the film from the upper surface of the substrate support transporting roller. In this configuration, a pressure contact roller is interposed between the two.

  According to the film peeling apparatus of the present invention, the film is stretched in the width direction by gripping the film tip portion lifted by the adhesive tape in the initial film peeling stage from the substrate with a clamp and applying tension in the width direction of the film. The film is transported in the direction of the film collection container without slack, and the film is free of wrinkles, increasing the number of sheets stored in the film collection container, reducing the frequency of replacement of the collection container during production, and the surface of the substrate resist film when peeling the film. No film traces are generated, and the film can be peeled without impairing the quality of the substrate.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a plan view showing a schematic structure of a film peeling apparatus. FIG. 2 is a front view showing a schematic structure of the film peeling apparatus. FIG. 3 is an enlarged front view showing a schematic structure of the film holding and conveying apparatus. FIG. 4 is a diagram for explaining the state of film gripping and conveying in this case. FIG. 5 is a partial structural perspective view of a film gripping portion on one side of the film gripping and conveying apparatus. FIG. 6 is a partial structural perspective view of the film recovery apparatus.

  As shown in FIG. 1 or 2, the film peeling apparatus 100 includes a plurality of transfer rollers 1, a film peeling mechanism 20, a film gripping and conveying mechanism 30, a film collection mechanism 50, a film collection container 7, and a control device 8. Etc. A plurality of transport rollers 1 are arranged horizontally to transport the substrate 2 and form a transport path for the substrate 2. The substrate 2 is transported on the transport path in the direction indicated by the arrow A in FIG. 2, that is, from the left side (input inlet) to the right side (exit) of the film peeling apparatus 100.

  A control device 8 is provided below the outlet of the film peeling apparatus 100. The control device 8 performs sequence control of the film peeling device 100 and interlocking control with devices installed on the substrate inlet side and the substrate outlet side of the film peeling device 100. The control device 8 includes a CPU, a memory, an external storage device, an input / output control device, an input / output device, and a computer including a program recorded in the memory.

  Then, the control device 8 is controlled by the conveying roller 1 and the adhesive roller for sequence control of the device and film peeling based on the control conditions and data given through an input device (not shown), the detection value of the sensor, and the like. A command for controlling a driving means such as a roller and a cylinder in the film peeling mechanism 20, the film gripping and conveying mechanism 30, and the film collecting mechanism 50 is output. The sensor includes an optical sensor and the drive means includes an air cylinder and a motor.

  In the middle of the conveyance path of the substrate 2 composed of a plurality of conveyance rollers 1, a film peeling means 20, a film gripping conveyance mechanism 30, and a film collection mechanism 50 are provided. The film peeling mechanism 20 is provided at two locations near both ends in the width direction of the film 2a as shown in FIG. 1 or 2 across the transport surface of the transported substrate 2 (detailed illustration is omitted).

  As shown in FIGS. 3 and 5, the film gripping and transporting mechanism 30 is configured to grip and transport both sides of the film front end in the width direction of the substrate 2. For this purpose, a transport rail 40 fixed to the film peeling apparatus 100, a movable plate 36 movable on the transport rail 40, and a tension application that applies tension in the width direction of the film provided on the movable plate 36. Equipped with mechanism.

  The tension applying mechanism includes a tension cylinder support bracket 37, a cylinder 33 fixed to the cylinder support bracket 37, a moving bracket 34 moved by the cylinder 33, and a clamp tool connected to a cylinder 32 provided on the moving bracket 34. 31 and a pressure roller 41. By operating the cylinder 33, tension can be applied in the width direction of the film 2a. The moving bracket 34 moves on the moving rail 35 provided on the moving plate 36.

  In FIG. 5, a clamp device on one side is shown, but a clamp device having the same configuration is also provided on the other end side of the moving plate 36. The film is gripped by the clamp tool 31 and the pressure contact roller 41 is rotated, and the film is peeled off by moving on the moving rail 35 installed on the moving plate 36 by the moving metal fitting 34. The substrate 2 is moved by the pressure roller 41 by the operation of the cylinder 42 mounted on the cylinder support bracket 43 fixed to the film peeling apparatus 100 from the upper surface of the substrate support transport roller 44 that supports the substrate 2 from the lower surface of the substrate 2. It is configured to sandwich.

  The film collection mechanism 50 collects the film that has been conveyed to the film collection container 7 by the film gripping conveyance mechanism 30 as shown in FIGS. For this purpose, as shown in FIG. 6, the film collecting mechanism 50 moves on the moving rail 60 and the moving rail 60 installed on the support bracket 59 fixedly supported by the film peeling apparatus 100 near the upper surface of the collecting container 7. The bearing housing 57 is provided with a connecting member 58, a film pressing roller 54 attached to the bearing housing 57, slider driving means for moving the slider 57a and the bearing housing 57, and the like.

  The slider driving means is composed of a cylinder 55 supported by a cylinder support fitting 56 fixedly supported by the film peeling apparatus 100. Further, in order to guide the film peeled in the direction of the film collection container 7 to the roller groove portion 54A provided on the film conveyance pressing roller 54, a plurality of film guide fittings 53 connected to the support fitting 62 connected to the connection fitting 58 are provided. It is provided. Further, a notch 51A is provided so as to expose the surface of the roller stepped portion 52A of the film transport roller 52 that is fixedly supported by the film peeling apparatus 100, and a guide portion 51B that guides the peeled film in the direction of the film collection container 7 is provided. A film receiver 51 supported and fixed to the film peeling apparatus 100 and a driving device 61 (illustration details are omitted) for driving the film transport roller 52 are configured.

  The film conveyed by the film gripping and conveying mechanism 30 is sent from the film collecting mechanism 50 to the film collecting container 7 provided on the inlet side of the film peeling apparatus 100.

  The operation of the apparatus configured as described above will be described below.

  First, the board | substrate 2 is conveyed toward the exit of the film peeling apparatus 100 by the roller 1 for conveyance from the inlet of the film peeling apparatus 100 in the arrow A direction of FIG.

  The substrate 2 is transported on the transport path by the transport roller 1, and the front end of the substrate reaches the position of the film peeling mechanism 20. Then, the arrival of the substrate is detected by a first optical sensor (not shown), and the cylinder 42 provided on the substrate supporting / conveying roller 44 is operated to move the pressure contact roller 41 in the direction of the arrow B to move the substrate 2. Is restrained.

  When the substrate 2 is restrained by the substrate supporting and conveying roller 44 and the pressure roller 41, as shown in FIG. 3, the film 2a is peeled off from the substrate 2 by the film peeling mechanism 20 and then rolled up (detailed description of the operation). (Omitted). The leading end of the film 2 a that has been rolled up is gripped by the clamps 31 that are provided at two locations in the film width direction and that are connected to the leading end of the cylinder 32 that constitute the film gripping and transporting mechanism 30. When the clamp tool 31 grips the leading end of the film, the cylinder 33 shown in FIG. 5 operates in the direction of the arrow C in the film width direction and operates the cylinder 32 so that the film gripped by the clamp tool 31 contacts the pressure roller 41. Then, simultaneously with the operation of the clamp tool 31 in the direction of arrow D, the substrate supporting and conveying roller 44 is driven (not shown) to resume the conveyance of the substrate.

  As shown in FIG. 5, the film held by the clamp 31 is loaded with cylinders 32 and 33 so that the pressure roller 41 is rotated by the rotation of the substrate supporting and conveying roller 44 and the film 2a peeled from the substrate 2 is not loosened. The moving plate 36 is moved on the moving rail 40 in the direction of arrow E by a driving mechanism (not shown). Along with this movement, the film 2a is peeled off from the substrate 2 and moved synchronously with the conveyance of the substrate 2, and the film rear end of the film receiver 51 provided for preventing the film contact with the substrate 2, the conveyance roller 1, etc. Move the top surface.

  After the film front end held by the clamp tool 31 passes through the film conveyance pressing roller 54 in the E direction, the moving plate 36 stops and the cylinder 55 is operated in the direction of arrow F (see FIG. 3). As a result, the film 2a peeled off by the film conveyance pressing roller 54 is pressed against the film conveyance roller 52 side, the film is sandwiched between the two rollers, and then the film tip held by the clamp tool 31 is released.

  As shown in FIG. 6, the film 2 a released from the film gripping and conveying mechanism 30 and sandwiched between the film conveying pressing roller 54 and the film conveying roller 52 drives a driving device 61 provided on the film conveying roller 52 to drive the film conveying roller. By rotating 52, the film is conveyed in the G direction by the film guide fitting 53 provided on the film conveyance pressing roller 54 and the guide 51 </ b> B provided on the film receiver 51, and stored in the film collection container 7.

  The board | substrate 2 which peeled the film 2a is conveyed by the apparatus which performs the washing | cleaning process process etc. which were provided in the back | latter stage of the film peeling apparatus 100 with the roller 1 for conveyance.

  As described above, in this embodiment, the film 2a is peeled off from the substrate 2 by the film peeling means 20 in a state where the substrate 2 is constrained by the substrate supporting and conveying roller 44 and the pressure contact roller 41. Then, after the film leading end is gripped by the clamp 31 at two locations in the film width direction, tension is applied in the film width direction in order to eliminate slack in the film width direction. Thereafter, by driving the substrate supporting and conveying roller 44 and simultaneously moving the substrate, the moving plate 36 on the moving rail 40 is moved, so that the front end of the film held by the clamp tool 31 with the surface of the pressing roller 41 as a fulcrum is moved. The film 2 a is peeled from the substrate 2 by moving in the direction of the film recovery mechanism 50. The peeled film 2 a is transported to the film recovery mechanism 50 by the film gripping and transporting mechanism 30, where it is transported to the film recovery container 7 by the film recovery mechanism 50.

  As described above, the film has a width by holding the film tip with the clamp tool 31 and then operating the cylinder 33 to move the clamp tool in the film width direction to apply tension in the film width direction. It is gripped, peeled and conveyed in the direction of the film collection container without any slack in the direction and without wrinkles in the longitudinal direction and the width direction. On the film collection container 7, the film is also entangled into the film conveyance roller 52 and the film conveyance pressing roller 54 constituted by a plurality of guide portions 51 </ b> B of the film receiver 51, a plurality of film guide fittings 53 provided in the film width direction. Instead, it is stored in the film collection container 7 by the rotation of the film transport roller 52. For this reason, the number of films stored in the film collection container 7 is increased, the frequency of replacement of the film collection container 7 during production is reduced, and there is no film trace generated on the surface of the substrate resist film when the film is peeled off. The film can be peeled from the substrate in a high quality state without hindering the above.

  When the film tip is peeled off with adhesive force, the film is lifted, and the film is clamped, when the film width increases, the film becomes slack in the film width direction due to the rigidity of the film. If the clamp is moved in the direction in which the film is peeled off from the substrate in this state, wrinkles may occur in the film due to slack in the film width direction. When wrinkles occur in the film, there are problems such as film traces on the surface of the substrate resist film and the number of sheets stored in the film collection container being reduced due to film wrinkles. However, in the film transport apparatus of this embodiment, by moving the clamp tool in the width direction, it is possible to prevent film wrinkling by eliminating slack in the film width direction, and to peel the film while transporting the substrate.

  In addition, when the peeled film is sandwiched between the catch roller and the driving roller, and the film is sandwiched and conveyed by the belt conveyor, there is a problem that if the film is slack in the width direction, the film is wrinkled and bites into the belt conveyor. . On the other hand, in the present embodiment, the film gripping and conveying apparatus prevents the film from slacking by eliminating the slackness of the film in the film width direction, so that the film is transported and wound around the roller provided for collecting the film. The number of films stored in the film collection container is increased, and the replacement frequency of the film collection container can be reduced.

  Further, in the conventional film peeling apparatus, when the substrate width is increased, the width of the film to be peeled is increased, and the clamping tool for gripping the film leading end is reduced in order to reduce the slack of the film between the clamping tools for gripping the film leading end. There was a need to increase the number. On the other hand, in this embodiment, even if the gap between the clamps for gripping the film leading end becomes large, the tension to the film width direction is applied to eliminate the slackness of the film, thereby inhibiting the quality of the film to be peeled off from the substrate. The film can be peeled off.

  Next, another embodiment of the substrate gripping mechanism will be described with reference to FIG. FIG. 7 shows a partial front view of the substrate gripping mechanism. In this figure, the same reference numerals as those in the embodiment shown in FIGS. 1 to 6 denote the same functional members, and a description thereof will be omitted.

  7 is different from FIG. 1 in that a catch roller 47 that can come into contact with and separate from the pressure roller 41 is provided. The catch roller 47 constitutes a peeling assist mechanism that assists in peeling the film.

  In FIG. 7, a cylinder 46 is provided in a cylinder support bracket 45 fixed to the film peeling apparatus 100, and a catch roller 47 is connected to the cylinder 46. The tip of the film rolled up by the film peeling means 20 is gripped by the clamp tool 31. Thereafter, the clamp tool 31 is moved by the cylinder 33 to apply tension in the film width direction. Thereafter, the cylinder 46 is operated in the direction of the arrow H, and the film 2 a is pressed against the pressure roller 41 by the catch roller 47. Then, the clamping tool 31 is moved simultaneously with the conveyance of the substrate 2 by driving the substrate support conveyance roller 44, and the film is peeled off from the substrate 2 and conveyed. Since the subsequent operation is the same as the operation of FIG. 1 described above, the description thereof is omitted here.

  Thus, by providing a peeling assist mechanism, generation of wrinkles is further suppressed when the film is peeled from the substrate as compared with the embodiment of FIG. 1, and the film can be peeled smoothly.

  Next, another embodiment of the substrate gripping mechanism will be described with reference to FIG. FIG. 8 shows a partial front view of the substrate gripping mechanism.

  FIG. 8 shows a configuration for peeling the film 2a on a thin plate substrate 2 and a substrate 2 on which no pressure should be applied to the substrate surface. In order to prevent pressure from being applied to the substrate surface, a film branching roller 49 is provided at a position away from the substrate supporting and conveying roller 44 in place of the pressure roller 41, and the substrate is adsorbed to the substrate conveying path on the downstream side of the substrate supporting and conveying roller 44. The mechanism 48 is provided. The substrate adsorption mechanism 48 is provided to prevent the substrate from lifting in the film peeling direction when the film peeling mechanism 20 peels the film.

  By comprising in this way, peeling of the film from a substrate surface can be performed smoothly, without deform | transforming a board | substrate.

The present invention is not limited to the above embodiment, and may be implemented as follows.
(1) As a driving method for moving the film gripping and conveying mechanism in the substrate conveying direction, a cylinder method other than the motor driving method may be provided.
(2) The film peeling mechanism 20 may be applied to a gas injection method.
(3) The substrate may be a glass, ceramic, resin, or semiconductor substrate.
(4) A film attached to one side or both sides of the upper or lower surface of the substrate may be peeled off.

  As described above, according to the present invention, the substrate resist caused by film wrinkles generated at the time of peeling is provided by providing a film holding and conveying mechanism that holds the film wound up by the film peeling mechanism and applies tension in the width direction of the film. Prevents traces of the film surface, shutdown due to film entrainment on the conveyor for film conveyance, and reduction in the number of sheets stored in the film collection container. A film peeling apparatus capable of peeling a film without impairing the quality of the substrate due to deformation can be obtained.

It is a top view which shows schematic structure of a film peeling apparatus. It is a front view which shows schematic structure of one Embodiment of the film peeling apparatus of this invention. It is an enlarged front view which shows schematic structure of the film holding | grip conveyance mechanism in embodiment of FIG. It is an enlarged front view which shows schematic structure of the film holding | grip conveyance and film collection | recovery mechanism in embodiment of FIG. It is a partial structure perspective view of the film holding part of the film holding | maintenance conveyance mechanism in embodiment of FIG. It is a partial structure perspective view of the film collection | recovery apparatus in embodiment of FIG. It is a partial front view of the film peeling apparatus of other embodiment. It is a partial front view of the film peeling apparatus of other embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Conveyance roller, 2 ... Board | substrate, 2a ... Film, 7 ... Film collection container, 8 ... Control apparatus, 20 ... Film peeling mechanism, 30 ... Film grip conveyance mechanism, 31 ... Clamp tool, 32, 33 ... Cylinder, 34 ... Moving bracket, 35 ... Moving rail, 36 ... Moving plate, 37 ... Cylinder supporting bracket, 40 ... Conveying rail, 41 ... Pressure roller, 42 ... Cylinder, 43 ... Cylinder supporting bracket, 44 ... Substrate supporting conveying roller, 45 ... Cylinder Support metal fitting, 46 ... Cylinder, 47 ... Catch roller, 48 ... Substrate adsorption mechanism, 49 ... Film branching roller, 50 ... Film collection mechanism, 51 ... Film receiver, 51A ... Notch, 51B ... Guide part, 52 ... Film transport roller , 52A ... Roller stepped portion, 53 ... Film guide fitting, 54 ... Film conveyance pressing roller, 54A ... Roller groove portion, 55 ... Cylinder 56, cylinder support fitting, 57 ... bearing box, 58 ... coupling fitting, 59 ... support fitting, 60 ... moving rail, 61 ... drive device, 62 ... support fitting, 100 ... film peeling device.

Claims (3)

  A substrate conveying means for conveying a substrate, a film peeling mechanism for peeling the film tip attached to the surface of the substrate conveyed by the substrate conveying means, and a clamp for gripping the film leading edge raised by the film peeling mechanism A tensioning mechanism that applies tension in the width direction of the gripped film, and a pressure roller that sandwiches the substrate on the upper surface of the transport roller that moves the substrate in the transport direction, and the clamp while peeling the film from the substrate A film holding and transporting mechanism for transporting a film gripped by a tool in the direction of the film recovery container, and a film recovery mechanism for storing the film in a recovery container installed below the substrate transport surface Peeling device. In the film peeling apparatus of Claim 1,
A film peeling apparatus comprising: a catch roller that sandwiches the film on the surface of the pressure contact roller when the film peeling mechanism peels the film. In the film peeling apparatus of Claim 1,
A film peeling apparatus, wherein a substrate holding suction mechanism for sucking and holding the substrate from the lower surface of the substrate is installed, and a film branching roller is fixedly installed at a position separated from the substrate surface in place of the pressure contact roller.

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