JP2870990B2 - Liquid crystal display panel prober - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a prober for a liquid crystal display panel, and relates to a technique which is effective when used for visual display inspection.

[Conventional technology]

2. Description of the Related Art A liquid crystal display panel has been put to practical use as a display device such as a laptop or notebook personal computer because it is thin and lightweight and consumes low power.
As an example of a prober for a liquid crystal display panel, for example,
No. 61-70579. The prober includes an X probe head that moves in parallel along the X axis of the display panel using an X axis stage with respect to a mounting table of the display panel, and a Y probe head that moves in parallel along the Y axis of the display panel using a Y axis stage. In addition, a third probe head that contacts an arbitrary position on the display panel by an XY stage that moves in parallel along the X axis and the Y axis of the display panel is provided.

[Problems to be solved by the invention]

The above-described prober for a liquid crystal display panel is for electrically measuring a switching operation of a TFT transistor formed on a glass substrate, and cannot perform a visual inspection of a completed liquid crystal display panel.

The liquid crystal display panel is susceptible to the effects of static electricity, and in the above-mentioned visual inspection, it is taboo because there is a risk that the element may be destroyed due to static electricity when transported by hand. Further, the viewing angle of the liquid crystal display panel is narrow, and it is necessary to tilt the display panel so that the inspector can inspect with a predetermined viewing angle.

An object of the present invention is to provide a prober for a liquid crystal display panel which realizes an automatic loading / unloading function and a viewing angle adjustment.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[Problems to be solved by the invention]

The outline of a typical invention disclosed in the present application will be briefly described as follows. That is,
The liquid crystal display panel of the storage container in which a plurality of liquid crystal display panels to be inspected to be inspected by the panel transport device are placed in a horizontal state is supported from the back side and the liquid crystal display panel which has been taken out by vacuum suction or inspection has been completed. A measurement that is housed in a predetermined storage container, has a built-in backlight, has a height higher than the thickness of the arm for vacuum suction, and has a suction part for vacuum suction on the periphery of the liquid crystal display panel excluding the loading part. The probe assembly makes electrical contact with the electrodes of the liquid crystal display panel mounted on the mounting table, and the viewing angle of the measurement mounting table with the inspector in the state of being in contact with the probe of the probe assembly when performing a visual inspection. An angle adjustment mechanism is provided for tilting to a predetermined angle corresponding to the above.

(Operation)

According to the above-described means, a relatively large and heavy liquid crystal display panel can be automatically conveyed, and the measurement mounting table is placed at a visual angle with the inspector in a state where a probe is applied to an electrode of the liquid crystal display panel during a visual inspection. Inspection efficiency can be improved because it can be tilted in response to the above.

〔Example〕

FIG. 1 is a schematic perspective view of a main part of an embodiment of a prober for a liquid crystal display panel according to the present invention.

The cassettes CA1 and CA2 are storage containers for storing a plurality of liquid crystal display panels to be tested or for which testing has been completed so as to be stacked at predetermined intervals. That is,
Protrusions are provided on the inner left and right sides to sandwich the upper and lower periphery of the liquid crystal display panel. These cassettes CA1 and CA2 are on the base BAS1, and can be moved up and down (U / D) while sliding the cassettes CA1 and CA2, in addition to sliding in the Y-axis direction in FIG.

Although not particularly limited, the cassette CA1 is used in combination with a liquid crystal display panel to be inspected and a liquid crystal display panel determined to be defective by the inspection result. On the other hand, the cassette CA2 is used for storing a liquid crystal display panel determined to be non-defective as a result of the inspection. As a result, the three usages described above can be performed using the two cassettes CA1 and CA2.

A loading arm LOD is used to carry out a liquid crystal display panel to be inspected from the cassette CA1. The loading arm LOD is controlled by the movement of the base BAS2 in the X and Y directions.
As described above, the chuck top CT1 and the liquid crystal display panel to be inspected have a chuck top CT1 that extends to the back surface of the liquid crystal display panel to be inspected housed in CA1 and supports from the back surface and performs vacuum suction. The height adjustment is performed by U / D control of the base BAS1 on which the cassette CA1 is mounted.

The loading arm LOD is mounted on the base BAS2, and has a function of rotating the arm in the θ direction in addition to the X and Y directions as shown in FIG. Such position control is electrically controlled by a stepping motor or the like.

After the inspection, the LCD panel is unloaded.
The ULA carries the cassette CA1 or CA2 according to the determination result. This unloading arm ULA
Is mounted on the base BAS3, and the movement control is performed only in the X-axis direction in FIG.

The box-shaped contact unit (measurement mounting table) CU has a built-in backlight. On its surface, a frame-shaped panel suction section CP is provided. The suction portion CP has a frame shape corresponding to a peripheral portion of the liquid crystal display panel where pixels are not formed, and has a height higher than the thickness (height) of the loading arm LOD or the unloading arm ULA. . Small holes or grooves are provided on the surface of the suction portion CP for vacuum suction on the back surface of the liquid crystal display panel. And
The suction portion CP is provided with a cutout portion for pulling out or inserting the loading arm LOD or the unloading arm ULA from the back surface of the liquid crystal display panel.

Although not shown in the figure, a probe assembly is provided above the contact unit CU so as to make electrical contact with the electrodes of the liquid crystal display panel mounted thereon. Above contact unit CU
When a liquid crystal display panel is mounted on the
When the CU goes up or the probe assembly goes down to make electrical contact between the probe and the electrode, the display operation of the liquid crystal display panel is enabled.

Also, in a state where the above-mentioned probe and the electrodes are electrically contacted and the display operation of the liquid crystal display panel is enabled, the contact unit CU is inclined with respect to the front surface in FIG. Is adjusted to a suitable angle.

Hereinafter, the schematic plan view shown in FIG. 1, FIG.
An example of the operation of the above-described prober for a liquid crystal display panel will be described with reference to the schematic side view of the contact unit CU shown in FIG. As shown in FIG. 3, the contact unit CU
The loading arm LOD cassette LCD panel CA1
Swing down so you don't get in the way when removing it from.

(1) As shown in FIG. 1, the cassette CA1 is moved to the load position, and the up / down control is performed in accordance with the height at which the liquid crystal display panel to be inspected is stored.

(2) The loading arm LOD starts from a predetermined home position, performs predetermined θ, X, and Y operations, and inserts a liquid crystal display panel to be inspected for the chuck top CT1 at the tip of the arm on the back side. Then, the liquid crystal display panel is supported from the back surface and vacuum-sucked. At this time, when the chuck top CT1 is inserted into the back surface of the liquid crystal display panel to be inspected, the cassette CA1 is lowered by a minute height so that the chuck top CT1 supports it instead of a projection inside the cassette.

(3) When the chuck top CT1 vacuum-adsorbs the liquid crystal display panel to be inspected on the back side, the loading arm LOD
Moves leftward in FIGS. 1 and 2 and stops at that point when the relative position between the liquid crystal display panel and the suction portion CP is detected by the alignment mark. Upon receiving this signal, the contact unit CU performs a swing-down operation, and the liquid crystal display panel moves rightward in FIG.
Stop on the suction part CP. The contact unit CU performs an up operation by a predetermined distance. When the suction portion CP contacts the back surface of the liquid crystal display panel, the vacuum suction of the chuck top is released, and the vacuum suction of the suction portion CP is started instead. .

(4) The loading arm LOD moves to the left (X) in FIGS. 1 and 2, and the chuck top CT1 is pulled out of the contact unit CU and separated from the panel surface. Then, the contact unit CU performs an up operation, and the electrodes of the liquid crystal display panel mounted thereon are pressed against the probes of the probe assembly PA shown in FIG. 2 to obtain electrical contact.

(5) Following the operation of (4) above, loading arm LO
D returns to the home position and stops.

(6) In response to the stop signal of the loading arm LOD, the hydraulic cylinder provided below the contact unit CU operates as shown in FIG. 3, and the probe of the probe assembly contacts the electrode of the liquid crystal display panel. In other words, with the probe assembly PA omitted in the drawing, the swing operation is performed up to a predetermined inclination angle and the operation is stopped. At this time, the swing operation can be adjusted so as to have an arbitrary angle so as to obtain an optimum viewing angle according to the height of the examiner.

(7) The inspector turns on and displays the liquid crystal display panel with the above-mentioned inclination angle, and determines the quality of the display quality according to a predetermined display pattern inspection standard.

(8) While the contact unit CU and the probe assembly are being visually inspected at an inclined angle as described above, if there is a liquid crystal display panel to be inspected next, the loading arm LOD is again moved from the home position. After the start, the operation of (2) is performed, and the liquid crystal display panel to be inspected next is taken out of the cassette CA1, and the liquid crystal display panel is moved to the left in FIG. The position of the suction part CP is detected by the alignment mark, and the apparatus stands by.

(9) When the inspector operates an operation panel (not shown) to send an inspection end signal, the contact unit CU returns to the original horizontal state, and performs a Z-down operation by a predetermined amount with respect to the probe assembly, thereby causing the electrodes to move. And release the probe.

(10) In the unload head ULA, the arm starts moving from the home position and moves rightward X, and the chuck top CT2 provided at the end of the arm is inserted from the notch of the suction part CP, and the liquid crystal display panel To the back of
Then, when the contact unit CU is lowered by a very small amount and the chuck top CT2 supports the back surface of the liquid crystal display panel, the vacuum suction of the suction portion CP is released, and the vacuum suction of the check top CT2 is started instead. Thus, when the chuck top CT2 of the unloading arm ULA receives the liquid crystal display panel, the liquid crystal display panel is carried out to the right unload position. When the inspection end signal is sent, indicating that the product is defective, the cassette CA2 moves to the position CA 'shown by the dotted line in FIG. 2 and the cassette CA1 moves to the position corresponding to the unload position. Up / down control is performed so as to match the position of the liquid crystal display panel from which the empty room is carried out. As a result, the defective LCD panel is replaced with the cassette CA
It is carried into 1. On the other hand, when the inspection end signal is sent, when indicating that the cassettes are non-defective, the cassettes CA1 and CA2 are each moved to the position shown in FIG. 2 by Y, and the empty room is carried out. Up / down control is performed so as to match the position. As a result, the non-defective liquid crystal display panel is carried into the cassette CA2. Thereafter, the unloading arm ULA returns to the home position and stops.

(11) When the liquid crystal display panel is taken out of the contact unit CU by the unloading arm ULA,
Loading arm LO waiting in (8) above
The liquid crystal display panel held by D is conveyed to the contact point in the same manner as described above, and the operation after (3) is repeated. The above operations can be performed until there is no more liquid crystal display panel to be inspected.

FIG. 4 is a plan view showing an embodiment of a probe assembly used in the above-described prober for a liquid crystal display panel.

In this embodiment, a probe assembly unit is used in which a relatively small number of probes are fixedly provided for the electrodes of a liquid crystal display panel (hereinafter simply referred to as LCD). That is, the probe assembly units are assigned to a large number of electrodes of the LCD panel. Although not particularly limited, in this embodiment, the electrodes corresponding to the scanning lines arranged so as to run in the horizontal direction on the LCD panel are divided into three parts.
Three probe assembly units are provided.
Further, an electrode corresponding to a signal line arranged to run in the vertical direction on the LCD panel is divided into four parts, and four probe assembly units are provided. In this case, the four probe assembly units arranged in the longitudinal direction of the LCD panel make electrical contact with both ends of the same signal line. When the probe is arranged in this manner, it is possible to easily detect a break in the signal line electrode by checking the continuity at both ends.

In addition to assigning probes to both ends of the same signal line as described above, the LCD panel signal line electrodes are divided into odd-numbered and even-numbered ones. For example, every other probe assembly unit on the upper side is odd-numbered. , And the lower probe assembly unit may be connected to every other even-numbered signal line electrode. In this case, the number of probes can be halved and the pitch can be twice as large as the pitch of the signal line electrodes. On the other hand, a pixel signal is supplied to the signal line, and disconnection of the signal line is indirectly detected by a bright spot inspection or a dark spot inspection of the pixel.

This is the same in the probe assembly units provided on the right and left three each corresponding to the scanning line electrodes arranged to extend in the lateral direction of the LCD panel.

The probe assembly units provided corresponding to the four sides of the LCD panel are commonly connected to each other by a tab mounting board indicated by a dotted line in FIG. The probe board which simultaneously contacts all the electrodes is constructed.

FIG. 5 is a sectional view of one embodiment of the probe assembly unit.

The plurality of probes are positioned so that their tips correspond to the pitch of the electrodes of the LCD panel to be measured, and are fixed by being sandwiched between the support and the probe holder so as to maintain the state. The probe holder is not particularly limited, but is made of a thermosetting adhesive. The tips of the probes are aligned using the same technique as the fixed probe board for a semiconductor wafer, and in this state, a plurality of probes are fixed by a support and a probe holder. The plurality of probes formed in this manner are fixed in such a manner that their tips are correctly aligned.

The support for fixing the plurality of probes in this manner is bonded to the probe mounting body. Although not particularly limited, the probe mounting body is made of aluminum oxide whose surface is oxidized to have electrical insulation. The connection end side of the probe is connected to the connection end of the flexible wiring board, although not particularly limited. One end of the flexible wiring board is bonded to the probe mounting body, and the wiring is connected to the connection end of the probe by soldering or the like.

The tab (TAB; Tape Automated Bonding) is attached to the tab attachment board. That is, when four probe assembly units are provided for the signal lines of the LCD panel as in the above embodiment, four dubs corresponding to the four probe assembly units are attached. A drive IC is mounted on each tab. The other end of the flexible wiring board having the probe attached to one end is electrically connected to the wiring provided on the tab by thermocompression bonding using solder or an appropriate jig.

On the upper surface side of the tab mounting board, an assembly mounting plate provided corresponding to each probe assembly unit is provided. This assembly mounting plate is used for temporarily connecting the tab mounting board side to each probe mounting body. For example, four probe mounting bodies are integrally formed by the tab mounting board via the assembly mounting plate. At this time, the tab mounting board and the assembly mounting plate are fixed by mounting screws, and the assembly mounting plate and the probe mounting body are temporarily fixed by the probe group mounting screws. For example, using an appropriate positioning jig, the tip of the probe of
Temporarily fix with the lobe group mounting screw so that it matches the signal line electrode of the LCD panel.

FIG. 6 is a sectional view showing an embodiment in which the probe assembly unit is mounted on a mounting plate.

The probe assembly unit temporarily fixed as described above is mounted on the mounting plate with screws A. And
An arm of the manipulator fixedly mounted on the upper surface side of the mounting plate extends downward through the opening of the mounting plate, and is fixed by a screw hole and a screw B of the probe mounting body. Thereafter, the probe group fixing screw temporarily fixed through the through hole provided in the arm is removed. Therefore, the probe mounting body is released from the assembly mounting plate, and is finely adjusted in the X, Y, Z, and θ directions according to the movement of the arm of the manipulator. This is because the tip of the probe of the probe group corresponding to each side by the tab mounting board is aligned as described above, but the mutual displacement when it is commonly mounted on one mounting body is described above. The correction is performed by adjusting the manipulator. The correction of the probe tip is performed for each probe assembly unit so that each probe assembly unit and the probe tip are aligned with each electrode of the LCD panel as shown in FIG. At this time, the assembly mounting plate, the tab mounting substrate, and the tab are fixedly attached to the mounting plate with the screw A, and the tab and the probe mounting body are connected by the flexible wiring substrate. Thereby, the position of the probe mounting body can be freely adjusted according to the movement of the arm of the manipulator.

When the four tab mounting substrates are mounted on one mounting plate as described above, the mounting is performed by using a special adjustment jig to adjust the tips of the probes of all the pins in advance so as to match the reference surface. Adjustment by the manipulator after attaching to the plate can be largely omitted.

Although omitted in FIGS. 5 and 6, the probe is fixedly supported by being sandwiched between the support and the probe holder. The flexible wiring board is adhered to the lower surface on which the probe is provided, and the wiring pattern provided on the lower surface and the connection end of the probe are fixed by solder or the like. The two screw holes provided at the distal end raised by the provision of a step on the upper surface side of the probe mounting body are used for coupling with the arm of the manipulator. One screw hole provided in a portion corresponding to the mounting plate is used for a probe group mounting screw used for temporary fixing to the assembly mounting plate.

The operational effects obtained from the above embodiment are as follows. That is, (1) a plurality of liquid crystal display panels to be searched by the panel transport device are placed in a horizontal state, and the liquid crystal display panels of the storage container in which the liquid crystal display panels are stored are supported from the back side and vacuum suctioned to take out or inspection is completed. A liquid crystal display panel is housed in a predetermined storage container, a backlight is built in, the height is higher than the thickness of the vacuum suction arm, and the liquid crystal display panel peripheral portion excluding the loading portion is vacuum suctioned. The probe assembly makes electrical contact with the electrodes of the liquid crystal display panel mounted on the measurement mounting table provided with the suction section, and the measurement mounting table is in contact with the probe of the probe assembly when performing a display visual inspection. By providing an angle adjustment mechanism that tilts the camera at a predetermined angle with respect to the viewing angle with the inspector, it is relatively large and lightweight. The liquid crystal display panel can be automatically transported, and the inspection table can be tilted according to the viewing angle with the inspector while the probe is in contact with the electrodes of the liquid crystal display panel during visual inspection, improving inspection efficiency. Is obtained.

(2) A loading arm and an unloading arm are provided, and when the contact unit is inclined at a predetermined angle by visual inspection, the liquid crystal display panel to be inspected next passes through the back surface side of the cassette. The liquid crystal display panel can be efficiently conveyed by carrying it out of the apparatus and making it stand by.

Although the invention made by the inventor has been specifically described based on the embodiment, the invention of the present application is not limited to the embodiment, and it is needless to say that various changes can be made without departing from the gist of the invention. Nor. For example, cassette CA1
And CA2 may be moved upward or downward to exchange the positional relationship in the Y direction. In this case, the stroke in the horizontal direction can be reduced, so that the dual use of the cassette to be used can be utilized.
The floor area of the entire apparatus can be reduced.

Further, the configuration of the probe assembly may be any as long as electrical contact of the liquid crystal display panel is made.

INDUSTRIAL APPLICABILITY The present invention can be widely used as a prober for a liquid crystal display panel used for visual display inspection of the liquid crystal display panel.

〔The invention's effect〕

The effect obtained by the representative one of the inventions disclosed in the present application will be briefly described as follows. That is, a plurality of liquid crystal display panels to be inspected by the panel transport device are placed in a horizontal state, and the liquid crystal display panel of the storage container in which the liquid crystal display panel is held is supported from the back side thereof, and is taken out by vacuum suction or the inspection is completed. Along with holding the panel in a predetermined storage container, a backlight is built in, a height higher than the thickness of the vacuum suction arm is provided, and a suction portion for vacuum suction of a peripheral portion of the liquid crystal display panel excluding the loading portion is provided. The probe assembly makes electrical contact with the electrodes of the liquid crystal display panel mounted on the measurement mounting table, and when the display visual inspection is performed, the measurement mounting table is in contact with the probe of the probe assembly and the inspector. By providing an angle adjustment mechanism that tilts to a predetermined angle corresponding to the viewing angle of a relatively large and heavy liquid Automatic transfer of the display panel is possible, and the inspection stage can be tilted according to the viewing angle with the inspector while the probe is in contact with the electrodes of the liquid crystal display panel during visual inspection, thereby improving inspection efficiency. be able to.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing an embodiment of a prober for a liquid crystal display panel according to the present invention, FIG. 2 is a schematic plan view showing an embodiment of a prober for a liquid crystal display panel according to the present invention, FIG. 3 is a schematic side view showing an embodiment of a contact unit, FIG. 4 is a plan view showing an embodiment of a probe assembly used in a display panel prober according to the present invention, FIG. FIG. 6 is a cross-sectional view showing one embodiment of the probe assembly unit. FIG. 6 is a cross-sectional view showing one embodiment in which the probe assembly unit is mounted on a mounting plate. BAS1 to BAS3: Base, CA1, CA2: Cassette (storage container), LOD: Loading arm, ULA: Unloading arm, CT1, CT2: Chuck top, CP: Suction unit, CU: Contact unit , PA …… Probe assembly.

Continuation of the front page (56) References JP-A-1-124740 (JP, A) JP-A-1-203945 (JP, A) JP-A-58-63917 (JP, A) JP-A-1-254914 (JP) , A) JP-A-1-140992 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) G02F 1/13 101 G02F 1/1345

Claims (3)

(57) [Claims] 1. A storage container in which a plurality of liquid crystal display panels to be inspected are placed in a horizontal state and stored, and the liquid crystal display panel of the storage container is supported in a horizontal state from the back side and taken out by vacuum suction. Or, a panel transport device that stores the liquid crystal display panel that has been inspected in a predetermined storage container,
A measuring stage having a built-in backlight, having a height higher than the thickness of the arm for vacuum suction, and having a suction portion for vacuum-suctioning the periphery of the liquid crystal display panel except for the loading portion; A probe assembly for making electrical contact with the electrodes of the liquid crystal display panel mounted on the display panel, and a horizontal state when loading or unloading the liquid crystal display panel, and being in contact with the probe of the probe assembly when performing a display visual inspection. A prober for a liquid crystal display panel, comprising: an angle adjustment mechanism for inclining the measurement mounting table to a predetermined angle corresponding to a viewing angle with an inspector in a state. 2. The transfer device according to claim 1, further comprising: a loading arm for carrying out the liquid crystal display panel to be inspected from the storage container to the measuring table; and an unloading arm for carrying the liquid crystal display panel having been inspected into the predetermined storage container. Claim 1 characterized by the following:
A prober for a liquid crystal display panel according to the item. 3. The storage container moves up and down and allows the same storage container to move between a load position and an unload position corresponding to the transfer device, and an inspection is performed in an empty room according to the inspection result. 3. The prober for a liquid crystal display panel according to claim 1, wherein the completed liquid crystal display panel is carried in.