JPH08102476A - Inspection equipment for planar object to be inspected - Google Patents

Abstract

PURPOSE: To reduce the ratio of awaiting time of inspection mechanism, as compared with the time when objects to be inspected before inspection are practically inspected by the inspection mechanism, and increase the inspection process sheet number of objects to be inspected per unit time. CONSTITUTION: A probe equipment 1 built in the lighting inspection system for an LCD substrate is provided with an accommodation part 2, a processing part 3, and a conveying part 4 interposed between the accommodation part 2 and the processing part 3. Inspection mechanism 20 having a probe card is arranged in an inspection region 21 of the processing part 3. A left alignment region 22a and a right alignment region 22b are arranged so as to put the inspection region 21 between the regions 22a and 22b, on which the respective mounting stands 31a and 31b for mounting the LCD substrates ST are arranged. The movement of mounting stands 31a, 31b is controlled by a controller. The LCD substrates ST on the mounting stands 31a, 31b are inspected alternately on the inspection region 21.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for inspecting a plate-shaped inspection object such as an LCD (liquid crystal display) substrate or a semiconductor wafer.

[0002]

2. Description of the Related Art Generally, for example, during a manufacturing process of a TFT-LCD substrate, an electrical function inspection of the LCD substrate under production, a short circuit / open inspection of an incorporated electric circuit, etc. are performed at an appropriate inspection time. At the same time, a lighting inspection of the pattern display of the substantially completed product in which the liquid crystal is sealed is performed. Here, as a device for inspecting a plate-shaped object to be inspected such as an LCD substrate, the device disclosed in, for example, Japanese Patent Application Laid-Open No. 2-25764 is conventionally known.

In this inspection apparatus, a cassette (accommodation portion) in which a plurality of LCD substrates (inspection objects) before inspection are accommodated, and one LCD substrate before inspection is taken out from this cassette, and is placed on a mounting table at a delivery portion. And a moving mechanism for aligning (aligning) the LCD substrate on the mounting table with the transfer unit and moving it to the inspection area.

During operation of the inspection device, one uninspected LCD substrate is taken out from the cassette by the transport mechanism. Here, the taken-out LCD substrate is supplied to an inspection area through a moving mechanism, and a predetermined inspection is performed in this inspection area. Further, the LCD substrate after the inspection, which has been inspected in the inspection area, is returned from the inspection area to a predetermined cassette by a moving mechanism and a transport mechanism in a route opposite to that at the time of supply.

Then, after the LCD substrate after the inspection is returned to the cassette, another new LCD substrate before the inspection is taken out from the cassette by the transport mechanism, and similarly to the inspection area through the moving mechanism. Is being supplied,
After that, the above-described series of transportation operations of the LCD substrates are similarly repeated, and the LCD substrates before the inspection are supplied to the inspection area one by one, and the predetermined inspection is performed in this inspection area.

[0006]

By the way, in the above-mentioned conventional structure, the LC after the inspection is in operation when the inspection apparatus is in operation.
After the D board is returned to the cassette, another new L
One CD substrate is taken out from the cassette, and a series of LCD substrate supply operations up to the inspection area are repeated, so that a plurality of pre-inspection LCD substrates in the cassette are removed.
It is designed to be inspected one by one. Therefore, in the inspection area, after the inspection of one LCD substrate is completed, the next LCD
The inspection mechanism is in a standby state until the substrate is supplied to the inspection area.

Further, in this type of inspection apparatus, it is necessary to accurately position a new LCD substrate to be inspected, which is supplied to the inspection area, within the inspection area, so that there is a problem that the alignment work takes time. Therefore, the ratio of the waiting time is increased as compared with the time during which the LCD substrate before the inspection is actually inspected by the inspection mechanism, which causes a problem that the operation time of the tester used in the inspection is shortened. Since an expensive tester is generally used in the inspection mechanism, it is a reality that the actual operating time of this tester should be as long as possible.

The present invention has been made in view of the above circumstances, and an object thereof is to reduce the ratio of the waiting time of the inspection mechanism to the time during which the object to be inspected before the inspection is actually inspected by the inspection mechanism. It is an object of the present invention to provide a plate-shaped inspecting device for an inspected object that can increase the number of inspected objects to be inspected per unit time.

[0009]

According to a first aspect of the present invention, there is provided a plate-shaped inspecting device for inspecting a plate-shaped inspecting device arranged in an inspection area. And first and second alignment regions of the device under test, the first and second mounting bases on which the device under test is removably mounted, the first and second alignment bases being disposed with the inspection region interposed therebetween. And a mounting table moving means for moving the second mounting table in a horizontal plane, and the first mounting table can be moved between the first alignment area and the inspection area by the moving means. The second mounting table is movable between the second alignment area and the inspection area, the control means for operating the moving means, and the control means,
Operating the moving means so that the inspection mechanism inspects the object to be inspected on the first and second mounting tables alternately in the inspection area. .

According to a second aspect of the present invention, there is provided a plate-shaped inspecting apparatus for inspecting a plate-shaped inspected object, which is movable between first and second inspection areas. An inspection mechanism moving means for moving the inspection mechanism between the first and second inspection areas, and first and second inspection objects arranged to sandwich the first and second inspection areas.
The alignment area, the first and second mounting tables on which the inspection object is removably mounted, and the inspection object on the first and second mounting tables are respectively in the first and second inspection areas. Inspection, and mounting table moving means for moving the first and second mounting tables in a horizontal plane,
The first mounting table is moved to the first by the mounting table moving means.
The second mounting table is movable between the alignment area and the first inspection area, and the second mounting table is movable between the second alignment area and the second inspection area; The control means for operating the control means and the control means perform the inspection of the inspection object on the first and second mounting tables by the inspection mechanism alternately in the first and second inspection areas, respectively. Thus, operating both of the moving means.

According to a third aspect of the present invention, there is provided a plate-shaped inspecting apparatus for inspecting a plate-shaped inspected object, which is movable between first and second inspection areas. , The first and second inspection regions are respectively the first of the inspection object.
And a second alignment region, moving means for moving the inspection mechanism between the first and second inspection regions, and first and second detachable mounts of the device under test. The mounting table and the inspected objects on the first and second mounting tables are inspected in the first and second inspection areas, respectively, and control means for operating the moving means, and the control means. Operating the moving means such that the inspection of the inspection object on the first and second mounting tables by the inspection mechanism is alternately performed in the first and second inspection areas, respectively. It is characterized by including.

According to a fourth aspect of the present invention, there is provided a plate-shaped inspection device for an object to be inspected according to claim 1 or 2, wherein the first and second mounting tables are movable independently of each other. It is characterized by

According to a fifth aspect of the present invention, there is provided a plate-shaped inspection device for an object to be inspected according to any one of claims 1, 2 and 4, wherein the control means includes the first and the second.
It is characterized in that the mounting table moving means is operated so as to move the first and second mounting tables respectively in the alignment region and align the object to be inspected in a predetermined state with respect to the inspection mechanism.

According to a sixth aspect of the present invention, there is provided a plate-shaped inspection device for an object to be inspected according to any one of the first to fifth aspects, wherein the control means includes the first and second mounting tables. While inspecting the object to be inspected on one of the first and second mounting tables, the object to be inspected after the inspection is taken out from the other of the first and second mounting tables in a corresponding alignment area, and is newly supplied to the object to be inspected. It is characterized by controlling the work of setting the body on the other mounting table.

According to a seventh aspect of the present invention, there is provided a plate-shaped inspecting device for an inspected object, wherein the inspected object accommodating portion for accommodating a plurality of the inspected objects according to any one of claims 1 to 7. And is disposed between the object to be inspected part and the first and second alignment regions, and conveys the object to be inspected between the object part to be inspected and the first and second alignment regions. And an object-to-be-inspected conveying means.

In the apparatus according to the first aspect of the present invention, during the inspection work for inspecting an object by moving one of the mounting tables to the inspection area, the next one is placed on the mounting table waiting in the other alignment area. By setting the object to be inspected before inspection for the next inspection, when the mounting table in the inspection area is moved to one of the alignment areas together with the object to be inspected after the inspection work, The other mounting table on which the object to be inspected before the inspection is set is moved to the inspection area.

In the apparatus according to the second aspect of the present invention, while one inspection table is inspected by moving one of the mounting table and the inspection mechanism to one of the inspection areas, the other alignment area waits. By setting the object to be inspected before the next inspection for the next inspection, the table in one inspection area is moved to the one alignment area together with the object to be inspected after the inspection work is completed. At this time, the other mounting table and the inspection mechanism in which the pre-inspection object for the next inspection is set in advance are moved to the other inspection area.

In the apparatus according to the third aspect of the present invention, during the inspection work in which the inspection mechanism is moved to one inspection area / alignment area to inspect the object to be inspected, the table for the other inspection area / alignment area is placed. By setting the inspected object before the inspection for the next inspection, the inspection mechanism is moved to the other inspection area / alignment area after the completion of the inspection work to inspect the inspected object.

In the apparatus according to the fourth aspect of the present invention, the respective mounts are moved independently of each other so that the objects to be inspected can be aligned with high precision for each mount.
In the apparatus according to the fifth aspect of the present invention, the alignment work of the inspection object in each alignment area is performed in cooperation with the movement of the inspection object to the inspection area using the mounting table moving means.

In the apparatus according to the sixth aspect of the present invention, during the inspection work for inspecting the object to be inspected on one mounting table, the object to be inspected after inspection is taken out from the other mounting table and newly supplied. The work of setting the inspected object before the inspection on the other mounting table is performed in cooperation with the movement of the inspected object to the inspection area.

In the apparatus according to the seventh aspect of the present invention, the object to be inspected is conveyed between the object to be inspected and each alignment area by the object to be inspected conveying means arranged between the object to be inspected and each alignment area. The object to be inspected was transported by.

[0022]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a schematic configuration of the entire probe device 1 incorporated in a lighting inspection system for an LCD substrate according to an embodiment of the present invention. L for the probe device 1
A CD board storage section (inspection object storage section) 2, an LCD board processing section 3, and a transfer section (inspection object transfer means) 4 interposed between the LCD board storage section 2 and the LCD board processing section 3. And are provided.

Further, the LCD board housing section 2 is provided with a cassette mounting table 11 as shown in FIG. A plurality of LCD substrate storage cassettes 12, four LCD substrate storage cassettes 12 in this embodiment, are mounted on the cassette mounting table 11 in a line along the direction of arrow X in FIG. 1, for example. Each cassette 12
A plurality of LCD board storage shelves 13 are provided in the vertical direction. Then, the LCD board storage shelf 1 of each cassette 12
An LCD substrate (object to be inspected) ST is housed in each of the units 3 so as to be drawn out in a state in which the LCD substrate ST is oriented in a substantially horizontal direction.

In addition, the LCD substrate processing section 3 is provided with an inspection region 21 in which an inspection mechanism 20 for inspecting the LCD substrate ST is arranged at a central position along the X direction. Alignment regions 22a and 22b of the LCD substrate ST are arranged on both sides of the inspection region 21, respectively.

Further, in FIG. 1, an alignment area 22a on the left side of the inspection area 21 has a left stage 23a movable to the inspection area 21 side, and an alignment area 22b on the right side of the inspection area 21 also moves to the inspection area 21 side. Each movable right stage 23b is provided.

Here, on the base 24 of the LCD substrate processing unit 3, a pair of guide rails 25 extending in the X direction are provided.
Is provided. The left ends of these guide rails 25 extend to the position of the left alignment region 22a, and the right ends thereof extend to the position of the right alignment region 22b. Then, the left stage 23a and the right stage 23b
Is guided by these guide rails 25 and movably supported between the left and right alignment regions 22a and 22b and the inspection region 21.

A left ball screw mechanism 26a for driving the left stage 23a and an alignment optical system such as a CCD camera 27a are provided in the left alignment area 22a. Here, the left ball screw mechanism 26a is provided with a ball screw 28a installed between the inspection region 21 and the left alignment region 22a in the X direction, and a drive motor 29a for driving the ball screw 28a. . Then, as the left ball screw mechanism 26a is driven, the left stage 23a is moved while being guided by the guide rail 25 between the standby position in the left alignment area 22a and the board inspection position in the inspection area 21. Has become.

Similarly, in the right alignment area 22b, a right ball screw mechanism 26b for driving the right stage 23b,
For example, an alignment optical system such as a CCD camera 27b is provided. Here, in the right ball screw mechanism 26b, X is provided between the inspection area 21 and the right alignment area 22b.
A ball screw 28b installed in the direction and a drive motor 29b for driving the ball screw 28b are provided. Then, as the right ball screw mechanism 26b is driven, the right stage 23b is moved and operated while being guided by the guide rail 25 between the standby position in the right alignment area 22b and the board inspection position in the inspection area 21. Has become.

Further, a left block 36a is provided on the left stage 23a so as to be movable along the arrow Y direction in FIG. 1 which is orthogonal to the X direction. On the upper surface of the left stage 23a, a pair of guide rails 32a extended along the Y direction.
And a ball screw mechanism 33a for driving the left block 36a. Further, the ball screw mechanism 33a is provided with a ball screw 34a and a drive motor 35a for driving the ball screw 34a.

Further, as shown in FIG. 3, a left mounting table 31a having a chuck for holding the LCD substrate ST is arranged on the left block 36a. Ball screw mechanism 33
With the driving of a, the left block 36a moves to the left mounting table 31.
a together with a, the substrate transfer position moved along the Y direction to the end position on the transfer unit 4 side as shown in FIG.
As shown in FIG. 5B, the operation is performed while being guided by the guide rail 32a between the left stage 23a and the alignment work position which has been moved to a substantially central position. When the left mounting table 31a is moved to the alignment work position, the LCD substrate ST on the mounting table 31a is arranged directly below the CCD camera 27a of the alignment optical system.

The left mounting table 31a has a driving portion 37a having an elevating member and a rotating member built in the left block 36a.
Thus, it is vertically driven along the Z-axis direction orthogonal to the XY plane, and is rotationally driven in the θ direction around the Z-axis.
Therefore, the left mounting table 31a is movable in four directions of X, Y, Z, and θ.

A CCD camera 38a of an alignment optical system and a retractable target 39a used for aligning the optical axes of the cameras 27a and 38a are arranged on a side portion (lower side in FIG. 1) of the left mounting table 31a. Set up. Cameras 27a, 3
The alignment of the optical axis of 8a and the recognition of the electrode pad position of the probe card 43 described later by the lower camera 38a are performed by the LCD.
Prior to the inspection of the substrate ST, it is performed, for example, when the device is installed. Then, at the time of inspection, with the left mounting table 31a moved to the alignment work position, the LCD substrate ST is photographed by the upper CCD camera 27a, and the left mounting table 31a is photographed.
The optical alignment work of the LCD substrate ST is performed by the movement of a.

Further, on the right stage 23b, a right block 36b and a right mounting table 31b having the same structure as the left block 36a and the left mounting table 31a on the left stage 23a are provided. That is, on the right stage 23b,
A pair of guide rails 32a on the left stage 23a side, a ball screw mechanism 33a including a ball screw 34a and a drive motor 35a, a mounting table 31a, a block 36a, and a pair of guide rails 32b corresponding to the drive section 37a, a ball screw 34b and a drive. A ball screw mechanism 33b including a motor 35b, a mounting table 31b, a block 36b, and a drive unit 37b are provided, respectively. Also, the right mounting table 31
A CCD camera 38b of an alignment optical system and a retractable target 39b used for aligning the optical axes of the cameras 27b and 38b are disposed on the side of b (lower side in FIG. 1).

Further, as shown in FIG. 3, the inspection mechanism 20 in the inspection area 21 has a test head 41 containing a performance board (not shown) for transmitting an electric signal for lighting inspection to the LCD substrate ST. There is. Test head 4
A head plate 42 is arranged below the unit 1. An opening 42a is formed in the head plate 42 at a position opposed to the test head 41 with a space therebetween, and a card holder 44 is fixed to the peripheral edge of the opening 42a. That is, the probe card 43 of the inspection mechanism 20 is fixed to the head plate 42 via the card holder 44.

The probe card 43 is provided with a large number of probe electrodes 45 for contacting a large number of electrode pads provided on the LCD substrate ST. Probe electrode 45
Is used to send an electric signal for lighting inspection to the LCD substrate ST, that is, functions as a direct terminal of the inspection mechanism 20. Each probe electrode 45 is connected to a performance board (not shown) in the test head 41 via a contact ring 48 having contact pins 46 and 47 protruding from the upper surface and the lower surface. The performance board is connected to the tester 55 of the inspection system.

Test head 41, contact ring 48
And the probe card 43 has openings 41 aligned with each other.
a, 48a, 43a are formed. A camera 57 of the inspection system is arranged above these openings to image the LCD substrate ST during the lighting inspection. The camera 57 is arranged so that its optical axis is aligned with the center of the openings 41a, 48a, 43a and its focusing surface is aligned with the LCD substrate ST. The camera 57 is connected to the tester 55, and the imaging information is displayed on the display 56 of the tester 55. Further, in order to capture an image of the LCD substrate ST, a backlight 58 is built in each of the mounting tables 31a and 31b.

When the LCD substrate ST is to be inspected in the inspection area 21, either the left mounting table 31a or the right mounting table 31b is moved to the substrate inspection position in the inspection area 21, and left at this substrate inspection position. A predetermined inspection is performed in a state where the mounting table 31a or the right mounting table 31b is raised along the Z-axis direction to electrically contact the probe electrodes 45 of the probe card 43 and the electrode pads of the LCD substrate ST.

Further, as shown in FIG. 4, the drive motor 29a of the left ball screw mechanism 26a and the ball screw mechanism 33a.
Drive motor 35a, the drive unit 37a of the mounting table 31a, and the drive motor 29b of the ball screw mechanism 26b on the right side,
Drive motor 35b of ball screw mechanism 33b, mounting table 31
The drive unit 37b of b is connected to a controller (control means) 51 formed by, for example, a microcomputer and its peripheral circuits. And the controller 51
The drive motor 29a of the left ball screw mechanism 26a and the right ball screw mechanism 2 in a state in which the mounting tables 31a and 31b of the left and right alignment regions 22a and 22b are alternately moved to the inspection region 21 for each inspection of the LCD substrate ST.
The drive motor 29b of 6b is driven.

A display section 52 is connected to the controller 51. Left and right CCD cameras 2 are displayed on the display unit 52.
7a, 27b, 38a and 38b are image processing units 5, respectively.
3 are connected. The image information from the left and right CCD cameras 27a, 27b, 38a, 38b is
It is adapted to be displayed on the display unit 52 after being processed by the image processing unit 53 by switching input.

The transfer section 4 has a substrate transfer robot 61.
Is provided. Here, a pair of guide rails 63 extending in the X direction are provided on the base 62 of the transport unit 4. The left end portions of these guide rails 63 extend to positions corresponding to the left alignment region 22a,
The right end portion extends to a position corresponding to the right alignment region 22b. The substrate transfer robot 61 is guided by these guide rails 63 and is movably supported between positions corresponding to the left and right alignment regions 22a and 22b.

The substrate transfer robot 6 is mounted on the base 62.
A ball screw mechanism 64 for driving 1 is provided. The ball screw mechanism 64 includes the left and right alignment regions 22a,
A ball screw 65 installed in the X direction between positions corresponding to 22b and a drive motor 66 for driving the ball screw 65 are provided. Then, the ball screw mechanism 64
The substrate transfer robot 61 is moved while being guided by the guide rail 63 between the positions corresponding to the left and right alignment regions 22a and 22b.

Further, the substrate transfer robot 61 has a movable base 67 which is moved in the X direction while being guided by the guide rails 63, and a pedestal portion 68 which is supported by the movable base 67 so as to be vertically movable in the Z axis direction. A robot arm 69 formed by an articulated arm attached to the base 68,
A substrate holding hand 70 rotatably connected to the tip of the robot arm 69 is provided.

A rack 71 extending in the Z-axis direction is provided on the pedestal portion 68 in a protruding manner. Moving table 6 on rack 71
The pinion gear 73 attached to the rotating shaft of the motor 72 fixed to 7 is meshed. The rotation of the pinion gear 73 is transmitted to the rack 71 in accordance with the driving of the motor 72, so that the rack 71 moves up and down, and the pedestal portion 68 moves up and down along with the rack 71 along the Z-axis direction. There is. Reference numeral 74 is a guide member for moving the pedestal portion 68 up and down along the Z-axis direction.

A plurality of arm constituent elements 75 are rotatably connected to the robot arm 69 via joints. A state in which the substrate holding hand 70 is moved along the Y direction along with the deformation operation of the robot arm 69, and the direction of the tip end portion of the substrate holding hand 70 is reversed by 180 ° so as to face the LCD substrate storage unit 2 side. Alternatively, the switching operation can be performed in a state of facing the LCD substrate processing unit 3 side.

Next, the operation of the embodiment shown in FIG. 1 will be described. First, in order to initialize the apparatus, the optical axes of the cameras 27 and 27b in the left and right alignment regions 22a and 22b and the cameras 38a and 3 in the left and right mounting tables 31a and 31b.
The optical axes of 8b are aligned with the targets 39a and 39b, and the positions of the mounting tables 31a and 31b at this time are recognized as left and right reference coordinate positions, respectively.

In addition, the probe cards 43 are attached by the cameras 38a and 38b of the left and right mounting tables 31a and 31b, respectively.
The two probe electrodes 45 serving as the reference of are imaged and their coordinate positions are obtained from the positions of the mounting tables 31a and 31b.
Thereby, the entire position of the probe card 43 with respect to each of the left and right reference coordinate positions can be recognized. The above initialization is performed before the inspection of the LCD substrate ST.
For example, this is done when the device is installed.

When the LCD device ST is inspected by the probe device 1, the upper CCDs are moved in a state in which the respective mounting tables 31a and 31b are moved to the alignment work position as described later.
The cameras 27a and 27b capture, for example, two marks on the LCD substrate ST. This makes it possible to obtain data on the relative position of the substrate ST on each of the mounting tables 31a and 31b with respect to the probe card 43. Therefore, if each of the mounting tables 31a and 31b is moved in the three directions of X, Y, and θ based on the same data, the substrate S for the probe card 43 is moved.
Optical alignment operation of T can be performed.

At the time of inspection, either the left mounting table 31a in the left alignment area 22a or the right mounting table 31b in the right alignment area 22b, for example, FIG. 5 (A).
As shown in, the right mounting table 31b is moved to the substrate inspection position in the inspection area 21, and the LCD substrate ST before the inspection on the right mounting table 31b is inspected in the inspection area 21.

During the substrate inspection of the right mounting table 31b, the left stage 23a is moved to the standby position in the left alignment area 22a. In this state, the left mounting table 31a is shown in FIG.
It is moved to the substrate delivery position shown in FIG. And
At the substrate transfer position, L after the inspection on the left mounting table 31a
The CD substrate ST is received by the substrate transport robot 61, transported by the substrate transport robot 61 to the LCD substrate storage unit 2, and the LCD at the predetermined position of the LCD substrate storage cassette 12.
It is stored in the substrate storage shelf 13.

Further, the LCD substrate ST after the inspection is displayed on the LCD.
After being stored in the substrate storage cassette 12, the LCD substrate ST to be inspected next is LC by the substrate transfer robot 61.
It is taken out from the D substrate storage cassette 12.

LCD substrate ST before inspection taken out here
Is the left alignment area 2 by the substrate transfer robot 61.
The sheet is conveyed to the 2a side and is supplied to the left mounting table 31a waiting at the substrate transfer position.

As described above, after the new LCD substrate ST before the inspection is set on the left mounting table 31a, the ball screw mechanism 33a is driven, and the left mounting table 31a is aligned as shown in FIG. 5 (B). Moved to a position. At this alignment work position, the LCD substrate S on the left mounting table 31a is
T is disposed directly below the CCD camera 27a of the alignment optical system, and the left placement table 31a is moved in the three directions of X, Y, and θ based on the image captured by the CCD camera 27a. LCD substrate S on 31a
Optical alignment work of T is performed. At this time, the substrate transfer robot 61 moves to the right alignment area 22b.
It waits in the state of being moved to the position corresponding to.

After the inspection of the LCD substrate ST of the right mounting table 31b in the inspection area 21 is completed, the right ball screw mechanism 26b is driven and the right stage 23b moves the right alignment area 22b as shown in FIG. 6A. It is moved to the upper standby position. Thereafter, the ball screw mechanism 33b is driven and the right mounting table 31b is moved to the substrate delivery position. The right ball screw mechanism 26b and the ball screw mechanism 3
3b and 3b may be simultaneously driven.

At this time, in the left alignment area 22a, the optical alignment work of the LCD substrate ST on the left mounting table 31a is completed, and it is held in a standby state. Therefore, the left ball screw mechanism 26a is driven along with the movement of the right mounting table 31b from the inspection area 21 to the right alignment area 22b side, and the left mounting table 31a moves the substrate of the inspection area 21 as shown in FIG. 6B. Moved to the inspection position. Then, in the inspection area 21, the LC before the inspection on the left mounting table 31a
The inspection of the D substrate ST is performed.

During the substrate inspection of the left mounting table 31a, the LCD substrate ST after the inspection on the right mounting table 31b is transferred while the right mounting table 31b in the right alignment area 22b is held at the substrate transfer position. It is received by the robot 61. Then, the L after the inspection is performed by the substrate transfer robot 61.
The CD substrate ST is conveyed to the LCD substrate storage unit 2 and the LCD
LCD board storage shelf 1 at a predetermined position of the board storage cassette 12
It is stored in 3.

Further, the LCD substrate ST after the inspection is displayed on the LCD.
After being stored in the substrate storage cassette 12, the LCD substrate ST before the inspection, which is to be inspected next as in the previous time, is the substrate transfer robot 61.
Is taken out from the LCD substrate storage cassette 12.
Then, the LCD substrate ST before inspection taken out by the substrate transfer robot 61 is moved to the right alignment region 22b.
And is supplied to the right mounting table 31b waiting at the substrate transfer position as shown in FIG. 7 (A).

In this way, after the new pre-inspection LCD substrate ST is set on the right mounting table 31b, the ball screw mechanism 33b is driven, and the right mounting table 31b is aligned as shown in FIG. 7B. Moved to a position. At this alignment work position, the LCD substrate S on the right mounting table 31b
T is arranged directly below the CCD camera 27b of the alignment optical system, and by moving the right mounting table 31b in the three directions of X, Y, and θ based on the image captured by the CCD camera 27b, the right mounting table 31b is moved. Upper LCD substrate S
Optical alignment work of T is performed. At this time, the substrate transfer robot 61 moves the left alignment area 22a.
It waits in the state of being moved to the position corresponding to.

After the inspection of the LCD substrate ST of the left mounting table 31a in the inspection area 21 is completed, the left ball screw mechanism 26a is driven, and the left stage 23a waits on the left alignment area 22a as shown in FIG. It is moved to the position. At the same time, the ball screw mechanism 33a is driven and the left mounting table 31a is moved to the substrate delivery position. At this time, in the right alignment area 22b, the optical alignment work of the LCD substrate ST on the right mounting table 31b is completed and is held in a standby state, and the left mounting table 31a is moved from the inspection area 21 to the left alignment area 22a side. The right mounting table 31b is moved to the substrate inspection position in the inspection area 21 with the movement.

After that, the same operation is repeated and L
Each time the CD substrate ST is inspected, the mounting tables 31a and 31b of the left and right alignment regions 22a and 22b are alternately moved to the inspection region 21, and the LCD substrate ST before the inspection is sequentially inspected.

According to this embodiment, the following effects can be obtained.
That is, during the inspection work of inspecting the LCD substrate ST by moving one alignment region, for example, the left mounting table 31a of the left alignment region 22a to the inspection region 21, the other alignment region, here the right alignment region 22b.
The LCD substrate ST before the inspection for the next inspection can be set in advance on the right mounting table 31b which is on standby at. Therefore, when the mounting table 31a at the position of the inspection area 21 is moved to the left alignment area 22a together with the inspected LCD board ST after the inspection operation of the LCD board ST which is currently inspected is completed, the table for the next inspection is previously prepared. The mounting table 31b of the right alignment region 22b on which the LCD substrate ST before the inspection is set can be immediately moved to the inspection region 21. Therefore, after the inspection work of the LCD substrate ST under the inspection work is completed, the LCD substrate ST before the inspection for the next inspection is completed.
It is possible to significantly reduce the time required until the is set in the inspection area 21 as compared with the conventional case. That is, the ratio of the waiting time of the inspection area 21 can be reduced as compared with the time of actually inspecting the LCD substrate ST before the inspection by the inspection area 21, and the operating time of the inspection area 21 can be lengthened. In addition, the number of inspected objects to be inspected per unit time can be significantly increased.

Further, a left ball screw mechanism 26a for driving the left stage 23a in the left alignment area 22a and a right ball screw mechanism 26b for driving the right stage 23b in the right alignment area 22b are separately provided, and each of the left and right alignment areas 22a is provided. , 22b can be moved independently of each other, so that the LCD substrates ST can be aligned with high accuracy for each of the mounting tables 31a, 31b of the left and right alignment regions 22a, 22b.

FIG. 8 shows an LC according to another embodiment of the present invention.
Probe device 8 incorporated in the lighting inspection system for the D board
1 shows a schematic configuration of the whole 1. In FIG. 8, members common to those of the embodiment shown in FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted.

The probe apparatus 81 of the present embodiment differs from the embodiment shown in FIG. 1 in that the inspection area is composed of two left and right inspection areas 21a and 21b. Therefore, the inspection mechanism 20 can be moved left and right, and the CCD cameras 27a and 27b, which are alignment optical systems, can be swung and retracted.

More specifically, the inspection mechanism 20 is arranged so as to bridge between the inspection mechanism moving means 82 and the guide rail 84 and slide along the guide rail 84. The moving means 82 is the controller 51 (see FIG. 4)
Therefore, the inspection mechanism 20 can be moved left and right in FIG. 8 under the control of the controller 51. The camera 57 is fixed to the inspection mechanism 20 and moves integrally with the inspection mechanism 20.

Further, the support arms of the cameras 27a and 27b are attached to the vertical shafts 86a and 86b which are driven to rotate by the drive motors 88a and 88b. The drive motors 88a, 88b are also connected to the controller 51, and therefore the cameras 27a, 27b are also connected to the controller 51.
Under the control of (1), the shafts 86a and 86b can be turned about their centers.

9A and 9B show the operation of the embodiment shown in FIG. This embodiment is also similar to the embodiment shown in FIG. 1 in that the controller 51 operates so that the inspection mechanism 20 alternately inspects the LCD substrates ST on the left and right mounting tables 31a and 31b. That is, as in the embodiment shown in FIG. 1, the controller 51 drives the left and right mounting bases 31a and 31b, the transfer robot 61, and the like to deliver and align the LCD substrate ST and operate the inspection mechanism moving means 82. Then, the inspection mechanism 20 is driven corresponding to the movement of the left and right mounting tables 31a and 31b.

FIG. 9A shows a state in which the LCD substrate placed on the right placing table 31b is being inspected, which is almost the same as the state shown in FIG. 5B of the previous embodiment. Correspond. Here, the inspection mechanism 20 and the right mounting table 31b are located at the right substrate inspection position in the right inspection region 21a, and are aligned so that the LCD substrate is within the visual field of the camera 57. Further, the camera 27b is pivotally retracted laterally so as not to interfere with the inspection mechanism 20. The right substrate inspection position is located approximately in the middle of the positions of the inspection mechanism 20 and the right mounting table 31b in the state shown in FIG. 8, that is, approximately in the middle of the original position of the inspection mechanism 20 and the standby position of the right stage 23b. The right stage 23b on which the right mounting table 31b is placed and the inspection mechanism 20 move toward each other simultaneously from the positions shown in FIG. 8 and stop at the right substrate inspection position.

FIG. 9B shows a state in which the LCD substrate placed on the left placing table 31a is being inspected, which is almost the same as the state shown in FIG. 7B of the previous embodiment. Correspond. Here, the inspection mechanism 20 and the left mounting table 31a are located at the left board inspection position in the left inspection area 21b, and are aligned so that the LCD board is within the visual field of the camera 57. Further, the camera 27a is pivotally retracted laterally so as not to interfere with the inspection mechanism 20. The left substrate inspection position is located approximately in the middle of the positions of the inspection mechanism 20 and the left mounting table 31a in the state shown in FIG. 8, that is, approximately in the middle of the original position of the inspection mechanism 20 and the standby position of the left stage 23a. The left stage 23a on which the left mounting table 31a is placed and the inspection mechanism 20 simultaneously move toward each other from the position shown in FIG. 8 and stop at the left substrate inspection position.

As described above, according to the embodiment shown in FIG. 8, since the inspection mechanism 20 is movable, the LC before the inspection is inspected.
The time for setting the D substrate ST at the substrate inspection position can be shortened. Therefore, according to the present embodiment, it is possible to further increase the number of inspection processed sheets of the inspection object per unit time as compared with the embodiment shown in FIG.

FIG. 10 shows a schematic structure of the entire probe device 91 incorporated in a lighting inspection system for an LCD substrate according to still another embodiment of the present invention. In FIG. 10, members common to those of the embodiment shown in FIGS. 1 and 8 are designated by the same reference numerals, and detailed description thereof will be omitted.

The probe device 91 of the present embodiment is different from the embodiments shown in FIGS. 1 and 8 in that the left and right alignment regions 22a and 22b are also used as the left and right inspection regions. Therefore, the inspection mechanism 20 is movable left and right, and the alignment optical system C is used.
The CD cameras 27a and 27b can be turned and retracted.

More specifically, the left and right stages 23a, 2
3b is fixed, and only the inspection mechanism 20 moves left and right when the left and right mounting tables 31a and 31b are aligned with the inspection mechanism 20. The inspection mechanism 20 is formed in a smaller size than the inspection mechanism shown in FIGS. 1 and 8, and like the embodiment shown in FIG. 8, bridges between the moving means 82 and the guide rail 84 and extends along the guide rail 84. It is possible to slide. The camera 57 is fixed to the inspection mechanism 20 and moves integrally with the inspection mechanism 20. Cameras 27a, 27b
Also in the same manner as the embodiment shown in FIG. 8, the shafts 86a, 86a
It is possible to turn around the center of 6b.

Also in the present embodiment, the controller 51 operates so that the inspection mechanism 20 alternately inspects the LCD substrates ST on the left and right mounting bases 31a and 31b. It is similar to the form. That is, as in the embodiment shown in FIG. 1, the controller 51 drives the left and right mounting bases 31a and 31b, the transfer robot 61, and the like to deliver and align the LCD substrate ST and operate the inspection mechanism moving means 82. Then, the inspection mechanism 20 is driven according to the movement of the transfer robot 6.

In the present embodiment, when inspecting the LCD substrate on the right mounting base 31b, the inspection mechanism 20 moves rightward in FIG. 10 toward the right mounting base 31b. Then, the inspection mechanism 20 is stopped at a position where the LCD substrate on the mounting table 31b enters the field of view of the camera 57, that is, at the right substrate inspection position. At this time, the camera 27b pivots and retracts laterally so as not to interfere with the inspection mechanism 20.

On the other hand, when inspecting the LCD substrate on the left mounting table 31a, the inspection mechanism 20 moves leftward in FIG. 10 toward the left mounting table 31a. Then, the inspection mechanism 20 is stopped at a position where the LCD substrate on the mounting table 31a enters the field of view of the camera 57, that is, at the left substrate inspection position. At this time, the camera 27a does not interfere with the inspection mechanism 20,
Turn and retract to the side.

As described above, according to the embodiment shown in FIG. 10, only the inspection mechanism 20 is moved to the left and right to move the left and right mounting table 3 to each other.
Since the alignment is performed with 1a and 31b, it is not necessary to move the LCD substrate ST after alignment until the inspection starts. It should be noted that the present invention is not limited to the above-mentioned embodiments, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0077]

According to the first aspect of the present invention, the ratio of the waiting time of the inspection mechanism can be reduced as compared with the time when the inspection mechanism actually inspects the object to be inspected before the inspection. It is possible to increase the number of inspected objects to be inspected per unit time.

According to the second aspect of the present invention, it is possible to further shorten the time for setting the object to be inspected before the inspection at the substrate inspection position, and therefore the object to be inspected before the inspection is actually made by the inspection mechanism. The ratio of the waiting time of the inspection mechanism can be reduced as compared with the inspection time, and the number of inspection processed sheets of the inspection object per unit time can be increased.

According to the third aspect of the present invention, the ratio of the waiting time of the inspection mechanism can be reduced as compared with the time during which the inspection object is actually inspected by the inspection mechanism. It is possible to maintain the alignment state of the inspection object with high accuracy.

According to the fourth aspect of the present invention, by moving each of the mounting tables independently of each other, it is possible to enhance the work efficiency and perform the alignment with high accuracy for each of the mounting tables.

According to the fifth aspect of the present invention, by coordinating the alignment work and the movement to the inspection area,
Work efficiency can be further improved. According to the sixth aspect of the present invention, it is possible to reliably perform the work of taking out the test object after the test and the work of supplying the new test object before the test.

According to the seventh aspect of the present invention, the object to be inspected can be transferred between the object to be inspected by the object inspecting means and the respective delivery positions, and the operation of transferring the object to be inspected can be performed. Can be streamlined.

[Brief description of drawings]

FIG. 1 is a plan view showing a schematic configuration of an entire probe device according to an embodiment of the present invention.

FIG. 2 is a side view showing an LCD substrate storage section and a transfer section of the probe device shown in FIG.

FIG. 3 is a vertical cross-sectional view showing an inspection area of the probe device shown in FIG.

FIG. 4 is a schematic configuration diagram showing a connection state of a controller of the probe device shown in FIG.

5 shows the operation of the probe device shown in FIG. 1, (A)
Is a plan view showing a state where the pre-inspection substrate is supplied to the left mounting table that has been moved to the substrate transfer position during the inspection of the substrate on the right mounting table. The top view which shows the state in which the board | substrate before inspection on a left mounting base is aligned.

6 shows the operation of the probe device shown in FIG. 1, (A)
Is a plan view showing a state where the substrate on the left mounting table is aligned and waiting, and the right mounting table is unloading the substrate after inspection at the substrate transfer position, (B) is inspecting the substrate on the left mounting table FIG. 6 is a plan view showing a state where the right mounting table is waiting at the substrate transfer position.

7 shows the operation of the probe device shown in FIG. 1, (A)
Is a plan view showing a state where the substrate is loaded on the right mounting table during the inspection of the substrate on the left mounting table, and (B) is a substrate on the right mounting table being aligned during the inspection of the substrate on the left mounting table. The top view which shows a state.

FIG. 8 is a plan view showing a schematic configuration of an entire probe device according to another embodiment of the present invention.

9 shows the operation of the probe device shown in FIG. 8, (A)
Is a plan view showing a state in which the pre-inspection substrate on the left mounting table is aligned during the inspection of the substrate on the right mounting table, and (B) is the inspection on the right mounting table during the inspection of the substrate on the left mounting table. The top view which shows the state in which the front board | substrate is aligned.

FIG. 10 is a plan view showing a schematic configuration of the entire probe apparatus according to still another embodiment of the present invention.

[Explanation of symbols]

2 ... LCD substrate storage section (inspection object storage section), 4 ... Transfer section (inspection object transfer means), 20 ... Inspection mechanism, 21, 21
a, 21b ... inspection area, 22a ... left alignment area,
22b ... right alignment area, 23a ... left stage, 2
3b ... right stage, 27a, 27b, 38a, 38b ...
Camera (alignment optical system), 31a, 31b ... Mounting table, 51 ... Controller (control means), 55 ... Tester, 56 ... Display, 57 ... Camera, 82 ... Inspection mechanism moving means, 86a, 86b ... Rotation shaft, ST ...
LCD substrate (inspection object).

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location G01R 31/28

Claims (7)

[Claims] 1. An inspection mechanism for inspecting a plate-shaped object to be inspected, which is arranged in an inspection area, and a first inspection object arranged to sandwich the inspection area.
And a second alignment region, first and second mounting bases on which the object to be inspected is removably mounted, and mounting base moving means for moving the first and second mounting bases in a horizontal plane, By the moving means, the first mounting table can be moved between the first alignment area and the inspection area, and the second mounting table can be moved to the second area.
Movable between an alignment region and the inspection region, a control unit for operating the moving unit, and the control unit that are provided on the first and second mounting bases by the inspection mechanism. A plate-shaped inspection device for an inspection object, comprising: operating the moving means so that inspection of the inspection object is alternately performed in the inspection region. 2. A movable between first and second inspection areas,
An inspection mechanism for inspecting a plate-shaped inspected object, an inspection mechanism moving means for moving the inspection mechanism between the first and second inspection regions, and a first and second inspection regions sandwiched between the inspection mechanism moving means. The first and second alignment areas of the inspected object, the first and second placement tables on which the inspected object is detachably placed, and the first and second placement tables on the first and second placement tables. The object to be inspected is inspected in the first and second inspection areas, respectively, a mounting table moving means for moving the first and second mounting tables in a horizontal plane, and the mounting table moving means, The first mounting table is movable between the first alignment area and the first inspection area, and the second mounting table is movable between the second alignment area and the second inspection area. That there are both moving hands The control means for operating the control means and the control means perform the inspection of the inspection object on the first and second mounting tables by the inspection mechanism alternately in the first and second inspection areas, respectively. Thus, the above-mentioned both moving means are operated, The inspection device of the plate-shaped inspected object characterized by the above-mentioned. 3. Movable between first and second inspection areas,
An inspection mechanism for inspecting a plate-shaped inspected object, and the first
And the second inspection region respectively function as first and second alignment regions of the inspected body, moving means for moving the inspection mechanism between the first and second inspection regions, and the inspected region. A first and a second mounting table on which a body is removably mounted, and the object to be inspected on the first and second mounting table are respectively inspected in the first and second inspection areas; The control means for operating the moving means and the control means are configured so that the inspection of the object to be inspected on the first and second mounting tables by the inspection mechanism is performed by the first and second, respectively.
An inspection apparatus for a plate-shaped object to be inspected, comprising: operating the moving means so as to be alternately performed in an inspection area. 4. The plate-shaped inspection device for an object to be inspected according to claim 1, wherein the first and second mounting tables are movable independently of each other. 5. The control means moves the first and second mounting tables in the first and second alignment regions, respectively, to align the object to be inspected in a predetermined state with respect to the inspection mechanism, The plate-shaped inspection device for an object to be inspected according to any one of claims 1, 2 and 4, wherein the mounting table moving means is operated. 6. The first control unit is configured to inspect the object to be inspected on one of the first and second mounting tables while the first unit is inspected.
And controlling the operation of taking out the inspected object after inspection in the corresponding alignment region from the other of the second mounting tables and setting the newly supplied inspected object before the inspection on the other mounting table. The plate-shaped inspection device for an object to be inspected according to any one of claims 1 to 5. 7. An inspected body accommodating portion for accommodating a plurality of inspected inspected bodies, the inspected body accommodating portion disposed between the inspected body accommodating portion and the first and second alignment regions. 7. A plate-shaped inspection object according to any one of claims 1 to 6, further comprising: an inspection object transferring unit that transfers the inspection object between the first and second alignment regions. Body inspection device.