JPH11317437A - Device for delivering and receiving plate-like body to be treated and treating device using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately detect a plate-like body to be treated by using reflected light from the end face of the body, without hindering the movement of a hand by attaching a sensor which detects the body to the end section of the hand or the end section of a holder supported by a driving mechanism, in such a way that the sensor is able to approach and retreat from the body. SOLUTION: In a substrate detecting process, a transferring device 12 is moved to the front of a cassette 20, and then, a supporting member 54 is rotated together with a hand 36 by means of a θ-driving mechanism 44 so that a sensor 58 comes to the cassette 20 side. Then, after a holder 56 is manually displaced to a first position so that the sensor 58 is directed to the cassette 20, the holder 56 and sensor 58 are moved in the vertical direction together with the hand 36 by means of a Z-moving mechanism 46. While the sensor 58 is being moved in the vertical direction, the sensor 58 directs a light beam to the inside of the cassette 20 and outputs an electrical signal responding to the received quantity of light, upon receiving the light beam form the cassette 20. The output signal is used as a signal for discriminating the presence of substrates by each housing state.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an apparatus for transferring a flat object such as a liquid crystal substrate and a semiconductor wafer, and a processing apparatus using the same.

[0002]

2. Description of the Related Art In a manufacturing process of a liquid crystal display (LCD), in a state of various liquid crystal substrates such as a glass substrate, a TFT substrate, and a completed liquid crystal display panel, processing such as application, exposure, and etching of photoresist, and ,
Various processes such as an electrical or optical inspection (test) such as an energization test and a lighting test are performed.

[0003] For example, this type of inspection apparatus generally includes a cassette installation section (installation station) for installing a liquid crystal substrate storage cassette, and an inspection section (inspection station) in which an inspection stage used for inspection of liquid crystal substrates is arranged. And a loader / unloader section (transfer station) for transferring liquid crystal substrates. The transfer apparatus such as a transfer robot arranged in the loader / unloader section transfers the liquid crystal substrates to the cassette setting section and the inspection section.

[0004] The cassette has a plurality of storage stages (storage portions) for each liquid crystal substrate therein so as to store a plurality of liquid crystal substrates in a state of being arranged in parallel. It is confirmed whether or not each of the storage stages is disposed (detection of the liquid crystal substrate). The detection of the liquid crystal substrate is performed by moving a sensor using light up and down with respect to the cassette.

As an inspection apparatus provided with a sensor for detecting a liquid crystal substrate in a cassette, the sensor is arranged in an elevating mechanism provided in a cassette installation portion, and is embedded in the tip end surface of a hand for receiving and supporting the liquid crystal substrate. Some are embedded in the distal end surface of a supporting member that receives the hand so as to be movable toward and away from the cassette.

[0006]

However, an apparatus using an elevating mechanism is expensive because an elevating mechanism for a sensor is required in addition to a transfer device having a hand. In addition, although the thickness of the liquid crystal substrate is generally small, the distance between the liquid crystal substrate and the sensor in the cassette is large, so the reflected light from the end surface (light reflecting surface) of the liquid crystal substrate is checked for the presence of the liquid crystal substrate. And even if used, the presence or absence of a liquid crystal substrate cannot be accurately confirmed. In addition, since the distance between the liquid crystal substrate and the sensor is large, the amount of light incident on the sensor is greatly affected by the shape (processing state) of the end face of the liquid crystal substrate, and thus the amount of light reflected from the end face of one or more liquid crystal substrates. As a result, the detection of the presence or absence of the liquid crystal substrate becomes inaccurate.

In the device in which the sensor is arranged on the distal end surface of the hand, the size of the distal end surface of the hand, particularly the thickness itself, is small. The amount of light incident on the liquid crystal substrate is greatly affected by the shape (processing state) of the end face of the liquid crystal substrate and, consequently, the amount of light reflected from the end face of the liquid crystal substrate. As a result, in this device, the reflected light from the end face of the liquid crystal substrate cannot be used to confirm the presence or absence of the liquid crystal substrate, and even if used,
The presence or absence of a liquid crystal substrate cannot be accurately confirmed.

In an apparatus in which a sensor is arranged on the front end surface of a supporting member for receiving a hand, there is a limitation on reducing the distance between the liquid crystal substrate in the cassette and the sensor. The reflected light cannot be used for detecting the liquid crystal substrate, and even if used, the liquid crystal substrate cannot be detected accurately. In addition, since the distance between the liquid crystal substrate and the sensor is large, the amount of light incident on the sensor depends on the shape of the end face of the liquid crystal substrate (processing state), and hence
It is greatly affected by the amount of light reflected from the end face of the liquid crystal substrate, and as a result, the detection of the presence or absence of the liquid crystal substrate becomes inaccurate.

The above problems occur not only in inspection processing for inspecting the quality of a liquid crystal substrate, but also in a transfer apparatus used for processing such as application of a photoresist, exposure, etching, encapsulation of liquid crystal, and the like on a glass substrate. .

An object of the present invention is to accurately detect an object to be processed using reflected light from an end face of a flat object to be processed without hindering movement of a hand.

[0011]

A delivery device according to the present invention comprises:
A hand for receiving a flat object to be received in a receiving portion parallel to the object, and moving the hand in a first direction perpendicular to the receiving portion and a second direction parallel to the receiving portion; A drive mechanism for moving around an axis perpendicular to the section, and a sensor for sensing an object to be processed, which is disposed at a predetermined position. The sensor is arranged at an end of a holder supported by the hand or the driving mechanism so as to be able to approach and retreat to the object.

When the object is detected, the sensor is continuously or intermittently moved in the direction in which the storage stages of the object are arranged in a state facing the cassette. Meanwhile, the sensor directs light into the object to be processed and receives light reflected from an end surface of the object to be processed. The output signal of the sensor is used as a signal in the determination circuit to determine the presence or absence of the object to be processed for each storage stage.

According to the present invention, the sensor is disposed at the end of the holder supported by the hand or the driving mechanism so as to be able to approach and retreat to the object to be processed. It is possible to use a sensor having a light receiving surface of a size that is not affected by the size of the object, and to set the distance between the sensor and the object to be processed to a small value that is not greatly affected by the processing state of the end face of the object when detecting the object. Despite the fact that the object to be processed can be accurately detected by using the reflected light from the end surface of the object to be processed and the distance between the sensor and the object to be processed can be reduced, The sensor and the holder can be moved to a position where they do not hinder the rotation and movement of the hand when the object to be processed is transferred.

At the end opposite to the sensor, the holder may be supported by the hand or the drive mechanism so as to be angularly rotatable around an axis perpendicular to the receiving portion. By rotating the holder angularly, the sensor approaches the object when the object is detected, and moves the sensor to a position where the hand does not hinder the rotation and movement of the object when the object is delivered by the hand. Can be rotated.

Alternatively, the holding tool can be supported by the hand or the driving mechanism so as to be movable in the second direction. Also by moving the holder in the second direction, the sensor approaches the object when the object is detected, and the sensor prevents the hand from rotating and moving when the object is transferred by the hand. It can be retracted to a position where it does not become too.

[0016] The holder may be arranged at a position corresponding to a rear end side of the hand. In addition, the holding tool,
It may be moved manually or by a moving mechanism. Further, the sensor and the holder can be moved in the first direction together with the hand by the driving mechanism, and can be moved around an axis perpendicular to the receiving portion.

[0017] A processing apparatus using the above-described transfer device includes an arrangement section for arranging a plurality of flat plate-shaped objects in parallel at an interval in one direction, a processing section for processing the objects, And a loader / unloader unit for transferring the object to be processed to / from the processing unit, and the transfer device is disposed in the loader / unloader unit.

[0018] The plurality of objects to be processed can be stored in a cassette, and the cassette can be arranged in the arrangement portion in that state. The processing unit may be an inspection unit that inspects the object to be processed or a processing unit that processes the object to be processed.

The hand and the holder can be further moved by the driving mechanism in a third direction intersecting the first and second directions.

[0020]

1 to 6, an inspection apparatus 10 includes a liquid crystal panel, that is, a liquid crystal display panel (LC).
D) It is used for inspection of a rectangular liquid crystal substrate. The liquid crystal substrate is a glass substrate for an LCD, in particular, a substrate on which an electric circuit including a TFT (thin film transistor) is formed, and is a multiple substrate having a plurality of substrate portions for the LCD.

The inspection device 10 includes a delivery device 12 for delivering substrates, a cassette installation unit (installation station) 14 for storing untested substrates and inspected substrates,
It includes a loader / unloader section (transfer station) 16 in which the transfer device 12 is arranged, and an inspection section (inspection station) 18 for inspecting the substrate. Delivery device 1
2 transports the substrate from the cassette installation unit 14 to the inspection unit 18 and vice versa.

In the illustrated example, the cassette setting section 14, the loader / unloader section 16 and the inspection section 18 are formed in the front-rear direction so that the loader / unloader section 16 is located between the cassette setting section 14 and the inspection section 18. However, they may be formed in the left-right direction.

A plurality of cassettes 20 for storing substrates are installed in the cassette installation section 14. Each cassette 20
A plurality of storage steps (storage sections) are formed in the housing opened on the side of the loader / unloader section 16 so as to receive the substrate horizontally and support it in that state.

The inspection unit 18 includes a pre-alignment device 2
2, a probe unit (probe card) 24 used to energize the substrate, and an inspection stage 26 for performing precise alignment and pressing of the substrate with respect to the probe unit 24. The probe unit 24 and the inspection stage 26 are opposed to each other at an interval in the up-down direction, and the pre-alignment device 22 is disposed at a position separated in the left-right direction from the arrangement position of the probe unit 24 and the inspection stage 26.

The pre-alignment device 22 is a device for performing rough alignment of the position of the substrate with respect to the transfer device 12, and a pair of long elongate portions where two adjacent edges of the substrate, which is a plate-shaped object to be processed, abut. It has a stopper 28. The stoppers 28 are supported by appropriate means such as a frame of the inspection device 10 so as to be orthogonal to each other.

The probe unit 24 has a plurality of probe blocks 30 mounted on a rectangular block mounting plate 32. In each probe block 30, a plurality of probes used for energizing the substrate are assembled in parallel to the block. The mounting plate 32 has a rectangular opening 34 similar to the substrate at the center. In the illustrated example, a plurality of probe blocks 30 are attached to each of three edges of the edges forming the opening 34 of the attachment plate 32.

The inspection stage 26 receives the substrate in a horizontal state on the table, moves the table in this state by a moving mechanism, adjusts the position of the table with respect to the probe unit 24, and moves the substrate to the probe of the probe unit 24. Press. The table has a function of a work table that releasably adsorbs the substrate to the upper surface, like a vacuum chuck.

The table is moved by a moving mechanism in the right and left directions (X direction, which is the left and right direction in FIG. 1) and the front and rear direction (Y
In FIG. 1, it is displaced in the vertical direction (in FIG. 1, vertical direction), displaced in the vertical direction (the direction perpendicular to the supported substrate, Z direction), and angularly around the θ axis extending in the Z direction. Is rotated. Therefore, the position of the table and the substrate on the table in the X, Y, and Z directions with respect to the probe unit 24 by the stage are adjusted, and the position around the θ axis is adjusted.

The transfer device 12 is arranged in a loader / unloader section 16. The transfer device 12 is a transfer robot that transfers a substrate to and from the cassette 20 and the inspection stage 26 and that performs pre-alignment of the substrate by the pre-alignment device 22.

The transfer device 12 includes a pair of hands 36 each for transferring a substrate, and
And a driving mechanism 38 that moves three-dimensionally in the direction and rotates around the θ-axis. One hand 36 is used for delivering an uninspected board, and the other hand 36 is used for delivering an inspected board.

Each hand 36 is in the form of a flat fork, and has a receiving portion (receiving surface) for receiving a substrate in a horizontal state, and a plurality of openings formed in the receiving portion for releasably vacuum-sucking the substrate. And a suction hole. Both hands 36 are spaced apart in the vertical direction.

The drive mechanism 38 moves the pair of rails 40 in parallel with the loader / unloader section 16 at intervals in the X direction.
The Y movement mechanism 42 for moving the hand 36 in the Y direction is arranged on the rail 40, and the θ movement mechanism 44 for rotating the hand 36 around the θ axis is arranged on the Y movement mechanism 42. Then, a Z movement mechanism 46 for moving the hand 36 in the Z direction is disposed on the θ movement mechanism 44, and an X movement mechanism 48 for separately moving the hands 36 in the X direction is disposed on the Z movement mechanism 46.

The Y moving mechanism 42 moves the Y
The Y slider has a θ moving mechanism 4
4 is supported. In the illustrated example, the Y-slider is reciprocated in the Y-direction by a screw rod 50 extending in the Y-direction or a nut arranged on the Y-slider and screwed to the screw rod 50 being rotated by an electric motor (not shown). But Y
The slider may be reciprocated in the Y direction by a linear motor.

The θ moving mechanism includes a turntable that rotates around the θ axis and a drive source that rotates the turntable.
The turntable supports a Z movement mechanism 46.

The Z moving mechanism 46 is incorporated in a pair of columnar members extending upward from the θ moving mechanism 44, and moves a Z slider supported substantially horizontally by both column members in the vertical direction.

The X moving mechanism 48 is incorporated in a pair of beam members supported in a cantilever shape so as to extend substantially horizontally on the Z slider of the Z moving mechanism 46. Is moved in the X direction.

Each hand 36 is supported by the X slider 52 in a cantilever shape so as to extend substantially horizontally from the X slider 52 in the X direction. The two hands 36 are simultaneously moved in the Y and Z directions and simultaneously rotated about the θ axis by the drive mechanism 38, but are separately moved in the X direction.

The transfer device 12 also includes a drive mechanism 38
Elongate holder 56 rotatably supported by a support member 54 provided at the base member so as to be angularly rotatable about an axis extending in the vertical direction.
And a sensor 58 attached to the holder 56.
The support member 54 is attached to the beam-like member of the X moving mechanism 48 or the Z slider of the Z drive mechanism 46 at both ends on the rear end side of the hand 36.

The holding member 56 is moved from the supporting member 54 to the hand 3.
6 to a first position extending to the opposite side (rearward) (FIGS. 2 to 4).
Is indicated by a solid line) and Y is perpendicular to the direction in which the hand 36 extends.
And cantilevered about an axis extending in a vertical direction so that it can be manually moved to a second position extending in the vertical direction (indicated by dashed lines in FIGS. 2 and 3). One end is attached to the support member 54.

The sensor 58 is an optical sensor having a light emitter and a light receiver. When the holder 56 is displaced to the first position, the light from the light emitter is directed to the end face of the substrate in the cassette 20. Further, it is attached to the other end of the holder 56 so that the reflected light enters the light receiver.

The length of the holder 56 is such that the holder 56 and the sensor 58 are slightly separated from the cassette 20 when the holder 56 is moved to the first position. However, the length dimension of the holder 56 may be such that the tip of the holder 56 and the sensor 58 are located in the cassette 20 when the holder 56 is moved to the first position.

The hand 36 is normally retracted to a standby position substantially at the center of the load / unload section in the X direction as shown in FIGS. The holder 56 is displaced to a second position extending in the Y direction as indicated by a broken line in FIGS. 2 and 3 except when the substrate is detected.

When a new cassette 20 is placed in the cassette installation section 14 in the above state, the transfer device 12 executes a substrate detection step (substrate detection operation) for detecting the presence or absence of a substrate in the cassette 20.

In the substrate detecting step, as shown in FIGS. 2 to 4, first, the transfer device 12 is moved in front of the cassette 20, and then the support member 54 is driven by θ so that the sensor 58 is on the cassette 20 side. Hand 3 by mechanism 44
6 and then the holder 56 is manually displaced to the first position shown by the solid line in FIGS. 2 to 4 so that the sensor 58 faces the cassette 20, and then the holder 56 and the sensor 58 are moved to the Z movement mechanism 46. Is moved at least once together with the hand 36 in the vertical direction (the direction in which the substrates are arranged in the cassette, that is, the direction in which the storage stages in the cassette are arranged).

While the sensor 58 is moved up and down, the sensor 58 directs the light beam into the cassette 20 and receives the light beam from inside the cassette 20 and outputs an electric signal corresponding to the amount of received light. The output signal of the sensor 58 is used in a processing circuit (not shown) as a signal for determining the presence or absence of a substrate for each storage stage. The presence or absence of the substrate is stored in the storage circuit for each storage stage of the cassette 20.

The substrate detecting step is performed for each newly installed cassette. However, after detecting the substrate in one cassette 20, the holder 56 is moved to a second position where it extends in the Y direction, and then the holder 56 and the sensor 5 are moved.
8 before the next cassette 20 and then the holder 5
Preferably, 6 is moved to a first position where it extends in the X direction. Thereby, even if the holding tool 56 has a length dimension protruding into the cassette, the holding tool 56 and the sensor 58 do not collide with the cassette 20,
It can be moved to the next cassette 20 position.

When the presence or absence of a substrate in all newly installed cassettes is confirmed, the transfer device 12
Uninspected substrates and inspected substrates for cassette 2
A first delivery step (first delivery work) to be delivered to 0 is performed. This first delivery step is executed after the holder 56 is first manually displaced to the second position shown by the broken line in FIGS.

In the first delivery step, the holder 56
After being displaced to the second position, as shown in FIGS. 5 and 6, both hands 36 are first adjusted to a predetermined position with respect to a predetermined cassette 20 by a suitable moving mechanism 42, 44 or 46, and The hand 36 moves the cassette 2 by the θ moving mechanism 44.
Pointed to zero.

Next, as shown in FIGS. 5 and 6, the hand 36 is moved in front of the predetermined cassette 20 by the Y movement mechanism 42, and the cassette 20 is moved by the θ movement mechanism 44.
The cassette 20 is adjusted to a predetermined height position with respect to a predetermined storage stage of the cassette 20 by the Z moving mechanism 46, is moved in the X direction by the X moving mechanism 48, and is slightly moved in the Z direction by the Z moving mechanism 46. Is done.

When the inspected substrate is not received by the other hand 36, the one hand 36 is appropriately moved so that the uninspected substrate in the cassette 20 is received by the one hand 36 in the first transfer step. Moving mechanism 42, 4
The receiving step of moving by 4, 46 or 48 is executed by the transfer device 12.

However, the inspected substrate is not
6, in the first delivery step, the other hand 36 is used in addition to the above-described receiving step.
The other hand 36 is moved to an appropriate moving mechanism 42, 44, 4 so that the inspected substrate received by the other hand is transferred to the cassette 20.
The transfer step of moving by 6 or 48 is performed by the transfer device 12. In this case, any of the receiving step and the delivering step may be performed first.

When the cassette accommodating the uninspected substrate to be received by one hand 36 is the same as the cassette to which the inspected substrate of the other hand 36 is to be transferred, the hand 36 is not moved in the Y direction. . However, if the cassette to be delivered is different, the hand 36 is
2 to move in the Y direction according to the cassette 20 to be delivered.

When receiving an uninspected substrate, one hand 36 is adjusted in the Y direction position and the position around the θ axis with respect to the cassette 20 by the Y and θ moving mechanisms 42 and 44, and is moved by the Z moving mechanism 46. In a state where the cassette 20 is adjusted to a position slightly lower than a predetermined storage level, the X moving mechanism 48 moves the cassette 20 from the position shown by the solid line in FIGS. It is advanced to the position shown by the dashed line, and then raised by the Z moving mechanism 46 to a position slightly higher than the storage stage, and then X
The moving mechanism 48 retreats to the original position.

When transferring the inspected substrate, the other hand 36 is adjusted in position in the Y direction and around the θ axis with respect to the cassette 20 by the Y and θ moving mechanisms 42 and 44, and is moved by the Z moving mechanism 46. In a state where the cassette 20 is adjusted to a height slightly higher than a predetermined storage level, the X moving mechanism 48 moves the cassette 20 from the position shown by the solid line in FIGS. It is advanced to the position shown by the dashed line, then lowered by the Z moving mechanism 46 to a position slightly lower than the storage stage, and then X
The moving mechanism 48 retreats to the original position.

When the transfer of the substrate to the cassette 20 is completed, the transfer device 12 is moved by the Y moving mechanism 42 to a position before the pre-alignment device 22, and the pre-alignment process is performed by the pre-alignment device 22 to roughly align the untested substrate. (Pre-alignment work).

In this pre-alignment step, the transfer device 12 firstly
6 toward the pre-alignment device 22 and Z
The height of the hand 36 is adjusted to a height corresponding to the stopper 28 by the moving mechanism 46.

Next, the transfer device 12 moves the hand 36 supporting the untested substrate toward the pre-alignment device 22 by the X moving mechanism 48,
8 moves the hand 36 slightly further in the X direction. As a result, the substrate 12 on the hand 36 is brought into contact with the stopper 28 at its two adjacent edges,
, Whereby coarse adjustment of the position of the substrate 12 with respect to the hand 36 is performed. Thereafter, the hand 36 is moved backward by the X moving mechanism 48.

The timing at which the hand 36 is turned to the side opposite to the cassette 20 is from when the holder 56 is displaced to the second position to when the transfer device 12 is moved before the pre-alignment device 22. May be between.

When the pre-alignment step is completed, the transfer device 12 is moved in front of the inspection stage 26 by the Y moving mechanism 42 with the hand 36 retracted, and then the transfer device 12 removes the substrate placed on the inspection stage 26. A movement standby step of waiting before the inspection stage until the inspection is completed is executed.

When the inspection of the substrate placed on the inspection stage 26 is completed, the delivery device 12 transfers the inspected substrate and the uninspected substrate to the inspection stage 26 in the second delivery step (second delivery process). Delivery work).

When the substrate is not placed on the inspection stage 26, and when the inspection of the substrate on the inspection stage 26 is completed when the transfer device 12 is moved in front of the inspection stage 26, The delivery process 2 is executed immediately after the delivery device 12 is moved before the inspection stage 26.

In the second transfer step, the transfer device 12 executes a receiving step of receiving the inspected substrate from the inspection stage 26 and a transfer step of transferring the untested substrate to the inspection stage 26 in that order. As a result, the inspected board is received by the other hand 36, and the untested board is passed from one hand 36 to the inspection stage 26.

When transferring the substrate to the inspection stage 26, both hands 36 use the Y and θ moving mechanisms 4 in the same manner as when transferring the substrate to the cassette 20.
2 and 44, the position in the Y direction and the position around the θ axis with respect to the inspection stage 26 are adjusted, and the X movement mechanism 48 is adjusted to a predetermined height position with respect to the inspection stage 26 by the Z movement mechanism 46. , And is moved to a predetermined height position by the Z moving mechanism 46, and then retreated to the original position by the X moving mechanism 48.

After the second delivery step, inspection stage 2
6 performs precise alignment of the substrate with respect to the probe unit 24 and then presses the substrate against the probe unit 24. In this state, the substrate is energized, and the substrate is inspected for pass / fail.

While the board is being inspected by the inspection section, the transfer device 12 is moved to a position in front of the predetermined cassette 20 and then returns to each of the above-described steps, that is, a new untested board and a new board that has been inspected. A first transfer step of transferring the substrate to the cassette 20, a pre-alignment step of moving the substrate in front of the pre-alignment device 22 to perform a rough alignment of the substrate, and a movement of being moved in front of the inspection stage 26 and waiting. And a movement waiting step.

The above steps except the substrate detecting step are executed for all cassettes and substrates. The quality of the substrate is stored in the storage circuit for each cassette and storage stage in which the substrate is finally stored.

According to the inspection device 10 and the delivery device,
At the position corresponding to the rear end of the hand 36, the cassette 2
Since the sensor 58 is arranged at the end of the holder 56 supported by the hand 36 or the drive mechanism 38 so as to be able to approach and retreat from 0, the sensor 58 having a light receiving surface having a large size (particularly, a width) is used. In spite of this, the distance between the sensor 58 and the substrate in the cassette 20 can be reduced when detecting the substrate, so that the end surface of the substrate is not affected by the shape (processing state) of the substrate. The substrate can be accurately detected using the reflected light from the substrate.

Further, since the sensor 58 is arranged at the other end of the holder 56 coupled at one end to the support member 54 so as to be selectively displaceable to the first and second positions, the period during which the substrate detecting step is performed is reduced. During a period other than the above, the holder 58 is displaced to the second position, so that the sensor 58 and the cassette 20 are displaced.
The holder 56 and the sensor 58 do not hinder the movement of the transfer device 12 and thus the hand 36, though the distance between the transfer device 12 and the substrate 36 can be reduced.

Instead of manually displacing the holder 56 to the first and second positions manually, the holder may be selectively displaced to the first and second positions by a moving mechanism. Further, instead of disposing the sensor 58 on the holder 56 that can be selectively displaced to the first and second positions, the sensor may be disposed on the holder that can be moved in the X direction manually or by a moving mechanism. .

Referring to FIGS. 7 and 8, the delivery device 60 has a long holding member 62 arranged on the supporting member 54 so as to be able to reciprocate in the X direction. Holder 62 in X direction
Can be changed manually or by a moving mechanism. The sensor 58 is arranged at an end of the holder 62.

According to the transfer device 60, in the case of the cassette 20 for a small substrate indicated by a solid line in FIGS. 7 and 8, the holder 62 is largely protruded, and the large substrate indicated by a two-dot chain line in FIGS. In the case of the cassette 20 for a substrate, the holder 62 can be slightly protruded in the case of a substrate, and the holder 62 can be retracted as shown by a broken line in FIGS.

The present invention is applicable not only to a device for transferring a substrate stored horizontally in a cassette, but also to a device for transferring a substrate stored in a state vertical to the cassette or in an inclined state having an angle with respect to the horizontal (oblique state). The present invention can be applied not only to a transfer device that transfers a substrate in a horizontal state to a hand, but also to a transfer device that transfers a substrate in an oblique state. That is, the present invention can be applied to an apparatus that transfers a substrate in any of a horizontal and an oblique state, and can also be applied to an apparatus that conveys a substrate in any of a horizontal and an oblique state.

Further, the present invention can be applied not only to an inspection device and a delivery device for a plurality of liquid crystal substrates, but also to an inspection device and a delivery device for a single liquid crystal substrate.

Further, the present invention can be applied not only to a processing apparatus for inspecting a liquid crystal substrate, but also to a processing apparatus for manufacturing a liquid crystal substrate, and to inspect other flat objects to be processed such as semiconductor wafers. It can also be applied to a processing device for manufacturing or manufacturing.

Furthermore, the present invention can be applied not only to an apparatus for handling an object stored in a transportable cassette, but also to an apparatus for handling an object disposed on a storage stage provided in a processing apparatus. In this case, the cassette installation section in the above embodiment can be used as an arrangement section for arranging the object.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of an inspection device provided with a delivery device according to the present invention.

FIG. 2 is a perspective view showing an embodiment of the delivery device according to the present invention in relation to a cassette.

FIG. 3 is a plan view of FIG. 2;

FIG. 4 is a side view of FIG. 2;

FIG. 5 is a plan view of a transfer device and a vicinity of the cassette when transferring substrates to and from the cassette.

FIG. 6 is a side view of FIG. 5;

FIG. 7 is a plan view showing another embodiment of the delivery device according to the present invention in relation to a cassette.

FIG. 8 is a side view of FIG. 7;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12, 60 Delivery apparatus 14 Cassette installation part 16 Loader / unloader part 18 Inspection part 20 Cassette 22 Pre-alignment mechanism 24 Probe unit 26 Inspection stage 36 Hand of delivery apparatus 38 Delivery mechanism of delivery apparatus 40 Guide rail 42 Y movement mechanism 44 θ moving mechanism 46 Z moving mechanism 48 X moving mechanism 50 Screw rod 52 X slider 54 Support member 56, 62 Holder 58 Sensor

Claims (8)

[Claims] 1. A hand for receiving a flat object to be processed in a receiving part parallel to the object, and a hand in a first direction perpendicular to the receiving part and in a second direction parallel to the receiving part. A drive mechanism for moving the movable portion around an axis perpendicular to the receiving portion, and a sensor for sensing an object to be processed disposed at a predetermined position, wherein the sensor approaches and approaches the object to be processed. An apparatus for delivering a flat object to be processed, the apparatus being disposed at an end of a holder supported by the hand or the driving mechanism so as to be able to retreat. 2. The hand or the drive mechanism at an end opposite to the sensor and rotatably angularly about an axis perpendicular to the receiving portion. 2. The delivery device according to claim 1. 3. The delivery device according to claim 1, wherein the holding tool is supported by the hand or the driving mechanism so as to be movable in the second direction. 4. The delivery device according to claim 1, wherein the holding tool is arranged at a position corresponding to a rear end side of the hand. 5. The sensor and the holder are moved in the first direction together with the hand by the driving mechanism, and are moved around an axis perpendicular to the receiving portion.
The delivery device according to claim 1. 6. An arrangement section for arranging a plurality of plate-shaped objects in parallel at intervals in one direction, a processing section for processing the object, and an object for the arrangement section and the processing section. And a loader / unloader unit in which a transfer device that transfers the data is disposed, wherein the transfer device is the transfer device according to any one of claims 1 to 5.
Substrate processing equipment. 7. The processing apparatus according to claim 6, wherein the plurality of objects to be processed are arranged in the arrangement section in a state of being housed in a cassette. 8. The processing apparatus according to claim 6, wherein the processing unit is an inspection unit that inspects the object to be processed or a processing unit that processes the object to be processed.