JP2575013B2 - Liquid crystal display inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a liquid crystal display inspection apparatus.

(Prior Art) Recently, liquid crystal televisions have become widespread, and there is a demand for the development of automation of tests in a mass production process of the televisions. The present inventor has developed a probe device to address this demand.That is, a method for measuring the electrical characteristics of a liquid crystal panel formed on a glass substrate of an object to be measured, for example, involves mounting a glass substrate on a measurement stage. After placing it and positioning it accurately, the needle attached to the probe card is brought into contact with the electrodes of the panel formed on this glass substrate, and the electrical characteristics are measured with a tester connected to the probe card in this contact state. doing. This probe card is, for example,
It is well known in, for example, Japanese Patent Publication No. 530.

(Problems to be Solved by the Invention) In addition, high integration of ICs has been remarkably developed with technological innovation, and a technique for measuring an IC made by this technique is also required. Such high integration means that the number of terminals constituting the IC increases, and the number of accommodation elements increases by one.
The number of electrode pads per chip increases. This increase in the number of electrode pads requires an increase in the number of probe needles.

However, in order to attach the probe needles to the printed circuit board, the skilled person takes a long time to make each one. This operation becomes more difficult as the number of probe needles increases. This makes it difficult to manufacture the probe device in a state where the interval between the needles is reduced and the insulating state is maintained. Therefore, a printed circuit board having more probe needles is more expensive. Also, this probe needle is fragile, and once broken, even if other probe needles are normal, this printed circuit board can not be used, repair requires considerable time and advanced skill, and there is no versatility, It is extremely inconvenient to operate and suffers a great deal of damage.

The present invention has been made in order to solve the above-mentioned problems, and it is possible to manufacture a probe card at a low cost and to quickly respond to a failure of the probe card, etc., and furthermore, the whole apparatus is compact and inexpensive. It is an object of the present invention to provide a liquid crystal display inspection apparatus that can be manufactured.

(Means for Solving the Problems) A liquid crystal display body inspection apparatus according to a first aspect of the present invention includes a cassette mounting table on which a cassette accommodating a plurality of substrates for liquid crystal display bodies is mounted and which can be moved up and down. A drive mechanism for transporting the liquid crystal display substrate from the cassette on the mounting table to the measurement unit by moving the substrate in the X, Y, Z, and θ directions to carry the liquid crystal display substrate in and out of the cassette on the mounting table. A measuring table provided with at least two probe cards having a stylus array arranged above the liquid crystal display substrate on the measuring table and in contact with a plurality of measurement pad portions of the liquid crystal display substrate; And measuring the electrical characteristics of the liquid crystal display substrate with a tester in a state where the stylus rows of the probe cards are in contact with the measurement pads, respectively.

The liquid crystal display inspecting apparatus according to the second invention of the present invention further comprises an ascending / descending cassette mounting table on which a cassette accommodating a plurality of liquid crystal display substrate is mounted, and a liquid crystal display from the cassette on the cassette mounting table. A measurement table including a loading / unloading mechanism for loading / unloading the display substrate, and a drive mechanism for moving in the X, Y, Z, and θ directions and transporting the liquid crystal display substrate to a measurement unit; At least two probe cards having a stylus array arranged above the substrate for the liquid crystal display body on the base and having a plurality of probe pads in contact with the plurality of measurement pad portions of the substrate for the liquid crystal display body, wherein the carry-in / out mechanism is provided. An arm configured to be capable of moving back and forth with respect to the cassette and capable of vacuum-sucking the liquid crystal display substrate, and an arm forming a mounting surface of the measuring table together with the arm and carrying in and out of the liquid crystal display substrate; Sometimes this arm An elevating plate configured to descend, and measuring the electrical characteristics of the liquid crystal display substrate with a tester in a state where the stylus rows of the probe cards are in contact with the measurement pads, respectively. It is assumed that.

(Operation) According to the first aspect of the present invention, when measuring the electrical characteristics of the liquid crystal display substrate, for example, the measuring table moves in the X and Y directions to face the cassette on the cassette mounting table. In this state, when the cassette mounting table moves up and down and stops at a predetermined position, the carrying-in / out mechanism is driven to carry out one liquid crystal display substrate from inside the cassette. Next, when the drive mechanism of the measuring table is driven, the measuring table moves in the X, Y, and θ directions, and conveys the liquid crystal display substrate directly below the probe card. afterwards,
The measuring table moves in the Z direction, the measuring pad portion of the liquid crystal display substrate comes into contact with the stylus row of each probe card, and the measuring pad portion and the tester are electrically connected via the probe card to display the liquid crystal. The electrical characteristics of the body substrate can be measured. When the measurement is completed, the drive mechanism and the transport mechanism of the measuring table are driven to return the liquid crystal display substrate after measurement to the original position of the cassette, and the subsequent liquid crystal display substrates are similarly measured.

Further, according to the second aspect of the present invention, when the liquid crystal display substrate is carried out by the carrying-in / out mechanism in the first aspect, for example, the elevating arm is lowered, and when the arm enters the cassette in this state, the cassette mounting mechanism is mounted. The stage is slightly lowered to place the liquid crystal display substrate on the arm. At this time, the arm vacuum-adsorbs the liquid crystal display substrate, and in this state the arm withdraws from the cassette and returns to the original position of the measuring table, and the elevating arm rises to return to the original state and returns to the original state on the measuring table. Substrate can be fixed.

(Example) Hereinafter, an example of a liquid crystal display body inspection device of the present invention will be described with reference to the drawings. In this embodiment, a liquid crystal panel for image display such as a liquid crystal television (1) is used as an object to be measured.
This is an example of a measurement method in which a glass substrate (2) on which is formed is measured with a large square substrate prober.

The liquid crystal panel (1) has an XY matrix wiring circuit and a liquid crystal display drive circuit formed by TFT technology. Approx. 300 per side around panel (1)
Electrodes are formed.

The device for measuring the electrical characteristics of the panel (1) is measured by, for example, a probe device shown in FIG. 4 (A). A probe card is attached to this probe device at a measuring section. This probe card includes a first probe card (5) and a second probe card (6). As shown in FIG. 1A, the first probe card (5) is, for example, an insulating substrate having a length of 100 mm, a width of 150 mm and a thickness of 3 mm, and a circular hole (7) having a diameter of, for example, 40 mm at the center of the substrate. It is hollowed out. At the periphery of this hole, a probe needle (8) is attached obliquely in the direction of the measuring stage (9) corresponding to the Y direction of the prober, and has a height of, for example, about 10 mm. A printed circuit is wired (10) to the substrate from the probe needle (8) attachment portion. As shown in FIG. 1 (B), the second probe card (6) has, for example, a length of 150 mm and a width of 1 mm.
00mm Insulating substrate with a thickness of 3mm.
The circular hole (11) is cut out. At the periphery of the hole (11), a probe needle (12) is attached obliquely in the direction of the measuring stage (9) corresponding to the X direction of the prober and has a height of, for example, about 15 mm. A printed circuit is wired (13) from the probe needle (12) attachment portion. The probe cards (5) and (6) are set by superimposing the second probe card (6) on the first probe card (5) as shown in FIG. 1 (C). As shown in FIGS. 2A and 2B, the second probe card (6) is screwed and fixed to a probe card socket (16) held by an insert ring (15). A pin (17) connected to the tester is implanted in the probe card socket (16), and the pin (17) is in contact with the wiring (13) of the second probe card (6). The first probe card (5) is held by a protrusion (18) provided on the insert ring (15), and is screwed and fixed there. The protruding portion (18) is mounted on a rotating shaft provided in an insert ring (15) connected to the motor (19), and can be moved up and down by rotating the motor (19). That is, the first probe card (5) can move up and down. The pins (17) of the probe card socket (16) and the wiring (10) of the first probe card (5) are connected by a shield wire (21). This shield wire (2
1) is a length with room.

Further, as shown in FIG. 4A, the prober has a storage section for mounting a cassette (23) storing a glass substrate (2) on a cassette mounting table (24). This cassette (23)
Can set 20 glass substrates (2) in parallel at predetermined intervals. The cassette mounting table (24) has a rotating shaft (2
5) is connected to the motor (26) via the motor (2
It can be moved up and down by the rotation of 6). Cassette (2
3) can hold 2 cassettes and 2 cassette mounting tables (24)
The system is arranged. The loading of the glass substrate (2) from the storage portion of the cassette (23) onto the measurement stage (9) shown in FIG. 4 (B) is performed by a transport mechanism provided on the measurement stage (9). This transport mechanism has a structure of sliding on one axis, and has a configuration in which a plate-like arm (27) moves along a guide formed by a plate-like body (28). The plate arm (27) rotates the belt (30) engaged with the rotating shaft by the rotation of the electric motor (29), and the screw (31) is operated by the rotation of the belt (30) to engage by screwing action. It has a slide mechanism for sliding. Further, the plate-like body (28) can be moved up and down, and as shown in FIG. 4 (C), the slide mechanism is set to a lower state so as not to damage the glass substrate (2) during operation, and the slide mechanism slides. A uniform plane is formed by the surface formed in the original state, and constitutes the measurement stage (9). The plate-like arm (27) and the plate-like body (28) constitute a vacuum suction mechanism. The measurement stage (9) is provided with a drive system in the X, Y, Z, and θ directions, and is movable in these directions. At the measurement position, the probe card (5) is placed on the surface facing the measurement stage (9).
(6) is set relatively.

Next, a probe measurement method using the inspection apparatus of the present embodiment will be described.

First, the glass substrate (2) is unloaded from the cassette (23) and placed on the measurement stage (9). This moves the plate-like body (28) of the measurement stage (9) downward, and the plate-like arm is moved by the slide mechanism of the measurement stage (9) into the gap between the glass substrates (2) housed in parallel with the cassette (23). (27) is inserted, and then the cassette mounting table (24) is moved down by a predetermined interval, and the glass substrate (2) is mounted on the plate-like arm (27). The mounted glass substrate (2) is sucked by a vacuum suction mechanism and is slid out. After unloading, the plate-like body (28) is moved upward, and the glass substrate (2) is accurately placed on the measurement stage (9) with a uniform plane. Next, the glass substrate (2) placed on the measurement stage (9) is positioned. This is the X and Y directions of the measuring stage (9) and the glass substrate (2)
The deviation of the corner portion in the X and Y directions is recognized by a laser recognition mechanism or a pattern recognition mechanism, and the measuring stage (9) is rotated in the θ direction by the amount of the deviation and corrected. The measurement stage (9) on which the positioned glass substrate (2) is placed is moved to a position facing the probe card (5) (6). Here, (A−) between the electrodes (3) of the panel (1) shown in FIG.
The continuity measurement of B) and (CD) is performed.

First, the first probe card (5) is set in the lower state as shown in FIG. 2 (A). Next, the measurement stage (9) is moved upward in the vertical direction to bring the probe needle (8) of the first probe card (5) into contact with the A and B electrodes (3). In this contact state, the continuity measurement (A-B) is performed. After this, the first
The probe card (5) is set in the upper state as shown in FIG. 2 (B). Next, the measuring stage (9) is moved upward in the vertical direction, and the probe needle (12) of the second probe card (6) is moved.
And C and D electrodes (3) are brought into contact. In this contact state (C
Perform the continuity measurement of -D). After the measurement, the measurement stage (9) is moved vertically downward, moved relatively to the probe card (5) in the X direction and the Y direction, and set to the measurement position of the next panel (1). During this time, the first probe card (5)
Is set to the lower state again. This operation is repeated to measure all the panels (1). After the measurement, the glass substrate (2) is returned to the original position of the cassette (23) by the slide mechanism of the measurement stage (9). After that, another glass substrate (2) is measured and stored in the cassette (23). Perform measurements on all glass substrates (2).

In the above embodiment, the first probe card (5) can be moved up and down, so that the probe needles (8) and (12) of the first probe card (5) and the second probe card (6) are alternated. Was brought into contact with the electrode (3) of the object to be measured to perform the measurement. However, it is not always necessary to make contact alternately. For example, as shown in FIG. 5, the probe needles (8) and (12) of the first probe card (5) and the second probe card (6) can be simultaneously brought into contact with the electrode (3) of the measured object. is there. At this time, the second probe card (6) is attached to the probe card socket (16). Also, since the first probe card (5) does not need to be moved up and down, it only needs to be attached to the insert ring (15). Thus, the shield wire (21) for connecting the wiring (10) of the first probe card (5) and the pin (17) of the probe card socket (16) does not have to have a margin.

As described above, according to the present embodiment, the conventional one probe card is divided into the first probe card (5) and the second probe card (6). Even in this case, it is not necessary to replace the entire probe card, but only the probe card having a defect, which is economical and inexpensive. According to this embodiment, the plate-like arm (27) for taking the glass substrate (2) in and out of the cassette (23) forms a part of the measurement stage (9), and furthermore, the measurement stage (9) itself. However, since the apparatus also serves as a transport mechanism that moves in the X, Y, and θ directions, the entire inspection apparatus is compact, and the inspection apparatus can be manufactured and installed at low cost.

As another embodiment, an example using four probe cards (35) of the same type will be described.

As a probe card, a printed circuit board, for example, 50 mm long
Attach the probe needle (36) to one side of 50mm wide and 3mm thick,
Circuit wiring is made from the probe needle (36) attachment portion. As shown in FIG. 6, four sides of the probe card (35) are formed by sides of the four probe cards (35) to which the probe needles (36) are attached. This probe card (35)
Each screw is attached to the probe card socket with one screw, and the pins implanted in the probe card socket are connected to the wiring of the probe card.

When measuring the DUT using these four probe cards (35), the electrode of the DUT and the probe needle (3
The alignment in step 6) must be performed. This is because the probe card (35) is attached to the probe card socket with one screw, so that the position of the probe card (35) can be easily corrected. After this accurate alignment, measurement of the measured object is performed.

Since the measurement of the object to be measured is performed by providing four probe cards of the same type in this way, even if one probe card is broken for some reason, the measurement can be continued by merely replacing the broken probe card, and the damage can be continued. Can also be minimized. Also, it is not necessary to use the same type of probe card for all four. For example, the same type of probe card is used on the opposite side, and various combinations are possible, and there is considerably high versatility.

Further, in the above embodiment, if the electrode spacings of the test objects of different types are unified, it is possible to measure various types of test objects with the same probe card.

〔The invention's effect〕

As described above, according to the first aspect of the present invention, a probe card can be manufactured at a low cost, and a failure of the probe card can be quickly dealt with. The present invention can provide a liquid crystal display body inspection apparatus capable of performing the above.

Further, according to the second aspect of the present invention, the substrate for a liquid crystal display can be accurately and reliably carried in and out of the cassette.

[Brief description of the drawings]

FIG. 1 is a diagram of a probe card for explaining an embodiment of the present invention, FIG. 2 is an explanatory diagram of the measurement of FIG. 1, and FIG.
FIG. 4 is an explanatory view of the liquid crystal panel, FIG. 4 is a view of the probe device of FIG. 1, and FIG. 5 is a view for explaining another embodiment of FIG. 5 First probe card 6 Second probe card 8,12 Probe needle 16 Probe card socket 21 Shield wire

Claims (2)

(57) [Claims] An elevating cassette mounting table on which a cassette accommodating a plurality of liquid crystal display substrate is mounted, and a loading / unloading mechanism for loading / unloading the liquid crystal display substrate from the cassette on the cassette mounting table. And a measuring table having a drive mechanism for moving the liquid crystal display substrate to the measuring section by moving in the X, Y, Z and θ directions, and a liquid crystal display substrate above the measuring table. And at least two probe cards each having a stylus array in contact with a plurality of measurement pad portions of the liquid crystal display substrate, wherein a stylus array of each probe card is in contact with the measurement pad, respectively. A tester for measuring the electrical characteristics of the liquid crystal display substrate. 2. A cassette mounting table on which a cassette accommodating a plurality of liquid crystal display substrates is mounted, and a loading / unloading mechanism for loading / unloading the liquid crystal display substrates from the cassette on the cassette mounting table. And a measuring table having a drive mechanism for moving the liquid crystal display substrate to the measuring section by moving in the X, Y, Z and θ directions, and a liquid crystal display substrate above the measuring table. And at least two probe cards having a stylus array arranged in contact with a plurality of measurement pad portions of the liquid crystal display substrate, wherein the carry-in / out mechanism is movable forward and backward with respect to the cassette, and An arm configured to be capable of vacuum-sucking the liquid crystal display substrate, and a mounting surface of the measuring table formed together with the arm, and configured to be lowered from the arm when the liquid crystal display substrate is carried in and out. Lifting plate and A liquid crystal display device testing apparatus, characterized in that the tactile needle row of each probe card for measuring the electrical characteristics of each of the above measurement the liquid crystal display body substrate by a tester in contact with the pad.