JP2003014649A - Plate-shaped matter inspection device - Google Patents
Plate-shaped matter inspection deviceInfo
- Publication number
- JP2003014649A JP2003014649A JP2001195612A JP2001195612A JP2003014649A JP 2003014649 A JP2003014649 A JP 2003014649A JP 2001195612 A JP2001195612 A JP 2001195612A JP 2001195612 A JP2001195612 A JP 2001195612A JP 2003014649 A JP2003014649 A JP 2003014649A
- Authority
- JP
- Japan
- Prior art keywords
- inspection
- stage
- microscope
- substrate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、液晶ディスプレイ
装置や、プラズマディスプレイ装置のガラス基板等の板
状物体を傾斜、回転させ、同時に基板へ照明を照射して
検査基板上の欠陥部分を強調させて目視検査あるいは顕
微鏡検査あるいは撮像検査を行う板状物体検査装置に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention tilts and rotates a plate-like object such as a glass substrate of a liquid crystal display device or a plasma display device, and at the same time, illuminates the substrate to emphasize a defective portion on the inspection substrate. The present invention relates to a plate-shaped object inspection device that performs visual inspection, microscopic inspection, or imaging inspection.
【0002】[0002]
【従来の技術】従来の技術を用いた板状物体検査装置は
小中型基板用のものであり、目視検査位置で検査基板を
傾斜、回転させる検査基板位置決め部と、検査基板に照
明を照射して欠陥部分を強調する照明部、検査基板を目
視検査位置でほぼ垂直位置に位置決めし、顕微鏡で検査
基板を観察する顕微鏡検査部から構成されていた。2. Description of the Related Art A plate-shaped object inspection device using a conventional technique is for small and medium-sized substrates, and includes an inspection substrate positioning section for inclining and rotating the inspection substrate at a visual inspection position, and illuminating the inspection substrate. It is composed of an illuminating unit for emphasizing the defective portion and a microscope inspection unit for observing the inspection substrate with a microscope by positioning the inspection substrate at a substantially vertical position at a visual inspection position.
【0003】その検査方法としては、検査基板を任意の
位置へ傾斜、回転させてその基板上の欠陥位置を目視で
検査し、その欠陥位置を検査者が記憶する。その後、検
査基板をほぼ垂直に立て、ほぼ垂直な面と平行な面内の
直交座標系上で任意に位置決めできる顕微鏡を操作し
て、記憶していた欠陥部へ検査者が手動で位置決めし、
顕微鏡で観察するようにしていた。As the inspection method, the inspection substrate is tilted and rotated to an arbitrary position, the defect position on the substrate is visually inspected, and the defect position is stored by the inspector. After that, the inspection board is placed almost vertically, the microscope that can be positioned arbitrarily on the Cartesian coordinate system in the plane parallel to the substantially vertical plane is operated, and the inspector manually positions it to the memorized defect,
I was trying to observe it under a microscope.
【0004】最近、液晶ディスプレイ装置及びプラズマ
ディスプレイ装置用として、例えば1000×1000
mmを越す面積を有する基板が用いられるようになるな
ど、基板サイズの大型化が進んでおり、そのような大型
基板を目視検査時に、その検査基板を位置決めするため
には、基板が大きくなったことに応じてその傾斜及び回
転のための動作範囲が大きくなってしまい、そのため従
来の技術では、目視検査位置で検査基板をほぼ垂直位置
へ倒立させても検査基板から顕微鏡検査部までの距離が
大きくなってしまって、顕微鏡による検査ができない場
合が生じた。Recently, for liquid crystal display devices and plasma display devices, for example, 1000 × 1000.
The size of the substrate is increasing, such as the use of a substrate having an area exceeding mm, and in order to position the inspection substrate when visually inspecting such a large substrate, the substrate becomes large. Accordingly, the operating range for tilting and rotating becomes large, and therefore, in the conventional technique, the distance from the inspection board to the microscope inspection section is small even when the inspection board is inverted to the almost vertical position at the visual inspection position. In some cases, it became too large to be inspected by a microscope.
【0005】一方、目視検査位置で検査基板をほぼ垂直
に倒立させた位置に合せて顕微鏡検査部を設置するとし
た場合は、目視検査時の検査基板位置決め動作の範囲が
異常に限られてしまうことで、任意の方向から検査でき
なくなる場合があるいという問題がある。On the other hand, when the microscope inspection unit is installed at a position where the inspection board is vertically inverted at the visual inspection position, the range of the inspection board positioning operation at the time of the visual inspection is abnormally limited. However, there is a problem that the inspection may not be possible from any direction.
【0006】また、従来の技術では目視検査装置におい
て付属の顕微鏡で検査基板上の線幅等を検査しても、寸
法測定自体は他の測定装置で行わなければならないとい
う問題もあった。Further, in the prior art, even if the line width and the like on the inspection board are inspected by the attached microscope in the visual inspection device, there is a problem that the dimension measurement itself must be performed by another measuring device.
【0007】[0007]
【発明が解決しようとする課題】本発明は、大型の基板
の検査時でも目視検査の検査基板位置決め動作範囲の大
小を問題とすることなく顕微鏡検査ができることを目的
とする。SUMMARY OF THE INVENTION It is an object of the present invention to enable microscopic inspection even when inspecting a large substrate without causing a problem of the size of the inspection substrate positioning operation range of the visual inspection.
【0008】また、本発明は、従来の目視検査装置にお
ける顕微鏡検査が、検査基板上の欠陥及び線幅等を検査
するだけでなく、検査中の顕微鏡画像を画面上へ表示
し、画面上での検査及び画面上の指定した距離の寸法を
測定することを目的とする。Further, according to the present invention, the microscopic inspection in the conventional visual inspection apparatus not only inspects defects and line widths on the inspection substrate, but also displays the microscopic image being inspected on the screen and displays it on the screen. It is intended to inspect and measure the dimension of specified distance on the screen.
【0009】[0009]
【課題を解決するための手段】本発明は上述の課題を解
決するために、検査基板を搭載する検査基板ステージ
と、該検査基板ステージを水平軸で回転自在に支えるス
テージ台と、該ステージ台を垂直軸で回転自在に支える
基台と、該基台を水平方向に移動可能にするフレーム
と、前記フレームに設けられた顕微鏡検査ステージとを
有し、前記検査基板ステージと前記顕微鏡検査ステージ
とを前記並行にまたは略並行にして、かつ、前記顕微鏡
検査ステージが備える顕微鏡の被写界深度に前記検査基
板を支持可能とする板状物体検査装置である。In order to solve the above problems, the present invention provides an inspection substrate stage on which an inspection substrate is mounted, a stage base for rotatably supporting the inspection substrate stage on a horizontal axis, and the stage base. And a frame for movably supporting the base in a horizontal direction, and a microscope inspection stage provided on the frame, the inspection substrate stage and the microscope inspection stage. In parallel or substantially parallel to each other, and is capable of supporting the inspection substrate in the depth of field of the microscope included in the microscope inspection stage.
【0010】本発明はさらに、前記顕微鏡と、前記顕微
鏡の顕微鏡画像を撮像するカラーカメラとを備え、前記
顕微鏡及び前記カラーカメラを前記顕微鏡検査ステージ
の所定位置へ手動で位置決め可能としてもよい。The present invention may further comprise the microscope and a color camera for taking a microscope image of the microscope, and the microscope and the color camera may be manually positionable at a predetermined position of the microscope inspection stage.
【0011】さらに、前記カラーカメラで取り込んだ顕
微鏡画像を画面表示する表示部と、その表示された画面
上の特徴表示間の寸法測定を行なうためのコンピュータ
部とを有するとしてもよく、さらに、前記位置決めした
顕微鏡位置座標を測定するとしてもよい。Further, it may have a display unit for displaying a microscope image captured by the color camera on a screen, and a computer unit for measuring dimensions between characteristic displays on the displayed screen. The positioned microscope position coordinates may be measured.
【0012】本発明はさらに、目視検査結果及び顕微鏡
検査結果、撮像した顕微鏡画像、画像の付随情報、寸法
測定値データを保存するためのメモリ部と、前記データ
を伝送出力するためのインタフェイス部とを有するとし
てもよい。The present invention further includes a memory unit for storing the visual inspection result, the microscopic inspection result, the picked-up microscopic image, the incidental information of the image, and the dimension measurement value data, and the interface unit for transmitting and outputting the data. And may have.
【0013】[0013]
【発明の実施の形態】以下、本発明の実施の形態につい
て図を用いて説明する。図1は本発明の板状物体検査装
置の構成例を示す図である。また、この図において、1
は検査対象である検査基板を搭載するための検査基板ス
テージ、2は水平な軸である回転軸(α軸)で検査基板
ステージ1を回転自在に支えるステージ台で、α軸回転
位置決め部11により回転位置が決められる。また、3
は垂直な軸である回転軸(θ軸)でステージ台2を回転
自在に支える基台で、θ軸回転位置決め部12により回
転位置が決められる。また、4はステージ台2に備えら
れたα軸回転位置決め部11と検査基板ステージ1とに
接続されたアーム、5,6は基板を側方または上方から
照明するための照明部、7は顕微鏡検査ステージ、9は
この板状物体検査装置を構成する各部を支えるフレー
ム、13はα軸回転位置決め部11による回転位置を検
出するためのα軸ロータリエンコーダ、14はθ軸回転
位置決め部12による回転位置を検出するためのθ軸ロ
ータリエンコーダ、21は水平方向であるZ軸方向に基
台3を移動させ位置決めするためのZ軸方向位置決め
部、22はZ軸方向位置決め部による移動位置を検出す
るためのZ軸ロータリエンコーダで、基台3の移動に伴
いリニアスケール23上を回転する回転体の回転量を検
出するようになっている。また、顕微鏡ステージ7は少
なくとも、顕微鏡41、顕微鏡41で拡大された映像を
撮像するカラーカメラ42、顕微鏡41およびカラーカ
メラ42を移動させるためのリニアスケール43とを有
する。また、50はコンピュータで、このコンピュータ
50は少なくともA/D変換器51と表示部52と操作
部53とメモリ部54とインタフェース部55とを有す
る。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration example of a plate-like object inspection device of the present invention. Also, in this figure, 1
Is an inspection substrate stage for mounting an inspection substrate to be inspected, 2 is a stage base that rotatably supports the inspection substrate stage 1 with a rotation axis (α axis) that is a horizontal axis. The rotation position is determined. Also, 3
Is a base that rotatably supports the stage base 2 on a rotation axis (θ axis) that is a vertical axis, and the rotation position is determined by the θ axis rotation positioning unit 12. Further, 4 is an arm connected to the α-axis rotational positioning unit 11 provided on the stage base 2 and the inspection substrate stage 1, 5 and 6 are illumination units for illuminating the substrate from the side or from above, and 7 is a microscope. An inspection stage, 9 is a frame that supports each part of the plate-shaped object inspection device, 13 is an α-axis rotary encoder for detecting a rotational position by the α-axis rotational positioning unit 11, and 14 is a rotation by the θ-axis rotational positioning unit 12. A θ-axis rotary encoder for detecting the position, 21 is a Z-axis direction positioning portion for moving and positioning the base 3 in the Z-axis direction which is a horizontal direction, and 22 is a movement position by the Z-axis direction positioning portion. The Z-axis rotary encoder for detecting the rotation amount of the rotating body that rotates on the linear scale 23 as the base 3 moves. Further, the microscope stage 7 has at least a microscope 41, a color camera 42 that captures an image magnified by the microscope 41, the microscope 41, and a linear scale 43 for moving the color camera 42. Further, 50 is a computer, and this computer 50 has at least an A / D converter 51, a display unit 52, an operation unit 53, a memory unit 54, and an interface unit 55.
【0014】さらに、図2は検査基板ステージ1から基
台3に至るZ軸位置決め部により水平移動される部分の
主要構成例を示し、図3に検査基板ステージ1の一例の
詳細を示し、図4に顕微鏡ステージ7の一例の詳細を示
す。Further, FIG. 2 shows an example of a main configuration of a portion horizontally moved by the Z-axis positioning portion from the inspection substrate stage 1 to the base 3, and FIG. 3 shows details of an example of the inspection substrate stage 1. 4 shows details of an example of the microscope stage 7.
【0015】以下、本発明の板状物体検査装置の動作に
ついて説明する。検査基板ステージ1に板状の検査基板
を載せて固定した後、操作部52を用いてα軸位置決め
部11及びθ軸位置決め部12を操作し、α軸やθ軸の
回転角度を様々に組み合わせて検査基板の位置や向きを
変えられるようにし、目視検査を行なう。ここで、照明
部5,6から検査基板へ照明光を照射することにより、
基板表面及び裏面の欠陥位置が強調されて目視できるよ
うにされる。The operation of the plate-shaped object inspection device of the present invention will be described below. After mounting and fixing a plate-shaped inspection substrate on the inspection substrate stage 1, the α-axis positioning unit 11 and the θ-axis positioning unit 12 are operated using the operation unit 52 to combine various rotation angles of the α-axis and the θ-axis. Visual inspection is performed so that the position and orientation of the inspection board can be changed. Here, by illuminating the inspection board with illumination light from the illumination units 5 and 6,
The defect positions on the front surface and the back surface of the substrate are emphasized so that they can be viewed.
【0016】次に、検査基板を顕微鏡検査するときは、
操作部52を用いて、検査基板ステージ1をほぼ垂直に
倒立させた位置とし、基台3を移動させ顕微鏡ステージ
7へ接近させる。欠陥位置及びその他の任意の位置へ顕
微鏡41とカラーカメラ42とを顕微鏡ステージ7上で
手動により位置決めし、顕微鏡41及び表示部53を用
いて基板を検査する。Next, when microscopically inspecting the inspection board,
Using the operation unit 52, the inspection substrate stage 1 is set in a substantially vertically inverted position, and the base 3 is moved to approach the microscope stage 7. The microscope 41 and the color camera 42 are manually positioned on the microscope stage 7 at the defect position and other arbitrary positions, and the substrate is inspected using the microscope 41 and the display unit 53.
【0017】なお、顕微鏡ステージ7上の顕微鏡41お
よびカラーカメラ42の位置はリニアスケール43によ
り位置座標が検出され、それにより現在の顕微鏡検査位
置がコンピュータ50によって確認できる。また、表示
部53に出力された画像上で指示した距離を、コンピュ
ータ50によって計算し測定することができる。The positions of the microscope 41 and the color camera 42 on the microscope stage 7 are detected by the linear scale 43, and the current microscope inspection position can be confirmed by the computer 50. The distance instructed on the image output to the display unit 53 can be calculated and measured by the computer 50.
【0018】上述の検査により得られた目視検査結果及
び顕微鏡検査結果、撮像した顕微鏡画像、画像の付随情
報、寸法測定値はメモリ部へ保存するとしてもよい。さ
らに、インタフェイス部によってこれらのデータを他装
置に転送することができる。The visual inspection result and the microscopic inspection result obtained by the above-mentioned inspection, the taken microscopic image, the accompanying information of the image, and the dimension measurement value may be stored in the memory unit. Further, the interface unit can transfer these data to other devices.
【0019】コンピュータ50では、各ロータリエンコ
ーダから出力されるそれぞれの回転量を入力し、その回
転量から各回転位置や座標位置座標を計算して求める。In the computer 50, each rotation amount output from each rotary encoder is input, and each rotation position or coordinate position coordinate is calculated from the rotation amount and obtained.
【0020】また、カラーカメラ42で取り込んだ画像
は表示部53へ表示するようにし、リニアスケール43
は検出した顕微鏡位置を認識するためコンピュータ50
と接続されている。The image captured by the color camera 42 is displayed on the display unit 53, and the linear scale 43 is used.
Computer 50 for recognizing the detected microscope position.
Connected with.
【0021】このように中小型基板のみではなく、大型
基板の検査時でも検査基板位置決め部がほぼ垂直に倒立
した状態で目視検査位置と顕微鏡検査位置との間を移動
できることにより、目視検査時の検査基板位置決め動作
範囲の大小による顕微鏡検査の問題を解消することがで
きる。また、顕微鏡検査において検査基板上の欠陥及び
線幅等を検査するだけでなく、検査中の顕微鏡画像をそ
の場で画面上へ表示することにより画面上での検査及び
画面上の指定した距離の寸法測定を行なうので、寸法測
定を他装置で行なう必要がない。As described above, since it is possible to move between the visual inspection position and the microscope inspection position while the inspection substrate positioning portion is substantially vertically inverted even when inspecting not only small and medium-sized substrates but also large-sized substrates, It is possible to solve the problem of microscopic inspection due to the size of the inspection board positioning operation range. In addition to inspecting defects and line widths on the inspection board in the microscope inspection, by displaying the microscope image under inspection on the screen on the spot, the inspection on the screen and the specified distance on the screen can be performed. Since dimension measurement is performed, it is not necessary to perform dimension measurement by another device.
【0022】[0022]
【発明の効果】上述のように、本発明による目視検査装
置は、中小型基板のみではなく、大型基板の検査時でも
検査基板位置決め部がほぼ垂直に倒立した状態で目視検
査位置と顕微鏡検査位置との間を移動できることによ
り、目視検査時の検査基板位置決め動作範囲の大小によ
る顕微鏡検査の問題を解決することができる。As described above, the visual inspection apparatus according to the present invention has a visual inspection position and a microscopic inspection position in which the inspection board positioning portion is substantially vertically inverted even when inspecting not only small and medium boards but also large boards. By being able to move between and, it is possible to solve the problem of microscope inspection due to the size of the inspection board positioning operation range during visual inspection.
【0023】また、顕微鏡検査において検査基板上の欠
陥及び線幅等を検査するだけでなく、検査中の顕微鏡画
像をその場で画面上へ表示することにより画面上での検
査及び画面上の指定した距離の寸法測定を行なうので、
寸法測定を他装置で行なうことを要しない。Further, in the microscopic inspection, not only the defect and line width on the inspection substrate are inspected, but also the microscopic image under inspection is displayed on the screen on the spot to perform the inspection on the screen and the designation on the screen. Since the dimension of the distance is measured,
It is not necessary to perform dimension measurement with another device.
【図面の簡単な説明】[Brief description of drawings]
【図1】 本発明の板状物体検査装置の構成例を示す
図。FIG. 1 is a diagram showing a configuration example of a plate-like object inspection device of the present invention.
【図2】 検査基板ステージ1から基台3に至るZ軸位
置決め部により水平移動される部分の主要構成例を示す
図。FIG. 2 is a diagram showing an example of a main configuration of a portion horizontally moved by a Z-axis positioning portion from an inspection substrate stage 1 to a base 3.
【図3】 検査基板ステージ1の一例の詳細を示す図。FIG. 3 is a diagram showing details of an example of the inspection substrate stage 1.
【図4】 顕微鏡ステージ7の一例の詳細を示す図。FIG. 4 is a diagram showing details of an example of a microscope stage 7.
1:検査基板ステージ、 2:ステージ台、 3:基
台、 4:アーム、 5,6:照明部、 7:顕微鏡ス
テージ、 9:フレーム、 11:α軸回転位置決め
部、 12:θ軸回転位置決め部、 13:α軸ロータ
リエンコーダ、 14:θ軸ロータリエンコーダ、 2
1:Z軸方向位置決め部、 22:Z軸方向ロータリエ
ンコーダ、 23:リニアスケール、 41:顕微鏡、
42:カラーカメラ、 43:リニアスケール、 5
0:コンピュータ、 51:A/D変換器、 52:表
示部、 53:操作部、 54:メモリ部、 55:イ
ンタフェース部。1: Inspection substrate stage, 2: Stage base, 3: Base, 4: Arm, 5,6: Illumination unit, 7: Microscope stage, 9: Frame, 11: α-axis rotational positioning unit, 12: θ-axis rotational positioning Part, 13: α-axis rotary encoder, 14: θ-axis rotary encoder, 2
1: Z-axis direction positioning part, 22: Z-axis direction rotary encoder, 23: Linear scale, 41: Microscope,
42: Color camera, 43: Linear scale, 5
0: computer, 51: A / D converter, 52: display unit, 53: operation unit, 54: memory unit, 55: interface unit.
Claims (5)
と、該検査基板ステージを水平軸で回転自在に支えるス
テージ台と、該ステージ台を垂直軸で回転自在に支える
基台と、該基台を水平方向に移動可能にするフレーム
と、前記フレームに設けられた顕微鏡検査ステージとを
有し、前記検査基板ステージと前記顕微鏡検査ステージ
とを前記並行にまたは略並行にして、かつ、前記顕微鏡
検査ステージが備える顕微鏡の被写界深度に前記検査基
板を支持可能とすることを特徴とする板状物体検査装
置。1. An inspection substrate stage on which an inspection substrate is mounted, a stage base for rotatably supporting the inspection substrate stage on a horizontal axis, a base for rotatably supporting the stage base on a vertical axis, and the base. It has a frame that is movable in the horizontal direction and a microscope inspection stage provided on the frame, and the inspection substrate stage and the microscope inspection stage are parallel or substantially parallel to each other, and the microscope inspection stage. A plate-shaped object inspection device capable of supporting the inspection substrate in a depth of field of a microscope included in the inspection device.
いて、前記顕微鏡と、前記顕微鏡の顕微鏡画像を撮像す
るカラーカメラとを備え、前記顕微鏡及び前記カラーカ
メラを前記顕微鏡検査ステージの所定位置へ手動で位置
決め可能とすることを特徴とする板状物体検査装置。2. The plate-like object inspection device according to claim 1, further comprising: the microscope, and a color camera that captures a microscope image of the microscope, and the microscope and the color camera are provided at predetermined positions of the microscope inspection stage. A plate-like object inspection device characterized in that it can be manually positioned.
いて、さらに、前記カラーカメラで取り込んだ顕微鏡画
像を画面表示する表示部と、その表示された画面上の特
徴表示間の寸法測定を行なうためのコンピュータ部とを
有することを特徴とする板状物体検査装置。3. The plate-like object inspection device according to claim 2, further comprising: a display unit for displaying a microscope image captured by the color camera on a screen, and a dimension measurement between the characteristic display on the displayed screen. A plate-like object inspection device having a computer unit for performing the operation.
装置において、さらに、前記位置決めした顕微鏡位置座
標を測定することを特徴とする板状物体検査装置。4. The plate-shaped object inspection device according to claim 2 or 3, further comprising measuring the position coordinate of the positioned microscope.
いて、さらに、目視検査結果及び顕微鏡検査結果、撮像
した顕微鏡画像、画像の付随情報、寸法測定値データを
保存するためのメモリ部と、前記データを伝送出力する
ためのインタフェイス部とを有することを特徴とすえる
板状物体検査装置。5. The plate-shaped object inspection device according to claim 4, further comprising a memory unit for storing a visual inspection result and a microscopic inspection result, a captured microscopic image, incidental information of the image, and dimension measurement value data. And a plate-shaped object inspection device having an interface section for transmitting and outputting the data.
Priority Applications (1)
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JP2001195612A JP2003014649A (en) | 2001-06-27 | 2001-06-27 | Plate-shaped matter inspection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2001195612A JP2003014649A (en) | 2001-06-27 | 2001-06-27 | Plate-shaped matter inspection device |
Publications (2)
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JP2003014649A true JP2003014649A (en) | 2003-01-15 |
JP2003014649A5 JP2003014649A5 (en) | 2007-08-30 |
Family
ID=19033559
Family Applications (1)
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JP2001195612A Pending JP2003014649A (en) | 2001-06-27 | 2001-06-27 | Plate-shaped matter inspection device |
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JP (1) | JP2003014649A (en) |
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WO2003102561A1 (en) * | 2002-05-30 | 2003-12-11 | Olympus Corporation | Substrate holding device and substrate inspection device |
JP2006329895A (en) * | 2005-05-30 | 2006-12-07 | Dainippon Screen Mfg Co Ltd | Substrate measuring apparatus |
JP2007271350A (en) * | 2006-03-30 | 2007-10-18 | Fujifilm Corp | Reference planar setting method for planar representation type display, and visibility angle measuring method |
KR100783618B1 (en) | 2006-10-31 | 2007-12-07 | (주)오엘케이 | Apparatus for inspecting flat display panel |
KR100800323B1 (en) * | 2001-12-06 | 2008-02-01 | 엘지.필립스 엘시디 주식회사 | Align inspection apparatus for laminating apparatus of substrates |
CN100371777C (en) * | 2004-08-31 | 2008-02-27 | De&T株式会社 | Projector for detecting plane displaying board and projecting method realized by same |
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CN104637427A (en) * | 2015-03-12 | 2015-05-20 | 合肥京东方光电科技有限公司 | Detection jig |
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CN104637427B (en) * | 2015-03-12 | 2017-05-24 | 合肥京东方光电科技有限公司 | Detection jig |
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