JP2003014649A - Plate-shaped matter inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To visually examine the flaw of a substrate by rotating and inclining a substrate state and irradiating the substrate with illumination light in the visual examination of the large-sized substrate, and to microscopically inspect the position of the flaw confirmed by visual examination and the arbitrary position on the substrate to make it possible not only to display the image at the microscopical confirmation position but also to measure the dimention on the image. SOLUTION: The plate-shaped matter inspection device has an inspection substrate stage 1 loaded with an inspection substrate, a stage stand 2 for supporting the inspection substrate stage 1 on a horizontal shaft in a freely rotatable manner, a base stand 3 for supporting the stage stand 2 by a vertical shaft in a freely rotatable manner, a frame 9 for making the base stand 3 movable in a horizontal direction, and the microscopic inspection stage 7 provided on the frame 9. The inspection substrate stage 1 and the microscopic inspection stage 7 are made parallel or almost parallel, and the inspection substrate can be supported at the depth of field of the microscope 4 of the microscopic inspection stage 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention tilts and rotates a plate-like object such as a glass substrate of a liquid crystal display device or a plasma display device, and at the same time, illuminates the substrate to emphasize a defective portion on the inspection substrate. The present invention relates to a plate-shaped object inspection device that performs visual inspection, microscopic inspection, or imaging inspection.

[0002]

2. Description of the Related Art A plate-shaped object inspection device using a conventional technique is for small and medium-sized substrates, and includes an inspection substrate positioning section for inclining and rotating the inspection substrate at a visual inspection position, and illuminating the inspection substrate. It is composed of an illuminating unit for emphasizing the defective portion and a microscope inspection unit for observing the inspection substrate with a microscope by positioning the inspection substrate at a substantially vertical position at a visual inspection position.

As the inspection method, the inspection substrate is tilted and rotated to an arbitrary position, the defect position on the substrate is visually inspected, and the defect position is stored by the inspector. After that, the inspection board is placed almost vertically, the microscope that can be positioned arbitrarily on the Cartesian coordinate system in the plane parallel to the substantially vertical plane is operated, and the inspector manually positions it to the memorized defect,
I was trying to observe it under a microscope.

Recently, for liquid crystal display devices and plasma display devices, for example, 1000 × 1000.
The size of the substrate is increasing, such as the use of a substrate having an area exceeding mm, and in order to position the inspection substrate when visually inspecting such a large substrate, the substrate becomes large. Accordingly, the operating range for tilting and rotating becomes large, and therefore, in the conventional technique, the distance from the inspection board to the microscope inspection section is small even when the inspection board is inverted to the almost vertical position at the visual inspection position. In some cases, it became too large to be inspected by a microscope.

On the other hand, when the microscope inspection unit is installed at a position where the inspection board is vertically inverted at the visual inspection position, the range of the inspection board positioning operation at the time of the visual inspection is abnormally limited. However, there is a problem that the inspection may not be possible from any direction.

Further, in the prior art, even if the line width and the like on the inspection board are inspected by the attached microscope in the visual inspection device, there is a problem that the dimension measurement itself must be performed by another measuring device.

[0007]

SUMMARY OF THE INVENTION It is an object of the present invention to enable microscopic inspection even when inspecting a large substrate without causing a problem of the size of the inspection substrate positioning operation range of the visual inspection.

Further, according to the present invention, the microscopic inspection in the conventional visual inspection apparatus not only inspects defects and line widths on the inspection substrate, but also displays the microscopic image being inspected on the screen and displays it on the screen. It is intended to inspect and measure the dimension of specified distance on the screen.

[0009]

In order to solve the above problems, the present invention provides an inspection substrate stage on which an inspection substrate is mounted, a stage base for rotatably supporting the inspection substrate stage on a horizontal axis, and the stage base. And a frame for movably supporting the base in a horizontal direction, and a microscope inspection stage provided on the frame, the inspection substrate stage and the microscope inspection stage. In parallel or substantially parallel to each other, and is capable of supporting the inspection substrate in the depth of field of the microscope included in the microscope inspection stage.

The present invention may further comprise the microscope and a color camera for taking a microscope image of the microscope, and the microscope and the color camera may be manually positionable at a predetermined position of the microscope inspection stage.

Further, it may have a display unit for displaying a microscope image captured by the color camera on a screen, and a computer unit for measuring dimensions between characteristic displays on the displayed screen. The positioned microscope position coordinates may be measured.

The present invention further includes a memory unit for storing the visual inspection result, the microscopic inspection result, the picked-up microscopic image, the incidental information of the image, and the dimension measurement value data, and the interface unit for transmitting and outputting the data. And may have.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a configuration example of a plate-like object inspection device of the present invention. Also, in this figure, 1
Is an inspection substrate stage for mounting an inspection substrate to be inspected, 2 is a stage base that rotatably supports the inspection substrate stage 1 with a rotation axis (α axis) that is a horizontal axis. The rotation position is determined. Also, 3
Is a base that rotatably supports the stage base 2 on a rotation axis (θ axis) that is a vertical axis, and the rotation position is determined by the θ axis rotation positioning unit 12. Further, 4 is an arm connected to the α-axis rotational positioning unit 11 provided on the stage base 2 and the inspection substrate stage 1, 5 and 6 are illumination units for illuminating the substrate from the side or from above, and 7 is a microscope. An inspection stage, 9 is a frame that supports each part of the plate-shaped object inspection device, 13 is an α-axis rotary encoder for detecting a rotational position by the α-axis rotational positioning unit 11, and 14 is a rotation by the θ-axis rotational positioning unit 12. A θ-axis rotary encoder for detecting the position, 21 is a Z-axis direction positioning portion for moving and positioning the base 3 in the Z-axis direction which is a horizontal direction, and 22 is a movement position by the Z-axis direction positioning portion. The Z-axis rotary encoder for detecting the rotation amount of the rotating body that rotates on the linear scale 23 as the base 3 moves. Further, the microscope stage 7 has at least a microscope 41, a color camera 42 that captures an image magnified by the microscope 41, the microscope 41, and a linear scale 43 for moving the color camera 42. Further, 50 is a computer, and this computer 50 has at least an A / D converter 51, a display unit 52, an operation unit 53, a memory unit 54, and an interface unit 55.

Further, FIG. 2 shows an example of a main configuration of a portion horizontally moved by the Z-axis positioning portion from the inspection substrate stage 1 to the base 3, and FIG. 3 shows details of an example of the inspection substrate stage 1. 4 shows details of an example of the microscope stage 7.

The operation of the plate-shaped object inspection device of the present invention will be described below. After mounting and fixing a plate-shaped inspection substrate on the inspection substrate stage 1, the α-axis positioning unit 11 and the θ-axis positioning unit 12 are operated using the operation unit 52 to combine various rotation angles of the α-axis and the θ-axis. Visual inspection is performed so that the position and orientation of the inspection board can be changed. Here, by illuminating the inspection board with illumination light from the illumination units 5 and 6,
The defect positions on the front surface and the back surface of the substrate are emphasized so that they can be viewed.

Next, when microscopically inspecting the inspection board,
Using the operation unit 52, the inspection substrate stage 1 is set in a substantially vertically inverted position, and the base 3 is moved to approach the microscope stage 7. The microscope 41 and the color camera 42 are manually positioned on the microscope stage 7 at the defect position and other arbitrary positions, and the substrate is inspected using the microscope 41 and the display unit 53.

The positions of the microscope 41 and the color camera 42 on the microscope stage 7 are detected by the linear scale 43, and the current microscope inspection position can be confirmed by the computer 50. The distance instructed on the image output to the display unit 53 can be calculated and measured by the computer 50.

The visual inspection result and the microscopic inspection result obtained by the above-mentioned inspection, the taken microscopic image, the accompanying information of the image, and the dimension measurement value may be stored in the memory unit. Further, the interface unit can transfer these data to other devices.

In the computer 50, each rotation amount output from each rotary encoder is input, and each rotation position or coordinate position coordinate is calculated from the rotation amount and obtained.

The image captured by the color camera 42 is displayed on the display unit 53, and the linear scale 43 is used.
Computer 50 for recognizing the detected microscope position.
Connected with.

As described above, since it is possible to move between the visual inspection position and the microscope inspection position while the inspection substrate positioning portion is substantially vertically inverted even when inspecting not only small and medium-sized substrates but also large-sized substrates, It is possible to solve the problem of microscopic inspection due to the size of the inspection board positioning operation range. In addition to inspecting defects and line widths on the inspection board in the microscope inspection, by displaying the microscope image under inspection on the screen on the spot, the inspection on the screen and the specified distance on the screen can be performed. Since dimension measurement is performed, it is not necessary to perform dimension measurement by another device.

[0022]

As described above, the visual inspection apparatus according to the present invention has a visual inspection position and a microscopic inspection position in which the inspection board positioning portion is substantially vertically inverted even when inspecting not only small and medium boards but also large boards. By being able to move between and, it is possible to solve the problem of microscope inspection due to the size of the inspection board positioning operation range during visual inspection.

Further, in the microscopic inspection, not only the defect and line width on the inspection substrate are inspected, but also the microscopic image under inspection is displayed on the screen on the spot to perform the inspection on the screen and the designation on the screen. Since the dimension of the distance is measured,
It is not necessary to perform dimension measurement with another device.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration example of a plate-like object inspection device of the present invention.

FIG. 2 is a diagram showing an example of a main configuration of a portion horizontally moved by a Z-axis positioning portion from an inspection substrate stage 1 to a base 3.

FIG. 3 is a diagram showing details of an example of the inspection substrate stage 1.

FIG. 4 is a diagram showing details of an example of a microscope stage 7.

[Explanation of symbols]

1: Inspection substrate stage, 2: Stage base, 3: Base, 4: Arm, 5,6: Illumination unit, 7: Microscope stage, 9: Frame, 11: α-axis rotational positioning unit, 12: θ-axis rotational positioning Part, 13: α-axis rotary encoder, 14: θ-axis rotary encoder, 2
1: Z-axis direction positioning part, 22: Z-axis direction rotary encoder, 23: Linear scale, 41: Microscope,
42: Color camera, 43: Linear scale, 5
0: computer, 51: A / D converter, 52: display unit, 53: operation unit, 54: memory unit, 55: interface unit.

Claims (5)

[Claims] 1. An inspection substrate stage on which an inspection substrate is mounted, a stage base for rotatably supporting the inspection substrate stage on a horizontal axis, a base for rotatably supporting the stage base on a vertical axis, and the base. It has a frame that is movable in the horizontal direction and a microscope inspection stage provided on the frame, and the inspection substrate stage and the microscope inspection stage are parallel or substantially parallel to each other, and the microscope inspection stage. A plate-shaped object inspection device capable of supporting the inspection substrate in a depth of field of a microscope included in the inspection device. 2. The plate-like object inspection device according to claim 1, further comprising: the microscope, and a color camera that captures a microscope image of the microscope, and the microscope and the color camera are provided at predetermined positions of the microscope inspection stage. A plate-like object inspection device characterized in that it can be manually positioned. 3. The plate-like object inspection device according to claim 2, further comprising: a display unit for displaying a microscope image captured by the color camera on a screen, and a dimension measurement between the characteristic display on the displayed screen. A plate-like object inspection device having a computer unit for performing the operation. 4. The plate-shaped object inspection device according to claim 2 or 3, further comprising measuring the position coordinate of the positioned microscope. 5. The plate-shaped object inspection device according to claim 4, further comprising a memory unit for storing a visual inspection result and a microscopic inspection result, a captured microscopic image, incidental information of the image, and dimension measurement value data. And a plate-shaped object inspection device having an interface section for transmitting and outputting the data.