JP2000266638A - Substrate inspecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate inspecting device capable of efficiently inspecting the front and back surfaces of substrates without enlarging the size of the device. SOLUTION: In this inspecting device, by activating the drive motor 16d of a second supporting part 16 to rotate a supporting shaft 16a and raising and inclining a holder 2 to a predetermined angle on the supporting shaft 16a via a first supporting part 15, a macro observation and a micro observation are performed on a surface of a substrate to be inspected 3. Then, by activating the drive motor 16d of the second supporting part 16 to rotate the supporting shaft 16a again, raising the holder 2 approximately to a vertical state on the supporting shaft 16a, activating the drive motor 15c of a first supporting part 15, and rotating the holder 2 via a supporting shaft 2a to direct the back surface of the substrate to be inspected 3 forward, macro observation and micro observation are performed on the back surface of the substrate to be inspected 3 as well.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate inspection apparatus used for inspecting a glass substrate of a flat panel display (FPD) represented by a liquid crystal display for defects.

[0002]

2. Description of the Related Art Defect inspection of a glass substrate used for an FPD is performed by irradiating a surface of a glass substrate to be observed with illumination light.
It is possible to switch between macro observation in which defects such as scratches on the substrate surface are visually observed based on the optical change of the reflected light and micro observation in which the defects detected in macro observation are enlarged and observed. is there.

Conventionally, as such a substrate inspection apparatus, a holder for holding a substrate to be inspected can be raised up to a predetermined angle, and a macro observation of the substrate to be inspected is performed by starting up the holder. Returning to the horizontal position, the micro-observation system is movably provided on the surface of the substrate to be inspected based on the position coordinates of the defect confirmed by the macro-observation, and the micro-observation system is moved in the xy directions, and the observation axis of the objective lens of the micro-observation system is Is considered to match the defect position on the surface of the substrate to be inspected to enable micro observation.

According to such a substrate inspection apparatus, the micro-observation system is moved to the defect position confirmed by the macro-observation. Compared to the case where the stage is moved in the xy directions and the position of the defect on the substrate coincides with the observation axis of the objective lens of the micro observation system, the size of the substrate to be inspected tends to increase and the contact area of the apparatus increases. Resolve
Moreover, since the macro observation can be performed near the eyes of the worker by raising the holder, high-precision observation is also possible.

[0005]

However, recently, it has been required that the macro observation of the substrate to be inspected be performed not only on the front surface of the substrate but also on the back surface thereof. Has occurred.

(1) In order to observe the back surface of the substrate to be inspected, the substrate to be inspected is once removed from the holder by a transfer robot or the like, the substrate to be inspected is turned over, the back surface is turned up, and the substrate is again placed on the holder. Because of the necessity, there is a problem that it takes time to deliver the substrate to be inspected and the working efficiency is significantly reduced.

(2) If a mechanism for inverting the holder is provided to enable observation of the back surface of the substrate to be inspected, a driving mechanism such as a micro-observation system disposed under the holder (stage driving in the stage driving method) Mechanism) is in the way and it is difficult to create a space for holder reversal,
To achieve this, there is also a problem that the device becomes large.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has as its object to provide a board inspection apparatus capable of efficiently inspecting front and back surfaces of a board without increasing the size of the apparatus.

[0009]

According to the first aspect of the present invention,
Inspection target substrate holding means for holding the inspection target substrate, first support means for reversibly supporting the inspection target substrate holding means, and supporting the first support means, and the first support means And second support means for supporting the substrate-to-be-inspected holding means so as to be able to be turned upside down.

According to a second aspect of the present invention, in the first aspect of the present invention, the first support means extends along a direction orthogonal to a rotation center of the substrate holding means by the second support means. The inspection target substrate holding means is rotated about a bent axis.

According to a third aspect of the present invention, in the first aspect of the present invention, the first supporting means has a center parallel to an axis parallel to a rotation center of the substrate to be inspected holding means by the second supporting means. The substrate holding means is rotated.

As a result, according to the present invention, the substrate-to-be-inspected holding means is raised to a predetermined angle by the first support means via the first support means, thereby enabling macro observation and microscopic observation of the surface of the substrate to be inspected. Observation can be performed, and thereafter, the substrate to be inspected holding means is again held by the second support means.
By starting up to a substantially vertical state and rotating the substrate to be inspected by the first support means to invert the substrate to be inspected, macro observation and micro observation can also be performed on the back surface of the substrate to be inspected.

[0013]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 and FIG.
1 shows a schematic configuration of a substrate inspection apparatus to which the present invention is applied. In the figure, reference numeral 1 denotes an apparatus main body, on which a holder 2 is provided as a substrate to be inspected holding means.

As shown in FIG. 3, the holder 2 has a support shaft 2a at the center of the lower edge, and the support shaft 2a is rotatably supported by the first support portion 15. First support 1
Reference numeral 5 denotes a structure in which the holder 2 is rotated about an axis along a direction orthogonal to a rotation center of a support shaft 16a of a second support portion 16 to be described later, and a pulley 15a is attached to the support shaft 2a of the holder 2. A pulley 15d of a drive motor 15c is connected to the pulley 15a via a belt 15b, and the driving force of the drive motor 15c is applied to the support shaft 2a via the belt 15b.
And the holder 2 is rotated.

The first support section 15 is rotatably supported by the apparatus main body 1 by a second support section 16. This second
The first support portion 15 is rotatably supported by a support shaft 16a supported in parallel on the apparatus main body 1. A pulley 16b is provided on the support shaft 16a, and a belt is mounted on the pulley 16b. The pulley 16e of the drive motor 16d is connected via the drive shaft 16c, and the driving force of the drive motor 16d is transmitted to the support shaft 16a via the belt 16c, so that the holder 2 can be raised to a substantially vertical position as shown in FIG. I have to.

The holder 2 mounts and holds a large test substrate 3 such as a glass substrate used for an FPD.
A plurality of substrate pressing members for sucking and holding the substrate to be inspected 3 and a positioning member for regulating the position of the substrate to be inspected 3 are arranged along the peripheral portion, and the inspection member on the holder 2 is inspected by the positioning member and the substrate pressing member. The substrate 3 is positioned and can be suction-held so as not to fall off.

Here, as shown in FIG. 4, the holder 2 has guide scales 19 and 20 for detecting the position coordinates of the defect along the illustrated Y-axis direction and X-axis direction of the side edge of the substrate 3 to be inspected.
Has been arranged. The guide scale 19 is provided with a position detection unit 21 in the Y-axis direction, and the guide scale 20 is provided with a position detection unit 22 in the X-axis direction.
It is provided movably along 20.

The position detecting section 21 comprises a laser light source 211 and a cylindrical lens 212 as shown in FIG. 5, and outputs a planar laser light 213 perpendicular to the surface of the substrate 3 to be inspected along the X-axis direction. It has become. The position detection unit 22 is also similar to the position detection unit 21 and outputs a planar laser beam 223 perpendicular to the surface of the substrate 3 along the Y-axis direction. Then, the position detecting unit 21 is moved along the guide scale 19 with respect to the defective portion on the surface of the inspection target substrate 3 so that the laser beam 213 coincides with the defective portion, and similarly, the position detecting unit 22 is moved along the guide scale 20. Is moved to make the laser beam 223 coincide with the defect, and the position coordinates (X, Y) of the defect are detected by reading the values of the guide scales 19 and 20 at this time, and the detection result will be described later. The data is output to the control unit 11.

The position detectors 21 and 22 may be manually moved to the guide scales 19 and 20. However, when the size of the substrate 3 to be inspected is taken into consideration, the position is detected using a ball screw with a guide or a linear motor. It is desirable that the detection units 21 and 22 be driven electrically so that they can be operated by the inspector.

Returning to FIG. 1, a pair of guide rails 4, 4 are arranged in parallel on the apparatus main body 1 along both side edges of the holder 2. On the guide rails 4, a gate-shaped observation unit support 5 is disposed so as to straddle the holder 2, and the observation unit support 5 is shown along the guide rail 4 on the surface of the substrate 3 to be inspected. It is provided so as to be movable in the Y-axis direction.

The observation unit support 5 supports the observation unit 6 so as to be movable in the X-axis direction perpendicular to the moving direction (Y-axis direction) of the observation unit support 5.

The observation unit support 5 is provided with a transmission line illumination 7 integrally with the observation unit 6 so as to face the moving line of the observation unit 6. The transmission line illumination 7 is arranged on the bottom plate of the observation unit supporting portion 5 passing below the holder 2 along the X-axis direction in the drawing, and performs linear illumination from below the substrate 3 to be inspected. Together with the part 5, it is movable in the illustrated Y-axis direction.

Here, the transmission line illumination 7 has, for example, a light source 71 and a solid glass rod 72 as shown in FIG. 6, and transmits light incident on the end of the glass rod 72 from the light source 71. Along with the total reflection transmission in the glass rod 72, the light is diffused by white stripes 73 applied along the back of the glass rod 72, and linear light is emitted by the lens action of the glass rod 72. . The transmission line illumination is not limited to the above, and may be any line illumination using a fluorescent lamp or the like.

The observation unit 6 has a micro observation unit 9 provided with an index illumination 8 for micro observation and a partial macro illumination 10 for macro observation. The indicator illumination 8 projects the optically focused spot light on the surface of the substrate 3 to be inspected. The light reflected by the spot light on the surface of the substrate 3 to be inspected is brighter than the light reflected by the partial macro illumination 10, and can be visually observed even during macro observation by the partial macro illumination 10. Further, the micro observation unit 9 has an objective lens 91, an eyepiece lens 92, and a microscope function having epi-illumination (not shown) so that an image on the surface of the substrate 3 to be inspected can be observed by the eyepiece lens 92 via the objective lens 91. ing. The micro observation unit 9 has a TV camera 9 through a trinocular tube.
3 are attached. When the visual micro observation is unnecessary, only the TV camera 93 can be attached via a straight tube. This TV camera 93 has an objective lens 91
Observation image of the surface of the inspection target substrate 3 obtained by
The information is displayed on the monitor 12.

The partial macro illumination 10 is used for macro observation, and illuminates a part of the surface of the substrate 3 on the holder 2 with the macro illumination light 101. The partial macro illumination 10 can adjust an illumination angle with respect to the surface of the substrate 3 to be inspected to an optimum angle for macro observation.

On the upper side of the apparatus main body 1, as shown in FIG.
0 is arranged. The entire surface macro illumination 30 includes a metal halide lamp 31 as a point light source, and a reflection mirror 32 disposed opposite to the metal halide lamp 31.
And a Fresnel lens 33 disposed below the reflection mirror 32.

The reflection mirror 32 is provided at an angle of 45 °, and reflects light from the metal halide lamp 31 to give it to the Fresnel lens 33. The Fresnel lens 33 converts the light from the metal halide lamp 31 into convergent light as shown in FIG.
The entire surface is illuminated.

The apparatus main body 1 is provided with a Y scale for detecting the position coordinates of the observation unit support 5 in the Y-axis direction, and the observation unit support 5 detects the position coordinates of the observation unit 6 in the X direction. X scale is provided.

Further, the control unit 11 controls the guide scale 1
Controls the position coordinates (X, Y) of the defective part by the reference numerals 9 and 20, the position coordinates by the Y scale and the X scale, and controls the movement of the observation unit support part 5 and the observation unit 6, etc. The distance X0 between the optical axis of the illumination 8 and the optical axis of the objective lens 91 is stored in advance. Then, with respect to the position coordinates (X, Y) of the defect given from the guide scales 19 and 20, the observation axis of the objective lens 91 of the micro observation unit 9 matches the position coordinates (X, Y). When a predetermined instruction is given in a state where the movement of the observation unit supporting portion 5 and the observation unit 6 is controlled and the spot center of the indicator illumination 8 is located at a defect on the substrate 3 to be inspected, the Y scale And the position coordinates of the defect part are obtained from the data of the X scale, and the position coordinates of the defect portion are designated on the substrate 3 to be inspected based on the obtained position coordinates and the distance data between the optical axis of the indicator illumination 8 and the optical axis of the objective lens 91. The movement of the observation unit support 5 and the observation unit 6 is controlled so that the observation axis of the objective lens 91 of the micro observation unit 9 coincides with the defective portion.

Next, the operation of the embodiment configured as described above will be described.

First, when performing macro observation of the surface of the substrate to be inspected, the observation unit supporting portion 5 is retracted to the initial position shown in FIG. 1, and then the substrate 3 to be inspected is supplied onto the holder 2 which is leveled. In this state, the substrate to be inspected 3 is positioned by the positioning member, and is held by suction by the substrate pressing member so as not to fall off, and the defect inspection by macro observation is started.

Next, a case will be described in which the front surface of the substrate 3 to be inspected is macro-observed collectively using macro illumination.

In the case of this macro observation, the second support 16
The drive motor 16d is started to rotate the support shaft 16a by the pulley 16b via the belt 16c, and the holder 2 is set to a predetermined angle around the support shaft 16a via the first support portion 15, preferably 30 to Raise to 45 ° and incline or rock. In this state, the light from the metal halide lamp 31 is irradiated through the Fresnel lens 33 as convergent light on the entire surface of the substrate 3 to be inspected on the holder 2.

Under the macro illumination, the inspector holds the holder 2
The inspected substrate 3 is closely watched, and a defect inspection such as a scratch or a stain on the inspected substrate 3 is visually performed. In such macro observation, for example, as shown in FIG. 7, when a defective portion A is recognized on the inspection target substrate 3, the position detecting unit is first moved along the guide scale 19 with respect to the defective portion A at this time. 2
1, the laser beam 213 is made to coincide with the defective portion, and subsequently, the position detecting unit 22 is moved along the guide scale 20 to make the laser beam 223 coincide with the defective portion. Then, by reading the values of the guide scales 19 and 20 at this time, the position coordinates (X, Y) of the defective portion A are detected, and the detection result is taken into the control unit 11 and stored in a memory (not shown). Thereafter, the same operation is repeated each time the inspector recognizes the defective portion A on the inspected substrate 3 in the same manner, so that the respective position coordinates (X, Y) of each defective portion are taken into the control unit 11 and stored. Is done.

When the macro observation of the surface of the substrate 3 to be inspected is completed, the drive motor 16d is started, the support shaft 16a is rotated in the opposite direction by the pulley 16b via the belt 16c, and the holder 2 is moved to the first position. Return to horizontal position.

Thereafter, in order to perform micro-observation by the micro-observation unit 9 for each defect detected by the macro observation, the position coordinates (X, Y) of each defect stored in the memory (not shown) by the control unit 11 are obtained. The observation unit support 5 and the observation unit 6 are controlled to move so that the observation axis of the objective lens 91 of the micro observation unit 9 coincides with the position coordinates (X, Y).

Thus, the inspector can observe the defect on the substrate 3 to be inspected obtained through the objective lens 91 with a microscope by looking through the eyepiece 92 of the micro-observation unit 9. A defect on the surface of the substrate 3 to be inspected obtained by the objective lens 91 is imaged and displayed on the TV monitor 12 for micro observation.

When performing micro observation on the back surface of the substrate 3 to be inspected, the drive motor 1 of the second support 16
6d is started, the support shaft 16a is rotated by the pulley 16b via the belt 16c, and the holder 2 is raised almost vertically as shown in FIG. Then, from this state, the drive motor 15c of the first support unit 15 is started, the holder 2 is rotated via the support shaft 2a, the substrate 3 to be inspected is turned over, and the back surface of the substrate 3 is turned forward. Second
The drive motor 16d of the supporting portion 16 is activated to lower the holder 2 to a predetermined angle and incline it. Accordingly, the macro observation and the micro observation can be performed on the back surface of the inspection target substrate 3 in the same manner as described above.

When the defect inspection on the back surface of the substrate 3 to be inspected is completed, the drive motors 15c and 16d are driven, and the holder 2 is turned over so that the surface of the substrate 3 to be inspected faces upward, and then returned to a horizontal state. .

When the defect inspection of the front surface or the rear surface of the substrate 3 to be inspected is completed in this way, the observer gives a predetermined instruction to the control unit 11 again to return the observation unit support unit 5 to the initial state. Then, the inspected inspected substrate 3 is removed from the holder 2 and replaced with a new inspected substrate 3.

Next, a case where macro observation is performed using the partial macro illumination 10 and then micro observation is performed by the micro observation unit 9 will be described.

Also in this case, as described above, in the horizontal state in which the substrate 3 to be inspected is positioned and held by suction on the holder 2,
The partial macro illumination 10 of the observation unit 6 is turned on, and a partial macro illumination light 101 is formed on the surface of the substrate 3 to be inspected on the holder 2.
Is irradiated.

Then, as shown in FIG.
Is linearly moved in the X-axis direction along the observation unit support portion 5, and further, the observation unit support portion 5 is linearly moved in the Y-axis direction along the guide rail 4. While performing a raster scan on the substrate 3, the inspector visually inspects the entire surface of the substrate 3 for defects such as scratches and dirt. In this case, the angle of incidence of the macro illumination light 101 on the substrate 3 to be inspected can be freely adjusted so that optimum macro observation can be performed.

In the partial macro observation using the partial macro illumination 10, if the inspector recognizes a defect in the macro illumination light 101 on the substrate 3 to be inspected, the inspector sets the observation unit 6 to X. , In the Y-axis direction, and the spotlight of the indicator illumination 8 is positioned at the defect on the substrate 3 to be inspected.

When the inspector gives a predetermined instruction to the control unit 11, the transmission line illumination 7 is turned on, and linear transmission illumination in the X-axis direction is emitted from below the holder 2.
Then, the control unit 11 obtains the position coordinates of the defect on the substrate 3 to be inspected based on the data of the Y scale and the X scale for converting the movement amount of the micro observation unit 19 into the position coordinate data. The observation unit support unit 5 and the observation unit 6 are moved and controlled using the position coordinate data and the distance data between the optical axis of the indicator illumination 8 and the optical axis of the objective lens 91 stored in advance, and the specified inspection target substrate 3 The optical axis of the objective lens 91 is aligned with the upper defect.

As a result, the designated defect is brought into the center of the field of view of the objective lens 91, and the defect can be micro-observed through the objective lens 91. At the same time, the TV camera 93
Thus, a defect on the surface of the substrate 3 to be inspected obtained by the objective lens 91 is imaged, and microscopic observation can be performed on the TV monitor 12. In this case, it is possible to perform micro-observation by switching to epi-illumination or transmitted illumination according to the type of defect or the substrate to be inspected.

Thereafter, when the inspector again instructs macro observation, the defect portion on the substrate 3 to be inspected is returned to the original position of the irradiation range of the macro illumination light 101, and the defect confirmation by the partial macro observation is continued. Done. Then, when observing another defective portion, the above operation is repeated.

In the partial macro observation using the partial macro illumination 10 as well, the holder 2 is raised almost vertically when the observation of the surface of the substrate 3 to be inspected is completed, and then the first support The drive motor 15c of the section 15 is started, the holder 2 is rotated, the substrate 3 to be inspected is turned over, the back surface of the substrate 3 is turned forward, and the holder 2 is horizontally moved by the drive motor 16d of the second support section 16. By returning to the state, the partial macro observation and the micro observation can be performed on the back surface of the inspection target substrate 3 in the same manner as described above.

In the above description, macro observation is performed while partially illuminating the inspection target substrate 3 of the holder 2 with the partial macro illumination 10, and when a defect is recognized on the inspection target substrate 3, the operation shifts to micro observation. As described above, when performing only macro observation using the partial macro illumination 10, the observation unit support unit 5 is retracted to the initial position, and the state where the inspection target substrate 3 is placed and held on the holder 2 is changed to the partial macro illumination. 10
Is turned on to irradiate a partial macro illumination light 101 on the surface of the substrate 3 to be inspected on the holder 2. Then, from this state, the observation unit 6 is moved along the observation unit support 5 by X
The substrate 3 to be inspected of the holder 2 is moved by the macro illumination light 101 while linearly moving in the axial direction and further linearly moving the observation unit support 5 in the Y-axis direction along the guide rail 4.
By performing the raster scan on the upper surface, the inspector visually inspects the defect on the entire surface of the substrate 3 to be inspected. In this case, the spot light of the index illumination 8 is matched with each defective portion in the macro illumination light 101, and the position coordinates of each defective portion can be stored in the memory of the control unit 11.

When micro-observation by the micro-observation unit 9 is collectively performed based on the position coordinate data of the defective portion stored in the control unit 11, the observation unit support unit 5 is retracted to the initial position, The transmission line illumination 7 is turned on from the state where the substrate 3 to be inspected is placed and held on the substrate 2, and linear transmission illumination is irradiated in the X-axis direction from below the holder 2. Then, from this state, the objective lens 91 of the micro observation unit 9 is linearly moved in the X-axis direction along the transmission line illumination 7, and the observation unit support 5 is linearly moved in the Y-axis direction along the guide rail 4. Then, when the objective lens 91 is brought into each defect position on the inspected substrate 3 read by the control unit 11 and microscopic observation can be performed by a microscope, at the same time, the surface of the inspected substrate 3 is imaged by the TV camera 93 and the TV It is displayed on the monitor 12. Also in this case, it is possible to switch to the epi-illumination instead of the transmissive illumination according to the type of the substrate to be inspected and the defect.

Accordingly, in this case, the drive motor 16d of the second support portion 16 is started to rotate the support shaft 16a, and the holder 2 is rotated about the support shaft 16a via the first support portion 15. Is raised and tilted to a predetermined angle, so that macroscopic observation and microscopic observation can be performed on the surface of the substrate 3 to be inspected.
The drive motor 16d is started to rotate the support shaft 16a, the holder 2 is raised up to a substantially vertical state around the support shaft 16a, and the drive motor 15c of the first support portion 15 is started to start the support shaft 2a. By rotating the holder 2 through the substrate and inverting it from the front surface to the rear surface of the substrate 3 to be inspected, macro observation and micro observation can also be performed on the rear surface of the substrate 3 to be inspected. In order to perform the inspection, the substrate to be inspected should be once removed from the holder with a transfer robot or the like, and the substrate to be inspected should be turned over, the back side up, and then placed again on the holder. Inspection of the front and back surfaces can be performed efficiently in a short time, and the work efficiency can be improved.

Since the substrate 3 to be inspected can be inverted using the space in which the micro observation unit 9 of the micro observation system moves, it is necessary to secure a space for substrate inversion below the holder 2. And the size of the apparatus can be avoided.

Further, by inverting the holder 2 from the state in which the holder 2 is raised to a substantially vertical state, the load applied to the substrate 3 to be inspected due to the rotation is reduced, and the suction effect is reduced due to its own weight during the inversion. The problem of detachment from the holder 2 can be solved.

(Second Embodiment) FIG. 9 shows a schematic configuration of a second embodiment of the present invention, and the same parts as those in FIG. 1 are denoted by the same reference numerals.

In this case, the holder 2 has support shafts 2b at the centers of both side edges, respectively.
The pair of arm portions 81a constituting the first support portion are rotatably supported at one end of the pair of arm portions 81a, and the holder 2 is reversible. The other ends of the arm portions 81a are fixed to both ends of a hollow support shaft 82a of a second support portion described later, and with the rotation of the support shaft 82a, around the axis parallel to the rotation center of the support shaft 82a. It is designed to rotate.

As shown in FIG. 10, the first support portion is provided with a pulley 81b on the support shaft 2b of the holder 2;
1b, a rotating shaft 81d positioned in the hollow portion of the support shaft 82a via a belt 81c disposed in the hollow portion of the arm portion 81a
Is connected to the pulley 81e at one end of the
A pulley 81f is provided at the other end of the pulley 81d.
The holder 2 is rotated by transmitting the driving force of the driving motor 81h to the holder 2 via a belt 81g.

The second support section has arms 81 of the first support section fixed to both ends of a hollow support shaft 82a supported in parallel on the apparatus main body 1, and a pulley 8 is attached to the support shaft 82a.
2b, the pulley 82b is connected to a rotation shaft 82e of a drive motor 82d via a belt 82c, and the driving force of the drive motor 82d is transmitted to the support shaft 82a via the pulley 82c, thereby showing the arm portion 81a. It can be started like this.

Even in such a configuration, when the front surface of the substrate 3 to be inspected is to be macro-observed collectively by using macro illumination, the drive motor 82d of the second support portion is activated to pull the pulley through the belt 82c. By rotating the support shaft 82a by 82b, the arm 81a is rotated, and the holder 2 is raised up to a predetermined angle.

Next, the drive motor 81h of the first support portion
To drive the holder 2 via the rotating shaft 81d and the belt 81c.
By rotating the support shaft 2b, the holder 2 can be tilted or swung at a predetermined angle or inverted to the back side. Then, from this state, in the same manner as described in the first embodiment, the metal halide lamp 3
1 is turned on, and the substrate 3 to be inspected
By irradiating the entire surface, the inspector can watch the inspected substrate 3 on the holder 2 and visually inspect the inspected substrate 3 for defects such as scratches and stains.

Therefore, even in this case, the holder 2 is provided via the arm 81a around the hollow support shaft 82a of the second support.
And the drive motor 81 of the first support unit.
h, the support shaft 2b of the holder 2 is rotated, and the holder 2 is tilted at a predetermined angle, so that macroscopic observation and microscopic observation can be performed on the surface of the substrate 3 to be inspected. By activating the drive motor 81h of the support unit and rotating the support shaft 2b of the holder 2, the holder 2 is turned over, the back surface of the substrate 3 to be inspected is directed forward, and the holder 2 is inclined at a predetermined angle, so that the holder 2 is inclined. Macro observation and micro observation can also be performed on the back surface of the inspection substrate 3, and the same effects as in the first embodiment can be expected.

[0062]

As described above, according to the present invention, the inspection of the front and back surfaces of the substrate to be inspected can be performed efficiently in a short time, and the working efficiency can be improved. In addition, it is not necessary to secure a space for reversing the substrate below the substrate-to-be-inspected holding means, and it is possible to avoid an increase in the size of the apparatus. Furthermore, since the substrate to be inspected can be rocked to the left and right, macroscopic observation can be performed while maintaining the substrate to be inspected in an optimum posture by the rocking position at this time, and the inspection accuracy can be improved.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of a first embodiment of the present invention.

FIG. 2 is a side view showing a schematic configuration in a state where the holder according to the first embodiment is raised.

FIG. 3 is a diagram illustrating a schematic configuration of first and second support portions that support the holder according to the first embodiment;

FIG. 4 is a diagram showing a schematic configuration of a defect position coordinate detection unit used in the first embodiment.

FIG. 5 is a diagram showing a schematic configuration of a light source of a defect position coordinate detection unit used in the first embodiment.

FIG. 6 is a diagram showing a schematic configuration of transmission line illumination used in the first embodiment.

FIG. 7 is a diagram illustrating an example of coordinate detection by a position coordinate detection unit used in the first embodiment;

FIG. 8 is a diagram showing a schematic configuration of macro illumination of the entire surface used in the first embodiment.

FIG. 9 is a diagram showing a schematic configuration of a second embodiment of the present invention.

FIG. 10 is a diagram illustrating a schematic configuration of a support unit that supports a holder according to the second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Device main body 2 ... Holder 201 ... Board holding member 2a ... Support shaft 2b ... Support shaft 3 ... Inspection board 4 ... Guide rail 5 ... Observation unit support part 6 ... Observation unit 7 ... Transmission line illumination 8 ... Indicator illumination 9 ... Micro observation unit 10 ... Partial macro illumination 101 ... Macro illumination light 11 ... Control unit 12 ... TV monitor 15 ... First support unit 15a ... Pulley 15b ... Belt 15c ... Drive motor 15d ... Pulley 16 ... Second support unit 16a ... Support shaft 16b ... Pulley 16c ... Belt 16d ... Drive motor 16e ... Rotating shaft 19 ... Guide scale 20 ... Guide scale 21.22 ... Position detector 211 ... Laser light source 212 ... Cylindrical lens 213 ... Laser light 223 ... Laser light 30 ... Full macro illumination 31 ... Metal halide lamp 32 ... Reflection mirror 33 ... Fresnel Lens 71 Light source unit 72 Glass rod 73 White stripe 81a Arm 81b Pulley 81c Belt 81d Rotary shaft 81e Pulley 81f Pulley 81g Belt 81h Drive motor 82a Support shaft 82b Pulley 82c Belt 82d: drive motor 82e: pulley 91: objective lens 92: eyepiece 93: TV camera

Claims (3)

[Claims] 1. A substrate holding means for holding a substrate to be inspected, a first supporting means for reversibly supporting the substrate holding means for inspecting, and a first supporting means for supporting the first supporting means, And a second supporting means for supporting the inspected substrate holding means so as to be capable of being turned upside down via the first supporting means. 2. The apparatus according to claim 1, wherein the first support unit rotates the substrate holding unit around an axis along a direction perpendicular to a rotation center of the substrate holding unit by the second support unit. The substrate inspection apparatus according to claim 1, wherein: 3. The apparatus according to claim 2, wherein the first supporting means rotates the substrate to be inspected about an axis parallel to a rotation center of the substrate to be inspected by the second supporting means. The substrate inspection apparatus according to claim 1, wherein