KR100424292B1 - Test apparatus - Google Patents

Abstract

In the present invention, since the visual inspection equipment and the microscopic inspection equipment are separate from the conventional glass inspection for the liquid crystal display device, it is difficult to unify the work, and there is a problem in that the selection and the precision of the inspection position are low and the repeatability and accuracy are lowered.

A stage on which the glass to be inspected is seated and movable up and down, an illumination unit for emitting light to illuminate the glass, a Fresnel lens installed at an upper side of the stage to focus light reflected from the total reflection mirror, A microscope for determining whether the glass seated on the stage is defective while being linearly moved from the upper side of the stage, a stage driving unit for moving the stage back and forth, left and right, a tilting driving unit for tilting and yawing the stage up and down, and the stage By including a clamping portion for supporting the glass seated on,

It is possible to improve the work efficiency by simultaneously performing visual inspection and microscopic inspection using a single device, and the liquid crystal display device glass improves the reliability of inspection by allowing the stage to be oscillated to perform more precise inspection. Relates to an inspection apparatus.

Description

Test Equipment {Test apparatus}

The present invention relates to an apparatus for inspecting a defect of glass in a manufacturing process such as a glass for a liquid crystal display device, and in particular, it is possible to perform a macro test and a micro test at the same time to shorten the inspection time. It is about the inspection equipment to make it possible.

In general, in the process of manufacturing a liquid crystal display (LCD), a process of inspecting defects of glass is repeated several times. The defect inspection of the glass for liquid crystal display device is usually divided into macro test and micro test. Visual inspection is a method of checking the defects by the eyes by the operator. It is a method to examine the found defects in detail using a microscope. Therefore, there is a separate device for the purpose of visual inspection and a device for the purpose of microscopic inspection, and the reality of the current liquid crystal display device business that requires a device with a complex function to perform both tests at the same time.

As shown in FIG. 1, a conventional glass visual inspection apparatus for a liquid crystal display device includes a stage 11 on which a glass 10, which is a test object, is seated and one end is fixed to a hinge, and a tilting action is performed on the stage 11. A transport robot (not shown) for loading or unloading the glass 10, an illumination lamp 12 for generating light to facilitate identification of defects of the glass 10 seated on the stage 11, The total reflection mirror 13 reflecting the light generated by the illumination lamp 12 toward the stage 11 and the light reflected from the total reflection mirror 13 by being installed above the stage 11 are included in the stage 11. Fresnel lens 14 to be irradiated toward).

The conventional glass visual inspection apparatus for the liquid crystal display device configured as described above allows the operator to determine whether the glass is defective through the viewing window while the stage is tilting.

When the operator operates the touch panel 15 installed on the side of the main body, the glass 10 is seated on the stage 11 by the transport robot. When the glass 10 is seated on the stage 11, the illumination lamp 12 generates light, and the light generated by the illumination lamp 12 is reflected by the total reflection mirror 13, and then the Fresnel lens 14 is opened. Through it, the surface of the glass 10 is illuminated. In this case, the tilting driving unit 16 rotates the stage 11 at a predetermined angle by the tilting driving unit 16, and the operator determines whether there is a defect during the tilting driving process and stores data according to the result. When the inspection operation is completed by repeating the above operation several times, the operator ends the visual inspection by unloading the glass in the stage 11 by manipulating the touch panel 15.

However, when the glass is inspected using the above-mentioned glass visual inspection equipment for the liquid crystal display, the stage 11 does not perform the yawing drive but only the tilting drive as shown in FIG. There is this.

In addition, when looking at the focal length of the Fresnel lens 14, there is a problem that the irradiation area of the light passing through the Fresnel lens 14 is narrow in view of the position structure of the stage (11). That is, when referring to the drawing shown in FIG. 3, if the stage 11 is positioned above the focal point f forming range of the Fresnel lens 14, the irradiation area of the light is wide enough to allow sufficient inspection. Due to the structure of the stage 11 which performs the tilting drive, the light emitting area of the stage 11 is located near the focal point f of the Fresnel lens.

In addition, the conventional glass micro-inspection apparatus for a liquid crystal display device includes a stage 21 on which the inspection target glass 20 on which the visual inspection is completed is seated and vertically movable as shown in FIGS. 4 and 5, and the stage 21. ) Up and down driving unit 22 for moving up and down, microscope 23 for grasping defects of glass 20 seated on stage 21 while linearly moving above the stage 21, and the stage ( A ball screw 24 for linearly moving the 21 to a direction perpendicular to the moving direction of the microscope 23, and a transfer robot (not shown) for loading or unloading the glass 20 into the stage 21. Doing.

The conventional glass micro-inspection apparatus for a liquid crystal display device configured as described above examines in detail the defects found in the previous process using a microscope.

When operating the system by operating the touch panel, all parameters are initialized, and the transport robot seats the glass 20 on the stage 21 to perform microscopic inspection. The microscopic examination is performed using the result data of the glass visual inspection, which is the previous process, and the microscope 23 is moved to the recorded coordinates to examine the defect in detail. At this time, the movement to the inspection coordinates is based on the linear movement of the microscope 23 and the linear movement of the stage 21 by the ball screw 24. However, the ball screw 24 is difficult to precise position control of the micron unit to increase the auto focusing time (Auto Focusing) time of the microscope 23 using the up and down drive unit 22, which leads to a long inspection time Of course, this results in poor repeatability and accuracy.

Here, referring to the conventional glass inspection procedure for the liquid crystal display device, as shown in FIG. 6, visual inspection is first performed to store data according to the inspection result, and the information is transmitted to the micro inspection apparatus and the micro inspection is performed according to the data. It can be seen that When the results of the microscopic examination come out, save the data according to the result and complete all the inspection of the glass.

However, in the conventional glass inspection for the liquid crystal display device configured as described above, it is difficult to unify the work because the visual inspection equipment and the micro inspection equipment are separate. There is no problem in the micro-inspection because the movement to the defect position is not precise and the repeatability and accuracy are lowered.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and realizes visual inspection and micro-inspection of glass for liquid crystal display as a single device to unify work and at the same time position the stage using a linear motor. The purpose is to provide inspection equipment that can reduce the inspection time of the entire system by quickly and accurately.

1 is a configuration diagram schematically showing a conventional glass visual inspection equipment for a liquid crystal display device;

FIG. 2 is a view illustrating a tilting operation of a stage in a glass visual inspection device for a conventional liquid crystal display; FIG.

3 is a view illustrating a focus of a Fresnel lens and a position of a stage;

4 is a schematic view showing a conventional glass microinspection apparatus for a liquid crystal display device;

FIG. 5 is a view showing a relationship between a stage and a microscope, which are main components of a conventional glass microinspection apparatus for a liquid crystal display; FIG.

6 is a flow chart of an inspection operation using a glass inspection apparatus for a conventional liquid crystal display device;

7 is a schematic view showing the inspection equipment according to the present invention,

8 is a front view and a side view showing the lighting unit which is a main component of the present invention;

9 is a sectional view and a side view showing a filtering system which is a main component of the present invention;

10A is a plan view showing a stage driving unit which is a main component of the present invention;

10B is a front view showing a stage driving unit which is a main component of the present invention;

10C is a side view showing a stage driving unit which is a main component of the present invention;

11 is a view showing the yawing and tilting state of the stage of the main components of the present invention,

12 is a view showing a clamping portion which is a main component of the present invention;

13 is a flow chart of the inspection work using the inspection equipment of the present invention.

<Description of the symbols for the main parts of the drawings>

50: glass 51: the stage

52: total reflection mirror 53: Fresnel lens

54: microscope 60: lighting unit

70: stage driving unit 71: x-axis linear motor

72: y axis linear motor 73: positioning part

80: tilting drive 82: yawing motor

83: yawing rod 85: tilting motor

90 clamping portion 91 cylinder

92: clamping rod 93,94: clamper

95: fixed bush 96: adsorption part

The present invention for achieving the above object is the first and second filters disposed in parallel in the direction of the light to change the amount of light and the wavelength of the light irradiated through the lamp; And mirrors 52 for reflecting the light filtered by the respective filters 62 and 62 'to the inspection object 50.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

The inspection apparatus according to the present invention includes a stage 51 on which the inspection target glass 50 is seated and vertically movable, an illumination unit 60 that emits light to illuminate the glass 50, and the illumination unit 60. ) Is a total reflection mirror 52 for reflecting the light generated by the glass to the glass 50 seated on the stage 51, and the light reflected from the total reflection mirror 52 is installed on the upper side of the stage 51 Fresnel lens 53 for condensing with 50, the microscope 54 to determine whether the glass 50 seated on the stage 51 while moving linearly from the upper side of the stage 51 and the stage ( A stage driver 70 for moving the stage 51 back, front, left, and right, a tilting / yaw driving unit 80 for tilting and yawing the stage 51 up and down, and a glass 50 seated on the stage 51 The clamping unit 90 for adsorption support and the glass 50 are loaded onto the stage 51. It consists of a transfer robot (not shown) to make or unload.

The lighting unit 60 is disposed on the left and right sides as shown in FIGS. 8 and 9, respectively, to generate two light lamps 61, and is located between the illumination lamp 61 and the total reflection mirror 52. A color filter 62 and an ND filter 62 'for filtering to inspect at a desired wavelength and amount of light, a filter support 63 with a plurality of color filters 62 and ND filters 62', respectively; It is composed of a filter drive motor 64 for rotating the filter support (63).

In addition, the stage driver 70 includes an x-axis linear motor 71 for moving the stage 51 in the x-axis direction as shown in FIGS. 10A, 10B, and 10C, and y for the stage 51. The y-axis linear motor 72 moving in the axial direction, the transmission lamp 74 for generating light under the glass 50 to assist illumination of the microscope 54, and the movement of the microscope 54. Corresponding to the lamp driving motor 75 for moving the transmission lamp (74).

As shown in FIG. 11, the tilting / yaw driving unit 80 is installed to face the lower side of the stage 51 so that the stage is tilted when driven in the same direction, and yawing the stage 51 when driven in the opposite direction. The driving motors 82 and 83, the arm 84 which is connected to and rotated perpendicular to the axes of the driving motors 82 and 83, and the driving force of the driving motor to the stage to transfer the driving force to the stage. Rod end 86, one end of which is rotatably connected to the arm 84, and the other end of which is rotatably connected to the side of the stage 51 so as to rotate respectively about the tilting center 85a and yawing center 85b. , 87).

As shown in FIG. 12, the clamping part 90 is connected to the cylinder 91 installed at the side of the stage 51, the rod 91a of the cylinder 91, and the connector 91b. When the clamping rod 92 and the hinge center is positioned next to the clamping rod 92 and one end is rotated according to the movement of the clamping rod 92, the hinge rod is rotated about the hinge so that the other end is one side of the glass 50. Two clampers 93 and 94 for holding corners in different directions, springs 95 installed on the clamping rod 92 to prevent over-rotation of the clampers 93 and 94, and the clampers After the position of the glass 50 is determined by the 93 and 94, the glass 50 is composed of an adsorption part 96 for adsorbing the glass 50 so as not to shake.

The inspection apparatus of the glass for a liquid crystal display device of the present invention configured as described above can perform both visual inspection and microscopic inspection.

When the transfer robot loads the glass 50 into the stage 51 inside the equipment, the clamping part 90 causes the glass 50 to rest on the stage 51. That is, the cylinder 91 is operated to advance the clamping rod 92, and the clampers 93 and 94 are rotated as the clamping rod 92 moves forward to support one edge of the glass 50. Therefore, the glass 50 is aligned on the stage 51, and the adsorption part 96 adsorbs the glass 50 to complete the mounting. This process is a common work process that must go through both visual inspection and microscopic examination.

When the alignment and mounting of the glass 50 is completed, the visual inspection of the glass 50 on the stage 51 is first performed, and microscopic examination is performed using the data.

In order to perform the visual inspection, the illumination unit 60 generates light and reflects the light by the total reflection mirror 52, and then the Fresnel lens 53 collects the light to irradiate the glass 50. The illumination lamp 61 of the lighting unit 60 generates light having an illuminance of at least 1000 kHz or more, and the generated light includes the color filter 62 and the ND filter 62 'so that the operator can adjust the wavelength and the amount of light desired. use. The amount of light may be adjusted using the ND filter 62 ′, and the inspection of defects on the glass 50 may be assisted by changing the wavelength using the color filter 62.

In addition, the stage 51 can be tilted and yawed so as to make the inspection more precise when performing the visual inspection. That is, the stage 51 may be tilted by driving the driving motors 82 and 83 to rotate the arm 84 and the rod ends 86 and 87 in the same direction, and the arm 84 and the rod end ( The stage 51 can be yaw-driven by rotating the 86,87 in the opposite direction. Thus, the operator can perform a detailed inspection on the questionable part.

Once the visual inspection is complete, a microscopic examination is performed according to the visual examination data. Microscopic examination is performed by using a microscope installed in the equipment, and the inspection is automatically performed according to visual inspection data.

After the visual inspection is completed, the operator moves the stage 51 to a specific position using the x-axis linear motor 71 and the y-axis linear motor 72 according to the data of the visual inspection, or the operator checks with interest. The microscope 54 is moved to the place to be examined. When the microscope 54 is used, the transmission light 74 is operated to assist the illumination, and the lamp driving motor 75 moves the transmission light 74 according to the movement of the microscope 54 so that accurate microscopic examination is performed. Be sure to After the movement of the stage 51 or the microscope 54 is completed, the microscope 54 performs inspection at a magnification desired by the operator.

As described above, when the microscopic examination is completed, the adsorption part 96 of the clamping part 90 breaks the vacuum to separate the glass 50, and the transfer robot removes the glass 50 lying on the stage 51. Unloading completes all inspection work.

As described above, the inspection apparatus according to the present invention can perform visual inspection and microscopic inspection at the same time by using one equipment, thereby improving work efficiency, and the stage is oscillated to perform more precise inspection and two lightings. There is an advantage that the reliability of the inspection is improved because the shadow is not generated by using a lamp.

Claims (6)

First and second filters disposed in parallel in the direction of light to change respective amounts and wavelengths of light irradiated through the lamp; And a mirror for reflecting the light filtered by the respective filters to the inspection object. The method of claim 1, The first filter is an inspection equipment, characterized in that the ND filter. The method of claim 1, And the second filter is a color filter. The method of claim 1, The inspection object is an inspection device, characterized in that the LCD glass. The method of claim 1, And the mirror is a total reflection mirror. delete