JPH1194756A - Substrate inspecting apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate inspecting apparatus capable of efficiently inspecting the flaw of a substrate to be inspected with high accuracy and capable of being achieved in miniaturization. SOLUTION: The observation unit support part 5 arranged so as to straddle the fixed holder 2 holding a substrate 3 to be inspected is provided so as to be movable on the surface 3 to be inspected in a Y-axis direction. An observation unit 6 having a micro-observation unit 9 provided with an indexing luminaire 8 for micro-observation and a macro-luminaire 10 for macro- observation is provided to the observation unit support part 5 so as to be movable in the X-axis direction crossing the Y-axis direction of the observation unit support part 5 on the surface of the substrate 3 to be inspected at a right angle. In this case, by the movement of the observation unit support part 5 along the Y-axis direction on the surface of the substrate 3 to be inspected and the movement of the observation unit 6 in the X-axis direction crossing the moving direction of the observation unit support part 5 on the surface 3 to be inspected of the observation unit 6 at a right angle, the macro- observation by the macro-luminaire 10 and the micro-observation by the micro- observation unit 9 provided with the indexing luminaire 8 are performed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate inspection apparatus used for inspecting defects such as a glass substrate of a liquid crystal display (LCD).

[0002]

2. Description of the Related Art Conventionally, a defect inspection of a glass substrate used for an LCD is performed by irradiating a glass substrate surface with illumination light, and observing a defect portion such as a scratch on the substrate surface from an optical change of reflected light; There is a technique in which micro observation for enlarging and observing a defective portion detected by macro observation is switched.

[0003] Specifically, as disclosed in Japanese Patent Application Laid-Open No. 5-322784, a macro observation system and a micro observation system are provided corresponding to an XY stage capable of moving horizontally in the X and Y directions. The XY stage is moved in the two-dimensional X and Y directions from the state where the substrate to be inspected is placed on the XY stage, and the inspection region of the substrate to be inspected is observed in a macro observation system or a micro observation system. In some cases, macro observation or micro observation of a defect portion on the surface of a substrate to be inspected is made possible by positioning the substrate on the inspection target.

[0004]

Incidentally, recently, LC
As the size of the glass substrate becomes larger, the size of the glass substrate tends to become larger and larger.
In the case where the Y stage is horizontally moved in the two-dimensional directions of the X and Y directions, a movement range as large as four times the substrate area is required, and the increase in the size of the substrate and the size of the apparatus are unavoidable. In addition, since the illumination for identifying the defective portion on the glass substrate must be located near the center of the XY stage to cover the entire surface of the substrate, the illumination will be far away from the observer, and will be minute. Visual inspection of wounds is becoming increasingly difficult.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a board inspection apparatus capable of efficiently performing a highly accurate defect inspection on a board to be inspected and realizing miniaturization. I do.

[0006]

According to the first aspect of the present invention,
A fixed substrate-to-be-inspected holding means for holding the substrate-to-be-inspected, and an observation device arranged so as to straddle the substrate-to-be-inspected and movably provided along one direction on the surface of the substrate to be inspected. An observation unit having a macro observation system and a micro observation system which are provided on the inspection unit support means so as to be movable in a direction orthogonal to the moving direction of the observation unit support means on the substrate to be inspected. Movement of the observation unit support means in one direction on the inspection target substrate surface and movement of the observation unit on the inspection target substrate surface in a direction orthogonal to the movement direction of the observation unit support means. This enables macro observation or micro observation by the observation unit.

According to a second aspect of the present invention, in the first aspect, the observation unit includes a macro observation system having spot illumination for partially illuminating the surface of the substrate to be inspected, illumination for the index, and illumination for the index. It has a micro observation system including an objective lens whose observation axis position is set based on the range.

According to a third aspect of the present invention, in the second aspect, the observation unit supporting means is arranged along a moving direction of the observation unit, and integrates line illumination transmitted through the substrate to be inspected. Provided.

As a result, according to the first aspect of the present invention,
By fixing the substrate holding means to be inspected and moving the observation unit support means in one direction on the surface of the substrate to be inspected and moving the observation unit in a direction orthogonal to the moving direction of the observation unit support means on the surface of the substrate to be inspected. Since the observation unit can be moved to any position on the surface of the substrate to be inspected, the substrate holding means to be inspected can be kept almost the same size as the area of the substrate to be inspected.

According to the second aspect of the present invention, the macro observation is performed by spot illumination for partially illuminating the inspection target substrate surface while moving the observation unit on the inspection target substrate surface. Highly accurate defect inspection can be realized concentrated in the range of illumination.

According to the third aspect of the present invention, the microscopic observation by the objective lens is performed along the line illumination transmitted through the substrate to be inspected, so that glare can be greatly reduced and a highly accurate defect inspection can be performed. Can be realized.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. 1 to 3 show a schematic configuration of a substrate inspection apparatus to which an embodiment of the present invention is applied. In the drawing, reference numeral 1 denotes an apparatus main body, on which a holder 2 is fixedly provided as a substrate to be inspected holding means. This holder 2 holds and mounts a large substrate 3 to be inspected such as a glass substrate used for an LCD.
A plurality of substrate pressing members 201 are arranged along the peripheral edge,
The substrate pressing member 201 positions the substrate 3 to be inspected on the holder 2 and allows the substrate 3 to be suction-held so as not to fall off.

As shown in FIG. 3, a pair of guide rails 4 are arranged in parallel on the main body 1 along both side edges of the holder 2. An observation unit support 5 is disposed above the holder 2 so as to straddle the holder 2, and the observation unit support 5 is moved along the guide rail 4 in the illustrated Y-axis direction on the surface of the substrate 3 to be inspected. It is provided as possible.

The observation unit 6 is supported by the observation unit support 5 so as to be movable in the X-axis direction shown in the drawing, which is orthogonal to the moving direction (Y direction) of the observation unit support 5. Also,
A transmission line illumination 7 is provided integrally with the observation unit support section 5 so as to face the movement line of the observation unit. The transmission line illumination 7 is disposed on the back plate of the support portion 5 passing below the holder 2 along the X-axis direction in the drawing, and performs linear transmission illumination transmitted from below the substrate 3 to be inspected. Together with the unit supporting portion 5, it is movable in the illustrated Y-axis direction.

Here, the transmission line illumination 7 has, for example, a light source 71 and a solid glass rod 72 as shown in FIG. 4, and transmits light incident on the end of the glass rod 72 from the light source 71. Along with the total reflection transmission in the glass rod 72, the light is diffused by white stripes 73 applied along the back of the glass rod 72, and linear light is emitted by the lens action of the glass rod 72. . The transmission line illumination is not limited to the above, and may be line illumination using a fluorescent lamp or the like.

The observation unit 6 has a micro observation unit 9 provided with an index illumination 8 for micro observation and a macro illumination 10 for macro observation. The indicator illumination 8 projects the optically condensed spot light onto a defect on the surface of the substrate 3 to be inspected. The light reflected by the spot light on the surface of the substrate 3 to be inspected is brighter than the light reflected by the macro illumination 10, and can be visually observed even during macro observation by the macro illumination 10. Further, the micro observation unit 9 has an objective lens 91, an eyepiece lens 92, and a microscope function having an epi-illumination (not shown) so that an image on the surface of the substrate 3 to be inspected can be observed by the eyepiece lens 92 via the objective lens 91. ing. The micro observation unit 9 has a TV camera 93 through a trinocular tube.
Is attached, and when visual micro observation is not required, only the TV camera 93 can be attached via a straight tube. This TV camera 93 has an objective lens 9
1. Observe the observation image of the surface of the inspection target substrate 3 obtained from
It is displayed on the V monitor 12.

The macro illumination 10 is used for macro observation, and irradiates a part of the surface of the substrate 3 on the holder 2 with the macro illumination light 101. The macro illumination 10 can adjust an illumination angle with respect to the surface of the substrate 3 to be inspected to an optimum angle for macro observation.

The apparatus main body 1 is provided with a Y scale 13 for detecting the position coordinates of the observation unit support 5 in the Y-axis direction.
An X scale 14 for detecting position coordinates in the direction is provided. The control unit 11 also manages the position coordinates of the Y scale 13 and the X scale 14, and controls the movement of the observation unit support unit 5 and the observation unit 6, and controls the optical axis of the indicator illumination 8 and the objective lens 91. The distance X0 from the optical axis is stored in advance, and a predetermined instruction is given in a state where the spot light of the indicator light 8 is located at a defect portion on the substrate 3 to be inspected. The position coordinates of each defective part are obtained from the data of the above, and the position coordinates of each defective part are recorded. Based on the position coordinates, the distance data between the optical axis of the indicator illumination 8 and the optical axis of the objective lens 91, the index is calculated. Micro-observation unit 9 at the defect designated by
The movement of the observation unit support 5 and the observation unit 6 is controlled so that the optical axes of the objective lenses 91 coincide with each other.

Next, the operation of the embodiment configured as described above will be described. First, when performing macro observation of the surface of a substrate to be inspected, the observation unit supporting portion 5 is retracted to the initial position shown in FIG.
In this state, the substrate 3 to be inspected is
Is positioned and suction-held so as not to fall off, and a defect inspection is started from this state.

Next, the macro illumination 10 of the observation unit 6 is turned on, and the surface of the substrate 3 to be inspected on the holder 2 is irradiated with macro illumination light 101. Then, from this state, the observation unit 6 is linearly moved in the X-axis direction along the observation unit support part 5 as shown in FIG. 3, and further, as shown by the two-dot chain line from the solid line in FIG. Is linearly moved along the guide rail 4 in the Y-axis direction to obtain the macro illumination light 1.
In step 01, the surface of the substrate 3 to be inspected in the holder 2 is raster-scanned, and a defect inspection such as a scratch or dirt is visually performed by the inspector on the entire surface of the substrate 3 to be inspected. In this case, the angle of the macro illumination light 101 on the inspection target substrate 3 is adjusted to an angle at which an optimal macro observation can be performed.

In such a macro observation, when the inspector recognizes a defective portion in the macro illumination light 101 on the substrate 3 to be inspected, the inspector moves the observation unit 6 in the X and Y axis directions, and The spotlight of the indicator illumination 8 is positioned at a defect on the inspection substrate 3.

Next, when the examiner gives a predetermined instruction to the control unit 11, the control unit 11 controls the Y scale 13 and the X scale.
The position coordinates of the defect on the substrate 3 to be inspected are obtained based on the data of the scale 14, and then the position coordinate data, the optical axis of the indicator illumination 8 and the objective lens 9 stored in advance.
The observation unit supporting unit 5 and the micro observation unit 9 are controlled to move using the data on the distance from the optical axis 1 and the optical axis of the objective lens 91 coincides with the detected defect on the substrate 3 to be inspected.

As a result, the designated defect is brought into the center of the field of view of the objective lens 91, and the microscopic observation of the defect can be performed through the objective lens 91. Inspection board 3
An image of a defect on the surface can be taken and microscopically observed on the TV monitor 12. In this case, it is possible to perform micro-observation by switching to epi-illumination or transmitted illumination according to the type of defect.

Thereafter, when the inspector again instructs macro observation, the defect portion on the substrate 3 to be inspected is returned to the irradiation range of the macro illumination light 101, and the defect can be confirmed by macro observation. Then, when observing another defective portion with the macro illumination light 101, the above-described operation is repeated.

Thereafter, when the macro observation is completed, the observer gives a predetermined instruction to the control unit 11 again, returns the observation unit support unit 5 to the initial position, and removes the inspected inspected substrate 3 from the holder 2. The substrate 3 is removed and replaced with a new substrate 3 to be inspected.

In the above description, macro observation is performed while illuminating a part of the holder 2 on the substrate 3 to be inspected by the macro illumination 10, and when a defect is recognized on the substrate 3 to be inspected, the operation shifts to micro observation. As described above, when performing only macro observation using the macro illumination 10, the observation unit support unit 5 is retracted to the initial position, and the macro illumination 10 is switched from the state in which the inspection target substrate 3 is placed and held on the holder 2. When turned on, the surface of the substrate 3 to be inspected on the holder 2 is irradiated with partial macro illumination light 101. From this state, the macro illumination is performed while the observation unit 6 is linearly moved in the X-axis direction along the observation unit support portion 5 and the observation unit support portion 5 is linearly moved in the Y-axis direction along the guide rail 4. By performing a raster scan on the substrate 3 to be inspected of the holder 2 with the light 101, the inspector visually inspects the entire surface of the substrate 3 for defect inspection. in this case,
The spot light of the index illumination 8 is matched with the defective part in the macro illumination light 101, and the position coordinates of the defective part can be stored in the memory of the control unit 11.

When performing micro-observation by the micro-observation unit 9 for each defect portion stored in the memory of the control unit 11, the transmission line illumination 7 is turned on from the state where the observation unit support unit 5 is retracted to the initial position. The light is turned on, and linear transmission illumination is irradiated from below the holder 2 in the X-axis direction. In this state, the control unit 11 controls the objective of the micro-observation unit 9 based on the coordinate data of each defective part stored in the memory and the interval data between the optical axis of the indicator illumination 8 and the optical axis of the objective lens 91. Lens 91 is transmitted line illumination 7
By moving the observation unit support 5 linearly in the Y-axis direction along the guide rail 4, the optical axis of the objective lens 91 is automatically moved to each designated defect. At the same time, the microscopic observation with the microscope can be performed, and at the same time, the surface of the substrate 3 to be inspected is imaged by the TV camera 93 and displayed on the TV monitor 12. Again,
It is possible to switch to epi-illumination instead of transmitted illumination in accordance with the type of defect.

Accordingly, in this case, the observation unit supporting portion 5 is provided so as to straddle the fixed holder 2 holding the substrate 3 to be inspected and is movable on the surface of the substrate 3 to be inspected in the Y-axis direction. Together with the observation unit support 5
A micro observation unit 9 provided with a micro observation index illumination 8 movably in the X axis direction orthogonal to the Y axis direction of the observation unit support 5 on the substrate 3 to be inspected, and a macro observation macro An observation unit 6 having illumination 10 is provided, and the observation unit support 5 moves on the surface of the substrate 3 to be inspected along the Y-axis direction, and the observation unit 6 moves on the surface of the substrate 3. By moving in the X-axis direction orthogonal to the direction, macro observation with macro illumination 10 for macro observation or micro observation with micro observation unit 9 provided with index illumination 8 for micro observation is performed. Thus, the holder 2 is fixed, and the observation unit support 5 moves in one direction on the surface of the substrate 3 to be inspected, and the observation unit 6 moves in a direction orthogonal to the movement direction of the observation unit support 5 on the surface of the substrate 3 to be inspected. Movement of the observation unit 6
Can be moved to any position on the surface of the substrate 3 to be inspected, so that the holder 2 can be kept almost the same size as the area of the substrate 3 to be inspected. The installation area can be significantly reduced.

The observation unit 6 is placed on the surface of the substrate 3 to be inspected.
Is moved, the macro observation is performed in the range of the macro illumination light 101 of the macro illumination 10 that partially illuminates the surface of the substrate 3 to be inspected. Since macro observation can be performed, defect inspection by high-precision macro observation can be realized, and since the micro observation unit is arranged near the macro illumination light 101, the inspector can mount the eyepiece 92 in the same place. It is possible to peep, and it is possible to perform microscopic observation with a microscope while directly confirming the state of the defective part with the naked eye, and to accurately grasp the state of the defective part.

Further, since the microscopic observation by the objective lens 91 of the microscopic observation unit 9 is performed along the line illumination transmitted through the substrate 3 to be inspected by the transmission line illumination 7, the entire surface of the substrate 3 to be inspected for microscopic observation. The glare can be greatly reduced as compared with the case of shining by transmitted light, and a highly accurate defect inspection by micro observation can be realized in the range of line illumination. In addition, since the transmission line illumination 7 is provided integrally with the observation unit support portion 5, a follow-up driving mechanism is not required as compared with a configuration in which a transmission illumination unit including a Rambehouse and a condenser lens follows the movement of the objective lens. In addition, the size of the apparatus can be reduced, and transmitted illumination with less failure can be provided.

[0031]

As described above, according to the present invention, the substrate holding means to be inspected is fixed and the observation unit supporting means is moved in one direction on the surface of the substrate to be inspected, and the surface of the substrate to be inspected is moved by the observation unit. Since the observation unit can be moved to any position on the surface of the substrate to be inspected by moving the observation unit supporting means in the direction perpendicular to the moving direction of the observation unit supporting means, The size of the device can be reduced to approximately the same size, and the size of the device can be reduced, and the installation area of the device can be significantly reduced.

Since the macro observation is performed by the macro illumination for partially illuminating the inspection target substrate surface while moving the observation unit on the inspection target substrate surface, the macro observation is performed in a limited narrow spot illumination range. Macro observation is performed, and highly accurate defect inspection can be realized.

Since microscopic observation with an objective lens is performed along line illumination transmitted through the substrate to be inspected,
The glare can be greatly reduced as compared with the case where the entire surface of the substrate to be inspected shines by the transmitted light, and the follow-up drive mechanism becomes unnecessary by providing the line illumination integrally with the observation support member.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of an embodiment of the present invention.

FIG. 2 is a side view showing a schematic configuration of the embodiment.

FIG. 3 is a top view illustrating a schematic configuration of an embodiment.

FIG. 4 is a diagram showing a schematic configuration of transmission line illumination used in one embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Device main body, 2 ... Holder, 201 ... Board holding member, 3 ... Inspection board, 4 ... Guide rail, 5 ... Observation unit support part, 6 ... Observation unit, 7 ... Transmission line illumination, 71 ... Light source part, 72 ... glass rod, 73 ... white stripes, 8 ... indicator illumination, 9 ... micro observation unit, 91 ... objective lens, 92 ... eyepiece, 93 ... TV camera, 10 ... macro illumination, 101 ... macro illumination light, 11 ... control Part, 12 ... TV monitor, 13 ... Y scale, 14 ... X scale.

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Junichi Ono 2-43-2 Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd.

Claims (3)

[Claims] 1. A fixed substrate-to-be-inspected holding means for holding a substrate-to-be-inspected, and arranged so as to straddle the substrate-to-be-inspected and capable of moving along one direction on the surface of the substrate to be inspected. A macro observation system and a micro observation system which are provided in the observation unit support means so as to be movable in a direction orthogonal to a moving direction of the observation unit support means on the substrate to be inspected. An observation unit having a system; and a movement of the observation unit support means in one direction on the surface of the substrate to be inspected and a moving direction of the observation unit support means on the surface of the substrate to be inspected. A substrate inspection apparatus, wherein a macro observation or a micro observation by the observation unit is enabled by a movement in a direction perpendicular to the substrate inspection apparatus. 2. An observation unit comprising: a macro observation system having macro illumination for partially illuminating the surface of the substrate to be inspected; an illumination for an index; and an object for setting an observation axis position based on the illumination range for the index. The substrate inspection apparatus according to claim 1, further comprising a micro observation system including a lens. 3. The observation unit supporting means according to claim 1, wherein the observation unit support means is arranged along a moving direction of the observation unit, and is integrally provided with line illumination transmitted through the substrate to be inspected. Board inspection equipment.