CN100368794C - Substrate inspecting device - Google Patents
Substrate inspecting device Download PDFInfo
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- CN100368794C CN100368794C CNB028219295A CN02821929A CN100368794C CN 100368794 C CN100368794 C CN 100368794C CN B028219295 A CNB028219295 A CN B028219295A CN 02821929 A CN02821929 A CN 02821929A CN 100368794 C CN100368794 C CN 100368794C
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
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- General Health & Medical Sciences (AREA)
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A substrate inspecting device comprises a fixed stage for placing a subject thereon, a gate type arm disposed astride the subject placed on the fixed stage, and two inspection heads disposed back to back with the horizontal beam of the gate type arm interposed therebetween.
Description
Technical field
The present invention relates to the base board checking device that uses in the defect inspection of glass substrate, color filter large-size glass substrates such as (colour filter) of LCD flat-panel monitors such as (LCD) (FPD) for example.
Background technology
The glass substrate of LCD maximizes year by year, has occurred surpassing the size of 1000mm recently.This large-size glass substrate is in order to improve the service efficiency of same plate size, takes multiaspects such as 9,6,4 corresponding to the plate size.
Figure 12 is the structural drawing that existing this base board checking device is shown.This base board checking device is documented in Japanese patent laid-open 8-171057 number.This base board checking device is arranged so that down that objective table 203 can move by the guide rail 202 of Y direction on pedestal 201.And be arranged so that objective table 205 can move by the guide rail 204 of directions X on this time objective table 203.The large-size glass substrate 206 of should having gone up on objective table 205 mounting.
In addition, on pedestal 201, be provided with support 207,, can be provided with two optical heads 209,210 movably to directions X by guide rail 208 in the side of this support 207.On these optical heads 209,210, be separately installed with television camera (TV video camera) 211,212.
In such base board checking device, according to the size of large-size glass substrate 206, change the face number or the pattern spacing that are adopted, therefore, suitably regulate the interval between the optical head 209,210, make it consistent with pattern spacing etc.
After the interval that optical head 209,210 is set, move by only making down objective table 203 and last objective table 205, observe a same part simultaneously at adjacent two figures of large-size glass substrate 206.
In recent years, the turnout of LCD increases sharply, and requires also to improve for the shorteningization of measuring interval time required in the inspecting substrate, the miniaturization of testing fixture body.And, from user's angle,, also require the miniaturization of testing fixture body for the suppression equipment investment.Along with the maximization of display, the large-size glass substrate of minor face size above 1000mm appearred, and therefore, the angle at conveying and cost also must make the miniaturization of testing fixture body.
Opposite with such viewpoint, the aforesaid substrate testing fixture needs to make down objective table 203, goes up 4 times or more the space of objective table 205 at the substrate size that moves on the XY direction, and the device body increase is equivalent to the size in this space.
Figure 13 is the figure that existing this kind base board checking device structure is shown.This base board checking device is documented in the Japanese patent laid-open 11-94756 communique, seeks the miniaturization of device body.This base board checking device is provided with the retainer 303 that is used for mounting large-size glass substrate 302 on stage base 301.
In addition,, be provided with guide rail 304,404 respectively, on these guide rails 304,304, can be provided with the microlens transfer table 305 of a type movably to the Y direction in stage base 301 both sides.On the horizontal beam 306 of this microlens transfer table 305, can be provided with microlens 307 movably to directions X.
On the base plate of microlens transfer table 305, be provided with through line illumination 308.In microlens 307, microscopic observation unit 309 is provided with object lens 310 and eyepiece 311.In addition, on microlens 307, be provided with macroscopic view illumination 312 and index with throwing light on 313.
On microscopic observation unit 309, TV video camera 314 is installed.Utilize the observation image of the large-size glass substrate 302 of these TV video camera 314 shootings, be presented on the TV Monitor 315.Control part 316 carries out the mobile control of the management of defective locations coordinate and microlens transfer table 30 and microlens 307.
In such base board checking device, microlens 307 is moved along microlens transfer table 305 to the directions X straight line, and microlens transfer table 305 is moved to Y direction straight line along guide rail 304,304.Thus, under the state that large-size glass substrate 302 is fixed, can make the whole face of 307 pairs of large-size glass substrates 302 of microlens carry out raster scanning, check.
But, in base board checking device shown in Figure 13, microlens 307 need be located on the microlens transfer table 305, the whole face of large-size glass substrate 302 is observed.Therefore, on pedestal 301, the mobile space A of microlens transfer table 305 need be set on the position of leaving retainer 303,301 one-tenth maximizations of pedestal increase the size of this mobile space A.
In addition, require the measuring interval time required in the inspecting substrate to shorten, but owing to come the very little large-size glass substrate 302 of 1000mm angle square is measured with a microlens 307, so the shortening of measuring interval time is limited.
Figure 14 is the appearance figure that has glass substrates such as FPD now.On four jiaos of glass substrate shown in Figure 14, duplicate the mark 200 that in each manufacturing process of FPD etc., is used to adjust the position.Among Figure 14, show the mark 200 that in the manufacturing process of regulation, duplicates.When the protective seam on being coated in substrate duplicates the figure that is formed on the mask exactly, on the mark 200 that forms on four jiaos of glass substrate, accurately aim at mark and exposure on four jiaos that are formed at mask.
Departing from of defective such as the fuzzy or shortcoming of the focus of each mark on the glass substrate that sends with conveyor or mark checked in downstream in each manufacturing process.Afterwards, do not exist under the situation that defective or mark depart from, judge that to duplicate position adjustment good, upstream side accurate at these marks.
Four TV video cameras are set on this conveyor, take four jiaos mark simultaneously and check.But, in this structure, owing to be provided with four TV video cameras, so cost uprises.
Summary of the invention
The purpose of this invention is to provide a kind of base board checking device that can shorten the miniaturization of required measuring interval time of inspecting substrate, implement device body.
Base board checking device of the present invention possesses: objective table, and mounting is tested haves a medical check-up; Door type arm is crossed over described tested have a medical check-up of mounting on this objective table, has and the parallel horizontal beam of this tested upper surface of having a medical check-up; Check heads for two, the horizontal beam of this type arm of sandwich and with mutually back to the state setting.
Description of drawings
Fig. 1 is the stereoscopic figure that the base board checking device structure of first embodiment of the invention is shown.
Fig. 2 is the side view that the base board checking device structure of first embodiment of the invention is shown.
Fig. 3 is the figure of mobile status that the inspection head of first embodiment of the invention is shown.
Fig. 4 A, Fig. 4 B are the figure that the viewing area in the inspection head of first embodiment of the invention is shown.
Fig. 5 is the side view that the base board checking device structure of second embodiment of the invention is shown.
Fig. 6 is the side sectional view that the base board checking device structure of third embodiment of the invention is shown.
Fig. 7 is the front elevation of outward appearance that the base board checking device of third embodiment of the invention is shown.
Fig. 8 is the vertical view of structure that the roller path of third embodiment of the invention is shown.
Fig. 9 is the side view of each mechanism structure that the attitude reference device of third embodiment of the invention is shown.
Figure 10 is the side view that attitude reference device's structure of third embodiment of the invention is shown.
Figure 11 is the stereoscopic figure that the base board checking device structure of four embodiment of the invention is shown.
Figure 12 is the figure that existing base board checking device structure is shown.
Figure 13 is the figure that existing base board checking device structure is shown.
Figure 14 is the appearance figure of embodiment of the present invention and existing glass substrate.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
Fig. 1 and Fig. 2 are the figure that the base board checking device structure of first embodiment of the invention is shown, and Fig. 1 is stereoscopic figure, and Fig. 2 is a side view.
This base board checking device is fixed with the objective table (fixedly objective table) 3 of mounting large-size glass substrate 2 on pedestal 1.Regulation place on this objective table 3 is provided with a plurality of substrate compacting parts 4.A plurality of substrate compacting parts 4 for example keep large-size glass substrate 2 absorption.
In the left side and the right side of pedestal 1, be respectively equipped with guide rail 6,6.On these guide rails 6,6, cross over objective table 3 and can be provided with the inspection transfer table (door type arm) 7 of a type movably to the Y direction.
Check on the horizontal beam 71 of a transfer table 7 at this, sandwich horizontal beam 71, with mutually back to state be provided with two and check 81,82.By make the spherical guide rails rotation that is located in the horizontal beam 71 with motor, these can be checked that 81,82 move to directions X along horizontal beam 71.As checking 81,82, can use various inspection heads, for example defective or figure are amplified inspection head, the inspection head of instrumentation graphics shape or the inspection head of observing that carries out the beam split photometry of color filter.
Checking on 81,82, be separately installed with object lens 83,83.Checking on 81,82, with lens barrel 91,92 TV video camera 93,94 has been installed by linking respectively.
Check that 81,82 are arranged to and can move to the direction (directions X) vertical with respect to the moving direction (Y direction) of checking a transfer table 7.Check that 81,82 clip horizontal beam 71, on the direction identical, dispose with predetermined distance with the moving direction of checking a transfer table 7.
As shown in Figure 2, check between the optical axis of each objective system of 81,82, checking in 81,82 the orientation (Y direction), be set at 1/2nd of the dimension D that is not more than large-size glass substrate 2 apart from F.
Checking that assemble following inscape: comprise the imaging optical system of object lens 83,83,83,83 pairs of pictures that remain on the large-size glass substrate 2 on the objective table 3 respectively of described object lens carry out imaging on 81,82; Lamp optical system is to large-size glass substrate 2 illuminations; Observing system, the picture of observation large-size glass substrate 2; Focusing mechanism is aimed at focus on large-size glass substrate 2.Imaging optical system has the translation function (rotation converter) and the focus function (automatic focusing) of object lens 83, and lamp optical system has the indirect illumination function, is provided with above-mentioned TV video camera 93,94 on observing system.The translation function of object lens 83,83 and focus function can be carried out remote control by control part 10 by motorized.
Each TV video camera 93,94 is taken respectively by checking an observation image of 81,82 large-size glass substrates of observing 2, and exports each picture signal.These picture signals are sent to control part 10.
In addition, as shown in Figure 1, pedestal 1 is provided with Y scale 11, checks that a transfer table 7 is provided with X scale 12.Control part 10 has the management of the position coordinates that carries out Y scale 11 and X scale 12 or checks a transfer table 7 and check the function of 81,82 mobile control.
In addition, control energy portion 10 has following function: input is from each picture signal of TV video camera 93,94 outputs, and in these picture signals, select (selecting arrangement) either party or two sides' picture signal, the observation image of the large-size glass substrate 2 that this picture signal is represented is presented on the TV Monitor (monitor apparatus) 13.
In addition, control part 10 has following function: checking a transfer table 7 and checking 81,82 mobile control and make each viewing area of checking 81,82 pairs of large-size glass substrates 2 under the situation that the XY direction has moved, make the part overlapped (repetition) of the boundary member of these viewing areas.
Below, the action of base board checking device is as constituted above described.When supplying with large-size glass substrate 2 on objective table 3, large-size glass substrate 2 is positioned by a plurality of substrate compacting parts 4, and is adsorbed and remains on the objective table 3.
Fig. 3 is the figure that the mobile status of checking head is shown.Afterwards, control part 10 makes through line illumination 14,14 bright lamps, and makes and check a transfer table 7 and check that 93,94 move to true origin position O shown in Figure 3.Afterwards, control part 10 will check a transfer table 7 and check that 81,82 are controlled to be to the X-Y direction and move, and move and check each observation place of 81,82.
That is, check that a transfer table 7 moves to Y direction straight line along guide rail 6,6, and each checks that 81,82 horizontal beam 71 along an inspection transfer table 7 moves to the directions X straight line.
At this moment, shown in Fig. 4 A, Fig. 4 B, each checks that 81,82 each that constitute in about 1/2nd zone by 2 whole of large-size glass substrates check viewing area P
1, P
2Interior moving.That is, shown in Fig. 4 A, the object lens 83 of a side inspection 81 are being checked a viewing area P
1In move, and shown in Fig. 4 B, the object lens 83 of the opposing party's inspection 82 are being checked a viewing area P
2Interior moving.Therefore, check a transfer table 7 and check that 81,82 mobile in roughly 1/2nd the zone of 2 whole of large-size glass substrates.
Have, control part 10 is carrying out a procuratorial work transfer table 7 and is checking 81,82 mobile control and make and check that each optical axis (each optical axis of object lens 83,83) of 81,82 checks a viewing area P respectively at each again
1, P
2Under the interior situation about moving, check head observation viewing area P at these
1, P
2Boundary makes regional P
1, P
2A part overlapped.
Meanwhile, the inspection viewing area P that observes of the object lens 83 of TV video camera 93 inspections for shooting 81
1The observation image of interior large-size glass substrate 2, and export its picture signal.Meanwhile, a viewing area P of object lens 83 observations of TV video camera 94 microlens 82 for shooting
2The observation image of interior large-size glass substrate 2, and export its picture signal.These picture signals are sent to control part 10.
In addition, control part 10 is read each defect coordinate data that extracted by other macro inspection apparatus, on the large-size glass substrate 2, and obtain the position coordinates of defective part according to the data of Y scale 11 and X scale 12, to checking a transfer table 7 and check that 81 move control, the optical axis of feasible inspection 81 is consistent with defective part.
Thus, defective part enters in the visual field of checking 81 object lens 83, and this defective part is amplified by object lens 83.Afterwards, the image of the defective part that is exaggerated is taken by TV video camera 93, is presented on the TV Monitor 3.
In addition, carry out under the situation of raster scanning at whole face large-size glass substrate 2, control part 10 makes checks that a transfer table 7 moves on the Y direction, and make check that 81,82 move on directions X, equally, also can import the enlarged image data that are taken into a TV video camera 93,94 of checking 81,82.
After finishing this microscopic observation,, then check a transfer table 7 and check that 81,82 return to initial position if control part 10 is sent the indication of regulation.Afterwards, unload from objective table 3 and to check the large-size glass substrate 2 finish, new unchecked large-size glass substrate 2 by mounting to objective table 3.
As mentioned above, in the base board checking device of above-mentioned first embodiment, possess: the objective table 3 of mounting large-size glass substrate 2; Check a transfer table 7, cross over the large-size glass substrate 2 of mounting on this objective table 3 and be provided with, and be arranged to and move to the Y direction with respect to objective table 3; Check 81,82 for two, be arranged to and move to the direction (directions X) vertical with the moving direction of this inspection moving stage 7, and be positioned at each object lens 83,83 under the state in the outside, on the direction identical, dispose with predetermined distance with the moving direction of checking a transfer table 7.
Thus, on the space of objective table 3, add in the space in the space that each guide rail 6 is set, can accommodate and check that a transfer table 7 and two check 81,82, can narrow down to the limit with the device body size.Specifically, as shown in Figures 2 and 3, the longitudinal size S of device body can be narrowed down to the big a little size of Y direction dimension D than large-size glass substrate 2.In addition, in inspection, check that 81,82 can not protrude in the outside of large-size glass substrate 2, but the saving in the space of implement device setting area.
In addition, as shown in Figure 3, can be with the width dimensions S of device body
2, narrow down to the big a little size of size than the width that on the width of large-size glass substrate 2, adds two pillars checking a transfer table 7.
And, shown in Fig. 4 A, 4B, check 81,82 for two, as long as respectively at roughly each viewing area P of 1/2nd of whole of large-size glass substrate 2
1, P
2Interior moving gets final product.Therefore, compare, the shift motion that moves to the Y direction of checking a transfer table 7 can be shortened into 1/2nd, can shorten the measuring interval time with only possessing a situation of checking head.On the basis of shortening this displacement of checking a transfer table 7, check 81,82 by on horizontal beam 71, being symmetrical arranged two back to ground, can improve and check 81,82 a balance, alleviate load drive system for the horizontal beam 71 of checking a transfer table 7.
Therefore, not only can satisfy the rapid increase of production of liquid crystal displays amount, and can satisfy the inspecting substrate shorteningization of required measuring interval time, further can satisfy the requirement of the device body miniaturization that the user proposes for the suppression equipment investment.
In addition, with between two optical axises of checking each objective system of 81,82 apart from F, be set at 1/2nd of the longitudinal size that is not more than large-size glass substrate 2, and will check 81,82 be arranged to mutually back to.Thus, check that 81,82 can be to the outstanding large-size in the outside of large-size glass substrate 2, whole of promptly can observe large-size glass substrate 2 reliably for two.
In addition, making two to check under 81,82 situation about in each checks a viewing area, moving respectively, check a viewing area P at these
1, P
2Boundary, by making regional P
1, P
2A part overlapped, can check a viewing area P reliably
1, P
2The border.
Fig. 5 is the side view that the base board checking device structure of second embodiment of the present invention is shown.Among Fig. 5, marked identical mark in the part identical with Fig. 1.
Optical system structure when being provided with a TV video camera shown in Fig. 5.Check an identical structure of 81,82 formations for two.For example, check that with one 81 illustrate its structure for example: be provided with reflection with illumination 100, and from this reflection with the reflections of illumination 100 outputs with optical path of illuminating light on, be provided with semi-permeable and semi-reflecting mirror 102 behind the process lens 101.On the reflected light path of this semi-permeable and semi-reflecting mirror 102, be provided with object lens 103.Seeing through on the transmitted light path of semi-permeable and semi-reflecting mirror 102, be provided with light path bending catoptron 104 from these object lens 103.Another is checked a structure of 82 and checks that 81 identical, therefore omission explanation.
Between these check each light path bending catoptron 104,104 in 81,82, be provided with light path and select catoptron (selecting arrangement) 105.This light path is selected catoptron 105, will see through imaging len 106 backs to 93 reflections of a TV video camera from each picture of checking in 81,82 any by rotation.This TV video camera 93 can be arranged on check a side of 81,82 above.
According to such structure, check in 81,82 at each, incide semi-permeable and semi-reflecting mirror 102,102 with illumination light through after the lens 101,101 with the reflection of illumination 100 outputs from reflection respectively, on this semi-permeable and semi-reflecting mirror 102,102, after the reflection, shone on the surface of large-size glass substrate 2 by object lens 103,103.
Picture from these large-size glass substrate 2 surfaces, incide semi-permeable and semi-reflecting mirror 102,102 from object lens 103,103, and incide light path bending catoptron 104,104 after seeing through this semi-permeable and semi-reflecting mirror 102,102, after this reflection, incide light path and select catoptron 105.
Light path selects catoptron 105 by rotation, in the picture of self-check in the future 107,108 either party through after the imaging len 106 to 93 reflections of a TV video camera.TV video camera 93 is taken the picture from large-size glass substrate 2 surfaces of incident, exports its picture signal.
As mentioned above, according to above-mentioned second embodiment, select catoptron 105 by light path, incide a TV video camera 93 after coming a side's of self- check 81,82 picture to see through imaging len 106, therefore, two TV video cameras needn't be set, further simplify apparatus structure.
Have, in above-mentioned first, second embodiment, illustrated that being provided with two checks a situation of 81,82, but also can will check 81,82 an a plurality of inspection head that constitute by two, being arranged to can be with respect to checking that a transfer table 7 move.For example, by being provided with 2 groups by two inspection heads of checking that head constitutes, make a viewing area of checking head be reduced into whole of large-size glass substrate 6 roughly 1/4th, can further shorten the measuring interval time.
In addition, the aforesaid substrate testing fixture is not limited to the large-size glass substrate 6 of LCD, can be applicable in the defect inspection of large-size glass substrate such as glass substrate, color filter of flat-panel monitor (FPD).
Fig. 6 is the side sectional view of outward appearance that the base board checking device of third embodiment of the invention is shown, and Fig. 7 is its front elevation.This base board checking device be arranged in the FPD production line, on the conveying belt of conveyance large-size glass substrate between two manufacturing processes.
Cross over the roller path 101 and the left and right sides on pedestal 102, be provided with a type checking head transfer table (door type arm) 110.On the horizontal beam 111 of checking a transfer table 110, be provided with two by support unit 105 and check 103,104, check that 103,104 are arranged to by not shown motor and ball-screw for these two, can move to direction (directions X) with moving direction (Y direction) quadrature of conveyor 101.These check that 103,104 dispose back to ground with predetermined distance on horizontal beam 111.Check that 103,104 utilize actuator such as linear motor to be arranged to can move to the direction of arrow (Y direction) with respect to support unit 105, so that can adjust the interval L of both sides' object lens 106,107
Y
Check the 103, the 104th, observe and be provided with for the mark 200 to 108 4 jiaos of the glass substrates shown in Figure 14 amplifies.Checking on 103,104, object lens 106,107 are installed respectively, and with lens barrel 113,114 TV video camera 115,116 have been installed by video camera.Check on 103,104 at these and to have assembled: imaging optical system comprises the object lens 106,107 that as described later picture that remains on the glass substrate 108 on the conveyor 101 carried out imaging; Lamp optical system is to glass substrate 108 illuminations; Observing system is observed the picture of glass substrate 108; Focusing mechanism focuses on glass substrate 108.
Imaging optical system has the translation function (rotation converter) and the focus function (automatic focusing) of object lens 106,107, and lamp optical system has the indirect illumination function, is provided with above-mentioned TV video camera 115,116 on observing system.The translation function of object lens 106,107 and focus function can be carried out remote control by control part 117 by motorized.Each TV video camera 115,116 is taken to use respectively and is checked an observation image of 103,104 large-size glass substrates of observing 108, and exports each picture signal.These picture signals are sent to control part 117.
Have, control part 117 has again: management is from the position coordinates of the pulse of the scrambler of motor or check a transfer table 110, check the function of 103,104 mobile control; And input is from each picture signals of each TV video camera 115,116 outputs, be presented at function on the TV Monitor (monitoring arrangement) 118 with the image of its glass substrate 108.
Fig. 8 is the vertical view that the structure of roller path 101 is shown.The support unit 120,120 of roller path 101 both sides rotatably keeps cylindrical bar-shaped a plurality of roller bolsters 121.On each roller bolster 121, a plurality of rollers 122 have been supported with predetermined distance.One end of each roller bolster 121 connects support unit 120, in its end pulley 123 has been installed.On each pulley 123, hang belt 124 towards the Y direction.
In conveyor 101, rotate terminal pulley 123 by using the not shown driving mechanism that constitutes by motor, by each pulley 123 belt 124 is rotated to the Y direction.Thus, each pulley 123 is to the rotation of Y direction, and therefore, roller 122 rotates along with the rotation of each roller bolster 121, to the glass substrate 108 of Y direction conveyance lift-launch on a plurality of rollers 122.
On near the pedestal 102 the upstream side inlet of conveyor 101, be provided with the reflective photoelectric sensor 125 of the arrival situation that detects glass substrate 108.On near the pedestal 102 the outlet of the downstream of conveyor 101,, be provided with two reflective photoelectric sensors 126,127 of the arrival situation that detects glass substrate 108 along the direct of travel (Y direction) of glass substrate 108.
In addition, in the upstream side and the downstream of conveyor 101, be provided with the attitude reference device 41,42 that the glass substrate 108 that fortune is come is oriented the Y direction respectively. Attitude reference device 41,42 is made of two mechanisms 411,412 and 421,422 respectively, be arranged to respectively between the mechanism 411,412 and between the mechanism 421,422 between support unit 120,120 be formed centrally uniformly-spaced.Each mechanism 411,412,421,422 is made of cylinder 43 grades as described later.
And,,, be provided with the attitude reference device 51,52 that the glass substrate 108 that fortune is come is oriented directions X respectively along support unit 120,120 in the both sides of conveyor 101.Each attitude reference device 51,52 is made of movable platen 511,512,512, two groups of cylinders 513,513 of two pins etc. as described later.
Be Controlled portions such as each cylinder 117 controls of said motor, photoelectric sensor 125,26,127 and attitude reference device 41,42,51,52 are arranged again.
Fig. 9 is the side view of structure that each mechanism 411,412,421,422 of attitude reference device 41,42 is shown.In the mechanism of Fig. 9, the holding member 402 that keeps drive division 401 is installed on pedestal 102.Holding member 402 is tabular, and uprightly is arranged on the pedestal 102, is fixed with the cylinder 403 that constitutes drive division 401 on its side.Cylinder 403 is mounted to its movable part 404 is moved to the Y direction.
In addition, the side in holding member 402 upper ends can supported the compressed part 405 at the edge that is used for pressed glass substrate 108 with respect to described side rotary axis of earth.And, binding parts 406 are installed on movable part 404 front ends of cylinder 403, these binding parts 406 and compressed part 405 connect to and can rotate mutually.
When glass substrate 108 was not on conveyor 101, the movable part 404 of each mechanism 411,412,421,422 was housed in the cylinder 403, and the protrusion tab 4051 of compressed part 405 is kept out of the way passing through below the face a of glass substrate 108.
Figure 10 is the side view that attitude reference device's 51,52 structures are shown.In the mechanism of Figure 10, two groups of cylinders 513 are installed on pedestal 102 side by side.The section of movable platen 511 becomes " L " word shape, and movable part 514 front ends of each cylinder 513 are installed on its vertical plate 5111.In addition, on the transverse plate 5112 of movable platen 511, on the Y direction, supporting two pins 512 with the rotatable earth's axis of predetermined distance.
When glass substrate 108 was not on conveyor 101, the movable part 514,514 of each attitude reference device 51,52 was released in cylinder 513,513 respectively, and each movable platen 511,511 that possesses pin 512,512 is kept out of the way support unit 120,120 sides respectively.
Below, the action of the device that as above constitutes is described.
In the manufacturing process of upstream side, finish the glass substrate 108 of processing,, be delivered on the conveyor 101 by the upstream side inlet of not shown conveyor conveyance to conveyor 101.This glass substrate 108 is handled upside down along the Y direction on conveyor 101 by the driving of said motor, and when its leading edge arrived the position of photoelectric sensor 125, photoelectric sensor 125 detected glass substrate 108 and arrives on the conveyor 101.
Thereupon, when the leading edge of glass substrate 108 arrived the position of photoelectric sensor 126, photoelectric sensor 216 detected the arrival of glass substrate 108.When photoelectric sensor 126 detected the arrival of glass substrate 108, control part 117 slowed down the driving of said motor.Thus, glass substrate 108 slows down on the Y direction and advances.Afterwards, when the leading edge of glass substrate 108 arrived the position of photoelectric sensor 127, photoelectric sensor 127 detected the arrival of glass substrate 108.When photoelectric sensor 127 detected the arrival of glass substrate 108, control part 117 made said motor stop to drive.Thus, near the inspection position of glass substrate 108 central authorities of conveyor 101 stops.
Then, control part 117 drives attitude reference device 51,52.At this moment, control part 117 is withdrawn into each movable part 514 of attitude reference device 51,52 in the cylinder 513 simultaneously.At this moment, in each attitude reference device 51,52, each movable platen 511,511 on directions X towards conveyor 101 central mobile.Thus, the both sides of the edge of glass substrate 108 are pressed in conveyor 101 central authorities by each pin 512.Its result, glass substrate 108 is positioned in the substantial middle of directions X on the conveyor 101.
Then, control part 117 drives attitude reference device 41,42.At this moment, control part 117 is released each movable part 404 of mechanism 411,412,421,422 simultaneously in cylinder 403.At this moment, in each mechanism 411,412,421,422, along with the moving forwards that links parts 406, each compressed part 40 is rotated around axle 4050, and the protrusion tab 4051 of each compressed part 405 is erected into roughly with vertical by face a.Thus, the leading edge of glass substrate 108 is pressed to upstream side by each protrusion tab 4051 of mechanism 421,422, and back edge is pressed to the downstream by each protrusion tab 4051 of mechanism 411,412.At this moment, respectively sell 512, along with glass substrate 108 rotates to moving of Y direction with each side of glass substrate 108 contacts.Its result, glass substrate 108 is positioned in the substantial middle of directions X and Y direction on conveyor 101.
Then, when operation that the examiner stipulates control part 117, control part 117 checks that along checking that a transfer table 110 makes 103,104 move on directions X, and makes each check that 103,104 object lens 106,107 navigate to moving direction with respect to conveyor 101 and are positioned on each mark 200,200 of glass substrate 108 in left side.Have again, the optical axis of object lens 106 and object lens 107 be adjusted in advance at interval with between two marks 200,200 of arranging on the Y direction apart from consistent.Input has the Y direction size of space L of four marks 100 on four jiaos that are formed on glass substrate 108 in the control part 117
YWith directions X size of space L
X
The picture of the object lens 106 observed upstream side marks 200 of TV video camera 115 inspections for shooting 103, and export its picture signal.Meanwhile, the picture of the object lens 107 observed downstream marks 200 of TV video camera 116 inspections for shooting 104, and export its picture signal.These picture signals are sent to control part 117.
Then, when the operation of control part 117 being stipulated by the examiner, control part 117 is along checking a transfer table 110, to check 103,104 directions X size of space LX that move regulation, and make each check that 103,104 object lens 106,107 navigate to moving direction with respect to conveyor 101 and are positioned on each mark 200,200 of glass substrate 108 on right side.
The picture of the object lens 106 observed upstream side marks 200 of TV video camera 115 inspections for shooting 103, and export its picture signal.Meanwhile, the picture of the object lens 107 observed downstream marks 200 of TV video camera 116 inspections for shooting 104, and export its picture signal.These picture signals are sent to control part 117.
Afterwards, on the glass substrate 108 do not exist under the unusual situation on underlined, the operation that the examiner stipulates control part, control part 117 drives attitude reference devices 51,52.At this moment, control part 117 is released each movable part 514 of mechanism 51,52 simultaneously in cylinder 513.At this moment, in each attitude reference device 51,52, each movable platen 511,511 moves on directions X towards support unit 120,120 sides.Thus, each is sold 512 and keeps out of the way from the dual-side of glass substrate 108.
Then, control part 117 drives attitude reference device 41,42.This moment, control part 117 retracted each movable part 404 of mechanism 411,412,421,422 in the cylinder 403 simultaneously.At this moment, in each mechanism 411,412,421,422, rearward move along with linking parts 406, compressed part 405 is rotated around axle 4050, and the protrusion tab 4051 of compressed part 405 is kept out of the way the below by face a.
Afterwards, control part 117 drives said motor once more.Thus, glass substrate 108 on conveyor 101 downstream the manufacturing process of side move.
Have again, have under the unusual situation, glass substrate 108 is withdrawn from from conveyor 101 by the examiner at arbitrary mark of glass substrate 108.
In addition, under the situation of the mark on the glass substrate 108 of checking different size, by will checking that 103,104 move a certain distance with respect to support unit 105, and come corresponding to the positional information of four marks 200 on conveyor 101 that control part is imported this glass substrate 108.
In addition, if from design data with the directions X size of space of the mark on the various glass substrates 108 and Y direction size of space registered in advance in the storer of control part 117, then only by the classification information of input glass substrate in control part 117, the Y direction that each can be checked 103,104 object lens 106,107 at interval and check that 103,104 directions X displacement sets automatically.
As mentioned above, according to above-mentioned the 3rd embodiment, glass substrate be on the roller path wait during, can check the mark of adjusting the position, and, can carry out the mark that the position is adjusted simultaneously by enough two inspection heads, therefore, can shorten the processing time, wherein, this roller path is used for moving into glass substrate in manufacturing process.And, by to two check head in one direction (directions X) only control predetermined distance, can be on four jiaos mark easily the position adjustment respectively check head.
In addition, check the interval of head and the displacement of directions X, glass substrate that can corresponding various sizes by only adjusting two.
Moreover, checking that by will on roll-type is carried, carrying the glass substrate of coming the position positions, can check that head accurately is positioned each above the mark with two.
Promptly, glass substrate inspecting apparatus according to above-mentioned the 3rd embodiment, to transported the mark at least four angles on the object substrate of coming from the manufacturing process of upstream side by roller path, structure by cheapness is carried out determining defects or dimension measurement at short notice, above-mentioned object substrate can be flowed to the manufacturing process in downstream.
In addition, by on roll-type treehole note, object substrate being positioned, make two to check that head accurately is positioned on each object tag.In addition, by only adjusting two displacement and two distances of checking between the head of checking the horizontal beam direction of head, get final product the substrate of corresponding various sizes.
Have again, the inspection of four jiaos mark on the above-mentioned glass substrate, be not limited to the base board checking device of structure shown in above-mentioned the 3rd embodiment, shown in also available above-mentioned first, second embodiment, utilize the base board checking device of movably checking the structure of a transfer table to implement.
At this moment, utilize actuator such as linear motor will check that 81,82 are arranged to can move to the direction of arrow (Y direction) with respect to horizontal beam 71, so that can adjust the interval of both sides' object lens 83,83.Thus, make the Y direction size of space of mark consistent, can check two marks arranged side by side on the Y direction with the size of space of object lens 83,83.Afterwards, by make check 81,82 on directions X mobile predetermined distance, can check two other mark.
Figure 11 is the stereoscopic figure that the base board checking device structure of four embodiment of the invention is shown.Part identical with Fig. 1 among Figure 11 marks same tag.
The horizontal beam 71 of checking a transfer table 7 is provided with support unit 97, with the state that clips horizontal beam 71 TV video camera 93,94 is installed at the two ends of this support unit 97, checks head as each.On TV video camera 93,94, be separately installed with camera 95,96.The support unit 97 that possesses TV video camera 93,94 by being arranged on the not shown guide rail of horizontal beam 71 bottoms, can move on directions X along horizontal beam 71 integratedly with not shown motor.
Thus, in the base board checking device of above-mentioned the 4th embodiment,, can take the arbitrary portion of glass baseplate surface by on the direction identical, two TV video cameras 93,94 are set with predetermined distance with the moving direction of checking a transfer table 7.
Have, the present invention is not limited to the respective embodiments described above again, can suitably be out of shape in the scope that does not change purport and implement.
Industrial utilizability
According to the present invention, can provide a kind of base board checking device that shortens the miniaturization of required measuring interval time of inspecting substrate and implement device body.
Claims (11)
1. base board checking device is characterized in that possessing:
Objective table, mounting is tested haves a medical check-up;
Door type arm is crossed over described tested have a medical check-up of mounting on this objective table, has and the parallel horizontal beam of this tested upper surface of having a medical check-up;
Check heads for two, the horizontal beam of this type arm of sandwich and with mutually back to the state setting.
2. according to the base board checking device of claim 1, it is characterized in that,
The described head-clamp of respectively checking above-mentioned door type arm and is arranged back to ground mutually, and described each inspection head has a body of inspection, a described inspection body has length dimension in the orientation of above-mentioned each inspection head, below an end of this inspection body, object lens are installed, be assembled with lamp optical system, focusing mechanism in the other end with the installation site opposition side of these object lens, described each check that the object lens of head clip described horizontal beam, dispose back to ground mutually towards the outside.
3. according to the base board checking device of claim 1, it is characterized in that,
Described door type arm with respect to described objective table, can move in direction with described horizontal beam quadrature;
Check that head is arranged to move along the direction of the horizontal beam of described door type arm for described two, and, on the direction identical, dispose with predetermined distance with the moving direction of described door type arm.
4. according to the base board checking device of claim 1, it is characterized in that,
Distance between described two inspection optical axises of checking head, be less than or equal to described tested have a medical check-up described each check 1/2nd of size in the orientation of head.
5. according to the base board checking device of claim 1, it is characterized in that, possess:
Two camera heads are installed in described two respectively and check on the head;
Selected cell is selected at least one in described two camera heads;
Display part, the picture signal that input is exported from the described camera head of being selected by this selected cell shows described tested image of having a medical check-up.
6. according to the base board checking device of claim 1, it is characterized in that, possess:
Selected cell, select from described two check head respectively observe in the image one;
Camera head is taken the described observation picture of being selected by this selected cell;
Display part, input shows described tested image of having a medical check-up from the picture signal of described camera head output.
7. according to the base board checking device of claim 1, it is characterized in that,
Described tested corresponding each viewing area of having a medical check-up when checking that with described two head is mobile respectively, its part is overlapped.
8. according to the base board checking device of claim 1, it is characterized in that,
Check that head is made of the TV video camera respectively for described two.
9. according to the base board checking device of claim 1, it is characterized in that,
Described objective table is made of conveyor, and this conveyor conveyance is formed with described tested the having a medical check-up of regulation mark at least on four jiaos;
Described two check that head is arranged to can be along the horizontal beam of described door type arm, move in direction with described tested conveyance direction quadrature of having a medical check-up, and, dispose with predetermined distance in the direction identical with described tested moving direction of having a medical check-up;
Also possess:
Two image units are separately positioned on described two and check on the head, take the described mark on described tested the having a medical check-up;
Control module is controlled described two and is checked head only mobile predetermined distance simultaneously, looks like to be presented on the display part respectively with described each mark on described two image units shooting desired location, and with the observation of described each mark.
10. according to the base board checking device of claim 9, it is characterized in that,
Possesses detent mechanism, on described conveyor, with the described tested inspection position of having a medical check-up and being positioned at regulation.
11. the base board checking device according to claim 9 is characterized in that,
Check heads for described two, mutually back to being configured in along the horizontal beam of described door type arm movably on the support unit, and be arranged to removable so that can adjust described two intervals of checking head.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP339938/2001 | 2001-11-05 | ||
| JP2001339938A JP3929285B2 (en) | 2001-11-05 | 2001-11-05 | Board inspection equipment |
| JP000767/2002 | 2002-01-07 | ||
| JP2002000767A JP2003202209A (en) | 2002-01-07 | 2002-01-07 | Substrate inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1582393A CN1582393A (en) | 2005-02-16 |
| CN100368794C true CN100368794C (en) | 2008-02-13 |
Family
ID=26624355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028219295A Expired - Fee Related CN100368794C (en) | 2001-11-05 | 2002-11-05 | Substrate inspecting device |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR100634652B1 (en) |
| CN (1) | CN100368794C (en) |
| TW (1) | TWI264532B (en) |
| WO (1) | WO2003040711A1 (en) |
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| CN106442560A (en) * | 2016-08-23 | 2017-02-22 | 汕头大学 | Positioning measurement and defect detection method of display screen |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW200302345A (en) | 2003-08-01 |
| KR20040063131A (en) | 2004-07-12 |
| WO2003040711A1 (en) | 2003-05-15 |
| TWI264532B (en) | 2006-10-21 |
| CN1582393A (en) | 2005-02-16 |
| KR100634652B1 (en) | 2006-10-13 |
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