CN106896540A - Gantry locating platform - Google Patents
Gantry locating platform Download PDFInfo
- Publication number
- CN106896540A CN106896540A CN201710130840.3A CN201710130840A CN106896540A CN 106896540 A CN106896540 A CN 106896540A CN 201710130840 A CN201710130840 A CN 201710130840A CN 106896540 A CN106896540 A CN 106896540A
- Authority
- CN
- China
- Prior art keywords
- portal frame
- positioning mechanism
- line slideway
- locating platform
- axis mobile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Abstract
The invention discloses a kind of gantry locating platform, including：Marble platform, is arranged on the portal frame in marble platform, is arranged on the work head on portal frame, the Y-axis mobile positioning mechanism that control portal frame is translated in Y direction, and control work head in the X-axis mobile positioning mechanism of X-direction translation；X-axis mobile positioning mechanism includes：X-direction line slideway on portal frame, the X-direction linear motor for driving work head to be moved along the X-direction line slideway；Y-axis mobile positioning mechanism includes：Set up a pair of Y direction line slideways in the side of marble platform two separately, the Y direction linear motor for driving portal frame to be moved along this pair of Y direction line slideway；Marble platform is furnished with shock-absorbing lower margin.Gantry locating platform of the present invention, its positioning precision is high, and the work speed of service is fast, can realize laser measurement, laser repairing under high speed long range operating mode, and ensure that operating accuracy meets the demand of Liquid crystal production.
Description
Technical field
The present invention relates to gantry locating platform, can be used for electron trade, be mainly used in large-scale plane construction object entirety or
Person's Local treatment, including the cutting of liquid crystal panel, the reparation of liquid crystal panel, the defect inspection of liquid crystal panel, semiconductor device
Defect inspection.
Background technology
Liquid crystal display 10.5 generation production mobile platform is the important component of 10.5 generation panel producing lines, with Liquid crystal production water
The development degree for equalling the electron trade for standard is to weigh an important indicator for national science and technology strength.
The liquid crystal industry in the world flourished by 20 years, 10 generations from 2 generations industry development originally till now
Producing line, the efficiency and quality of production are greatly improved.By market survey, the industry of current China is in 5 generation producing lines to 8 generations substantially
Between producing line, efficiency and the unit cost of production are far below 10 generation producing lines, according to the deployment of the outline of Chinese government's device fabrication 2025,
Liquid crystal industry to 2025 China will comprehensively enter the 10G epoch.Exploitation good stability, the economy for reaching electron trade production requirement
The mobile position platform of type has good practical value.
Electron trade needs to use oversized locating platform (size is 4000mm × 4000mm), and navigates to 1 micron
Within main technological difficulties be：
1st, it is relatively costly using traditional Dali stone structure, and transport is inconvenient, and delivery date is more long, while to installing
It is higher with the environmental requirement for using.
2nd, area is bigger, controls the difficulty of compensation bigger, it is impossible to realize accurate control.
3rd, two Y-axis cannot realize real synchronization
4th, deformation generating capacity of the X-axis in both sides position and centre position is inconsistent, causes the position control of whole X-axis to produce
Deviation cannot be realized being accurately positioned.
The content of the invention
It is an object of the invention to provide a kind of gantry locating platform, its positioning precision is high, and the work speed of service is fast.
To achieve the above object, the technical scheme is that designing a kind of gantry locating platform, including：Marble is put down
Platform, is arranged on the portal frame in marble platform, is arranged on the work head on portal frame, and control portal frame is translated in Y direction
Y-axis mobile positioning mechanism, and control work head X-direction translation X-axis mobile positioning mechanism；
The X-axis mobile positioning mechanism includes：On portal frame and supporting work head X-direction line slideway, drive
Start building to make the X-direction linear motor that head is moved along the X-direction line slideway；
The Y-axis mobile positioning mechanism includes：Set up a pair of Y-axis sides in the side of marble platform two and supporting portal frame separately
To line slideway, the Y direction linear motor for driving portal frame to be moved along this pair of Y direction line slideway；
The marble platform is furnished with shock-absorbing lower margin.
Preferably, the X-axis mobile positioning mechanism also includes：For detecting X-axis of the work head in X-direction shift position
Direction grating sensor.
Preferably, the Y-axis mobile positioning mechanism also includes：For detecting Y-axis of the portal frame in Y direction shift position
Direction grating sensor.
Preferably, the size of the marble platform is 4000mm × 4000mm.
Preferably, the length of the X-direction line slideway is 3300mm, and the pay(useful) load of X-direction line slideway is big
In 50kg.
Preferably, the length of the Y direction line slideway is 3600mm, and the pay(useful) load of Y direction line slideway is big
In 60kg.
Preferably, the X-direction linear motor is iron-core-free linear motor.
Preferably, the Y direction linear motor is iron core linear motor.
Preferably, gantry locating platform, its maximum repetitive positioning accuracy is ± 2 μm, maximum work operation speed
It is 3 metre per second (m/s)s to spend.
The advantages of the present invention are：A kind of gantry locating platform is provided, its positioning precision is high, work operation
Speed is fast.
Mobile platform configuration of the present invention can be widely applied to the panel production in the generations of FPD 5 to 10 generations, be adapted to current main flow each
Size is planted, especially set out is that G10.5 is the maximum specification size run neck and neck with Japanese Sharp for mobile platform, be adapted to needs
The inspection of nano-precision and high speed and prosthetic appliance.Maximum repetitive positioning accuracy is ± 2 μm, maximum work operation speed
Degree is 3 metre per second (m/s)s, can effectively improve the productivity ratio of product, reduces original unit's cost of enterprise.
Liquid crystal platform is constituted：X- shaft lengths are:3300mm pay(useful) loads are more than 50kg materials:Purpose made technology aluminium section bar, moves
Power source is using iron-core-free linear motor, Y- shaft lengths:3600mm pay(useful) loads are more than 60kg, and power source uses the linear horse of iron core
Reach, platform is from high-quality Jinan marble as plane, product of the shock-absorbing lower margin from Germany.
The market competition of gantry-travelling platform concentrates on these three aspects of high speed, stabilization, precision in the world at present, especially
It is the accurate control positioning operation in high speed long range, not yet there is a set of rational control technology.
The present invention is directed to this background, there is provided lower key technology：
1. the mechanical structure of high rigidity, high speed and energy-conservation.
2. at high speed, the control system of high accuracy and energy-conservation.
3. for the foundation of the control technology for contacting operation.
The present invention also realizes following innovative point：
1. precision ± 2 μm, world's full accuracy are repeated.
2. maximum movement speed 1500mm/s, the domestic nearly twice of like product, the maximum speed of international industry.
3. laser measurement, laser repairing under high speed long range operating mode can be realized, and ensures that operating accuracy meets Liquid crystal production
Demand.
Specific embodiment
With reference to embodiment, specific embodiment of the invention is further described.Following examples are only used for more
Plus technical scheme is clearly demonstrated, and can not be limited the scope of the invention with this.
The present invention specific implementation technical scheme be：
A kind of gantry locating platform, including：Marble platform, is arranged on the portal frame in marble platform, is arranged on dragon
Work head on door frame, the Y-axis mobile positioning mechanism that control portal frame is translated in Y direction, and control work head are in X-axis side
To the X-axis mobile positioning mechanism of translation；
The X-axis mobile positioning mechanism includes：On portal frame and supporting work head X-direction line slideway, drive
Start building to make the X-direction linear motor that head is moved along the X-direction line slideway；
The Y-axis mobile positioning mechanism includes：Set up a pair of Y-axis sides in the side of marble platform two and supporting portal frame separately
To line slideway, the Y direction linear motor for driving portal frame to be moved along this pair of Y direction line slideway；
The marble platform is furnished with shock-absorbing lower margin.
The X-axis mobile positioning mechanism also includes：For detecting X-direction light of the work head in X-direction shift position
Gate sensor.
The Y-axis mobile positioning mechanism also includes：For detecting Y direction light of the portal frame in Y direction shift position
Gate sensor.
The size of the marble platform is 4000mm × 4000mm.
The length of the X-direction line slideway is 3300mm, and the pay(useful) load of X-direction line slideway is more than 50kg.
The length of the Y direction line slideway is 3600mm, and the pay(useful) load of Y direction line slideway is more than 60kg.
The X-direction linear motor is iron-core-free linear motor.
The Y direction linear motor is iron core linear motor.
Gantry locating platform, its maximum repetitive positioning accuracy is ± 2 μm, and the maximum work speed of service is 3 meters
It is per second.
The specification of gantry-travelling locating platform of the present invention is as shown in table 1.
The specification of the gantry-travelling locating platform of table 1
The commercial Application of gantry-travelling locating platform of the present invention is as shown in table 2.
The commercial Application of the gantry-travelling locating platform of table 2
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of the technology of the present invention principle is not departed from, some improvements and modifications can also be made, these improvements and modifications
Also should be regarded as protection scope of the present invention.
Claims (9)
1. gantry locating platform, it is characterised in that including：Marble platform, is arranged on the portal frame in marble platform, sets
Work head on portal frame, the Y-axis mobile positioning mechanism that control portal frame is translated in Y direction, and control work head are in X
The X-axis mobile positioning mechanism of direction of principal axis translation；
The X-axis mobile positioning mechanism includes：On portal frame and supporting work head X-direction line slideway, drive work
Make the X-direction linear motor that head is moved along the X-direction line slideway；
The Y-axis mobile positioning mechanism includes：A pair of the Y directions set up separately in the side of marble platform two and supporting portal frame are straight
Line guide rail, the Y direction linear motor for driving portal frame to be moved along this pair of Y direction line slideway；
The marble platform is furnished with shock-absorbing lower margin.
2. gantry locating platform according to claim 1, it is characterised in that the X-axis mobile positioning mechanism also includes：With
In detection work head X-direction shift position X-direction grating sensor.
3. gantry locating platform according to claim 2, it is characterised in that the Y-axis mobile positioning mechanism also includes：With
In detection portal frame Y direction shift position Y direction grating sensor.
4. gantry locating platform according to claim 3, it is characterised in that the size of the marble platform is 4000mm
×4000mm。
5. gantry locating platform according to claim 4, it is characterised in that the length of the X-direction line slideway is
3300mm, the pay(useful) load of X-direction line slideway is more than 50kg.
6. gantry locating platform according to claim 5, it is characterised in that the length of the Y direction line slideway is
3600mm, the pay(useful) load of Y direction line slideway is more than 60kg.
7. gantry locating platform according to claim 6, it is characterised in that the X-direction linear motor is iron-core-free
Linear motor.
8. gantry locating platform according to claim 7, it is characterised in that the Y direction linear motor is iron core line
Property motor.
9. gantry locating platform according to claim 8, it is characterised in that the maximum resetting of gantry locating platform
Precision is ± 2 μm, and the maximum work speed of service is 3 metre per second (m/s)s.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710130840.3A CN106896540A (en) | 2017-03-07 | 2017-03-07 | Gantry locating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710130840.3A CN106896540A (en) | 2017-03-07 | 2017-03-07 | Gantry locating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106896540A true CN106896540A (en) | 2017-06-27 |
Family
ID=59185934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710130840.3A Pending CN106896540A (en) | 2017-03-07 | 2017-03-07 | Gantry locating platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106896540A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108789290A (en) * | 2018-04-20 | 2018-11-13 | 苏州大懿智能装备有限公司 | Super-huge gantry locating platform |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1582393A (en) * | 2001-11-05 | 2005-02-16 | 奥林巴斯株式会社 | Substrate inspecting device |
| CN102095737A (en) * | 2010-12-23 | 2011-06-15 | 东莞市升力智能科技有限公司 | Single-workbench automatic detector of surface defect of flexible printed circuit board |
| KR20120048130A (en) * | 2010-11-05 | 2012-05-15 | (주)미래컴퍼니 | Substrate inspection apparatus and substrate inspection method |
-
2017
- 2017-03-07 CN CN201710130840.3A patent/CN106896540A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1582393A (en) * | 2001-11-05 | 2005-02-16 | 奥林巴斯株式会社 | Substrate inspecting device |
| KR20120048130A (en) * | 2010-11-05 | 2012-05-15 | (주)미래컴퍼니 | Substrate inspection apparatus and substrate inspection method |
| CN102095737A (en) * | 2010-12-23 | 2011-06-15 | 东莞市升力智能科技有限公司 | Single-workbench automatic detector of surface defect of flexible printed circuit board |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108789290A (en) * | 2018-04-20 | 2018-11-13 | 苏州大懿智能装备有限公司 | Super-huge gantry locating platform |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170627 |