CN101339143A - Appearance inspecting device for substrate - Google Patents
Appearance inspecting device for substrate Download PDFInfo
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- CN101339143A CN101339143A CNA2008101281276A CN200810128127A CN101339143A CN 101339143 A CN101339143 A CN 101339143A CN A2008101281276 A CNA2008101281276 A CN A2008101281276A CN 200810128127 A CN200810128127 A CN 200810128127A CN 101339143 A CN101339143 A CN 101339143A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
- G01N2021/177—Detector of the video camera type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a substrate appearance inspection device. detailed appearance inspection of whole surface can be carried out without taking out glass substrate on the product line, accordingly production period is shorten and manufacture equipment is miniaturized. The substrate appearance inspection device (1) has an illumination device (11) generating illumination light for irradiation on surface of substrate (50) on the product line (52); a camera (13) picking-up image of surface of the substrate (50) illuminated by the illumination device (11); and a moving mechanism integrally moving the illumination device (11) and camera (13) in crossed direction of transmission direction of the substrate (50) on the product line (52), the camera (13) is collocated outside of range of light beam of specular reflection light by the substrate (50) surface from the illumination light of the illumination device (11).
Description
Technical field
The present invention relates to apparatus for substrate appearance inspection.
Background technology
In the past, known had a following apparatus for substrate appearance inspection: when making the FPD (flat-panel monitor) of LCD (LCD) etc., by the visual defective that produces on glass substrate etc. of observing.Like this, generally be also referred to as macroscopic observation based on visual inspection, by shining the surface that is bearing in the inspection substrate on the retainer based on the area source of macroscopic observation unit, and utilize the catoptrical variation on shot with television camera inspection substrate surface, thereby carry out visual examination (for example with reference to patent documentation 1 Fig. 6) based on macroscopic observation.
[patent documentation 1] Japanese kokai publication hei 10-111253 communique
But, in above-mentioned patent documentation 1, in the manufacturing process of LCD, the glass substrate that conveyance comes on to production line carries out under the situation based on the visual examination of video camera, need temporarily from production line, to take out glass substrate and check that existence can't be shortened the problem of productive temp time.And then, being independent of under the situation that production line disposes appearance inspection device, need mechanisms such as its configuration space and carrying manipulator, also there is the problem of the saving spatialization that is difficult to realize manufacturing equipment.
Summary of the invention
The present invention finishes in light of this situation, its purpose is the apparatus for substrate appearance inspection that provides following: need not take out the glass substrate that conveyance comes on production line from production line, just can carry out detailed visual examination, can realize the shortening of productive temp time and the miniaturization of manufacturing equipment its whole face.
In order to solve above-mentioned problem, the present invention adopts following means.
The invention provides apparatus for substrate appearance inspection, this apparatus for substrate appearance inspection has: Lighting Division, the illumination light that its surface that produces the substrate that conveyance on production line is come is shone; Photography portion, it is to sending from this Lighting Division and taking at the picture on the surface of this substrate that reflected light produced of the surface reflection of described substrate; The 1st travel mechanism, its make these Lighting Divisions and photography portion with described production line on the conveyance direction of the described substrate direction of intersecting on move integratedly; And the 2nd travel mechanism, it moves the 1st travel mechanism on the conveyance direction of described production line, described photography portion be disposed at from the illumination light of described Lighting Division outside the scope of the light beam of the regular reflection light on the surface of described substrate.
According to the present invention, the illumination light that produces from Lighting Division shines the surface of substrate, takes its reflected light by the action of photography portion.Thus, for example on monitor, show the image of captured substrate surface, can on monitor, carry out visualization.
Under this situation, because photography portion is configured in outside the scope of light beam of regular reflection light, so be presented at the zone that can not produce luminance saturation in the image on the monitor.Therefore, the observer can not observe the outward appearance of the whole shown substrate of image with omitting.
And, by the action of the 1st travel mechanism, Lighting Division and photography portion are moved integratedly, thus on the direction of intersecting with the conveyance direction of production line, can carry out detailed observation to the Width integral body of substrate (that is the direction integral body of intersecting with the conveyance direction of substrate).And the conveyance direction about production line moves substrate by production line, thus, can carry out detailed observation to substrate along conveyance direction integral body.Therefore, even substrate maximizes, also can easily carry out the detailed inspection of substrate integral body.
And, by the action of the 2nd travel mechanism,, Lighting Division and photography portion are moved integratedly on the conveyance direction of substrate even under the situation that substrate stops on line, can carry out detailed observation to the integral body of substrate.
And, because the substrate that is configured under the state on the production line is observed, so do not need from production line, to take out substrate.Therefore, can realize the shortening of productive temp time.And, do not need the independent device of substrate unloading device etc., can reduce to be provided with the space, realize the miniaturization of equipment.
And in foregoing invention, described the 1st travel mechanism also can have: the 1st guide rail, and it is erected on the direction of intersecting with the conveyance direction of described production line; The 1st sliding part, it carries described Lighting Division and described photography portion, and can be bearing in movably on described the 1st guide rail; And the 1st drive unit, it drives the 1st sliding part along described the 1st guide rail.
By such formation, action by the 1st drive unit is moved the 1st sliding part on the 1st guide rail that is erected on the direction of intersecting with the conveyance direction of production line, thus, Lighting Division and photography portion are moved integratedly on the direction of intersecting with the conveyance direction of production line.And, because the 1st guide rail bracket is located on the direction of intersecting with the conveyance direction of production line, so, need not select the position of production line just the 1st travel mechanism can be set.And, can in the production line of having constructed, the back be installed by the 1st travel mechanism.
And in foregoing invention, described the 2nd travel mechanism also can have: the 2nd guide rail, and it is along the conveyance direction configuration of described production line; The 2nd sliding part, it carries described the 1st travel mechanism, and can be bearing in movably on described the 2nd guide rail; And the 2nd drive unit, it drives the 2nd sliding part along described the 2nd guide rail.
By such formation, the action by the 2nd drive unit makes the 2nd sliding part moving on the 2nd guide rail of the conveyance direction configuration of production line, thus, Lighting Division and photography portion is moved integratedly on the conveyance direction of production line.And, owing to dispose the 2nd guide rail along the conveyance direction of production line, so, need not select the position of production line just the 2nd travel mechanism can be set.And, can in the production line of having constructed, the back be installed by the 2nd travel mechanism.
And, in foregoing invention, also can have rotating mechanism, it is that pivot point is rotated with the center from the range of exposures of the irradiates light of described Lighting Division irradiation that this rotating mechanism makes described photography portion.
By such formation, by the action of rotating mechanism, making photography portion is that pivot point is rotated with the center from the range of exposures of the irradiates light of Lighting Division irradiation.Therefore, carry out inspecting substrate while can change the viewpoint of photography portion.Thus, can be similar to the observation of direct visualization.
And, in foregoing invention, the picture that described photography portion also can have the surface of described substrate amplifies the zoom mechanism of taking, and making described photography portion is that fulcrum rotates on two-dimensional directional with camera positions, so that the defective on the detected described substrate enters in the visual field of described photography portion.
By such formation, making photography portion is that fulcrum rotates on two-dimensional directional with camera positions, so that the defective on the detected substrate enters in the visual field of photography portion, and by zoom mechanism the picture on the surface of substrate is amplified and to take, thus, can easily observe the defect part on the surface of substrate.
And, in foregoing invention, this apparatus for substrate appearance inspection also can have monitor, this monitor shows the picture of being taken by described photography portion, this apparatus for substrate appearance inspection makes described the 1st sliding part move with constant speed, and making becomes the image stream that can be confirmed defective by the observer by mirror the dynamic image that the image taken by described photography portion obtains continuously on described monitor.
By such formation, the dynamic image on the monitor on the surface by having mirrored substrate, the observer can easily find defective.
And, in foregoing invention, this apparatus for substrate appearance inspection also can have storage part, and this storage part will be mapped by the coordinate position based on the image of the illumination zone of described Lighting Division and the described substrate corresponding with this image that described photography portion takes and preserve.
By such formation, in storage part, preserve the image of the substrate that the observer found defective and the coordinate position on the substrate corresponding with this image, thus, can as reaffirm later on/data when verifying result of determination apply flexibly.
And in foregoing invention, described photography portion also can have amplifies the zoom mechanism of taking to the defective on the surface of described substrate, preserves the picture of the defective after being amplified by this zoom mechanism in described storage part.
By such formation, reaffirm later on/when verifying result of determination, can easily confirm the defect part on the surface of substrate.
And in foregoing invention, this apparatus for substrate appearance inspection also can have: the monitor that shows the picture of being taken by described photography portion; With the indicator that appointment is carried out in the position arbitrarily that is presented at the defective in the described image on the described monitor, calculate position coordinates by the specified defective of this indicator, be mapped with described substrate and store.
By such formation, can be easily in the position of determining the defective on the detected substrate in inspection afterwards.
According to the present invention, bring into play following effect: need not from production line, take out the glass substrate that conveyance comes on production line, just can carry out detailed visual examination, can realize the shortening of productive temp time and the miniaturization of manufacturing equipment to its whole face.
Description of drawings
Fig. 1 is the schematic configuration diagram of observing the apparatus for substrate appearance inspection of the present invention's the 1st embodiment from the top.
Fig. 2 is the side view of the apparatus for substrate appearance inspection of Fig. 1.
Fig. 3 is the synoptic diagram of testing fixture unit that the apparatus for substrate appearance inspection of Fig. 1 is shown.
Fig. 4 is the synoptic diagram that the production line of substrate is shown.
Fig. 5 is the synoptic diagram of guide that the apparatus for substrate appearance inspection of the present invention's the 2nd embodiment is shown.
Fig. 6 is the figure of testing fixture unit that the apparatus for substrate appearance inspection of Fig. 5 is shown.
Fig. 7 is the synoptic diagram of variation that the guide of Fig. 5 is shown.
Symbol description
1,31: apparatus for substrate appearance inspection; 5: monitor; 7: the 1 travel mechanisms; 9: the 2 travel mechanisms; 11: lighting device (Lighting Division); 13: video camera (photography portion); 15: the 1 guide rails; 17: the 1 sliding parts; 21: the 2 guide rails; 23: the 2 sliding parts; 33: guide (rotating mechanism); 50: substrate; 52: production line.
Embodiment
[the 1st embodiment]
Below, with reference to the apparatus for substrate appearance inspection of description of drawings the present invention the 1st embodiment.
The apparatus for substrate appearance inspection 1 of present embodiment mainly is arranged on the production line of substrate, be used for device that the substrate surface that comes by conveyances such as conveyors is checked.
As depicted in figs. 1 and 2, apparatus for substrate appearance inspection 1 has: testing fixture unit 3, and it observes the outward appearance on the surface of the substrate 50 that conveyance comes on production line 52; Monitor 5, it shows by the captured image in this testing fixture unit 3; The 1st travel mechanism 7, it moves testing fixture unit 3 on the direction of intersecting with the conveyance direction of substrate 50; And the 2nd travel mechanism 9, it moves testing fixture unit 3 on the conveyance direction of substrate 50.
As shown in Figure 3, testing fixture unit 3 has: lighting device (Lighting Division) 11, and its generation scattered light and converging light are used as the illumination light to the surface irradiation of substrate 50; And video camera (photography portion) 13, it is to sending from this lighting device 11 and being taken by the picture on the surface of the substrate that reflected light produced 50 of the surface reflection of substrate 50.These lighting devices 11 and video camera 13 are arranged in the 1st travel mechanism 7 described later.
In addition, can be from the either party lighting device 11 ejaculation scattered lights or the converging light.
And preferred lighting device 11 has: make the Fresnel lens of assembling from the illumination light of light source ejaculation; And the transmission-type liquid crystal scatter plate that between pellucidity and scattering state, switches.According to the inspection condition of substrate 50, between pellucidity and scattering state, switch the transmission-type liquid crystal scatter plate.
This video camera 13 is supported to, can be that pivot point rotates at the two-dimensional directional of XY with the center of illumination zone, perhaps the camera positions with the video camera 13 that becomes viewpoint position are that pivot point rotates at the two-dimensional directional of XY, also can be by the operation of observer to operating portions such as operating rods, remote-controlled operation video camera 13 makes its camera positions that become expectation and camera angle.
In addition, video camera 13 has zoom mechanism.Utilize this zoom mechanism that detected defective is amplified, can make video camera 13 is that pivot point rotates on the two-dimensional directional of XY with camera positions, so that this defective enters in the visual field of video camera 13.
And video camera 13 is supported to, and is positioned at from outside the scope illumination light of lighting device 11, by the converging light of the surperficial regular reflection of substrate 50.In addition, in order to obtain distinct image, video camera 13 is set outside the scope of converging light and near converging light preferably.
As shown in Figure 2, monitor 5 is connected with video camera 13, shows the image by the surface of the captured substrate 50 of video camera 13.And monitor 5 has storage part (omit diagram), and this storage portion stores is by the macroscopic view picture of the captured illumination zone of video camera 13 and the defective picture that is amplified.
The 1st travel mechanism 7 has: the 1st guide rail 15, and it is erected on the Width (directions X) that intersects with the conveyance direction (Y direction) of production line 52; The 1st sliding part 17, it can be bearing on the 1st guide rail 15 movably; And the 1st drive unit that for example constitutes by linear motor isoline driving mechanism (omitting diagram), it drives the 1st sliding part 17 along the 1st guide rail 15.
The 1st sliding part 17 is moved with certain speed, make by becoming and to confirm the image stream of the degree of the defective on the substrate 50 by the observer mirroring the dynamic image that obtains by video camera 13 captured images on the monitor 5 continuously, and the 1st sliding part 17 is stopped.Under this situation, when the observer is judged to be defective, will preserves as still image by video camera 13 captured images, and obtain, it will be preserved as positional information with respect to the coordinate position on the substrate 50 of this still image.Like this, by only preserving still image and the positional information that the observer is judged to be defective, can as reaffirm later on/data when verifying result of determination apply flexibly.
The 1st guide rail 15 is track segments of pair of parallel.The 1st guide rail 15 is bearing in respectively in the 2nd travel mechanism 9 described later with the mode of the top that is positioned at production line 52 both ends with length direction.And the pair of guide rails parts of the 1st guide rail 15 are the devices spaced apart configuration on the conveyance direction of production line 52, the both ends of supporting the 1st sliding part 17 respectively.
The 1st sliding part 17 forms the frame shape with rectangular-shaped peristome, is being equipped with lighting device 11 and video camera 13 in the opposed two frame portions on the directions X.Thus, with respect to the substrate 50 of conveyance below the 1st sliding part 17, shine on the substrate 50 by peristome from the illumination light of lighting device 11, and, reflected light from the surface of substrate 50 incides video camera 13 by peristome, takes the picture on the surface of substrate 50.And, when when the 1st guide rail 15 drives the 1st sliding part 17, lighting device 11 and video camera 13 with the direction of the conveyance direction quadrature of production line 52 on move integratedly.
The 2nd travel mechanism 9 has: pair of base 19, and it is along the conveyance direction configuration of production line 52; The 2nd guide rail 21, it is installed on this pedestal 19; The 2nd sliding part 23, it can be bearing on the 2nd guide rail 21 movably; And the 2nd drive unit that for example constitutes by linear motor isoline driving mechanism (omitting diagram), it drives the 2nd sliding part 23 along the 2nd guide rail 21.
The 2nd guide rail 21 is track segments of pair of parallel.The 2nd guide rail 21 is installed in the mode parallel with the conveyance direction of production line 52 along the upper surface of pedestal 19.
The 2nd sliding part 23 is plate-shaped members of the width same degree between length and above-mentioned the 1st guide rail 15, and the both ends of the length direction of the 1st guide rail 15 are installed in respectively on the 2nd sliding part 23.
That is, the 1st travel mechanism 7 and the 2nd travel mechanism 9 make up in mutually orthogonal mode, constitute the XY platform that testing fixture unit 3 is moved on the two-dimensional directional of XY direction.Thus, testing fixture unit 3 can be by the 1st travel mechanism 7 action mobile on the direction of intersecting with the conveyance direction of production line 52, simultaneously, action by the 2nd travel mechanism 9 is moved with preset space length on the conveyance direction of production line 52, thus, with respect to substrate 50 whole advances according to the preset space length left and right sides having many bends or curvesly.
And, the apparatus for substrate appearance inspection 1 of present embodiment for example is provided with x-scale and y-scale respectively on the 1st guide rail 15 and the 2nd guide rail 21, XY coordinate according to the testing fixture unit 3 that reads by these scales, be mapped being presented at the center of the image on the monitor 5 and the coordinate on the substrate 50, be stored in the storage part.And, also can utilize indicator (omit diagram) to specify the center of the defective in this image, calculate the position coordinates (being directions X distance and Y direction distance) of defective thus, being mapped with the coordinate of substrate 50 is stored in the storage part.
The effect of the apparatus for substrate appearance inspection 1 of the present embodiment that constitutes like this is described.
The substrate 50 of 1 pair of conveyance on production line 52 of apparatus for substrate appearance inspection that will be by present embodiment is checked, at first, apparatus for substrate appearance inspection 1 is arranged on the optional position of production line 52.
For example as shown in Figure 4 from the 1st manufacturing installation 56 on the production line 52 of the 2nd manufacturing installation 58 conveyance substrates 50, promptly have on the production line of corner part of 90 ° of about bendings in the substrate transferring path, be provided with on such position that makes the straight line carrying line that substrate 50 straight lines move, position 60,62,64, at the both sides of production line 52 configuration pedestal 19, so that the 1st guide rail 15 is erected on the direction of intersecting with the substrate transferring direction of production line 52.
And, for example from taking out of of conveyor 54 the manufacturing installation conveyance to be arranged on next manufacturing process of next substrate 50 by production line 52 at the manufacturing installation of substrate 50 coating resists.Here, the next substrate 50 of conveyance temporarily stops in the inspection area of apparatus for substrate appearance inspection 1.Shown in the arrow A of Fig. 1, testing fixture unit 3 is moved to carry out raster scanning, the integral body on surface that spreads all over substrate 50 utilizes video camera 13 to take the picture on the surface of substrates 50 from lighting device 11 irradiating illumination light.
For example as shown in Figure 4, be provided with under the situation of apparatus for substrate appearance inspection 1 in the position 60,64 that is provided with of taking out of side or moving into side that becomes each manufacturing installation 56,58, the position-detection sensor (omit diagram) that is arranged on the gap of the conveyor 54 that becomes the substrate transferring path when utilization detects substrate 50 when being moved in the inspection area, stop the driving of conveyor 54, substrate 50 is stopped in the inspection area that is arranged at the apparatus for substrate appearance inspection 1 that position 60,64 is set.Then, by the action of the 1st travel mechanism 7, make testing fixture unit 3 with the direction of the substrate transferring direction quadrature of production line 52 on move back and forth, thus, can carry out detailed observation to the short side direction integral body of substrate 50.
And, by the action of the 2nd travel mechanism 9, the 1st travel mechanism 7 is moved on the conveyance direction of production line 52 with the width spacing of lacking slightly according to the irradiating width of bright scope, thus, can carry out detailed observation to the long side direction integral body of substrate 50.
And, be provided with under the situation that position 62 is provided with apparatus for substrate appearance inspection 1 shown in Figure 4, the substrate 50 that conveyance comes under with respect to the state after about 90 ° of position 60 rotations are set by conveyance.That is, substrate 50 is as follows by conveyance: the corner part of carrying line do not change towards, only moving direction changes about 90 °.Therefore, with respect to the apparatus for substrate appearance inspection 1 that position 62 is set, substrate 50 with respect to the apparatus for substrate appearance inspection 1 that 60 places, position are set towards rotation after about 90 ° towards by conveyance.
Then, substrate 50 is stopped being provided with on the position 62 of production line 52.Then, by the action of the 1st travel mechanism 7, with respect to the rectangular substrate 50 that conveyance comes, make testing fixture unit 3 with the direction of the substrate transferring direction quadrature of production line 52 on move back and forth, thus, can carry out detailed observation to the long side direction integral body of substrate 50.
And, by the action of the 2nd travel mechanism 9, the 1st travel mechanism 7 is moved on the conveyance direction of production line 52 with the spacing of lacking slightly according to the irradiating width of bright scope, thus, can carry out detailed observation to the short side direction integral body of substrate 50.
Thus, with respect to the orientation of the rectangular pattern that on the surface of substrate 50, forms,, can check the defective on the surface of substrate 50 in more detail from differing about 90 ° directional lighting and taking position 60 being set and position 62 being set.
Like this, by video camera 13 comprehensively the image on the surface of the substrate 50 after the scanning be presented on the monitor 5, carry out the visual examination of substrate 50 by observer's visualization.Therefore, even substrate 50 maximizes, also can easily carry out the detailed inspection of substrate 50 integral body.
Under this situation, as shown in Figure 3,, be positioned at outside the scope of the light beam of the regular reflection light of substrate 50 reflections, so the incident of the illumination light of video camera 13 can be unsaturated, can obtain high-precision image because video camera 13 is supported to.Therefore, the observer can observe the whole shown substrate 50 of the image of monitor 5 well.
And, because being presented at the position of the center 25 of the image on the monitor 5 and defective 27 and the coordinate on the substrate 50 is mapped and is stored in the storage part, so, for example utilize other testing fixture such as microscopic observation device to read the coordinate of this defective 27, can reexamine thus.
As described above, apparatus for substrate appearance inspection 1 according to present embodiment, only by setting up at Width with the substrate transferring direction quadrature of production line 52, just can easily in the substrate transferring space of existing production line, be provided with, and, substrate 50 need not be fetched into outside the production line 52, in production line, just can carry out the macro check of substrate 50.
Therefore, in the substrate transferring path of production line 52, the image on the surface by being presented at the substrate 50 on the monitor 5 carries out macro check, thereby does not need like that in the past with the isolated system of substrate transferring to the outer substrate unloading device of production line etc., can realize the shortening of productive temp time.And, can apply flexibly the space of production line 52 tops effectively, realize the miniaturization of manufacturing equipment.And, because along the substrate transferring path configurations apparatus for substrate appearance inspection 1 of existing production line 52, so, also can be on the production line of having constructed 52 back installation base plate appearance inspection device 1 simply.
In addition, the apparatus for substrate appearance inspection 1 of present embodiment has the 1st travel mechanism 7 and the 2nd travel mechanism 9, but, replace, by only having the 1st travel mechanism 7, the conveyor of conveyance substrate 50 is also used as the 2nd travel mechanism 9, also can carries out detailed observation the conveyance direction integral body of substrate 50.And,, can make apparatus for substrate appearance inspection 1 miniaturization more by omitting the 2nd travel mechanism 9.
And, for example, the apparatus for substrate appearance inspection 1 of present embodiment utilizes monitor 5 to carry out visual examination, but, also can have and further be amplified in the micro device that the detected defective of upstream side is carried out detailed inspection in the downstream of apparatus for substrate appearance inspection 1, utilize macro check to obtain the coordinate of defective,, utilize the micro device to carry out the detailed inspection of defective according to the positional information of this defective.
[the 2nd embodiment]
The apparatus for substrate appearance inspection 31 of the present invention's the 2nd embodiment then, is described with reference to Fig. 5 and Fig. 6.
The testing fixture unit 3 of the apparatus for substrate appearance inspection 31 of present embodiment has guide (rotating mechanism) 33.
Below, to the identical position of structure of the apparatus for substrate appearance inspection 1 of the 1st embodiment, additional same label also omits explanation.
And, the mode that guide 33 diminishes with respect to the angle of substrate 50 gradually with the optical axis of video camera 13, with respect to substrate 50 to the reflection direction inclination of illumination light tiltedly about 45 ° angle be provided with.Thus, as shown in Figure 6, can make video camera 13, shift moving at about 45 ° state backspin that tilts in the about 180 ° scope in center 35.
Like this, for example as camera position 13A, 13B, 13C, carry out the inspection of substrate 50 while can change the viewpoint of video camera 13.Therefore, can with the observer with respect to substrate 50 left and right sides torticollis similarly, be similar to the observation of direct-view by visualization person.
In addition, as shown in Figure 7, also can the 2nd guide 37 be installed on guide 33, guide the moving of short transverse of video camera 13, with respect to the axis of reflection of illumination light, the 2nd guide 37 can at random change the angle of the optical axis of video camera 13 with respect to substrate 50.
As shown in Figure 6 and Figure 7, is that pivot point is in left and right directions and fore-and-aft direction rotation by making video camera 13 with the center of the range of exposures of illumination light, can utilize from video camera 13 and take, can improve the precision of the defects detection on the substrate 50 with respect to the multi-direction change viewpoint of substrate 50.
More than, be described in detail the embodiments of the present invention with reference to accompanying drawing, still, concrete structure is not limited to this embodiment, also comprises the design alteration of the scope that does not break away from purport of the present invention etc.
For example, also the pedestal 19 of the apparatus for substrate appearance inspection 1,31 of the respective embodiments described above can be formed shape on the Width that is erected at production line 52.Like this, for example also can image pattern 4 that the position is set is such, at 66,68 places, turning of production line 52 apparatus for substrate appearance inspection 1,31 is set.Therefore, can move into side and substrate at the substrate of the corner part of the production line 52 that becomes dead space in the past takes out of side apparatus for substrate appearance inspection 1,31 is set, can do not constructed apparatus for substrate appearance inspection 1,31 about the shape of production line 52 institute, further effectively apply flexibly the space of production line 52 tops, can realize the miniaturization of manufacturing equipment.
And the inspection area that becomes the illuminated scan zone of testing fixture unit 3 also can be floated platform by air and be replaced, and this air floats platform makes substrate 50 float predetermined altitude from roller path.Under this situation, for the levitation height that makes substrate 50 remains constantly, at the upper surface of platform the squit hole of ejection air and the SS of suction air are set, ejection pressure and swabbing pressure by air make substrate 50 float certain altitude.Like this, float by making substrate 50, can be fully with non-contacting mode supporting substrates 50, therefore, can reduce the influence that causes by the background under the back side of the such transparency carrier of mother glass, can prevent that the flase drop that causes owing to false defect from surveying.
Claims (9)
1. apparatus for substrate appearance inspection, this apparatus for substrate appearance inspection has:
Lighting Division, the illumination light that its surface that produces the substrate that conveyance on production line is come is shone;
Photography portion, it is to sending from this Lighting Division and taking at the picture on the surface of this substrate that reflected light produced of the surface reflection of described substrate;
The 1st travel mechanism, it moves these Lighting Divisions and photography portion integratedly on the direction of intersecting with the conveyance direction of the described substrate of described production line; And
The 2nd travel mechanism, it moves the 1st travel mechanism on the conveyance direction of described production line,
Described photography portion be disposed at from the illumination light of described Lighting Division outside the scope of the light beam of the regular reflection light on the surface of described substrate.
2. apparatus for substrate appearance inspection according to claim 1, wherein,
Described the 1st travel mechanism has:
The 1st guide rail, it is erected on the direction of intersecting with the conveyance direction of described production line;
The 1st sliding part, it carries described Lighting Division and described photography portion, and can be bearing in movably on described the 1st guide rail; And
The 1st drive unit, it drives the 1st sliding part along described the 1st guide rail.
3. apparatus for substrate appearance inspection according to claim 1, wherein,
Described the 2nd travel mechanism has:
The 2nd guide rail, it is along the conveyance direction configuration of described production line;
The 2nd sliding part, it carries described the 1st travel mechanism, and can be bearing in movably on described the 2nd guide rail; And
The 2nd drive unit, it drives the 2nd sliding part along described the 2nd guide rail.
4. apparatus for substrate appearance inspection according to claim 1 and 2, wherein,
This apparatus for substrate appearance inspection has rotating mechanism, and it is that pivot point is rotated with the center from the range of exposures of the irradiates light of described Lighting Division irradiation that this rotating mechanism makes described photography portion.
5. apparatus for substrate appearance inspection according to claim 1 and 2, wherein,
The picture that described photography portion has the surface of described substrate amplifies the zoom mechanism of taking, it is that fulcrum rotates on two-dimensional directional with camera positions that this apparatus for substrate appearance inspection makes described photography portion, so that the defective on the detected described substrate enters in the visual field of described photography portion.
6. apparatus for substrate appearance inspection according to claim 1, wherein,
This apparatus for substrate appearance inspection has monitor, and this monitor shows the picture of being taken by described photography portion,
This apparatus for substrate appearance inspection makes described the 1st sliding part move with certain speed, and making becomes the image stream that can be confirmed defective by the observer by mirror the dynamic image that the image taken by described photography portion obtains continuously on described monitor.
7. apparatus for substrate appearance inspection according to claim 1, wherein,
This apparatus for substrate appearance inspection has storage part, and this storage part will be mapped by the coordinate position based on the image of the illumination zone of described Lighting Division and the described substrate corresponding with this image that described photography portion takes and preserve.
8. apparatus for substrate appearance inspection according to claim 7, wherein,
Described photography portion has amplifies the zoom mechanism of taking to the defective on the surface of described substrate, preserves the picture of the defective after being amplified by this zoom mechanism in described storage part.
9. apparatus for substrate appearance inspection according to claim 1, wherein,
This apparatus for substrate appearance inspection has: the monitor that shows the picture of being taken by described photography portion; With the indicator that appointment is carried out in the position that is presented at the defective in the described image on the described monitor,
This apparatus for substrate appearance inspection is calculated the position coordinates by the specified defective of this indicator, is mapped with described substrate and stores.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007178772A JP2009014617A (en) | 2007-07-06 | 2007-07-06 | Substrate visual inspection apparatus |
| JP2007178772 | 2007-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101339143A true CN101339143A (en) | 2009-01-07 |
Family
ID=40213265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101281276A Pending CN101339143A (en) | 2007-07-06 | 2008-07-03 | Appearance inspecting device for substrate |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2009014617A (en) |
| KR (1) | KR20090004636A (en) |
| CN (1) | CN101339143A (en) |
| TW (1) | TW200909798A (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20090004636A (en) | 2009-01-12 |
| JP2009014617A (en) | 2009-01-22 |
| TW200909798A (en) | 2009-03-01 |
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