CN107907549A - Inspecting substrate equipment and substrate inspecting method - Google Patents
Inspecting substrate equipment and substrate inspecting method Download PDFInfo
- Publication number
- CN107907549A CN107907549A CN201711116221.5A CN201711116221A CN107907549A CN 107907549 A CN107907549 A CN 107907549A CN 201711116221 A CN201711116221 A CN 201711116221A CN 107907549 A CN107907549 A CN 107907549A
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- substrate
- pallet
- inspecting
- image
- supporting item
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a kind of inspecting substrate equipment, including：Stent, including pallet and supporting item, pallet are used to carry substrate to be checked, and in the vertical direction is pivotally supported on supporting item；Light source, arranged on pallet oblique upper, for towards the substrate surface irradiation light on pallet；Lens group, above pallet, and towards pallet, for being rotated in pallet during shoot the image of substrate on pallet；Observation platform, is arranged at intervals with pallet in the horizontal direction, and the surface of the substrate on pallet is observed for operator；Monitor, by observation platform, the image of the substrate for showing lens group shooting.The invention also discloses a kind of substrate inspecting method.Well-tended appearance situation can be checked by eye-observation substrate surface in pallet rotation process, the image for the substrate that can also be shot by monitor check occurs to check whether there is the undesirable phenomenon of shadow, experience to inspection personnel simultaneously has no special requirements, and the activity duration is short, efficient.
Description
Technical field
The present invention relates to display panel manufacturing field, more particularly to a kind of inspecting substrate equipment and substrate inspecting method.
Background technology
In the manufacturing process of the flat-panel monitor such as liquid crystal display (LCD) (FPD), exist with visual inspection in each manufacture
The inspection operation of the appearance of the transparent substrate manufactured in process, is known as macro -graph.In the macro -graph process, generally use
Macro (macro -graph machine) equipment carries out base plate product the bad inspection of macroscopic view, by the way that the substrate for keeping glass substrate is kept
Device (Stage) is erected into irradiates macroscopical illumination light in the state of predetermined angular from top, it becomes possible to carries out on the glass substrate
Defect inspection.
The substantially flow of macro -graph is as follows：Glass substrate is reached the Stage of Macro by upstream end, then by scrutineer
Member rocks glass substrate up and down by operating platform, while distinguishes Mura (shadow) with human eye, then takes out glass by manipulator
Glass substrate, makes it into subsequent processing.The detection of glass substrate Mura, mainly by personnel's visual inspection, to the ripe of personnel
White silk degree, experience etc. are more demanding, and the activity duration is longer, and easily situations such as missing inspection occur.
The content of the invention
In view of the shortcomings of the prior art, convenient, efficient inspecting substrate equipment is checked the present invention provides a kind of
And substrate inspecting method.
In order to realize above-mentioned purpose, present invention employs following technical solution：
A kind of inspecting substrate equipment, including：
Stent, including pallet and supporting item, the pallet are used to carry substrate to be checked, and in the vertical direction is rotatable
Ground is supported on the supporting item；
Light source, arranged on the pallet oblique upper, for towards the substrate surface irradiation light on the pallet；
Lens group, above the pallet, and towards the pallet, for being shot during pallet rotation
The image of the substrate on the pallet；
Observation platform, is arranged at intervals with the pallet in the horizontal direction, is observed to carry operator on the pallet
The surface of the substrate；
Monitor, by the observation platform, the image of the substrate for showing the lens group shooting.
As one of which embodiment, the supporting item further includes the first supporting item and the second supporting item, the pallet
In the vertical direction is pivotally supported on the first supporting item, and first supporting item is movably disposed on vertically
On second supporting item.
As one of which embodiment, second supporting item is equipped with hydraulic cylinder, and the piston rod of the hydraulic cylinder is consolidated
It is scheduled on first supporting item.
As one of which embodiment, the stent further includes base, and the supporting item is in the horizontal direction rotationally
On the base.
As one of which embodiment, the edge of the light source is equipped with infrared transceiver, for being sent out towards the pallet
Infrared ray is penetrated to calibrate the direction of the light source.
As one of which embodiment, the stent further includes two slides being arranged in parallel, and the base is described in
The extending direction of slide is slidingly disposed on the slide.
As one of which embodiment, concave sliding slot is equipped with the inside of the slide, the both ends difference of the base is embedding
In the sliding slot.
As one of which embodiment, the lens group includes a plurality of lenses, extension of the camera lens along the slide
Direction is set in a row.
Another object of the present invention is to provide a kind of substrate inspecting method, using the inspecting substrate equipment, including：
Utilize the substrate on light source irradiation pallet；
Eye-observation substrate surface, to check the appearance of substrate；
The image of substrate is shot, operator has by the image of the captured substrate of monitor observation to check in picture
It is unshadowed；
In the vertical direction Rotary tray, shoots the image of substrate again, and operator is clapped again by monitor observation
The image for the substrate taken the photograph, until pallet turns to substrate and departs from shooting visual angle.
As one of which embodiment, the substrate inspecting method further includes rotatable support, and shoots substrate
Image, the image that operator passes through the captured substrate of monitor observation.
The present invention is controlled to be checked by the way that substrate to be checked is placed on pallet by controlling the rotation of pallet
On the other hand the direction of substrate, can also pass through monitor by eye-observation substrate surface to check well-tended appearance situation
Check the image of the substrate of shooting, occurred with checking whether there is the undesirable phenomenon of shadow, the experience of inspection personnel is had no especially
It is required that the activity duration is short, efficient.
Brief description of the drawings
Fig. 1 is the use state diagram of the inspecting substrate equipment of the embodiment of the present invention；
Fig. 2 is the main flow block diagram of the substrate inspecting method of the embodiment of the present invention.
Embodiment
In the present invention, term " setting ", " being equipped with ", " connection " should be interpreted broadly.For example, it may be fixedly connected,
It is detachably connected, or monolithic construction；Can mechanically connect, or be electrically connected；It can be directly connected, or pass through centre
Medium is indirectly connected, or is connection internal between two devices, element or parts.For ordinary skill
For personnel, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In addition, term " on ", " under ", "left", "right", "front", "rear", " top ", " bottom ", " interior ", " outer ", " in ", it is " perpendicular
Directly ", the orientation of the instruction such as " level " or position relationship are based on orientation shown in the drawings or position relationship.These terms are mainly
In order to preferably describe the present invention and embodiment, being not intended to limit indicated device, element or part must have
There is particular orientation, or constructed and operated with particular orientation.
Also, above-mentioned part term is in addition to it can be used to indicate that orientation or position relationship, it is also possible to for representing it
His implication, such as term " on " also be likely used for representing certain relations of dependence or connection relation in some cases.For ability
For the those of ordinary skill of domain, the concrete meaning of these terms in the present invention can be understood as the case may be.
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right
The present invention is further described.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and do not have to
It is of the invention in limiting.
Refering to Fig. 1, the inspecting substrate equipment of the embodiment of the present invention mainly includes stent 10, light source 20, lens group 30, observation
Platform 40 and monitor 50, wherein, stent 10 includes pallet 11 and supporting item 12, which is used to carry substrate P to be checked,
In the vertical direction is rotatably supported on supporting item 12, light source 20 (as shown in Figure 1 clockwise or counterclockwise)
, can be towards the substrate P surface irradiation light on pallet 11 in 11 oblique upper of pallet, lens group 30 is located at the top of pallet 11, and direction
Pallet 11, for shooting the image of the substrate P on pallet 11 during the rotation of pallet 11, observation platform 40 is in the horizontal direction
It is arranged at intervals with pallet 11, observes the surface of the substrate P on pallet 11 on it for operator, monitor 50 is arranged on observation platform 40
Side, the image of the substrate P shot for showing lens group 30.
Since supporting item 12 is supported on the lower section of pallet 11, and pallet 11 can rotate relative to supporting item 12 and adjust its court
To, and operator is located on the observation platform 40 of 11 side of pallet, during light source 20 irradiates pallet 11, operator is on the one hand
Can be another using the visual condition for visually observing 11 upper substrate P of pallet by adjusting tray 11 towards making its face operator
Aspect, moreover it is possible to by 11 direction of adjusting tray, make the direction of substrate P change, and clapped using the lens group 30 above substrate P
The image of different rotation angle infrabasal plate P is taken the photograph, shooting image is obtained by monitor 50 and carries out Mura detections, without operation
Person directly observes substrate P to check Mura, and whether abundant the experience requirement to operator be not high.
Here, the position and orientation of lens group 30 immobilize, and the direction of only pallet 11 changes, and lens group 30 is caught
Substrate P it is different towards when image, operator can be by checking that different image inspections goes out what single visual angle can not be found
Mura phenomenons.Light source 20 can also be designed to that rotatably, the direction of light source 20 is adjusted according to the direction of rotation of pallet 11,
Its light is set to be projected all the time towards the substrate P on pallet 11.Infrared transceiver specifically can be equipped with the edge of light source 20
200, for launching infrared ray towards pallet 11 with the direction of real time calibration light source 20.Infrared transceiver 200 is towards on pallet 11
Infrared ray is launched in certain point, then thinks light source 20 towards suitable when receiving IR reflected signals, otherwise, then needs to rotate light source
20 until infrared transceiver 200 receives IR reflected signals, and pallet 11 often rotates once, and light source 20 then realizes a direction
Calibration.
Supporting item 12 includes the first supporting item 121 and the second supporting item 122, the rotatable twelve Earthly Branches of 11 in the vertical direction of pallet
On the first supporting item 121, the first supporting item 121 is movably disposed on vertically on the second supporting item 122 for support.Second
Supporting item 122 is equipped with hydraulic cylinder 122a, and the piston rod 121a of hydraulic cylinder 122a is fixed on the first supporting item 121, this implementation
In example, along the both ends in the shaft axis direction of pallet 11, two hydraulic cylinder 122a, each each correspondences one of hydraulic cylinder 122a are respectively provided with
A piston rod 121a, to keep the moving stability of the first supporting item 121.When in use, by controlling hydraulic cylinder 122a to work,
Piston rod 121a is moved and is occurred to stretch, and realizes the adjusting of 121 height of the first supporting item, the height of adjusting tray 11 is realized with this
The purpose of degree, adjusts the spacing between substrate P and light source 20 and the focal length between lens group 30, accordingly to improve base indirectly
The intensity of illumination on plate P surfaces and the image-capturing resolution of image.
Correspondingly, observation platform 40 is designed to move up and down, and monitor 50 is fixed on observation platform 40, if
Between observation platform 40 and pallet 11, operator can observe monitor 50 with side with substrate P surface, side is visually observed, very just
Just.
Stent 10 further includes base 13 and two slides 14 being arranged in parallel, and lens group 30 includes a plurality of lenses 300, camera lens
300 set in a row along the extending direction of slide 14, and supporting item 12 is rotatably arranged on base 13 in the horizontal direction, 13 edge of base
The extending direction of slide 14 is slidingly disposed at the inner side of slide 14 on slide 14 and is equipped with concave sliding slot, the both ends difference of base 13
It is embedded in sliding slot.Hydraulic cylinder 141 is fixed with slide 14, base 13 is under the driving of hydraulic cylinder 141 closer or far from observation
Platform 40.It is such to set so that pallet 11 not only can both facilitate operator with 360 ° of rotations closer or far from operator
Closely visually observe, and facilitate the adjusting of 20 light exposure of light source and the shooting that lens group 30 is comprehensive.In shooting substrate P
During image, the corresponding camera lens 300 of irradiating angle and the top of base 13 of light source 20 can be adjusted in real time according to the position of base 13
Unlatching.
Wherein, the bottom of the second supporting item 122 is rotatably arranged on base 13, can be specifically convexly equipped with the top of base 13
Vertical rotation axis, 122 bottom of the second supporting item are fixed with shaft coupling, drive rotation axis to turn by the base electrical machinery in base 13
It is dynamic, only need to be by controlling rotary state i.e. controllable second of base electrical machinery to support so as to fulfill the rotation of the second supporting item 122
The rotation of part 122, so that Rotary tray 11 in the horizontal direction, realizes pallet 11 in direction at any angle, not only can be with
Move up and down closer or far from light source 20 and lens group 30, can also be freely rotated in vertical direction, horizontal direction, conveniently
Operator realizes comprehensive observation.
To realize automated job, operating efficiency is improved, the rotation of light source 20, the rotation of pallet 11 can pass through motor respectively
Driving is realized.In system control aspect, the inspecting substrate equipment of the present embodiment includes Master Control Center, for controlling light source 20 to rotate
The light source motor of state, for control pallet 11 relative to the rotary state of supporting item 12 tray motor, for drive support
The hydraulic cylinder 122a of 12 length change of part (i.e. the first supporting item 121 flexible), rotate for driving support member 12 and (drive second
Supporting item 122 rotates) base electrical machinery, for driving hydraulic cylinder 141 that base 13 slides along slide 14 and being seen for driving
The lifting hydraulic cylinder of the lifting of platform 40 is examined, Master Control Center is used to store predetermined registration operation instruction and controls phase under corresponding trigger condition
The structure answered realizes corresponding action.Before operation, a series of control instructions can be inputted Master Control Center by operator in advance, work as behaviour
Author station to after observation platform 40, start to work by control device, and operator observes the visual condition of substrate P, meanwhile, pallet 11 starts
A certain direction is turned to by predetermined action, light source 20 is automatically adjusted to suitable irradiating angle, under lens group 30 automatically snaps
The image of substrate P, operator observe the present image in monitor 50 to determine whether Mura, and then pallet 11 continues along predetermined
Action (horizontal direction/vertical direction rotation/back-and-forth motion/lifting) change direction/position, in addition, observation platform 40 is according to support
The direction of disk 11 realizes the adjusting of height automatically, so that operator is adapted to the position of substrate P, slide is moved in pallet 11
During relevant position on 14, the camera lens 300 directly over the also controllable substrate P of Master Control Center works and is shot.Operator exists
When checking substrate P, only visual condition need to be checked according to preset program naked eyes viewing substrate P, and supervised at the appropriate time by watching
Graphical analysis Mura phenomenons in visual organ 50, program operation finish, and inspection finishes, and have liberated both hands, and check efficiency
It can greatly improve.
As shown in Fig. 2, the substrate inspecting method of the present invention mainly includes：
S01, utilize the substrate P on the irradiation pallet 11 of light source 20；
S02, eye-observation substrate P surface, to check the appearance of substrate P；
S03, the image for shooting substrate P, operator observe the image of captured substrate P by monitor 50, to check
Mura is whether there is in picture；
S04, in the vertical direction Rotary tray 11, shoot the image of substrate P, operator is again by monitor 50 again
The image of the captured substrate P of observation, until pallet 11 turns to substrate P and departs from shooting visual angle.During inspecting substrate, also
Need to rotate and move back and forth supporting item 12, and shoot the image of substrate P, operator observes captured base by monitor 50
The image of plate P.
Here, the process of Rotary tray 11 is on vertical direction：The initial of pallet 11 is oriented face operator, i.e. pallet
11 be in vertical state, and at this time, operator can most be intuitive to see substrate P surface, and the visual condition of substrate P is checked with this, then,
Pallet 11 is towards layback, and the elevation angle becomes larger, and operator can also continue to visually observe substrate P surface and check in the process
The visual condition of substrate P, avoids missing inspection.
By the way that substrate to be checked is placed on pallet, and the substrate by controlling the rotation of pallet to control to be checked
Direction, well-tended appearance situation can be checked by eye-observation substrate surface, on the other hand can also pass through monitor check
The image of the substrate of shooting, is occurred with checking whether there is the undesirable phenomenon of shadow, and the experience to inspection personnel simultaneously has no special requirements,
Activity duration is short, efficient.Also, substrate can be rotated freely with 360 °, missing inspection is avoided, the height of substrate and between operator
Away from that can also control, the viewing location of operator can adjust in real time according to the direction and height of substrate, very convenient.
The above is only the embodiment of the application, it is noted that for the ordinary skill people of the art
For member, on the premise of the application principle is not departed from, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as the protection domain of the application.
Claims (10)
- A kind of 1. inspecting substrate equipment, it is characterised in that including：Stent (10), including pallet (11) and supporting item (12), the pallet (11) are used to carry substrate to be checked (P), It is pivotally supported on vertical direction on the supporting item (12)；Light source (20), arranged on the pallet (11) oblique upper, for being irradiated towards the substrate (P) surface on the pallet (11) Light；Lens group (30), above the pallet (11), and towards the pallet (11), for being rotated in the pallet (11) During shoot the image of the substrate (P) on the pallet (11)；Observation platform (40), is arranged at intervals with the pallet (11) in the horizontal direction, and the pallet is observed to carry operator (11) surface of the substrate (P) on；Monitor (50), it is other arranged on the observation platform (40), the substrate (P) shot for showing the lens group (30) Image.
- 2. inspecting substrate equipment according to claim 1, it is characterised in that the supporting item (12) further includes the first support Part (121) and the second supporting item (122), pallet (11) in the vertical direction are pivotally supported at the first supporting item (121) on, first supporting item (121) is movably disposed on vertically on second supporting item (122).
- 3. inspecting substrate equipment according to claim 2, it is characterised in that second supporting item (122) is equipped with liquid Cylinder pressure (122a), the piston rod (121a) of the hydraulic cylinder (122a) are fixed on first supporting item (121).
- 4. inspecting substrate equipment according to claim 1, it is characterised in that the stent (10) further includes base (13), The supporting item (12) is rotatably arranged on the base (13) in the horizontal direction.
- 5. inspecting substrate equipment according to claim 1, it is characterised in that the edge of the light source (20) is equipped with infrared ray Transceiver (200), for calibrating the direction of the light source (20) towards the pallet (11) transmitting infrared ray.
- 6. according to any inspecting substrate equipment of claim 1-5, it is characterised in that the stent (10) further includes two The slide (14) being arranged in parallel, the base (13) are slidingly disposed at the slide along the extending direction of the slide (14) (14) on.
- 7. inspecting substrate equipment according to claim 6, it is characterised in that be equipped with concave cunning on the inside of the slide (14) Groove, the both ends of the base (13) are embedded in the sliding slot respectively.
- 8. inspecting substrate equipment according to claim 6, it is characterised in that the lens group (30) includes a plurality of lenses (300), the camera lens (300) sets in a row along the extending direction of the slide (14).
- A kind of 9. substrate inspecting method, it is characterised in that usage right requires any inspecting substrate equipment of 1-8, including：Utilize the substrate (P) on light source (20) irradiation pallet (11)；Eye-observation substrate (P) surface, to check the appearance of substrate (P)；The image of substrate (P) is shot, operator observes the image of captured substrate (P) by monitor (50), to check figure Have in piece unshadowed；In the vertical direction Rotary tray (11), shoots the image of substrate (P) again, and operator sees again by monitor (50) The image of captured substrate (P) is examined, until pallet (11) turns to substrate (P) and departs from shooting visual angle.
- 10. substrate inspecting method according to claim 9, it is characterised in that further include rotatable support (12), and shoot The image of substrate (P), the image that operator passes through the captured substrate (P) of monitor (50) observation.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711116221.5A CN107907549A (en) | 2017-11-13 | 2017-11-13 | Inspecting substrate equipment and substrate inspecting method |
| PCT/CN2017/112199 WO2019090821A1 (en) | 2017-11-13 | 2017-11-21 | Substrate inspection device and substrate inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711116221.5A CN107907549A (en) | 2017-11-13 | 2017-11-13 | Inspecting substrate equipment and substrate inspecting method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107907549A true CN107907549A (en) | 2018-04-13 |
Family
ID=61845207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711116221.5A Pending CN107907549A (en) | 2017-11-13 | 2017-11-13 | Inspecting substrate equipment and substrate inspecting method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107907549A (en) |
| WO (1) | WO2019090821A1 (en) |
Cited By (5)
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| CN108508030A (en) * | 2018-05-17 | 2018-09-07 | 江苏东旭亿泰智能装备有限公司 | Glass substrate inspecting apparatus and the method for checking glass substrate using it |
| CN108956641A (en) * | 2018-07-24 | 2018-12-07 | 武汉华星光电技术有限公司 | Base board checking device |
| CN110987931A (en) * | 2019-12-23 | 2020-04-10 | 哈尔滨工程大学 | Device for observing orientation of ice crystal particles |
| CN112377743A (en) * | 2020-11-11 | 2021-02-19 | 嘉兴奥锶特光电科技有限公司 | Multi-angle adjustable supporting device for photoelectric equipment |
| CN113049596A (en) * | 2021-03-05 | 2021-06-29 | 广州得尔塔影像技术有限公司 | Appearance inspection apparatus |
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| JP2000066164A (en) * | 1998-08-25 | 2000-03-03 | Toshiba Electronic Engineering Corp | Substrate appearance inspection apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108508030A (en) * | 2018-05-17 | 2018-09-07 | 江苏东旭亿泰智能装备有限公司 | Glass substrate inspecting apparatus and the method for checking glass substrate using it |
| CN108956641A (en) * | 2018-07-24 | 2018-12-07 | 武汉华星光电技术有限公司 | Base board checking device |
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| CN110987931A (en) * | 2019-12-23 | 2020-04-10 | 哈尔滨工程大学 | Device for observing orientation of ice crystal particles |
| CN112377743A (en) * | 2020-11-11 | 2021-02-19 | 嘉兴奥锶特光电科技有限公司 | Multi-angle adjustable supporting device for photoelectric equipment |
| CN113049596A (en) * | 2021-03-05 | 2021-06-29 | 广州得尔塔影像技术有限公司 | Appearance inspection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019090821A1 (en) | 2019-05-16 |
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Application publication date: 20180413 |