CN108956641A - Base board checking device - Google Patents
Base board checking device Download PDFInfo
- Publication number
- CN108956641A CN108956641A CN201810819164.5A CN201810819164A CN108956641A CN 108956641 A CN108956641 A CN 108956641A CN 201810819164 A CN201810819164 A CN 201810819164A CN 108956641 A CN108956641 A CN 108956641A
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- CN
- China
- Prior art keywords
- base board
- checking device
- board checking
- side wall
- supporting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention provides a kind of base board checking device, comprising: side wall, the side wall include the first side wall being oppositely arranged and second sidewall；Two pack supports, the bracket are set between the first side wall and the second sidewall, and the bracket includes a pallet and support portion, and the pallet is connect with the support portion, and the pallet rotates in the vertical direction, to carry substrate to be measured；Light source on two groups, be respectively arranged at two groups described in bracket top；Two feeding inlets, are set on the first side wall, are correspondingly arranged respectively with two pallets；Array humidifier is arranged at intervals at the top of the bracket；Inspection socket is set in the second sidewall, including transparent doors to be opened/closed；Station, close to the inspection socket.The utility model has the advantages that improving the speed and accuracy of inspecting substrate, the cleanliness inside check device is in addition also improved.
Description
Technical field
The present invention relates to display panel manufacturing field more particularly to a kind of base board checking devices.
Background technique
In the manufacturing process of display panel, there is the process that visual examination is carried out to the substrate in each manufacturing process,
Referred to as macro -graph.It is general that the bad inspection of macroscopic view is carried out to base plate product with Macro equipment (macro -graph machine).Currently, CF is (color
Color filter coating) substrate, array substrate complete light blockage coating, exposure, after developing procedure, needing to carry out micro and macro inspection.
Existing Macro equipment inspection checks and checks after oven that check before Oven to find in time before being broadly divided into Oven (baking)
Substrate undesirable condition in order to do over again in time, and substrate is influenced vulnerable to particle in equipment (particle), although checking after Oven
It is not prompt enough, but substrate is fixed-type, does not influence vulnerable to particle, therefore checks after being chiefly used in Oven in the industry.
But existing Macro equipment inspection needs manual operation, can not be fully sealed, and causes particle more, needs
The cleanliness in further lifting means is wanted, moreover, the speed of single device inspection slows down, and needs when substrate shipment checks
Setting multiple devices side by side using be just able to satisfy production needs.
In conclusion the working efficiency of existing separate unit Macro equipment inspection is not high, and the cleanliness inside equipment is not
Height is badly in need of optimization device structure.
Summary of the invention
The present invention provides a kind of base board checking device, can be realized two pieces of substrates of contrasting detection, improves the inspection of single device
Goods speed and accuracy rate, since single device can only disposably check one piece of substrate, cause to examine to solve existing check device
Inefficiency is surveyed, and then influences the production capacity of panel.
To solve the above problems, technical solution provided by the invention is as follows:
The present invention provides a kind of base board checking device, comprising:
Side wall, the side wall include the first side wall being oppositely arranged and second sidewall；
Two pack supports, the bracket are set between the first side wall and the second sidewall, and the bracket includes one
Pallet and support portion, the pallet are connect with the support portion, and the pallet rotates in the vertical direction, to carry base to be measured
Plate；
Light source on two groups, be respectively arranged at two groups described in bracket top；
Two feeding inlets, are set on the first side wall, are correspondingly arranged respectively with two pallets；
An at least humidifier is set to the top of the bracket；
Inspection socket is set in the second sidewall, and the inspection socket includes transparent doors to be opened/closed；
Station, close to the inspection socket.
According to one preferred embodiment of the present invention, it is provided with roller shutter between two upper light sources, is provided on the roller shutter
Elevating mechanism, to control the lifting of the roller shutter.
According to one preferred embodiment of the present invention, the base board checking device further includes a backlight, the backlight setting
In on the first side wall.
According to one preferred embodiment of the present invention, the first guide rail, the end of the backlight are provided on the first side wall
It is set in first guide rail, the backlight is slided along the extending direction of first guide rail.
According to one preferred embodiment of the present invention, the support portion includes the first supporting element disposed in parallel and the second support
Part, first supporting element, second supporting element are connect with two end hinges of the pallet respectively.
According to one preferred embodiment of the present invention, the bracket further includes and first supporting element and second supporting element
The pedestal of connection is provided with two the second guide rails being parallel to each other, first supporting element, second support on the pedestal
It is slided in corresponding two second guide rails end of part.
According to one preferred embodiment of the present invention, the pedestal includes the first base and connection for connecting first supporting element
The second base of second supporting element, two second guide rails are respectively arranged at the first base and the second base
On, first supporting element and second supporting element the prolonging along second guide rail in corresponding second guide rail respectively
Stretch direction sliding.
According to one preferred embodiment of the present invention, the base board checking device further includes being arranged at intervals above the bracket
Array blower fan filtering unit, wherein blower fan filtering unit described in one group is set to the surface of the station.
According to one preferred embodiment of the present invention, the station bottom is provided with multiple through-holes.
According to one preferred embodiment of the present invention, the base board checking device includes several humidifiers, several humidifiers
It is arranged at intervals at the top of the bracket.
The invention has the benefit that base board checking device provided by the invention, can two pieces of substrates of comparison check simultaneously,
The speed and accuracy of inspecting substrate is improved, while also saving check device the space occupied, and then improve production capacity, is reduced
Production cost；In addition, improving the obturation effect of check device, the cleanliness inside check device is improved.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the front view of the structural schematic diagram of base board checking device of the present invention；
Fig. 2 is the side view of the structural schematic diagram of base board checking device of the present invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The present invention is directed to existing base board checking device, since single device can only disposably check one piece of substrate, detection
Inefficiency, and due to the access apparatus of inspection personnel, cause particle inside device more, substrate easy to pollute, Jin Erying
The production capacity of panel is rung, the present embodiment is able to solve the defect.
Referring to Fig.1 and 2, the present invention provides a kind of base board checking device 100, including side wall；Two pack supports 12；Two groups
Upper light source 13；Two feeding inlets 14；Array humidifier 15；Inspection socket 16；Station 17；Roller shutter 19；Array blower fan filtering unit
18；One backlight 20.
Wherein, the side wall includes the first side wall 111 and second sidewall 112, the first side wall and the second sidewall
It is oppositely arranged.
Bracket 12 described in two groups is arranged in parallel between second sidewall 112 described in the first side wall 111, the bracket 12
Including a pallet 121, support portion 122 and pedestal 123, the pallet 121 in the vertical direction rotationally with the support portion
122 one end is fixedly connected, and the opposite other end of the support portion 122 is fixedly connected with the pedestal 123, the pallet to
Carry substrate 22 to be measured.
Upper light source 13 described in two groups be respectively arranged at two groups described in bracket 12 top, the upper light source 13 is the substrate
22 provide corresponding light source in the detection process, and the upper light source 13 includes various light sources, under the irradiation of various light sources, operator
Member adjusts the position of the substrate 22 by operation board, observes the gross imperfection on the substrate 22, such as crawling, different
Object, scratch etc., the upper light source 13 include the light of the multiple colors such as white, orange, yellow, green.
Two feeding inlets 14 are set on the first side wall 111, the feeding inlet 14 and the corresponding pallet
121, substantially in the same height, facilitate conveying device that the substrate 22 is transported to the pallet 121 by the feeding inlet 14
On.
Several humidifiers 15 are arranged at intervals at the top of the bracket 12, the interval of blower fan filtering unit 18 described in array
It is set to the top of the bracket 12, the humidifier 15 is used to increase the air humidity in described device 100, avoid
Paeticle is flown upward, and is polluted to substrate, and the clean effect inside equipment, the humidifier 15 and the blower fan filtering are enhanced
Unit 18 is used cooperatively, and after the humidifier 15 humidification stops, the blower fan filtering unit 18 is opened, and rapid draing avoids
The device structure of device is damaged, the humidity design control of the humidifier 15 is in a certain range.
The inspection socket 16 is set in the second sidewall 112, and the inspection socket 16 includes a transparent doors to be opened/closed,
The inspection socket 16 is prepared using transparent glass, and the transparent doors are set to the middle part of the inspection socket 16, the transparent doors
Area is less than or equal to the area of the inspection socket 16, when the transparent doors are closed, the inner sealing of the check device 100,
Avoidable operator brings particle into, when needing to carry out close-ups or the transparent doors to substrate to lead to light
When interference, the openable transparent doors protrude into observation.
The station 17 is arranged close to the inspection socket 16, observes base on the station 17 convenient for operator
Plate.The bottom of the station 17 is provided with multiple through-holes, one group is provided with above the station described in blower fan filtering list
Member 18, forms cross-ventilation between the blower fan filtering unit 18 and the through-hole, takes away due to personnel activity's bring
particle。
The backlight 20 is set on the first side wall, in order to avoid the backlight 20 stops two pan feedings
Mouth 14 influences substrate to be measured and enters in device from the feeding inlet 14, the first guide rail 21 is arranged on the first side wall, described
One side end of backlight 20 is set in the guide rail 21, and further, the end of the backlight 20 is provided with two pulleys,
The backlight 20 slides laterally (extending direction of i.e. described first guide rail 21) in first guide rail 21.
When carrying out the pick-and-place of substrate using two feeding inlets 14, two feeding inlets 14 successively pick and place piece, when
When one of them described feeding inlet 14 carries out taking piece, by the backlight 20 along first guide rail 21 slide into it is another it is described enter
Before material mouth 14, to solve the problems, such as the blocking of the backlight 20, driving device can be used to control the movement of the backlight 20.
The backlight 20 plays transmission to substrate to be detected, checks on substrate whether there is or not great drawback, such as uncoated
Partially, unexposed portion etc., frequency of use is lower during macro -graph, therefore designs one group of backlight 20 for two pieces of substrate inspections
Use is looked into, according to actual inspection needs, the mobile backlight 20.
The roller shutter 19 is gone up between light source 13 described in being set to two groups, and the first elevating mechanism, institute are provided on the roller shutter
Lifting and unfolded state of first elevating mechanism to control the roller shutter 19 are stated, when two operators check respectively for two pieces of bases
When plate, in order to avoid the light between upper light source 13 described in two groups interferes with each other, the roller shutter 19 can be fallen, to separate
Two groups of inspection parts (light source and a pack support are one group of inspection part on one group) is stated, the roller shutter 19 uses light screening material system
It is standby.
The support portion 122 include the first supporting element 1221 disposed in parallel and the second supporting element 1222, described first
Support member 1221 and second supporting element 1222 are connect with the end hinge of 121 two sides of pallet respectively, the end of the two sides
Line is located at the middle part of the pallet 121, so that substrate to be measured 22 is in equilbrium position in rotary course.
The pedestal 123 is connect with first supporting element 1221 and second supporting element 1222 respectively, the pedestal
Be provided with two the second guide rails being parallel to each other on 123, two articles of guide rails respectively with first supporting element 1221, described
The connection of two supporting elements 1222.
The pedestal 123 is an entirety, in addition, the pedestal 123 can also be two fissions, the pedestal 123 includes
The first base 1231 being connect with first supporting element 1221 and the second base being connect with second supporting element 1222
1232, it is respectively arranged with the second guide rail being parallel to each other in the first base 1231, the second base 1232, described first
Supporting element 121 and second supporting element 122 longitudinal sliding motion (along the extending direction of the second guide rail) in corresponding second guide rail,
By the movement bracket 12, different viewing distances can satisfy, also can avoid the frequency for opening the transparent doors, improve dress
Set internal cleannes.
It is provided with the second elevating mechanism on the station 17, can be used to adjust the height of the station 17, is met not
The height of biconditional operation personnel needs.
Contrasting detection can be realized during the inspection process, and standard substrate, another bracket are placed on bracket 12 described in one group
Substrate to be measured is placed on 12, and when the movement substrate to be measured and change light source, identical operation is executed to the standard substrate,
Convenient for being reference with the standard substrate, detection is compared, the detection speed and accuracy rate of monolithic substrate are greatly improved.
It can also realize two pieces of substrates while detect, the practicable switching linkage of light source and single on bracket 12 described in two groups and two groups
It is dynamic.When linkage status, an operator detects two pieces of substrates simultaneously；Two operators when single action state, on station
It is independently operable not interfere with each other, one piece of substrate to be measured is detected respectively.
It is additionally provided with camera inside the base board checking device 100, the shape of the substrate to be measured to shoot different angle
State is provided with display device by the inspection socket 16, to show the photo of the camera shooting, in order to operator point
Substrate to be measured is analysed with the presence or absence of defect.
The utility model has the advantages that base board checking device provided by the invention, two pieces of substrates of comparison check, raising substrate can examine simultaneously
The speed and accuracy looked into, while check device the space occupied is also saved, and then improve production capacity, reduce production cost；
In addition, improving the obturation effect of check device, the cleanliness inside check device is improved.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of base board checking device characterized by comprising
Side wall, the side wall include the first side wall being oppositely arranged and second sidewall；
Two pack supports, the bracket are set between the first side wall and the second sidewall, and the bracket includes a pallet
And support portion, the pallet are connect with the support portion, the pallet rotates in the vertical direction, to carry substrate to be measured；
Light source on two groups, be respectively arranged at two groups described in bracket top；
Two feeding inlets, are set on the first side wall, are correspondingly arranged respectively with two pallets；
An at least humidifier is set to the top of the bracket；
Inspection socket is set in the second sidewall, including transparent doors to be opened/closed；
Station, close to the inspection socket.
2. base board checking device according to claim 1, which is characterized in that be provided with volume between two upper light sources
Curtain is provided with elevating mechanism on the roller shutter, to control the lifting of the roller shutter.
3. base board checking device according to claim 1, which is characterized in that the base board checking device further includes a backlight
Source, the backlight are set on the first side wall.
4. base board checking device according to claim 3, which is characterized in that be provided with first on the first side wall and lead
Rail, the end of the backlight are set in first guide rail, and the backlight is sliding along the extending direction of first guide rail
It is dynamic.
5. base board checking device according to claim 1, which is characterized in that the support portion includes disposed in parallel first
Supporting element and the second supporting element, first supporting element, second supporting element respectively with two end hinges of the pallet
Connection.
6. base board checking device according to claim 5, which is characterized in that the bracket further includes and described first supports
The pedestal that part is connected with second supporting element, is provided with two the second guide rails being parallel to each other on the pedestal, and described first
Supporting element, second supporting element end slided in corresponding two second guide rails.
7. base board checking device according to claim 6, which is characterized in that the pedestal includes connecting first support
The first base of part and the second base for connecting second supporting element, two second guide rails are respectively arranged at described first
On pedestal and the second base, first supporting element and second supporting element are respectively in corresponding second guide rail
Extending direction along second guide rail slides.
8. base board checking device according to claim 1, which is characterized in that the base board checking device further includes that interval is set
The array blower fan filtering unit being placed in above the bracket, wherein blower fan filtering unit described in one group is set to the station
Surface.
9. base board checking device according to claim 8, which is characterized in that the station bottom is provided with multiple logical
Hole.
10. base board checking device according to claim 1, which is characterized in that the base board checking device includes several adds
Wet device, several humidifiers are arranged at intervals at the top of the bracket.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810819164.5A CN108956641A (en) | 2018-07-24 | 2018-07-24 | Base board checking device |
| PCT/CN2019/077908 WO2020019729A1 (en) | 2018-07-24 | 2019-03-13 | Base plate detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810819164.5A CN108956641A (en) | 2018-07-24 | 2018-07-24 | Base board checking device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108956641A true CN108956641A (en) | 2018-12-07 |
Family
ID=64463153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810819164.5A Pending CN108956641A (en) | 2018-07-24 | 2018-07-24 | Base board checking device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108956641A (en) |
| WO (1) | WO2020019729A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109669288A (en) * | 2019-02-26 | 2019-04-23 | 深圳市华星光电技术有限公司 | Substrate fragmentation detection system and substrate fragmentation detection method |
| CN109813652A (en) * | 2018-12-29 | 2019-05-28 | 赣州市德普特科技有限公司 | A kind of touch screen and display mask paste appearance delection device |
| WO2020019729A1 (en) * | 2018-07-24 | 2020-01-30 | 武汉华星光电技术有限公司 | Base plate detection device |
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| KR20080013550A (en) * | 2006-08-09 | 2008-02-13 | 주식회사 에이디피엔지니어링 | Device for inspecting substrate and method therefor |
| JP4434417B2 (en) * | 2000-03-23 | 2010-03-17 | 日本特殊陶業株式会社 | Inspection equipment for printed wiring boards |
| CN201845148U (en) * | 2010-09-17 | 2011-05-25 | 北京京东方光电科技有限公司 | Backlight equipment and array substrate detecting device |
| CN102117589A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
| CN203216700U (en) * | 2013-03-26 | 2013-09-25 | 昆山维信诺显示技术有限公司 | Macroscopic inspection device |
| CN106597709A (en) * | 2017-01-06 | 2017-04-26 | 武汉华星光电技术有限公司 | Substrate detecting device and display panel processing system and method |
| CN107664646A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | A kind of full-automatic open defect check device and method |
| CN107907549A (en) * | 2017-11-13 | 2018-04-13 | 武汉华星光电半导体显示技术有限公司 | Inspecting substrate equipment and substrate inspecting method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108956641A (en) * | 2018-07-24 | 2018-12-07 | 武汉华星光电技术有限公司 | Base board checking device |
-
2018
- 2018-07-24 CN CN201810819164.5A patent/CN108956641A/en active Pending
-
2019
- 2019-03-13 WO PCT/CN2019/077908 patent/WO2020019729A1/en active Application Filing
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|---|---|---|---|---|
| US5757014A (en) * | 1995-04-07 | 1998-05-26 | Novartis Corporation | Optical detection device for analytical measurement of chemical substances |
| JP4434417B2 (en) * | 2000-03-23 | 2010-03-17 | 日本特殊陶業株式会社 | Inspection equipment for printed wiring boards |
| KR20080013550A (en) * | 2006-08-09 | 2008-02-13 | 주식회사 에이디피엔지니어링 | Device for inspecting substrate and method therefor |
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| CN201845148U (en) * | 2010-09-17 | 2011-05-25 | 北京京东方光电科技有限公司 | Backlight equipment and array substrate detecting device |
| CN203216700U (en) * | 2013-03-26 | 2013-09-25 | 昆山维信诺显示技术有限公司 | Macroscopic inspection device |
| CN107664646A (en) * | 2016-07-29 | 2018-02-06 | 上海微电子装备（集团）股份有限公司 | A kind of full-automatic open defect check device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019729A1 (en) * | 2018-07-24 | 2020-01-30 | 武汉华星光电技术有限公司 | Base plate detection device |
| CN109813652A (en) * | 2018-12-29 | 2019-05-28 | 赣州市德普特科技有限公司 | A kind of touch screen and display mask paste appearance delection device |
| CN109669288A (en) * | 2019-02-26 | 2019-04-23 | 深圳市华星光电技术有限公司 | Substrate fragmentation detection system and substrate fragmentation detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020019729A1 (en) | 2020-01-30 |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181207 |
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| RJ01 | Rejection of invention patent application after publication |