CN109669288A - Substrate fragmentation detection system and substrate fragmentation detection method - Google Patents
Substrate fragmentation detection system and substrate fragmentation detection method Download PDFInfo
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- CN109669288A CN109669288A CN201910143479.7A CN201910143479A CN109669288A CN 109669288 A CN109669288 A CN 109669288A CN 201910143479 A CN201910143479 A CN 201910143479A CN 109669288 A CN109669288 A CN 109669288A
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- substrate
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Abstract
The present invention provides a kind of substrate fragmentation detection system and substrate fragmentation detection method.Substrate fragmentation detection system of the invention includes two image acquiring devices in vertical direction separately, processing module and base plate transfer device, each image acquiring device includes multiple images acquiring unit, the multiple images acquiring unit of same image acquiring device forms a line along a first direction, when work, base plate transfer device is transmitted substrate, so that substrate is moved along the second direction for being different from first direction and the region across two image acquiring devices, two image acquiring devices obtain the image data of substrate front side and reverse side respectively and are transmitted to processing module, substrate front side and the image data of reverse side are compared with preset positive criteria data and reverse side normal data by processing module respectively, therefore, it is determined that substrate whether there is fragmentation, substrate fragmentation can be detected, prevent substrate fragmentation from leading to producing line production capacity It reduces.
Description
Technical field
The present invention relates to display manufacturing technology field more particularly to a kind of substrate fragmentation detection system and the detections of substrate fragmentation
Method.
Background technique
Liquid crystal display device (LCD, Liquid Crystal Display) has thin fuselage, power saving, radiationless etc. numerous
Advantage is widely used.Such as: LCD TV, mobile phone, personal digital assistant (PDA), digital camera, computer
Screen or laptop screen etc..
Usual liquid crystal display device includes shell, the liquid crystal display panel being set in the housing and the backlight mould being set in the housing
Group (Backlight module).Wherein, the structure of liquid crystal display panel is mainly by a thin-film transistor array base-plate (Thin
Film Transistor Array Substrate, TFT Array Substrate), a colored filter substrate (Color
Filter, CF) and the liquid crystal layer (Liquid Crystal Layer) that is configured between two substrates constituted, working principle
It is to control the rotation of the liquid crystal molecule of liquid crystal layer by applying driving voltage on two panels glass substrate, by the light of backlight module
Line reflects generation picture.
The prior art usually carries out photoresist using coating machine (Coater) when making liquid crystal display panel on substrate
Coating operations specially place a substrate in and carry out photoresist coating operations on the microscope carrier of coating machine to it, complete photoresist and apply
After cloth operation, need to take out substrate from coating machine using handling device (such as manipulator), and be sent into vacuum drying chamber
(Vacuum Drying Chamber, VCD Chamber) carries out vacuum drying treatment, to take out to the solvent in photoresist
It takes, is exposed developing manufacture process convenient for the subsequent photoresist on substrate to be patterned.Common coating machine is general
Understand in handling device from it before taking out substrate, is jacked up substrate using the elevating lever (lift pin) on microscope carrier, in order to
Handling device is taken out substrate, during elevating lever jacks up substrate, is easy so that substrate generates rupture, but existing skill
Art will not to substrate carry out fragmentation detection, the substrate of rupture still can be handled upside down device be sent into vacuum drying it is intracavitary, in rupture
For substrate after being dried in vacuo intracavitary completions and placing, the substrate of rupture can generate smashing fragmentation vacuum drying is intracavitary, need
Longer time is cleared up, so that producing line can not work, substantially reduces production capacity.
Summary of the invention
The purpose of the present invention is to provide a kind of substrate fragmentation detection systems, can detect, prevent to substrate fragmentation
Substrate fragmentation leads to the reduction of producing line production capacity.
Another object of the present invention is to provide a kind of substrate fragmentation detection methods, can detect to substrate fragmentation,
Prevent substrate fragmentation from leading to the reduction of producing line production capacity.
To achieve the above object, present invention firstly provides a kind of substrate fragmentation detection system, it is alternate to be included in vertical direction
Every two image acquiring devices, the processing module that is electrically connected with two image acquiring devices and electrically connect with processing module
The base plate transfer device connect；
Each image acquiring device includes that spaced multiple images acquiring unit, same image obtain in the horizontal direction
The multiple images acquiring unit of device forms a line along a first direction, each equal electrically connected processing mould of image acquisition unit
Block；
The base plate transfer device is for being transmitted substrate, so that substrate is along the second direction for being different from first direction
It moves and the region across two image acquiring devices；
Described two image acquiring devices be used to move in a second direction in substrate and across two image acquiring devices it
Between region when obtain the image data of substrate front side and reverse side respectively and be transmitted to processing module；
The processing module be used for by substrate front side and the image data of reverse side respectively with preset positive criteria data and
Reverse side normal data is compared, when the image data for meeting substrate front side is different and substrate back side from positive criteria data
When at least one during image data is different from reverse side normal data processing module determine substrate there are fragmentation, otherwise processing module
Determine substrate without fragmentation.
The first direction is vertical with second direction.
The substrate fragmentation detection system further includes be located above in two image acquiring devices one in level side
Light source separately upwards.
The light source is LED light.
Described image acquiring unit is CCD camera；
The optical axis for the multiple images acquiring unit in one being located above in described two image acquiring devices and vertical
The angle in direction is acute angle, underlying multiple images acquiring unit in another in described two image acquiring devices
The angle of optical axis and vertical direction is 0.
When processing module determines substrate there are when fragmentation, processing module generates alarm signal and is transmitted to substrate transport dress
It sets, the base-board conveying device stops being transmitted substrate after receiving alarm signal.
The base plate transfer device is transmitted substrate so that substrate is moved along the second direction for being different from first direction
And the substrate is taken out before the region across two image acquiring devices from a coating machine.
When processing module determines substrate without fragmentation, processing module generation normally sends a signal to base plate transfer device, institute
Stating base plate transfer device, that substrate is sent to a vacuum drying after receiving normal transmission signal is intracavitary.
The transporting substrates, device is set to manipulator.
The present invention also provides a kind of substrate fragmentation detection methods, applied to above-mentioned substrate fragmentation detection system, including such as
Lower step:
Step S1, the described base plate transfer device is transmitted substrate, so that substrate is along second different from first direction
Direction moves and the region across two image acquiring devices；
Step S2, described two image acquiring devices move in a second direction in substrate and pass through two image acquiring devices
Between region when obtain the image data of substrate front side and reverse side respectively and be transmitted to processing module；
Step S3, the described processing module by substrate front side and the image data of reverse side respectively with preset positive criteria data
And reverse side normal data is compared, when meet the image data of substrate front side from positive criteria data different and substrate back side
Image data it is different from reverse side normal data at least one when processing module determine substrate there are fragmentations, otherwise handle mould
Block determines substrate without fragmentation.
Beneficial effects of the present invention: substrate fragmentation detection system of the invention includes two figures in vertical direction separately
As acquisition device, processing module and base plate transfer device, each image acquiring device include multiple images acquiring unit, same figure
As the multiple images acquiring unit of acquisition device forms a line along a first direction, when work, base plate transfer device to substrate into
Row transmission, so that substrate is moved along the second direction for being different from first direction and the area across two image acquiring devices
Domain, two image acquiring devices obtain the image data of substrate front side and reverse side respectively and are transmitted to processing module, processing module
Substrate front side and the image data of reverse side are compared with preset positive criteria data and reverse side normal data respectively, thus
Determine that substrate whether there is fragmentation, substrate fragmentation can be detected, prevents substrate fragmentation from leading to the reduction of producing line production capacity.This hair
Bright substrate fragmentation detection method can detect substrate fragmentation, prevent substrate fragmentation from leading to the reduction of producing line production capacity.
Detailed description of the invention
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with of the invention detailed
Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
In attached drawing,
Fig. 1 is the stereoscopic schematic diagram of substrate fragmentation detection system of the invention；
Fig. 2 is that image acquisition unit obtains image in two image acquiring devices of substrate fragmentation detection system of the invention
When index path；
Fig. 3 is the schematic diagram that substrate fragmentation detection system of the invention takes out substrate from coating machine；
Fig. 4 is the flow chart of substrate fragmentation detection method of the invention.
Specific embodiment
Further to illustrate technological means and its effect adopted by the present invention, below in conjunction with preferred implementation of the invention
Example and its attached drawing are described in detail.
Referring to Fig. 1, the present invention provides a kind of substrate fragmentation detection system, including two figures in vertical direction separately
It is electrically connected as acquisition device 10, the processing module 20 being electrically connected with two image acquiring devices 10 and with processing module 20
Base plate transfer device 30.
Each image acquiring device 10 includes spaced multiple images acquiring unit 11 in the horizontal direction, same image
The multiple images acquiring unit 11 of acquisition device 10 forms a line along a first direction, and each image acquisition unit 11 electrically connects
Connect processing module 20.
The base plate transfer device 30 is for being transmitted substrate 9, so that substrate 9 is along second different from first direction
Direction moves and the region across two image acquiring devices 10.
Described two image acquiring devices 10 are used to move in a second direction in substrate 9 and pass through two image acquiring devices
The image data in 9 front of substrate and reverse side is obtained when region between 10 respectively and is transmitted to processing module 20.
The processing module 20 be used for by the image data of the front of substrate 9 and reverse side respectively with preset positive criteria data
And reverse side normal data is compared, when meeting, the positive image data of substrate 9 is different from positive criteria data and substrate 9 is anti-
Processing module 20 determines substrate 9 there are fragmentation when at least one during the image data in face is different from reverse side normal data, otherwise
Processing module 20 determines substrate 9 without fragmentation.
Preferably, the first direction is vertical with second direction.
Specifically, referring to Fig. 1, the substrate fragmentation detection system further includes being located at two image acquiring devices 10
The light source 40 of one of top in the horizontal direction separately.To referring to Fig. 2, the substrate detection system at work,
The light that light source 40 issues is injected multiple in one be located above in two image acquiring devices 10 after the reflection of substrate 9
So that it carries out image data acquisition in image acquisition unit 11, and the light that light source 40 issues is injected after the transmission of substrate 9
So that it carries out picture number in underlying multiple images acquiring unit 11 in another in two image acquiring devices 10
According to acquisition.
Preferably, the light source 40 is LED light.
Specifically, described image acquiring unit 11 is charge coupled device (CCD) camera.
Preferably, Fig. 1 and Fig. 2 is please referred to, it is multiple in one be located above in described two image acquiring devices 10
The optical axis of image acquisition unit 11 and the angle of vertical direction are acute angle, underlying in described two image acquiring devices 10
The optical axis of multiple images acquiring unit 11 and the angle of vertical direction in another are 0.
Specifically, when processing module 20 determines substrate 9 there are when fragmentation, processing module 20 generates alarm signal and is transmitted to
Base-board conveying device 30, the base-board conveying device 30 stop being transmitted substrate 9 after receiving alarm signal.
Specifically, incorporated by reference to Fig. 3, the base plate transfer device 30 is transmitted substrate 9 so that substrate 9 is along being different from the
The second direction in one direction moves and takes out institute from a coating machine 8 before the region across two image acquiring devices 10
State substrate 9.Further, the coating machine 8 includes vacuum microscope carrier 81, and 81 upper surface of vacuum microscope carrier is equipped with multiple elevating levers 811,
In substrate 9 before taking out in coating machine 8, substrate 9 is placed on the upper surface of vacuum microscope carrier 81, when base plate transfer device 30 needs
When taking out the substrate 9 from coating machine 8, multiple risings of elevating lever 811 jack up substrate 9, consequently facilitating transporting substrates, device
It sets 30 taking-up substrates 9 and it is transmitted.
Specifically, when processing module 20 determines substrate 9 without fragmentation, processing module 20, which generates, normally sends a signal to substrate
Substrate 9 is sent to a vacuum drying chamber after receiving normal transmission signal by transmission device 30, the base plate transfer device 30
It is interior.
Preferably, the base plate transfer device 30 is manipulator.
It should be noted that substrate fragmentation detection system of the invention passes substrate 9 using base plate transfer device 30
It send, so that substrate 9 is along the second direction fortune for being different from the first direction that image acquisition unit 11 arranges in image acquiring device 10
Move and the region across two image acquiring devices 10, obtained respectively using two image acquiring devices 10 substrate front side and
The image data of reverse side is simultaneously transmitted to processing module 20, processing module 20 by the image data of the front of substrate 9 and reverse side respectively with
Preset positive criteria data and reverse side normal data are compared, therefore, it is determined that substrate whether there is fragmentation, it can be to substrate
Fragmentation is effectively detected, and is sent into vacuum after taking out substrate from coating machine and by substrate using the substrate fragmentation detection system
To substrate, whether fragmentation is detected before drying chamber, can be avoided when taking out substrate from coating machine due to the microscope carrier of coating machine
Substrate is in vacuum drying chamber when elevating lever jack-up substrate makes substrate fragmentation that the subsequent substrate by fragmentation be caused to be sent into vacuum drying chamber
Interior comminuted fragmentation prevents substrate fragmentation from leading to the reduction of producing line production capacity.
Referring to Fig. 4, based on the same inventive concept, the present invention also provides a kind of substrate fragmentation detection methods, it is applied to upper
The substrate fragmentation detection system stated no longer carries out repeated description, the base to the structure of aforesaid substrate fragmentation detection system herein
Plate fragmentation detection method includes the following steps:
Step S1, the described base plate transfer device 30 is transmitted substrate 9, so that substrate 9 is along different from first direction
Second direction moves and the region across two image acquiring devices 10.
Step S2, described two image acquiring devices 10 move in a second direction in substrate 9 and pass through two images and obtain
The image data in 9 front of substrate and reverse side is obtained when region between device 10 respectively and is transmitted to processing module 20.
Step S3, the described processing module 20 by the image data of the front of substrate 9 and reverse side respectively with preset positive criteria
Data and reverse side normal data are compared, when meet the positive image data of substrate 9 from positive criteria data different and base
When at least one during the image data of 9 reverse side of plate is different from reverse side normal data processing module 20 determine substrate 9 there are fragmentation,
Otherwise processing module 20 determines substrate 9 without fragmentation.
It should be noted that substrate fragmentation detection method of the invention passes substrate 9 using base plate transfer device 30
It send, so that substrate 9 is along the second direction fortune for being different from the first direction that image acquisition unit 11 arranges in image acquiring device 10
Move and the region across two image acquiring devices 10, obtained respectively using two image acquiring devices 10 substrate front side and
The real image of reverse side is simultaneously transmitted to processing module 20, processing module 20 by the real image of the front of substrate 9 and reverse side respectively with
Preset positive criteria data and reverse side normal data are compared, therefore, it is determined that substrate whether there is fragmentation, it can be to substrate
Fragmentation is effectively detected, and is sent into vacuum after taking out substrate from coating machine and by substrate using the substrate fragmentation detection system
To substrate, whether fragmentation is detected before drying chamber, can be avoided when taking out substrate from coating machine due to the microscope carrier of coating machine
Substrate is in vacuum drying chamber when elevating lever jack-up substrate makes substrate fragmentation that the subsequent substrate by fragmentation be caused to be sent into vacuum drying chamber
Interior comminuted fragmentation prevents substrate fragmentation from leading to the reduction of producing line production capacity.
In conclusion substrate fragmentation detection system of the invention includes obtaining dress in two images of vertical direction separately
It sets, processing module and base plate transfer device, each image acquiring device include multiple images acquiring unit, same image acquisition dress
The multiple images acquiring unit set forms a line along a first direction, and when work, base plate transfer device is transmitted substrate, makes
Substrate moves and the region across two image acquiring devices along the second direction for being different from first direction, two images
Acquisition device obtains the image data of substrate front side and reverse side respectively and is transmitted to processing module, processing module by substrate front side and
The image data of reverse side is compared with preset positive criteria data and reverse side normal data respectively, therefore, it is determined that substrate whether
There are fragmentations, can detect to substrate fragmentation, prevent substrate fragmentation from leading to the reduction of producing line production capacity.Substrate fragmentation of the invention
Detection method can detect substrate fragmentation, prevent substrate fragmentation from leading to the reduction of producing line production capacity.
The above for those of ordinary skill in the art can according to the technique and scheme of the present invention and technology
Other various corresponding changes and modifications are made in design, and all these change and modification all should belong to the claims in the present invention
Protection scope.
Claims (10)
1. a kind of substrate fragmentation detection system, which is characterized in that including two image acquiring devices in vertical direction separately
(10), it the processing module (20) that is electrically connected with two image acquiring devices (10) and is electrically connected with processing module (20)
Base plate transfer device (30)；
Each image acquiring device (10) includes spaced multiple images acquiring unit (11) in the horizontal direction, same image
The multiple images acquiring unit (11) of acquisition device (10) forms a line along a first direction, and each image acquisition unit (11) is equal
Electrically connected processing module (20)；
The base plate transfer device (30) is for being transmitted substrate (9), so that substrate (9) is along being different from the of first direction
Two directions move and the region across two image acquiring devices (10)；
Described two image acquiring devices (10) are used to move in a second direction in substrate (9) and pass through two image acquiring devices
(10) image data in substrate (9) front and reverse side is obtained when region between respectively and is transmitted to processing module (20)；
The processing module (20) be used for by substrate (9) front and reverse side image data respectively with preset positive criteria data
And reverse side normal data is compared, when meet substrate (9) positive image data from positive criteria data different and substrate
(9) image data of reverse side it is different from reverse side normal data at least one when processing module (20) determine substrate (9) exist
Fragmentation, otherwise processing module (20) determines substrate (9) without fragmentation.
2. substrate fragmentation detection system as described in claim 1, which is characterized in that the first direction and second direction are hung down
Directly.
3. substrate fragmentation detection system as described in claim 1, which is characterized in that further include and two image acquiring devices
(10) light source (40) of one be located above in the horizontal direction separately.
4. substrate fragmentation detection system as claimed in claim 3, which is characterized in that the light source (40) is LED light.
5. substrate fragmentation detection system as described in claim 1, which is characterized in that described image acquiring unit (11) is CCD
Camera；
The optical axis for the multiple images acquiring unit (11) in one being located above in described two image acquiring devices (10) with
The angle of vertical direction is acute angle, and underlying multiple images in another obtain in described two image acquiring devices (10)
The angle of the optical axis and vertical direction that take unit (11) is 0 degree.
6. substrate fragmentation detection system as described in claim 1, which is characterized in that when processing module (20) determine substrate (9)
There are when fragmentation, processing module (20) generates alarm signal and is transmitted to base-board conveying device (30), the base-board conveying device
(30) stop being transmitted substrate (9) after receiving alarm signal.
7. substrate fragmentation detection system as described in claim 1, which is characterized in that the base plate transfer device (30) is to substrate
(9) it is transmitted so that substrate (9) moves along the second direction for being different from first direction and passes through two image acquiring devices
(10) substrate (9) are taken out from a coating machine before the region between.
8. substrate fragmentation detection system as claimed in claim 7, which is characterized in that when processing module (20) determine substrate (9)
When without fragmentation, processing module (20) generation is normally sent a signal to base plate transfer device (30), the base plate transfer device (30)
It is intracavitary that substrate (9) is sent to a vacuum drying after receiving normal transmission signal.
9. substrate fragmentation detection system as described in claim 1, which is characterized in that the base plate transfer device (30) is machinery
Hand.
10. a kind of substrate fragmentation detection method is applied to substrate fragmentation detection system as claimed in any one of claims 1-9 wherein
System, which comprises the steps of:
Step S1, the described base plate transfer device (30) is transmitted substrate (9), so that substrate (9) is along different from first direction
Second direction move and the region across two image acquiring devices (10)；
Step S2, described two image acquiring devices (10) move in a second direction in substrate (9) and pass through two images and obtain
The image data in substrate (9) front and reverse side is obtained when region between device (10) respectively and is transmitted to processing module (20)；
Step S3, the described processing module (20) by substrate (9) front and reverse side image data respectively with preset positive criteria
Data and reverse side normal data are compared, when meet substrate (9) positive image data it is different from positive criteria data and
Processing module (20) determines substrate (9) when at least one during the image data of substrate (9) reverse side is different from reverse side normal data
There are fragmentations, and otherwise processing module (20) determines substrate (9) without fragmentation.
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| CN201910143479.7A CN109669288A (en) | 2019-02-26 | 2019-02-26 | Substrate fragmentation detection system and substrate fragmentation detection method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112490153A (en) * | 2020-11-26 | 2021-03-12 | 北京北方华创微电子装备有限公司 | Film transmission monitoring system and method |
| CN112857458A (en) * | 2021-02-05 | 2021-05-28 | 常州捷佳创精密机械有限公司 | Detection device, material platform equipment and image processing method thereof |
| CN114199954A (en) * | 2021-12-06 | 2022-03-18 | Tcl华星光电技术有限公司 | Fragment detection device |
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Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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Application publication date: 20190423 |