CN112857458B - Detection device, material table equipment and image processing method of material table equipment - Google Patents
Detection device, material table equipment and image processing method of material table equipment Download PDFInfo
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- CN112857458B CN112857458B CN202110162525.5A CN202110162525A CN112857458B CN 112857458 B CN112857458 B CN 112857458B CN 202110162525 A CN202110162525 A CN 202110162525A CN 112857458 B CN112857458 B CN 112857458B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The application discloses a detection device, a material table device and an image processing method thereof, and relates to the technical field of detection devices. The device specifically comprises a transmission module, a fixed support and a detection module, wherein the transmission module is used for transmitting a flower basket loaded with a substrate, the image acquisition module is used for photographing or shooting the substrate, the image processing module is used for judging and identifying image data or image data of the substrate, the fixed support is used for installing and transmitting the image acquisition module, the detection module is used for detecting the position of the flower basket, and the control module is used for controlling the transmission module based on the detection result of the detection module so that the flower basket is located in the photographing range of the image acquisition module. And accurately acquiring the condition of the substrate loaded in the basket so as to screen the substrate loaded in the basket and improve the quality of products.
Description
Technical Field
The application relates to the technical field of detection devices, in particular to a detection device, a groove type machine material table device and an image processing method thereof.
Background
The substrate cleaning is basically performed on a slot machine. The method comprises the specific processes that a basket carrying a substrate is placed on a loading table by a mechanical arm, the basket carrying the substrate is conveyed to a cleaning position of a machine table by the loading table, the substrate in the basket is cleaned, and then the basket carrying the substrate is output from a discharging table. At present, the feeding table only has the situation of identifying whether the flower basket is placed on the feeding table, the front and back of the flower basket and whether the flower basket is pressed or not. In the case of the substrate loaded in the basket, it is not known. When the substrate in the flower basket is broken, laminated and the like, the substrate can be washed incompletely, resources are wasted, and the quality of products is seriously affected.
Disclosure of Invention
The application mainly aims to provide a detection device, a material table device and an image processing method thereof, which aim to accurately acquire the state of a substrate in a flower basket so as to screen the substrate and improve the product quality.
In order to achieve the above object, the present application provides a detecting device, which comprises a transmitting module for transmitting a basket loaded with a substrate, an image acquisition module for photographing or shooting the substrate, an image processing module for judging and identifying the image data or the image data of the substrate, a fixing bracket for installing and transmitting the image acquisition module, and a detecting module for detecting the position of the basket, wherein the transmitting module is controlled based on the detection result of the detecting module, and the basket is located in the shooting range of the image acquisition module.
Further, the image acquisition module comprises a camera and a sliding block arranged on the camera, and the fixed support comprises a sliding rail matched with the sliding block and a first motor for driving the sliding block to move along the sliding rail.
Further, a steering piece capable of adjusting the shooting angle of the camera is arranged between the sliding block and the camera.
Further, the image acquisition module further includes: the light source component is connected to one side of the camera, receives shooting signals of the camera and starts the lighting function.
Further, the transmission module includes: and the driving assembly is used for driving the telescopic parts to reciprocate along the conveying direction.
Further, the driving assembly includes: and the connecting piece is used for connecting the telescopic pieces to enable the telescopic pieces to synchronously move along the sliding rails, and the conveying belt is positioned between the sliding rails and connected with the connecting piece, so as to drive a second motor of the conveying belt.
Further, the detection module at least comprises a group of position sensors, the detection device further comprises at least a group of two opposite bearing tables, the two bearing tables are respectively arranged on two sides of the conveying direction of the conveying module, the position sensors are arranged on the bearing tables, and the telescopic piece receives the position sensors to detect the flower basket and then drives the supporting piece to place the flower basket on the bearing tables.
The application also discloses a material table device comprising the detection device.
The application also discloses an image processing method used in the detection device, which comprises the following steps:
the image acquisition module acquires image information of a substrate in the flower basket;
the control module acquires the substrate parameters according to the image information, presets a standard threshold of the substrate, compares the substrate parameters with the standard threshold of the substrate, outputs the substrate parameters normally when the substrate parameters meet the standard threshold, and transmits the flower basket to the discharge end through the transmission module; and when the substrate parameters do not meet the standard threshold, sending out alarm information, and transmitting the flower basket to a starting position through the transmission module.
Further, the substrate parameters at least comprise a substrate length value, a substrate width value and position information of the substrate in two opposite limit openings of the flower basket.
The technical scheme has the following advantages: 1. and accurately acquiring the condition of the substrate loaded in the basket so as to screen the substrate loaded in the basket and improve the quality of products.
Drawings
The application will now be described in detail with reference to specific embodiments and accompanying drawings, in which:
FIG. 1 is a schematic diagram of a first embodiment of the present application;
FIG. 2 is an enlarged schematic view of the transfer mechanism of FIG. 1;
FIG. 3 is a flow chart of an image processing method;
fig. 4 is a schematic diagram of a fault determination flow in the image processing method.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be described in detail with reference to the accompanying drawings and examples. It should be understood that the following specific examples are given by way of illustration only and are not intended to be limiting.
As shown in fig. 1, the present application discloses a detection device 100, which aims to accurately obtain the condition of a substrate loaded in a basket 60, so as to screen the substrate loaded in the basket 60 and improve the quality of products. Specifically, the device comprises a transmission module 10 for transmitting a basket 60 loaded with a substrate, an image acquisition module 20 for photographing or shooting the substrate, an image processing module for judging and identifying image data or image data of the substrate, a fixed support 30 for installing and transmitting the image acquisition module 20 to move along a direction perpendicular to the transmission direction of the basket 60, and a detection module for detecting the position of the basket 60, wherein the transmission module 10 is controlled based on the detection result of the detection module, so that the basket 60 is positioned in the shooting range of the image acquisition module 20.
Specifically, the substrate may be a solar silicon wafer, a PCB (printed circuit board) or other board, the basket 60 for loading the substrate adopts a basket 60 commonly used in the prior art, and the basket 60 may be made of plastic or metal, which is not limited herein.
Before the detection device 100 works, the substrate is placed in the basket 60, the loaded basket 60 is transferred to the detection device 100 through a mechanical arm or other transfer components, and the basket 60 in the initial state is placed at the feeding end of the conveying module 10.
The detection device 100 comprises a body 70, wherein the body 70 is made of a metal material, preferably an aluminum alloy material, and the body 70 made of the aluminum alloy material has a larger supporting force, so that other parts can be conveniently installed, other materials can be adopted according to design requirements, and the body 70 can be lighter and convenient to move due to the adoption of other materials.
The top end of the body 70 is provided with a transmission module 10, and the transmission module 10 adopts a synchronous belt, a gear rack, a screw rod, a chain and other mechanisms in the prior art to realize a transmission function.
The fixing support 30 is fixedly connected to the body 70, the stability of the components connected to the fixing support 30 can be guaranteed by adopting a fixed connection mode, the components can be connected by adopting a movable connection mode, such as a threaded connection mode, a clamping connection mode and the like, the flexibility of the fixing support 30 can be improved by adopting the movable connection mode, and when the fixing support 30 is worn and needs to be replaced, the fixing support 30 can be conveniently detached and installed, and meanwhile, the position of the fixing support 30 can be conveniently adjusted. The support is made of metal materials, the support can provide larger supporting force by adopting the metal materials, the safety and stability of components mounted on the support are guaranteed, other materials can be adopted, for example, wood materials can be adopted, and the support made of the wood materials has the advantages of shock absorption and portability.
The fixed brackets 30 are located between the input end and the output end of the transmission module 10, two fixed brackets 30 are respectively connected to two sides of the transmission module 10, the horizontal height of the free ends of the two fixed brackets 30 is larger than that of the transmission module 10, a guide rail 31 is connected between the free ends of the two fixed brackets 30, an image acquisition module 20 is connected to the guide rail 31, and the image acquisition module 20 can reciprocate on the guide rail 31.
A detection module is further installed at the connection position of the fixing bracket 30 and the body 70, and the detection module is used for detecting the position of the basket 60.
The specific working flow is as follows: after the feeding end of the transmission module 10 acquires the basket 60, the transmission module 10 transmits the basket 60, at this time, the detection modules arranged at two sides of the transmission module 10 are used for detecting the basket 60, when the detection modules detect that the basket 60 passes, the detection modules send electric signals to the control modules, at this time, the control modules pause the operation of the transmission module 10, and when the transmission module 10 pauses, the image acquisition module 20 acquires image information or video information of a substrate in the basket 60, and the acquired image information or video information is sent to the image processing module for processing. When the image processing module finds that the silicon wafers in the basket 60 have flaws, the control module starts the transmission module 10 to rotate reversely, the basket 60 is transmitted to the input end of the transmission module 10, and when the image processing module does not find that the silicon wafers in the basket 60 have flaws, the control module starts the transmission module 10 to rotate positively, and the basket 60 is transmitted to the output end of the transmission module 10.
By adopting the technical scheme, the condition of the substrate loaded in the basket 60 is accurately acquired, so that the substrate loaded in the basket 60 is screened, and the quality of products is improved.
In an embodiment of the present application, the image capturing module 20 includes a camera 23 and a slider 21 disposed on the camera 23, and the fixing bracket 30 includes a slide rail 151 cooperating with the slider 21 and a first motor 25 driving the slider 21 to move along the slide rail 151.
Specifically, the camera 23 is a camera 23 commonly used in the prior art, and in order to reduce the resource consumption, the camera 23 in the present application is a black-and-white camera 23. The camera 23 is slidably connected to the guide rail 31 of the bracket through the slider 21, so that the camera 23 can more comprehensively acquire image information of the substrate loaded in the basket 60. The image acquisition module 20 is driven to reciprocate on the guide rail 31 by the first motor 25, and the first motor 25 may be a servo motor, a general motor, or the like.
In an embodiment of the present application, a steering member capable of adjusting the shooting angle of the camera 23 is disposed between the slider 21 and the camera 23.
Specifically, a steering member (not shown in the figure) capable of adjusting the shooting angle of the camera 23 is connected between the slider 21 and the camera 23, one end of the steering member is rotatably connected to the slider 21, the other end of the steering member is rotatably connected to the camera 23, the joint of the steering member and the camera 23 always keeps the lens of the camera 23 downward under the action of gravity, and the rotation direction between the steering member and the slider 21 is consistent with the rotation direction between the steering member and the camera 23. The camera 23 can move to different positions of the top surface of the flower basket 60 by keeping the directions consistent, so that the camera 23 can acquire image information of any position of the top of the flower basket 60, and the steering piece is made of an aluminum alloy material, so that the steering piece can provide larger supporting force.
By adopting the technical scheme, the camera 23 can acquire image information at different positions, so that the recognition precision is improved, and the possibility of misjudgment is reduced.
In an embodiment of the present application, the image capturing module 20 further includes a light source assembly 29, and the light source assembly 29 is connected to one side of the camera 23, and receives a photographing signal of the camera 23 and turns on an illumination function.
Specifically, the light source assembly 29 is connected to one side of the camera 23, when the camera 23 needs to take a picture, an electrical signal is sent to the light source assembly 29, after the camera 23 receives the electrical signal, the illumination function is turned on, the light source is supplemented to the camera 23, and when the camera 23 finishes taking a picture, the light source assembly 29 turns off the illumination function.
By adopting the technical scheme, the illumination function is started when the camera 23 shoots, the consumption of energy is effectively reduced by closing the illumination function after shooting is completed, the loss of the light source assembly 29 is reduced, the service life of the light source assembly 29 is prolonged, and the production cost is reduced.
It is conceivable that when a plurality of the transfer modules 10 are present, the photographing or photographing time is necessarily prolonged by using a single camera 23, and in order to solve the above technical problem, the cameras 23 corresponding to the number of the transfer modules 10 may be fixedly connected to the fixing bracket 30 to perform image or photographing on the basket 60, so as to reduce the photographing or photographing time and improve the productivity of the detecting device 100.
As shown in fig. 2, in an embodiment of the present application, the transmission module 10 includes: at least two supporting members 11 for supporting the basket 60, a telescopic member 13 for driving the supporting members 11 to be lifted and lowered, and a driving assembly for driving the telescopic member 13 to reciprocate in the conveying direction.
Specifically, the conveying module 10 includes two supporting pieces 11, which are respectively used for supporting different flower baskets 60, the supporting pieces 11 are supported at the bottoms of the flower baskets 60, limiting grooves matched with the bottoms of the flower baskets 60 are formed in the bottoms of the supporting pieces 11, and the limiting grooves are arranged to ensure that the supporting pieces 11 can prevent the flower baskets 60 from sliding when the flower baskets 60 are supported, so that the stability of the flower baskets 60 in the moving process is ensured. A telescopic member 13 is connected to the bottom of the support member 11, and the telescopic member 13 is implemented by a telescopic cylinder in the prior art.
By adopting the technical scheme, different supporting pieces 11 are simultaneously driven by the driving assembly, and balanced linkage of each supporting piece 11 in the conveying direction is completed.
In one embodiment of the application, the drive assembly comprises: at least two slide rails 151, a connecting member 153 for connecting the respective telescopic members 13 to move the respective telescopic members 13 along the slide rails 151 synchronously, a conveyor belt 155 between the slide rails 151 and connected to the connecting member 153, and a second motor 157 for driving the conveyor belt 155.
Specifically, the two sliding rails 151 are parallel to the conveying direction, the connecting piece 153 is perpendicular to the two sliding rails 151, the bottom of the telescopic piece 13 is connected to the connecting piece 153, the connecting piece 153 is slidably connected to the two sliding rails 151, the conveying belt 155 is located between the two sliding rails 31 and connected to the connecting piece 153, and the second motor 157 drives the conveying belt 155 to move, so that the supporting piece 11 arranged on the conveying belt is driven to move. The conveyor belt 155 moves in a reciprocating manner, and when the supporting member 11 is conveyed from the input end to the output end of the conveying module 10, the supporting member is further returned from the output end to the input end, and the second motor 157 may be a servo motor, a common motor, or a cylinder.
In an embodiment of the present application, the detection module includes at least one set of position sensors 41, and the position sensors 41 are one of opposite-emitting photoelectric sensors and diffuse-reflecting sensors.
Specifically, the detection module includes at least one set of position sensors 41, and the position sensors 41 are disposed at the fixing bracket 30 for detecting the position of the basket 60. The application prefers the opposite-irradiation photoelectric sensor, adopts the opposite-irradiation photoelectric sensor, has high detection precision and ensures the stable operation of the whole device. When the diffuse reflection sensor is used, the number of diffuse reflection sensors corresponds to the number of flower baskets 60.
In an embodiment of the present application, the apparatus further includes at least one set of two support tables 50 disposed opposite to each other, wherein the two support tables 50 are disposed on two sides of the conveying direction of the conveying module 10, the position sensor 41 is disposed on the support table 50, and the telescopic member 13 drives the support member 11 to place the basket 60 on the support table 50 after the detecting module detects the basket 60.
Specifically, the position sensor 41 is arranged on the bearing table 50, when the sensor detects that the basket 60 passes through, the controller controls the transmission module 10 to pause, and the telescopic piece 13 places the basket 60 on the bearing table 50, so that absolute stability of the basket 60 in the image or image acquisition process is ensured, and the detection precision is further improved.
It is of course conceivable that a plurality of support stands 50 can be provided at the input and output ends of the conveyor module 10, respectively, as well as sensors being provided on the support stands 50 at the output end of the conveyor module 10 and on the support stands 50 at the input end, wherein the sensors at the input end are used for detecting whether a basket 60 is inserted or not and the sensors at the output end detect whether a basket 60 has been output or not.
The application also discloses a material platform device which comprises the detection device 100.
As shown in fig. 3, the present application also discloses an image processing method used in the detection device 100, which includes the following steps:
s10: the image acquisition module acquires image information of a substrate in the flower basket;
s20: the control module acquires the substrate parameters according to the image information;
s30: presetting a standard threshold value of the substrate, and comparing the substrate parameter with the standard threshold value of the substrate;
s40: when the substrate parameters meet the standard threshold, outputting normally and transmitting the flower basket to a discharge end through a transmission module;
s50: and when the substrate parameters do not meet the standard threshold, sending out alarm information, and transmitting the flower basket to a starting position through the transmission module.
Specifically, an image acquisition module acquires image information of a substrate in a flower basket; the image information includes at least: the length value and the width value of the base plate in the two opposite limit openings of the flower basket and the position information of the base plate;
as shown in fig. 4, the specific judgment step of S30 is as follows:
s31: judging whether the two ends of the top of the base plate are positioned in two opposite limiting openings of the flower basket, if not, judging whether the two ends of the top of the base plate are positioned in the two opposite limiting openings of the flower basket; outputting the position deviation, marking the currently numbered clamping groove as 4 and terminating the judging process;
if yes, S33: continuously judging whether the width of the substrate positioned in the limit opening is larger than the width of a preset substrate, if so, outputting a lamination, marking the currently numbered clamping groove as 3, and terminating the judging process;
if equal, S35: continuously judging whether the length of the substrate positioned in the limit opening is greater than zero and smaller than the preset substrate length, if so, outputting fragments, marking the currently numbered clamping groove as 1, and terminating the judging process;
if not, S37: and continuously judging whether the length of the substrate positioned in the limiting port is zero, if so, outputting a missing piece, marking the clamping groove with the current number as 2, terminating the judging process, if not, outputting a normal state, and entering the judgment of the next limiting port.
By adopting the technical scheme, the substrate of each limit opening in the flower basket can be accurately detected, so that the accuracy of the position is ensured, and the quality of products is improved.
The flower basket is a carrier for loading silicon wafers, and a plurality of limiting openings which play roles in separation and limiting are symmetrically arranged on the flower basket, and each limiting opening is used for placing the silicon wafers.
When the base plate fails, each state data of the clamping groove in the flower basket is sent to a host PLC (programmable logic controller) in an Ethernet communication mode, then the result is presented to an operator through an HMI (human-machine interface), an alarm is sent out, the operator is prompted to process, and meanwhile, the flower basket is transmitted to the input end of the transmission module by the transmission module.
In an embodiment of the present application, the parameter values at least include: the absolute value of the difference value of the length values between the base plate and the clamping groove of the flower basket and the base plate quantity value.
The foregoing description is only of the preferred embodiments of the present application and is not intended to limit the scope of the application, and all equivalent structural changes made by the description of the present application and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the application.
Claims (7)
1. The detection device comprises a transmission module for transmitting a basket loaded with a substrate, an image acquisition module for photographing or shooting the substrate to acquire image information of the substrate, and an image processing module for judging and identifying the image data or the image data of the substrate, and is characterized by further comprising a fixed bracket for installing and transmitting the image acquisition module, a detection module for detecting the position of the basket, and a control module for controlling the transmission module based on the detection result of the detection module so that the basket is positioned in the photographing range of the image acquisition module;
the image acquisition module comprises a camera and a sliding block arranged on the camera, and the fixed support comprises a sliding rail matched with the sliding block and a first motor for driving the sliding block to move along the sliding rail;
the transfer module includes: the driving assembly is used for driving the telescopic parts to reciprocate along the conveying direction;
the control module acquires substrate parameters according to the image information, presets a standard threshold of the substrate, compares the substrate parameters with the standard threshold of the substrate, and controls the transmission module to transmit the basket to the discharge end when the substrate parameters meet the standard threshold;
the substrate parameters at least comprise a substrate length value, a substrate width value and position information of the substrate in two opposite limit openings of the flower basket;
comparing the substrate parameter to a standard threshold of the substrate includes: judging whether the two ends of the top of the base plate are positioned in two opposite limiting openings of the flower basket, if not, judging whether the two ends of the top of the base plate are positioned in the two opposite limiting openings of the flower basket; outputting the position deviation, marking the currently numbered clamping groove as 4 and terminating the judging process; if yes, continuously judging whether the width of the substrate positioned in the limit opening is larger than the width of the preset substrate, if so, outputting the lamination, marking the clamping groove with the current number as 3, and terminating the judging process; if the length of the base plate in the limit opening is equal to the preset base plate length, continuously judging whether the length of the base plate in the limit opening is greater than zero and smaller than the preset base plate length, if so, outputting fragments, marking the currently numbered clamping groove as 1, and terminating the judging process; if not, continuously judging whether the length of the substrate positioned in the limit port is zero, if so, outputting a missing piece, marking the currently numbered clamping groove as 2, terminating the judging process, if not, outputting normally, and entering the judgment of the next limit port.
2. The detecting device for detecting the rotation of a camera according to claim 1, wherein a turning member for adjusting the shooting angle of the camera is arranged between the slider and the camera.
3. The detection apparatus according to claim 1, wherein the image acquisition module further comprises: the light source component is connected to one side of the camera, receives shooting signals of the camera and starts the lighting function.
4. The detection apparatus as claimed in claim 1, wherein the drive assembly comprises: and the connecting piece is used for connecting the telescopic pieces to enable the telescopic pieces to synchronously move along the sliding rails, and the conveying belt is positioned between the sliding rails and connected with the connecting piece, so as to drive a second motor of the conveying belt.
5. The detecting device for detecting the movement of a flower basket on a conveyor according to claim 1, wherein the detecting module comprises at least one set of position sensors, and further comprises at least one set of two opposite support tables, wherein the two support tables are respectively arranged at two sides of the conveying direction of the conveyor, the position sensors are arranged on the support tables, and the telescopic members drive the supporting members to place the flower basket on the support tables after the position sensors detect the flower basket.
6. A magazine apparatus comprising a detection device according to any one of claims 1 to 5.
7. The image processing method in the detection apparatus according to any one of claims 1 to 5, comprising the steps of:
the image acquisition module acquires image information of a substrate in the flower basket;
the control module acquires the substrate parameters according to the image information, presets a standard threshold of the substrate, compares the substrate parameters with the standard threshold of the substrate, outputs the substrate parameters normally when the substrate parameters meet the standard threshold, and transmits the flower basket to the discharge end through the transmission module; and when the substrate parameters do not meet the standard threshold, sending out alarm information, and transmitting the flower basket to a starting position through the transmission module.
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| CN202110162525.5A CN112857458B (en) | 2021-02-05 | 2021-02-05 | Detection device, material table equipment and image processing method of material table equipment |
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| CN202110162525.5A CN112857458B (en) | 2021-02-05 | 2021-02-05 | Detection device, material table equipment and image processing method of material table equipment |
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| CN114708209B (en) * | 2022-03-25 | 2023-04-04 | 高景太阳能股份有限公司 | Production interaction method and system based on 3D modeling and visual inspection |
| CN116778474A (en) * | 2023-06-02 | 2023-09-19 | 河南农业大学 | Intelligent phenotype analyzer for tomato fruits |
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