CN109884811A - Defects of display panel height detection method - Google Patents
Defects of display panel height detection method Download PDFInfo
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- CN109884811A CN109884811A CN201910219437.7A CN201910219437A CN109884811A CN 109884811 A CN109884811 A CN 109884811A CN 201910219437 A CN201910219437 A CN 201910219437A CN 109884811 A CN109884811 A CN 109884811A
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- display panel
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- white light
- detection method
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Abstract
The present invention provides a kind of defects of display panel height detection method.Display panel is set to the lower section of white light interference system by the defects of display panel height detection method;The white light interference system obtains the defect of the display panel;The white light interference system is imaged using white light interference and carries out height detection to the defects of display panel;When white light interference system forms interference fringe, then determine that the height of the defects of display panel is greater than or equal to preset threshold, when the not formed interference fringe of white light interference system, then determine that the height of the defects of display panel is less than preset threshold, the defect for repairing Height Anomalies can be leaked to avoid missing inspection, improve manufacturing process yield.
Description
Technical field
The present invention relates to field of display technology more particularly to a kind of defects of display panel height detection methods.
Background technique
Thin film transistor (TFT) (Thin Film Transistor, TFT) is current liquid crystal display device (Liquid Crystal
Display, LCD) and active matrix drive type organic electroluminescence display device and method of manufacturing same (Active Matrix Organic Light-
Emitting Diode, AMOLED) in main driving element, the display performance of direct relation panel display apparatus.
Liquid crystal display on existing market is largely backlight liquid crystal display comprising liquid crystal display panel and back
Optical mode group (backlight module).The working principle of liquid crystal display panel is in thin-film transistor array base-plate (Thin
Film Transistor Array Substrate, TFT Array Substrate) and colored filter (Color
Filter, CF) liquid crystal molecule is poured between substrate, and apply pixel voltage and common voltage respectively on two plate bases, pass through
The direction of rotation of the electric field controls liquid crystal molecule formed between pixel voltage and common voltage transmits the light of backlight module
Picture is generated out.
OLED device generally includes: substrate, the hole injection layer on anode, is set to sky at the anode on substrate
Hole transmission layer on the implanted layer of cave, the electron transfer layer on luminescent layer, is set to the luminescent layer on hole transmission layer
Electron injecting layer on electron transfer layer and the cathode on electron injecting layer.The principle of luminosity of OLED device is semiconductor material
Material and luminous organic material pass through carrier injection and composite guide photoluminescence under electric field driven.Specifically, OLED device is usual
Using tin indium oxide (ITO) electrode and metal electrode respectively as the anode and cathode of device, under certain voltage driving, electronics
It is injected into electron transfer layer and hole transmission layer from cathode and anode respectively with hole, electrons and holes pass through electron-transport respectively
Layer and hole transmission layer move to luminescent layer, and meet in luminescent layer, form exciton and excite light emitting molecule, the latter passes through
Radiative relaxation and issue visible light.
In the production process of display panel, manufacturing process can inevitably generate defect on a display panel, subsequent
It needs to repair the defect.The image that existing determining defects logic is all based on 2D compares, that is, utilizes the color of image
The size of (grayscale) difference and difference is determined.The prior art is set by the top in display panel with lower section respectively
Reflection CCD (charge-coupled device) camera and transmission CCD camera are set, is received respectively by reflection CCD camera and transmission CCD camera
Reflection light signal and transmission light signal compare the duplicate figure of several pixel units, sentence using the repeatability of pixel unit figure
Disconnected whether the grayscale of each pixel unit is consistent, determines in current image with the presence or absence of defect.However in LCD liquid crystal cell
Under the trend that thick (Cell Gap) thinned technology graduallys mature and OLED multilayer evaporation coating technique is universal, the height of defect
The key for influencing product yield is increasingly becomed, will cause with the logic of the grayscale difference judgement defect of 2D image merely small and high
Defect fail to judge, be unable to satisfy the demand of yield.
Summary of the invention
The purpose of the present invention is to provide a kind of defects of display panel height detection methods, can leak to avoid missing inspection and repair height
Abnormal defect.
To achieve the above object, the present invention provides a kind of defects of display panel height detection method, include the following steps:
Step S1, display panel is set to the lower section of white light interference system;
Step S2, the white light interference system obtains the defect of the display panel;
Step S3, the white light interference system is imaged using white light interference and carries out height detection to the defects of display panel;
When white light interference system formation interference fringe, then determine that the height of the defects of display panel is greater than or equal to preset threshold, when
The not formed interference fringe of white light interference system then determines that the height of the defects of display panel is less than preset threshold.
The white light interference system include: light source, set on the light source side refractor group, to be set to the refraction saturating
Image pickup part above microscope group, the reflecting mirror below the refractor group, the pellicle mirror below the reflecting mirror;
The step S3 specifically: when the incident light that the light source issues is refracted on pellicle mirror by refractor group,
The incident light is divided into reflection light and transmitted ray, reflection light directive reflecting mirror back reflection to pellicle mirror, then anti-through pellicle mirror
It is incident upon refractor group, then refracts to image pickup part, the defects of transmitted ray directive display panel back reflection through refractor group
It is transmitted through refractor group to pellicle mirror, then through pellicle mirror, then refracts to image pickup part through refractor group;
When the light path that transmitted ray reaches image pickup part, which is equal to reflection light, reaches the light path of image pickup part, image pickup part be will form
Interference fringe then determines that the height of the defects of display panel is greater than or equal to preset threshold;When transmitted ray reaches image pickup part
Light path be greater than reflection light reach image pickup part light path when, image pickup part can not form interference fringe, then determine in display panel
Defect height be less than preset threshold.
The white light interference system further includes the adjusting unit connecting with reflecting mirror, and the adjusting unit is for adjusting reflecting mirror
The preset distance between pellicle mirror.
The adjusting unit is piezoelectric ceramics.
Preset distance is equal between the defect and pellicle mirror of the height of preset threshold between the reflecting mirror and pellicle mirror
Distance.
The length of the reflecting mirror is less than the length of the pellicle mirror.
The refractor group includes the first refractive lens and the second refractor being parallel to each other, and is set to described the
Light-reflecting sheet between one refractor and the second refractor.
The light-reflecting sheet is tilted relative to the second refractor, and the light-reflecting sheet and the incident light of light source sending
Incident direction forms predetermined angle.
The predetermined angle is 45 °.
The step S2 specifically: the white light interference system obtains the sub-pixel list of multiple same colors in display panel
The gray scale image of member, when the grayscale of a sub-pixel unit is identical as preset gray scale, then determining the sub-pixel unit, there is no lack
It falls into, when the grayscale of a sub-pixel unit and preset gray scale be not identical, then determines the sub-pixel unit existing defects.
Beneficial effects of the present invention: display panel is set to white light by defects of display panel height detection method of the invention
The lower section of interference system;The white light interference system obtains the defect of the display panel;The white light interference system is dry using white light
It relates to imaging and height detection is carried out to the defects of display panel;When white light interference system formation interference fringe, then display surface is determined
The height of the defects of plate is greater than or equal to preset threshold and then determines display surface when the not formed interference fringe of white light interference system
The height of the defects of plate is less than preset threshold, and the defect for repairing Height Anomalies can be leaked to avoid missing inspection, improves manufacturing process yield.
Detailed description of the invention
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with of the invention detailed
Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
In attached drawing,
Fig. 1 is the flow chart of defects of display panel height detection method of the invention;
Fig. 2 is the schematic diagram of the step S2 of defects of display panel height detection method of the invention;
Fig. 3 is the schematic diagram of the step S3 of defects of display panel height detection method of the invention.
Specific embodiment
Further to illustrate technological means and its effect adopted by the present invention, below in conjunction with preferred implementation of the invention
Example and its attached drawing are described in detail.
It please refers to Fig.1 to Fig.3, the present invention provides a kind of defects of display panel height detection method, includes the following steps:
Step S1, display panel 10 is set to the lower section of white light interference system 20;
Step S2, the white light interference system 20 obtains the defect 11 of the display panel 10;
Step S3, the white light interference system 20 is imaged using white light interference and carries out height to the defects of display panel 10 11
Detection;When the formation interference fringe of white light interference system 20, then determine that the height of the defects of display panel 10 11 is greater than or equal to
Preset threshold then determines that the height of the defects of display panel 10 11 is less than when the not formed interference fringe of white light interference system 20
Preset threshold.
Specifically, the white light interference system 20 includes: light source 21, the refractor group set on 21 side of light source
22, the image pickup part 23 above the refractor group 22, set on 22 lower section of the refractor group reflecting mirror 24, be set to
The pellicle mirror 25 of 24 lower section of reflecting mirror;
Referring to Fig. 3, the step S3 specifically: the incident light 211 that the light source 21 issues passes through refractor group 22
When being refracted on pellicle mirror 25, which divides for reflection light 212 and transmitted ray 213, and 212 directive of reflection light is anti-
24 back reflection of mirror is penetrated to pellicle mirror 25, then reflex to refractor group 22 through pellicle mirror 25, then is refracted to through refractor group 22
Image pickup part 23,11 back reflections of the defects of 213 directive display panel 10 of transmitted ray to pellicle mirror 25, then transmitted through pellicle mirror 25
Image pickup part 23 is refracted to refractor group 22, then through refractor group 22;When transmitted ray 213 reaches the light path of image pickup part 23
When reaching the light path of image pickup part 23 equal to reflection light 212, image pickup part 23 will form apparent interference fringe, then determines display surface
The height of the defects of plate 10 11 is greater than or equal to preset threshold, that is, detects the defect 11 of Height Anomalies on display panel 10;
When the light path that transmitted ray 213 reaches image pickup part 23, which is greater than reflection light 212, reaches the light path of image pickup part 23,23 nothing of image pickup part
Method forms apparent interference fringe, then determines that the height of the defects of display panel 10 11 is less than preset threshold, that is, detect aobvious
Show the normal defect 11 of height on panel 10.
Specifically, the white light interference system 20 further includes the adjusting unit 26 connecting with reflecting mirror 24, the adjusting unit
26 for adjusting preset distance between reflecting mirror 24 and pellicle mirror 25.
Further, the adjusting unit 26 is piezoelectric ceramics.
Further, defect of the preset distance equal to the height of preset threshold between the reflecting mirror 24 and pellicle mirror 25
The distance between 11 and pellicle mirror 25.
It should be noted that when the height of defect 11 is less than preset threshold, no matter 213 directive defect 11 of transmitted ray
Any position back reflection, the light path which reaches image pickup part 23 can always be greater than reflection light 212 and reach image pickup part
23 light path;When the height of defect 11 is greater than or equal to preset threshold, behind any position of 213 directive defect 11 of transmitted ray
Reflection, the light path that always having a position can make transmitted ray 213 reach image pickup part 23 are equal to the arrival image pickup part of reflection light 212
23 light path, therefore, when image pickup part 23 can not form apparent interference fringe, it is possible to determine that the height of defect 11 is less than default
Threshold value detects the normal defect 11 of height;When image pickup part 23 forms apparent interference fringe, it is possible to determine that the height of defect 11
Degree is greater than or equal to preset threshold, detects the defect 11 of Height Anomalies, avoids missing inspection leakage from repairing the defect 11 of Height Anomalies, improves
Yield is deposited especially for multilayer of the LCD to group yield and OLED in manufacturing process yield.
Specifically, the length of the reflecting mirror 24 is less than the length of the pellicle mirror 25.
Specifically, the image pickup part 23 is CCD camera.
Specifically, the refractor group 22 includes the first refractive lens 221 and the second refractor being parallel to each other
222, and the light-reflecting sheet 223 between the first refractive lens 221 and the second refractor 222.
Further, the light-reflecting sheet 223 is tilted relative to the second refractor 222, and the light-reflecting sheet 223 with
The incident direction for the incident light 211 that light source 21 issues forms predetermined angle.
Further, the predetermined angle is 45 °, so that 211 vertical incidence of incident light is to the second refractor 222.I.e.
Incident light 211 is incident to the second refractor 222 through light-reflecting sheet 223, and then reflection light 212 is passed through with transmitted ray 213
222 directive first refractive lens 221 of the second refractor are crossed, refract to image pickup part 23 by first refractive lens 221.
Specifically, referring to Fig. 2, the step S2 specifically: the white light interference system 20 obtains in display panel 10
The gray scale image of the sub-pixel unit 12 of multiple same colors, when the grayscale of a sub-pixel unit 12 is identical as preset gray scale,
Then determining the sub-pixel unit 12, there is no defects 11, when the grayscale of a sub-pixel unit 12 and preset gray scale be not identical, then
Determine 12 existing defects 11 of sub-pixel unit.
Further, the sub-pixel unit 12 is red sub-pixel, green sub-pixels or blue subpixels.
In conclusion defects of display panel height detection method of the invention, is set to white light interference system for display panel
Lower section;The white light interference system obtains the defect of the display panel;The white light interference system utilizes white light interference imaging pair
The defects of display panel carries out height detection;When white light interference system formation interference fringe, then lacking in display panel is determined
Sunken height is greater than or equal to preset threshold, when the not formed interference fringe of white light interference system, then determines lacking in display panel
Sunken height is less than preset threshold, and the defect for repairing Height Anomalies can be leaked to avoid missing inspection, improves manufacturing process yield.
The above for those of ordinary skill in the art can according to the technique and scheme of the present invention and technology
Other various corresponding changes and modifications are made in design, and all these change and modification all should belong to the claims in the present invention
Protection scope.
Claims (10)
1. a kind of defects of display panel height detection method, which comprises the steps of:
Step S1, display panel (10) are set to the lower section of white light interference system (20);
Step S2, the white light interference system (20) obtains the defect (11) of the display panel (10);
Step S3, the white light interference system (20) is imaged using white light interference and carries out height to the defects of display panel (10) (11)
Degree detection;When white light interference system (20) formation interference fringe, then determine that the height of the defects of display panel (10) (11) is big
The defects of display panel (10) is then determined when white light interference system (20) not formed interference fringe in or equal to preset threshold
(11) height is less than preset threshold.
2. defects of display panel height detection method as described in claim 1, which is characterized in that the white light interference system
(20) include: light source (21), the refractor group (22) for being set to the light source (21) side, be set to the refractor group (22)
The image pickup part (23) of top, is set under the reflecting mirror (24) reflecting mirror (24) being set to below the refractor group (22)
The pellicle mirror (25) of side;
The step S3 specifically: the incident light (211) that the light source (21) issues is refracted to half by refractor group (22)
When on lens (25), which is divided into reflection light (212) and transmitted ray (213), reflection light (212) directive
Reflecting mirror (24) back reflection reflexes to refractor group (22) to pellicle mirror (25), then through pellicle mirror (25), then through refractor
Group (22) refracts to image pickup part (23), and the defects of transmitted ray (213) directive display panel (10) (11) back reflection is to semi-transparent
Mirror (25), then be transmitted through refractor group (22) through pellicle mirror (25), then refract to image pickup part (23) through refractor group (22);
When the light path that transmitted ray (213) reach image pickup part (23) is equal to the light path that reflection light (212) reach image pickup part (23)
When, image pickup part (23) will form interference fringe, then it is pre- to determine that the height of the defects of display panel (10) (11) is greater than or equal to
If threshold value;When the light path that transmitted ray (213) reach image pickup part (23) is greater than the light that reflection light (212) reach image pickup part (23)
Cheng Shi, image pickup part (23) can not form interference fringe, then it is default to determine that the height of the defects of display panel (10) (11) is less than
Threshold value.
3. defects of display panel height detection method as claimed in claim 2, which is characterized in that the white light interference system
It (20) further include the adjusting unit (26) being connect with reflecting mirror (24), the adjusting unit (26) is for adjusting reflecting mirror (24) and half
Preset distance between lens (25).
4. defects of display panel height detection method as claimed in claim 3, which is characterized in that the adjusting unit (26) is
Piezoelectric ceramics.
5. defects of display panel height detection method as claimed in claim 3, which is characterized in that the reflecting mirror (24) and half
Preset distance is equal to the distance between defect (11) and pellicle mirror (25) of the height of preset threshold between lens (25).
6. defects of display panel height detection method as claimed in claim 2, which is characterized in that the length of the reflecting mirror (24)
Degree is less than the length of the pellicle mirror (25).
7. defects of display panel height detection method as claimed in claim 2, which is characterized in that the refractor group (22)
Including the first refractive lens (221) and the second refractor (222) being parallel to each other, and it is set to the first refractive lens
(221) light-reflecting sheet (223) between the second refractor (222).
8. defects of display panel height detection method as claimed in claim 7, which is characterized in that the light-reflecting sheet (223)
It is tilted relative to the second refractor (222), and the light-reflecting sheet (223) and the incident light (211) of light source (21) sending
Incident direction forms predetermined angle.
9. defects of display panel height detection method as claimed in claim 8, which is characterized in that the predetermined angle is 45 °.
10. defects of display panel height detection method as described in claim 1, which is characterized in that the step S2 specifically:
The white light interference system (20) obtains the gray scale image of the sub-pixel unit (12) of multiple same colors in display panel (10),
When the grayscale of a sub-pixel unit (12) is identical as preset gray scale, then determining the sub-pixel unit (12), there is no defects
(11), when the grayscale of a sub-pixel unit (12) and preset gray scale be not identical, then determine that there are scarce for the sub-pixel unit (12)
It falls into (11).
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111618710A (en) * | 2020-05-21 | 2020-09-04 | 武汉华星光电半导体显示技术有限公司 | Mask repair equipment |
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RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190614 |