CN207992078U - A kind of base board defect detecting device - Google Patents
A kind of base board defect detecting device Download PDFInfo
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- CN207992078U CN207992078U CN201820524934.9U CN201820524934U CN207992078U CN 207992078 U CN207992078 U CN 207992078U CN 201820524934 U CN201820524934 U CN 201820524934U CN 207992078 U CN207992078 U CN 207992078U
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- camera
- light source
- substrate
- detecting device
- base board
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- 230000007547 defect Effects 0.000 title claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 77
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 230000007723 transport mechanism Effects 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 5
- 230000002159 abnormal effect Effects 0.000 abstract description 4
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- 238000001514 detection method Methods 0.000 description 2
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- 239000000835 fiber Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
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- 210000004556 brain Anatomy 0.000 description 1
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- 238000000576 coating method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
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- 239000000523 sample Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model provides a kind of base board defect detecting device, including light source mechanism, camera shooting mechanism, transport mechanism, image procossing mechanism, transport mechanism is for transmitting substrate, light source mechanism includes first light source, it includes the first camera to image mechanism, and first light source and the first camera are respectively positioned on substrate side, and first light source and the setting of the first camera mirror symmetry, it further includes second camera to image mechanism, and second camera is located at the substrate other side.The base board defect detecting device of the utility model; by the way that two groups of cameras are arranged in substrate front side and the back side; and the light source being arranged in substrate front side side by one group; to in substrate transmit process; automatically it detects that fine crack or cut etc. existing for substrate front side and the back side are bad, intercepts abnormal substrate in time, reduce a large amount of substrate and scrap; production yield is improved, production cost is reduced.
Description
Technical field
The utility model belongs to detection device technology field more particularly to a kind of base board defect detecting device.
Background technology
In liquid crystal display panel industry, alignment film coating mainly transfer or ink-jet by way of, wherein transfer-type due to
The advantages that its accuracy and printing surface relative homogeneity, is widely used.Specifically, being exactly will by PI nozzles 11
PI liquid is sprayed on scraper 12, then equably PI liquid is transferred on reticulate pattern wheel 13 by scraper 12, the turning handle PI of reticulate pattern wheel 13
Liquid is transferred to again in APR versions 15, and PI liquid is squeezed out and taken away by the round mesh in APR versions 15, is finally equably transferred to
In the TFT substrate or CF substrates 16 being positioned on base station 17, as shown in Figure 1.If it is different that base station remains tiny glass clast etc.
Object, in PI liquid transfer process, foreign matter can give TFT substrate or the upward stress of CF substrate backs one on base station so that TFT substrate or
There is fine crack in CF substrate backs.The generation of fine crack how is efficiently reduced, mainly there are two aspects, when " pre- ",
That is periodic cleaning cassette, transmission equipment, transfer base station；The second aspect is " anti-", i.e. improvement checks equipment, finds at the first time
Bad problem timely and effectively avoids abnormal generation.
In the prior art, through prebake conditions after PI liquid has been coated with, automatic optical checking machine is entered with certain frequency and checks TFT
Or the defect (such as mura, foreign matter) of CF substrate surfaces, then hand inspection machine is entered with certain frequency and carries out artificial naked eyes inspection
It looks into.It has a defect that automatic optical checking machine can only check the foreign matter of TFT or CF substrate surfaces, can not detect the back side
Existing fine crack or cut.And artificial visual inspection can not be found, cannot intercept abnormal substrate in time, can be caused a large amount of
Substrate scrap, reduce production yield, increase production cost.
Utility model content
The purpose of this utility model is to provide one kind capable of detecting the undesirable base board defect of substrate front side and the back side simultaneously
Detection device.
The utility model provides a kind of base board defect detecting device, including light source mechanism, camera shooting mechanism, for transmitting substrate
Transport mechanism and image procossing mechanism, the light source mechanism include first light source, the camera shooting mechanism include first camera shooting
Head and second camera, the first light source and the first camera are located at the same side of substrate, and the first light source and first
Camera is arranged in mirror symmetry, is formed between first light source and the first camera and is more than 0 ° and is less than 180 ° of angle, and described the
Two cameras are located at the other side of substrate.
Preferably, first camera and second camera include multiple CCD camera lenses.
Preferably, first camera and first light source are located at the front of substrate, and the second camera is located at substrate
The back side.
Preferably, the transport mechanism is between first camera and second camera, first camera
It receives and the optical signal reflected through the substrate front side is sent out by the first light source.
Preferably, the second camera receives the light letter for being sent out by the first light source and being reflected through the substrate back
Number.
Preferably, the angle is 20-30 °.
Preferably, the first light source is made of one or more light sources.
Preferably, further include mobile mechanism, the mobile mechanism includes motor and holder, first camera and second
Camera is fixed on holder.
Preferably, the camera shooting mechanism further includes second light source, and the second light source is located at the same side with second camera,
And the second light source and second camera mirror symmetry are arranged.
Preferably, the focus of the first light source and the focus of the first camera and the second light source and second camera
Overlapping or not.
The base board defect detecting device of the utility model, it is simple in structure and there is universality, by substrate front side and
Two groups of cameras, and the light source being arranged in substrate front side side by one group is arranged in the back side, by the reflection and refraction of light, thus
In substrate transmit process, detects that fine crack or cut etc. existing for substrate front side and the back side are bad automatically, intercept in time different
Normal substrate reduces a large amount of substrate and scraps, and improves production yield, reduces production cost.
Description of the drawings
Fig. 1 is the coating schematic diagram of alignment film；
Fig. 2 is the structural schematic diagram of the utility model base board defect detecting device；
Fig. 3 is the refraction schematic diagram of the utility model base board defect detecting device；
Fig. 4 is the vertical view of the utility model base board defect detecting device；
Fig. 5 is the upward view of the utility model base board defect detecting device.
Specific implementation mode
As shown in Figures 2 to 5, the base board defect detecting device of the utility model include light source mechanism, camera shooting mechanism,
For transmitting substrate 4, light source mechanism includes first light source 1, is taken the photograph for transport mechanism 3 and image procossing mechanism, wherein transport mechanism 3
Camera structure includes the first camera 21, and first light source 1 and the first camera 21 are located at the same side, are respectively positioned on substrate 4 positive one
Side, and first light source 1 and the setting of 21 mirror symmetry of the first camera, form and are more than 0 ° of angle for being less than 180 °, it is preferable that angle
It is 20-30 °.
First light source 1 by light by fiber optic conduction to the front face surface of substrate 4, due to first light source 1 and substrate front side table
Face has certain incidence angle, and preferably incidence angle is 10-15 °, and the reflex based on light, substrate front side surface is by light reflection
To the first camera 21, since substrate 4 is transmitted by transport mechanism 3, it is positive that the first camera 21 can obtain substrate 4
Black and white scan image, and give the signal transmission of black and white scan image to image procossing mechanism, preferably image procossing mechanism is electricity
Brain, and black and white scanning figure will be obtained by computer software and handled by 2 values, obtain light feedback oscillogram.Again by comparing percentage
Than difference, if it exceeds certain range, that is, be determined as substrate front side surface defect.
Further, camera shooting mechanism further includes second camera 22, and second camera 22 is located at 4 other side of substrate, with the
One light source 1 and the first camera 21 are oppositely arranged.Second camera 22 and the angle of substrate back surface at an angle, due to
First light source 1 with substrate front side surface there is certain incidence angle, the refraction effect based on light, light can occur after passing through substrate 4
Refraction, second camera 22 is used to receive reflects the optical signal sent out through substrate back.Due to substrate 4 by transport mechanism 3 into
Row transmission, second camera 22 can obtain the black and white scan image at 4 back side of substrate, and by the signal transmission of black and white scan image
Image procossing mechanism is given, preferably image procossing mechanism is computer, and will obtain black and white scanning figure by computer software and pass through 2 values
Processing obtains light feedback oscillogram.If there is fine crack, cut etc. bad 6, the light reflected through the back side in 4 back side of substrate
Its refraction angle of road will change, and shown in attached drawing 3, this variation can be recorded by second camera 22, then by comparing percentage
Than difference, type and the position of bad defect are obtained.
In another embodiment, the first camera 21 and second camera 22 can move up and down, and prevent reflected refraction
Light shift, to coordinate the base board defect of different-thickness to detect.
In another embodiment, the first camera 21 and second camera 22 include multiple CCD camera lenses, perpendicular to substrate
4 direction of advance is arranged in 1 row, it is preferable that the first camera 21 and second camera 22 are including 7 CCD camera lenses.
In another embodiment, second camera 22 is replaced using infrared light or probe, substrate back is examined
It surveys.
In another embodiment, second light source can also be set, second light source is located at the same side with second camera 22,
It is respectively positioned on substrate back side, is independently arranged with first light source 1 and the first camera 21, second light source and 22 mirror image of second camera
It is symmetrical arranged, is formed and be more than 0 ° of angle for being less than 180 °, it is preferable that angle is 20-30 °.The work of second light source and first light source 1
With identical, second camera 22 is for receiving the optical signal via substrate back surface reflection that second light source is sent out.
In another embodiment, first light source 1 and the focus of the first camera 21 and second light source and second camera
22 focus overlapping or not.
In another embodiment, first light source 1 is made of one or more light sources.
In another embodiment, base board defect detecting device further includes mobile mechanism, and mobile mechanism includes motor and branch
Frame, the first camera and second camera are fixed on holder, and holder can move in the vertical direction under the driving of motor
It is dynamic, to drive the first camera and second camera to move in the vertical direction, adjust the first camera and second camera
With the distance between substrate front side and the back side.First camera and second camera can be moved relatively or contrarily simultaneously, also may be used
To move respectively.Motor driving may be used in mobile mechanism, can also use the driving devices such as lead screw.
The application method of the base board defect detecting device of the utility model is,
(1) substrate 4 is transmitted position to be detected by transport mechanism 3；
(2) light is passed through fiber optic conduction to the first surface of substrate 4 by first light source 1；
(3) first surface of substrate reflects light to the first camera 21, and the second surface of substrate is by anaclasis to second
Camera 22；
(4) the black and white scanning figure of substrate 4 is obtained by the first camera 21 and second camera 22；
(5) first cameras 21 and second camera 22 transmit a signal to computer, are swept by computer software by black and white is obtained
Tracing is handled by 2 values, obtains light feedback oscillogram；By comparing percentage difference, if it exceeds certain range, that is, sentence
It is set to defect.
Wherein, first surface is the front of substrate 4, and second surface is the back side of substrate 4, and substrate 4 is TF T substrates or CF
Substrate.
The utility model is simple in structure and has universality, by the way that camera is respectively set in substrate front side and the back side, and
The light source being arranged in substrate front side side by one group, by the reflection and refraction of light, in substrate transmit process, examine automatically
It is bad to measure fine crack or cut etc. existing for substrate front side and the back side, intercepts abnormal substrate in time, reduces a large amount of substrate
It scraps, improves production yield, reduce production cost.
Preferred embodiments of the present invention described in detail above, but the utility model is not limited to above-mentioned implementation
Detail in mode can carry out the technical solution of the utility model in the range of the technology design of the utility model
A variety of equivalents (such as quantity, shape, position), these equivalents belong to the scope of protection of the utility model.
Claims (10)
1. a kind of base board defect detecting device, which is characterized in that including light source mechanism, camera shooting mechanism, the biography for transmitting substrate
It includes first light source to send mechanism and image procossing mechanism, the light source mechanism, the camera shooting mechanism include the first camera and
Second camera, the first light source and the first camera are located at the same side of substrate, and the first light source and the first camera shooting
Head is arranged in mirror symmetry, is formed between first light source and the first camera and is more than 0 ° of angle for being less than 180 °, described second takes the photograph
As head is located at the other side of substrate.
2. base board defect detecting device according to claim 1, which is characterized in that first camera and the second camera shooting
Head includes multiple CCD camera lenses.
3. base board defect detecting device according to claim 1, which is characterized in that first camera and first light source
Positioned at the front of substrate, the second camera is located at the back side of substrate.
4. base board defect detecting device according to claim 3, which is characterized in that the transport mechanism is located at described first
Between camera and second camera, first camera receives to be sent out by the first light source to be reflected through the substrate front side
Optical signal.
5. base board defect detecting device according to claim 3, which is characterized in that the second camera is received by described
First light source sends out the optical signal reflected through the substrate back.
6. base board defect detecting device according to claim 1, which is characterized in that the angle is 20-30 °.
7. base board defect detecting device according to claim 1, which is characterized in that the first light source is by one or more
Light source forms.
8. base board defect detecting device according to claim 1, which is characterized in that further include mobile mechanism, the movement
Mechanism includes motor and holder, and first camera and second camera are fixed on holder.
9. base board defect detecting device according to claim 1, which is characterized in that the camera shooting mechanism further includes the second light
Source, the second light source are located at the same side, and the second light source and the setting of second camera mirror symmetry with second camera.
10. base board defect detecting device according to claim 9, which is characterized in that the first light source and the first camera shooting
The focus of head is Chong Die with the focus of the second light source and second camera or is not overlapped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820524934.9U CN207992078U (en) | 2018-04-13 | 2018-04-13 | A kind of base board defect detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820524934.9U CN207992078U (en) | 2018-04-13 | 2018-04-13 | A kind of base board defect detecting device |
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| Publication Number | Publication Date |
|---|---|
| CN207992078U true CN207992078U (en) | 2018-10-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820524934.9U Expired - Fee Related CN207992078U (en) | 2018-04-13 | 2018-04-13 | A kind of base board defect detecting device |
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| Country | Link |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109633951A (en) * | 2019-02-26 | 2019-04-16 | 深圳市华星光电技术有限公司 | Fragmentation detection device and fragmentation detection method |
| CN109669288A (en) * | 2019-02-26 | 2019-04-23 | 深圳市华星光电技术有限公司 | Substrate fragmentation detection system and substrate fragmentation detection method |
| CN110082361A (en) * | 2019-05-27 | 2019-08-02 | 成都领益科技有限公司 | A kind of object appearance and crack detection device and detection method |
| CN112083009A (en) * | 2020-07-23 | 2020-12-15 | 广州超音速自动化科技股份有限公司 | Method and device for detecting quality of mask through video and storage medium |
-
2018
- 2018-04-13 CN CN201820524934.9U patent/CN207992078U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109633951A (en) * | 2019-02-26 | 2019-04-16 | 深圳市华星光电技术有限公司 | Fragmentation detection device and fragmentation detection method |
| CN109669288A (en) * | 2019-02-26 | 2019-04-23 | 深圳市华星光电技术有限公司 | Substrate fragmentation detection system and substrate fragmentation detection method |
| CN110082361A (en) * | 2019-05-27 | 2019-08-02 | 成都领益科技有限公司 | A kind of object appearance and crack detection device and detection method |
| CN110082361B (en) * | 2019-05-27 | 2024-04-30 | 成都领益科技有限公司 | Object appearance and crack detection device and detection method |
| CN112083009A (en) * | 2020-07-23 | 2020-12-15 | 广州超音速自动化科技股份有限公司 | Method and device for detecting quality of mask through video and storage medium |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200918 Address after: No.7 Tianyou Road, Qixia District, Nanjing City, Jiangsu Province Patentee after: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Address before: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Patentee before: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Patentee before: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Patentee before: NANJING HUADONG ELECTRONICS INFORMATION & TECHNOLOGY Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181019 |