CN203502360U - Substrate inspection device - Google Patents

Substrate inspection device Download PDF

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Publication number
CN203502360U
CN203502360U CN201320604894.6U CN201320604894U CN203502360U CN 203502360 U CN203502360 U CN 203502360U CN 201320604894 U CN201320604894 U CN 201320604894U CN 203502360 U CN203502360 U CN 203502360U
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China
Prior art keywords
substrate
imageing sensor
light source
light
base board
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CN201320604894.6U
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Chinese (zh)
Inventor
杨章亮
张然
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BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
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BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
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Priority to CN201320604894.6U priority Critical patent/CN203502360U/en
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Abstract

The embodiments of the utility model disclose a substrate inspection device, relating to the technical field of display. The substrate inspection device can be used for discovering adverse conditions, such as damage, foreign bodies and the like, of the edge of a substrate in time. The substrate inspection device comprises a bearing platform, a light source, first image sensors and second image sensors, wherein the bearing platform is used for bearing the substrate; the light source is located above or below the bearing platform; the first image sensors are located above a display zone of the substrate and are used for imaging the display zone of the substrate by using light emitted by the light source, so as to obtain information on the location and area of the adverse conditions of the display zone; the second image sensors are located above an edge zone of the substrate and are used for imaging the edge zone of the substrate by using the light emitted by the light source, so as to obtain information on the location and area of the adverse conditions of the edge zone.

Description

Base board checking device
Technical field
The utility model relates to display technique field, relates in particular to a kind of base board checking device.
Background technology
In display panel production run, the operation that is absolutely necessary of exposing.The substrate that has been coated with photoresist enters exposure machine exposure to be needed to check before, and have foreign matter to get rid of in time, smooth not etc. has the substrate of unfavorable condition, improves the yields of display panel, reduces costs.
Inventor finds in realizing process of the present invention, and in the prior art, because the edge of substrate is without exposing, in the process checking, base board checking device only checks being coated with the viewing area of photoresist, the edge of substrate do not checked.But in the process that substrate transports on production line, easily bump with the angle sheave of production line or stop pin and cause damaged, or the foreign matter on adhesion production line.Damaged or foreign matter easily damages the structures such as nozzle, mask plate of spraying photoresist, increases exposure cost.Further, exist the substrate of edge crumbling also can produce significant impact to the quality of the color membrane substrates of producing, reduce the yields of color membrane substrates.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of base board checking device, can find in time the unfavorable conditions such as breakage that substrate edges exists, foreign matter.
For solving the problems of the technologies described above, the utility model adopts following technical scheme:
The invention provides a kind of base board checking device, comprising:
The plummer of bearing substrate;
Be positioned at the light source above or below described plummer;
The first imageing sensor that is positioned at the top, viewing area of described substrate, described the first imageing sensor utilizes the light that described light source sends to carry out imaging to the viewing area of described substrate, to obtain position and the area information of the unfavorable condition of described viewing area;
The second imageing sensor that is positioned at the fringe region top of described substrate, described the second imageing sensor utilizes the light that described light source sends to carry out imaging to the fringe region of described substrate, to obtain position and the area information of the unfavorable condition of described fringe region.
Further, the shooting direction of described the second imageing sensor is perpendicular to described substrate.
Further, the distance between described the second imageing sensor and described substrate equals the focal length of described the second imageing sensor.
Further, described light source comprises the first light source;
The light that described the first imageing sensor utilizes described the first light source to send carries out imaging to the viewing area of described substrate;
The light that described the second imageing sensor utilizes described the first light source to send carries out imaging to the fringe region of described substrate.
Further, described light source comprises the first light source and secondary light source;
The light that described the first imageing sensor utilizes described the first light source to send carries out imaging to the viewing area of described substrate;
Described the second imageing sensor utilizes the light that described secondary light source sends to carry out imaging to the fringe region of described substrate.
Further, described the second imageing sensor and described secondary light source lay respectively at the above and below of described plummer, and the light inlet region of corresponding described the second imageing sensor in the bright dipping region of described secondary light source.
This base board checking device has the second imageing sensor of the fringe region top that is positioned at described substrate, this second imageing sensor by the image transmitting photographing to the Central Control Module in base board checking device, the image that this Central Control Module can photograph according to the second imageing sensor, fringe region to substrate is analyzed, find in time the existing foreign matter of fringe region of substrate, the unfavorable condition such as damaged, thereby process timely there is the substrate of above-mentioned unfavorable condition, prevent the nozzle of this substrate damage spraying photoresist, the structures such as mask plate, increase exposure cost, simultaneously, also can guarantee the yields of color membrane substrates.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, below the accompanying drawing of required use during embodiment is described is briefly described, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of the base board checking device in the utility model embodiment;
Fig. 2 is the concrete structure schematic diagram one of the base board checking device in the utility model embodiment;
The light path schematic diagram of the light that when Fig. 3 is the fringe region foreign in the utility model embodiment, the first light source sends;
Fig. 4 is the light path schematic diagram of the light that the first light source sends while having foreign matter of the fringe region in the utility model embodiment;
Fig. 5 is the concrete structure schematic diagram two of the base board checking device in the utility model embodiment;
The light path schematic diagram of the light that when Fig. 6 is the fringe region foreign in the utility model embodiment, secondary light source sends;
Fig. 7 is the light path schematic diagram of the light that secondary light source sends while having foreign matter of the fringe region in the utility model embodiment.
Description of reference numerals:
1-plummer; 2-bracing frame; The 3-the first light source;
4-secondary light source; 5-substrate; The 6-the first imageing sensor;
The 7-the second imageing sensor; 8-foreign matter.
Embodiment
Embodiment mono-
The utility model embodiment provides a kind of base board checking device, concrete, and as shown in Figure 1, this base board checking device comprises:
The plummer of bearing substrate, be positioned at light source above or below described plummer, be positioned at first imageing sensor of top, viewing area of described substrate and the second imageing sensor that is positioned at the fringe region top of described substrate.
Substrate comprises viewing area and viewing area fringe region around, concrete, and the substrate that has been coated with photoresist enters exposure machine exposure needs to enter before substrate detection apparatus inspection.In the process checking, described the first imageing sensor utilizes the light that described light source sends to carry out imaging to the viewing area of described substrate, to obtain position and the area information of the unfavorable condition of described viewing area; Meanwhile, described the second imageing sensor utilizes the light that described light source sends to carry out imaging to the fringe region of described substrate, to obtain position and the area information of the unfavorable condition of described fringe region.
Wherein, the unfavorable condition of viewing area comprise be stained with foreign matter, photoresist uncoated evenly, there is ripple etc., the unfavorable condition of fringe region comprise be stained with foreign matter, exist damaged etc.
The first imageing sensor and the second imageing sensor by the image photographing separately send in this base board checking device for carrying out the Central Control Module of data processing, Central Control Module can be according to the position that sends the imageing sensor place of image, coordinate, each received image is combined, form one clear, the image of complete substrate, and image is analyzed, thereby be stained with foreign matter on judgement substrate, the photoresist of the viewing area of substrate is uncoated evenly, there is ripple in the viewing area of substrate, whether the fringe region of substrate has the unfavorable condition such as damaged and exists.If exist, substrate carried out to corresponding processing, to prevent from existing the follow-up exposure technology of substrate contribution of unfavorable condition.
For example, if the viewing area of substrate is stained with foreign matter, can adopt the processing modes such as grinding, ablation, laser, reduce or remove the foreign matter sticking on viewing area, thereby make this substrate can carry out next step exposure, processing, make the color membrane substrates that meets technological requirement.Meanwhile, material, the source of foreign matter are analyzed, found out to the foreign matter that also reply checks out, and device, the equipment that may cause foreign matter to stick on the production line on substrate are adjusted, improved, and reduces the possibility that foreign matter adheres to.
Again for example, damaged if the marginal portion of substrate exists, for what prevent substrate edges, damagedly again the nozzle of spraying photoresist to be caused scuffings, damaged, the while, in order to prevent the quality of the color membrane substrates that damaged impact is produced, can only be given up this substrate.But, need to be to damaged analysis theing exist, learn this damaged be to be caused by the miscellaneous part on stop pin or production line, to stop pin or other, cause damaged parts to adjust, to reduce the possibility of damaged appearance.
In the technical scheme of the present embodiment, this base board checking device has the second imageing sensor of the fringe region top that is positioned at described substrate, this second imageing sensor by the image transmitting photographing to the Central Control Module in base board checking device, the image that this Central Control Module can photograph according to the second imageing sensor, fringe region to substrate is analyzed, find in time the existing foreign matter of fringe region of substrate, the unfavorable condition such as damaged, thereby process timely there is the substrate of above-mentioned unfavorable condition, prevent the nozzle of this substrate damage spraying photoresist, the structures such as mask plate, increase exposure cost, simultaneously, also can guarantee the yields of color membrane substrates.
Embodiment bis-
On the basis of embodiment mono-, the utility model embodiment provides a kind of concrete structure of base board checking device, in the process checking, substrate 5 is entered from one end of base board checking device evenly, from the other end out, wherein, the arrow on substrate 5 has represented the direction of transfer of substrate 5.
Concrete, as shown in Figure 2, this base board checking device comprises:
The plummer 1 of bearing substrate 5, be positioned at the bracing frame 2 of described plummer 1 top, on this bracing frame 2, be provided with the first light source 3, in embodiments of the present invention, this first light source 3 is preferably strip-shaped light source, this strip-shaped light source is parallel to plummer 1 and arranges, and vertical with the working direction of substrate 5.Further, on bracing frame 2, be also provided with a plurality of the first imageing sensors 6 that are positioned at the first light source 3 opposites, as shown in Figure 2, regulate the angle of the first light source 3 and the first imageing sensor 6, light that the first light source 3 sends can, after the reflection of the viewing area of the substrate 5 of smooth, non-ripple, foreign, substantially all be entered in the first imageing sensor 6.
If certain region out-of-flatness in the viewing area of substrate 5, there is ripple or have foreign matter, the light that the first light source 3 sends is by part scattering, cannot enter the first imageing sensor 6, cause the light that the first imageing sensor 6 receives to reduce, just gloomy than other normal regions in the image that this region photographs at the first imageing sensor 6, image has brighter region and more gloomy region, thus, more gloomy range check in the picture that base board checking device can photograph according to the first imageing sensor 6 goes out the defect of the viewing area existence of substrate 5, thereby be further processed.
Accordingly, in order to make base board checking device check out the defect that the fringe region of substrate 5 exists, for example adhere to foreign matter or exist damaged, as shown in Figure 2, on support frame as described above 2, be also provided with the second imageing sensor 7, wherein, the shooting direction of the second imageing sensor 7 is perpendicular to described substrate 5, and in order to guarantee that the second imageing sensor 7 can accurately, clearly photograph the defect existing on the fringe region of substrate 5, preferably, the distance between this second imageing sensor 7 and described substrate 5 equals the focal length of described the second imageing sensor 7.
Said before, regulate the angle of the first light source 3 and the first imageing sensor 6, so that the light that the first light source 3 sends can both be entered the first imageing sensor 6 by substrate 5 reflections substantially, simultaneously because the shooting direction of the second imageing sensor 7 is perpendicular to substrate 5, the marginal portion of substrate 5 is in smooth situation, the light that the first light source 3 sends only has a seldom part maybe cannot enter in the second imageing sensor 7, as shown in Figure 3, the fringe region of smooth substrate 5 is expressed as comparatively gloomy region on image; And when the marginal portion of substrate 5 has foreign matter 8, the defect such as damaged, this foreign matter 8 or the defect such as damaged can be carried out the light from the first light source 3 scattering, cause part light to be reflected in the second imageing sensor 7, the fringe region with foreign matter 8, the defect such as damaged is expressed as comparatively bright region on image, therefore the light that, the second imageing sensor 7 can utilize the first light source 3 to send carries out imaging to the fringe region of described substrate.
Concrete, as shown in Figure 4, the foreign matter 8 of take describes as example, when the fringe region of substrate 5 has foreign matter, this foreign matter 8 can carry out scattering by the light from the first light source 3, causes part light to be reflected in the second imageing sensor 7, obviously, the fringe region with foreign matter 8 is expressed as comparatively bright region on image, and therefore, the light that the second imageing sensor 7 can utilize the first light source 3 to send carries out imaging to the fringe region of described substrate 5.
To sum up, base board checking device is after integrating each imageing sensor, splice for the image of same substrate imaging, whether what can check out substrate 5 according to the light and shade of image has foreign matter, the defect such as damaged everywhere, thereby staff can carry out suitable operation, the yields of the color membrane substrates that assurance is produced.
It should be noted that, in order to guarantee that each fringe region of substrate 5 can both obtain the inspection of base board checking device, conventionally, need to all be provided with the second imageing sensor 7 in position corresponding to four edges of plummer 1.But because the rear and front end of substrate 5 exists the possibility of foreign matter, the defect such as damaged lower, therefore for factors such as the installation cost of base board checking device, maintenance costs, consider, only in the position corresponding to two edges, left and right of plummer 1, be provided with the second imageing sensor 7.General, the edge correspondence of each plummer 1 arranges one to two the second imageing sensor 7 can meet user demand, and how many second imageing sensors 7 are specifically set also should be according to actual conditions setting.
Similarly, the embodiment of the present invention does not limit the number of the first imageing sensor 6 equally, as long as the first imageing sensor 6 can meet the use needs of base board checking device, for example, 3-5 the first imageing sensor 6 can be set.
Embodiment tri-
On the basis of embodiment mono-, in the process checking, substrate 5 is entered from one end of base board checking device evenly, and from the other end out, wherein, the arrow on substrate 5 has represented the direction of transfer of substrate 5.
For embodiment bis-, the utility model embodiment provides another kind of base board checking device, and as shown in Figure 5, this base board checking device comprises:
The plummer 1 of bearing substrate 5, be positioned at the bracing frame 2 of described plummer 1 top, on this bracing frame 2, be provided with the first light source 3, in embodiments of the present invention, this first light source 3 is preferably strip-shaped light source, this strip-shaped light source is parallel to plummer 1 and arranges, and vertical with the working direction of substrate 5.Further, on bracing frame 2, be also provided with a plurality of the first imageing sensors 6 that are positioned at the first light source 3 opposites, as shown in Figure 2, regulate the angle of the first light source 3 and the first imageing sensor 6, light that the first light source 3 sends can, after the reflection of the viewing area of the substrate 5 of smooth, non-ripple, foreign, substantially all be entered in the first imageing sensor 6.
Consistent with embodiment mono-of the mating reaction of the first light source 3 and the first imageing sensor 6, does not repeat them here.
In embodiments of the present invention, similar with embodiment mono-, on support frame as described above 2, be also provided with the second imageing sensor 7, wherein, the shooting direction of the second imageing sensor 7 is perpendicular to described substrate 5, and in order to guarantee that the second imageing sensor 7 can accurately, clearly photograph the defect existing on the fringe region of substrate 5, preferred, the distance between this second imageing sensor 7 and described substrate 5 equals the focal length of described the second imageing sensor 7.
In order to make the second imageing sensor 7 can there is sufficient light, take, this base board checking device is also included as the secondary light source 4 that the second imageing sensor 7 provides light, in embodiments of the present invention, as shown in Fig. 5, Fig. 6 or Fig. 7, described the second imageing sensor 7 and described secondary light source 4 lay respectively at the above and below of described plummer 1, and the light inlet region of corresponding described the second imageing sensor 7 in the bright dipping region of described secondary light source 4.
Relative position between the second imageing sensor 7 and secondary light source 4, when to make fringe region at substrate 5 be smooth, harmless situation, as shown in Figure 6, the light that secondary light source 4 sends can all enter in the second imageing sensor 7 substantially, now, the image that the second imageing sensor 7 photographs is comparatively bright; And when the fringe region of substrate 5 has foreign matter 8, the defect such as damaged, the light that secondary light source 4 sends may be by foreign matter, defect reflection or the scattering such as damaged, the light minimizing that makes it possible to enter the second imageing sensor 7, now, the image that the second imageing sensor 7 photographs is comparatively gloomy.
Concrete, as shown in Figure 7, the foreign matter 8 of take describes as example, when the fringe region of substrate 5 has foreign matter, be that while having foreign matter 8 between secondary light source 4 and the second imageing sensor 7, the light that secondary light source 4 sends cannot be completely or substantially all entered in the second imageing sensor 7, will be by the reflection of the contact portion of foreign matter 8 and substrate 5 or a scattering part, thereby, reduce and enter the light in the second imageing sensor 7.
To sum up, base board checking device is after integrating each imageing sensor, splice for the image of same substrate imaging, whether what can check out substrate 5 according to the light and shade of image has foreign matter, the defect such as damaged everywhere, thereby staff can carry out suitable operation, the yields of the color membrane substrates that assurance is produced.
It should be noted that, in order to guarantee that each fringe region of substrate 5 can both obtain the inspection of base board checking device, conventionally, need to all be provided with the second imageing sensor 7 in position corresponding to four edges of plummer 1.But because the rear and front end of substrate exists the possibility of foreign matter, the defect such as damaged lower, therefore for factors such as the installation cost of base board checking device, maintenance costs, consider, only in the position corresponding to two edges, left and right of plummer 1, be provided with the second imageing sensor 7.General, each edge correspondence arranges one to two the second imageing sensor 7 can meet user demand, and how many second imageing sensors 7 are specifically set also should be according to actual conditions setting.
Similarly, the embodiment of the present invention does not limit the number of the first imageing sensor 6 equally, as long as the first imageing sensor 6 can meet the use needs of base board checking device, for example, 3-5 the first imageing sensor 6 can be set.
The above; it is only embodiment of the present utility model; but protection domain of the present utility model is not limited to this; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; can expect easily changing or replacing, within all should being encompassed in protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of described claim.

Claims (6)

1. a base board checking device, is characterized in that, comprising:
The plummer of bearing substrate;
Be positioned at the light source above or below described plummer;
The first imageing sensor that is positioned at the top, viewing area of described substrate, described the first imageing sensor utilizes the light that described light source sends to carry out imaging to the viewing area of described substrate, to obtain position and the area information of the unfavorable condition of described viewing area;
The second imageing sensor that is positioned at the fringe region top of described substrate, described the second imageing sensor utilizes the light that described light source sends to carry out imaging to the fringe region of described substrate, to obtain position and the area information of the unfavorable condition of described fringe region.
2. base board checking device according to claim 1, is characterized in that, the shooting direction of described the second imageing sensor is perpendicular to described substrate.
3. base board checking device according to claim 2, is characterized in that, the distance between described the second imageing sensor and described substrate equals the focal length of described the second imageing sensor.
4. base board checking device according to claim 3, is characterized in that, described light source comprises the first light source;
The light that described the first imageing sensor utilizes described the first light source to send carries out imaging to the viewing area of described substrate;
The light that described the second imageing sensor utilizes described the first light source to send carries out imaging to the fringe region of described substrate.
5. base board checking device according to claim 3, is characterized in that, described light source comprises the first light source and secondary light source;
The light that described the first imageing sensor utilizes described the first light source to send carries out imaging to the viewing area of described substrate;
Described the second imageing sensor utilizes the light that described secondary light source sends to carry out imaging to the fringe region of described substrate.
6. base board checking device according to claim 5, is characterized in that,
Described the second imageing sensor and described secondary light source lay respectively at the above and below of described plummer, and the light inlet region of corresponding described the second imageing sensor in the bright dipping region of described secondary light source.
CN201320604894.6U 2013-09-27 2013-09-27 Substrate inspection device Active CN203502360U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104101614A (en) * 2014-05-26 2014-10-15 京东方科技集团股份有限公司 Detection method and device
CN104808213A (en) * 2015-05-11 2015-07-29 合肥京东方光电科技有限公司 Foreign matter detecting device and coating system
CN106842650A (en) * 2017-04-10 2017-06-13 京东方科技集团股份有限公司 The processing unit of display base plate foreign matter, the processing method of display base plate foreign matter
CN110006906A (en) * 2019-02-20 2019-07-12 上海鋆雪自动化有限公司 A kind of finer atomization spray head detection device and its control method
CN110006906B (en) * 2019-02-20 2021-12-17 上海鋆雪自动化有限公司 Fine atomization nozzle detection device and control method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104101614A (en) * 2014-05-26 2014-10-15 京东方科技集团股份有限公司 Detection method and device
CN104101614B (en) * 2014-05-26 2016-08-31 京东方科技集团股份有限公司 A kind of detection method and device
CN104808213A (en) * 2015-05-11 2015-07-29 合肥京东方光电科技有限公司 Foreign matter detecting device and coating system
US10005093B2 (en) 2015-05-11 2018-06-26 Boe Technology Group Co., Ltd. Foreign object detecting device and coating system
CN106842650A (en) * 2017-04-10 2017-06-13 京东方科技集团股份有限公司 The processing unit of display base plate foreign matter, the processing method of display base plate foreign matter
CN106842650B (en) * 2017-04-10 2019-06-07 京东方科技集团股份有限公司 Processing unit, the processing method of display base plate foreign matter of display base plate foreign matter
CN110006906A (en) * 2019-02-20 2019-07-12 上海鋆雪自动化有限公司 A kind of finer atomization spray head detection device and its control method
CN110006906B (en) * 2019-02-20 2021-12-17 上海鋆雪自动化有限公司 Fine atomization nozzle detection device and control method thereof

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