CN105204196B - Substrate inspects method by random samples - Google Patents

Substrate inspects method by random samples Download PDF

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Publication number
CN105204196B
CN105204196B CN201510659224.8A CN201510659224A CN105204196B CN 105204196 B CN105204196 B CN 105204196B CN 201510659224 A CN201510659224 A CN 201510659224A CN 105204196 B CN105204196 B CN 105204196B
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substrate
information
random samples
sampling observation
detection machine
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CN105204196A (en
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郭翥
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Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)

Abstract

The present invention provides a kind of substrates to inspect method by random samples, frequency and the other information in side to be inspected by random samples are inspected by random samples by setting, substrate counting is first passed through when substrate reaches to judge whether to reach sampling observation frequency, judge whether the other information in side and the other information in side to be inspected by random samples of substrate are consistent again, and whether the other information in side of substrate is identical with the other information in side of stored substrate, determine whether to inspect substrate by random samples, the product that the step of being judged by the other information of joining side comes from different processing procedure cabins and workbench can be arrived by sampling observation, it avoids because of changeless sampling observation frequency, the substrate inspected by random samples every time is caused to be all from same processing procedure cabin or the same side workbench and the problem of the processing procedure cabin of missing inspection existing defects or workbench, improve product yield.

Description

Substrate inspects method by random samples
Technical field
The present invention relates to display technology field more particularly to a kind of substrate sampling observation methods.
Background technology
Liquid crystal display device (LCD, Liquid Crystal Display) has that fuselage is thin, power saving, radiationless etc. numerous Advantage is widely used.Such as:LCD TV, mobile phone, personal digital assistant (PDA), digital camera, computer Screen or laptop screen etc..Usual liquid crystal display device includes housing, the liquid crystal display panel in housing and sets In the backlight module (Backlight module) in housing.Wherein, the structure of liquid crystal display panel is mainly by film crystalline substance Body pipe array substrate (Thin Film Transistor Array Substrate, TFT Array Substrate), a color film Substrate (Color Filter, CF) and the liquid crystal layer (Liquid Crystal Layer) being configured between two substrates are formed, Its operation principle is to control the rotation of the liquid crystal molecule of liquid crystal layer by applying driving voltage on two panels glass substrate, will be carried on the back The light of optical mode group reflects generation picture.
Usual liquid crystal display panel by color membrane substrates, array substrate, the liquid crystal being sandwiched between color membrane substrates and array substrate, And sealing glue frame composition.The production method of array substrate be first make tft layer, make again flatness layer and pixel electricity Pole.After the production method of color membrane substrates has first made black matrix", then color light resistance layer (red green blue photoresist layer) is made, finally Photoresist spacer is made, completes the making of color membrane substrates.
In the manufacturing process of substrate, in order to ensure the quality of substrate, need to inspect the processing procedure quality of substrate by random samples, it is existing Technology is to provide a detection device first to the sampling observation method of substrate, and a sampling observation frequency is preset on the detection device, when After the quantity of color membrane substrates by detection machine reaches preset sampling observation frequency, by detection machine, substrate is detected.However, In the large-scale production process of substrate, in order to promote prouctiveness, the equipment of processing procedure would generally set multiple processing procedure cabins (chamber) or the other workbench in multiple sides (stage), multiple processing procedure cabins or workbench are carried out at the same time processing procedure, so for dividing Not by for multiple substrates of different processing procedure cabins or workbench making, coordinating changeless sampling observation frequency, may be such that every The substrate of secondary sampling observation is all from same processing procedure cabin or the same side workbench, and can not inspect other processing procedure cabins or work by random samples Platform leads to the processing procedure cabin of missing inspection existing defects or the substrate of workbench making, leads to not find product exception in time, reduce production Product yield.
Invention content
The purpose of the present invention is to provide a kind of substrates to inspect method by random samples, using sampling observation frequency and the other information in side to be inspected by random samples, phase With reference to method inspected by random samples, make to come from different processing procedure cabins and the product of workbench be all detected, avoid missing inspection problem.
To achieve the above object, the present invention provides a kind of substrates to inspect method by random samples, includes the following steps:
Step 1 provides a detection machine, if n is positive integer, the sampling observation frequency of default detection machine is that n and one or more are treated Inspect the other information in side by random samples, substrate counts zero;Several substrates are provided, substrate enters detection machine one by one;
Step 2, a substrate reach detection machine, and substrate is counted to be iterated cumulative with 1 for increment, and calculation formula is:count =count+1, wherein count represent substrate counting;
Step 3, detection machine according to substrate counting determines whether to reach sampling observation frequency, if reach sampling observation frequency if continue into Row step 4 continues to judge whether substrate is counted equal with n if not up to sampling observation frequency, returns substrate counting if equal Return to step 2 after zero, the direct return to step 2 if unequal;
The other information in side of step 4, detection machine identification substrate, and judge that the other information in side of substrate and the other information in side to be inspected by random samples are Whether the no other information in identical, substrate side is identical with the other information in side of stored substrate, if the other information in the side of substrate is taken out with waiting The side level signal of inspection is identical and the other information difference in side with stored substrate then continues step 5, otherwise counts substrate Be zeroed simultaneously return to step 2;
Substrate is detected and stores the other information in side of the substrate for step 5, detection machine;
Step 6, detection machine compare the other information in side of the substrate of storage and the whether complete phase of the other information in preset side to be inspected by random samples Together, the other information in side that the substrate of storage is emptied if identical returns again to step 2, otherwise direct return to step 2.
In the step 3, if the value that substrate counts is 1, judgement reaches sampling observation frequency, otherwise judgement not up to sampling observation frequency Rate.
The substrate is the color membrane substrates of liquid crystal display panel.
The quality of the black matrix" of detection color membrane substrates, color light resistance layer and photoresist spacer in the step 5.
The sampling observation frequency that detection machine is preset in the step 1 is 10.
The other information in the side is to make the processing procedure cabin of the substrate and the information of workbench.
The other information in side to be inspected by random samples is:The first vacuum drying cabin, the second vacuum drying cabin and the color film of color film glue spreader First baking table of exposure machine.
Beneficial effects of the present invention:The present invention provides a kind of sampling observation methods for substrate detection, are inspected by random samples by setting Frequency and the other information in side to be inspected by random samples first pass through substrate counting when substrate reaches and judge whether to reach sampling observation frequency, then judge base The other information in the side of the plate other information in side whether consistent and substrate with the other information in side to be inspected by random samples and the other information in side of stored substrate Whether identical, the step of determining whether to inspect substrate by random samples, being judged by the other information of joining side, comes from different processing procedures The product of cabin and workbench can be arrived by sampling observation, avoid, because of changeless sampling observation frequency, causing the substrate inspected by random samples every time equal From same processing procedure cabin or the same side workbench the problem of the processing procedure cabin of missing inspection existing defects or workbench, it is good to improve product Rate.
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with the detailed of the present invention Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
Description of the drawings
Below in conjunction with the accompanying drawings, it is described in detail by the specific embodiment to the present invention, technical scheme of the present invention will be made And other beneficial effects are apparent.
In attached drawing,
Fig. 1 is that the substrate of the present invention inspects the flow chart of method by random samples.
Specific embodiment
The technological means and its effect taken further to illustrate the present invention, below in conjunction with the preferred implementation of the present invention Example and its attached drawing are described in detail.
Referring to Fig. 1, the present invention provides a kind of substrates to inspect method by random samples, include the following steps:
Step 1 provides a detection machine, if n is positive integer, the sampling observation frequency of default detection machine is that n and one or more are treated Inspect the other information in side by random samples, substrate counts zero;Several substrates are provided, substrate enters detection machine one by one;
Specifically, the other information in the side is to make the processing procedure cabin of the substrate and the information of workbench, the substrate is liquid The color membrane substrates of LCD panel, the sampling observation frequency n=10, the preset other information in side to be inspected by random samples are:Aligner CP#1、 Coater VCD#1 and Coater VCD#2, represent respectively color film exposure machine the first baking table and color film glue spreader first It is dried in vacuo cabin and the second vacuum drying cabin.
Step 2, a substrate reach detection machine, and substrate is counted to be iterated cumulative with 1 for increment, and calculation formula is:count =count+1, wherein count represent substrate counting;
Step 3, detection machine according to substrate counting determines whether to reach sampling observation frequency, if reach sampling observation frequency if continue into Row step 4 continues to judge whether substrate is counted equal with n if not up to sampling observation frequency, returns substrate counting if equal Return to step 2 after zero, the direct return to step 2 if unequal;
Specifically, if the value that substrate counts is 1, i.e. during count=1, then judgement reaches sampling observation frequency, otherwise judges not reach To sampling observation frequency, each substrate counts count and is added to 10, i.e. during count=n, count is reset.
The other information in side of step 4, detection machine identification substrate, and judge that the other information in side of substrate and the other information in side to be inspected by random samples are Whether the no other information in identical, substrate side is identical with the other information in side of stored substrate, if the other information in the side of substrate is taken out with waiting The side level signal of inspection is identical and the other information difference in side with stored substrate then continues step 5, otherwise counts substrate Be zeroed simultaneously return to step 2;
Substrate is detected and stores the other information in side of the substrate for step 5, detection machine;
Specifically, the matter of the black matrix" of the detection machine testing color membrane substrates, color light resistance layer and photoresist spacer Amount.
Step 6, detection machine compare the other information in side of the substrate of storage and the whether complete phase of the other information in preset side to be inspected by random samples Together, the other information in side that the substrate of storage is emptied if identical returns again to step 2, otherwise direct return to step 2.
In conclusion the present invention provides a kind of sampling observation method for substrate detection, frequency is inspected by random samples by setting and is treated It inspects the other information in side by random samples, substrate counting is first passed through when substrate reaches and judges whether to reach sampling observation frequency, then judge that the side of substrate is other The other information in side of whether consistent and substrate the other information in side of information and the other information in side to be inspected by random samples and stored substrate whether phase Together, the step of determining whether to inspect substrate by random samples, being judged by the other information of joining side comes from different processing procedure cabins and work Making the product of platform can be arrived by sampling observation, avoid, because of changeless sampling observation frequency, the substrate inspected by random samples every time being caused to be all from together One processing procedure cabin or the same side workbench and the problem of the processing procedure cabin of missing inspection existing defects or workbench, improve product yield.
The above, for those of ordinary skill in the art, can according to the technique and scheme of the present invention and technology Other various corresponding changes and deformation are made in design, and all these changes and deformation should all belong to the claims in the present invention Protection domain.

Claims (7)

1. a kind of substrate inspects method by random samples, which is characterized in that includes the following steps:
Step 1 provides a detection machine, if n is positive integer, the sampling observation frequency of default detection machine is that n and one or more are waited to inspect by random samples The other information in side, substrate count zero;Several substrates are provided, substrate enters detection machine one by one;
Step 2, a substrate reach detection machine, and substrate is counted to be iterated cumulative with 1 for increment, and calculation formula is:Count= Count+1, wherein count represent substrate counting;
Step 3, detection machine determine whether to reach sampling observation frequency, continue to walk if sampling observation frequency is reached according to substrate counting Rapid 4, continue to judge whether substrate is counted equal with n if not up to sampling observation frequency, after substrate is counted zero if equal Return to step 2, the direct return to step 2 if unequal;
The other information in side of step 4, detection machine identification substrate, and judge the other information in side of substrate and the other information in side to be inspected by random samples whether phase With and the other information in side of substrate and the other information in side of stored substrate it is whether identical, if the other information in the side of substrate is inspected by random samples with waiting Side level signal it is identical and the other information difference in side with stored substrate then continues step 5, otherwise substrate counting is returned Zero and return to step 2;
Substrate is detected and stores the other information in side of the substrate for step 5, detection machine;
Step 6, detection machine compare the substrate of storage the other information in side and the other information in preset side to be inspected by random samples it is whether identical, if Identical, the other information in side for emptying the substrate of storage returns again to step 2, otherwise direct return to step 2.
2. substrate as described in claim 1 inspects method by random samples, which is characterized in that in the step 3, if the value that substrate counts is 1, Then judgement reaches sampling observation frequency, otherwise judgement not up to sampling observation frequency.
3. substrate as described in claim 1 inspects method by random samples, which is characterized in that the substrate is the color film base of liquid crystal display panel Plate.
4. substrate as claimed in claim 3 inspects method by random samples, which is characterized in that the black of color membrane substrates is detected in the step 5 The quality of matrix, color light resistance layer and photoresist spacer.
5. substrate as claimed in claim 3 inspects method by random samples, which is characterized in that the sampling observation frequency of detection machine is preset in the step 1 Rate is 10.
6. substrate as described in claim 1 inspects method by random samples, which is characterized in that the other information in the side is to make the system of the substrate Journey cabin and the information of workbench.
7. substrate as claimed in claim 6 inspects method by random samples, which is characterized in that the other information in side to be inspected by random samples is:Color film gluing The first of machine is dried in vacuo first baking table in cabin, the second vacuum drying cabin and color film exposure machine.
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CN110097260B (en) * 2019-04-12 2023-12-19 格力电器(芜湖)有限公司 Product inspection method, apparatus, device, and storage medium

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009175488A (en) * 2008-01-25 2009-08-06 Seiko Epson Corp Inspection method for electro-optical device
KR20110130572A (en) * 2010-05-28 2011-12-06 조영창 Block base inspecting method using the same
CN102642716A (en) * 2012-04-11 2012-08-22 深圳市华星光电技术有限公司 Picking and placing device of glass substrate
CN103217816A (en) * 2013-04-01 2013-07-24 深圳市华星光电技术有限公司 Detecting method of array base plate and detecting table and detecting device thereof
CN103235430A (en) * 2013-05-08 2013-08-07 深圳市华星光电技术有限公司 Detection method of panel bonding semi-finished product

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009175488A (en) * 2008-01-25 2009-08-06 Seiko Epson Corp Inspection method for electro-optical device
KR20110130572A (en) * 2010-05-28 2011-12-06 조영창 Block base inspecting method using the same
CN102642716A (en) * 2012-04-11 2012-08-22 深圳市华星光电技术有限公司 Picking and placing device of glass substrate
CN103217816A (en) * 2013-04-01 2013-07-24 深圳市华星光电技术有限公司 Detecting method of array base plate and detecting table and detecting device thereof
CN103235430A (en) * 2013-05-08 2013-08-07 深圳市华星光电技术有限公司 Detection method of panel bonding semi-finished product

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