JP2009014617A5 - - Google Patents

Claims (15)

An illumination unit that irradiates illumination light onto the surface of the substrate conveyed by the substrate conveyance path of the substrate production line;
A photographing unit for photographing the surface of the substrate illuminated by the illumination unit,
A first moving mechanism for integrally reciprocating the illumination unit and the imaging unit in a direction intersecting the substrate transport direction of the substrate transport path ;
A second moving mechanism for moving the first moving mechanism or the substrate in the transport direction of the substrate;
The board | substrate external appearance inspection apparatus characterized by moving the said illumination part and imaging | photography part, and the said board | substrate relatively, and image | photographing the said whole board | substrate by the said imaging part . The illumination unit is arranged so that an illumination optical axis is inclined with respect to the substrate surface, and the imaging unit is arranged with an optical axis inclined with respect to an irradiation range of the substrate irradiated by the illumination unit. The board | substrate visual inspection apparatus of Claim 1 characterized by these. 3. The substrate appearance inspection apparatus according to claim 1, wherein the imaging unit includes a rotation mechanism that rotates about a center of an irradiation range of the substrate irradiated by the illumination unit as a rotation fulcrum. 3. The substrate appearance inspection apparatus according to claim 1, wherein the imaging unit rotates so as to face the center of an irradiation range of the substrate irradiated by the illumination unit. The board appearance inspection apparatus according to claim 1, wherein the imaging unit rotates about an imaging position as a rotation fulcrum. The imaging unit includes a rotation mechanism that rotates around a photographing position as a rotation fulcrum, and a zoom mechanism that expands the surface of the substrate, so that defects on the substrate enter the field of view by the rotation mechanism. The board appearance inspection apparatus according to claim 1, wherein the photographing unit is rotated. The substrate appearance inspection according to claim 1, wherein the imaging unit includes a zoom mechanism that enlarges a surface of the substrate, and stores an image that is enlarged and photographed by the zoom mechanism in a storage unit. apparatus. A coordinate position of an image obtained by photographing the irradiation range of the substrate by the imaging unit and a coordinate position of an image photographed by the zoom mechanism are stored in the storage unit in association with the coordinate position of the substrate. A substrate visual inspection apparatus according to claim 7. 2. An image obtained by photographing the irradiation range of the substrate by the imaging unit and a coordinate position of an image obtained by photographing the irradiation range of the substrate are stored in the storage unit in association with the coordinate position of the substrate. Or the board | substrate external appearance inspection apparatus of 2. A monitor for displaying an image photographed by the imaging unit; and a pointer for designating a defect position in the image displayed on the monitor, wherein the coordinates of the defect designated by the pointer correspond to the coordinates of the substrate The board appearance inspection apparatus according to claim 1, wherein the board appearance inspection apparatus is stored in a storage unit. A monitor that displays an image captured by the imaging unit is provided, and the first moving mechanism moves the imaging unit at a constant speed so that an image displayed on the monitor can be confirmed by an observer. The board appearance inspection apparatus according to claim 1, wherein the imaging unit is stopped at a position where the observer has found a defect. The first moving mechanism and the second moving mechanism are configured by XY stages combined so as to be orthogonal to each other, and the second moving mechanism is disposed along both sides of the substrate conveyance path of the production line. The board visual inspection apparatus according to claim 1, wherein the board visual inspection apparatus is mounted on a base whose height is adjustable.   The first moving mechanism is provided movably on the first rail and a pair of first rails spanned across the substrate transport path in a direction intersecting the transport direction of the production line. A first slider on which the illumination unit and the photographing unit are mounted; and a first driving device that moves the first slider along the first rail;
The substrate visual inspection apparatus according to claim 1, wherein the second moving mechanism also serves as a substrate conveyance path for conveying the substrate in a conveyance direction. The first moving mechanism is provided movably on the first rail and a pair of first rails spanned across the substrate transport path in a direction intersecting the transport direction of the production line. A first slider on which the illumination unit and the photographing unit are mounted; and a first driving device that moves the first slider along the first rail;
The second moving mechanism is provided with a pair of second rails arranged along both sides of the substrate conveyance path of the manufacturing line, and the first moving mechanism mounted on the second rail so as to be movable. A second slider for moving the first slider along the second rail, and a second driving device for moving the first slider along the second rail,
The board appearance inspection apparatus according to claim 1, wherein the second rail is mounted on a base that is arranged along both sides of the board conveyance path of the manufacturing line and capable of height adjustment. The substrate transport path of the substrate production line has a corner portion that transports the substrate by changing the transport direction by 90 ° without rotating the substrate, and the substrate transport path and the unload side on the carry-in side of the corner portion bent at 90 ° The first moving mechanism is installed in each of the substrate transfer paths, the imaging unit mounted on the first moving mechanism installed in one of the substrate transfer paths, and the first installed in the other substrate transfer path The board appearance inspection apparatus according to claim 1, wherein the imaging unit mounted on the moving mechanism performs imaging from a direction different from 90 ° with respect to an arrangement direction of the rectangular patterns formed on the substrate. .