JP4744665B2 - Substrate inspection apparatus and substrate inspection system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
In the present invention, for example, an object to be inspected such as a glass substrate or a semiconductor wafer used in a liquid crystal display is imaged and the image is displayed on a display screen. Substrate inspection device for determining the inspection object And board inspection system About.
[0002]
[Prior art]
In a liquid crystal display production line, a macro inspection or a micro inspection of a glass substrate used in the liquid crystal display is performed. In the macro inspection, scratches, foreign matter, unevenness, dirt, etc. are observed macroscopically as defective portions on the glass substrate. For example, the illumination light is irradiated obliquely on the glass substrate, and the operator visually observes the glass substrate. These defects are observed, or the entire glass substrate is imaged and the image is displayed on a display, and this display image is visually observed.
[0003]
Then, information on defective portions such as scratches, foreign matter, unevenness, and dirt is collected from the result of observation of defects on the glass substrate by the operator's visual observation, and finally the quality of the glass substrate is determined.
[0004]
[Problems to be solved by the invention]
However, the defect information on the glass substrate is gathered from the observation results to determine whether the glass substrate is good or bad, but there are many types of defective portions such as scratches, foreign objects, unevenness, dirt, etc. Since the macro inspection of the glass substrate is performed, the amount of information on the defective portion becomes enormous.
[0005]
For this reason, it is difficult to manage the information on the defective portion of each glass substrate, and there is a demand for automatically determining the quality of the glass substrate by collecting the information on the defective portions.
[0006]
In view of this, the present invention automatically collects information on defective portions to determine whether the glass substrate is good or not, and facilitates management of information on defective portions. And board inspection system The purpose is to provide.
[0007]
[Means for Solving the Problems]
According to the present invention, an image capturing unit that captures an image of an object to be inspected and acquires a plurality of types of image data, and each of the types of image data acquired by the image capturing unit is subjected to image processing and displayed on a display screen. An image display unit, a defect registration unit for registering defect information of a defect portion of the inspection object for each type of image data displayed on the display screen, and each of the types registered by the defect registration unit A determination unit configured to determine pass / fail of the object to be inspected based on the defect information corresponding to the image data; and each type of image data Among the defect information registered by the defect registration unit for any of the image data By the determination unit As the defective part Judged Corresponds to the image data other than the arbitrary image data The defect information Overlay On the display screen Composition A substrate inspection apparatus comprising a composite display unit for displaying.
[0009]
According to the present invention, an image capturing unit that captures an image of an object to be inspected and acquires a plurality of types of image data, and each of the types of image data acquired by the image capturing unit is subjected to image processing and displayed on a display screen. An image display unit; and a defect registration unit that registers defect information of a defect portion of the inspection object for each type of image data displayed on the display screen; in front The defect information corresponding to each type of image data registered by the defect registration unit In the news A determination unit for determining pass / fail of the inspected object based on the image data of each type Among the defect information registered by the defect registration unit for any of the image data By the determination unit As the defective part Judged Corresponds to the image data other than the arbitrary image data The defect information Overlay On the display screen Composition And a composite display unit for displaying. PCB inspection system It is.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[0012]
FIG. 1 is a configuration diagram of a substrate inspection apparatus. The image capturing unit 1 captures an object to be inspected such as a glass substrate or a semiconductor wafer used for a liquid crystal display and acquires the image data. On the substrate stage 2, a glass substrate 3 as an object to be inspected is placed. The substrate stage 2 is moved at a predetermined speed in a direction perpendicular to the line direction of the line-shaped illumination light described later by the drive control of the apparatus control unit 4.
[0013]
The glass substrate 3 has a size obtained by chamfering six or eight liquid crystal displays used in a personal computer, for example.
[0014]
A line illumination device 5 is disposed above the substrate stage 2. This line illuminating device 5 irradiates the moving glass substrate 3 with line-shaped illumination light 6 from an oblique direction. A line sensor / camera 8 is arranged on the optical path of the reflected light 7 from the glass substrate 3. The line sensor / camera 8 has a function of sequentially receiving the reflected light 7 from the moving glass substrate 3 and outputting the image signal.
[0015]
The image processing board 9 has a function of sequentially inputting image signals output from the line sensor / camera 8 and creating image data for the entire surface of the glass substrate 3 when the image capture to the single glass substrate 3 is completed. is doing.
[0016]
Here, the image capturing unit 1 has a function of acquiring a plurality of image data as image data, for example, diffraction image data and interference image data. Of these, diffraction image data is obtained by irradiating the glass substrate 3 with illumination light 6 from an oblique direction, and capturing the scattered light caused by scratches and dust on the surface of the glass substrate 3 at this time by the line sensor camera 8. It is what is done. The interference image data is obtained by irradiating the illumination light 6 with respect to the glass substrate 3 coated with the resist from an oblique direction, and the interference light between the reflected light from the resist surface and the reflected light from the surface of the glass substrate 3 at this time. It is a bright and dark image captured by the line sensor / camera 8.
[0017]
The arithmetic / control device 10 receives the image data (diffraction image data, interference image data) of the glass substrate 3 from the image capturing unit 1, processes the image and displays it on the image display 14. A series of calculation and control for registering defect information of the designated defect portion, displaying the registered defect information superimposed on the image data, and further determining whether the glass substrate 3 is good or bad based on the defect information. A keyboard 11 and a mouse 12, an image server 13, and an image display 14 are connected as user interfaces.
[0018]
FIG. 2 is a specific functional block diagram of the arithmetic / control device 10. Image capture unit 1 Line sensor camera 8 The image data fetched from the image data is stored (developed) in the image memory 15 of the arithmetic / control device 10 via the image processing board 9.
[0019]
The image processing unit 16 has a function of reading the image data stored in the image memory 15, converting the image data into a video signal for image display, and displaying the image data on the image display 14.
[0020]
The image processing unit 16 has a function of receiving an operation signal from the keyboard 11 or the mouse 12 and moving and displaying the pointer 14a on the screen of the image display 14 as shown in FIG. 3, for example. .
[0021]
The image storage / retrieval unit 17 has a function of reading image data stored in the image memory 15, creating an image file 18 from the image data, and storing the image file 18 in the image server 13.
[0022]
The image storage / retrieval unit 17 receives a search instruction from the keyboard 11 or the mouse 12, searches for and reads out the designated image file 18 among a plurality of stored image files 18, and stores the image data in the image memory. 15 has a function of storing.
[0023]
On the other hand, the defect registration unit 19 receives an operation signal from the keyboard 11 or the mouse 12, moves the pointer 14a on the screen of the image display 14 as shown in FIG. 3, and displays the pointer 14a on the display image. When a defect portion, for example, a defect portion of defect label “1”, “2” or “3” attached for convenience is designated, defect information of the designated defect portion, for example, defect type (scratch, foreign matter, unevenness, dirt), It has a function of registering the defect shape and the defect position (coordinates) in the defect information memory 20.
[0024]
In this defect information registration method, for example, the defect registration dialog window information stored in the defect information memory 20 is read out by the image processing unit 16 in response to an instruction from the keyboard 11 or the mouse 12, and an image is displayed as shown in FIG. Displayed on the display 14. In the defect name list box 21 a of the registration dialog window 21, scratches, foreign objects, unevenness, dirt, and the like that are known in advance are registered, and the defect name list box 21 a is selected and determined by operating the keyboard 11 or the mouse 12. Yes.
[0025]
Further, by moving and displaying the pointer 14a on the screen of the image display 14 by the operation signal of the keyboard 11 or the mouse 12, the shape and the defect position of each defect portion of the defect label “1” “2” or “3” are displayed. (Coordinates) can be specified.
[0026]
Accordingly, when the registration button 21b on the registration dialog window 21 is operated after the defect type (defect name), the shape of the defect portion, and the defect position (coordinates) are instructed, selection of these defect types (defect names) is determined. The shape of the defect portion and the defect position (coordinates) are registered in the defect information memory 20.
[0027]
The substrate determination unit 22 reads the defect information registered in the defect information memory 20, sums up the size and number of each defect type (defect name) from the defect information, and based on the summation result, the glass substrate 3. For example, non-defective product, disposal, rework (removing the surface of the glass substrate 3 and redoing the resist).
[0028]
The defect information storage / retrieval unit 23, together with the defect type (for example, scratches, foreign matter, unevenness, dirt) registered in the defect information memory 20, the determination result of the glass substrate 3 in the substrate determination unit 22 (for example, non-defective product, disposal, rework) ) As a defect information file 24 in the image server 13.
[0029]
The defect information storage / retrieval unit 23 receives a search instruction from the keyboard 11 or the mouse 12, searches for and reads the specified defect information file 24 among the plurality of stored defect information files 24, and reads the defect information. Is stored in the defect information memory 20.
[0030]
The image processing unit 16 uses the defect information stored in the defect information memory 20 from the defect registration unit 19 or the defect information read from the defect information storage / retrieval unit 23 as arbitrary image data, such as diffraction image data, It has a function as a composite display means for displaying on the screen of the image display 14 so as to be superimposed on the interference image data or other image data.
[0031]
Next, the operation of the apparatus configured as described above will be described with reference to the defect management flowchart shown in FIGS.
[0032]
A glass substrate 3 is placed on the substrate stage 2 in the image capturing unit 1. The glass substrate 3 is irradiated with the line-shaped illumination light 6 from the line illumination device 5 from an oblique direction, and the substrate stage 2 is driven in the line direction of the line-shaped illumination light 6 by the drive control of the device control unit 4. On the other hand, it moves at a predetermined speed in the vertical direction. In this state, the line sensor camera 8 sequentially receives the reflected light 7 from the moving glass substrate 3 and outputs the image signal.
[0033]
The image processing board 9 sequentially receives the image signals output from the line sensor / camera 8 and creates image data for the entire surface of the glass substrate 3 when the image capturing for one glass substrate 3 is completed.
[0034]
Here, in order to acquire two image data of diffraction image data and interference image data, the image capturing unit 1 irradiates the glass substrate 3 with illumination light 6 from an oblique direction, and the glass substrate at this time The scattered light generated by scratches and dust on the surface of 3 is captured by the line sensor / camera 8 to obtain diffraction image data, and the illumination light 6 is applied to the glass substrate 3 coated with the resist from an oblique direction, Interference light between the reflected light from the resist surface and the reflected light from the surface of the glass substrate 3 at this time is captured by the line sensor / camera 8 to acquire bright and dark interference image data. Hereinafter, description will be given as diffraction image data and interference image data.
[0035]
When diffraction image data and subsequently interference image data are sent from the image capturing unit 1 to the calculation / control apparatus 10, the calculation / control apparatus 10 newly adds diffraction image data and subsequently interference image data in step # 1. The image data is taken in, and the diffraction image data and subsequently the interference image data are stored (developed) in the image memory 15.
[0036]
Next, in step # 2, the image storage / retrieval unit 17 reads the diffraction image data and the interference image data stored in the image memory 15, creates an image file 18 from each of the diffraction image data and the interference image data, and creates an image. Save to the server 13.
[0037]
Next, in step # 3, the image processing unit 16 reads the diffraction image data and the interference image data stored in the image memory 15, and converts the diffraction image data and the interference image data into a video signal for image display. The image is displayed on the display 14 for image display. Note that either one or both of the diffraction image data and the interference image data may be displayed on the screen of the image display 14.
[0038]
Next, in step # 4, the calculation / control apparatus 10 determines that one or both of the defect information of the diffraction image data and the interference image data currently displayed on the screen of the image display 14 is a defect information file. It is determined whether or not it is stored in 24.
[0039]
Here, since the diffraction image data or the interference image data currently displayed on the display screen for image display are both new images, the calculation / control apparatus 10 moves to step # 6, and the defect information It is determined whether or not input is performed. Since these diffraction image data and interference image data are both new images, an instruction to input defect information is input from the keyboard 11 or the mouse 12.
[0040]
Next, the calculation / control apparatus 10 stores defect information in step # 7. At this time, the image processing unit 16 displays either one or both of the diffraction image data and the interference image data on the screen of the image display 14 and also operates the keyboard 11 or the mouse 12 as shown in FIG. A pointer 14a is displayed so as to be movable. FIG. 3 is a display of either diffraction image data or interference image data.
[0041]
Further, the image processing unit 16 that has received the defect registration instruction from the keyboard 11 or the mouse 12 reads out the defect registration dialog window information stored in the defect information memory 20, and as shown in FIG. A defect registration dialog window 21 is displayed on the screen.
[0042]
In this display state, the pointer 14a is moved and displayed on the screen of the image display 14 by operating the keyboard 11 or the mouse 12, and for example, the shape of each defect portion of each defect label “1”, “2” or “3”, The defect position (coordinates) is indicated. As described above, when the pointer 14a is moved on the screen of the image display 14 to indicate the shape and position of the defect portion, the defect registration unit 19 has the coordinates on the diffraction image data and the interference image data. Yes.
[0043]
For defect label “1”, unevenness is selected and determined as the defect type in the defect name list box 21 a of the defect registration dialog window 21 on the screen of the image display 14. For label “3”, garbage is selected and determined.
[0044]
After this, after the defect type (defect name) selection decision, the shape of the defect portion and the defect position (coordinates) are instructed, when the registration button 21b on the registration dialog window 21 is operated, the defect registration unit 19 The defect type (defect name), the shape of the defect portion, and the defect position (coordinates) are registered in the defect information memory 20. The defect information is registered for each of the diffraction image data and the interference image data.
[0045]
When the input of the defect information is completed in this way, the substrate determination unit 22 reads the defect information registered in the defect information memory 20 in step # 8, and for example, at least for each defect type (defect name) from the defect information. The number of pieces is counted, and the quality of the glass substrate 3, for example, non-defective product, disposal, rework (scraping the surface of the glass substrate 3 and redoing the resist) is determined based on the counted result.
[0046]
Here, the determination of the glass substrate 3 will be specifically described with reference to a quality determination flowchart shown in FIG.
[0047]
First, as a preparation before determination, a substrate determination file is created in advance. This substrate determination file sets data that is a determination reference for each defect type (defect name) when registering defect information.
[0048]
In the board determination file, the determination result uses a determination code.
[0049]
The determination code for the non-defective glass substrate 3 is non-defective.
[0050]
In the total defect count determination, the determination codes are “discard” and “rework”, and the respective determination counts are registered in “1” and “10”, for example.
[0051]
In the determination for each defect type (defect name), for example, “1”, “5”, “5”, and “3” are determined for the scratches, foreign matter, unevenness, and dirt, and the determination codes are “discard” and “rework”, respectively. ”,“ Rework ”, and“ Rework ”. The number of determinations for each defect type (defect name) may be reduced as the number of important determination items decreases, and the determination is weighted. In the above example of the number of determinations, the determination items are important in the order of scratches, dirt, foreign matter, and unevenness.
[0052]
The substrate determination unit 22 in which such a substrate determination file is registered includes the defect type (defect name), the shape of the defect portion, and the defect position (coordinates) registered in the defect information memory 20 in step # 20. Defect information is read, and these defect types (defect names) are tabulated for each determination code. As a result of this tabulation, there were n discarded items and m reworked items.
[0053]
Next, in step # 21, the substrate determination unit 22 determines that the total number of defects of the glass substrate 3, that is, the total number of defects registered from both the diffraction image data and the interference image data is the determination code “discarded” registered in the substrate determination file. ”And“ rework ”, it is determined whether or not the respective determination numbers“ 1 ”and“ 10 ”have been reached.
[0054]
As a result of the determination, if the determination numbers “1 (discard)” and “10 (rework)” have not been reached for the determination codes “discard” and “rework”, the substrate determination unit 22 proceeds to step # 22, and the defect information memory The number of defects is counted for each defect type (defect name) from the defect information registered in 20. As a result of the aggregation, k scratches, p foreign matters, q unevenness, and r stains were obtained.
[0055]
Next, in step # 23, the board determination unit 22 counts the number of each type of defect (defect name) registered in the board determination file (defect “1 (discard)”, foreign object “5 (rework). ) ”, Unevenness“ 5 (rework) ”, dirt“ 3 (rework) ”).
[0056]
As a result of the determination, if any defect type (defect name) has not reached the determination number, the substrate determination unit 22 sets a non-defective product as the determination code in step # 24, and sets the determination code in the next step # 25. The board determination result.
[0057]
If any one defect type (defect name) has reached the number of determinations, the board determination unit 22 sets “discard” or “rework” as the determination code in step # 25, and the next step # In 25, the determination code is used as a substrate determination result.
[0058]
As a specific determination example, when the number of foreign matters is three and the number of stains is three, since the number of stains reaches the number of determinations for each defect type (defect name), the determination result is “rework”.
[0059]
When there are four foreign objects, four irregularities, and two stains, the defect of the determination code “rework” has reached the determination number “10” for determining the total number of defects, and the determination result is “rework”.
[0060]
When there are two foreign matters, two unevennesses, and one stain, the determination number “10” in either the defect type (defect name) or the total defect number determination has not been reached, so the determination result is “non-defective”.
[0061]
When the quality determination of the glass substrate 3 is completed in this way, the defect information storage / retrieval unit 23 determines the substrate together with the defect type (for example, scratch, foreign object, unevenness, dirt) registered in the defect information memory 20 in step # 9. The determination result (for example, non-defective product, disposal, rework) of the glass substrate 3 in the determination unit 22 is stored in the image server 13 as a defect information file 24.
[0062]
If the image capturing / retrieval is not repeated, the calculation / control apparatus 10 determines the end of the system in step # 11.
[0063]
On the other hand, when a search instruction for an arbitrary image file 18 is input from the keyboard 11 or the mouse 12, the image storage search unit 17 receives the search instruction and designates the specified image among the plurality of stored image files 18. The file 18 is searched and read, and the image data, for example, diffraction image data, interference image data, or other image data is stored in the image memory 15.
[0064]
When a search instruction for an arbitrary defect information file 24 is input from the keyboard 11 or the mouse 12, the specified defect information file 24 is searched from a plurality of stored defect information files 24 in response to the search instruction. Then, the defect information is read and stored in the defect information memory 20.
[0065]
When arbitrary image data and arbitrary defect information are read in this way, the image processing unit 16 reads diffraction image data, interference image data, or other image data stored in the image memory 15 in step # 1. The diffraction image data and the interference image data are read, converted into image display video signals, and displayed on the image display 14.
[0066]
Next, in step # 4, the arithmetic / control device 10 determines that the defect information of the diffraction image data, interference image data, or other image data currently displayed on the screen of the image display 14 is a defect information file. It is determined whether or not it is stored in 24.
[0067]
Here, since the defect information of the image data currently displayed on the screen of the image display 14 is already stored in the defect information file 24, the arithmetic / control device 10 proceeds to step # 5 and proceeds to step # 5. Perform synthesis.
[0068]
That is, the image processing unit 16 superimposes defect information stored in the defect information memory 20 on arbitrary image data, for example, diffraction image data, interference image data, or other image data. Composite display on top.
[0069]
FIG. 6 shows a composite image in which defect information obtained from interference image data, for example, is superimposed on diffraction image data. This composite image is obtained by superimposing the defect information of the defect label “10” obtained from the interference image data on the diffraction image data in which scratches and foreign matters appear on the defect labels “11” and “12”. Note that the scratches and foreign matters on the defect labels “11” and “12” can be displayed from the shape and defect position (coordinates) of the defect portion of the defect information. In this case, by adding a mark for classifying the defect obtained from the diffraction image and the interference image as a defect label to the label number, or changing the color of the label number, the defect in which image can be easily understood.
[0070]
As described above, in the above embodiment, interference image data and diffraction image data acquired by imaging the glass substrate 3 used in the liquid crystal display are displayed on the display screen, and the display image on the display screen is displayed. When the defect portion is instructed, the defect information of the defect portion, for example, scratches, foreign matter, unevenness, and dirt is registered, and the quality of the glass substrate 3 is determined based on the registered defect information, and further registered. Since the defect information is superimposed on the interference image data or diffraction image data and displayed on the display screen, it is possible to automatically determine the quality of the glass substrate 3 by summing up the information of the defective portions, and to detect defects. Easy management of information on the part.
[0071]
To register the defect information, the defect type (defect name) is selected and determined on the defect name list box 21a of the registration dialog window 21, and the shape of the defect part and the defect position (coordinates) are indicated by moving the keyboard 11 or the mouse 12. This can be done automatically in a short time in an interactive manner on the operator's display screen. In addition, the defect information can be registered with sufficient information for determining whether the glass substrate 3 is good or bad, such as scratches, foreign matter, unevenness, and dirt.
[0072]
In addition, the registration of defect information does not process interference image data or diffraction image data itself, so that the amount of information to be registered can be reduced.
[0073]
Furthermore, the quality of the glass substrate 3 can be automatically determined from the registered defect information, and the determination is performed by counting the number of defects for each defect type (defect name) from the defect information. Since the quality of the glass substrate 3 is determined, for example, non-defective product, disposal, and rework are determined, the glass substrate 3 can be quantitatively determined and the reliability of the determination result can be improved.
[0074]
In the pass / fail judgment of the glass substrate 3, in the board judgment file, the judgment number of the total defect number judgment and the defect type (defect name) are determined. Number of judgment Can be arbitrarily changed on the user side, whereby the weighting for the determination of the glass substrate 3 can be changed.
[0075]
Since the defect information is superimposed on image data other than the image data and displayed on the display screen, for example, a composite image in which the defect information obtained from the interference image data is superimposed on the diffraction image data can be displayed. The status of all defects on the glass substrate 3 can be seen at a glance on the display screen.
[0076]
The present invention is not limited to the above-described embodiment, and can be modified as follows.
[0077]
For example, the quality of the glass substrate 3 may be determined by the size, length, width, etc. of the defect shape.
[0078]
【The invention's effect】
As detailed above, according to the present invention, Defect information corresponding to image data other than arbitrary image data determined as a defective portion of defect information registered by the defect registration unit is superimposed on arbitrary image data of each type of image data and displayed. Since it is composited and displayed on the screen, The information on the defective part is automatically aggregated to judge whether the glass substrate is good or not, and the information on the defective part can be easily managed. And you can see at a glance on the display screen the status of all defects in the object A substrate inspection apparatus and a substrate inspection system can be provided.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 2 is a specific functional block diagram of a calculation / control apparatus in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 3 is a diagram showing a defect information registration method in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 4 is a defect management flowchart in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 5 is a flowchart for determining whether or not a glass substrate is good in one embodiment of the substrate inspection apparatus according to the present invention.
FIG. 6 is a view showing a composite image in which defect information is superimposed on image data in an embodiment of a substrate inspection apparatus according to the present invention.
[Explanation of symbols]
1: Image capture unit
2: Substrate stage
3: Glass substrate
4: Device control unit
5: Line lighting device
8: Line sensor camera
9: Image processing board
10: Arithmetic / control device
11: Keyboard
12: Mouse
13: Image server
14: Image display
15: Image memory
16: Image processing unit
17: Image storage search section
18: Image file
19: Defect registration department
20: Defect information memory
21: Registration dialog window
22: Board determination unit
23: Defect information storage / retrieval section
24: Defect information file

Claims (8)

An image capturing unit that captures an image of the inspected object and obtains multiple types of image data;
An image display unit that performs image processing on each type of image data acquired by the image capturing unit and displays the image data on a display screen;
A defect registration unit that registers defect information of a defect portion of the inspection object for each type of image data displayed on the display screen;
A determination unit that performs pass / fail determination of the object to be inspected based on the defect information corresponding to each type of image data registered by the defect registration unit;
The image other than the arbitrary image data determined as the defective portion by the determination unit among the defect information registered by the defect registration unit with respect to the arbitrary image data among the types of image data. a synthesis display unit for superposing the defect information corresponding to the data synthesizing displayed on the display screen,
A substrate inspection apparatus comprising:   The determination unit superimposes the defect information of the registered defect portion on each type of image data, and performs pass / fail determination of the inspection object based on the overlapped defect information. The substrate inspection apparatus according to claim 1.   The determination unit totalizes the size of the defect or the number of the defects from the defect information registered by the defect registration unit, and performs pass / fail determination of the object to be inspected based on the total result. The substrate inspection apparatus according to claim 1.   2. The substrate inspection apparatus according to claim 1, wherein the determination unit totals the defect information registered by the defect registration unit for each defect type, and determines pass / fail of the object to be inspected based on a result of the totalization. .   5. The substrate inspection apparatus according to claim 4, wherein the determination unit counts the number for each defect type and weights the determination for each defect type. Each type of image data includes at least one of diffraction image data and interference image data of the inspected object acquired by the image capturing unit,
The composite display unit displays the defect information registered in one of the diffraction image data or the interference image data in a superimposed manner on the other image data.
The substrate inspection apparatus according to claim 1. The image capturing unit acquires diffraction image data and interference image data as the plurality of types of image data,
The determination unit divides the defect parts registered in both the diffraction image data and the interference image data for each defect type, and based on these aggregation results, the inspected object is non-defective, discarded, Judge as one of the rework,
The substrate inspection apparatus according to claim 1. An image capturing unit that captures an image of the inspected object and obtains multiple types of image data;
An image display unit that performs image processing on each type of image data acquired by the image capturing unit and displays the image data on a display screen;
A defect registration unit that registers defect information of a defect portion of the inspection object for each type of image data displayed on the display screen;
A determination unit which, based on the defect information corresponding to each type of image data registered by the previous SL defect registration unit performs quality determination of the object to be inspected,
The image other than the arbitrary image data determined as the defective portion by the determination unit among the defect information registered by the defect registration unit with respect to the arbitrary image data among the types of image data. a synthesis display unit for superposing the defect information corresponding to the data synthesizing displayed on the display screen,
A board inspection system comprising:

Images