JP4436523B2 - Board inspection equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate inspection apparatus that inspects an inspection object by imaging an inspection object such as a glass substrate or a semiconductor wafer used for a liquid crystal display and displaying the image on a display screen.
[0002]
[Prior art]
In a liquid crystal display production line, a macro or micro inspection of a glass substrate used in the liquid crystal display is performed. In the macro inspection, scratches, foreign matter, unevenness, dirt, etc. are observed macroscopically as defective portions on the glass substrate. For example, the illumination light is irradiated obliquely on the glass substrate, and the operator visually observes the glass substrate. These defects are observed, or the entire glass substrate is imaged and the image is displayed on a display, and this display image is visually observed.
[0003]
Then, information on defective portions such as scratches, foreign matter, unevenness, and dirt is collected from the result of observation of defects on the glass substrate by the operator's visual observation, and finally the quality of the glass substrate is determined.
[0004]
[Problems to be solved by the invention]
Among these methods, the method of displaying the image obtained by capturing the entire glass substrate on the display screen and observing it visually is to detect and display the image of the defective portion on the display screen when the defective portion is detected. And observe.
[0005]
However, the size of the defect portion varies greatly depending on the defect type, for example, a scratch, a foreign object, unevenness, and dirt, and may be different even for the same type of defect. For this reason, conventionally, since the image of each defective portion is displayed on the display screen while being enlarged or reduced to an optimum magnification for observation, the operation for changing the display magnification becomes complicated, and if the enlargement operation is mistaken, Defects may protrude from the screen.
[0006]
SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate inspection apparatus that can automatically enlarge and reduce a display magnification suitable for observation according to the size of a defective portion.
[0007]
[Means for Solving the Problems]
The present invention includes an image capturing unit that captures an image of an object to be inspected to acquire an image, an image display unit that displays an image of the object to be inspected captured by the image capturing unit on a display screen, and the display Image area acquisition means for acquiring an image area having a size corresponding to the size of the defect portion from the image of the subject displayed on the screen, and defect display for enlarging and reducing the image of the image area on the display screen A window creation means for creating a window for use, and a magnification of the image area to be enlarged and reduced in the defect display window based on the size of the image area and the size of the defect display window. Window display means for displaying an image of the image area in the defect display window. The image area acquisition means acquires an image area for each defective portion of the subject, and the window creation stage has a size different from that of the image area acquired by the image area acquisition means. A defect display window is created, and the window display means periodically switches to each defect display window created by the window creation means and periodically displays an image of each defect portion obtained by the image area obtaining means. Make It is a substrate inspection apparatus.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[0011]
FIG. 1 is a configuration diagram of a substrate inspection apparatus. The image capturing unit 1 captures an object to be inspected such as a glass substrate or a semiconductor wafer used for a liquid crystal display and acquires the image data. On the substrate stage 2, a glass substrate 3 is placed as an object to be inspected. The substrate stage 2 is moved at a predetermined speed in a direction perpendicular to the line direction of the line-shaped illumination light described later by the drive control of the apparatus control unit 4.
[0012]
The glass substrate 3 has a size obtained by chamfering six or eight liquid crystal displays used in a personal computer, for example.
[0013]
A line illumination device 5 is disposed above the substrate stage 2. This line illuminating device 5 irradiates the moving glass substrate 3 with line-shaped illumination light 6 from an oblique direction. A line sensor / camera 8 is arranged on the optical path of the reflected light 7 from the glass substrate 3. The line sensor / camera 8 has a function of sequentially receiving the reflected light 7 from the moving glass substrate 3 and outputting the image signal.
[0014]
The image processing board 9 has a function of sequentially inputting image signals output from the line sensor / camera 8 and creating image data for the entire surface of the glass substrate 3 when the image capture to the single glass substrate 3 is completed. is doing.
[0015]
Here, the image capturing unit 1 has a function of acquiring a plurality of image data as image data, for example, diffraction image data and interference image data. Of these, diffraction image data is obtained by irradiating the glass substrate 3 with illumination light 6 from an oblique direction, and capturing the scattered light caused by scratches and dust on the surface of the glass substrate 3 at this time by the line sensor camera 8. It is what is done. The interference image data is obtained by irradiating the illumination light 6 with respect to the glass substrate 3 coated with a resist from an oblique direction. The interference light between the reflected light from the resist surface and the reflected light from the surface of the glass substrate 3 at this time It is a bright and dark image captured by the line sensor / camera 8.
[0016]
The arithmetic / control device 10 receives the image data (diffraction image data, interference image data) of the glass substrate 3 from the image capturing unit 1, processes the image and displays it on the image display 14. An image area (rectangular area) including the designated defective part is acquired, a window of an arbitrary size is created for enlarging and displaying this image area on the display screen, and an image of the image area is displayed in this window. It has a function of changing and displaying the magnification, and a function of performing a series of calculation and control of registering defect information of the glass substrate 3 and determining pass / fail of the glass substrate 3 based on the defect information. A keyboard 11 and a mouse 12 as an interface, an image server 13 and an image display 14 are connected.
[0017]
FIG. 2 is a specific functional block diagram of the arithmetic / control device 10. Image data captured from the line sensor / camera 8 of the image capturing unit 1 is stored (expanded) in the image memory 15 of the arithmetic / control device 10 via the image processing port 9.
[0018]
The image processing unit 16 has a function of reading image data stored in the image memory 15, converting the image data into a video signal for image display, and displaying the image data on the image display 14.
[0019]
Also, the image processing unit 16 receives an operation signal from the keyboard 11 or the mouse 12, and moves and displays the pointer 14a on the screen of the image display 14 as shown in FIG. 3, for example, and the movement of the pointer 14a. A rectangular image area (hereinafter, referred to as a rectangular area) F including the defective part of the defect label “3” among the defect labels “1”, “2”, or “3” attached for convenience is acquired by display. It has a function as a manual operation image area acquisition means. In this case, the image processing unit 16 may extract the image data in the rectangular area F and store it in the image memory 15.
[0020]
The rectangular area F is set manually by the operator by manually moving the pointer 14a on the screen of the image display 14 by the operator, that is, the optimum size for the enlarged display. Can be set.
[0021]
When the rectangular area F is set in this way, the image processing unit 16 has a function of calculating the size (X direction, Y direction) of the rectangular area F from the coordinates of the rectangular area F by the number of pixels.
[0022]
Furthermore, when the defect portion of the defect label “3” is instructed by the movement display of the pointer 14a, the image processing unit 16 automatically selects the rectangular region F based on the coordinates of the center of gravity of the defect portion or the coordinates of the defect portion region. It has a function as image area acquisition means for acquiring automatically.
[0023]
Note that these functions as the image area acquisition means may be provided with either one or both of manual operation and automatic operation.
[0024]
The image processing unit 16 receives an operation signal from the keyboard 11 or the mouse 12, and moves and displays the pointer 14a on the screen of the image display 14 as shown in FIG. 4, for example, and the movement of the pointer 14a. Thus, it has a function as a window creating means for creating a defect display window W having an arbitrary size, that is, an optimum size for enlarging and displaying a defective portion.
[0025]
The window creating means of the image processing unit 16 registers the already created defect display window W in the defect information memory 20 together with its coordinates. Therefore, this window creating means has a function of selecting and setting from a plurality of defect display windows W of different sizes registered in the defect information memory 20. In this case, the window creation means reads a plurality of defect display windows W registered in the defect information memory 20 and displays them on the screen of the image display 14 and receives an instruction from the keyboard 11 or the mouse 12. It is to be set.
[0026]
When the defect display window W is set as described above, the image processing unit 16 has a function of calculating the size (X direction, Y direction) from the coordinates of the defect display window W by the number of pixels. .
[0027]
Further, the image processing unit 16 converts the image data in the rectangular area F to be displayed in the defect display window W based on the size (number of pixels) of the rectangular area F and the size (number of pixels) of the defect display window W. It has a function as window display means for calculating the magnification (X-direction magnification, Y-direction magnification) and displaying the image in the rectangular area F in the defect display window W at this magnification.
[0028]
In addition, the image processing unit 16 stores the image data in the rectangular area F of the defect labels “1”, “2”, and “3” in the image file 18, and stores the coordinates of the defect display windows W in the defect information memory 20. If the image is registered, the function of automatically displaying the enlarged image of the defect label “1”, “2” or “3” designated by the operation of the keyboard 11 or the mouse 12 on the screen of the image display 14 is provided. Have.
[0029]
Further, the image processing unit 16 has a function of returning from the state in which the enlarged image of the defective portion is displayed to the original macro image at the original magnification by the operation input of the keyboard 11 or the mouse 12 by the operator.
[0030]
Further, the image processing unit 16 switches to defect display windows W having different sizes sequentially in the order of defect labels “1”, “2”, and “3”, for example, and each defect label “1” in the defect display window W. It has a function of continuously switching and displaying each enlarged image of the defective portions “2” and “3” at a predetermined cycle.
[0031]
The image storage / retrieval unit 17 has a function of reading image data stored in the image memory 15, creating an image file 18 from the image data, and storing the image file 18 in the image server 13.
[0032]
The image storage / retrieval unit 17 receives a search instruction from the keyboard 11 or the mouse 12, searches for and reads out the designated image file 18 among a plurality of stored image files 18, and stores the image data in the image memory. 15 has a function of storing.
[0033]
On the other hand, the defect registration unit 19 receives an operation signal from the keyboard 11 or the mouse 12, moves the pointer 14a on the screen of the image display 14 and displays a defective portion, for example, a defect on the display image by the pointer 14a. When the defective portion of the label “1”, “2” or “3” is designated, the defect information of the designated defective portion, for example, defect type (scratch, foreign matter, unevenness, dirt), defect shape and defect position (coordinates) is defective. It has a function of registering in the information memory 20.
[0034]
In this defect information registration method, for example, the defect registration dialog window information stored in the defect information memory 20 is read out by the image processing unit 16 in response to an instruction from the keyboard 11 or the mouse 12, and an image is displayed as shown in FIG. Displayed on the display 14. In the defect registration dialog window 21, scratches, foreign objects, unevenness, dirt, and the like are registered in advance as defect types (defect names), and are selected and determined by operating the keyboard 11 or the mouse 12.
[0035]
Further, by moving and displaying the pointer 14a on the screen of the image display 14 by the operation signal of the keyboard 11 or the mouse 12, the shape and the defect position of each defect portion of the defect label “1” “2” or “3” are displayed. (Coordinates) can be specified.
[0036]
The substrate determination unit 22 reads the defect information registered in the defect information memory 20, and counts the number of each defect type (defect name) based on the defect information, and determines whether the glass substrate 3 is good or bad based on the count result. , For example, it has a function of determining non-defective products, disposal, and rework (removing the surface of the glass substrate 3 and redoing resist).
[0037]
The defect information storage / retrieval unit 23, together with the defect type (for example, scratches, foreign matter, unevenness, dirt) registered in the defect information memory 20, the determination result of the glass substrate 3 in the substrate determination unit 22 (for example, non-defective product, disposal, rework) ) As a defect information file 24 in the image server 13.
[0038]
The defect information storage / retrieval unit 23 receives a search instruction from the keyboard 11 or the mouse 12, searches for and reads the specified defect information file 24 among the plurality of stored defect information files 24, and reads the defect information. Is stored in the defect information memory 20.
[0039]
Next, the operation of the apparatus configured as described above will be described in accordance with the defect automatic enlargement display flowchart shown in FIG.
[0040]
A glass substrate 3 is placed on the substrate stage 2 in the image capturing unit 1. The glass substrate 3 is irradiated with the line-shaped illumination light 6 from the line illumination device 5 from an oblique direction, and the substrate stage 2 is driven in the line direction of the line-shaped illumination light 6 by the drive control of the device control unit 4. On the other hand, it moves at a predetermined speed in the vertical direction. In this state, the line sensor camera 8 sequentially receives the reflected light 7 from the moving glass substrate 3 and outputs the image signal.
[0041]
The image processing board 9 sequentially receives the image signals output from the line sensor / camera 8 and creates image data for the entire surface of the glass substrate 3 when the image capturing for one glass substrate 3 is completed.
[0042]
Here, in order to acquire two image data of diffraction image data and interference image data, the image capturing unit 1 irradiates the glass substrate 3 with illumination light 6 from an oblique direction, and the glass substrate at this time The scattered light generated by scratches and dust on the surface of 3 is captured by the line sensor / camera 8 to obtain diffraction image data, and the illumination light 6 is applied to the glass substrate 3 coated with the resist from an oblique direction, Interference light between the reflected light from the resist surface and the reflected light from the surface of the glass substrate 3 at this time is captured by the line sensor / camera 8 to acquire bright and dark interference image data. Hereinafter, description will be given as diffraction image data and interference image data.
[0043]
When diffraction image data and subsequently interference image data are sent from the image capturing unit 1 to the calculation / control apparatus 10, the calculation / control apparatus 10 newly adds diffraction image data and subsequently interference image data in step # 1. The image data is taken in, and the diffraction image data and subsequently the interference image data are stored (developed) in the image memory 15.
[0044]
Next, in step # 2, the image storage / retrieval unit 17 reads the diffraction image data and the interference image data stored in the image memory 15, creates an image file 18 from each of the diffraction image data and the interference image data, and creates an image. Save to the server 13.
[0045]
Next, in step # 3, the image processing unit 16 reads the diffraction image data and the interference image data stored in the image memory 15, and converts the diffraction image data and the interference image data into a video signal for image display. The image is displayed on the display 14 for image display. Note that either one or both of the diffraction image data and the interference image data may be displayed on the screen of the image display 14.
[0046]
Next, in step # 4, the calculation / control apparatus 10 determines that one or both of the defect information of the diffraction image data and the interference image data currently displayed on the screen of the image display 14 is a defect information file. It is determined whether or not it is stored in 24.
[0047]
Here, since the diffraction image data or the interference image data currently displayed on the display screen for image display are both new images, the calculation / control apparatus 10 moves to step # 6, and the defect information It is determined whether or not input is performed. Since these diffraction image data and interference image data are both new images, an instruction to input defect information is input from the keyboard 11 or the mouse 12.
[0048]
Next, the calculation / control apparatus 10 stores defect information in step # 7. At this time, the image processing unit 16 displays either one or both of the diffraction image data and the interference image data on the screen of the image display 14 and moves the pointer 14a so as to be movable by the operation of the keyboard 11 or the mouse 12. it's shown.
[0049]
Further, the image processing unit 16 that has received the defect registration instruction from the keyboard 11 or the mouse 12 reads out the defect registration dialog window information stored in the defect information memory 20 and displays the image display display 14 as shown in FIG. A defect registration dialog window 21 is displayed on the screen.
[0050]
In this display state, the pointer 14a is moved and displayed on the screen of the image display 14 by the operation of the keyboard 11 or the mouse 12. For example, the shape of each defect portion of each defect label "1" Specify the defect position (coordinates). In this way, if the pointer 14a is moved on the screen of the image display 14 to indicate the shape and position of the defect portion, the defect registration unit 19 has the coordinates on the diffraction image data and the interference image data. Yes.
[0051]
Further, for example, for the defect label “1”, unevenness is selected and determined as the defect type in the defect registration dialog window 21 on the screen of the display 14 for image display. For the defect label “2”, the scratch and defect label “3” are selected. About garbage is decided.
[0052]
After this, after the defect type (defect name) selection decision, the shape of the defect portion and the defect position (coordinates) are instructed, when the registration button on the registration dialog window 21 is operated, the defect registration unit 19 The defect type (defect name), the shape of the defect portion, and the defect position (coordinates) are registered in the defect information memory 20. The defect information is registered for each of the diffraction image data and the interference image data.
[0053]
Next, in step # 8, the image processing unit 16 receives an operation signal from the keyboard 11 or the mouse 12, moves the pointer 14a on the screen of the image display 14 as shown in FIG. A defective portion, for example, a defective portion of the defect label “1”, “2” or “3” is indicated on the display image by the pointer 14a, and the defective portion of the defect label “1”, “2” or “3” is currently being input. Whether it is a defective part or a defective part that has already been registered.
[0054]
Next, in step # 9, the image processing unit 16 receives an operation signal from the keyboard 11 or the mouse 12 by the operator's manual operation, and, for example, moves the pointer 14a as shown in FIG. A rectangle including a defective portion of the defect label “3” of the defect labels “1”, “2” or “3” by moving and displaying on the screen of the image display 14 and moving and displaying the pointer 14a. Area F is acquired. At this time, the rectangular area F is set to a size in which the defective portion is completely included by an operator's manual operation, that is, a size that is almost circumscribed by the defective portion.
[0055]
When the rectangular area F is set in this way, the image processing unit 16 calculates the size (X direction, Y direction) of the rectangular area F from the coordinates of the rectangular area F by the number of pixels. For example, the size of the rectangular area F is (X: 50 pixels, Y: 50 pixels).
[0056]
When the rectangular area F is automatically acquired, for example, when the defective portion of the defect label “3” is instructed by the movement display of the pointer 14a, the image processing unit 16 determines the coordinates of the center of gravity of the defective portion or the defective portion area. The rectangular area F is automatically acquired based on the coordinates.
[0057]
Next, in step # 10, the arithmetic / control apparatus 10 determines whether to newly create a defect display window W or to use an existing defect display window W. When a new creation is instructed by an operation on the keyboard 11 or mouse 12 by the operator, the image processing unit 16 receives an operation signal from the keyboard 11 or mouse 12 in step # 11, for example, as shown in FIG. The pointer 14a is moved and displayed on the screen of the image display 14, and a defect display window W having an optimum size for enlarging and displaying a defect portion is created by the movement of the pointer 14a.
[0058]
When the defect display window W is set, the image processing unit 16 calculates the size (X direction, Y direction) from the coordinates of the defect display window W by the number of pixels. For example, the size of the newly created defect display window W is (X: 500 pixels, Y: 1000 pixels).
[0059]
On the other hand, when the existing defect display window W is used, the image processing unit 16 reads out a plurality of defect display windows W having different sizes registered in the defect information memory 20 in step # 12 to display the image display display. The defect display window W that is displayed on the screen 14 and selected in response to an instruction from the keyboard 11 or the mouse 12 by the operation of the operator is set. For example, the size of the existing defect display window W is (X: 250 pixels, Y: 250 pixels).
[0060]
Next, in step # 13, the image processing unit 16 performs defect display based on the size of the rectangular area F (for example, X: 50 pixels, Y: 50 pixels) and the size (number of pixels) of the defect display window W. The magnification (X-direction magnification, Y-direction magnification) of the image data in the rectangular area F displayed in the window W is calculated. For example, in the case of a newly created defect display window W (X: 500 pixels, Y: 1000 pixels),
X magnification = 500/50 = 10 times
Y magnification = 1000/50 = 20 times
However, the smaller magnification is taken to be an enlargement magnification of 10 times.
[0061]
In the case of an existing defect display window W (X: 250 pixels, Y: 250 pixels),
X magnification = 250/50 = 5 times
Y magnification = 250/50 = 5 times
Thus, the enlargement magnification is 5 times.
[0062]
Next, the image processing unit 16 sets a newly created or existing defect display window W on the screen of the image display 14 in step # 14 and expands the defect display window W, for example, a defect The defective part of the label “3” is displayed.
[0063]
If the size of the rectangular area F is larger than the size of the defect display window W, the image in the rectangular area F is reduced and displayed in the defect display window W.
[0064]
Next, in step # 15, the image processing unit 16 determines whether or not to select another defective portion (defect labels “1” and “2”), and the other is performed by an operation input of the keyboard 11 or the mouse 12 by the operator. If the defect portion is selected, the process returns to step # 8 again to select the defect portion, then set a newly created or existing defect display window W, and then calculate the magnification of the image. The image is displayed on the screen of the image display 14.
[0065]
In this way, for example, each rectangular area F of the defective portion of each of the defect labels “1”, “2”, and “3” is set, and the image data is stored in the image file 18, and each of these defective portions has a different size. If each defect display window W is set and its coordinates are registered in the defect information memory 20, the diffraction image data or the interference image data is displayed on the screen of the image display 14 as shown in FIG. If the user indicates that the defect label “1”, “2”, or “3” is enlarged and displayed by operating the mouse 11 or the mouse 12, the image processing unit 16 displays on the screen of the image display 14 as shown in FIG. An enlarged image of the defective portion of the defective label “3” is automatically displayed.
[0066]
In addition, an instruction to return to the original magnification image by the operation input of the keyboard 11 or the mouse 12 by the operator while the enlarged image of the defective portion of the defect label “3” is displayed on the screen of the image display 14 is displayed. When input, since the image processing unit 16 recognizes the original image data (diffraction image data or interference image data) having the defect portion of the defect label “3”, the enlarged image of the defect portion of the defect label “3”. To the original magnification image (diffraction image data or interference image data).
[0067]
If the image data in each rectangular area F and the respective defect display windows W are set for a plurality of defect portions (defect labels “1”, “2”, “3”), the keyboard 11 or mouse 12 by the operator is set. When the continuous display is instructed by the operation input, the image processing unit 16 switches to the defect display window W having different sizes in the order of the defect labels “1”, “2”, “3”, for example, and displays the defect display In the window W, the enlarged images of the defect portions of the defect labels “1”, “2”, and “3” are switched and displayed at a predetermined cycle.
[0068]
Thereafter, the process returns to step # 6 again to determine whether or not defect information is input.
[0069]
On the other hand, the substrate determination unit 22 reads the defect information registered in the defect information memory 20 in the above step # 7, and totals the number of each defect type (defect name) from the defect information. Based on this, it is determined whether the glass substrate 3 is good, for example, non-defective, discarded, or reworked (the surface of the glass substrate 3 is scraped and the resist is redone).
[0070]
When the pass / fail determination of the glass substrate 3 is completed, the defect information storage / retrieval unit 23, together with the defect type registered in the defect information memory 20 (for example, scratch, foreign object, unevenness, dirt), the glass substrate in the substrate determination unit 22 3 is stored in the image server 13 as a defect information file 24 (for example, non-defective product, disposal, rework).
[0071]
If the image capture / retrieval is not repeated, the arithmetic / control device 10 determines the end of the system.
[0072]
In the image composition in step # 5, the defect information stored in the defect information memory 20 by the image processing unit 16 is superimposed on arbitrary image data such as diffraction image data, interference image data, or other image data. It is synthesized and displayed on the screen of the image display 14.
[0073]
As described above, in the above-described embodiment, the operator is instructed from the image capturing unit 1 on the image displayed on the image display 14 by the image data (diffraction image data, interference image data) of the glass substrate 3. A rectangular area F including a defective portion is acquired, a defect display window W having an arbitrary size for enlarging / reducing the rectangular area F on the display screen is created, and the defect display window W is created in the defect display window W. Since the image of the rectangular area F is changed and displayed, the optimum enlarged image is automatically displayed in accordance with the size of the defect portion of the defect label “1”, “2” or “3”. Can be displayed in W.
[0074]
Therefore, the size of the defect portion varies depending on the defect type, for example, scratch, foreign object, unevenness, and dirt, and also varies depending on the same type of defect. Can be displayed on the display 14 for image display, and the operation is simple, and the enlargement / reduction operation for each defective part under observation can be reduced.
[0075]
Defects such as unevenness and dirt are very large as compared with minute defects such as scratches and foreign matters. In such a case, it is desirable to reduce the size to fit within the defect display window W.
[0076]
In this case, since the defect display window W can be set to an arbitrary size by newly creating, the enlargement / reduction magnification of the defect portion can be set to an optimum magnification for observation. At this time, if the size of the defect display window W is set smaller than the size of the rectangular area F, the image in the rectangular area F can be reduced and displayed in the defect display window W.
[0077]
In addition, for example, each rectangular area F of the defective portion of each of the defect labels “1”, “2”, and “3” is set and the image data is stored in the image file 18, and each of the defective portions has a different size. Since each defect display window W is set and its coordinates are registered in the defect information memory 20, the defect labels “1”, “2”, or “3” are enlargedly displayed by operating the keyboard 11 or the mouse 12 thereafter. The defect portion of the defect label “1”, “2” or “3” on the screen of the image display 14 is automatically displayed on the image display 14 with an enlarged / reduced image optimal for observation. Can be displayed.
[0078]
Further, for example, an enlarged image of the defect portion of the defect label “3” is displayed on the screen of the image display 14, and the original magnification image having the defect portion of the defect label “3” is instructed by the operator. It is possible to return to the display of data (diffraction image data or interference image data) at any time.
[0079]
Further, by the operation input of the keyboard 11 or the mouse 12 by the operator, for example, the defect display windows W having different sizes are sequentially switched in the order of defect labels “1”, “2”, “3”, and the defect display window W is displayed. The enlarged / reduced images of the defective portions of the defect labels “1”, “2”, and “3” can be continuously switched and displayed at a predetermined cycle.
[0080]
Furthermore, if defect information for the defect portion of the defect label “1”, “2” or “3” displayed in an enlarged / reduced manner is read from the defect information file 24, the defect information (defect type) is displayed together with the enlarged / reduced image of the defect portion. , The shape of the defect portion and the defect position) can be displayed.
[0081]
In addition, this invention is not limited to the said one Embodiment, You may deform | transform as follows.
[0082]
In the above-described embodiment, the case where the present invention is applied to macro observation of a glass substrate used in a liquid crystal display has been described. However, the present invention is not limited to this, and can be applied when obtaining enlarged images of desired portions of various inspection objects.
[0083]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to provide a substrate inspection apparatus that can automatically display an image at a display magnification suitable for observation according to the size of a defective portion.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 2 is a specific functional block diagram of a calculation / control apparatus in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 3 is a diagram showing creation of a rectangular area in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 4 is a diagram showing creation of a defect display window in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 5 is a diagram showing a defect registration diagram block in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 6 is a flowchart of automatic enlargement display of defects in an embodiment of a substrate inspection apparatus according to the present invention.
FIG. 7 is a diagram showing a defect portion enlarged and displayed in a defect display window in the embodiment of the substrate inspection apparatus according to the present invention.
[Explanation of symbols]
1: Image capture unit
2: Substrate stage
3: Glass substrate
4: Device control unit
5: Line lighting device
8: Line sensor camera
9: Image processing board
10: Calculation / control device
11: Keyboard
12: Mouse
13: Image server
14: Image display
14a: pointer
15: Image memory
16: Image processing unit
17: Image storage search section
18: Image file
19: Defect registration department
20: Defect information memory
21: Defect registration dialog window
22: Board determination unit
23: Defect information storage / retrieval section
24: Defect information file

Claims (4)

An image capturing unit that captures an image of the inspected object and obtains an image;
Image display means for displaying an image of the object to be inspected captured by the image capturing unit on a display screen;
Image area acquisition means for acquiring an image area of a size corresponding to the size of the defective portion from the image of the subject displayed on the display screen;
Window creation means for creating a defect display window for enlarging and reducing the image of the image area on the display screen;
Based on the size of the image area and the size of the defect display window, a magnification of the image area to be enlarged and reduced in the defect display window is calculated, and the image area is displayed in the defect display window at this magnification. Window display means for displaying images of
Equipped with,
The image area acquisition means acquires the image area for each defective portion of the subject,
The window creation stage creates the defect display window having a different size with respect to the image area acquired by the image area acquisition unit,
The window display means switches to each defect display window created by the window creation means and periodically displays the image of each defect portion obtained by the image area obtaining means.
A substrate inspection apparatus. The image area acquiring unit, the display screen board inspection apparatus according to claim 1, wherein the moved and acquires the image area of a rectangle encompassing the defect pointers in.   The image area acquisition means displays the image in a size that includes the defect portion based on the coordinates of the designated defect portion by designating the defect portion on the image of the subject displayed on the display screen. 2. The substrate inspection apparatus according to claim 1, wherein the region is automatically acquired. 2. The substrate inspection apparatus according to claim 1 , wherein the window creating means creates the defect display window having an arbitrary size by moving a pointer on the display screen .

Images