JP2012145427A - Substrate inspection system, display device, and display method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology that can improve working efficiency of an inspector of a visual inspection.SOLUTION: A storage part 41 stores an image of a substrate in which a defect is detected by an automatic defect inspection device 2 and defect information showing the information related to the defect in association with a substrate ID identifying the substrate. A defect display device 4 reads the image and the defect information obtained by the automatic defect inspection device 2 from the storage part 41 on the basis of the substrate ID of a substrate to be visually inspected in a visual inspection device 3, and highlights a defect part with respect to the image. A monitor 14 displays the image of the substrate on which highlight operation is performed by the defect display device 4.

Description

  The present invention relates to a substrate inspection system for inspecting a substrate or the like.

  In recent years, with the rapid development of flat panel displays (FPD) such as large liquid crystal televisions and large screen displays, the size of FPD substrates (mother glass substrates) manufactured on a production line has rapidly increased. In proportion to the increase in the size of the substrate, the manufacturing apparatus and the inspection apparatus are also increased in size. In particular, in order to improve production efficiency, a mother glass substrate having an integral multiple of the screen size is employed in the FPD substrate manufacturing process so that a plurality of display panels can be manufactured simultaneously. Hereinafter, the mother glass substrate will be referred to as an FPD substrate or simply a substrate. FPD substrates for multi-cavity acquisition are becoming larger year by year, and in recent years, FPD substrates having a side exceeding 3 m have appeared. Along with the increase in size of the FPD substrate, the size of inspection apparatuses has been increasing.

  Substrate defect inspection involves irradiating macro illumination light on the substrate surface, and manual macro inspection, in which the inspector visually inspects resist coating spots, dust, and other foreign matters, and scratches, etc. There are a micro inspection in which a defect is magnified and observed with a high magnification digital microscope, and an automatic macro inspection in which a defect of the substrate is detected from an image obtained by scanning the entire surface of the substrate with a line sensor camera. Substrate inspection systems including this manual macro inspection apparatus and automatic macro inspection apparatus have come to be used.

  In a manual macro inspection apparatus, a technique for supporting visual inspection of visual inspection by displaying a macro image of a substrate inspected by an automatic macro inspection apparatus on a monitor is known (for example, Patent Document 1).

JP 2008-76169 A

  According to the technique described in Patent Document 1 described above, there is only a function for displaying a reduced image of the entire surface of the substrate imaged in the automatic macro inspection apparatus on the monitor of the manual macro inspection apparatus, and the inspector efficiently performs visual observation. It was not a function that was captured from the viewpoint of For example, when the inspector visually inspects the loaded FPD substrate, the inspector moves to the front of the monitor and confirms the defective portion by viewing the entire image (macro image) of the FPD substrate projected on the monitor. After that, the actual situation is that the inspection is performed by moving to the actual observation position. In this way, if the monitor is fixed to the end of the opening window for visual observation of the manual macro inspection device, the inspector must move to the position of the monitor when confirming the visual observation position. There arises a problem that the work efficiency is lowered due to the movement, and the confirmation position is not known before returning to the observation position. Further, when the inspector searches for a defect from the macro image displayed on the monitor, considerable skill is required, and it is difficult to accurately confirm the defect position.

As described above, in order to improve the work efficiency of the inspector in the visual inspection (manual macro inspection) by increasing the size of the FPD substrate in recent years, it is desirable that the result of the automatic macro inspection can be effectively used for the visual inspection.
An object of this invention is to provide the technique which can improve the working efficiency of the inspector of visual inspection in a board | substrate inspection system.

  In order to solve the above problems, according to the disclosed substrate inspection system, an automatic defect inspection device that automatically inspects a defect on the substrate by acquiring an image of the substrate, and the inspected by the automatic defect inspection device A visual inspection device for visually inspecting a substrate, an image of the substrate inspected by the automatic defect inspection device, and defect information indicating information relating to the defect are stored in association with substrate identification information for identifying the substrate. And reading the image and the defect information acquired by the automatic defect inspection device from the storage unit based on the substrate identification information of the substrate to be visually inspected in the visual inspection device, and defect the image A defect display device that highlights a portion, and a monitor that is disposed in the vicinity of an observation window frame of the visual inspection device and displays an image of the substrate that has been emphasized by the defect display device. And obtain configuration.

  Further, the disclosed display device is a display device that displays an inspection result of a manufactured substrate, the image of the substrate being inspected by an automatic defect inspection device that automatically inspects a defect on the substrate, and the defect A storage unit that stores defect information indicating information relating to the substrate identification information for identifying the substrate, the image acquired by the automatic defect inspection apparatus in association with the substrate identification information of the substrate, and the A storage unit that stores defect information, a defect display processing unit that highlights a defective portion with respect to the image read from the storage unit, and an image of the substrate that is emphasized by the recording defect display processing unit And a monitor to be configured.

  Furthermore, the disclosed display method is a display method for displaying an inspection result of a manufactured substrate, and the image of the substrate detected by an automatic defect inspection apparatus that automatically inspects a defect of the substrate, and the defect Is stored in the storage unit in association with substrate identification information for identifying the substrate, the image and defect information associated with the substrate are read from the storage unit, and The defective portion is highlighted and displayed on the monitor.

  According to the disclosed substrate inspection system, the work efficiency of an inspector for visual inspection can be improved.

It is a block diagram of a board | substrate inspection system. It is a functional block diagram of a defect display apparatus. It is an example of a screen of the defect display apparatus which concerns on 1st Embodiment. It is a figure explaining the display method of the macro image displayed on a macro image display area. It is a figure which shows an example of the method of highlighting the detection location of a defect. It is a figure which shows the other example of the method of highlighting the detection location of a defect. It is a figure explaining the output display example to the screen by the defect display apparatus which concerns on 2nd Embodiment. It is the flowchart which showed the process which assigns a priority and displays using the dictionary function of an automatic defect inspection apparatus. It is the flowchart which showed the process which sets and displays the high priority to the designated defect. It is an example of arrangement | positioning of a defect display apparatus.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a configuration diagram of a substrate inspection system. A substrate inspection system 1 shown in FIG. 1 includes an automatic defect inspection device (automatic pattern inspection device, automatic macro inspection device) 2 and a holder that holds, for example, an FPD substrate (mother glass substrate) as a thin plate-like substrate on which a pattern is formed. It has a visual inspection device (manual macro inspection device) 3 and a defect display device 4 that are inspected by an inspector by irradiating macro illumination light from above the substrate in a state inclined at a predetermined angle, and each device is connected via a network. Are connected to each other.

  The automatic defect inspection apparatus 2 is an automatic macro inspection apparatus that scans the entire surface of the FPD substrate with a one-dimensional image sensor or a two-dimensional image sensor, captures a macro image of the entire FPD substrate, and automatically inspects defects on the FPD substrate. . As the automatic defect inspection apparatus 2, an automatic pattern inspection apparatus that scans the entire surface of the glass substrate with a one-dimensional image sensor having a higher resolution than that of the automatic macro inspection apparatus and detects fine defects can be employed. The automatic pattern inspection device detects a defect by comparing a plurality of adjacent patterns from one line of image data captured by a one-dimensional image sensor. For example, a macro image of the entire FPD substrate can be acquired. The automatic defect inspection apparatus 2 only needs to acquire an image (macro image) of the entire FPD substrate and automatically detect defects on the substrate.

  The visual inspection apparatus 3 has a holder that holds an FPD substrate that is a subject and can be rotated toward the inspector, and the holder is raised from above the glass substrate in a state where the holder is raised at an angle that is easy for the inspector to observe. This is a manual macro inspection apparatus that irradiates macro illumination light from a surface light source that collectively illuminates an inspector's visual field range, and the inspector visually confirms foreign matter such as dust on the substrate and defects such as scratches.

  Further, the visual inspection device 3 may include a digital imaging unit such as a digital camera that images a defect visually observed by an inspector or a digital microscope that magnifies and images a fine defect on a glass substrate. The defect image captured by the digital imaging unit can be stored as history information of the inspector's sensory inspection, or the defect image captured by the digital imaging unit can be displayed on a monitor to be observed by the inspector.

  The defect display device 4 is composed of a general-purpose computer such as a personal computer, for example. The defect display device 4 is arranged in the visual inspection device 3, and the visual inspection device 3 observes at least a macro image of the entire substrate obtained by the inspection by the automatic defect inspection device 2. Display on a monitor arranged in the vicinity of the opening window for movement or a monitor movably provided.

  Hereinafter, a method for displaying the result of the inspection performed in the automatic defect inspection apparatus 2 on the monitor of the defect display apparatus 4 and supporting visual inspection (manual macro inspection) by the visual inspection apparatus 3 will be described with reference to the drawings. Explained.

  FIG. 2 is a functional block diagram of the defect display device 4. The defect display device 4 shown in FIG. 2 is connected to the automatic defect inspection device 2 and the visual inspection device 3 through the network as described above, and includes a storage unit 41, a display processing unit 42, a registration unit 43, and an extraction unit 44. .

  The storage unit 41 stores information obtained by inspection in the automatic defect inspection apparatus 2. Specifically, a macro image of the entire FPD substrate captured by the one-dimensional image sensor of the automatic defect inspection apparatus 2 or a macro image of each chamfer region, and resist coating spots detected by image processing of the macro image, A defect type such as a scratch, a defect shape, and defect information indicating a defect position are stored in association with a substrate ID that is information for identifying the substrate. When information such as a lot ID for identifying a lot is included, the lot ID and the substrate ID are stored in association with each other. The storage unit 41 does not need to be provided in the defect display device 4 and can use, for example, a server that collectively manages inspection data.

  The display processing unit 42 outputs and displays the substrate image (macro image) and the defect information thereof stored in the storage unit 41 on the monitor. In the present embodiment, the first display processing unit 45 and the second display processing unit 46 are provided, but the processing may be performed by one display processing unit. The first display processing unit 45 uses the substrate image (macro image) corresponding to the substrate ID of the substrate instructed to be displayed among the data stored in the storage unit 41 and the defect information corresponding thereto as a monitor. Display output. The second display processing unit 46 refers to the defect information stored in the storage unit 41 and highlights the defective portion of the image output and displayed on the monitor by the first display processing unit 46.

The registration unit 43 registers in advance a defect to be preferentially displayed in the display processing unit 42 among a plurality of types of defects.
The extraction unit 44 extracts defect information corresponding to the defect registered in the registration unit 43 from the defect information stored in the storage unit 41. When extraction processing is not performed in the extraction unit 44, data stored in the storage unit 41 is directly input to the display processing unit 42.

  When displaying all the defects of the macro image sent from the automatic defect inspection apparatus, the registration unit 43 and the extraction unit 44 are omitted, and the corresponding substrate macro image and defect information are directly displayed from the storage unit 41. It can also be sent to part 42.

Hereinafter, a method for supporting the inspector's visual observation by using the defect display device 4 shown in FIG. 2 to output and display on the monitor using the inspection result of the automatic defect inspection device 2 will be specifically described. And
<First Embodiment>

  FIG. 3 shows a screen example of the defect display device 4, 5 is a macro image display area for displaying a macro image, and 6 is an information display area for displaying defect information. For example, when an FPD board to be subject to visual inspection is carried into the visual inspection apparatus 3, the board ID of the carried-in FPD board is sent via the automatic defect inspection apparatus 2 or the server. At the same time, the macro image and defect information of the FPD substrate corresponding to the substrate ID are read out and stored in the storage unit 41. The storage unit 41 may store macro images and defect information of a plurality of FPD substrates inspected by the automatic defect inspection apparatus 2 in association with the substrate ID.

  When a command to display the macro image and defect information of the specified substrate ID on the monitor is input to the display processing unit 42, the display processing unit 42 corresponds to the specified substrate ID among the data stored in the storage unit 41. The macro image and defect information to be extracted are taken out, and a process of displaying the macro image in the macro image display area 5 and the defect information in the information display area 6 of the monitor as shown in FIG.

  Further, the display processing unit 42 executes a process of displaying a list of thumbnail images obtained by reducing the file names of the defect information of the plurality of FPD boards and the plurality of macro images in the list display area 8 of the monitor shown in FIG. When a file name or thumbnail image displayed in a list on the monitor is designated, a macro image corresponding to the designated substrate ID is displayed in the macro image display area 5 and corresponding defect information is displayed in the information display area 6. The

  The defect information detected by the automatic defect inspection apparatus 2 includes information on the substrate, in addition to information serving as a guideline for determining display priority, such as the type (type) of defects such as scratches, unevenness, and dents, the number of defects, and the defect size. Information on the inspection of the substrate and the automatic defect inspection apparatus 2 such as the defect position information indicating the position of the defect, the lot name, the substrate ID, and the inspection start date and time.

  As a display method of the macro image display area 5, the image of the current visual inspection target substrate carried into the visual inspection device 3 and the image of the previous visual inspection target substrate after the visual inspection are displayed on the same monitor. For example, as shown in FIG. 3A, a plurality of macro images can be displayed side by side vertically (or left and right). For example, in FIG. 3A, the macro image display area 5 is divided into two areas 5A and 5B, and two macro images A and B are displayed in each of the areas 5A and 5B, and one of them is selected. Thus, defect information corresponding to the selected macro image is displayed in the information display area 6. When the macro image A of the current inspection target substrate and the macro image B of the previous inspection target substrate inspected immediately before are displayed, the inspection can be performed while comparing with the substrate inspected immediately before. In this case, in order to prevent the current inspection target substrate from being mistaken for another substrate, the peripheral frame of the macro image A corresponding to the current inspection target substrate may be highlighted so as to be visually distinguishable by color or the like. desirable.

  In the display areas 5A and 5B, the macro image A of the current inspection target board carried into the visual inspection apparatus 3 and the macro image B to be inspected next may be displayed. You can check the image in advance. In addition, when a macro image B other than the current inspection target board is designated, it is desirable that the information display area 6 is also highlighted in an achromatic thick frame while being highlighted in an achromatic thick frame. Further, by selecting either the display area 5A or 5B, the display area 5A or 5B for displaying the selected macro image may be expanded and displayed on the screen size of the monitor.

  Alternatively, as shown in FIG. 3B, an image to be displayed may be selected from the plurality of images with the tabs 7A and 7B. The displayed macro image and defect information are switched according to the selected tab.

  In the defect display device 4 according to the present embodiment, the display method can be set so that the inspector who visually inspects can easily check the defect location for the macro image of the substrate displayed on the monitor.

  FIG. 4 is a diagram for explaining a method of displaying a macro image displayed in the macro image display area 5. Of the detected defects shown in FIG. 4A, FIG. 4B shows a case where all images are displayed regardless of the type of detected defect, and FIG. The case where only the type of defect is displayed is shown. The predetermined type of defect is set in advance by a user or the like.

  When only a predetermined type of defect is displayed on the monitor as shown in FIG. 4C, the defect information stored in the storage unit 41 in association with the macro image of the substrate to be inspected is referred to. Defect information that matches the type set is extracted. Then, only the defect at the defect position included in the extracted defect information is displayed.

Furthermore, it is good also as highlighting so that the detection location of a defect may be visually distinguished from another part among the macro images of a board | substrate to be inspected.
FIG. 5 is a diagram illustrating an example of a method for highlighting a detected portion of a defect. As shown in FIG. 5, with reference to defect information in a macro image of a substrate to be inspected, at least the periphery of a defect position to be subject to visual inspection is highlighted in an enclosure 11 (11A, 11B). Thereby, it becomes easy for an inspector to confirm a defective part.

  In addition to the method of highlighting the defect location in the enclosure 11 as shown in FIG. 5, for example, a predetermined mark indicating that there is a defect location can be displayed near the defect location. FIG. 6 is a diagram illustrating another example of a method for highlighting a detected portion of a defect. In order to draw attention to the inspector of the visual inspection device 3 and support the visual inspection, marks (A in the illustrated example) 12A to 12C having a specific shape visually appealing in the vicinity of a defect to be visually inspected And may be highlighted by lighting or blinking.

The content of the defect information may be referred to, and for example, may be identified and displayed using color coding, an enclosure 11, a figure, a mark, or the like depending on the type (type) or size of the defect.
Furthermore, it is good also as a structure which deletes an emphasis display with respect to the defect which the inspector confirmed visually among the defects currently displayed on the monitor. Furthermore, it is good also as a structure which cancels a priority and cancels a highlight display with respect to the defect type (pseudo defect) which the inspector determined that there is no problem. In addition, a comment field may be provided in which a reason for determination is described for a defect determined to have a problem (true defect) and stored in the storage unit in association with the substrate information. As a method for displaying the determination reason, a configuration in which a sticky note is attached to the defect position and a determination result is entered may be used, or a symbol corresponding to the determination result may be added. Thereby, there is no oversight of the inspection location, and the defect determination history confirmed by the inspector can be left.

  Further, when a digital camera is attached to the visual inspection apparatus, this image data (defect image) is captured by the digital camera from the same visual position from the same visual position on the inspection location on the FPD board confirmed by the inspector. Can be stored in the storage unit as history information of the sensory test.

  In order to erase the highlighted display, the corresponding defect is specified from the macro image A displayed in the macro image display area 5 and the defect information displayed in the information display area 6, and the enclosure 11 displayed at that position is displayed. This is realized by stopping the highlighting output such as.

  Here, “erasing highlighting” includes not only erasing the display of the enclosure 11, the figure, the mark 12, etc., but also switching the highlighting to a semi-transparent display. Alternatively, for example, when the inspector inputs information indicating that the highlighted defect position has been confirmed, the highlighted position is switched to the next defect position.

As described above, according to the defect display device 4 according to the present embodiment, an inspector who performs a visual inspection by the visual inspection device 3 is based on a macro image acquired by the automatic defect inspection device 2 while looking at the monitor of the defect display device 4. It is possible to confirm a defect portion to be visually observed. In this case, since the defect part is highlighted, it is possible for the macro inspection inspector to accurately grasp the defect part to be visually inspected even if it is not skilled, improving the work efficiency of the inspector. Contribute to
<Second Embodiment>

In the defect display device 4 according to the present embodiment, the type and appearance frequency of defects detected by the automatic defect inspection device 2, the tendency of the defect occurrence position, and the like are displayed on the monitor.
FIG. 7 is a view for explaining an output display example on the screen by the defect display device 4 according to the present embodiment.

  Macro images and defect information for a plurality of substrates obtained by performing defect inspection on a certain lot with the automatic defect inspection apparatus 2 are stored in the storage unit 41 in association with a lot ID for identifying the lot together with the substrate ID. . Accumulation of data starts at the start of lot inspection or at an arbitrary timing.

  The screen shown in FIG. 7 acquires a plurality of or all corresponding substrate IDs from the storage unit 41 based on the lot ID specified by the inspector. Then, the macro image and defect information associated with each substrate ID are extracted from the storage unit 41, and the macro images are superimposed and output for display by a preset number (4 in FIG. 7). . FIG. 7 shows macro images A to D of a plurality of substrates obtained by an automatic defect inspection apparatus for a certain lot, and a synthesized macro image 9 obtained by superimposing these macro images.

  Similarly to the defect display device 4 according to the above-described embodiment, the display processing unit 42 color-codes the enclosure 11, the figure, and the like with respect to the location where the defect is detected by the automatic defect inspection device 2. Emphasis display processing for visually enhancing the position of the defect to be visually inspected using the mark 12 or the like may be performed.

  In the present embodiment, defects appearing in each of the plurality of macro images A to D are displayed so as to be superimposed on the synthesized macro image 9. In this case, based on the macro images A to D and the corresponding defect information, it is determined whether or not a predetermined type of defect appears together in a certain part of the substrate, and the same kind of defects that appear together are grouped. In the display processing unit 42, highlighting processing is executed for each group so that a defect to be visually inspected can be visually distinguished by an enclosure 11 (enclosures 11 </ b> A to 11 </ b> C in FIG. 7), a figure, or a mark 12. .

  In addition, the type of defect that can be corrected and the type of defect that cannot be corrected are registered in advance, and a defect location that can be corrected and a defect location that cannot be corrected are identified. When a defect that cannot be corrected is included in the defect information, it is possible to highlight so that the correctable defect portion and the noncorrectable defect portion in the macro image can be identified. As highlights that indicate that inspection is not necessary, for example, chamfered areas containing uncorrectable defects are marked with NG or x marks, and red frames or areas are distinguished from highlight colors for visually inspected defects such as red, black, or white. It is also possible to use highlighting that indicates that a paint inspection is not necessary with colors that can be used. Since chamfered areas containing uncorrectable defects are discarded in the final process, this chamfered area is highlighted to indicate that inspection is unnecessary, so that inspection in subsequent processes can be omitted, and inspection efficiency is improved. Can be improved. It is desirable that the highlighting indicating that the inspection is unnecessary is continuously displayed during the inspection of each subsequent process. Further, the chamfered substrate determined to be unnecessary for inspection can be used as information for omitting the exposure process in the exposure apparatus in the subsequent manufacturing process.

A distribution map showing the appearance frequency of defects can be created based on the accumulated data, and can be displayed together with the images A to D or separately.
According to the defect display device 4 according to the present embodiment, the inspector can check information on the substrate for each lot based on the accumulated image and defect information data. In addition, the inspector can check information for each substrate. In order to output and display the image and defect information for each substrate, for example, the defect information aggregated for each lot and the image of the substrate are displayed as a thumbnail list on the monitor of the defect display device 4, for example, by the user via the monitor When a thumbnail of an image of a certain board is selected, it is realized by switching the output display on the monitor to that image.

According to the defect display device 4 according to the present embodiment, by displaying the macro images of a plurality of substrates in an overlapping manner, the inspector can know the tendency of appearance of the defect and can easily predict the inspection area and the type of the defect. This helps to improve the work efficiency of manual macro inspection inspectors.
<Third Embodiment>

  In the defect display device 4 according to the present embodiment, inspection priority is assigned to each defect type (defect type) based on defect information, and for images with high priority, the image and defect information are prioritized and displayed on the monitor. To do.

  As a method of assigning priority, there is a method of using a function of learning a tendency of defect information held in the automatic defect inspection apparatus 2 of the substrate inspection system 1 and registering it in the defect registration dictionary, for example. Alternatively, there is a method of registering defect types in descending order of importance. This will be specifically described below with reference to the flowcharts shown in FIGS.

  FIG. 8 is a flowchart showing a process of giving priority and displaying using the dictionary function of the automatic defect inspection apparatus 2. For example, the process shown in FIG. 8 is executed when the defect display device 4 is activated.

  First, in step S1, the defect type registered in the dictionary file is obtained and searched in the automatic defect inspection apparatus 2 of the substrate inspection system 1 via the network, and in step S2, a priority is assigned to the defect type. Then, it is registered in a storage means such as a memory of the defect display device 4.

  In step S3, when an instruction to display an image and defect information on the monitor for the designated substrate ID is input, the defect for the defect information corresponding to the substrate ID among the defect information stored in the storage unit 41. The type is read out and it is determined whether or not it matches the defect type registered in step S2. If there is a mismatch, no processing is performed. If the defect type included in the defect information matches the registered defect type, the process proceeds to step S4, where the defect information and image are displayed on the monitor, and the defect indicated by the defect information is highlighted. As priorities, for example, defects that can be confirmed with other micro inspection equipment are given a low priority, and they are confirmed only by visual inspection such as resist film spot defects, pattern spot defects and streak defects that cannot be inspected by micro inspection. For those macro defects that are not possible, give a high ranking. It is also desirable to prioritize these macro defects. Furthermore, it is possible to identify and display by color or the like according to priority, or attach a number indicating the priority, and perform highlighting processing for the defect corresponding to the designated priority. In this case, information indicating that visual inspection is not performed for a macro defect having a low priority that has not been specified may be stored in association with the substrate information. In this way, when inspection does not end within the time required for visual inspection, visual inspection of macro defects with low priority can be omitted, and inspection history of defects that have not been visually inspected can be left.

Thereafter, the processes in steps S3 and S4 are repeated for all defects, that is, for defect information corresponding to the specified substrate ID, and the process is terminated.
FIG. 9 is a flowchart showing a process for setting a high priority to a defect designated by the inspector and displaying the defect. For example, when an instruction to output information related to the substrate such as an image and defect information is input to the defect display device 4, the processing shown in FIG. 9 is executed.

  First, in step S11, defect information is read out from the data stored in the storage unit 41. In step S12, among the defect types, a pseudo defect that can be removed by a cleaning process, a pseudo defect that does not affect the display drive, The real defect that can be repaired by the rework device or repair device and the NG defect that cannot be repaired are registered with priority. For example, a high priority is assigned to a true defect that can be repaired by a rework device or a repair device, and a low priority is assigned to a pseudo defect that does not affect the display drive. No priority is given to pseudo defects that can be removed by other cleaning processes or NG defects that cannot be repaired. For NG defects that cannot be repaired, it is desirable to add a highlight indicating that inspection is not necessary to the chamfered area including the defect.

  In step S13, it is determined whether or not the defect type of the defect information corresponding to the substrate ID included in the command matches the defect type assigned the priority registered in step S12. If there is a mismatch, no processing is performed. If the defect type included in the defect information matches the defect type with the priority, the process proceeds to step S14, and the same process as step S4 in FIG. 8 is executed.

Thereafter, similar to the process shown in FIG. 8, the process is repeated for all defects.
In addition to the above-described embodiments shown in FIG. 8 and FIG. 9, the defect type determined by the inspector as having high importance can be registered. Alternatively, for example, when the appearance tendency of the defect type for each lot can be grasped by the display method according to the second embodiment, the defect type in which the inspector tends to appear is registered as the defect type to be preferentially displayed. You can also keep it. When a command for designating a substrate ID or a lot ID for output display is input, the registered defect types in the defect information can be output and displayed in descending order of priority. In addition, it is preferable to highlight the macro image displayed on the monitor with a color or a symbol for each defect priority. In this case, highlighting may be performed in order of higher priority, and when visual inspection of a defect type of a certain order is completed, the display may be switched according to priority so that the defect type of the next order is highlighted. Thus, by classifying each defect into a defect to be inspected and a defect not to be inspected, it is possible to eliminate erroneous inspection of defects that do not require inspection. Furthermore, by highlighting defects to be inspected according to priority order, it is possible to reliably perform visual inspection without overlooking defects with high priority order. Furthermore, by assigning priorities and designating the order of inspection objects according to the inspection time and the like, it is possible to reliably visually inspect defects with high importance.

According to the defect display device 4 according to the present embodiment, an inspector who performs a macro inspection while referring to a screen and defect information displayed by the defect display device 4 in order to highlight defects classified according to priority and priority and priority. Contributes to the improvement of macro inspection work efficiency.
<Fourth Embodiment>

The defect display device 4 according to the present embodiment performs output display at a position where an inspector can easily refer to an image and defect information in the macro inspection.
FIG. 10 shows an arrangement example of the defect display device 4. For example, as shown in FIG. 10A, the monitor 14 of the defect display device 4 is installed beside the visual observation window frame 10 a formed on the front exterior panel 10 of the visual inspection device 3.

  The monitor 14 may be movable to the movement position of the inspector when the inspector inspects while moving along a large substrate exceeding 2 m. For example, a guide rail 16 is provided along the observation window frame 10 a of the visual inspection device 3, and an operation panel 17 for remotely operating the visual inspection device 3 is provided on the guide rail 16 so as to be movable. 14 may be integrally attached and moved to the inspection position of the inspector. Alternatively, the operation panel may be a handy type that can be carried by hand, and a monitor may be integrally attached to the operation panel. In the present embodiment, the stage 15 on which the monitor 14 is placed is movable in the vertical direction (direction (A) in FIG. 10A) and in the horizontal direction (FIG. 10A). As a means, the table 15 can be movably provided on the guide rail, and can be moved following the movement of the examiner by a linear motor or the like.

  As shown in FIG. 10B, an operation panel 17 is movably provided on the guide rail 16 provided along the observation window frame 10 of the visual inspection apparatus 3, and the monitor 14 can be detached from the operation panel 17. Provide. When the inspector moves to the inspection position for the inspection, the inspector moves the guide panel 16 along the guide rail 16 while pushing the operation panel 17 by hand, and the monitor 14 can be detached from the operation panel 17 at the inspection position. You can also. The monitor 14 may be movable along the observation window frame 10a integrally with the operation panel 17. However, when the inspector approaches the inspection target substrate and visually observes, the monitor 14 can be removed from the operation panel 17 and carried. It is preferable to make it.

  According to the defect display device 4 according to the present embodiment, the inspector can confirm the inspection result of the automatic inspection device by moving the monitor 14 to the visual inspection position in response to the recent increase in size of the FPD substrate. Therefore, the number of movements of the inspector can be reduced as compared with the case where the monitor is fixed, and the visual inspection area can be confirmed while viewing the macro image at the inspection position, so that the inspection can be easily used. Thereby, it contributes to the improvement of the work efficiency of the inspector of the visual inspection apparatus 3.

  In each of the above embodiments, the configuration in which an image or defect information is acquired from the automatic defect inspection apparatus 2 and stored in the storage unit 41 of the defect display apparatus 4 is described, but the present invention is not limited thereto. It is not a thing. It is also possible to adopt a configuration in which data stored in another apparatus in the substrate inspection system 1, for example, the automatic defect inspection apparatus 2 is directly acquired and used.

  Further, with respect to the highlighting method, highlighting marks for emphasizing defects in the macro image of the automatic defect inspection apparatus 2 displayed on the touch-type monitor are displayed, and highlighting is performed by touching the defect area after visual inspection with a finger. May be released. When the inspector designates the defective area on which the visual inspection has been completed on the screen of the touch monitor, the highlighted display of the defective area on which the visual inspection has been completed may be canceled and the next defective area may be highlighted.

  Furthermore, the judgment result comments may be displayed in a list, and the visual inspection result may be selected and registered from the comment list, or the transport destination such as a repair device, a rework device, or a disposal line may be designated based on the judgment result. .

  Furthermore, the present invention is not limited to the above-described embodiment, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, the present invention can make various inventions by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments. For example, in the present invention, some components may be deleted from all the components shown in the embodiments, or different components in the embodiments may be appropriately combined.

1 Substrate inspection system 2 Automatic defect inspection device (micro inspection device)
3 Visual inspection equipment (macro inspection equipment)
DESCRIPTION OF SYMBOLS 4 Defect display apparatus 5 Macro image display area 6 Information display area 7 Tab 8 List display area 9 Composite macro image 10 Front exterior panel 10a Window frame for visual observation 14 Monitor 15 units 16 Guide rail 17 Operation panel 41 Memory | storage part 42 Display processing part 43 registration unit 44 extraction unit 45 first display processing unit 46 second display processing unit

Claims (19)

An automatic defect inspection apparatus for acquiring an image of the substrate and automatically inspecting for defects on the substrate;
A visual inspection device for visually inspecting the substrate inspected by the automatic defect inspection device;
A storage unit that stores the image of the substrate inspected by the automatic defect inspection apparatus and defect information indicating information related to the defect in association with substrate identification information for identifying the substrate;
The image and the defect information acquired by the automatic defect inspection apparatus are read from the storage unit based on the substrate identification information of the substrate to be visually inspected by the visual inspection apparatus, and the defect portion is highlighted on the image. A defect display device;
A monitor that is arranged in the vicinity of the observation window frame of the visual inspection device and displays an image of the substrate that is emphasized by the defect display device;
A board inspection system comprising:   The substrate inspection system according to claim 1, wherein the defect display device assigns priorities to the defects in the image, and performs an emphasis display process on the defects having a high priority.   The defect display device gives a low ranking for defects that can be confirmed by a micro inspection device, and is a macro defect that can be confirmed only by visual inspection such as resist film spot defects, pattern spot defects and streak defects that cannot be inspected by micro inspection. 3. The substrate inspection system according to claim 2, wherein a high rank is assigned to the macro defects, and a highlight display process is performed on the macro defects of the high rank.   3. The defect display device according to claim 1 or 2, wherein the defect display device assigns priorities based on defect information of each defect type, size, and position in the image, and changes highlighting for each priority order. Board inspection system.   2. The substrate inspection according to claim 1, wherein the defect display device identifies a defect portion that can be corrected and a defect portion that cannot be corrected, and performs a highlighting process on the defect portion that can be corrected in the image. system.   6. The substrate inspection system according to claim 5, wherein the defect display device attaches an emphasis display indicating that the inspection is unnecessary to the entire chamfered area or the chamfered frame of the substrate including the uncorrectable defect.   The substrate inspection system according to claim 6, wherein the defect display device continuously displays the highlighting indicating that the inspection is unnecessary at the time of inspection in each subsequent process. 3. The substrate inspection system according to claim 1, wherein the defect display device assigns a priority to each defect in the image and stops the highlight display process for a defect having a low priority. 5. The substrate inspection system according to claim 1, wherein the defect display device cancels the highlight display by designating the defect area displayed on the monitor.   The defect display device highlights a defect area to be subjected to the current visual inspection, cancels the highlight processing by designating the defect area for which the visual inspection is finished, and emphasizes the next defect area. 5. The substrate inspection system according to claim 1, wherein display processing is performed.   11. The substrate inspection according to claim 9, wherein a touch-type monitor is used as the monitor, and the defect display device cancels the highlight display by touching the defect area displayed on the touch-type monitor. system. The defect display device extracts the substrate identification information associated with the lot identification information when the lot identification information indicating the lot of the substrate under inspection is input in the visual inspection device, and the extracted substrate identification 2. The substrate inspection system according to claim 1, wherein an image associated with the information is superimposed and output and displayed.   The defect display device outputs an image of a current inspection target substrate subjected to visual inspection in the visual inspection device and at least an image of the inspection target substrate visually inspected immediately before to the monitor. Item 1. The substrate inspection system according to Item 1.   The defect display device causes the monitor to display a list of thumbnail images obtained by reducing the images of the plurality of substrates inspected by the automatic inspection device, and causes the monitor to display images of the substrates specified in the list display. The substrate inspection system according to claim 1, wherein:   The said visual inspection apparatus has a window frame for visual inspection, provided with the operation panel movably along this window frame, and provided with the said monitor so that removal of the said monitor was possible. Board inspection system.   2. The substrate according to claim 1, wherein the visual inspection device has a window frame for visual inspection and a handy type operation panel for remotely operating the visual inspection device, and the monitor is integrally attached to the operation panel. Inspection system.   The visual inspection device includes a digital imaging unit that images the substrate, and the defect display device attaches an image captured by the digital imaging unit in association with a determination result of the visual inspection and stores the image in the storage unit. The substrate inspection system according to claim 1. A display device that displays inspection results of a manufactured substrate,
An image of the substrate inspected by an automatic defect inspection apparatus that automatically inspects a defect on the substrate, and defect information indicating information related to the defect are stored in association with substrate identification information for identifying the substrate. A storage unit to
A storage unit for storing the image and the defect information acquired by the automatic defect inspection apparatus in association with substrate identification information of the substrate;
A defect display processing unit that highlights a defective part with respect to the image read from the storage unit;
A monitor that displays an image of the substrate that has been emphasized by the defect display processing unit;
A display device comprising: A display method for displaying the inspection result of a manufactured board,
A storage unit that associates an image of the substrate detected by an automatic defect inspection apparatus that automatically inspects a defect of the substrate and defect information indicating information related to the defect with substrate identification information for identifying the substrate Remember
Read the image and defect information associated with the substrate from the storage unit,
A display method characterized by highlighting a defective portion of the image and displaying it on a monitor.