JP2001266125A5 - - Google Patents
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- JP2001266125A5 JP2001266125A5 JP2000072848A JP2000072848A JP2001266125A5 JP 2001266125 A5 JP2001266125 A5 JP 2001266125A5 JP 2000072848 A JP2000072848 A JP 2000072848A JP 2000072848 A JP2000072848 A JP 2000072848A JP 2001266125 A5 JP2001266125 A5 JP 2001266125A5
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- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000072848A JP4744665B2 (en) | 2000-03-15 | 2000-03-15 | Substrate inspection apparatus and substrate inspection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000072848A JP4744665B2 (en) | 2000-03-15 | 2000-03-15 | Substrate inspection apparatus and substrate inspection system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001266125A JP2001266125A (en) | 2001-09-28 |
| JP2001266125A5 true JP2001266125A5 (en) | 2007-05-10 |
| JP4744665B2 JP4744665B2 (en) | 2011-08-10 |
Family
ID=18591190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000072848A Expired - Fee Related JP4744665B2 (en) | 2000-03-15 | 2000-03-15 | Substrate inspection apparatus and substrate inspection system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4744665B2 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100689694B1 (en) * | 2001-12-27 | 2007-03-08 | 삼성전자주식회사 | Method for detecting defects on the wafer and apparatus for the same |
| JP4088448B2 (en) * | 2002-01-21 | 2008-05-21 | 日本総合住生活株式会社 | Exterior wall inspection apparatus, exterior wall inspection method, and exterior wall inspection diagnostic system |
| JP2006220644A (en) * | 2005-01-14 | 2006-08-24 | Hitachi High-Technologies Corp | Method and apparatus for inspecting pattern |
| JP2009014617A (en) * | 2007-07-06 | 2009-01-22 | Olympus Corp | Substrate visual inspection apparatus |
| JP2014066628A (en) * | 2012-09-26 | 2014-04-17 | Ricoh Co Ltd | Image inspection apparatus, image inspection system, and image inspection method |
| KR102008474B1 (en) * | 2012-11-27 | 2019-08-08 | 엘지디스플레이 주식회사 | System and Method of inspecting Display Device |
| KR101478790B1 (en) | 2013-10-14 | 2015-01-06 | (주)에이티테크놀러지 | Apparatus for testing Printed Circuit Board |
| KR102290488B1 (en) * | 2016-08-12 | 2021-08-18 | 에스케이하이닉스 주식회사 | Image Analysis Apparatus and Method for Instrumentation of Semiconductor Pattern, and System Using the Same |
| JP6953712B2 (en) * | 2016-12-26 | 2021-10-27 | 住友ゴム工業株式会社 | Tire visual inspection device |
| CN110033724A (en) * | 2019-04-19 | 2019-07-19 | 陈波 | A kind of advertisement liquid crystal display defect automatic checkout system |
| CN114372544A (en) * | 2022-01-12 | 2022-04-19 | 江苏视睿迪光电有限公司 | Device and method for recording defects of display screen |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2974899A (en) * | 1998-02-25 | 1999-09-15 | Steven M. Shepard | Data integration and registration method and apparatus for non-destructive evaluation of materials |
| JP4105809B2 (en) * | 1998-09-08 | 2008-06-25 | 株式会社ルネサステクノロジ | Appearance inspection method and appearance inspection apparatus |
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2000
- 2000-03-15 JP JP2000072848A patent/JP4744665B2/en not_active Expired - Fee Related