CN100428001C - Substrate checking device - Google Patents

Substrate checking device Download PDF

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Publication number
CN100428001C
CN100428001C CNB2006100801819A CN200610080181A CN100428001C CN 100428001 C CN100428001 C CN 100428001C CN B2006100801819 A CNB2006100801819 A CN B2006100801819A CN 200610080181 A CN200610080181 A CN 200610080181A CN 100428001 C CN100428001 C CN 100428001C
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CN
China
Prior art keywords
described
illumination light
scatter plate
suspending bench
checking device
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Application number
CNB2006100801819A
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Chinese (zh)
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CN1862319A (en
Inventor
城崎修哉
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奥林巴斯株式会社
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Priority to JP2005139515 priority Critical
Priority to JP2005139515 priority
Priority to JP2005-139515 priority
Application filed by 奥林巴斯株式会社 filed Critical 奥林巴斯株式会社
Publication of CN1862319A publication Critical patent/CN1862319A/en
Application granted granted Critical
Publication of CN100428001C publication Critical patent/CN100428001C/en

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Abstract

The disclosed detection device for base plate comprises: a suspension table with a light pass part, a view unit, a light source, and a transmission part embedded in last part to transmit the light.

Description

Base board checking device

Technical field

The present invention relates to a kind of base board checking device that uses transillumination to carry out inspecting substrate.

The application advocates the right of priority about the Japanese patent application of on May 12nd, 2005 application 2005-139515 number, and quotes its content at this.

Background technology

In the manufacturing process of flat-panel monitors such as LCD, used by checking that outward appearance inspection on the glass substrate has the base board checking device of zero defect etc.In order not damage glass substrate, in base board checking device, have suspending bench, this suspending bench is used for this glass substrate of conveyance under the state that glass substrate is suspended.For substrate is carried out transillumination, on this suspending bench, be provided with the gap of running through above-below direction in mode with the conveyance direction quadrature of glass substrate.Base board checking device from following direction glass substrate irradiating illumination light, with the illuminating glass substrate, and uses the microscope of the top that is disposed at glass substrate to come the sight glass substrate by this gap.

Here, during above the gap of glass substrate by being located at suspending bench, reduce owing to spray the buoyancy that forms, so produce unfavorable conditions such as glass substrate generation deflection, microscopical focal shift by air.In addition, the end of the glass substrate that conveyance comes on suspending bench is by above the gap time, because buoyancy reduces because of this gap, so the end of glass substrate caught on by clearance margin, therefore is difficult to carry out the conveyance of glass substrate.When dwindling the width in gap in order to eliminate this unfavorable condition, then light source for transmission illumination can't be disposed in the gap, thereby cause light source for transmission illumination away from glass substrate, because the light quantity of the illumination light by the gap when the width that makes the gap reduces can reduce, therefore the numerical aperture of illumination light diminishes, thereby causes observing the image deepening.

Therefore, in existing base board checking device, in the gap, set air bearing, by air bearing the glass substrate by the top, gap is carried out the injection and the suction of air simultaneously, so that the glass substrate on the gap maintains predetermined height (for example, opening 2002-181714 number with reference to the Japanese patent gazette spy) accurately.

But if set air bearing in the gap as existing base board checking device, then spraying the compressor of air and the vacuum pump of suction air need separate with suspending bench, so has the structure of the device complicated problems that becomes.Even air bearing is set, also need to be used to gap that transillumination light is passed through, but if increase the width in the gap of this light source for transmission illumination of configuration, then produce problem same as described above, if reduce the gap, then the part of illumination light can be hindered by air bearing, and its result causes deficiency in light quantity sometimes.

Summary of the invention

The present invention In view of the foregoing proposes, and its fundamental purpose provides a kind of base board checking device, and this base board checking device is simple in structure, and can prevent from can carry out the inspection of substrate accurately by the base plate deformation of the top, gap of suspending bench.

Base board checking device of the present invention comprises: suspending bench, and it is used for by air substrate being suspended; Observation unit, it is used for the upper surface that carries out the described substrate of conveyance on described suspending bench is observed; Light source for transmission illumination, it is used for the lower surface irradiating illumination light of described substrate from described substrate; Illumination light is by portion, and it forms and connects described suspending bench along the vertical direction, and the gap that can be passed through by described illumination light constitutes; And transmitting member, it is used to make described illumination light transmission; Described transmitting member is embedded in this gap in the mode in the described gap of sealing.

Base board checking device of the present invention comes the conveyance substrate by suspending bench, carries out the observation of substrate in to substrate irradiating illumination light.In order to make the illumination light transmission, the mode of at least a portion that is formed at the gap of suspending bench with covering is inserted with transmitting member.Thus, enter between transmitting member and the substrate and form air layer, also can keep the state that substrate is suspended in illumination light in by portion by this air layer from the air of suspending bench ejection.

According to base board checking device of the present invention, owing to be inserted with transmitting member in by portion in illumination light, so between transmitting member and substrate, form air layer by air from suspending bench ejection, thereby, substrate suspended in illumination light in by portion by this air layer.Therefore, can keep substrate in illumination light by the height constant in the portion, thereby can carry out the inspection of substrate by observation unit accurately.

Description of drawings

Fig. 1 is the figure of structure of the base board checking device of expression embodiment of the present invention.

Fig. 2 has amplified near the figure of the illumination light of suspending bench by portion, is explanation fixes scatter plate by height control Screw (PVC ス) exploded view.

Fig. 3 is the stereographic map from the beneath scatter plate.

Fig. 4 is the figure that is illustrated in the state of illumination light by being inserted with scatter plate in the portion.

Fig. 5 is the microscopical figure that expression is provided with blasting unit.

Fig. 6 is the exploded view of explanation by the spacers scatter plate.

Fig. 7 is explanation fixes scatter plate by pad and vacuum suction a exploded view.

Fig. 8 is that expression light source for transmission illumination and scatter plate are arranged at the figure of illumination light when passing through portion integratedly.

Embodiment

Be elaborated to being used to implement best mode of the present invention with reference to accompanying drawing.

(first embodiment)

As shown in Figure 1, base board checking device 1 has base portion 2, disposes suspending bench 3 on the top of base portion 2 and along the conveying unit 4 of suspending bench 3 conveyance glass substrate W.In Fig. 1, conveying unit 4 is layed in the upper surface of base portion 2, and is arranged to and can moves along the guide rail 33 that extends on directions X.Also be provided with a plurality of suction trays 35 on conveying unit 4, described suction tray 35 adsorbs maintenance by the outer edge butt from below and glass substrate W.This conveying unit 4 is adsorbed the outer edge that keeps being suspended in the glass substrate W on the suspending bench 3 by suction tray 35, and force this glass substrate of conveyance W along the conveyance direction, described conveyance direction is towards the direction (hereinafter referred to as directions X) of the other end from an end of the side nearby of suspending bench 3.In addition, on base portion 2, along directions X from an end to being fixed with inspection portion 5 the other end.Inspection portion 5 comprises: door-shaped frame 6, and it is provided on the Y direction with the directions X quadrature, and strides across suspending bench 3 and conveying unit 4; Microscope (observation unit) 7, it is arranged on the 6A of beam portion of door-shaped frame 6 movably; Light source for transmission illumination 8, it is arranged at the below of microscope 7, and moves in linkage with microscope 7.In addition, in Fig. 1, light source for transmission illumination 8 is positioned at the outside of suspending bench 3, but when checking, this light source for transmission illumination 8 move to microscope 7 with the opposed optical axis of object lens below.

On suspending bench 3, be formed with a plurality of parallel recess 10 parallel with directions X.On the upper surface 3A except that recess 10 of suspending bench 3, equally spaced run through and be provided with a plurality of holes 11 that are used to spray air.Below a plurality of holes 11, form corresponding to each bar and to have living space, this space is connected with not shown air compressor.And distolateral midway distolateral to another from suspending bench 3 is formed with illumination light by portion 15, and this illumination light is to be used to make the gap of passing through from the illumination light of light source for transmission illumination 8 by portion 15.This illumination light forms parallel with the Y direction by portion 15, and runs through suspending bench 3 along the vertical direction.As shown in Figure 2, clipping illumination light by on the sidepiece 12 of portion's 15 opposed suspending bench 3, the outstanding support 16 that is provided with.

By in the portion 15, embed the scatter plate 20 that have as can make illumination light transmissive transmitting member from the top in illumination light, scatter plate 20 is fixed on the suspending bench 3 by fixed part 21.Scatter plate 20 makes its transmission in the illumination light scattering that makes from light source for transmission illumination 8, scatter plate for example can be made by third rare plate etc. of frosted glass or white.Scatter plate 20 in the width of directions X and the illumination light that is formed at suspending bench 3 at the width of directions X about equally by portion 15, scatter plate 20 is in the length of Y direction and suspending bench 3 in the length of Y direction about equally.Therefore, scatter plate 20 is chimeric with the sidepiece 12 of each suspending bench 3 that is disposed at upstream side and downstream, and the edge part along the Y direction of scatter plate 20 is positioned on the support 16, and the upper surface of the upper surface of scatter plate 20 and each suspending bench 3 is roughly on same.Scatter plate 20 is fixed on the precalculated position of suspending bench 3 by fixed part 21 (fixed cell).

In addition, if make the parts of light scattering transmission make the illumination light homogenising, then also scatter plate 20 can be set, and replace this scatter plate 20 to use the transparent component that constitutes by transparent materials such as glass or plastics by on light source for transmission illumination 8, being provided with.

As shown in Figure 3, in order not block transillumination light, the outer edge of the lower surface of fixed part 21 by sticking on scatter plate 20 is connected with scatter plate 20.Interval between the fixed part 21 is consistent with the interval between the recess 10.Fixed part 21 has the shape that can be inserted into along the Width of the recess 10 of suspending bench 3 in the recess 10, and the height of fixed part 21 forms the upper surface 3A that is lower than suspending bench 3 from the bottom surface of recess 10.As shown in Figure 2, on fixed part 21, be provided with the patchhole 23 that is used to insert secure component 22.And 3 height control form with screw 24 surrounds patchhole 23.Adjust with screw 24 and screw height control Screw 25 in adjusting usefulness screw 24 by these, constituted and be used to adjust the height of scatter plate 20 and the adjustment unit of levelness.

As shown in Figure 4, when scatter plate 20 is fixed to suspending bench 3, scatter plate 20 is embedded into illumination light by the portion 15 from the top of suspending bench 3, then fixed part 21 is embedded in the recess 10, under this state, will screw height control by the height control Screw 25 that grub screw constitutes with in the screw 24.Then, by making the screw-in quantitative changeization of height control Screw 25, adjust, make that the upper surface of scatter plate 20 is lower and parallel with upper surface 3A than the upper surface 3A of suspending bench 3, and the difference of height from the upper surface 3A of suspending bench 3 to scatter plate 20 is smaller or equal to 1mm.It is desirable to: be adjusted to upper surface 3A roughly on a face, so that glass substrate W can be passed through smoothly.If scatter plate 20 is higher than upper surface 3A, then may produces and interfere with glass substrate W; If the difference of height from the upper surface 3A of suspending bench 3 to scatter plate 20 greater than 1mm, then is difficult to be formed for enough air layers that glass substrate W is suspended.Behind the height of adjusting scatter plate 20, when keeping its position, secure component 22 is inserted in the patchhole 23 of fixed part 21, then this secure component 22 is screwed in the screw 13 of the recess 10 that is formed at suspending bench 3, thus scatter plate 20 is fixed on the suspending bench 3.In addition, secure component 22 and height control Screw 25 use the head parts lower than the upper surface 3A of suspending bench 3, so that they can be not outstanding from the upper surface 3A of suspending bench 3.

The light source for transmission illumination 8 that is configured in scatter plate 20 belows is installed on the guide rail 31 with Y direction parallel laid movably.The microscope 7 that is configured in scatter plate 20 tops is installed on the guide rail 32 movably, and this guide rail 32 and Y direction are layed in the 6A of beam portion of door-shaped frame 6 abreast.Carry out position control by adjust the telescope to one's eyes 7 object lens and light source for transmission illumination 8 of not shown control device, so that their optical axis is consistent all the time.

In addition, as the inspection object of this base board checking device 1, be to get final product by the substrate that transillumination is observed, its material is not limited to glass, also can be plastics etc.In addition, the shape of inspection object also can be film like etc. except tabular.

Next, the effect to present embodiment describes.

At first, making conveying unit 4 under the state of an end side (substrate the is moved into the zone) standby of suspending bench 3, begin from the hole 11 of suspending bench 3, to spray air.When moving into glass substrate W on the suspending bench 3 by robot or other suspending bench (not shown) etc., glass substrate W piles up on the reference position by not shown detent mechanism under the state that suspends by the air layer between itself and the suspending bench 3.When suction tray 35 being risen and making it with glass substrate W butt and when beginning vacuum suction, glass substrate W just is maintained on the conveying unit 4.Then, when make by not shown driver elements such as linear motor conveying unit 4 along guide rail 32 when move the other end, glass substrate W with the state that suspends by air on suspending bench 3 by conveyance.

When portion 15 was passed through near illumination light in the end of glass substrate W, the air that sprays from suspending bench 3 entered between glass substrate W and the scatter plate 20, thereby forms air layer.In existing base board checking device, air loses by portion's ease from illumination light, makes to produce buoyancy.But by form air layer between scatter plate 20 and glass substrate W, the buoyancy that acts on glass substrate W also can be kept in by portion 15 in illumination light, therefore, glass substrate W under the state that keeps the height constant by illumination light by portion 15 above.In addition and since the upper surface of fixed part 21 constitute with the upper surface 3A of suspending bench 3 roughly on a face or be lower than upper surface 3A slightly, therefore, fixed part 21 sealing recesses 10 open-ended prevents that the air ease from losing illumination light by in the portion 15.Thus, flow into the upper surface of scatter plate 20 and fixed part 21 from the part of air of each hole 11 ejections of suspending bench 3, by the air layer between scatter plate 20 and the glass substrate W, glass substrate W floats at constant altitude from the upper surface of scatter plate 20.Here, when making microscope 7 and light source for transmission illumination 8 with moved further, some illumination light from light source for transmission illumination 8 is directed to illumination light by portion 15, and scattering becomes scattered light by scatter plate 20, thereby throws light on equably from the below to glass substrate W.Microscope 7 is from CCD (Charged CoupledDevice: charge-coupled image sensor) be taken into the enlarged image on the surface of the glass substrate W that understands by light scattering, and show in the monitor that is connected with CCD (not shown).When on glass substrate W, having defective such as foreign matter, find such foreign matter by enlarged image, and take necessary disposal.If be through with, then after making conveying unit 4 turn back to an end side, remove vacuum suction by the inspection of the object of observation on 5 couples of glass substrate W of inspection portion.The glass substrate W that has removed vacuum suction is taken out of from base board checking device 1 by robot, and is sent to subsequent processing.

According to present embodiment, make the light transmissive transparent or translucent sheet material of illumination come enclosed shape to be formed in the gap of suspending bench 3 by using, make from the air of suspending bench 3 ejections and flow between glass substrate W and the scatter plate 20, thereby formation air layer, wherein, above-mentioned gap is to form by portion 15 as the illumination light that transillumination light is passed through, even therefore also glass substrate W can be maintained on the constant height by portion 15 in illumination light by this air layer.Thus, can prevent the distortion of glass substrate W etc., and glass substrate W can be remained on the height of constant.Therefore, can carry out the inspection of glass substrate W exactly.Here, scatter plate 20 can carry out the position adjustment with respect to suspending bench 3 accurately by fixed part 21, so glass substrate W can not contact with scatter plate 20.And, owing to adjust the height of scatter plate 20, and scatter plate 20 seamlessly is embedded into the top of illumination light by portion 15, thus can prevent leakage of air, thus the needed air layer of suspension of glass substrate W can be formed reliably.

In addition, in existing base board checking device, scatter plate be configured in light source for transmission illumination near, scattered light is formed on the position of leaving glass substrate W, therefore visual field deepening, but according to present embodiment and since scatter plate 20 be configured in glass substrate W near, so can become clear and throw light on equably to glass substrate W.

In addition, as shown in Figure 5, can also blasting unit 42 be installed at the sidepiece of microscope 7 with CCD 40.Blasting unit 42 is connected with not shown air compressor etc., is used for spraying air downwards.Before the inspection of glass substrate begins, when driving blasting unit 42 makes its upper surface to scatter plate 20 spray air, dust that is deposited on the scatter plate 20 etc. can blown away under the situation on the surface of not damaging scatter plate 20, the Artifact that on the scatter plate below the glass substrate W 20, produces can be reduced, thereby the inspection precision can be improved.In addition, the time of utilizing 42 pairs of scatter plates of blasting unit 20 to carry out air blast also can be after checking end.No matter when, preferably carry out air blast termly.In addition, this blasting unit 42 is consistent with the focal position of the object lens of microscope 7 by the ejaculation direction that makes air blast, when judging that the defective that becomes by microscope 7 detected glass substrate W is the Artifact that is deposited on this glass substrate W, can drive blasting unit 42 to remove Artifact.

(second embodiment)

Second embodiment of the present invention only is with the difference of first embodiment: the fixing means of scatter plate is different.Therefore, omit the explanation that repeats with first embodiment.

As shown in Figure 6, the interval of the recess 10 of the fixed part 51 (fixed cell) of maintenance scatter plate 20 and suspending bench 3 as one man is fixed on the outer edge, the back side of scatter plate 20.The profile of this fixed part 51 is identical with the fixed part 21 of first embodiment.

When fixing scatter plate 20, in the recess 10 of suspending bench 3, lay pad 52, to insert fixed part 51 from the top of pad 52 near chimeric state.On pad 52, be formed with otch 52A, to avoid producing interference with secure component 22.But pad 52 prepares to have the different multiple pad of the identical thickness of shape.When fixing scatter plate 20, the multiple pad 52 that replacing is one by one prepared is to adjust, make the upper surface of scatter plate 20 be lower than the upper surface 3A of suspending bench 3 and parallel, and the difference of height from the upper surface 3A of suspending bench 3 to scatter plate 20 is smaller or equal to 1mm with upper surface 3A.It is desirable to, be adjusted to the upper surface that makes scatter plate 20 and upper surface 3A roughly on same, so that glass substrate W can pass through smoothly.

According to present embodiment, can pass through the gap of portion 15 by scatter plate 20 sealing illumination light, thereby can obtain the effect identical with first embodiment.In addition, only just can adjust the height of scatter plate 20 by changing pad 52.

(the 3rd embodiment)

The difference of the 3rd embodiment of the present invention and first, second embodiment only is, the fixing means difference of scatter plate.Therefore, omit the explanation that repeats with first, second embodiment.

As shown in Figure 7, in the present embodiment, be provided with the fixed cell that fixes scatter plate 20 by air absorption in suspending bench 3 sides.That is, on the support 16 of suspending bench 3, be formed with a plurality of holes of running through along the vertical direction 61.Each hole 61 is connected with each connector 62 of the below that is fixed on support 16, and each connector 62 links together by pipe arrangement 63.Pipe arrangement 63 is connected with not shown vacuum pump.In addition, the circumference of side opening disposes the pad 64 that is also used as the adsorption section as adjustment unit on hole 61.Central authorities at pad 64 are formed with the through hole that is communicated with hole 61.The same with second embodiment, pad 64 prepares to have the different multiple pad of thickness.In order not damage scatter plate 20, pad 64 for example can be made by the resin of rubber-like silicon etc.When fixing scatter plate 20, can one by one change the multiple pad 64 prepared to adjust, make the upper surface of scatter plate 20 be lower than the upper surface 3A of suspending bench 3 and parallel with upper surface 3A, and the difference of height from the upper surface 3A of suspending bench 3 to scatter plate 20 carries out vacuum suction by hole 61 then smaller or equal to 1mm.It is desirable to, after the upper surface of scatter plate 20 and upper surface 3A are roughly on same, just carry out vacuum suction, so that glass substrate W can pass through smoothly.

According to present embodiment, by hole 61 with scatter plate 20 vacuum suction on support 16, can seal thus as the gap of illumination light by portion 15, thereby can obtain the effect identical with first embodiment.In addition, owing to fix scatter plate 20,, can change pad 64 simply by temporarily stopping vacuum suction so carry out at needs under the situation of height control by vacuum suction.Therefore, do not need to carry out the loading and unloading of screw, can in the shorter time, implement to adjust operation at fixed part 51.

The present invention is not limited only to the respective embodiments described above, and it can widespread use.

For example, also can cover illumination light with transparent glass plate, scatter plate is fixed in light source for transmission illumination 8 by portion 15.At this moment, pass through in the portion 15 in illumination light, owing between glass substrate W and glass plate, be formed with air layer, so can keep the height constant of glass substrate W.And, because be glass plate, so can under the situation that transillumination light does not have to decay, carry out bright illumination to glass substrate W.Like this, even under the situation in the gap that forms by portion 15 as illumination light with the glass plate sealing, owing between the upper surface 3A of suspending bench 3 and glass substrate W, be formed with air layer, so can keep illumination light to pass through the height constant of the glass substrate W in the portion 15.

In addition, as shown in Figure 8, also can use light source for transmission illumination 70.This light source for transmission illumination 70 has shell 71, with fluorescent light or LED be arranged in a straight line line lighting source 72, the scatter plate 73 of shape.The width of shell 71 and illumination light by portion 15 about equally at the width of directions X, the length of shell 71 and suspending bench are in the length of Y direction about equally.Line lighting source 72 extends along the Y direction, and is housed in the shell 71.Scatter plate 73 is to make line illumination light scattering from line lighting source 72, and make the transmitting member of its transmission simultaneously, and scatter plate 73 is fixed into the upper surface of covering shell 71.Light source for transmission illumination 70 is installed on the base portion 2 by elevating mechanism 74.Elevating mechanism 74 for example is made of the air operated cylinder, will keep this position in case it has carried out height control.Light source for transmission illumination 70 is positioned to: the upper surface of scatter plate 73 is lower than the upper surface 3A of suspending bench 3 and parallel with upper surface 3A, and the difference of height from the upper surface 3A of suspending bench 3 to scatter plate 20 is smaller or equal to 1mm.This line lighting source 72 is configured on the motion track of object lens of microscope 7, and when checking, only microscope 7 moves (with reference to Fig. 1) along the Y direction and checks.According to such structure, can obtain the effect identical with first embodiment.In addition, can also use the transmission-type liquid crystal scatter plate that can switch to pellucidity or scattering state to replace scatter plate 20.

Can also constitute such structure: pass through to insert the rod-type lens in the portion 15 in illumination light, and the illumination light from light source is incided on the bottom surface of these rod-type lens, thereby to glass substrate W illuminated line illumination light.Be formed with the ejaculation transmission mouth of slit-shaped on the opposed upper surface of the optical axis with microscope 7 on the rod-type lens, these rod-type lens are used for the illumination light of total reflection institute incident.By with illumination light by the gap of portion 15 set for diameter be roughly the same size, so that these rod-type lens are embedded into illumination light by in the gap of portion 15, can dwindle the gap of illumination light by portion 15, can improve the buoyancy that acts on glass substrate W, according to such structure, can obtain the effect identical with first embodiment.

In addition, if become at the width setup of directions X by portion 15: make hole 11 equally spaced configuration on directions X of suspending bench 31, then also can keep the height constant of glass substrate W even without scatter plate 20 with interval and illumination light are set running through of hole 11.

More than, desirable embodiment of the present invention is illustrated, but the present invention not only is defined in above-mentioned embodiment.Without departing from the spirit and scope of the present invention, can carry out interpolation, omission, displacement and other the change of structure.The present invention is not limited to above-mentioned explanation, and is only limited by appended claim scope.

Claims (7)

1. base board checking device, it comprises:
Suspending bench, it is used for by air substrate being suspended;
Observation unit, it is used for the upper surface that carries out the described substrate of conveyance on described suspending bench is observed;
Light source for transmission illumination, it is used for the lower surface irradiating illumination light of described substrate from described substrate;
Illumination light is by portion, and it forms and connects described suspending bench along the vertical direction, and the gap that can be passed through by described illumination light constitutes; And
Transmitting member, it is used to make described illumination light transmission;
Described transmitting member is embedded in this gap in the mode of sealing described gap.
2. base board checking device according to claim 1 is characterized in that,
Described transmitting member is by the light transmissive transparent material of described illumination is constituted.
3. base board checking device according to claim 1 is characterized in that,
Described transmitting member is the scatter plate that makes described illumination light scattering.
4. base board checking device according to claim 3 is characterized in that,
Described scatter plate is such transmission-type liquid crystal scatter plate, and it can switch to the state that makes described illumination light scattering, perhaps makes the light transmissive transmissive state of described illumination.
5. base board checking device according to claim 1 is characterized in that, also comprises:
Fixed cell, it is used for described transmitting member is fixed on described suspending bench; With
Adjustment unit, it is arranged on the described fixed cell, is used to adjust the height of described transmitting member with respect to described suspending bench.
6. base board checking device according to claim 1 is characterized in that,
The upper surface of described transmitting member is configured to the height smaller or equal to the upper surface of described suspending bench.
7. base board checking device according to claim 1 is characterized in that, also comprises:
Blasting unit, it is installed on the described observation unit, is used for blowing towards described transmitting member penetrating air.
CNB2006100801819A 2005-05-12 2006-05-10 Substrate checking device CN100428001C (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005139515 2005-05-12
JP2005139515 2005-05-12
JP2005-139515 2005-05-12

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CN100428001C true CN100428001C (en) 2008-10-22

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JP5559644B2 (en) * 2010-09-03 2014-07-23 株式会社トプコン Inspection device
JP2012073036A (en) * 2010-09-27 2012-04-12 Hitachi High-Technologies Corp Glass substrate defect checkup device and glass substrate defect checkup method
CN102759531A (en) * 2012-07-25 2012-10-31 深圳市华星光电技术有限公司 Automatic optical detection device
JP6199585B2 (en) * 2013-03-21 2017-09-20 住友化学株式会社 Laser light irradiation apparatus and optical member bonding body manufacturing apparatus
CN107489688A (en) * 2016-06-13 2017-12-19 睿励科学仪器(上海)有限公司 Acetabula device and installation method with horizontal adjustment function

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JP2000193604A (en) * 1998-12-25 2000-07-14 Takano Co Ltd Automatic inspection device for substrate
JP2002181714A (en) * 2000-12-19 2002-06-26 Ishikawajima Harima Heavy Ind Co Ltd Thin plate inspection device
CN1532532A (en) * 2003-03-18 2004-09-29 奥林巴斯株式会社 Large base hoard holder
JP2004317145A (en) * 2003-04-11 2004-11-11 Hitachi High-Tech Electronics Engineering Co Ltd Method and device for inspecting surface of substrate
CN1548946A (en) * 2003-05-06 2004-11-24 De & T株式会社 Substrate checking apparatus
CN1611430A (en) * 2003-10-06 2005-05-04 住友重机械工业株式会社 Carrying device, coating system and checking system

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KR20060117220A (en) 2006-11-16
CN1862319A (en) 2006-11-15
TW200644143A (en) 2006-12-16
TWI307929B (en) 2009-03-21
KR100786620B1 (en) 2007-12-21

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