493071 A7 B7 五、發明説明（’） 〔發明之技術領域〕 (請先閱讀背面之注意事項再填寫本頁) 本發明係有關使用於例如液晶顯示器（L C D )之玻 璃基板等之缺陷檢查的基板檢查裝置者。 〔背景技術〕 傳統上（習知之），要用以檢查使用於L C D之玻璃 基板的缺陷用之裝置，具有能以切換照射照明光於玻璃基 板表面，而由該反射光之光學性變化來觀察前述玻璃基板 表面之傷痕等的缺陷部之巨觀觀察，及放大以巨觀觀察所 偵測之缺陷部分來觀察之微觀觀察來進行者。 例如日本國專利特開平5 - 3 2 2 7 8 3號公報，乃 揭示有以對應於可朝X， γ方向成水平移動之X-γ台來 配設巨觀觀察系和微觀觀察系，而載置被檢查基板於前述 X — Y台上之狀態下，朝X，Y方向之二維方向移動前述 X - Y台，以令被檢查基板之檢查部位能位於巨觀觀察系 或微觀觀察系之觀察區域，使得對於前述被檢查基板表面 之缺陷部分可進行巨觀觀察或微觀觀察之裝置。 經濟部智慧財產局員工消費合作社印製 然而，近來伴隨著LCD之大型化，玻璃基板之尺寸 有愈朝大型化之趨勢。爲此，當在進行如此大型尺寸之玻 璃基板的缺陷檢查時，倘若將如上述之X - Y台構成爲朝 X， Y方向之二維方向成水平移動之裝置時，做爲前述X -Y台之移動範圍就需要玻璃基板面積之4倍大之範圍， 以致無法避免伴隨著玻璃基板之大型化而使裝置成爲大型 化。 本紙張尺度適用中國國家標準(CNS ) A4規格（210X297公董^ -4- 493071 A7 B7 五、發明説明（2 ) (請先閱讀背面之注意事項再填寫本頁) 又構成如此之裝置時，由於被檢查基板表面會從檢查 者之眼睛位置遠離，使得檢查微小之傷痕（缺陷）會成爲 困難。再者，要獲得所偵測之被檢查基板表面之缺陷部之 位置資訊等也會有困難，因此具有所謂無法實施高精（密 )度之缺陷檢查的問題。 本發明之目的，係擬提供一種可實現小型化之同時， 對於被檢查基板以良好效率來進行高精度之缺陷檢查的基 板檢查裝置者。 〔發明之揭示〕 (1)本發明之基板檢查裝置，其特徵爲：具備有： 要保持被檢查基板用之矩形狀基板保持機構；要豎立該基 板保持機構直至所定角度爲止用之驅動機構；及在前述基 板保持機構，以沿著前述被檢查基板側緣之至少成正交（ 垂直相交）的二方向配設來偵測前述被檢查基板上之缺陷 部的位置座標用之位置座標偵測機構， 經濟部智慧財產局員工消費合作社印製 而前述位置座標偵測機構乃具備有：沿著前述被檢查 基板側緣朝二方向所配設之二組導軌；配設成可沿著前述 二方向中之一方向所配設之一組導軌移動，而朝與該一方 向成正交方向射出光的光源；配設成橫跨前述被檢查基板 之狀態且可沿著配設於前述二方向中之另一方向的一組導 軌移動，而從前述光源所射出之光會被投射（入射）之投 射構件；及將使從前述光源所射出之光線及前述投射構件 使之位於前述缺陷部上，而依據在於前述各組導軌之前述 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5- 493071 A7 ______B7____ 五、發明説明（3 ) 光源及前述投射構件之位置來偵測前述缺陷部之位置座標 的偵測部。 (請先閱讀背面之注意事項再填寫本頁) (2 )本發明之基板檢查裝置係記載於上述（1 )之 裝置，且具備要沿著前述一組之導軌以電動力來移動前述 投射構件的二個移動機構，前述二個移動機構之一具備馬 達，且前述各移動機構係由前述馬達之驅動而產生動作之 二個帶輪（滑輪）和（皮）帶所構成，再者，具備要連結 則述各移動機構之一的帶輪彼此用的連結軸。 (3 )本發明之基板檢查裝置係記載於上述（1 )之 裝置，且具備要沿著前述一組之導軌以電動力來移動前述 投射構件的二個移動機構，且前述各移動機構係由二個帶 輪和（皮）帶所構成，再者，具有要連結前述各移動機構 之一的帶輪彼此用的連結軸，及驅動該連結軸的馬達。 (4 )本發明之基板檢查裝置係記載於上述（1 )至 (3 )之任何之一的裝置，.具有要使前述投射構件從前述 被檢查基板上避開的避開機構。 經濟部智慧財產局員工消費合作社印製 (5 )本發明之基板檢查裝置係記載於上述（1 )至 (3 )之任何之一的裝置，具有要調整從前述光源所射出 之光線的光軸用之調節機構。 〔實施發明的最佳形態〕 以下，將參照圖式說明本發明之實施形態。 圖1〜圖3係顯示有關本發明之實施形態的基板檢查 裝置之結構圖，圖1爲斜視（立體）圖，圖2爲側面圖， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -6- 493071 A7 B7 五、發明説明（4 ) (請先閱讀背面之注意事項再填寫本頁) 圖3爲上面圖。於圖1〜圖3中，配置有要夾持被檢查基 板3的夾持具2於裝置本體1上。而如圖2所示夾持具2 之其基端乃由支承軸1 5對於裝置本體1被支承成轉動自 如，並配設有帶輪（滑輪）1 6於支承軸1 5周圍。裝置 本體1配設有馬達（電動機）18，並架設有輪狀（環狀 )之（皮）帶1 7於馬達1 8之旋轉軸1 8 1和帶輪1 6 。將馬達1 8之旋轉驅動力藉皮帶1 7從旋轉軸1 8 1傳 達於帶輪1 6 ,以令夾持具2以支承軸1 5做爲軸來從水 平狀態升起成例如二點鏈線之位置，亦上升至所定角度0 之傾斜狀。 經濟部智慧財產局員工消費合作社印製 又夾持具2乃形成框狀，用以載置，保持要用於 L C D之如玻璃基板之大型被檢查基板3於其周（邊）緣 部用者。於夾持具2，被其周緣部所圍繞之空（間）部形 成四角形狀，前述空間部之面積乃較被檢查基板3之面積 稍微小。且在夾持具2，沿著其周緣部而朝X軸方向及Y 軸方向配置由複數之圓柱狀之銷所形成之基板定位構件 2 0 1成從夾持具2表面稍微突出。而在夾持具2上，令 被檢查基板3兩邊接觸於各基板定位構件2 0 1側部來完 成被檢查基板3的定位。又從沿著夾持具2周緣部整周（ 四周）所配設之未圖示之複數的孔（吸著熱片，suction pad )，而由未圖示之吸取器來使被檢查基板3之周緣部被吸 著於夾持具2表面，以令被檢查基板3可保持成並不會在 夾持具2上脫落。至於有關夾持具2之詳細結構，將後述 之。 本I氏張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） — 493071 A7 _______B7 _ 五、發明説明（5 ) (請先閱讀背面之注意事項再填寫本頁) 如圖1〜圖3所示，在裝置本體1上，沿著夾持具2 之兩側緣朝Y軸方向配設有成平行之一對導軌4，4。又 在夾持具2上方，以形成橫跨該夾持具2之狀％配置有 門柱型之觀察單元支承部5，而該觀察單元支承部5乃配 設成朝Y軸方向而沿著導軌4, 4可移動於被檢查基板3 之上方，亦即，圖1中以實線所示之保持成水平狀態的夾 持具2上方。 於觀察單元支承部5，觀察單元6乃被支承成可沿著 未圖示之導軌而朝著對於觀察單元支承部5之移動方向（ Y軸方向成正交（垂直相交）之方向（X軸方向）移動。 再者，在觀察單元支承部5，配設有透射線照明光源7形 成相對向於觀察單元6之移動線。該透射線照明光源7係 沿著X軸方向來配置於要通過夾持具2下方之支承部5的 背（面）板5 1上，而是要從被檢查基板3之下方進行直 線狀的透射照明者，且形成能與觀察單元支承部5 —起朝 Y軸方向移動。 經濟部智慧財產局員工消費合作社印製 觀察單元6乃具有；配設有指標用照明光源8之微觀 觀察單元9和巨觀觀察用之部分巨觀照明光源1 0。指標 用照明光源8係要特定被檢查基板3上之缺陷位置用者， 要投射以光學性聚光（會聚）之光點於被檢查基板3表面 者。該由光點而產生之來自被檢查基板3表面的反射光， 因較由部分巨觀照明光源1 0所產生之反射光更明亮，因 而以部分巨觀照明光源1 0來實施巨觀觀察中，能由光點 且以眼睛來觀察。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -8 - 493071 A7 B7 五、發明説明（6) 微觀觀察單元9具備有，具有物鏡9 1，目鏡9 2及 未圖示之反射照明光源的顯微鏡功能，檢查者可藉物鏡 9 1而由目鏡9 2來觀察被檢查基板3表面的像。又在微 觀觀察單元9 ,藉三眼鏡筒來安裝T V (電視）攝影機 9 3 °當不需要以目視來進行微觀觀察時，也可藉直筒來 僅安裝T V攝影機9 3。T V攝影機9 3，將攝影由物鏡 9 1所能獲得之被檢查基板3表面的觀察像，並傳送至控 制部1 1。而控制部1 1則令以T V攝影機9 3所攝影之 觀察像顯示於T V監視器1 2。在控制部1 1，連接有檢 查者要進行動作指示或輸入資料用之輸入部1 1 1。 部分巨觀照明光源1 0係要用於巨觀觀察用者，以巨 觀照明光1 0 1來照射被保持成水平狀態之夾持具2上之 被檢查基板3之表面一部分用者。又對於被檢查基板3表 面之部分巨觀照明光源1 0的照明角度，形成爲可調整成 最適合於巨觀觀察之角度。. 圖4係顯示透射線照明光源7之結構例的圖。如圖4 所示，透射線照明光源7係具有光源部7 1和實心之玻璃 棒7 2者。從光源部7 1所射出之由反射板7 1 2被亂反 射之光會入射於玻璃棒7 2之端部，且在玻璃棒7 2中被 全反射傳送之同時，由沿著玻璃棒7 2之背面部（下部） 所塗佈加工之白色條紋7 3被擴散，而由玻璃棒7 2之透 鏡作用來使線狀之光會朝上方射出。該透射線照明並非僅 限於如上述之結構而已，也可由例如營光燈等之線照明來 達成。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -9 - 493071 A7 B7 五、發明説明（7) 圖5係顯示本基板檢查裝置之夾持具2之詳細結構圖 。於圖5中，與圖1爲同一部分，附上有同一符號。於圖 5中，各安裝有保持構件7011, 7012於夾持具2 之Y軸方向的兩側面。又在夾持具2之X軸方向的一側面 ，安裝有保持構件7 0 2。保持構件7 0 1 1，7012 ，7 0 2之表面係形成對於夾持具2表面具有階梯差（斷 層狀）之狀態來位於下方。而保持構件7 0 1 1， 7 0 1 2，各配設有沿著夾持具2之側緣的Y軸方向之導 軌7031， 7032。再者，將導引移動部7051， 7 0 5 2，配設成能以橫跨各導軌7031，7032之 狀態來沿著導軌7 0 3 1，7 0 3 2移動。又在保持構件 7 0 2以沿著夾持具2側緣之X軸方向來配設有導軌 7〇4。再者，將導引移動部7 0 6配設成能以橫跨導軌 7〇4之狀態來沿著導軌7 0 4移動。 而在保持構件7 0 2之各兩端，各別以軸支承帶輪 7 0 9, 701，且架設有輪狀之（皮）帶712於帶輪 709和帶輪7 1 0之間。而在（皮）帶7 1 2之一部分 ，卡著有導引移動部7 0 6。帶輪7 1 0嵌插有馬達 7 1 4之旋轉軸7 1 6。要偵測導引移動部7 0 6存在用 的光學性察覺（感測）器7 1 9，7 2 0乃配設於夾持具 2之X軸方向的一側面。 於導引移動部7 0 6，Y軸方向之反射體（鏡子） 7 0 7乃豎立配設成對於被檢查基板3表面成直角或銳角 。又具有與夾持具2大致成同一高度之保持構件7 2 1乃 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -10- 經濟部智慧財產局員工消費合作社印製 493071 A7 B7 五、發明説明（8 ) 配設於保持構件7 0 1 1和7 0 2交叉之位置。在保持構 件7 2 1上配設有將後述之雷射光源2 1於導軌7 0 4之 延展線上。 於保持構件70 11，70 12之各垂直面70 13 ，7014的兩端部，各以軸支承著帶7071， 7081及帶輪7072， 7082，並架設有輪狀（皮 )帶71 11於帶輪7071和7081，而帶輪 7072和帶輪7082則架設有輪狀（皮）帶7 1 1 2 。而在（皮）帶7111， 7112之各一部分，各卡著 著導引移動部7051， 7052。帶輪7071嵌插有 馬達7 1 3之旋轉軸7 1 3 1，並在夾持具2之Y軸方向 的一側面，配設有要偵測導引移動部7 0 5 1之存在用的 光學性的察覺器717， 718。又配設有連結軸730 於夾持具2下部，且該連結軸730兩端部各嵌插有帶輪 7081,7082° 導引移動部7 0 5 1，7 0 5 2之夾持具2側之側面 ，各以軸支承支柱7 4 1，7 4 2成如將後述之可轉動。 於該等支柱7 4 1，7 4 2之各頂部各安裝有長尺寸板狀 的投射板7 4 3之兩端部。投射板7 4 3表面乃形成例如 黑色之同時，對於被檢查基板3表面傾斜成約4 5。，且 朝向反射體707之方向。而該時，支柱741， 742 係對於被檢查基板3表面成直立（豎立）}|犬態、。 投射板7 4 3乃以同步於導引移動部7 〇 5 1及 7 0 5 2之移動，且對於被檢查基板3表面具有所定間隙 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ---- -11 - (請先閲讀背面之注意事項再填寫本頁)493071 A7 B7 V. Description of the invention ('Technical field of invention] (Please read the precautions on the back before filling out this page) The present invention is a substrate for defect inspection of glass substrates such as liquid crystal displays (LCD) Check the device. [Background Art] Conventionally (as is known), a device for inspecting defects of a glass substrate used in an LCD is provided with a device capable of switching illumination light to the surface of the glass substrate and observing the optical change of the reflected light. The macroscopic observation of the defect part such as the flaw on the surface of the glass substrate, and the microscopic observation performed by magnifying the defect part detected by the macroscopic observation are performed. For example, Japanese Patent Laid-Open No. 5-3 2 2 7 8 3 discloses that a macroscopic observation system and a microscopic observation system are provided with an X-γ stage corresponding to a horizontal movement in the X and γ directions, and With the substrate to be inspected placed on the X-Y stage, the X-Y stage is moved in the two-dimensional direction of the X and Y directions so that the inspection site of the inspected substrate can be located in the macroscopic observation system or the microscopic observation system. The observation area allows a device to perform macroscopic observation or microscopic observation on the defect portion of the substrate surface to be inspected. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs However, with the recent enlargement of LCDs, the size of glass substrates has become larger. For this reason, when inspecting defects of such a large-sized glass substrate, if the X-Y stage as described above is configured as a device that moves horizontally in the two-dimensional direction of the X and Y directions, it is regarded as the aforementioned X-Y The moving range of the stage needs to be 4 times as large as the area of the glass substrate, so that it is unavoidable to increase the size of the device with the increase of the size of the glass substrate. This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210X297 public director ^ 493 071071 A7 B7 V. Description of the invention (2) (Please read the precautions on the back before filling this page) When constructing such a device, The surface of the substrate to be inspected is far away from the position of the eye of the inspector, which makes it difficult to inspect small flaws (defects). Furthermore, it is also difficult to obtain the position information of the defect on the surface of the inspected substrate Therefore, there is a problem that so-called high-precision (dense) defect inspection cannot be performed. The object of the present invention is to provide a substrate that can achieve miniaturization and perform high-precision defect inspection on a substrate to be inspected with good efficiency. [Inspection device] [Disclosure of the invention] (1) The substrate inspection device of the present invention includes: a rectangular substrate holding mechanism for holding a substrate to be inspected; and the substrate holding mechanism is erected to a predetermined angle. A driving mechanism; and the substrate holding mechanism, which is at least orthogonal (vertically intersected) along the side edge of the substrate to be inspected. The position coordinate detection mechanism provided for detecting the position coordinates of the defective portion on the substrate to be inspected is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and the position coordinate detection mechanism is provided with: Check the two sets of guide rails arranged on the side edge of the substrate in two directions; arranged to move along one of the set of guide rails arranged in one of the two directions, and to emit light in a direction orthogonal to the one direction Light source; configured to cross the state of the substrate to be inspected and move along a set of guide rails arranged in the other of the two directions, and the light emitted from the light source will be projected (incidentally) projected Components; and the light emitted from the aforementioned light source and the aforementioned projecting component will be positioned on the aforementioned defective portion, and the basis of the aforementioned paper size of each set of guide rails is to apply the Chinese National Standard (CNS) A4 specification (210X297 mm) -5- 493071 A7 ______B7____ 5. Description of the invention (3) The position of the light source and the aforementioned projection member to detect the position coordinates of the aforementioned defective part. (Please read the back first (Please fill in this page again for attention) (2) The substrate inspection device of the present invention is the device described in (1) above, and has two moving mechanisms for moving the projection member by electric force along the guide rail of the aforementioned group, One of the two moving mechanisms is provided with a motor, and each of the moving mechanisms is composed of two pulleys (pulleys) and (leather) belts that are driven by the motors to move, and further, each movement is described as being connected. (3) The substrate inspection device of the present invention is the device described in the above (1), and includes a mechanism for moving the projection member by electric force along the guide rails of the aforementioned group. Two moving mechanisms, and each of the foregoing moving mechanisms is composed of two pulleys and a (belt) belt, and further, a connecting shaft for connecting the pulleys of one of the moving mechanisms is provided, and the connecting shaft is driven. Motor. (4) The substrate inspection apparatus of the present invention is an apparatus described in any one of the above (1) to (3), and has an avoidance mechanism for avoiding the projection member from the substrate to be inspected. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (5) The substrate inspection device of the present invention is a device described in any one of (1) to (3) above, and has an optical axis for adjusting the light emitted from the aforementioned light source Used to adjust the mechanism. [Best Mode for Carrying Out the Invention] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figures 1 to 3 are structural diagrams of a substrate inspection device according to an embodiment of the present invention. Figure 1 is an oblique (stereoscopic) view, and Figure 2 is a side view. The paper dimensions are in accordance with Chinese National Standard (CNS) A4 (210X297). (Mm) -6- 493071 A7 B7 V. Description of the invention (4) (Please read the precautions on the back before filling out this page) Figure 3 is the above figure. In Figs. 1 to 3, a holder 2 for arranging a substrate 3 to be inspected is arranged on the apparatus body 1. As shown in Figs. As shown in FIG. 2, the base end of the holder 2 is rotatably supported by the support shaft 15 to the device body 1, and a pulley (pulley) 16 is arranged around the support shaft 15. The device body 1 is provided with a motor (motor) 18, and a wheel-shaped (ring-shaped) (leather) belt 17 is mounted on a motor 18's rotating shaft 1 8 1 and a pulley 16. The rotation driving force of the motor 18 is transmitted from the rotating shaft 1 8 1 to the pulley 16 by the belt 17 so that the holder 2 is supported by the supporting shaft 15 as a shaft to be raised from a horizontal state into a two-point chain, for example. The position of the line also rises to a slope of 0 at a predetermined angle. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and the holder 2 is formed in a frame shape for placing and holding a large inspection substrate 3 such as a glass substrate for LCD. . In the holder 2, a space (interval) portion surrounded by a peripheral portion thereof is formed in a quadrangular shape. The area of the space portion is slightly smaller than that of the substrate 3 to be inspected. In the holder 2, substrate positioning members 2 01 formed by a plurality of cylindrical pins are arranged in the X-axis direction and the Y-axis direction along the periphery of the holder 2 so as to protrude slightly from the surface of the holder 2. On the holder 2, both sides of the substrate 3 to be inspected are brought into contact with the side portions of the substrate positioning members 201 to complete the positioning of the substrate 3 to be inspected. In addition, a plurality of holes (suction pads) (not shown) arranged along the entire periphery (four sides) of the periphery of the holder 2 are used, and the substrate 3 to be inspected is sucked by a suction device (not shown). The peripheral edge portion is attracted to the surface of the holder 2 so that the substrate 3 to be inspected can be held without falling off the holder 2. The detailed structure of the holder 2 will be described later. This I-scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) — 493071 A7 _______B7 _ 5. Description of the invention (5) (Please read the precautions on the back before filling this page) Figure 1 ~ Figure 3 As shown, a pair of guide rails 4 and 4 are arranged in parallel on the device body 1 along the two side edges of the holder 2 toward the Y-axis direction. Above the gripper 2, a gate-post-type observation unit support portion 5 is disposed so as to straddle the gripper 2, and the observation unit support portion 5 is arranged along the guide rail in the Y-axis direction. 4, 4 can be moved above the substrate 3 to be inspected, that is, above the holder 2 held in a horizontal state as shown by a solid line in FIG. 1. At the observation unit support portion 5, the observation unit 6 is supported so as to be able to move along the guide rail (not shown) toward the movement direction of the observation unit support portion 5 (the Y-axis direction is orthogonal (vertically intersects)) (X-axis Direction). The observation unit support 5 is provided with a transmission line illumination light source 7 to form a moving line relative to the observation unit 6. The transmission line illumination light source 7 is arranged along the X-axis direction to pass through. On the back (face) plate 51 of the support portion 5 under the clamp 2, a linear transillumination is performed from below the substrate 3 to be inspected, and it is formed so as to be able to face the support unit 5 of the observation unit toward Y Move in the axial direction. The printed consumer observation unit 6 of the Intellectual Property Bureau of the Ministry of Economic Affairs has a printed observation unit 6; a micro observation unit 9 equipped with an indicator light source 8 for the indicator and a part of the macro observation light source 10 for the macro observation. Illumination for the indicator The light source 8 is to identify the user of the defect position on the substrate 3 to be inspected, and to project an optically focused (convergent) light spot on the surface of the substrate 3 to be inspected. The light spot is generated from the surface of the substrate 3 to be inspected Reflected light, Because it is brighter than the reflected light produced by part of the giant viewing light source 10, when using the part of giant viewing light source 10 to carry out macro observation, it can be observed by light spots and eyes. This paper scale is applicable to the country of China Standard (CNS) A4 specification (210X 297 mm) -8-493071 A7 B7 V. Description of the invention (6) The micro observation unit 9 is provided with an objective lens 91, an eyepiece 92, and a reflection illumination light source (not shown). Function, the inspector can observe the image of the surface of the substrate 3 to be inspected by the objective lens 91 and the eyepiece 92. In the microscopic observation unit 9, a three-eyepiece lens is used to install a TV (television) camera 9 3 °. For microscopic observation, only a TV camera 9 3 may be mounted by a straight tube. The TV camera 9 3 captures the observation image of the surface of the substrate 3 to be inspected which can be obtained by the objective lens 91 and transmits it to the control unit 11. On the other hand, the control unit 11 causes the observation image captured by the TV camera 93 to be displayed on the TV monitor 12. The control unit 11 is connected to the input unit 1 1 1 for the inspector to perform operation instructions or input data. Part of Juguan lighting source 10 For macroscopic observation, the macroscopic illumination light 101 is used to illuminate a part of the surface of the substrate 3 to be inspected on the holder 2 held in a horizontal state. The macroscopic illumination is also applied to a part of the surface of the substrate 3 to be inspected. The illumination angle of the light source 10 is formed to be adjustable to the angle most suitable for macroscopic observation. Fig. 4 is a diagram showing a structural example of the transmission line illumination light source 7. As shown in Fig. 4, the transmission line illumination light source 7 has The light source section 71 and the solid glass rod 72. The light emitted from the light source section 71 and reflected by the reflecting plate 7 1 2 is incident on the end of the glass rod 72, and is in the glass rod 72. While being transmitted by total reflection, the white stripes 7 3 coated and processed along the back (lower) portion of the glass rod 72 are diffused, and the linear light is directed upward by the lens action of the glass rod 72. Shoot out. The transmission line illumination is not limited to the structure as described above, but can also be achieved by line illumination such as a camp light. This paper size applies to China National Standard (CNS) A4 (210X297 mm) (Please read the notes on the back before filling out this page) Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives -9-493071 A7 B7 V. Invention Explanation (7) FIG. 5 is a detailed structural diagram showing the holder 2 of the substrate inspection apparatus. In FIG. 5, the same parts as those in FIG. 1 are assigned the same symbols. In FIG. 5, holding members 7011 and 7012 are mounted on both sides of the holder 2 in the Y-axis direction. A holding member 7 02 is mounted on one side surface of the holder 2 in the X-axis direction. The surfaces of the holding members 7 0 1 1, 7012, and 70 2 are positioned below the surface of the holder 2 in a stepped (faulted) state. The holding members 7 0 1 1 and 7 0 1 2 are each provided with guide rails 7031 and 7032 along the Y-axis direction of the side edge of the holder 2. Furthermore, the guide moving parts 7051, 7052 are arranged so as to be able to move along the guide rails 7031, 7032 in a state of crossing the guide rails 7031, 7032. A guide rail 704 is arranged on the holding member 7 02 along the X-axis direction along the side edge of the holder 2. Furthermore, the guide moving part 706 is arranged so as to be able to move along the guide rail 704 in a state of crossing the guide rail 704. At both ends of the holding member 7 02, pulleys 7 0 9, 701 are supported by shafts, respectively, and a wheel-shaped (leather) belt 712 is set between the pulley 709 and the pulley 7 10. On one part of the (leather) belt 7 1 2, a guide moving part 7 06 is stuck. The pulley 7 1 0 is fitted with a rotating shaft 7 1 6 of a motor 7 1 4. An optical detection (sensor) 7 1 9, 7 2 0 for detecting the presence of the guide moving part 7 0 6 is disposed on one side of the X-axis direction of the holder 2. A reflector (mirror) 7 0 7 in the Y-axis direction of the guide moving part 7 0 6 is erected so as to be perpendicular or acute to the surface of the substrate 3 to be inspected. It also has a holding member 7 2 1 that is approximately the same height as the holder 2. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page). Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau-10- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 493071 A7 B7 V. Description of the Invention (8) It is arranged at the position where the holding members 7 0 1 1 and 7 0 2 intersect. The holding member 7 2 1 is provided with a laser light source 2 1 described later on an extension line of the guide rail 7 0 4. Belts 7071, 7081 and pulleys 7072, 7082 are supported on both ends of each of the vertical surfaces 7013, 7014 of the holding members 7011, 7012, and a wheel-shaped (leather) belt 71 11 is set on the belts. The wheels 7071 and 7081, while the pulley 7072 and the pulley 7082 are provided with a wheel-shaped (leather) belt 7 1 1 2. On each part of the (leather) belts 7111 and 7112, the guide moving parts 7051 and 7052 are caught. The pulley 7071 is fitted with a rotating shaft 7 1 3 1 of the motor 7 1 3, and a side for detecting the existence of the guide moving part 7 0 5 1 is arranged on one side of the Y-axis direction of the holder 2. Optical sensors 717, 718. A connecting shaft 730 is also arranged at the lower part of the holder 2, and two ends of the connecting shaft 730 are fitted with pulleys 7081,7082 ° to guide the moving part 7 0 5 1, 7 0 5 2 of the holder 2 Each of the side surfaces supports the pillars 7 4 1 and 7 4 2 so as to be rotatable as will be described later. On both tops of the pillars 7 4 1, 7 4 2 are mounted both ends of a long-sized plate-shaped projection plate 7 4 3. The surface of the projection plate 7 4 3 is black, for example, and the surface of the substrate 3 to be inspected is inclined to approximately 4 5. And in the direction of the reflector 707. At this time, the pillars 741 and 742 are upright (standing) on the surface of the substrate 3 to be inspected. The projection plate 7 4 3 is synchronized with the movement of the guide moving parts 7 005 1 and 7 0 5 2 and has a predetermined gap for the surface of the substrate 3 to be inspected. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297). Li) ---- -11-(Please read the notes on the back before filling this page)
493071 A7 _B7 五、發明説明（9 ) (請先閲讀背面之注意事項再填寫本頁) 之平行狀態來朝Y軸方向移動於被檢查基板3表面上。又 在保持構件7 2 1附近之導軌7 0 3 1之夾持具2側，固 定有將後述之要轉動支柱7 4 1用之導引構件7 4 4。 再者，當由察覺器7 1 7或7 1 8偵測了導引移動部 7 0 5 1之存在時，就由控制部1 1來令馬達7 1 3之驅 動成爲可自動地停止。亦即，導引移動部7 0 5 1僅能進 行往回移動於對應於察覺器7 1 7 , 7 1 8間之導軌 7 0 3 1上之區域間而已。同樣，當由察覺器7 1 9或 7 2 0偵測了導引移動部7 0 6之存在時，就由控制部 1 1來令馬達7 1 4之驅動成可自動地停止。亦即，導引 移動部7 0 6僅能進行往回運動於對應於察覺器7 1 9， 7 0 2間之導軌7 0 4上之區域間而已。 又安裝於夾持具2之基端部的保持構件7 0 2係如圖 2所示，由支承軸15來對於裝置本體1被支承成轉動自 如。因而，能使夾持具2上升（豎立）或擺動成如以圖2 中之二點鏈線所示之所定之角度。 經濟部智慧財產局員工消費合作社印製 又圖1所示之控制部1 1，除了會對於由沿著導軌 7 0 4，7 0 3 1所配設之未圖示的各導引標度（scale) 所被偵測之被檢查基板3上之缺陷部的位置座標（X , Y )，由Y標度1 3及X標度1 4所偵測之觀察單元支承部 5和觀察單元6的位置座標進行管理之外，由未圖示之各 驅動機構來進行控制觀察單元支承部5及觀察單元6之移 動。再者，控制部1 1係如圖2所示，乃預先記憶著指標 用照明光源8之光軸和物鏡9 1之光軸之間隔X〇於本身 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 493071 A7 B7 五、發明説明（1〇) 之未圖示之記憶器。控制部1 1將移動控制觀察單元支承 部5及觀察單元6來使微觀觀察單元9之物鏡91的觀察 軸會形成一致於從上述各導引標度所賦予之被檢查基板3 上之缺陷部位置座標（X，Y )。 又控制部1 1當令指標用照明光源8之光點中心位於 被檢查基板3上之缺陷部的狀態下，而由檢查者從輸入部 111賦予所定之指示時，就由Y標度13及X標度之未 圖示的偵測部所偵測之位置座標資料（數據）求出前述缺 陷部之位置座標，並依據所求出之位置座標，和表示指標 用照明光源8之光軸和物鏡9 1之光軸之間隔X〇的資料 來控制移動觀察單元支承部5及觀察單元6，以令物鏡 9 1之觀察軸能形成一致於被檢查基板3上之前述缺陷部 〇 圖6係顯示本基板檢查裝置的位置偵測部之結構圖， 於圖6，將對於與圖5同一之部分附上同一符號。該位置 偵測部係由以雷射光源部2 1 1及圓柱（柱面）透鏡 2 12，2 1 3所形成之雷射光源2 1 ,及從雷射光源部 所發射之雷射光會朝Y軸方向反射之反射體（鏡子） 7 0 7。反射體7 0 7係豎立配設成可對於被檢查基板3 表面成直角或銳角之狀態。 從光源2 1之雷射光源部2 1 1所發射且透射圓柱透 鏡212， 213的雷射光，將會對被檢查基板3表面大 致成垂直之面狀的雷射光，且朝X軸方向射出。該雷射光 會在反射體7 0 7朝直角方向，亦即朝Y軸方向反射而對 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ———I-in (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -13- 493071 A7 B7 五、發明説明（Μ) 於被檢查基板3表面成爲大致垂直之面狀雷射光7 5 0， 並投射於投影板7 4 3之傾斜的表面。 圖7Α,圖7Β,圖7C係顯示圖6所示之雷射光源 21的具體形結構的圖，圖7Α爲上面圖，圖7Β係圖 7 Α之Α — Α線側面部分側面圖（中央），圖7 C係圖 7 A之B - B線側面部分側面圖。圓柱透鏡2 1 3係以抵 接於透鏡框8 0 1之抵接面8 0 1 1黏著·圓柱透鏡 2 1 2則以抵接於透鏡框8 0 2之抵接面8 0 2 1黏著。 遮光筒8 0 3係插入於透鏡框8 0 1，而由未圖示之固定 小螺絲（釘）來固定於透鏡框8 0 1。透鏡框8 0 2乃安 裝彈簧8 0 5，並由調整（用）小螺絲8 0 2而暫時加以 固定。 於底座8 0 7，豎立有複數之定位銷（knock pin ) 8 1 1〜8 1 4。而以定位銷8 1 1，8 1 2做爲導件來 暫時固定透鏡框8 0 1 , 8 0 2於底座8 0 7。又以定位 銷8 1 3，8 1 4做爲導件來固定雷射台8 1 5於底座 8 0 7。並由雷射壓住構件8 1 6來固定雷射光源部 2 1 1於雷射台8 1 5。至於底座8 0 7則被固定於圖5 所示之保持構件7 2 1。 當要調整雷射光之光軸時，檢查者將從雷射光源部 2 1 1發光雷射光之同時，插入塡隙片於透鏡框8 0 1下 面來調節透鏡2 1 2，2 1 3間之光軸成不具有扭轉（歪 曲），而後由小螺釘8 1 7來固定透鏡框8 0 1於底座 8 〇 7。其次，檢查者以使用調整小螺（絲）釘8 0 6來 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ -14- (請先閱讀背面之注意事項再填寫本頁) •L#.493071 A7 _B7 V. Description of the invention (9) (Please read the precautions on the back before filling in this page) to move in the Y-axis direction on the surface of the substrate 3 to be inspected. Further, on the holder 2 side of the guide rail 7 0 31 near the holding member 7 2 1, a guide member 7 4 4 for fixing a post 7 4 1 to be described later is fixed. Furthermore, when the presence of the guide moving part 7 0 51 is detected by the sensor 7 1 7 or 7 1 8, the control part 11 makes the driving of the motor 7 1 3 automatically stop. That is, the guide moving part 7 0 5 1 can only move back and forth between the areas on the guide rail 7 0 3 1 corresponding to the sensors 7 1 7 and 7 1 8. Similarly, when the presence of the guide moving part 7 06 is detected by the sensor 7 19 or 7 2 0, the control part 11 makes the driving of the motor 7 1 4 to stop automatically. That is, the guide moving part 7 0 6 can only perform the backward movement between the areas on the guide rail 7 0 4 corresponding to the sensors 7 1 9 and 7 2. As shown in Fig. 2, the holding member 7 02 attached to the base end portion of the holder 2 is rotatably supported by the device body 1 by a support shaft 15. Therefore, the holder 2 can be raised (erected) or swung to an angle as shown by the two-point chain line in FIG. 2. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and the control unit 11 shown in FIG. 1, except for the guide scales (not shown) provided along the guide rails 7 0 4 and 7 0 3 1 ( scale) The position coordinates (X, Y) of the defective part on the substrate 3 being inspected are detected by the observation unit support 5 and observation unit 6 of the Y scale 13 and X scale 1 4 In addition to the management of the position coordinates, the movement of the observation unit support portion 5 and the observation unit 6 is controlled by drive mechanisms (not shown). In addition, the control unit 11 is shown in FIG. 2, and the distance X between the optical axis of the index illumination light source 8 and the objective lens 91 1 is stored in advance. The Chinese paper standard (CNS) is applied to the paper size. A4 specification (210X297 mm) 493071 A7 B7 V. The unillustrated memory of the invention description (10). The control unit 11 moves and controls the observation unit support unit 5 and the observation unit 6 so that the observation axis of the objective lens 91 of the microscopic observation unit 9 will form a defect portion on the substrate 3 to be inspected which is given from the above-mentioned guide scales. Position coordinates (X, Y). When the center of the light spot of the indicator illumination light source 8 is located on the defective part on the substrate 3 to be inspected, and the inspector gives a predetermined instruction from the input part 111, the control part 11 uses the Y scale 13 and X The position coordinate data (data) detected by the unillustrated detection section of the scale is used to obtain the position coordinates of the aforementioned defective section, and according to the obtained position coordinates, and the optical axis and the objective lens of the illumination light source 8 for indicating the index The data of the interval X of the optical axis of 9 1 is used to control the moving observation unit support portion 5 and the observation unit 6 so that the observation axis of the objective lens 9 1 can form the aforementioned defective portion on the substrate 3 to be inspected. FIG. 6 shows The structural diagram of the position detecting section of the substrate inspection device is shown in FIG. 6, and the same symbols are attached to the same parts as in FIG. 5. The position detecting section is a laser light source 2 1 formed by a laser light source section 2 1 1 and a cylindrical (cylindrical) lens 2 12, 2 1 3, and the laser light emitted from the laser light source section is directed toward Reflector (mirror) in Y-axis direction 7 0 7. The reflectors 7 0 7 are arranged upright so as to be at a right angle or an acute angle to the surface of the substrate 3 to be inspected. The laser light emitted from the laser light source section 2 1 1 of the light source 21 and transmitted through the cylindrical lenses 212 and 213 will be substantially perpendicular to the surface of the substrate 3 to be inspected, and will be emitted in the X-axis direction. The laser light will be reflected in the right direction of the reflector 7 0 7, that is, in the direction of the Y axis, and the Chinese national standard (CNS) A4 specification (210X297 mm) will be applied to the paper size. I-in (please read the back first Please pay attention to this page, please fill in this page) Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives -13- 493071 A7 B7 V. Description of the invention (M) The surface of the substrate 3 to be inspected becomes a substantially vertical planar laser light 7 50, And projected on the inclined surface of the projection plate 7 4 3. FIG. 7A, FIG. 7B, and FIG. 7C are diagrams showing the specific shape structure of the laser light source 21 shown in FIG. 6, FIG. 7A is the top view, and FIG. 7B is the side view (center) of FIG. Fig. 7C is a side view of a part of the line B-B in Fig. 7A. The cylindrical lens 2 1 3 is adhered to the abutment surface 8 0 1 1 of the lens frame 8 0 1 and the cylindrical lens 2 1 2 is adhered to the abutment surface 8 0 2 1 of the lens frame 8 0 2. The light-shielding tube 8 0 3 is inserted into the lens frame 8 0 1, and is fixed to the lens frame 8 0 1 by fixing screws (nails) (not shown). The lens frame 802 is provided with a spring 805 and temporarily fixed by adjusting (using) a small screw 802. A plurality of positioning pins 8 1 1 to 8 1 4 are erected on the base 8 7. The positioning pins 8 1 1 and 8 1 2 are used as guides to temporarily fix the lens frames 8 0 1 and 8 0 2 to the base 8 7. The positioning pins 8 1 3 and 8 1 4 are used as guides to fix the laser table 8 1 5 to the base 8 7. The laser light source part 2 1 1 is fixed on the laser table 8 1 5 by the laser pressing member 8 1 6. The base 8 0 7 is fixed to the holding member 7 2 1 shown in FIG. 5. When adjusting the optical axis of the laser light, the inspector will emit the laser light from the laser light source section 2 1 1 while inserting a gap sheet under the lens frame 8 0 1 to adjust the lens between 2 1 2 and 2 1 3 The optical axis has no twist (distortion), and then the lens frame 801 is fixed to the base 807 by a small screw 8 1 7. Secondly, the inspector used the adjustment screw (wire) nail 8 0 6 to apply the Chinese National Standard (CNS) A4 specification (210X297 mm) to this paper size. _ -14- (Please read the precautions on the back before filling this page ) L #.
、1T 經濟部智慧財產局員工消費合作社印製 493071 A7 B7 五、發明説明（12) (請先閱讀背面之注意事項再填寫本頁) 使透鏡框8 0 2朝前後動，以調節透鏡2 1 2，2 1 3間 之光軸距離，並由小螺釘8 1 8來固定透鏡8 0 2於底座 8 0 7° 圖8A，圖8B，圖8C係顯示圖6所示之雷射光源 2 1的具體性結構之變形例的圖，圖8 A係上面圖，圖 8 B係圖8 A之A _ A線的側面部分剖面圖（中央），圖 8 C係圖8 A之B — B線的側面部分側面圖。圓柱透鏡 2 1 3係以抵接於透鏡框9 0 1之抵接面9 0 1 1黏著. 圓柱透鏡2 1 2則以抵接於透鏡框9 0 2之抵接面 9 0 2 1黏著。透鏡框9 0 1係插入於透鏡框9 0 2而由 固定小螺釘9 0 4來暫時固定於透鏡框9 0 2。 於底座9 0 7，豎立有複數之定位銷9 1 1〜9 1 4 。而以定位銷9 1 1，9 1 2做爲導件來暫時固定透鏡框 901， 902於底座907。又以定位銷913， 經濟部智慧財產局員工消費合作社印製 9 1 4做爲導件來固定雷射台9 1 5於底座9 0 7。並由 雷射壓住構件9 1 6來固定雷射光源部2 1 1於雷射台 9 1 5。至於底座9 0 7則被固定於圖5所示之保持構件 7 2 1。 當要調整雷射光之光軸時，檢查者將從雷射光源部 2 1 1發光雷射光之同時，使用固定（用）小螺釘9 0 4 來調整透鏡框9 0 1之位置。該時檢查者予以調節可消除 透鏡212， 213間之光軸產生歪曲之同時，調節透鏡 2 12, 2 1 3間之光軸距離來使雷射形成平行光。而後 ，檢查者以固定小螺釘9 0 4來固定透鏡框9 0 1於透鏡 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -15- 493071 A7 ___B7_ 五、發明説明（13) 框9 0 2。於習知之雷射光源，用以構成平行光用之光學 構件，因以一體化來構成，因而並無法正確地調節透鏡間 之距離。又由黏著透鏡之方式而具有所謂會使光軸產生歪 曲之問題。由而，雷射光通過圓柱透鏡2 12, 2 13後 ，會產生擴散或會聚而扭轉產生變曲。 當構成爲要黏著透鏡之透鏡框形成分割，並成爲可調 整透鏡間之光軸歪曲和光軸距離時，就可消除圓柱透鏡 2 1 2 , 2 1 3間之光軸歪曲，可調節成正確之透鏡間距 離，使得通圓柱透鏡212， 213之後的雷射光會成爲 平行且不具有歪曲之雷射光。 圖9係顯示本基板檢查裝置的檢查狀況圖。如圖9所 示，裝置本體上方配設有要照射夾持具2上之被檢查基板 3整面用之整面巨觀照明光源3 0。該整面巨觀照明光源 3 0乃由做爲點光源之金屬鹵化物燈3 1，和成對向於該 金屬鹵化物燈3 1所配置之反射鏡3 2，及配置於反射鏡 3 2下方之夫累涅爾透鏡（Fresnel lens ) 3 3所形成。反 射鏡3 2係對於裝置本體1配設大致傾斜4 5 ° ，以反射 來自金屬鹵化物燈3 1之光來供予夫累涅爾透鏡3 3。夫 累涅爾透鏡3 3係要以反射鏡3 2所反射之光做成如圖示 會聚光來照射於夾持具2上之被檢查基板3整面。再者， 如圖1所示，配設有要偵測觀察單元支承部5之Y軸方向 的位置座標用之Y標度，而在觀察單元支承部5，配設有 要偵測觀察單元6之X軸方向的位置座標用之X標度1 4 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） ----------- (請先閱讀背面之注意事項再填寫本頁) -訂 · 經濟部智慧財產局員工消費合作社印製 16- 493071 A 7 B7 五、發明説明（14) 將說明有關構成如上述之本基板檢查裝置之動作·首 先，要進行被檢查基板3表面的微觀觀察時，檢查者將從 輸入部1 1 1賦予所定之指示於控制部，而由控制部1 1 之驅動控制來使觀察單元支承部5後退至圖1所示之初始 (復置）位置。而後，檢查者將供應被檢查基板3於形成 水平狀態的夾持具2上。以該狀態下，壓接被檢查基板3 於複數之基板定位構件2 0 1來加以定位之同時，以上述 吸取器來吸著保持被檢查基板3不會從夾持具2上脫落， 而開始由巨觀觀察所進行之缺陷檢查。 接著，說明有關使用巨觀照明來進行巨觀觀察總括被 檢查基板3之整面的狀況。在進行該整面巨觀觀察時，檢 查者將啓動圖2所示之馬達1 8，而藉旋轉軸1 8 1及（ 皮）帶1 7且由帶輪1 6來轉動支承軸1 5,並以該支承 軸1 5爲中心來使夾持具2傾斜成所定之角度0，理想爲 3 0°〜4 5°之後，停止馬達來使夾持具2成爲靜止. 其次，檢查者將點燈圖9所示之金屬鹵化物燈3 1，並藉 反射鏡3 2及夫累涅爾透鏡3 3來使來自金屬鹵化物燈 3 1之光做成會聚光照射於夾持具2上之被檢查基板3整 面。而以該狀態下，檢查者由目視來進行夾持具2上之被 檢查基板，以實施被檢查基板3上之損傷或污染等之缺陷 檢查。再者，不僅以傾斜夾持具2成所定角度且使之靜止 狀態下來實施缺陷檢查而已，也可由控制部1 1來控制馬 達1 8之旋轉方向成周期性的改變，以令支承軸1 5爲中 心之夾持具2擺動於所定範圍之角度內來實施缺陷檢查。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -17- 493071 A7 _B7_ 五、發明説明（15) 該時，因來自金屬鹵化物燈3 1之照射光對於被檢查基板 3的入射角形成爲可變，因而，能以從各種各樣角度所入 射之照射光來觀察被檢查基板3。 檢查者係如圖9所示，將以上升夾持具2直至所定角 度之狀態下來以巨觀照射被檢查基板3表面，且在該巨觀 觀察中，辨識缺陷部a於被檢查基板3上時，就操作上述 操作部（操作桿）來驅動馬達7 1 4而使旋轉軸7 1 6朝 一方向或另一方向旋轉，以藉（皮）帶7 1 2來使帶輪 710， 709朝X軸之一方向或另一方向產生動作。由 而可沿著導軌7 0 4對於被檢查基板3面上之缺陷部移動 導引移動部706上之反射體707,以令雷射光750 形成一致於缺陷部a。 檢查者又進一步操作上述操作部來驅動馬達7 1 3， 而驅動馬達7 1 3 1朝一方向或另一方向，以令帶輪 7071， 7081藉（皮）帶7111朝Y軸之一方向 或另一方向產生動作。由而沿著導軌7 0 3 1對於被檢查 基板3面上之缺陷部來移動導引移動部7 0 5 1和支柱 7 4 1及投射板7 4 3，以令投射板7 4 3下邊7 4 3 1 形成一致於缺陷部a。該時，伴隨著帶輪7 0 8 1之旋轉 會藉連結軸7 3 0來帶動帶輪7 0 8 2朝與帶輪7 0 8 1 朝同一方向產生動作。亦即，導引移動部7 0 5 1和 7052因可同步地朝Y軸之同一方向移動，因而，投射 板7 4 3經常能與X軸平行之狀態來朝Y軸方向移動。 再者，要指定缺陷位置時，亦可進行與上述相反之在 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） , 管 零 ^ (請先閱讀背面之注意事項再填寫本頁) 訂 f 經濟部智慧財產局員工消費合作社印製 -18- 493071 A7 B7 五、發明説明（16) 使投射板7 4 3形成一致於缺陷部a之後，方使雷射光 7 5 0形成一致於缺陷部形成一致。 (請先閱讀背面之注意事項再填寫本頁) 而後，檢查者接通腳踏開關。則該時之沿著導軌 7031， 704所配設之未圖示之各導件標度之値，亦 即，從投射板7 4 3之所定原點朝Y軸方向之變位量和從 反射體7 0 7之所定原點朝X軸方向之變位量，將由上述 各導件標度之未圖示的各偵測部來做爲前述缺陷部a之位 置座標（X，Y )被偵測，而該偵測結果，將會從前述各 偵測部輸出至控制部1 1。 經濟部智慧財產局員工消費合作社印製 而後，每一次檢查者辨識缺陷部於被檢查基板3上時 ，就重覆同樣之動作，以令顯不各缺陷部之各位置座標（ X，Y )的資料（數據）被控制部1 1所取進並被記憶。 檢查者當終了（完成）如上述之對於被檢查基板3整面之 巨觀觀察時，再度啓動馬達1 8，並藉旋轉軸1 8 1及（ 皮）帶1 7且由帶輪16來使支承軸1 5朝與上述反向旋 轉，以令夾持具2回行至最初之水平狀態。當終了以上之 巨觀觀察時，就在進行以下所示之投射板7 4 3之避開操 作後之微觀觀察。 圖1 0 A〜圖1 〇 D係顯示投射板7 4 3之避開機構 的圖，圖10A係導引移動部7051部分之上面圖，圖 1 0 B係其側面圖，圖1 〇 c係導引構件7 4 4部分之上 面圖，圖1 0 D係其側面圖。在於前述之動作投射板 7 4 3形成一致於缺陷部a時，支柱7 4 1，7 4 2係如 圖1 0 A，圖1 〇 b所示形成直立之狀態，而投射板 本紙張尺度適用中國國家榡準（CNS ) A4規格（210X 297公釐） -19- 493071 A7 B7 五、發明説明（17) (請先閲讀背面之注意事項再填寫本頁) 7 4 3係以形成約4 5 °傾斜之狀態而位於被檢查基板3 之上方。再者，支柱7 4 1，7 4 2係各別由旋轉軸 74 11，7 42 1 (未圖示）被支承成轉動自如於導引 移動部7051， 7052。 如以實線顯示於圖1，以形成夾持具2爲水平狀態來 進行以微觀觀察單元9之微觀觀察時，必需令投射板 7 4 3從被檢查基板3上避開，以防止目鏡9 1碰撞於投 射板7 4 3。該時，操作者將操作上述操作部來驅動馬達 7 1 3，以令導引移動部7 0 5 1和7 0 5 2朝保持構件 7 〇 2方向移動。當支柱7 4 1到達於圖1 〇 C所示之導 引構件7 4 4時，將如圖1 〇 D所示，支柱7 4 1下部之 突起部會沿著導引構件7 4 4之斜面7 4 4 1逐漸朝上方 被推上，並伴隨著該動作，支柱7 4 1，7 4 2會各別繞 著旋轉軸741 1, 7421四周轉動，最後會與被檢查 基板3成爲平行之狀態。該時支柱7 4 1 , 7 4 2因會收 經濟部智慧財產局員工消費合作社印製 容於夾持具2和導軌7 0 4之間空間的延長部而成爲避開 之狀態。因而，在微觀觀察時，物鏡9 1並不會碰撞於投 射板7 4 3。 圖1 1 A〜圖1 1 D係顯示投射板7 4 3之避開機構 的變形例圖，圖1 1 A係上面圖，圖1 1 B係正面圖，圖 1 1 C，圖1 1 D係側面圖。支柱7 4 1，7 4 2係各由 旋轉軸741 1, 7421被支承於導引移動部7051 ,7052成轉動自如。旋轉軸741 1, 742 1周圍 ，各纏繞有盤簧751， 752。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -20- 493071 A7 B7 五、發明説明（18) (請先閲讀背面之注意事項再填寫本頁) 盤簧751，752之一端片7511，7521係 各別卡止於導引移動部7 0 5 1，7 0 5 2之上部背面。 又盤簧751，752之另一端片7 5 12，7522係 各別以大致對於一端片7 5 1 1 , 7 5 2 1形成9 0 °之 狀態來纏住於突設在支住7 4 1 , 7 4 2下方之銷 7412(未圖示），7422。又在導軌7031， 7 0 3 2之內側側面，各以軸支承圓柱狀之止動器 7033， 7034成可轉動。 如圖11A〜圖1 1C所示，支柱741，742當 在於形成直立之狀態時，盤簧7 5 1 , 7 5 2之彈壓力乃 各藉銷7 4 1 2 (未圖示），7 4 2 2附加於支柱7 4 1 ,7 4 2。 經濟部智慧財產局員工消費合作社印製 從該狀態來使投射板從被檢查基板3上避開時，操作 者將會操作上述操作部來驅動馬達7 1 3，以令導引移動 部7 0 5 1，7 0 5 2朝诨持構件7 0 2方向移動。當支 柱741, 742到達止動器7033， 7034時，支 柱741， 742下方之突出部7413， 7423會各 沿著止動器7033， 7034之曲面逐漸朝上方被推上 。且伴隨著該被推上，支柱741， 742會各別反抗於 盤簧之彈壓力來轉動於旋轉軸7411， 7421四周， 而最後會與被檢查基板3成爲平行之狀態。 接著，說明有關對於由前述之巨觀觀察所偵測之各缺 陷部，要進行由微觀觀察單元9所實施之微觀觀察之狀況 。首先，由控制部1 1來讀出被記憶於上述記憶器的缺陷 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -21 - 493071 A7 B7 五、發明説明（19) (請先閱讀背面之注意事項再填寫本頁) 部之位置座標（X，Y )，接著，沿著導軌4，4及X軸 方向之未圖示的導軌移動控制觀察單元支承部5及觀察單 元6,以令微觀觀察單元之物鏡91的觀察軸會形成一致 於該位置座標（X，Y )。 由而，檢查者可由窺視微觀觀察單元9之目鏡92來 實施由顯微鏡所進行之微觀觀察有關藉物鏡9 1所能獲得 的被檢查基板3上之缺陷部。又由物鏡9 1所獲得之被檢 查基板3表面之缺陷部會被攝影於T V攝像機且該影像會 顯示於T V監視器1 2，使得檢查者以觀看該影像就可進 行微觀觀察。 經濟部智慧財產局員工消費合作社印製 依據本實施形態之基板檢查裝置，將保持被檢查基板 3之夾持具2以支承軸1 5爲中心使之轉動來上升（提高 )所定角度，就可令檢查者在靠近於眼睛之位置且傾斜被 檢查基板3成容易觀看缺陷之狀態下來進行微觀檢查，因 而能以舒適之姿勢且高精度來進行目視檢查。又無論豎立 夾持具2至任何之角度，也可令位置座標偵測部與夾持具 2 —齊提高，因此被檢查基板3即使傾斜成任何之角度， 也可經常正確地偵測缺陷位置。再者，以投射雷射光 7 5 0於投射板7 4 3就可顯明地映照雷射指標點於投射 板7 4 3，因而容易地可由目視來對準於缺陷位置。 又構成位置座標偵測部之導引移動部7 0 5 1， 7 0 6乃以電來驅動，使得檢查者以操作前述操作部就可 在身邊進行控制反射體7 0 7和投射板7 4 3之動作。因 此，尤其在檢查大型之被檢查基板時，僅要令雷射光和投 ^氏張尺度適用中國國家標準（CNS ) A4規格（210X297公釐) -22- 493071 A7 B7 五、發明説明（2〇) 射板7 4 3形成一致於缺陷部，就對於遠離檢查者之缺陷 部，也可容易取得位置資訊。 (請先閲讀背面之注意事項再填寫本頁) 再者，對於夾持具2，在被檢查基板3面上以觀察單 元支承部5之沿著一方向移動及觀察單元6之沿著與觀察 單元支承部5之移動方向成正交方向來移動，就移動觀察 單元6至被檢查基板3上之任何位置。因此，可令夾持具 2之面積抑止於與被檢查基板3之面積大致成同樣之大小 ，使得可實現基板檢查裝置之小型化，同時也可令基板檢 查裝置之設置面積大幅度地縮小。 再者，爲了驅動導引移動部7051, 7052和投 射板7 4 3，也可使用附有導件之滾珠螺絲或線性馬達。 又也可使用如L E D之可產生平行光束之發光型光源，也 可替代反射體7 0 7來裝置該光源於導引移動部7 0 6。 再者，投射板7 4 3只要可投影雷射光等之條紋光或光點 者，則並不限定於長尺寸之板，也可爲線材或三角柱之棒 體。 經濟部智慧財產局員工消費合作社印製 又在上述之圖5的結構時，雖安裝馬達7 1 3於帶輪 7 0 7 1，但也可如圖1 2所示，構成爲安裝二軸馬達 7 1 3 0於連結軸7 3 0之結構。其乃構成爲二軸馬達 7 1 3 0之一方旋轉軸7 3 1 0 a乃藉第1凸輪7 3 0 c 來連結於一方連結軸7 3 0 a，而另一方之旋轉軸 7 130b則藉第2凸輪730d來被連結於73〇b。 依據如此之結構時，驅動二軸馬達7 1 3 0，而藉連 結軸730a， 730b來使帶輪7081， 7082朝 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -23- 經濟部智慧財產局員工消費合作社印製 493071 A7 B7 五、發明説明（21) 同一方向旋轉，就可令（皮）帶71 11，71 12朝同 一方向產生動作。由而可更正確地使之成爲同步來移動導 引移動7051, 7052。 依據本發明可發揮如下之作用。 (1)依據本發明之基板檢查裝置，檢查者因能在靠 近於眼睛之位置來進行被檢查基板之巨觀檢查，因此，能 以舒適之姿勢來進行缺陷檢查，又因基板保持機構，即使 提高至任何角度，也可與基板保持機構成一體來提高位置 座標偵機構，因而被檢查基板傾斜成任何角度，也可經常 正確地偵測缺陷位置。尤其，在檢查大型之被檢查基板時 ，僅令光與投射構件形成一致於缺陷部，檢查者即使對於 缺陷部遠離也可容易地取得位置資訊。再者，可抑止基板 保持機構之面積成爲與被檢查基板之面積同樣大小，使得 可實現基板檢查裝置之小型化，並可大幅度地縮小基板裝 置之設置面積。 (2 )依據本發明之基板檢查裝置，藉連結軸所連結 之二個帶輪可朝同一方向旋轉，二條（皮帶）也可朝同一 方向動作，使得二個移動機構可成同步地朝同方向移動， 因而投射構件經常可保持平行之狀態來移動。 (3 )依據本發明之基板檢查裝置，在微觀觀察時， 令投射構件從被檢查基板上避開，使得微觀觀察系並不會 碰撞於投射構件。 再者，本發明並非僅限定於上述實施形態而已，只要 在於不變更本發明之主旨範圍下，可適當地加以變形來實 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X297公釐） — 丨丨祕！ (請先閲讀背面之注意事項再填寫本頁) 訂 -24- 493071 A7 B7 五、發明説明（22) 施。 (請先閲讀背面之注意事項再填寫本頁) 〔產業上之可利用性〕 依據本發明，可提供一種能實現小型化之同時，對於 被檢查基板極有效率地進行高精（密）度之缺陷檢查的基 板檢查裝置。 〔圖式之簡單說明〕 圖1係顯示有關本發明之實施形態的基板檢查裝置結 構之斜視（立體）圖。 圖2係顯示有關本發明之實施形態的基板檢查裝置結 構之側面圖。 圖3係顯示有關本發明之實施形態的基板檢查裝置結 構之上面圖。 圖4係顯示在有關本發明之實施形態的基板檢查裝置 的投射線照明之結構例圖。 經濟部智慧財產局員工消費合作社印製 圖5係顯示有關本發明之實施形態的在基板檢查裝置 之夾持具的詳細結構圖。 圖6係顯示在有關本發明之實施形態的基板檢查裝置 之位置偵測部結構圖。 圖7 A〜圖7 C係顯示有關本發明之實施形態的基板 檢查裝置之雷射光源的具體性結構圖。 圖8 A〜圖8 C係顯示有關本發明之實施形態的基板 檢查裝置之雷射光源的具體性結構之變形例圖。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -25- 493071 A7 ΒΊ_ 五、發明説明（23) 圖9係顯示在有關本發明之實施形態的基板檢查裝置 之檢查狀況圖。 圖1 0 Α〜圖1 〇 D係顯示有關本發明之實施形態的 基板檢查裝置之投射板的避開機構圖。 圖1 1 A〜圖1 1 D係顯示有關本發明之實施形態的 基板檢查裝置之投射板的避開機構之變形例圖。 圖1 2係顯示有關本發明之實施形態的基板檢查裝靉 之驅動機構的變形例圖。 〔符號之說明〕 1 :裝置本體 2 :夾持具 3 :被檢查基板 4 :導軌 5:觀察單元支承部. 6:觀察單元 7 :透射線照明光源 (請先閲讀背面之注意事項再填寫本頁} i 訂 經濟部智慧財產局員工消費合作社印製， 1T Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 493071 A7 B7 V. Description of the invention (12) (Please read the precautions on the back before filling this page) Move the lens frame 8 0 2 back and forth to adjust the lens 2 1 The optical axis distance between 2, 2 1 3, and the lens 8 0 2 is fixed by the small screw 8 1 8 to the base 8 0 7 ° Figure 8A, Figure 8B, and Figure 8C show the laser light source 2 shown in Figure 6 1 FIG. 8 is a top view of FIG. 8, FIG. 8B is a side cross-sectional view (center) of line A_A in FIG. 8, and FIG. 8C is line B—B in FIG. 8 Side view of the side. The cylindrical lens 2 1 3 is adhered to the abutment surface 9 0 1 1 of the lens frame 9 0 1. The cylindrical lens 2 1 2 is adhered to the abutment surface 9 0 2 1 of the lens frame 9 0 2. The lens frame 9 0 1 is inserted into the lens frame 9 0 2 and temporarily fixed to the lens frame 9 0 2 by a set screw 9 0 4. A plurality of positioning pins 9 1 1 to 9 1 4 are erected on the base 9 0 7. The positioning pins 9 1 1 and 9 1 2 are used as guides to temporarily fix the lens frames 901 and 902 to the base 907. The positioning pin 913 was printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy 9 1 4 as a guide to fix the laser table 9 1 5 to the base 9 0 7. The laser light source part 2 1 1 is fixed to the laser table 9 1 5 by the laser pressing member 9 1 6. The base 9 0 7 is fixed to the holding member 7 2 1 shown in FIG. 5. When the optical axis of the laser light is to be adjusted, the inspector will emit the laser light from the laser light source section 2 1 1 and adjust the position of the lens frame 9 0 1 by using a small screw 9 0 4. At this time, the inspector's adjustment can eliminate the distortion of the optical axis between the lenses 212 and 213, and adjust the optical axis distance between the lenses 2 12, 2 1 3 to make the laser form parallel light. Then, the inspector fixed the lens frame 9 0 1 with a small screw 9 0 4 to apply the Chinese National Standard (CNS) A4 specification (210X297 mm) to the lens paper size. -15- 493071 A7 ___B7_ V. Description of the invention (13) Box 9 0 2. The conventional laser light source, which is used to form the optical member for parallel light, is integrally formed, so the distance between the lenses cannot be adjusted correctly. The problem of so-called distortion of the optical axis is caused by the method of adhering the lens. As a result, after the laser light passes through the cylindrical lenses 2 12, 2 13, it will diffuse or converge, twisting and deforming. When the lens frame that is configured to be attached to the lens is divided and becomes the optical axis distortion and the optical axis distance between the lenses can be adjusted, the optical axis distortion between the cylindrical lenses 2 1 2 and 2 1 3 can be eliminated and adjusted to the correct The distance between the lenses is such that the laser light after passing through the cylindrical lenses 212 and 213 will become parallel laser light without distortion. FIG. 9 is a diagram showing an inspection status of the substrate inspection apparatus. As shown in FIG. 9, a full-surface macroscopic illumination light source 30 for illuminating the entire surface of the substrate 3 to be inspected on the holder 2 is arranged above the apparatus body. The entire macroscopic illumination light source 30 is a metal halide lamp 3 1 as a point light source, and a reflecting mirror 3 2 arranged in pairs with the metal halide lamp 3 1 and a reflecting mirror 3 2. The lower Fresnel lens (Fresnel lens) 3 3 is formed. The reflecting mirror 3 2 is provided at an angle of 45 ° to the device body 1 to reflect the light from the metal halide lamp 31 to the Fresnel lens 33. The Fresnel lens 3 3 is to make the light reflected by the mirror 32 2 converge as shown in the figure to illuminate the entire surface of the substrate 3 to be inspected on the holder 2. Furthermore, as shown in FIG. 1, a Y scale for detecting the position coordinates in the Y-axis direction of the observation unit support portion 5 is provided, and the observation unit support portion 5 is provided with the detection unit 6 X-axis position coordinates in the X-axis direction 1 4 This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) ----------- (Please read the note on the back first Please fill in this page for further information)-Ordered · Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 16- 493071 A 7 B7 V. Description of the invention (14) The operation of the substrate inspection device as described above will be explained. First of all, During the microscopic observation of the surface of the substrate 3 to be inspected, the inspector gives a predetermined instruction to the control unit from the input unit 1 1 1, and the driving unit of the control unit 1 1 moves the observation unit support unit 5 back to the position shown in FIG. 1. Home (reset) position. Then, the inspector supplies the inspected substrate 3 to the holder 2 in a horizontal state. In this state, at the same time, the substrate to be inspected 3 is pressed and positioned with a plurality of substrate positioning members 201, and at the same time, the above-mentioned suction device is used to suck and hold the substrate 3 to be inspected without falling off the holder 2. Defect inspection by Juguan Observation. Next, a description will be given of the state of the macroscopic observation using the macroscopic illumination to collectively inspect the entire surface of the substrate 3 to be inspected. During this large-scale observation, the inspector will start the motor 18 shown in FIG. 2, and rotate the support shaft 15 by rotating the shaft 1 8 1 and the (belt) belt 17 and the pulley 16. And center the support shaft 15 to tilt the holder 2 to a predetermined angle 0, ideally 30 ° ~ 4 5 °, stop the motor to make the holder 2 stationary. Second, the inspector will point The metal halide lamp 3 1 shown in FIG. 9 uses the reflector 32 and the Fresnel lens 33 to make the light from the metal halide lamp 3 1 converge and irradiate the holder 2 with light. The entire substrate 3 to be inspected. In this state, the inspector visually inspects the substrate to be inspected on the holder 2 to perform defect inspection such as damage or contamination on the substrate 3 to be inspected. Furthermore, not only the defect inspection is performed by tilting the gripper 2 at a predetermined angle and making it stand still, but the control section 11 can also be used to control the rotation direction of the motor 18 to change periodically to support the shaft 15 The center gripper 2 is swung within an angle of a predetermined range to perform defect inspection. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page) Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives -17- 493071 A7 _B7_ V. Invention Explanation (15) At this time, since the incident angle of the irradiated light from the metal halide lamp 31 to the substrate 3 to be inspected is variable, the substrate 3 to be inspected can be observed with the incident light from various angles . As shown in FIG. 9, the inspector irradiates the surface of the substrate 3 to be inspected with a macroscopic view with the gripper 2 being raised to a predetermined angle, and in this macroscopic observation, the defective portion a is identified on the substrate 3 to be inspected At this time, the above-mentioned operation part (operation lever) is operated to drive the motor 7 1 4 and the rotary shaft 7 1 6 is rotated in one direction or the other direction, so that the (belt) 7 1 2 is used to make the pulleys 710 and 709 to X Motion occurs in one or the other direction of the axis. Therefore, the defective part on the 3 surfaces of the substrate to be inspected can be moved along the guide rail 704, and the reflector 707 on the moving part 706 is guided, so that the laser light 750 is formed to be consistent with the defective part a. The inspector further operates the above-mentioned operation portion to drive the motor 7 1 3, and the drive motor 7 1 3 1 is directed in one direction or the other, so that the pulleys 7071, 7081 are directed toward one of the Y axes by the (belt) belt 7111 or the other Action occurs in one direction. Therefore, along the guide rail 7 0 3 1 to guide the defective part on the 3 surfaces of the substrate to be inspected, the moving part 7 0 5 1 and the pillar 7 4 1 and the projection plate 7 4 3 are moved to make the projection plate 7 4 3 lower side 7 4 3 1 Forms a defect portion a. At this time, as the pulley 7 0 81 rotates, the pulley 7 0 8 is driven in the same direction as the pulley 7 0 8 1 by the connecting shaft 7 3 0. That is, the guide moving parts 7 0 51 and 7052 can move synchronously in the same direction of the Y axis, and therefore, the projection plate 7 4 3 can always move in the Y axis direction in a state parallel to the X axis. In addition, when specifying the location of the defect, it is also possible to perform the reverse of the above application of the Chinese National Standard (CNS) A4 specification (210X297 mm) in this paper size, pipe zero ^ (Please read the precautions on the back before filling this page ) Order printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -18- 493071 A7 B7 V. Description of the invention (16) After the projection plate 7 4 3 is formed to be consistent with the defective part a, the laser light 7 5 0 is formed to be consistent with Defective parts are formed uniformly. (Please read the precautions on the back before filling out this page.) Then, the inspector turns on the foot switch. Then, at this time, the scale of each of the guides (not shown) provided along the guide rails 7031, 704, that is, the amount of displacement and reflection from the predetermined origin of the projection plate 7 4 3 toward the Y axis direction The displacement amount of the original origin of the body 7 0 7 in the direction of the X axis will be detected by the above-mentioned detection sections (not shown) of each of the guide scales as the position coordinates (X, Y) of the aforementioned defective section a. And the detection result will be output from the aforementioned detection sections to the control section 11. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, each time the inspector identifies the defective part on the substrate 3 to be inspected, the same action is repeated to display the position coordinates (X, Y) of each defective part. The data (data) is taken in by the control section 11 and stored. When the inspector finishes (completes) the above-mentioned macroscopic observation of the entire surface of the inspected substrate 3, he starts the motor 18 again, and rotates the shaft 1 8 1 and the (belt) belt 17 and the pulley 16 to make The support shaft 15 is rotated in the direction opposite to the above, so that the gripper 2 returns to the original horizontal state. When the above macroscopic observation is completed, the microscopic observation after the avoidance operation of the projection plate 7 4 3 shown below is performed. 10A to 10D are diagrams showing the avoidance mechanism of the projection plate 7 4 3, FIG. 10A is a top view of the guide moving part 7051, FIG. 10B is a side view thereof, and FIG. 10c is The top view of the guide member 7 4 4 part, and FIG. 10 D is a side view thereof. When the above-mentioned action projection plate 7 4 3 is formed to coincide with the defect portion a, the pillars 7 4 1, 7 4 2 form an upright state as shown in FIG. 10A and FIG. 10b, and the paper size of the projection plate is applicable. China National Standards (CNS) A4 specification (210X 297 mm) -19- 493071 A7 B7 V. Description of the invention (17) (Please read the notes on the back before filling this page) 7 4 3 series to form about 4 5 ° is positioned above the substrate 3 to be inspected in a tilted state. In addition, the pillars 7 4 1, 7 4 2 are supported by the rotation shafts 74 11, 7 42 1 (not shown) so as to be rotatable by the guide moving portions 7051 and 7052, respectively. As shown by a solid line in FIG. 1, when the microscopic observation with the microscopic observation unit 9 is performed with the forming clamp 2 as a horizontal state, the projection plate 7 4 3 must be avoided from the inspected substrate 3 to prevent the eyepiece 9 1 hits the projection plate 7 4 3. At this time, the operator will operate the above-mentioned operation portion to drive the motor 7 1 3 so that the guide moving portions 7 05 1 and 7 05 2 move in the direction of the holding member 7 02. When the pillar 7 4 1 reaches the guide member 7 4 4 shown in FIG. 10C, as shown in FIG. 10D, the protruding portion at the lower part of the pillar 7 4 1 will follow the slope of the guide member 7 4 4 7 4 4 1 is gradually pushed upward, and with this movement, the pillars 7 4 1 and 7 4 2 will rotate around the rotation axis 741 1, 7421 respectively, and finally will be parallel to the substrate 3 to be inspected. . At this time, the pillars 7 4 1 and 7 4 2 were avoided because they were collected by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed on the extension of the space between the holder 2 and the guide 704. Therefore, during microscopic observation, the objective lens 91 does not collide with the projection plate 7 4 3. Fig. 1 A to Fig. 1 D are diagrams showing a modification of the avoidance mechanism of the projection plate 7 4 3, Fig. 1 A is a top view, Fig. 1 1 B is a front view, Fig. 1 1 C, and Fig. 1 1 D Department side view. The pillars 7 4 1 and 7 4 2 are each supported by the guide moving parts 7051 and 7052 so as to be freely rotatable by rotating shafts 741 1 and 7421. Around the rotating shafts 741, 742 1, coil springs 751 and 752 are wound. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) -20- 493071 A7 B7 V. Description of invention (18) (Please read the precautions on the back before filling this page) One end of coil springs 751, 752 The pieces 7511 and 7521 are respectively locked on the back of the upper part of the guide moving part 7 0 5 1 and 7 0 5 2. The other end pieces 7 5 12, 7522 of the coil springs 751 and 752 are respectively entangled in the support 7 4 1 in a state of forming 90 ° with respect to the one end piece 7 5 1 1, 7 5 2 1. , 7 4 2 Pin 7412 (not shown), 7422. On the inner side surfaces of the guide rails 7031 and 7032, each of the cylindrical stoppers 7033 and 7034 is rotatably supported by a shaft. As shown in FIGS. 11A to 11C, when the pillars 741 and 742 are in an upright state, the spring pressures of the coil springs 7 5 1 and 7 5 2 are the borrowing pins 7 4 1 2 (not shown) and 7 4 2 2 is attached to the pillars 7 4 1, 7 4 2. When the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints from this state to avoid the projection plate from the substrate 3 to be inspected, the operator will operate the operation portion to drive the motor 7 1 3 to guide the moving portion 7 0 5 1,7 0 5 2 moves in the direction of the holding member 7 0 2. When the pillars 741, 742 reach the stoppers 7033, 7034, the protrusions 7413, 7423 below the pillars 741, 742 will be gradually pushed upward along the curved surfaces of the stops 7033, 7034. And with this being pushed up, the pillars 741, 742 will each turn around the rotating shafts 7411 and 7421 in opposition to the spring pressure of the coil spring, and finally will be parallel to the substrate 3 to be inspected. Next, a description will be given of a situation where the microscopic observation performed by the microscopic observation unit 9 is performed on each of the defect portions detected by the aforementioned macroscopic observation. First, the control unit 11 reads out the defects stored in the above memory. The paper size applies the Chinese National Standard (CNS) A4 (210X297 mm) -21-493071 A7 B7 V. Description of the invention (19) (Please First read the precautions on the back and then fill in this page) position coordinates (X, Y), and then control the observation unit support 5 and observation unit 6 along the guide rails 4, 4 and X-axis directions (not shown). In order that the observation axis of the objective lens 91 of the micro observation unit will form a coordinate (X, Y) consistent with the position. As a result, the inspector can perform the microscopic observation by the microscope with the eyepiece 92 of the microscopic observation unit 9 to carry out the microscopic observation regarding the defective portion on the substrate 3 to be inspected which can be obtained by the objective lens 91. The defective part on the surface of the substrate 3 to be inspected obtained by the objective lens 91 will be photographed on the TV camera and the image will be displayed on the TV monitor 12 so that the inspector can observe the image for microscopic observation. The Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints a substrate inspection device according to this embodiment. The holder 2 holding the substrate 3 to be inspected is rotated around the support shaft 15 to raise (increas) the predetermined angle. The inspector is allowed to perform microscopic inspection in a state close to the eyes and tilting the inspected substrate 3 so that defects can be easily viewed, so that visual inspection can be performed with a comfortable posture and high accuracy. Regardless of the angle at which the clamp 2 is erected, the position coordinate detection section can be raised with the clamp 2. Therefore, even if the inspected substrate 3 is tilted at any angle, it can often detect the defect position correctly. . Furthermore, by projecting the laser light 7 5 0 on the projection plate 7 4 3, the laser index point can be clearly reflected on the projection plate 7 4 3, so that the defect position can be easily visually aligned. The guiding and moving parts 7 0 5 1 and 7 0 6 which also constitute the position coordinate detection part are driven by electricity, so that the inspector can control the reflector 7 0 7 and the projection plate 7 4 by operating the operation part. 3 actions. Therefore, especially when inspecting large-scale substrates to be inspected, it is only necessary to make the laser light and projection dimensions applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -22- 493071 A7 B7 V. Description of the invention ) The shooting plate 7 4 3 is formed to coincide with the defect portion, and the position information can be easily obtained even for the defect portion far from the inspector. (Please read the precautions on the back before filling in this page.) Furthermore, for the holder 2, move the observation unit support 5 along one direction and observe and observe the observation unit 6 on the substrate 3 to be inspected. When the moving direction of the unit supporting portion 5 moves in an orthogonal direction, the observation unit 6 is moved to any position on the substrate 3 to be inspected. Therefore, the area of the holder 2 can be suppressed to be approximately the same as the area of the substrate 3 to be inspected, so that the size of the substrate inspection device can be reduced, and the installation area of the substrate inspection device can be greatly reduced. Furthermore, in order to drive the guide moving parts 7051, 7052 and the projection plate 7 4 3, a ball screw or a linear motor with a guide may be used. It is also possible to use a light-emitting type light source such as LED that can generate parallel light beams, or to replace the reflector 7 07 to install the light source on the guide moving part 7 06. In addition, the projection plate 7 4 3 is not limited to a long plate as long as it can project fringe light or light spots such as laser light, and may also be a rod or a rod of a triangular shape. When printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and the structure of FIG. 5 described above, although the motor 7 1 3 is installed on the pulley 7 0 7 1, it can also be configured as a two-axis motor as shown in FIG. 12. The structure of 7 1 3 0 on the connecting shaft 7 3 0. It is constituted as one of the two-axis motor 7 1 3 0 and one of the rotating shafts 7 3 1 0 a is connected to one of the connecting shafts 7 3 0 a by the first cam 7 3 0 c, and the other rotating shaft 7 130b is borrowed. The second cam 730d is connected to 730b. According to such a structure, the two-axis motor 7 1 3 0 is driven, and the connecting shafts 730a and 730b are used to make the pulleys 7081 and 7082 apply the Chinese National Standard (CNS) A4 specification (210X297 mm) toward this paper standard. -23- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 493071 A7 B7 V. Description of the invention (21) Rotation in the same direction can cause the (leather) belt 71 11, 71 12 to move in the same direction. As a result, it can be more accurately synchronized to move the guide movements 7051, 7052. According to the present invention, the following effects can be exerted. (1) According to the substrate inspection device of the present invention, since the inspector can perform a macroscopic inspection of the inspected substrate near the eyes, the defect inspection can be performed in a comfortable posture, and because of the substrate holding mechanism, It can be raised to any angle, and it can also be integrated with the substrate holder to improve the position coordinate detection mechanism. Therefore, the substrate to be inspected can be tilted to any angle, and the defect position can often be detected correctly. In particular, when inspecting a large-sized substrate to be inspected, only the light and the projection member are formed to coincide with the defective portion, and the inspector can easily obtain the position information even if the defective portion is far away. Furthermore, the area of the substrate holding mechanism can be suppressed to be the same size as the area of the substrate to be inspected, enabling miniaturization of the substrate inspection device and greatly reducing the installation area of the substrate device. (2) According to the substrate inspection device of the present invention, the two pulleys connected by the connecting shaft can rotate in the same direction, and the two (belts) can also move in the same direction, so that the two moving mechanisms can be synchronized in the same direction As a result, the projection members can often be moved in parallel. (3) According to the substrate inspection device of the present invention, during the microscopic observation, the projection member is avoided from the substrate to be inspected, so that the microscopic observation system does not collide with the projection member. In addition, the present invention is not limited to the above-mentioned embodiments, as long as the scope of the present invention is not changed, it can be appropriately modified to realize that the paper size applies the Chinese National Standard (CNS) A4 specification (210 X297 mm) — 丨 丨 Secret! (Please read the notes on the back before filling out this page) Order -24- 493071 A7 B7 V. Description of Invention (22). (Please read the precautions on the back before filling in this page) [Industrial Applicability] According to the present invention, it is possible to provide a highly efficient (high-density) precision for the substrate to be inspected while miniaturizing Substrate inspection device for defect inspection. [Brief Description of the Drawings] Fig. 1 is a perspective (stereoscopic) view showing the structure of a substrate inspection apparatus according to an embodiment of the present invention. Fig. 2 is a side view showing the structure of a substrate inspection apparatus according to an embodiment of the present invention. Fig. 3 is a top view showing the structure of a substrate inspection apparatus according to an embodiment of the present invention. Fig. 4 is a diagram showing a configuration example of projection line illumination in a substrate inspection apparatus according to an embodiment of the present invention. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Fig. 5 is a detailed structural diagram showing a holder of a substrate inspection apparatus according to an embodiment of the present invention. Fig. 6 is a structural diagram showing a position detecting section of a substrate inspection apparatus according to an embodiment of the present invention. 7A to 7C are specific structural diagrams showing a laser light source of a substrate inspection apparatus according to an embodiment of the present invention. 8A to 8C are diagrams showing modification examples of a specific structure of a laser light source of a substrate inspection apparatus according to an embodiment of the present invention. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -25- 493071 A7 ΒΊ_ V. Description of the invention (23) Figure 9 is a diagram showing the inspection status of the substrate inspection device related to the embodiment of the present invention. 10A to 10D are diagrams showing an avoiding mechanism of a projection plate of a substrate inspection apparatus according to an embodiment of the present invention. 11A to 11D are diagrams showing modification examples of the avoidance mechanism of the projection plate of the substrate inspection apparatus according to the embodiment of the present invention. Fig. 12 is a diagram showing a modification of the driving mechanism of the substrate inspection device according to the embodiment of the present invention. [Description of Symbols] 1: Device body 2: Clamp 3: Inspection substrate 4: Guide rail 5: Observation unit support. 6: Observation unit 7: Transmission light source (please read the precautions on the back before filling in this Page} i Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs
源元 光元單 器 明單察 視 照察觀部監度度 用觀觀制視標標 標觀巨控電 Y X 七 ^·· ·. ·· ·· ·· : : Αν IX CO ooA* 8 9 11—It—I 1—- -—I 準 標 家 國 國 中 用 -適 尺 I張 -紙 本 I釐 一祕 9 2 -26- 經濟部智慧財產局員工消費合作社印製 493071 A7 B7 五、發明説明（24) 1 5 :支承軸 1 6 :帶輪（滑輪） 17:(皮）帶 1 8 :馬達（電動機） 21:雷射光源 3 0 :巨觀照明光源 3 1 :金屬鹵化物燈 3 2 :反射鏡 3 3 :夫累涅爾透鏡 5 1 :背（面）板 7 1 :光源部 7 2 :玻璃棒 7 3 :白色條紋 9 1 :物鏡 9 2 :目鏡 . 9 3 :電視攝影機 1 1 1 :輸入部 1 8 1 :旋轉軸 2 0 1 :基板定位構件 2 1 1 :雷射光源部 2 1 2 :圓柱（柱面）透鏡 2 1 3 :圓柱透鏡 7 0 2 :保持構件 7 0 4 :導軌 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁)Yuanyuan Guangyuan Single Device Inspection List Inspection Inspection Inspection Department Observation Standard Vision Standard Control YX 7 ^ ·········:: Αν IX CO ooA * 8 9 11—It—I 1 —-—- I Standard quasi-standard home country use-suitable size I sheet-paper I centimeter 9 2 -26- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 493071 A7 B7 V. Description of the invention (24) 1 5: Support shaft 16: Belt pulley (pulley) 17: (Leather) Belt 18: Motor (motor) 21: Laser light source 3 0: Juguan illumination light source 3 1: Metal halide lamp 3 2: Mirror 3 3: Fresnel lens 5 1: Back (face) plate 7 1: Light source section 7 2: Glass rod 7 3: White stripes 9 1: Objective lens 9 2: Eyepiece lens 9 3: TV camera 1 1 1: Input section 1 8 1: Rotation axis 2 0 1: Board positioning member 2 1 1: Laser light source section 2 1 2: Cylindrical (cylindrical) lens 2 1 3: Cylindrical lens 7 0 2: Holding member 7 0 4: The paper size of this guide is applicable to Chinese National Standard (CNS) A4 (210X297 mm) (Please read the precautions on the back before filling this page)
-27- 493071 A7 B7 五、發明説明（ 25> 67923467910 Au ow OW 1± IX 1± IX 0〇 77777777777 子輪 部鏡帶 動 C ·· 移體 ο 板 弓射 1 導反 7 射達達轉 投馬馬旋 7 7 件 構軸 持結 保連 器 測 感 Γν 器器 覺覺 察察 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 77777777 7 8 ο 3 3 1—I CXI 第第 c d ο ο 3 3 結 連 b 輪輪 1EI ΤΠΓΤ" ο 凸凸 訂 IX CX1 00 4 4 4 4 5 5 ο ο ο ο 8 8 8 8 件 板構光 柱柱射引射 支支投導雷 框框筒 鏡鏡光簧 透透遮彈 簧 盤 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -28- 493071 A7 B7 五、發明説明（26) 經濟部智慧財產局員工消費合作社印製 8 0 6 : 調 整 ( 用 ) 小 螺 絲 ( 螺 8 〇 7 ； 底 座 8 1 1 8 1 4 定 位 銷 8 1 5 : 雷 射 台 8 1 6 雷 射 壓 住 構 件 8 1 7 小 螺 絲 ( 小 螺 釘 ) 8 1 8 ： 小 螺 釘 9 0 1 5 9 0 2 : 透 鏡 框 9 〇 4 : 固 定 小 螺 釘 9 0 7 ·· 底 座 9 1 1 9 1 4 二 定位 銷 9 1 5 雷 射 台 9 1 6 ·· 雷 射 壓 住 構 件 7 〇 1 1 5 7 0 1 2 : 保 持 構 件 7 〇 1 3 7 〇 1 4 ； 垂 直 面 7 〇 3 1 7 0 3 2 ； 導 軌 7 0 3 3 ， 7 0 3 4 : 止 動 器 7 0 5 1 5 7 0 5 2 導 引 移 動 7 〇 7 1 5 7 0 8 1 ； 帶 輪 7 0 7 2 7 0 8 2 ·· 帶 輪 7 1 1 1 7 1 1 2 二 ( 皮 ) 帶 7 1 3 0 二 軸 馬 達 7 1 3 0 a 5 7 1 3 〇 b : 旋 轉 7 1 3 1 :馬達 (請先閱讀背面之注意事項再填寫本頁) # 、! 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -29- 493071 A7 B7 五、發明説明（-27- 493071 A7 B7 V. Description of the invention (25 > 67923467910 Au ow OW 1 ± IX 1 ± IX 0〇77777777777 The sub-wheel mirror drives C ·· Move body ο Ban Gong shoots 1 Guidance 7 Shoots Dada to Dama Rotate 7 7 pieces of shaft holding knot connector Γν Device perception (please read the precautions on the back before filling this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 77777777 7 8 ο 3 3 1— I CXI No. cd ο ο 3 3 Connected b Wheel 1EI ΤΠΓΤ " ο Convex IX CX1 00 4 4 4 4 5 5 ο ο ο ο 8 8 8 8 pieces Thunder frame frame tube lens, optical spring, transparent cover, spring disk. The paper size is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) -28- 493071 A7 B7 V. Description of the invention (26) Employees' Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printed 8 0 6: Adjust (use) small screws (screw 8 〇 7; base 8 1 1 8 1 4 positioning pins 8 1 5: laser table 8 1 6 laser pressing member 8 1 7 small screws (small screws ) 8 1 8: small screw 9 0 1 5 9 0 2: Lens frame 9 〇4: Fixing screws 9 0 7 ·· Base 9 1 1 9 1 4 Two positioning pins 9 1 5 Laser table 9 1 6 ·· Laser pressing member 7 〇1 1 5 7 0 1 2: holding member 7 〇 1 3 7 〇 1 4; vertical surface 7 〇 3 1 7 0 3 2; guide 7 0 3 3, 7 0 3 4: stopper 7 0 5 1 5 7 0 5 2 guide Leading movement 7 〇7 1 5 7 0 8 1 ； Pulley 7 0 7 2 7 0 8 2 ·· Pulley 7 1 1 1 7 1 1 2 Two (Leather) Belt 7 1 3 0 Two-axis motor 7 1 3 0 a 5 7 1 3 〇b: Rotate 7 1 3 1: Motor (please read the precautions on the back before filling this page) #,! This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -29 -493071 A7 B7 V. Description of the invention (
Tl· IX 0^ 0〇 〇〇 1I 2 2 2 2 2 2® 444 邊 550 接 777 下 778 抵 ， ， ， · · ， ， - : 隔部 1 CX1 00 1—_ 1—12 1—II Γ-Η Γ-Η 一―I CO rH 1—H r—I CX1 : 444455000 77777789X a 軸部 轉出 旋銷突 邊 邊端面 端一接 一 另抵 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -30-Tl · IX 0 ^ 0〇〇〇〇1I 2 2 2 2 2 2® 444 side 550 received 777 under 777 arrived,,, · · ·,,-: compartment 1 CX1 00 1— 1—12 1—II Γ- Η Γ-Η One ―I CO rH 1—H r—I CX1: 444455000 77777789X a The shaft end turns out of the rotating pin protruding edge end face one by one (please read the precautions on the back before filling this page) Economy The paper size printed by the employee's consumer cooperative of the Ministry of Intellectual Property Bureau applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -30-