CN2470821Y - Substrate testing device - Google Patents
Substrate testing device Download PDFInfo
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- CN2470821Y CN2470821Y CN01208700U CN01208700U CN2470821Y CN 2470821 Y CN2470821 Y CN 2470821Y CN 01208700 U CN01208700 U CN 01208700U CN 01208700 U CN01208700 U CN 01208700U CN 2470821 Y CN2470821 Y CN 2470821Y
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
- G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision
Abstract
The utility model relates to a substrate inspecting device which is provided with a rectangular substrate keeping mechanism, a driving mechanism and a position coordinate inspecting mechanism, whereinThe utility model relates to a substrate testing device, which comprises a rectangular substrate holding mechanism, a driving mechanism that uplifts the substrate holding mechanism to the set angle an the driving mechanism lifts the rectangular substrate keeping mechanism to a predetermined angle, and the position coordinate inspecting mechanism is arranged on the keeping mechanism along at least d a testing mechanism where at least two orthogonal directions along the side edge of the substrate are arranged to the holding mechanism to test coordinates of the location of the defected part of thtwo perpendicular directions of the side edge of a substrate and inspects the gap part of the substrate. The position coordinate inspecting mechanism is provided with two sets of guide rails facing twe substrate, wherein the testing mechanism comprises two groups of guide rails are arranged in two directions along the side edge of the substrate; the testing mechanism can move along one group of guo directions along the side edge of a substrate, light sources, a projecting part and an inspecting part, wherein the light sources can move along one set of the guide rails and emit light to a directide rails and face to the light source generating light orthogonal with the direction along which this group of guide rails are provided; with a state of crossing the substrate, the testing mechanismion perpendicular to the direction, the projecting part can move along one set of the guide rails and projects light emitted from the light sources, and the inspecting part inspects the position coord can move along one group of guide rails and lights generated from the light source is projected to a projection component; based on the light sources from each guide rails and the position on the proinates of the gap part according to light sources of each group of the guide rails and the position of the projecting part. jection component, the testing mechanism can detect coordinates of the location of the defected part of the substrate.
Description
The utility model relates to chip testing device, and this verifying attachment is used for the defective of glass substrate of test liquid crystal display (LCD) etc.
In the prior art, detect in the verifying attachment of the glass substrate defective of using among the LCD, macroscopic observation and microscopic observation can hocket.Macroscopic observation is that illumination light is incident upon glass substrate surface, from its catoptrical optical change, and the defectives such as scar of observing this glass substrate surface.Microscopic observation be with above-mentioned macroscopic observation to defect part amplify and to observe.
For example, in 5-No. 322783 communiques of Japanese kokai publication hei, disclosed the device that can carry out macroscopic observation and microscopic observation to the above-mentioned defect part that is verified substrate surface.In this device, with the X that can move horizontally in X, Y direction-the Y objective table accordingly, macroscopic observation system and microscopic observation system are set, be positioned in state on above-mentioned X-Y objective table being verified substrate, the 2 dimension directions of this X-Y objective table in X, Y direction are moved, make the check position that is verified substrate be positioned at the viewing area of macroscopic observation system or microscopic observation system, the defective that is verified substrate surface is carried out macroscopic observation or microscopic observation.
But along with the maximization of LCD, the size of glass substrate has increasing tendency recently.Therefore, during the fault detection of this large-scale dimension glass substrate, as described above, make X-Y objective table in 2 devices that move horizontally of dimension directions of X, Y direction, the moving range of X-Y objective table must be 4 times of glass substrate area, along with the maximization of glass substrate size, device also maximizes inevitably.
In addition, in the device of above-mentioned structure, owing to be verified the eyes of the surface of substrate away from the proofer, so, be difficult to the check of small scar.In addition, to obtaining of the positional information that is verified the substrate surface defective part, also difficulty relatively, so, can not carry out the defective check.
The purpose of this utility model provide a kind of realize miniaturization, can be effectively to being verified the chip testing device that substrate carries out the high precision fault detection.
For the utility model that achieves the above object is taked following technical scheme: (1) chip testing device of the present utility model, it is characterized in that, have: maintenance is verified the substrate holding mechanism of the rectangle of substrate, this substrate holding mechanism is raised up to the driving mechanism and the location coordinate testing agency of predetermined angular; Above-mentioned location coordinate testing agency is located on the above-mentioned substrate holding mechanism along 2 directions of the orthogonal at least that is verified the substrate lateral margin, is used to detect the location coordinate that is verified on-chip defective part;
Above-mentioned location coordinate testing agency has two groups of guide rails, light source, projection parts and test section;
Above-mentioned two groups of guide rails are along being verified the substrate lateral margin towards two direction settings;
Above-mentioned light source can move along one group of guide rail of the direction among above-mentioned two directions, penetrates light towards the direction with this direction orthogonal;
Above-mentioned projection parts can move along one group of guide rail of the direction among above-mentioned two directions with across the state that is verified substrate, and the light that penetrates from above-mentioned light source is incident upon on these projection parts;
Light and above-mentioned projection parts that above-mentioned test section penetrates light source are positioned on the above-mentioned defective part, according to above-mentioned light source and the projection position component of respectively organizing on the guide rail, detect the location coordinate of above-mentioned defective part.
(2) chip testing device of the present utility model is the chip testing device of above-mentioned (1) record, it is characterized in that, has with electric power to make above-mentioned projection parts along two travel mechanisms that above-mentioned one group of guide rail moves; One in these two travel mechanisms has motor; Above-mentioned each travel mechanism is by being constituted by two belt pulleys of motor driven and belt; In addition, also have the coupling shaft that one belt pulley in above-mentioned each travel mechanism is connected with each other.
(3) chip testing device of the present utility model is the chip testing device of above-mentioned (1) record, it is characterized in that, has with electric power to make above-mentioned projection parts along two travel mechanisms that above-mentioned one group of guide rail moves; Above-mentioned each travel mechanism is made of two belt pulleys and belt; Also have coupling shaft that one belt pulley in the above-mentioned travel mechanism is connected with each other and the motor that drives this coupling shaft.
(4) chip testing device of the present utility model is the chip testing device of each record in above-mentioned (1) to (3), it is characterized in that, has to make above-mentioned projection parts from being verified the mechanism of keeping out of the way that substrate keeps out of the way.
(5) chip testing device of the present utility model is each described chip testing device in above-mentioned (1) to (3), it is characterized in that, has governor motion, and this governor motion is regulated from the optical axis of the light of light source ejaculation.
(6) chip testing device of the present utility model is the chip testing device of above-mentioned (4) record, it is characterized in that, has governor motion, and this governor motion is regulated from the optical axis of the light of light source ejaculation.
Below, describe embodiment of the present utility model in detail with reference to accompanying drawing.
Fig. 1 is the stereographic map of the chip testing device structure of expression the utility model embodiment.
Fig. 2 is the outboard profile of the chip testing device structure of expression the utility model embodiment.
Fig. 3 is the vertical view of the chip testing device structure of expression the utility model embodiment.
Fig. 4 is the figure of the configuration example that sees through the line illumination in the chip testing device of expression the utility model embodiment.
Fig. 5 is the figure of the detailed construction of the maintenance seat in the chip testing device of expression the utility model embodiment.
Fig. 6 is the figure of the structure of the position detection part in the chip testing device of expression the utility model embodiment.
Fig. 7 A～Fig. 7 C is the figure of the concrete structure of LASER Light Source among expression the utility model embodiment.
Fig. 8 A～Fig. 8 C is the figure of the variation of the concrete structure of LASER Light Source among expression the utility model embodiment.
Fig. 9 is the figure of the check situation in the chip testing device of expression the utility model embodiment.
Figure 10 A～Figure 10 D is the figure that keeps out of the way mechanism of the projection plate in the chip testing device of expression the utility model embodiment.
Figure 11 A～Figure 11 D is the figure that keeps out of the way the deformation example of the projection plate in the chip testing device of expression the utility model embodiment.
Figure 12 is the figure of the driving mechanism variation among expression the utility model embodiment.
The optimal morphology that carries out an invention
Below, with reference to description of drawings embodiment of the present utility model.
Fig. 1～Fig. 3 is the figure of the chip testing device structure of expression the utility model embodiment.Fig. 1 is a stereographic map, and Fig. 2 is an outboard profile, and Fig. 3 is a vertical view.Among Fig. 1 to Fig. 3, on device body 1, be provided with the maintenance seat 2 that keeps being verified substrate 3.As shown in Figure 2, keep the base end part of seat 2 supporting, make to keep seat 2 to rotate freely with respect to device body 1 by bolster 15.Around bolster 15, be provided with belt pulley 16.On device body 1, have motor 18, on the turning axle 181 of this motor 18 and belt pulley 16 around the belt 17 of ring-type.The rotary driving force of motor 18 is delivered to belt pulley 16 from turning axle 181 by belt 17, can make to keep seat 2 to be axle, to arrive the double dotted line position from horizontality with bolster 15, can be so that its inclination rises to predetermined angle theta.
Keeping seat 2 is frame shapes, the large-scale substrates 3 that are verified such as glass substrate that keeping LCD to use with its circumference mounting.In keeping seat 2, the empty portion that is surrounded by its circumference is square, and the area of this sky portion is slightly littler than the area that is verified substrate 3.Keeping disposing substrate positioning element 201 along its circumference in X-direction and Y direction on the seat 2, this substrate positioning element 201 is made of some cylindric pins, protrudes in slightly to keep seat 2 surfaces.On maintenance seat 2, contact with the sidepiece of each substrate positioning element 201 by making two limits that are verified substrate 3, make to be verified substrate 3 location.In addition, from not showing some holes (absorption layer) along the figure that keeps seat 2 full circumference settings, the circumference that the attractor that does not show with figure will be verified substrate 3 is adsorbed on the surface that keeps seat 2, like this, is verified substrate 3 and just is not maintained in the maintenance 2 with coming off.Will be explained below about the detailed construction that keeps seat 2.
As shown in Figure 1 to Figure 3, on device body 1,, disposing the pair of guide rails 4,4 of extending abreast towards the Y direction along the both side edges that keeps seat 2.Above maintenance seat 2, disposing door pillar type observation unit support 5 across this maintenance seat 2.This observation unit support 5 can be verified above the substrate 3, promptly above the maintenance seat 2 of horizontality shown in the solid line, move in Y direction in Fig. 1 along guide rail 4,4.
Local macroscopical lighting source 10 is used for macroscopic observation, with the part that is verified substrate 3 surfaces on macroscopical illumination light 101 illumination levels states maintenance seat 2.In addition, local macroscopical lighting source 10 is adjustable as the angle that is suitable for macroscopic observation most with respect to the light angle that is verified substrate 3 surfaces.
Fig. 4 represents the configuration example of transmitted light lighting source 7.As shown in Figure 4, transmitted light lighting source 7 has light source portion 71 and solid glass rod 72.From the light of plate 712 scattered reflections that are reflected after light source 71 penetrates, incide the end of glass rod 72, in glass rod 72, transmitted by total reflection, simultaneously, spread by white stripes 73 along the back (bottom) of glass rod 72, like this, by the lensing of glass rod 72, Line of light penetrates upward.The illumination of this transmitted light is not limited to above-mentioned structure, for example, and also can be with the light illumination of fluorescent lamp etc.
Fig. 5 is the figure of maintenance seat 2 detailed construction in this chip testing device of expression.Among Fig. 5, annotate with same tag with part identical among Fig. 1.Among Fig. 5, the Y direction two sides keeping seat 2 are installed with holding member 7011,7012 respectively.Side in the X-direction that keeps seat 2 is installed with holding member 702.The surface of retaining part 7011,7012,702 is positioned at the below, forms step with respect to the surface that keeps seat 2.On holding member 7011,7012, be respectively equipped with guide rail 7031,7032 along the Y direction that keeps seat 2 lateral margins.In addition, guiding moving part 7051,7052 strides across guide rail 7031,7032 ground respectively and can move along leading uncle (mother's brother) 7031,7032.On holding member 702, be provided with guide rail 704 along the X-direction that keeps seat 2 lateral margins.Guiding moving part 706 strides across guide rail 704 ground and can move along guide rail 704.
At each both ends of holding member 702, axle is propping up belt pulley 709,710 respectively.Belt 712 is in the form of a ring on belt pulley 709 and belt pulley 712.On the part of belt 712, engaging guiding moving part 706.On belt pulley 710, the turning axle 716 of motor 714 in intercalation.In a side of the X-direction that keeps seat 2, be provided with and be used to detect the optical sensor 719,720 whether guiding moving part 706 exists.
On guiding moving part 706, stand and establishing the reflecting body (catoptron) 707 of Y direction, this reflecting body 707 meets at right angles or acute angle with respect to being verified substrate 3 surfaces.Crossover location in holding member 7011 and 702 is provided with and the holding member 721 that keeps the same approximately height of seat 2.On holding member 721, on the extended line of guide rail 704, be provided with LASER Light Source 21 described later.
At the both ends of each vertical plane 7013,7014 of holding member 7011,7012, axle is propping up belt pulley 7071,7081 and belt pulley 7072,7082 respectively.Belt 7111 is in the form of a ring on belt pulley 7071 and belt pulley 7081.Belt 7112 is in the form of a ring on belt pulley 7072 and belt pulley 7082.On each part of belt 7111,7112, engaging guiding moving part 7051,7052 respectively.On belt pulley 7071, the turning axle 7131 of motor 713 in intercalation.In a side of the Y direction that keeps seat 2, be provided with and be used to detect the optical sensor 717,718 whether guiding moving part 7051 exists.Bottom keeping seat 2 is setting coupling shaft 730.The both ends of this coupling shaft 730, intercalation is on belt pulley 7081 and belt pulley 7082 respectively.
On the side by maintenance seat 2 sides of guiding moving part 7051,7052, as described later, axle is propping up rotating pillar 741,742 respectively.At each napex of these pillars 741,742, the both ends of the projection plate 743 of long strip-board shape are installed.The surface of projection plate 743 for example is black, and is verified substrate 3 surfaces relatively and tilts 45 ° approximately, the direction of orientating reflex body 707.At this moment, pillar 741,742 is erectilities with respect to being verified substrate 3 surfaces.
Along with the same moved further of guiding moving part 7051 and 7052, projection plate 743 leaves predetermined gap and parastate with its surface with respect to being verified substrate 3, moves towards Y direction.In addition, near the guide rail 7031 holding member 721 by keeping seat 2 one sides, as described later, fixing the guiding part 744 that pillar 741 is rotated.
When sensor 717 or 718 detects guiding moving part 7051 when existing, the driving of motor 713 is stopped automatically by control part 11.That is, guiding moving part 7051 only moves back and forth in the interval on the guide rail 7031 of 717,718 of corresponding and sensors.Similarly, when sensor 719 or 720 detects guiding moving part 706 when existing, the driving of motor 714 is stopped automatically by control part 11.That is, guiding moving part 706 only moves back and forth in the interval on the guide rail 704 of 719,720 of corresponding and sensors.
Be installed in the holding member 702 that keeps seat 2 base end parts, as shown in Figure 2, supporting, can rotate with respect to device body 1 by bolster 15.Therefore, can will keep seat 2 shown in double dot dash line among Fig. 2, to rise to predetermined angular or make it make wobbling action.
Control part 11 shown in Fig. 1 manages the location coordinate (X, Y) that is verified the defective part on the substrate 3 and the location coordinate of observation unit support 5 and observation unit 6.The location coordinate of above-mentioned defective part (X, Y) does not show that by the figure that is provided with along guide rail 704,7031 respectively guiding scale detects, and the location coordinate of above-mentioned observation unit support 5 and observation unit 6 is detected by Y scale 13 and X scale 14.These control part 11 control charts do not show each driving mechanism moving observation unit support 5 and observation unit 6.In addition, control part 11 does not show index in the reservoir with the figure that the interval X0 of the optical axis of the optical axis of lighting source 8 and object lens 91 is stored in it in advance as shown in Figure 2.Moving of control part 11 controlled observation unit bearing portions 5 and observation unit 6 makes the observation axle of the object lens 91 in the microscopic observation unit 9 with above-mentioned respectively to guide the location coordinate that is verified defective part on the substrate 3 (X, Y) that scale provides consistent.
In addition, be centered close to the state that is verified defective part on the substrate 3 in index with the bright spot of lighting source 8, when the proofer provides predetermined indication to input part 111, control part 11 does not show the detected location coordination data of detection from the figure of Y scale 13 and X scale 14, ask the location coordinate of above-mentioned defective part, according to this location coordinate of trying to achieve and expression index data with interval X0 between the optical axis of the optical axis of lighting source 8 and object lens 91, moving of controlled observation unit bearing portion 5 and observation unit 6 makes the observation axle of object lens 91 consistent with defective part on being verified substrate 3.
Fig. 6 is the figure of the position probing cage structure in this chip testing device of expression.Among Fig. 6, the part identical with Fig. 5 annotated with same tag.This position detection part is made of LASER Light Source 21 and reflecting body (catoptron) 707.LASER Light Source 21 is made of LASER Light Source portion 211 and cylindrical lens 212,213.Reflecting body 707 reflects the laser that LASER Light Source portion 211 sends to Y direction.Reflecting body 707 with respect to be verified that substrate 3 surfaces meet at right angles or acute angle stand and establishing.
Having sent and seen through the laser of cylindrical lens 212,213 from the LASER Light Source portion 211 of light source 21, is approximately perpendicular to the planar laser that is verified substrate 3 surfaces, penetrates towards X-direction.This laser body 707 that is reflected is Y direction reflection towards right angle orientation, becomes vertical planar laser 750 with respect to being verified substrate 3 surfaces, is projected onto on the inclined surface of projection plate 743.
Fig. 7 A, Fig. 7 B, Fig. 7 C are the figure of the concrete structure of expression LASER Light Source 21 shown in Figure 6.Fig. 7 A is a vertical view, and Fig. 7 B is the A-A line sectional drawing (central authorities) among Fig. 7 A, and Fig. 7 C is the B-B line sectional drawing among Fig. 7 A.Cylindrical lens 213 is inlaid on the interlocking face 8011 of picture frame 801.Cylindrical lens 212 is embedded on the interlocking face 8021 of picture frame 802.Cone 803 inserts picture frame 801, and the primary screw that does not show with figure is fixed on the picture frame 801.Spring 805 is installed on the picture frame 802, and picture frame 802 usefulness adjusting screw 806 are fixed on the picture frame 801.
On foundation plate 807, stand and establishing some register pins 811～814.By register pin 811,812 guidings, picture frame 801,802 is fixed on the foundation plate 807.In addition, by register pin 813,814 guidings, laser station 815 is fixed on the foundation plate 807.LASER Light Source portion 211 is fixed on the laser station 815 by laser push part 816.Foundation plate 807 is fixed on the holding member shown in Figure 5 721.
When regulating the optical axis of laser, on one side the proofer makes LASER Light Source 211 send laser, on one side pad is put into picture frame 801 below, make the optical axis of 212,213 on adjusting lens of optical axis with reversing, with primary screw 817 picture frame 801 is fixed on the foundation plate 807.Then, the proofer makes picture frame 803 front and back moving with adjusting screw 806, regulates the optical axis distance of 212,213 on lens, with primary screw 818 picture frame 803 is fixed on the foundation plate 807.
Fig. 8 A, Fig. 8 B, Fig. 8 C are the figure of the concrete structural deformation example of expression LASER Light Source 21 shown in Figure 6.Fig. 8 A is a vertical view, and Fig. 8 B is the A-A line sectional drawing (central authorities) among Fig. 8 A, and Fig. 8 C is the B-B line sectional drawing among Fig. 8 A.Cylindrical lens 213 is inlaid on the interlocking face 9011 of picture frame 901.Cylindrical lens 212 is inlaid on the interlocking face 9021 of picture frame 902.Picture frame 901 inserts picture frame 902, is fixed on the picture frame 902 with primary screw 904.
On foundation plate 907, stand and establishing some register pins 911～914.By register pin 911,912 guidings, picture frame 901,902 is fixed on the foundation plate 907.In addition, by register pin 913,914 guidings, laser station 915 is fixed on the foundation plate 907.LASER Light Source portion 211 is fixed on the laser station 915 by laser push part 916.Foundation plate 907 is fixed on the holding member shown in Figure 5 721.
When regulating the optical axis of laser, on one side the proofer makes 211 ones of LASER Light Source send laser, Yi Bian regulate the position of picture frame 901 with primary screw 904.At this moment, the proofer makes optical axis not regulate the optical axis of 212,213 on lens with reversing, regulates the optical axis distance of 212,213 on lens simultaneously, makes laser become directional light.The proofer is fixed on picture frame 901 on the picture frame 902 with primary screw 904 then.
In the LASER Light Source before, the optics that is used to constitute directional light is whole processing, so can not regulate the distance between lens.In addition, produce the problem that optical axis is reversed because of the embedding of the lens mode of pasting.Like this, laser is by behind the cylindrical lens 212,213, and spread or bring together, or distortion and produce distortion.
The lens frame of embedding being pasted lens is cut apart, and the optical axis between adjustable lens reverses and optical axis distance, makes the optical axis of 212,213 of cylindrical lens not reverse distance between adjustable lens.Passed through the laser behind the cylindrical lens 212,213, become parallel and do not have the laser that reverses.
Fig. 9 is the figure of the check situation in this chip testing device of expression.As shown in Figure 9, above device body 1, be provided with comprehensive macroscopical lighting source 30,30 irradiations of this light source keep on the seat 2 be verified substrate 3 comprehensively.This comprehensive macroscopical lighting source 30 is made of the catoptron 32 that is disposing in opposite directions as the metal halide lamp 31 of pointolite, with this metal halide lamp 31, the Fresnel Lenses 33 that is configured in catoptron 32 belows.Catoptron 32 tilts about 45 ° with respect to device body 1, and reflection is delivered to Fresnel Lenses 33 from the light of metal halide lamp 31.Fresnel Lenses 33 becomes the light of catoptron 32 reflection as shown in figure and brings light together, shine keep on the seat 2 to be verified substrate 3 comprehensive.As shown in Figure 1, on device body 1, be provided with the Y scale 13 of the Y direction location coordinate that is used to detect observation unit support 5, on observation unit support 5, be provided with the X scale 14 of the X-direction location coordinate that detects observation unit 6.
The following describes the action of this chip testing device of above-mentioned structure.At first, when being verified the macroscopic observation on substrate 3 surfaces, the proofer sends predetermined indication from input part 111 to control part 11, by the drive controlling of control part 11, makes observation unit support 5 retreat into primary position shown in Figure 1.Then, the proofer is being verified on the maintenance seat 2 that substrate 3 supplies to horizontality.At this state, will be verified substrate 3 and be pressed against on some substrate positioning elements 201 and position.Simultaneously, attract to maintain to be verified substrate 3, make it, begin fault detection with macroscopic observation not from keeping seat 2 to come off with above-mentioned attractor.
Below, illustrate with the macroscopic view illumination be verified the situation of summing up macroscopic observation of substrate 3 comprehensively.During this comprehensive macroscopic observation, the proofer starts motor shown in Figure 2 18, by turning axle 181 and belt 17, make bolster 15 rotation by belt pulley 16, make that to keep seat 2 be the center with this bolster 15, predetermined oblique angle θ, preferably tilt after 30～45 °, stop motor 18, make to keep seat 2 static.Then, the proofer lights metal halide lamp shown in Figure 9 31, make from the light of metal halide lamp 31 by catoptron 32 and Fresnel Lenses 33 become bring light together after, shine keep on the seat 2 to be verified substrate 3 comprehensive.At this state, the proofer is visual to keep being verified substrate 3 on the seat 2, is verified the fault detection of scar on the substrate 3 and stain etc.In addition, not only can carry out fault detection, also can control with control part 11 keeping seat 2 predetermined oblique angle and static state, the sense of rotation of motor 18 is changed periodically, and to keep seat 2 be that the center is swung in preset range and carried out fault detection with bolster 15 while make.At this moment, because it is variable to incide the incident angle that is verified in the substrate 3 from the irradiates light of metal-halide lamp 31, so available irradiates light from various angle incidents is observed and is verified substrate 3.
The proofer as illustrated in fig. 9, on the surface that the state macroscopic view irradiation that keeps seat 2 to rise to predetermined angular is verified substrate 3, in this macroscopic observation, when identifying the defective part a that is verified on the substrate 3, operation aforesaid operations portion (operating rod), CD-ROM drive motor 714 makes turning axle 716 towards a direction or other direction rotation, makes a direction or the other direction action of belt 712 towards X-axis by belt pulley 710,709.Like this, the reflecting body 707 on the guiding moving part 706 is moved along guide rail 704, make laser 750 consistent with defective part a with respect to the defective part a that is verified on 3 of the substrates.
In addition, the proofer operates aforesaid operations portion, and CD-ROM drive motor 713 makes turning axle 7131 towards a direction or other direction rotation, makes a direction or the other direction action of belt 7111 towards Y-axis by belt pulley 7071,7081.Like this,, pillar 741 and projection plate 743 are moved along guide rail 7031 with guiding moving part 7051 with respect to the defective part a that is verified on 3 of the substrates,, make the bottom 7431 of projection plate 743 consistent with defective part a.At this moment, along with the rotation of belt pulley 7081, by coupling shaft 730, belt pulley 7082 and belt pulley 7081 equidirectional rotations, by belt pulley 7072,7082, belt 7112 and belt 7111 equidirectional actions.That is, guiding moving part 7051 and 7052 synchronously moves towards the equidirectional of Y-axis, so projection plate 743 total maintenances state parallel with X-axis moves towards Y direction.
During the given defect position, also can after making projection plate 743 and defective part a is consistent, make laser 750 unanimities with on the contrary above-mentioned.
Then, the proofer connects above-mentioned foot-switch.So, at this moment, the figure that is provided with along guide rail 7031,704 does not show the value of respectively guiding scale, promptly throws addendum modification and reflecting body 707 the addendum modification from predetermined initial point towards X-direction of plate 743 from predetermined initial point towards Y direction, location coordinate (X, Y) as defective part a is not shown that by the above-mentioned figure that respectively guides scale each test section detects, and this testing result is input to control part 11 from above-mentioned each test section.
Then, the proofer is when identifying the defective part that is verified on the substrate 3, and the data of each location coordinate (X, Y) of each defective part are represented in same repeatedly action, and Be Controlled portion 11 is taken into and stores.The proofer restarts motor 18 to after being verified substrate 3 and having finished above-mentioned macroscopic observation comprehensively, by turning axle 181 and belt 17, by belt pulley 16 make bolster 15 towards with above-mentioned opposite direction rotation, will keep seat 2 to return initial horizontality.After above-mentioned macroscopic observation finishes, carried out following projection plate 743 keep out of the way action after, carry out microscopic observation.
Figure 10 A～Figure 10 D is the figure that keeps out of the way mechanism of expression projection plate 743.Figure 10 A is the vertical view of guiding moving part 7051 parts, and Figure 10 B is its outboard profile, and Figure 10 C is the vertical view of guiding part 744 parts, and Figure 10 D is its outboard profile.Make in the action consistent of projection plate 743 above-mentioned with defective part a, shown in Figure 10 A, Figure 10 B, pillar the 741, the 742nd, upright state throws plate 743 and is positioned at the top that is verified substrate 3 with 45 ° the state of tilting approximately.In addition, pillar 741,742 is rotatably supported on the guiding moving part 7051,7052 by turning axle 7411,7412 (figure does not show) respectively.
Shown in solid line among Fig. 1, be horizontal state keeping seat 2, when carrying out microscopic observation, do not collide projection plate 743 in order to make object lens 91 with microscopic observation unit 9, projection plate 743 is kept out of the way from being verified substrate 3.At this moment, the operator operates above-mentioned operating portion, CD-ROM drive motor 713, guiding moving part 7051,7052 is moved towards holding member 702 directions, when the guiding part 744 shown in pillar 741 arrival Figure 10 C, shown in Figure 10 D, the jut of pillar 741 bottoms is slowly pushed away toward the top along the inclined-plane 7441 of guiding part 744.Thereupon, pillar 741,742 rotates around turning axle 7411,7412 respectively, becomes the state parallel with being verified substrate 3 at last.At this moment, pillar 741,742 is received in the extension in the space that keeps 704 on seat 2 and guide rail, becomes the state of keeping out of the way, so, be positioned at and keep 2 below.Like this, during microscopic observation, object lens 91 do not collide projection plate 743.
Figure 11 A～Figure 11 D is the figure of the variation of keeping out of the way mechanism of expression projection plate 743.Figure 11 A is a vertical view, and Figure 11 B is a front view (FV), and Figure 11 C, Figure 11 D are outboard profiles.Pillar 741,742 is rotatably supported on the guiding moving part 7051,7052 by turning axle 7411,7412 respectively.Around turning axle 7411,7421, the volute spring 751,752 of reeling respectively.
One dististyle 7511,7521 of volute spring 751,752 is bonded on the top, the inside of guiding moving part 7051,7052 respectively.Another dististyle 7512,7522 of volute spring 751,752 respectively to become 90 ° state approximately with respect to a dististyle 7511,7521, is stuck on the pin 7412 (figure does not show), 7422, and this pin 7412,7422 is darted at the below sidepiece of pillar 741,742.In addition, at the inner side surface of guide rail 7031,7032, axle is propping up rotatable cylindric block 7033,7034 respectively.
Shown in Figure 11 A to Figure 11 C, when pillar 741,742 was erectility, the pushing force of volute spring 751,752 acted on the pillar 741,742 by pin 7412 (figure does not show), 7422 respectively.
From this state, when projection plate 743 was kept out of the way from being verified substrate 3, the operator operated aforesaid operations portion, and CD-ROM drive motor 713 makes guiding moving part 7051,7052 move towards holding member 702 directions.When pillar 741,742 arrives block 7033,7034, shown in Figure 11 D, the teat 7413,7423 of pillar 741,742 belows respectively along the curved surface of block 7033,7034 by at leisure toward the top pushing.Thereupon, pillar 741,742 is resisted the pushing force of volute spring 751,752 respectively, rotates around turning axle 7411,7421, becomes the state parallel with being verified substrate 3 at last.At this moment, each dististyle 7511,7521 and another dististyle the 7512, the 7522nd, parallel approximately state of volute spring 751,752.
Below, the situation of carrying out microscopic observation with microscopic observation unit 9 is described detected each defective part of above-mentioned macroscopic observation.At first, read the location coordinate (X, Y) that is stored in the defective part in the above-mentioned storer by control part 11, then, observation unit support 5 and observation unit 6 do not show that along guide rail 4,4 and the above-mentioned figure of X guide rail moves, and the observation axle of the object lens 91 in the microscopic observation unit 9 and this location coordinate (X, Y) are coincide.
Like this, the proofer spies on the eyepiece 92 of microscopic observation unit 9, and available microscope microscopic observation is verified defective part on the substrate 3 by what object lens 91 obtained.In addition, by the defective part that is verified substrate 3 surfaces that objective lens 91 obtains, by 93 shootings of TV camera, this picture shows that on TV Monitor 12 proofer sees that picture can carry out microscopic observation.
Chip testing device according to present embodiment, make the maintenance seat 2 that is keeping being verified substrate 3 be the center rotation with bolster 15 and rise to predetermined angular, the proofer can tilt near the position of eyes and the angle of seeing defective easily being verified substrate 3, be subjected to visual examination, so available posture is easily carried out high-precision visualize.In addition, no matter keep seat 2 to rise to which kind of angle, also rise with the location coordinate test section that keeps seat 2 one, so, no matter be verified substrate 3 and tilt to which kind of angle, can both detect defective locations exactly.In addition, by laser 750 being projected on the projection plate 743, laser indicator point is reflection on projection plate 743 clearly, so, the available visual defective locations of easily aiming at.
In addition, the guiding moving part 7051,706 that constitutes the location coordinate test section is driven by electricity, so the proofer operates aforesaid operations portion, can control the action of reflecting body 707 and projection plate 743 on hand.Like this, in that check is large-scale when being verified substrate, make laser and throw plate 743 consistent with defective part, even to defective part away from the proofer, also extracting position information easily.
In addition, by be verified on 3 of the substrates observation unit support 5 with respect to keep seat 2 along a direction move and with the moving of the observation unit 6 of the moving direction orthogonal direction of observation unit support 5, observation unit 6 is moved to be verified any position on the substrate 3.Like this, can make the identical approximately size of area that keeps seat 2, can realize the miniaturization of chip testing device, and also reduce the area that is provided with of substrate verifying attachment significantly with the area that is verified substrate 3.
In addition, in order to drive guiding moving part 7051,7052 and projection plate 743, also can adopt the snap head bolt or the linear motor of band guide member.In addition, also can adopt the light source of the parallel beam that sends the such light type of LED, also this light source can be installed on the guiding moving part 706 to replace reflecting body 707.In addition, it is rectangular plate that projection plate 743 is not limited to, and also can be the wire rod or the triangle cylindricality body of rod, as long as the slit light or the some light of energy projection laser etc.
In the structure of above-mentioned Fig. 5, motor 713 is mounted on the belt pulley 7071, still, also can as shown in figure 12 two motors 7130 be installed on the coupling shaft 730.One side's turning axle 7130a of two motors 7130 is connected with side's coupling shaft 730a by the 1st cam 730a, and the opposing party's turning axle 7130b is connected with the opposing party's coupling shaft 730b by the 2nd cam 730d.
According to this structure, drive two motors 7130, make belt pulley 7081,7082 towards equidirectional rotation by coupling shaft 730a, 730b, make belt 7111,7112 towards equidirectional action.Like this, can make guiding moving part 7051,7052 same more accurately moved further.
The utlity model has following effect.
(1) according to chip testing device of the present utility model, because the proofer can be verified the macroscopic examination of substrate in the position near eyes, so, available posture is easily carried out fault detection, no matter which kind of angle substrate holding mechanism rises to, because also raised with the location coordinate testing agency of substrate holding mechanism one, so, no matter be verified substrate and tilt to which kind of angle, can detect defective locations exactly.Particularly, consistent with defective part by making light and throwing parts in that check is large-scale when being verified substrate, even for defective part away from the proofer, also extracting position information easily.In addition, can make the area and the same approximately size of the area that is verified substrate of substrate holding mechanism, can realize the miniaturization of chip testing device, also reduce the area that is provided with of chip testing device simultaneously significantly.
(2) according to chip testing device of the present utility model, two belt pulleys that connecting by coupling shaft are towards equidirectional rotation, and two belts are towards equidirectional action, so, two travel mechanisms synchronously move towards equidirectional, throw parts like this and are always keeping parastate to move.
(3) according to chip testing device of the present utility model, during microscopic observation, the projection parts are kept out of the way from being verified substrate, the microscopic observation parts do not collide the projection parts.
The utility model is not limited to the foregoing description, can do suitable distortion in the scope that does not change main idea.
Industrial applicibility
According to chip testing device of the present utility model, can realize miniaturization, can be effective Ground carries out the defective check to being verified substrate.
Claims (6)
1. chip testing device, it is characterized in that, have: maintenance is verified the substrate holding mechanism of the rectangle of substrate, this substrate holding mechanism is raised up to the driving mechanism and the location coordinate testing agency of predetermined angular, above-mentioned location coordinate testing agency is located on the above-mentioned substrate holding mechanism along 2 directions of the orthogonal at least that is verified the substrate lateral margin, be used to detect the location coordinate that is verified on-chip defective part
Above-mentioned location coordinate testing agency has: projection parts and test section;
Along being verified two groups of guide rails that the substrate lateral margin is provided with towards two directions;
Light source, it can move along one group of guide rail of the direction among above-mentioned two directions, penetrates light towards the direction with this direction orthogonal;
The projection parts, it can move along one group of guide rail of the direction among above-mentioned two directions with across the state that is verified substrate, and the light that penetrates from above-mentioned light source is incident upon on these projection parts;
Test section, its light and above-mentioned projection parts that light source is penetrated are positioned on the above-mentioned defective part, according to above-mentioned light source and the projection position component of respectively organizing on the guide rail, detect the location coordinate of above-mentioned defective part.
2. chip testing device as claimed in claim 1 is characterized in that having:
Make above-mentioned projection parts along two travel mechanisms that above-mentioned one group of guide rail moves with electric power; One in these two travel mechanisms has motor; Above-mentioned each travel mechanism is by being constituted by two belt pulleys of motor driven and belt; In addition, also have the coupling shaft that one belt pulley in above-mentioned each travel mechanism is connected with each other.
3. chip testing device as claimed in claim 1 is characterized in that having:
Make above-mentioned projection parts along two travel mechanisms that above-mentioned one group of guide rail moves with electric power; Above-mentioned each travel mechanism is made of two belt pulleys and belt; Also have coupling shaft that one belt pulley in the above-mentioned travel mechanism is connected with each other and the motor that drives this coupling shaft.
4. as each described chip testing device in the claim 1 to 3, it is characterized in that, have and make above-mentioned projection parts from being verified the mechanism of keeping out of the way that substrate keeps out of the way.
5. as each described chip testing device in the claim 1 to 3, it is characterized in that, have governor motion, this governor motion is regulated from the optical axis of the light of light source ejaculation.
6. chip testing device as claimed in claim 4 is characterized in that, has governor motion, and this governor motion is regulated from the optical axis of the light of light source ejaculation.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000268945A JP2002082067A (en) | 2000-09-05 | 2000-09-05 | Substrate inspecting device |
| JP268945/2000 | 2000-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2470821Y true CN2470821Y (en) | 2002-01-09 |
Family
ID=18755644
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN01208700U Expired - Fee Related CN2470821Y (en) | 2000-09-05 | 2001-03-26 | Substrate testing device |
| CNB011120509A Expired - Fee Related CN1179206C (en) | 2000-09-05 | 2001-03-26 | Chip testing device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011120509A Expired - Fee Related CN1179206C (en) | 2000-09-05 | 2001-03-26 | Chip testing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2002082067A (en) |
| KR (1) | KR100885560B1 (en) |
| CN (2) | CN2470821Y (en) |
| TW (1) | TW493071B (en) |
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- 2000-09-05 JP JP2000268945A patent/JP2002082067A/en active Pending
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- 2001-03-19 TW TW090106381A patent/TW493071B/en not_active IP Right Cessation
- 2001-03-21 KR KR1020010014503A patent/KR100885560B1/en not_active IP Right Cessation
- 2001-03-26 CN CN01208700U patent/CN2470821Y/en not_active Expired - Fee Related
- 2001-03-26 CN CNB011120509A patent/CN1179206C/en not_active Expired - Fee Related
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20020019376A (en) | 2002-03-12 |
| TW493071B (en) | 2002-07-01 |
| CN1179206C (en) | 2004-12-08 |
| CN1341853A (en) | 2002-03-27 |
| KR100885560B1 (en) | 2009-02-24 |
| JP2002082067A (en) | 2002-03-22 |
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